Optical Metrology Third Edition
(x^BKnZ H$G0`LP0/a Kjell J. G˚asvik
fwK}/0% Spectra Vision AS, Trondheim, Norway
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'47P|t 3 ^s/bm$g Preface to the Third Edition xi
D]c`B 1Basics 1
z'uK3ng\hH 1.1 Introduction 1
U=hlu 1.2 Wave Motion. The Electromagnetic Spectrum 1
#Z6'?p9 1.3 The Plane Wave. Light Rays 3
CPg+f1K 1.4 Phase Difference 4
dl hdsj: 1.5 Complex Notation. Complex Amplitude 5
" D ?z 1.6 Oblique Incidence of A Plane Wave 5
% QKZT=} 1.7 The Spherical Wave 7
N3u((y/ 1.8 The Intensity 8
[]a[v%PkG 1.9 Geometrical Optics 8
aK`@6F,]j 1.10 The Simple Convex (Positive) Lens 10
8,0YD #x 1.11 A Plane-Wave Set-Up 11
u7?$b!hG^C 2 Gaussian Optics 15
22f`LoM 2.1 Introduction 15
[<'-yQ{l\ 2.2 Refraction at a Spherical Surface 15
5@^ dgq 2.2.1 Examples 19
Q{B}ef 2.3 The General Image-Forming System 19
LM&y@"wfm 2.4 The Image-Formation Process 21
CHV*vU<N 2.5 Reflection at a Spherical Surface 23
7 ^w >Rj 2.6 Aspheric Lenses 25
PJ='tJDj 2.7 Stops and Apertures 26
l NQcYv 2.8 Lens Aberrations. Computer Lens Design 28
-V: "l 2.9 Imaging and The Lens Formula 29
]p_@@QTC 2.10 Standard Optical Systems 30
lFTF ,G 2.10.1 Afocal Systems. The Telescope 30
o.q/O)'V u 2.10.2 The Simple Magnifier 32
uYE`"/h,1e 2.10.3 The Microscope 34
Z*-g[8FO 3 Interference 37
f4L`.~b'hb 3.1 Introduction 37
a33 TPoj 3.2 General Description 37
s}N#n( 3.3 Coherence 38
pZtu&R%GU 3.4 Interference between two Plane Waves 41
LBF 1;zjK 3.4.1 Laser Doppler Velocimetry (LDV) 45
rXA*NeA3 v 3.5 Interference between other Waves 46
/4 xki_} 3.6 Interferometry 49
'Ysx= 3.6.1 Wavefront Division 50
r k)##) 3.6.2 Amplitude Division 51
sg+uBCGB 3.6.3 The Dual-Frequency Michelson Interferometer 54
I4&:: y^ C 3.6.4 Heterodyne (Homodyne) Detection 55
>Wz;ySEz 3.7 Spatial and Temporal Coherence 56
?JL:CBvCp 3.8 Optical Coherence Tomography 61
,\qs4& 4 Diffraction 67
_x!7}O#k 4.1 Introduction 67
A45A:hqs 4.2 Diffraction from a Single Slit 67
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<v XG i 4.3.1 The Grating Equation. Amplitude Transmittance 70
)c8j} 4.3.2 The Spatial Frequency Spectrum 73
/% N r?V 4.4 Fourier Optics 75
hGiz)v~ 4.5 Optical Filtering 76
H<^/Ati,| 4.5.1 Practical Filtering Set-Ups 78
.l@xsJn 4.6 Physical Optics Description
|Pg@M of Image Formation 81
Off u9`DiZ 4.6.1 The Coherent Transfer Function 83
g55`A`5%C 4.6.2 The Incoherent Transfer Function 85
_cu:aktf2 4.6.3 The Depth of Focus 88
jAud {m*T 4.7 The Phase-Modulated Sinusoidal Grating 89
/{|fyK o\? 5 Light Sources and Detectors 99
Zfyo-Wk 5.1 Introduction 99
L:9F:/G 5.2 Radiometry. Photometry 99
H/Llj. -jg 5.2.1 Lambertian Surface 102
%Qj;, #z 5.2.2 Blackbody Radiator 103
K# Jk _"W 5.2.3 Examples 105
L(U"U#QZ 5.3 Incoherent Light Sources 108
;& A SkI 5.4 Coherent Light Sources 109
5< ja3 5.4.1 Stimulated Emission 109
48Mpf=f` 5.4.2 Gas Lasers 112
KCWc` Oz 5.4.3 Liquid Lasers 114
Ntbg`LGf'! 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
uJ6DO#d`P 5.4.5 Solid-State Lasers 117
aXL{TD:] 5.4.6 Other Lasers 119
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