Optical Metrology Third Edition <xb =.xe $ mH'%YDIl Kjell J. G˚asvik
bSK> p3 Spectra Vision AS, Trondheim, Norway
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w$E8R[J~P VLLE0W _] Preface to the Third Edition xi
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d 1Basics 1
P4h^_*d 1.1 Introduction 1
@;^7kt 1.2 Wave Motion. The Electromagnetic Spectrum 1
C r A7lu' 1.3 The Plane Wave. Light Rays 3
u~JCMM$ 1.4 Phase Difference 4
zO@7V>2 1.5 Complex Notation. Complex Amplitude 5
&]d-R 1.6 Oblique Incidence of A Plane Wave 5
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9FU 1.7 The Spherical Wave 7
F.N4Q'2Z 1.8 The Intensity 8
oRp;9 1.9 Geometrical Optics 8
;+86q"&n 1.10 The Simple Convex (Positive) Lens 10
;%#.d$cU 1.11 A Plane-Wave Set-Up 11
rM|] }M=_V 2 Gaussian Optics 15
5eP0W# 2.1 Introduction 15
HU~,_m 2.2 Refraction at a Spherical Surface 15
\J)ffEKIp 2.2.1 Examples 19
8w 2$H 2.3 The General Image-Forming System 19
oU\Q|mN( 2.4 The Image-Formation Process 21
>vr!3 2.5 Reflection at a Spherical Surface 23
+{eZ@ 2.6 Aspheric Lenses 25
oB BL7/L 2.7 Stops and Apertures 26
}]fJ[KbDp 2.8 Lens Aberrations. Computer Lens Design 28
.aA8'/ 2.9 Imaging and The Lens Formula 29
?PpGBm2f* 2.10 Standard Optical Systems 30
!623; 2.10.1 Afocal Systems. The Telescope 30
E#5$O2b# 2.10.2 The Simple Magnifier 32
F:3*i^ L 2.10.3 The Microscope 34
".@}]z8 3 Interference 37
"s?!1v(v 3.1 Introduction 37
_0razNk 3.2 General Description 37
dg(fD>+ 3.3 Coherence 38
nVSuvq|S 3.4 Interference between two Plane Waves 41
7KB:wsz^ 3.4.1 Laser Doppler Velocimetry (LDV) 45
x)^/3 3.5 Interference between other Waves 46
/4Df 'd 3.6 Interferometry 49
&EZq%Sd 3.6.1 Wavefront Division 50
J2vaKl 3.6.2 Amplitude Division 51
iC$mb~G 3.6.3 The Dual-Frequency Michelson Interferometer 54
;|.~'': 3.6.4 Heterodyne (Homodyne) Detection 55
`S&$y4|Vs 3.7 Spatial and Temporal Coherence 56
Za5bx,^ 3.8 Optical Coherence Tomography 61
@P$_2IU" 4 Diffraction 67
w^rINPAS 4.1 Introduction 67
\W;+@w|c 4.2 Diffraction from a Single Slit 67
kS\A_"bc 4.3 Diffraction from a Grating 70
ljS~>& 4.3.1 The Grating Equation. Amplitude Transmittance 70
dxz.%a@PW 4.3.2 The Spatial Frequency Spectrum 73
QcXqMx 4.4 Fourier Optics 75
KX|7mr90K 4.5 Optical Filtering 76
qjtrU#n 4.5.1 Practical Filtering Set-Ups 78
rX^wNH 4.6 Physical Optics Description
5os(. of Image Formation 81
`.0WK 4.6.1 The Coherent Transfer Function 83
SccaX
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xe=/T#% 4.6.3 The Depth of Focus 88
b }^ylm 4.7 The Phase-Modulated Sinusoidal Grating 89
!8z,}HUdK 5 Light Sources and Detectors 99
nc0!ag 5.1 Introduction 99
DGQGV[9%4C 5.2 Radiometry. Photometry 99
]V `L\ 5.2.1 Lambertian Surface 102
LKEf#mp 5.2.2 Blackbody Radiator 103
fD1a)Az 5.2.3 Examples 105
M^e;WY@ D 5.3 Incoherent Light Sources 108
9q4%s?)j 5.4 Coherent Light Sources 109
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5.4.1 Stimulated Emission 109
|z5`h 5.4.2 Gas Lasers 112
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*k (|r> 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
X}Oo5SNgff 5.4.5 Solid-State Lasers 117
sfN6ro 5.4.6 Other Lasers 119
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