Optical Metrology Third Edition SC74r?N FA h" Yi ' Kjell J. G˚asvik
j\f;zb? F Spectra Vision AS, Trondheim, Norway
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.<^dv?@ p82&X+v/p Preface to the Third Edition xi
0!o&=Qh 1Basics 1
7 = u\D 1.1 Introduction 1
KR%p*Nh+C 1.2 Wave Motion. The Electromagnetic Spectrum 1
X3%7VFy9 1.3 The Plane Wave. Light Rays 3
z(i B$;M 1.4 Phase Difference 4
{$bAs9L 1.5 Complex Notation. Complex Amplitude 5
s{x2RDAt 1.6 Oblique Incidence of A Plane Wave 5
;S"^O
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pq #Hca[ 1.8 The Intensity 8
ueD G1) 1.9 Geometrical Optics 8
'{QbjG%<P 1.10 The Simple Convex (Positive) Lens 10
^;$a_eR 1.11 A Plane-Wave Set-Up 11
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L0cf To 2 Gaussian Optics 15
uXxyw7\W 2.1 Introduction 15
<<6i6b 2.2 Refraction at a Spherical Surface 15
,;y 5Mu8 2.2.1 Examples 19
jl{>>TW{x 2.3 The General Image-Forming System 19
L 9Z:>i? 2.4 The Image-Formation Process 21
Ra&HzK? 2.5 Reflection at a Spherical Surface 23
;XSV }eLu 2.6 Aspheric Lenses 25
`] _ #_ 2.7 Stops and Apertures 26
o>311(: 2.8 Lens Aberrations. Computer Lens Design 28
hvQOwA;e 2.9 Imaging and The Lens Formula 29
R#1h.8 2.10 Standard Optical Systems 30
qm4 Ejc< 2.10.1 Afocal Systems. The Telescope 30
K:c5Yq^ 2.10.2 The Simple Magnifier 32
h<4WY#Y 2.10.3 The Microscope 34
L10Vq}W" 3 Interference 37
R #`hT 3.1 Introduction 37
[53 rSr 3.2 General Description 37
R}8!~Ma `| 3.3 Coherence 38
/P<RYA~ 3.4 Interference between two Plane Waves 41
ea3AcT6 3.4.1 Laser Doppler Velocimetry (LDV) 45
8h=H\ v^f 3.5 Interference between other Waves 46
DhG2!'N 3.6 Interferometry 49
y;keOI! 3.6.1 Wavefront Division 50
`S2YBKz,1 3.6.2 Amplitude Division 51
d2&sl(O 3.6.3 The Dual-Frequency Michelson Interferometer 54
k=Pu4:RF 3.6.4 Heterodyne (Homodyne) Detection 55
\kF}E3~+# 3.7 Spatial and Temporal Coherence 56
Yl% R a1 3.8 Optical Coherence Tomography 61
s+2\uMwf* 4 Diffraction 67
XG@_Lcv* 4.1 Introduction 67
yP :>v Fd7 4.2 Diffraction from a Single Slit 67
K%[Rv#>;q| 4.3 Diffraction from a Grating 70
[a53H$`\5 4.3.1 The Grating Equation. Amplitude Transmittance 70
U O Y M 4.3.2 The Spatial Frequency Spectrum 73
B%6>2S =E 4.4 Fourier Optics 75
o )GNV 4.5 Optical Filtering 76
oil s;*q 4.5.1 Practical Filtering Set-Ups 78
X<Rh-1$8F 4.6 Physical Optics Description
ELk$ lm& @ of Image Formation 81
X4!`
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|fYNkD 8z1 4.6.2 The Incoherent Transfer Function 85
57Y(_h: 4.6.3 The Depth of Focus 88
Se9I1~mX 4.7 The Phase-Modulated Sinusoidal Grating 89
y-cRqIM 5 Light Sources and Detectors 99
/i"vEI 5.1 Introduction 99
KXL]Qw FN 5.2 Radiometry. Photometry 99
TW(rK& 5.2.1 Lambertian Surface 102
GC?\GV 5.2.2 Blackbody Radiator 103
W#$ pt>h) 5.2.3 Examples 105
>k<.bEx(A 5.3 Incoherent Light Sources 108
C8}ujC 5.4 Coherent Light Sources 109
@`G_6 <.` 5.4.1 Stimulated Emission 109
IxAKIa[HY 5.4.2 Gas Lasers 112
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Vl5}m 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
,@ tY D(Z 5.4.5 Solid-State Lasers 117
8c`g{
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