Optical Metrology Third Edition H|JPqBNRh G)t_;iNL| Kjell J. G˚asvik
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Lyo!}T 5$$ Yc e=k Preface to the Third Edition xi
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nA 1Basics 1
4 z%::? 1.1 Introduction 1
_UI*W&* 1.2 Wave Motion. The Electromagnetic Spectrum 1
hg4 d]R, 1.3 The Plane Wave. Light Rays 3
H{hd1 1.4 Phase Difference 4
h}0}g]IUx 1.5 Complex Notation. Complex Amplitude 5
C.4r`F$p 1.6 Oblique Incidence of A Plane Wave 5
<;kcy :s 1.7 The Spherical Wave 7
![1+=F ! 1.8 The Intensity 8
Z(F['Zf 1.9 Geometrical Optics 8
}:+SA 1.10 The Simple Convex (Positive) Lens 10
&rs 1.11 A Plane-Wave Set-Up 11
71b0MHNkvv 2 Gaussian Optics 15
8z1 #Q#5 2.1 Introduction 15
J'}G~rB<< 2.2 Refraction at a Spherical Surface 15
#!?jxfsFa 2.2.1 Examples 19
2S,N9 (7 2.3 The General Image-Forming System 19
5ir
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! $n@- 2.5 Reflection at a Spherical Surface 23
X(Z~oGyg 2.6 Aspheric Lenses 25
&X3G;x2; 2.7 Stops and Apertures 26
RD6n1Wb(@ 2.8 Lens Aberrations. Computer Lens Design 28
HKp|I%b]J 2.9 Imaging and The Lens Formula 29
nw S @r 2.10 Standard Optical Systems 30
`)~]3zmG 2.10.1 Afocal Systems. The Telescope 30
Z=ZTSl 2.10.2 The Simple Magnifier 32
QQI,$HId 2.10.3 The Microscope 34
Fc&3tw"g 3 Interference 37
qTZ\;[CrP" 3.1 Introduction 37
Ms=5*_J2Jk 3.2 General Description 37
=M6Ph% 3.3 Coherence 38
]y0 bgKTK 3.4 Interference between two Plane Waves 41
,ArH S 3.4.1 Laser Doppler Velocimetry (LDV) 45
X8 $Y2?< 3.5 Interference between other Waves 46
&u+l`F^Z 3.6 Interferometry 49
TW?_fse*[ 3.6.1 Wavefront Division 50
baQO RU= X 3.6.2 Amplitude Division 51
\+ M6R<Qw 3.6.3 The Dual-Frequency Michelson Interferometer 54
Xfc+0 $U@ 3.6.4 Heterodyne (Homodyne) Detection 55
6.Jvqn 3.7 Spatial and Temporal Coherence 56
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3.8 Optical Coherence Tomography 61
2t7P| b~V1 4 Diffraction 67
@vZeye 4.1 Introduction 67
=cR"_ Z[8X 4.2 Diffraction from a Single Slit 67
D ~ogq] 4.3 Diffraction from a Grating 70
Yj CH KI"e 4.3.1 The Grating Equation. Amplitude Transmittance 70
4bs<j 4.3.2 The Spatial Frequency Spectrum 73
-=cxUDB 4.4 Fourier Optics 75
!n7'T M ' 4.5 Optical Filtering 76
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!I 4.5.1 Practical Filtering Set-Ups 78
6o0 }7T%6 4.6 Physical Optics Description
!F:ANoaS of Image Formation 81
,xw1B-dx 4.6.1 The Coherent Transfer Function 83
`5Bv2 wlIV 4.6.2 The Incoherent Transfer Function 85
>^6|^rc 4.6.3 The Depth of Focus 88
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4.7 The Phase-Modulated Sinusoidal Grating 89
a,|Hn 5 Light Sources and Detectors 99
5rb<u>e{ 5.1 Introduction 99
I A%ZCdA; 5.2 Radiometry. Photometry 99
%*zV&H 5.2.1 Lambertian Surface 102
?6W v["% 5.2.2 Blackbody Radiator 103
v<@3&bot 5.2.3 Examples 105
3+l8V X&u! 5.3 Incoherent Light Sources 108
^Ig QI N 5.4 Coherent Light Sources 109
)n6,uTlOw 5.4.1 Stimulated Emission 109
=X1oB ,W{ 5.4.2 Gas Lasers 112
w}]BJ<C 5.4.3 Liquid Lasers 114
;E_Go&Vd 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
]]o?!NX 5.4.5 Solid-State Lasers 117
{'Y()p3kl 5.4.6 Other Lasers 119
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