Optical Metrology Third Edition }&Un8Rg"h
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Kjell J. G˚asvik aa2&yc29hp
Spectra Vision AS, Trondheim, Norway 7T9m@
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Preface to the Third Edition xi R7}=k)U?d@
1Basics 1 nfET;:{
1.1 Introduction 1 \7rFfN3
1.2 Wave Motion. The Electromagnetic Spectrum 1 u9My.u@-*%
1.3 The Plane Wave. Light Rays 3 2K4Jkyi
1.4 Phase Difference 4 v=e`e68U~
1.5 Complex Notation. Complex Amplitude 5 A Vf'"~?
1.6 Oblique Incidence of A Plane Wave 5 QPB@qx#@
1.7 The Spherical Wave 7 6&_"dg"
1.8 The Intensity 8 v7&oHOk!
1.9 Geometrical Optics 8 )Kkw$aQI"d
1.10 The Simple Convex (Positive) Lens 10 /|V!2dQs"
1.11 A Plane-Wave Set-Up 11 8+Sa$R
2 Gaussian Optics 15 nf=*KS\v
2.1 Introduction 15 Uyf<:8U\
2.2 Refraction at a Spherical Surface 15 ~XGBE
2.2.1 Examples 19 ? 3
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2.3 The General Image-Forming System 19 u U Xj
2.4 The Image-Formation Process 21 i3#To}g5V
2.5 Reflection at a Spherical Surface 23 d5h]yIz^
2.6 Aspheric Lenses 25 uvR9BL2=
2.7 Stops and Apertures 26 P"d7Af
2.8 Lens Aberrations. Computer Lens Design 28 VWDXEa9
2.9 Imaging and The Lens Formula 29 DT *'r;
2.10 Standard Optical Systems 30 ^'>kZ^w0
2.10.1 Afocal Systems. The Telescope 30 6Y?%G>$6
2.10.2 The Simple Magnifier 32 Cq\1t
2.10.3 The Microscope 34 :j_OO5b!
3 Interference 37 p|fSPSz
3.1 Introduction 37 &c!d}pU}
3.2 General Description 37 ZI.;7G@|
3.3 Coherence 38 7{F(NJUO1
3.4 Interference between two Plane Waves 41 gwVfiXR4
3.4.1 Laser Doppler Velocimetry (LDV) 45 /]7FX"
3.5 Interference between other Waves 46 .x\fPjB
3.6 Interferometry 49 #=@H-ZuD7
3.6.1 Wavefront Division 50 ]gHxvT\E
3.6.2 Amplitude Division 51 qZw4"&,j$
3.6.3 The Dual-Frequency Michelson Interferometer 54 I#lvaoeN
3.6.4 Heterodyne (Homodyne) Detection 55 FyD^\6/x
3.7 Spatial and Temporal Coherence 56 s&(,_34
3.8 Optical Coherence Tomography 61 O`Ht|@[6
4 Diffraction 67 nADt8
4.1 Introduction 67 `"~s<+
4.2 Diffraction from a Single Slit 67 kkWqP20q
4.3 Diffraction from a Grating 70 4cZig\mE;
4.3.1 The Grating Equation. Amplitude Transmittance 70 kg@D?VqJP
4.3.2 The Spatial Frequency Spectrum 73 >JdA,i}1
4.4 Fourier Optics 75 dLA'cQId
4.5 Optical Filtering 76 _<Hx1l~
4.5.1 Practical Filtering Set-Ups 78 X( Q*(_
4.6 Physical Optics Description X3nt*G1dL
of Image Formation 81 /P_1vQq
4.6.1 The Coherent Transfer Function 83 V[E7mhqy
4.6.2 The Incoherent Transfer Function 85 J6m`XC
4.6.3 The Depth of Focus 88 W?+U%bIZ9
4.7 The Phase-Modulated Sinusoidal Grating 89 <(|No3jx
5 Light Sources and Detectors 99 /rMxl(wD'
5.1 Introduction 99 8R!3}kx
5.2 Radiometry. Photometry 99 ?Q$LIoR
5.2.1 Lambertian Surface 102 JiFy.Pf
5.2.2 Blackbody Radiator 103 bpe8
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5.2.3 Examples 105 31BN ?q
5.3 Incoherent Light Sources 108 E>_?9~8Mf
5.4 Coherent Light Sources 109 Zmx[u_NG
5.4.1 Stimulated Emission 109 !sF! (u7
5.4.2 Gas Lasers 112 ,.#
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5.4.3 Liquid Lasers 114 6yIl)5/=
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 &5*)r@+
5.4.5 Solid-State Lasers 117 F[aow$",+}
5.4.6 Other Lasers 119 i?7%z`
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