Optical Metrology Third Edition h=U 4 B+Bv(p Kjell J. G˚asvik
(@#Lk"B Spectra Vision AS, Trondheim, Norway
w6yeX<!ll
h n]6he #62ww-E~ Preface to the Third Edition xi
dk]ro~ [ 1Basics 1
T6,lk1S'= 1.1 Introduction 1
nm~ 1.2 Wave Motion. The Electromagnetic Spectrum 1
U D(#u3z 1.3 The Plane Wave. Light Rays 3
2bC%P})m 1.4 Phase Difference 4
a$|u!_)!h 1.5 Complex Notation. Complex Amplitude 5
d!X?R} 1.6 Oblique Incidence of A Plane Wave 5
UCWU|r<s, 1.7 The Spherical Wave 7
E<4}mSn) 1.8 The Intensity 8
#3$|PM7,_ 1.9 Geometrical Optics 8
1&As:kv5I 1.10 The Simple Convex (Positive) Lens 10
>k jJq]A2 1.11 A Plane-Wave Set-Up 11
Dm^kuTIG 2 Gaussian Optics 15
"O
'I 2.1 Introduction 15
+]zP $5_e 2.2 Refraction at a Spherical Surface 15
6qDD_:F 2.2.1 Examples 19
%jf gncW 2.3 The General Image-Forming System 19
'ng/A4 2.4 The Image-Formation Process 21
od fu7P_ 2.5 Reflection at a Spherical Surface 23
_L72Ae(_ 2.6 Aspheric Lenses 25
igL^k`&5^" 2.7 Stops and Apertures 26
=>J#_Pprn 2.8 Lens Aberrations. Computer Lens Design 28
)5v .9N6v 2.9 Imaging and The Lens Formula 29
Qw-qcG 2.10 Standard Optical Systems 30
s#fmGe"8 2.10.1 Afocal Systems. The Telescope 30
f$'D2o, O 2.10.2 The Simple Magnifier 32
K7Vr$,p 2.10.3 The Microscope 34
aKy|$
{RC 3 Interference 37
Ne EV!V8 3.1 Introduction 37
A~>=l= 3.2 General Description 37
HXQrtJ 3.3 Coherence 38
=R"tnjR 3.4 Interference between two Plane Waves 41
i5" q1dRQ 3.4.1 Laser Doppler Velocimetry (LDV) 45
qsRh ihPX 3.5 Interference between other Waves 46
QMY4%uyY! 3.6 Interferometry 49
8(;i~f:bCW 3.6.1 Wavefront Division 50
IA4(^-9 3.6.2 Amplitude Division 51
p'4P2 3.6.3 The Dual-Frequency Michelson Interferometer 54
"LWuN> 3.6.4 Heterodyne (Homodyne) Detection 55
_JDr?Kg 3.7 Spatial and Temporal Coherence 56
Jx< 3.8 Optical Coherence Tomography 61
.#J3UZ 4 Diffraction 67
QAwj]_ 4.1 Introduction 67
Zv\b`Cf} 4.2 Diffraction from a Single Slit 67
Y5CE#& 4.3 Diffraction from a Grating 70
LNE[c 4.3.1 The Grating Equation. Amplitude Transmittance 70
(I.`bR 4.3.2 The Spatial Frequency Spectrum 73
xW4+)F5P( 4.4 Fourier Optics 75
e8 aV
qq[ 4.5 Optical Filtering 76
"tARJW 4.5.1 Practical Filtering Set-Ups 78
cFvx*n 4.6 Physical Optics Description
WU\bJ} of Image Formation 81
z;fSd 4.6.1 The Coherent Transfer Function 83
*% *^a\2 4.6.2 The Incoherent Transfer Function 85
Sq,ty{j2% 4.6.3 The Depth of Focus 88
gi>_>zStv 4.7 The Phase-Modulated Sinusoidal Grating 89
B vc=gW 5 Light Sources and Detectors 99
bn35f<+ 5.1 Introduction 99
zOdKB2_J7 5.2 Radiometry. Photometry 99
>JOvg*a?" 5.2.1 Lambertian Surface 102
<UdD@(iZ# 5.2.2 Blackbody Radiator 103
jYz3(mM'J 5.2.3 Examples 105
a6E" 5.3 Incoherent Light Sources 108
GcCs}(eo 5.4 Coherent Light Sources 109
G |^X:+ 5.4.1 Stimulated Emission 109
I "2FTGA 5.4.2 Gas Lasers 112
w"i Zn 5.4.3 Liquid Lasers 114
fZfiiE~7J 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
nj`qV 5.4.5 Solid-State Lasers 117
E5{)d~q 5.4.6 Other Lasers 119
x?'% .
2*YXm>|1 .
VH6|(=8 .