Optical Metrology Third Edition b)@D*plS& }qV4]*+{ Kjell J. G˚asvik
p4{?Rhb6 Spectra Vision AS, Trondheim, Norway
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@ !%<JZEz3 =5dv38 Preface to the Third Edition xi
* +A!12s@ 1Basics 1
'O\K Wj { 1.1 Introduction 1
Q:_pW<^ 1.2 Wave Motion. The Electromagnetic Spectrum 1
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1.3 The Plane Wave. Light Rays 3
IeN!nK- 1.4 Phase Difference 4
Bu!Gy8 \ 1.5 Complex Notation. Complex Amplitude 5
n )`*{uv$ 1.6 Oblique Incidence of A Plane Wave 5
WHE*NWz>q 1.7 The Spherical Wave 7
u#J 5M&# 1.8 The Intensity 8
n=rPFp RLF 1.9 Geometrical Optics 8
lzS"NHs<g( 1.10 The Simple Convex (Positive) Lens 10
T'Jw\u>"R 1.11 A Plane-Wave Set-Up 11
MlRgdVX 2 Gaussian Optics 15
A*\4C3 a'% 2.1 Introduction 15
y0(k7D|\ 2.2 Refraction at a Spherical Surface 15
;=h^"et 2.2.1 Examples 19
,8$;|#d 2.3 The General Image-Forming System 19
<Y JU?G:@ 2.4 The Image-Formation Process 21
P7u5Ykc* 2.5 Reflection at a Spherical Surface 23
[&FMVM` 2.6 Aspheric Lenses 25
)%ja6Vg 2.7 Stops and Apertures 26
Grjm 9tbX} 2.8 Lens Aberrations. Computer Lens Design 28
Q~-g tEv+& 2.9 Imaging and The Lens Formula 29
o6vm(I% 2.10 Standard Optical Systems 30
vj{h*~ 2.10.1 Afocal Systems. The Telescope 30
.6vQWt 7@ 2.10.2 The Simple Magnifier 32
{_(;&\5 2.10.3 The Microscope 34
? `FI!3j 3 Interference 37
0JNG\ARC 3.1 Introduction 37
&,) 9cV / 3.2 General Description 37
W4>8 3.3 Coherence 38
h+Dg"j<[ 3.4 Interference between two Plane Waves 41
AFMAgf{bD 3.4.1 Laser Doppler Velocimetry (LDV) 45
?]3`WJOj 3.5 Interference between other Waves 46
Nu9mK 3.6 Interferometry 49
3j.f 3~" 3.6.1 Wavefront Division 50
5[/ *UtB 3.6.2 Amplitude Division 51
||L qx#e= 3.6.3 The Dual-Frequency Michelson Interferometer 54
4qyL' \d[ 3.6.4 Heterodyne (Homodyne) Detection 55
5vP*oD 3.7 Spatial and Temporal Coherence 56
M6 0(yTm 3.8 Optical Coherence Tomography 61
x 5PQ9Bw, 4 Diffraction 67
N@j|I* y| 4.1 Introduction 67
7 qzI] 4.2 Diffraction from a Single Slit 67
p( Qm\g< 4.3 Diffraction from a Grating 70
zD) 2af 4.3.1 The Grating Equation. Amplitude Transmittance 70
@.C PZT 4.3.2 The Spatial Frequency Spectrum 73
{mkYW-4Se 4.4 Fourier Optics 75
1YM04*H 4.5 Optical Filtering 76
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4.5.1 Practical Filtering Set-Ups 78
C'5i >; 4.6 Physical Optics Description
$,h*xb. of Image Formation 81
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Z 4.6.1 The Coherent Transfer Function 83
r ."Dc 4.6.2 The Incoherent Transfer Function 85
_/MKU!\l 4.6.3 The Depth of Focus 88
@ @# G. 4.7 The Phase-Modulated Sinusoidal Grating 89
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^a,7}4 5 Light Sources and Detectors 99
oPWvZI(\& 5.1 Introduction 99
yiI&>J)) 5.2 Radiometry. Photometry 99
M:C*? ;K: 5.2.1 Lambertian Surface 102
Wb*d`hzQ} 5.2.2 Blackbody Radiator 103
ld2 \/9+n 5.2.3 Examples 105
/"/$1F%{ 5.3 Incoherent Light Sources 108
=VY[m-q5 5.4 Coherent Light Sources 109
L"('gc!W 5.4.1 Stimulated Emission 109
%A W 5.4.2 Gas Lasers 112
U<#i\4W 5.4.3 Liquid Lasers 114
= |?w<qc 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
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a 5.4.5 Solid-State Lasers 117
<ygkK5#q 5.4.6 Other Lasers 119
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