Optical Metrology Third Edition u1;e*ty yF/< : Kjell J. G˚asvik
^%oG8z,L Spectra Vision AS, Trondheim, Norway
W7*_ T]
BK(pJNBh A&|Wvb= Preface to the Third Edition xi
hnsa)@ 1Basics 1
s-GleX< 1.1 Introduction 1
hmBnV 1.2 Wave Motion. The Electromagnetic Spectrum 1
oDW<e'Jm 1.3 The Plane Wave. Light Rays 3
|
or 8d>, 1.4 Phase Difference 4
#FqFH>-*2 1.5 Complex Notation. Complex Amplitude 5
I|F~HUzA" 1.6 Oblique Incidence of A Plane Wave 5
`rz`3:ZH 1.7 The Spherical Wave 7
3{Ek-{9 1.8 The Intensity 8
^<>Jw%H 1.9 Geometrical Optics 8
$kkp*3{ot 1.10 The Simple Convex (Positive) Lens 10
N&I8nZ9 1.11 A Plane-Wave Set-Up 11
9 {O2B5u1 2 Gaussian Optics 15
8K@"B 2.1 Introduction 15
R0Ax$Cv{ 2.2 Refraction at a Spherical Surface 15
=j|v0&
AGC 2.2.1 Examples 19
;.nP%jD 2.3 The General Image-Forming System 19
NVO9XK 2.4 The Image-Formation Process 21
FXOT+9bg 2.5 Reflection at a Spherical Surface 23
RwAbIXG{0 2.6 Aspheric Lenses 25
-5V)q.Og 2.7 Stops and Apertures 26
t$]&,ucW# 2.8 Lens Aberrations. Computer Lens Design 28
gx!*O<|e4 2.9 Imaging and The Lens Formula 29
).0V%}> 2.10 Standard Optical Systems 30
`a9k!3_L 2.10.1 Afocal Systems. The Telescope 30
{yvb$ND|j{ 2.10.2 The Simple Magnifier 32
!lQ#sL` 2.10.3 The Microscope 34
N?qIpv/a. 3 Interference 37
nB cp7e 3.1 Introduction 37
a.
h?4+^bN 3.2 General Description 37
0Jm]f/iZ 3.3 Coherence 38
6QN1+MwB 3.4 Interference between two Plane Waves 41
QD$}-D[ 3.4.1 Laser Doppler Velocimetry (LDV) 45
>DDQ'W ! 3.5 Interference between other Waves 46
D^66p8t 3.6 Interferometry 49
N<KKY"?I' 3.6.1 Wavefront Division 50
gCv"9j<j 3.6.2 Amplitude Division 51
%B#hb<7} 3.6.3 The Dual-Frequency Michelson Interferometer 54
$.oOG"u0] 3.6.4 Heterodyne (Homodyne) Detection 55
)^t!|*1LA 3.7 Spatial and Temporal Coherence 56
jZXVsd 3.8 Optical Coherence Tomography 61
r_4TtP&UW 4 Diffraction 67
i Td-n9 4.1 Introduction 67
25x cD1* 4.2 Diffraction from a Single Slit 67
ixOEdQ 4.3 Diffraction from a Grating 70
7d3'CQQ4 4.3.1 The Grating Equation. Amplitude Transmittance 70
n=f`AmF; 4.3.2 The Spatial Frequency Spectrum 73
S3R|8?| 4.4 Fourier Optics 75
s{yJ:WncI 4.5 Optical Filtering 76
IYuyj(/! 4.5.1 Practical Filtering Set-Ups 78
Q/9a,85 4.6 Physical Optics Description
60`+9(^ of Image Formation 81
$GQphXb$ 4.6.1 The Coherent Transfer Function 83
;LHDh_.pX 4.6.2 The Incoherent Transfer Function 85
?V#Gx>\ 4.6.3 The Depth of Focus 88
iPMB$SdfO 4.7 The Phase-Modulated Sinusoidal Grating 89
M6# \na 5 Light Sources and Detectors 99
{UP'tXah 5.1 Introduction 99
zLh Fbyn( 5.2 Radiometry. Photometry 99
m])Lw@#9W 5.2.1 Lambertian Surface 102
Xa4GqV9M/- 5.2.2 Blackbody Radiator 103
s>T`l 5.2.3 Examples 105
2bWUa~%B 5.3 Incoherent Light Sources 108
3f_i1|>)' 5.4 Coherent Light Sources 109
]} '^` 5.4.1 Stimulated Emission 109
,,S9$@R 5.4.2 Gas Lasers 112
}.'Z=yy 5.4.3 Liquid Lasers 114
zCBplb 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
f:xUPH?+ 5.4.5 Solid-State Lasers 117
Z,3 CC \ 5.4.6 Other Lasers 119
f7Yz>To .
-<6v:Z .
d;{y`4p)s .