Optical Metrology Third Edition w{"ro~9o DmiZ"A Kjell J. G˚asvik
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Ytf4t =5q_aK#i Preface to the Third Edition xi
%h VI*p3 1Basics 1
W}P9I&3 1.1 Introduction 1
jAxrU 1.2 Wave Motion. The Electromagnetic Spectrum 1
fo_*Uva_ 1.3 The Plane Wave. Light Rays 3
+lhnc{;WJv 1.4 Phase Difference 4
?_j ]w%Hz 1.5 Complex Notation. Complex Amplitude 5
D$fWeG{f 1.6 Oblique Incidence of A Plane Wave 5
:I(d-,C 1.7 The Spherical Wave 7
ho%G 1.8 The Intensity 8
Zo#c[9IaC 1.9 Geometrical Optics 8
(2(y9r*1 1.10 The Simple Convex (Positive) Lens 10
(b"kN( 1.11 A Plane-Wave Set-Up 11
ld[BiP`B2V 2 Gaussian Optics 15
9P&{Xhs7 2.1 Introduction 15
5BS !6o;P' 2.2 Refraction at a Spherical Surface 15
7 qL B 9r 2.2.1 Examples 19
)ml#2XP! f 2.3 The General Image-Forming System 19
c@x6<S%* 2.4 The Image-Formation Process 21
XaH; 2.5 Reflection at a Spherical Surface 23
giHqc7-PaX 2.6 Aspheric Lenses 25
U gTgva>? 2.7 Stops and Apertures 26
f>[{1M]n\ 2.8 Lens Aberrations. Computer Lens Design 28
eL1)_M;{ 2.9 Imaging and The Lens Formula 29
5 "&=BD~D 2.10 Standard Optical Systems 30
|e91KmiqJ 2.10.1 Afocal Systems. The Telescope 30
]VoJ7LoCZ' 2.10.2 The Simple Magnifier 32
cuh Z_ l 2.10.3 The Microscope 34
l9naqb:iP 3 Interference 37
zs r; 37 3.1 Introduction 37
'x u! t'l& 3.2 General Description 37
"%ZAL\x 3.3 Coherence 38
| w.h97fj 3.4 Interference between two Plane Waves 41
|4!G@-2V:I 3.4.1 Laser Doppler Velocimetry (LDV) 45
e3WEsD+ 3.5 Interference between other Waves 46
Qo v*xRO6 3.6 Interferometry 49
A2''v3-h8 3.6.1 Wavefront Division 50
KvumU>c#A 3.6.2 Amplitude Division 51
T U^s!Tj 3.6.3 The Dual-Frequency Michelson Interferometer 54
<_yy0 G 3.6.4 Heterodyne (Homodyne) Detection 55
*})Np0k 3.7 Spatial and Temporal Coherence 56
GI%9Tif 3.8 Optical Coherence Tomography 61
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% O: 4 Diffraction 67
BeFXC5-qat 4.1 Introduction 67
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=R 4.2 Diffraction from a Single Slit 67
({mlA`d] 4.3 Diffraction from a Grating 70
bO+ e?&vQ% 4.3.1 The Grating Equation. Amplitude Transmittance 70
#c(BBTuX 4.3.2 The Spatial Frequency Spectrum 73
)CD-cz6n 4.4 Fourier Optics 75
{Z}zT1kA 4.5 Optical Filtering 76
cd;~60@K 4.5.1 Practical Filtering Set-Ups 78
#:=*n(GT 4.6 Physical Optics Description
g p-rTdN of Image Formation 81
]Y3s5#n 4.6.1 The Coherent Transfer Function 83
GHFYIor 4.6.2 The Incoherent Transfer Function 85
GpCjoNcW{ 4.6.3 The Depth of Focus 88
_VJG@>F9- 4.7 The Phase-Modulated Sinusoidal Grating 89
p:xVi 0 5 Light Sources and Detectors 99
nTHCb>,vM 5.1 Introduction 99
DpIk$X 5.2 Radiometry. Photometry 99
3K%_wCZ 5.2.1 Lambertian Surface 102
`!C5"i8+i2 5.2.2 Blackbody Radiator 103
$s,(-C 5.2.3 Examples 105
Hl z$@[$ 5.3 Incoherent Light Sources 108
$1n\jN 5.4 Coherent Light Sources 109
Wql,*| 5.4.1 Stimulated Emission 109
v[~Q 5.4.2 Gas Lasers 112
^-,@D+eW 5.4.3 Liquid Lasers 114
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QK"r7f/ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
}LryRcrD-n 5.4.5 Solid-State Lasers 117
-o+; e3# 5.4.6 Other Lasers 119
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