Optical Metrology Third Edition <VjJ Au u ^I(Ny Kjell J. G˚asvik
tC8(XMVx Spectra Vision AS, Trondheim, Norway
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wU Preface to the Third Edition xi
_ |<d5TI 1Basics 1
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M q;U 1.1 Introduction 1
0)Y bI! 1.2 Wave Motion. The Electromagnetic Spectrum 1
mtic> 1.3 The Plane Wave. Light Rays 3
C2]Kc{4 1.4 Phase Difference 4
HDM<w+ZxX 1.5 Complex Notation. Complex Amplitude 5
TAL/a*7\ 1.6 Oblique Incidence of A Plane Wave 5
dGZntT 2D 1.7 The Spherical Wave 7
?wMHS4 1.8 The Intensity 8
#gQ F ' 1.9 Geometrical Optics 8
| sqZ $M u 1.10 The Simple Convex (Positive) Lens 10
Js g
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~:;3uL s,8 2 Gaussian Optics 15
di9!lS $ 2.1 Introduction 15
.=9 s1 ~] 2.2 Refraction at a Spherical Surface 15
>Y W\~T 2.2.1 Examples 19
!=Y;h[J.p 2.3 The General Image-Forming System 19
JL}\* 2.4 The Image-Formation Process 21
rg Irr5 2.5 Reflection at a Spherical Surface 23
2J;`m_oP 2.6 Aspheric Lenses 25
fi PIAT} 2.7 Stops and Apertures 26
W!$zXwY }( 2.8 Lens Aberrations. Computer Lens Design 28
k0?ZYeHC 2.9 Imaging and The Lens Formula 29
[}nK"4T"Ri 2.10 Standard Optical Systems 30
hRaf# 2.10.1 Afocal Systems. The Telescope 30
,lY aA5&I 2.10.2 The Simple Magnifier 32
qOCJT Og7 2.10.3 The Microscope 34
Hyk'c't_O 3 Interference 37
4}v@C|.p 3.1 Introduction 37
bTmL5}n 3.2 General Description 37
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r 3.3 Coherence 38
! }TMiCK 3.4 Interference between two Plane Waves 41
# jYpVc{] 3.4.1 Laser Doppler Velocimetry (LDV) 45
6,Hqb<( 3.5 Interference between other Waves 46
hVoNw6fE 3.6 Interferometry 49
R U"/2i 3.6.1 Wavefront Division 50
Dkw%`(Oh/, 3.6.2 Amplitude Division 51
+\`vq"e 3.6.3 The Dual-Frequency Michelson Interferometer 54
@`u?bnx]e 3.6.4 Heterodyne (Homodyne) Detection 55
uE_c4Hp 3.7 Spatial and Temporal Coherence 56
+,'T=Ic{ 3.8 Optical Coherence Tomography 61
H(+<)qH 4 Diffraction 67
=C f ] 4.1 Introduction 67
,a|@d} U 4.2 Diffraction from a Single Slit 67
9pWy"h$H 4.3 Diffraction from a Grating 70
4\X||5.c 4.3.1 The Grating Equation. Amplitude Transmittance 70
:b M+&EP 4.3.2 The Spatial Frequency Spectrum 73
6y+b5- {' 4.4 Fourier Optics 75
-H(vL= 4.5 Optical Filtering 76
TT!ET<ciN 4.5.1 Practical Filtering Set-Ups 78
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R/{D 4.6 Physical Optics Description
{E9v`u\ of Image Formation 81
O0~vf[i]; 4.6.1 The Coherent Transfer Function 83
l4'~}nn(Y 4.6.2 The Incoherent Transfer Function 85
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Q ~|R Z7G 4.7 The Phase-Modulated Sinusoidal Grating 89
S*W;%J5 5 Light Sources and Detectors 99
jrJR1npB 5.1 Introduction 99
s PYX~G&T 5.2 Radiometry. Photometry 99
<zfe }0 5.2.1 Lambertian Surface 102
Eyh| a. )- 5.2.2 Blackbody Radiator 103
@9 8; VWY\ 5.2.3 Examples 105
=6 %|?5G 5.3 Incoherent Light Sources 108
54p tP 5.4 Coherent Light Sources 109
@Z(rgF{{ 5.4.1 Stimulated Emission 109
x2wg^$F*oO 5.4.2 Gas Lasers 112
6k0^ x Q 5.4.3 Liquid Lasers 114
r((T avn 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
0A$SYF$O+[ 5.4.5 Solid-State Lasers 117
B+VuUt{S 5.4.6 Other Lasers 119
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