Optical Metrology Third Edition 7$+P|U [as-3&5S Kjell J. G˚asvik
a9#W9eP Spectra Vision AS, Trondheim, Norway
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Y O@hE> |x d@M-l n Preface to the Third Edition xi
v]WH8GI 1Basics 1
nU} ~I)@V 1.1 Introduction 1
%<aImR] 1.2 Wave Motion. The Electromagnetic Spectrum 1
AA))KBXq 1.3 The Plane Wave. Light Rays 3
I:F 'S# 1.4 Phase Difference 4
h`?y 2?O 1.5 Complex Notation. Complex Amplitude 5
,dHP`j ? 1.6 Oblique Incidence of A Plane Wave 5
4id3P{aU 1.7 The Spherical Wave 7
T(Y}V[0+ 1.8 The Intensity 8
rGTWcJ 1.9 Geometrical Optics 8
,3:QB_ 1.10 The Simple Convex (Positive) Lens 10
[zY!'cz? 1.11 A Plane-Wave Set-Up 11
6RH/V:YY 2 Gaussian Optics 15
"0|BoG 2.1 Introduction 15
%S{o5txo 2.2 Refraction at a Spherical Surface 15
s L)Rg(rkx 2.2.1 Examples 19
^pJ0nY# c 2.3 The General Image-Forming System 19
xe(MHNrj 2.4 The Image-Formation Process 21
ob0~VEH- 2.5 Reflection at a Spherical Surface 23
OYBotk]{1 2.6 Aspheric Lenses 25
{V[Ha~b%* 2.7 Stops and Apertures 26
k?^%hO>[ 2.8 Lens Aberrations. Computer Lens Design 28
-"F0eV+y 2.9 Imaging and The Lens Formula 29
65lOX$*{- 2.10 Standard Optical Systems 30
X DHLEG-u( 2.10.1 Afocal Systems. The Telescope 30
clHM8$ 2.10.2 The Simple Magnifier 32
m H'\:oN 2.10.3 The Microscope 34
Nt HbwU, 3 Interference 37
xC)7eQn/R 3.1 Introduction 37
EtGH\?d~] 3.2 General Description 37
DeA @0HOxh 3.3 Coherence 38
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3.4 Interference between two Plane Waves 41
)j\r,9<K+5 3.4.1 Laser Doppler Velocimetry (LDV) 45
<E"*)Oi 3.5 Interference between other Waves 46
'#H&:Htm;L 3.6 Interferometry 49
]X*YAPv 3.6.1 Wavefront Division 50
KZECo1 3.6.2 Amplitude Division 51
!0b%Jh 3.6.3 The Dual-Frequency Michelson Interferometer 54
=]T |h 3.6.4 Heterodyne (Homodyne) Detection 55
O-Dc[t % 3.7 Spatial and Temporal Coherence 56
!2(. $}E 3.8 Optical Coherence Tomography 61
FnY$)o; 4 Diffraction 67
HP;|'b 4.1 Introduction 67
9KX ym } 4.2 Diffraction from a Single Slit 67
YQ52~M0L 4.3 Diffraction from a Grating 70
R3$@N 4.3.1 The Grating Equation. Amplitude Transmittance 70
_~PO 4.3.2 The Spatial Frequency Spectrum 73
)eECOfmnZ 4.4 Fourier Optics 75
[ 4Y[?)7 4.5 Optical Filtering 76
NNgK:YibD 4.5.1 Practical Filtering Set-Ups 78
}bp.OV -+ 4.6 Physical Optics Description
<p09oZ {6 of Image Formation 81
gTnS[ 4.6.1 The Coherent Transfer Function 83
Im6U_JsNZh 4.6.2 The Incoherent Transfer Function 85
GN0duV 4.6.3 The Depth of Focus 88
FK6K6wU52m 4.7 The Phase-Modulated Sinusoidal Grating 89
E$w#+.QP 5 Light Sources and Detectors 99
):S!Nl 5.1 Introduction 99
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(X*9w##x( 5.2.1 Lambertian Surface 102
bCzdszvg3 5.2.2 Blackbody Radiator 103
1ADv?+j)A/ 5.2.3 Examples 105
+miR3~w. 5.3 Incoherent Light Sources 108
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Gp,'kw"I 5.4.1 Stimulated Emission 109
x LZ bU4 5.4.2 Gas Lasers 112
s*f1x N< 5.4.3 Liquid Lasers 114
q 4) Ey 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
#J\s%60p t 5.4.5 Solid-State Lasers 117
8|6~o.B.G 5.4.6 Other Lasers 119
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