Optical Metrology Third Edition j<u@j+V .#1~Rz1r Kjell J. G˚asvik
*"D3E7AO Spectra Vision AS, Trondheim, Norway
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q8s0AN'@t' - M[$Z y ^ Preface to the Third Edition xi
y9_K, g 1Basics 1
b+@JY2dvj 1.1 Introduction 1
G>wqt@%r9 1.2 Wave Motion. The Electromagnetic Spectrum 1
v'VD0 +3[H 1.3 The Plane Wave. Light Rays 3
zoOaVV& 1 1.4 Phase Difference 4
,_yh z0. 1.5 Complex Notation. Complex Amplitude 5
'<rZm=48 1.6 Oblique Incidence of A Plane Wave 5
,17hGKM 1.7 The Spherical Wave 7
nX(+s*Y+w 1.8 The Intensity 8
zY,r9<I8_x 1.9 Geometrical Optics 8
;k7xMZs 1.10 The Simple Convex (Positive) Lens 10
Rniq(FA x 1.11 A Plane-Wave Set-Up 11
#tZ4N7 2 Gaussian Optics 15
>)spqu] 2.1 Introduction 15
jJuW-(/4[ 2.2 Refraction at a Spherical Surface 15
%7"X(Ts7B 2.2.1 Examples 19
5$wpL(:R( 2.3 The General Image-Forming System 19
R,F[XI+= N 2.4 The Image-Formation Process 21
u[ L`-zI 2.5 Reflection at a Spherical Surface 23
Ytz)d/3T 2.6 Aspheric Lenses 25
qjf[zF 2.7 Stops and Apertures 26
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\Qo 2.8 Lens Aberrations. Computer Lens Design 28
kMtwiB|7j 2.9 Imaging and The Lens Formula 29
H2um|6> 2.10 Standard Optical Systems 30
ag*mG*Z 2.10.1 Afocal Systems. The Telescope 30
LM7$}#$R 2.10.2 The Simple Magnifier 32
^j" . 2.10.3 The Microscope 34
/o[?D 3 Interference 37
qW!]co 3.1 Introduction 37
&jsVw)Ue 3.2 General Description 37
r :F 3.3 Coherence 38
_Y8hb!#( 3.4 Interference between two Plane Waves 41
gF[ z fDm 3.4.1 Laser Doppler Velocimetry (LDV) 45
|4T !&[r 3.5 Interference between other Waves 46
0%m)@ukb 3.6 Interferometry 49
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5m9*85Ib 3.6.3 The Dual-Frequency Michelson Interferometer 54
_i o+YzS 3.6.4 Heterodyne (Homodyne) Detection 55
(*oL+ef-C 3.7 Spatial and Temporal Coherence 56
iMs5zf <M 3.8 Optical Coherence Tomography 61
=$nB/K,8AX 4 Diffraction 67
h"_~7 jq" 4.1 Introduction 67
9(6I<]# 4.2 Diffraction from a Single Slit 67
``OD.aY^s 4.3 Diffraction from a Grating 70
&|!7 Z4N 4.3.1 The Grating Equation. Amplitude Transmittance 70
Kj<^zo% w 4.3.2 The Spatial Frequency Spectrum 73
1RK=,Wx 4.4 Fourier Optics 75
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#|*F1K 4.5.1 Practical Filtering Set-Ups 78
iVd.f
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Y] L9Y9 of Image Formation 81
Y=?yhAw 4.6.1 The Coherent Transfer Function 83
{K9/H qH 4.6.2 The Incoherent Transfer Function 85
n84GZ5O>7 4.6.3 The Depth of Focus 88
sO.`x* 4.7 The Phase-Modulated Sinusoidal Grating 89
G.( mp<- 5 Light Sources and Detectors 99
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{b 5.1 Introduction 99
(rkU)Q 5.2 Radiometry. Photometry 99
,:??P1 5.2.1 Lambertian Surface 102
.!G94b 5.2.2 Blackbody Radiator 103
=k/IaFg 6w 5.2.3 Examples 105
%K>.l h@ 5.3 Incoherent Light Sources 108
#{=;NuP 5.4 Coherent Light Sources 109
I dXZoY 5.4.1 Stimulated Emission 109
4H|(c[K; 5.4.2 Gas Lasers 112
jcI&w#re 5.4.3 Liquid Lasers 114
|i ZfYi&^ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
aBNZdX]vzO 5.4.5 Solid-State Lasers 117
`&-Mi[1 5.4.6 Other Lasers 119
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