Optical Metrology Third Edition gg`{kN^r.a /
<(|4e Kjell J. G˚asvik
>3/ mV<g f Spectra Vision AS, Trondheim, Norway
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x~5,v5R^] 1vo3aF Preface to the Third Edition xi
%O9 Wm_% 1Basics 1
+1wEoU.l2 1.1 Introduction 1
h^(U:M=A 1.2 Wave Motion. The Electromagnetic Spectrum 1
e&x)g;bn 1.3 The Plane Wave. Light Rays 3
wxHd^b 1.4 Phase Difference 4
#+o$Tg 1.5 Complex Notation. Complex Amplitude 5
_AF$E"f@ 1.6 Oblique Incidence of A Plane Wave 5
gqv+| :# 1.7 The Spherical Wave 7
vT#R>0@m i 1.8 The Intensity 8
d9JAt-6z2 1.9 Geometrical Optics 8
s#5#WNzP 1.10 The Simple Convex (Positive) Lens 10
+}m`$B}mJ 1.11 A Plane-Wave Set-Up 11
z/91v#}. 2 Gaussian Optics 15
@rT$}O1?` 2.1 Introduction 15
e r_6PV 2.2 Refraction at a Spherical Surface 15
5{yg 2.2.1 Examples 19
K-]) RIM 2.3 The General Image-Forming System 19
L&+k`b 2.4 The Image-Formation Process 21
_kBm KE 2.5 Reflection at a Spherical Surface 23
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0dwD ?GG2 2.7 Stops and Apertures 26
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9#] 2.8 Lens Aberrations. Computer Lens Design 28
j?C[ids< 2.9 Imaging and The Lens Formula 29
Q.$/I+&j 2.10 Standard Optical Systems 30
7a_8007$l 2.10.1 Afocal Systems. The Telescope 30
VJ#ys _W 2.10.2 The Simple Magnifier 32
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jy~hLEt7 3 Interference 37
cWnEp';. 3.1 Introduction 37
}'vQUG u8z 3.2 General Description 37
9=}# .W3. 3.3 Coherence 38
1;m?:|6K{ 3.4 Interference between two Plane Waves 41
\#biwX 3.4.1 Laser Doppler Velocimetry (LDV) 45
5 xr2 3.5 Interference between other Waves 46
=,*/P h& 3.6 Interferometry 49
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3.6.1 Wavefront Division 50
WS&a9!3; 3.6.2 Amplitude Division 51
-5e8m4* 3.6.3 The Dual-Frequency Michelson Interferometer 54
q>%.zc[x 3.6.4 Heterodyne (Homodyne) Detection 55
%J6>Vc!ix= 3.7 Spatial and Temporal Coherence 56
&u9,| n]O9 3.8 Optical Coherence Tomography 61
j 7);N 4 Diffraction 67
I.t)sf, 4.1 Introduction 67
%l% ad- V 4.2 Diffraction from a Single Slit 67
{6LS$3}VM 4.3 Diffraction from a Grating 70
l rPIXIM 4.3.1 The Grating Equation. Amplitude Transmittance 70
q !}~c 4.3.2 The Spatial Frequency Spectrum 73
L|{v kkBo 4.4 Fourier Optics 75
I5j|\ /Ht 4.5 Optical Filtering 76
6GAEQ] 4.5.1 Practical Filtering Set-Ups 78
}`Wo(E}O 4.6 Physical Optics Description
QX?moW6U W of Image Formation 81
BV<_1 WT} 4.6.1 The Coherent Transfer Function 83
p}~Sg i 4.6.2 The Incoherent Transfer Function 85
fvta< 4.6.3 The Depth of Focus 88
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86KK Y2 5 Light Sources and Detectors 99
nIOSP :'> 5.1 Introduction 99
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K(S] 5.2 Radiometry. Photometry 99
yEB#*}K? 5.2.1 Lambertian Surface 102
dM}c-=w` 5.2.2 Blackbody Radiator 103
GS>YfJ&DZ 5.2.3 Examples 105
ENA"T-p 5.3 Incoherent Light Sources 108
$2 ] >{g 5.4 Coherent Light Sources 109
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d#(eGe 5.4.1 Stimulated Emission 109
P7X3>5<;q 5.4.2 Gas Lasers 112
Le-t<6i-V# 5.4.3 Liquid Lasers 114
:V6t5I'_ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
/V/ )A\g 5.4.5 Solid-State Lasers 117
!F ?j'[s8] 5.4.6 Other Lasers 119
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