Optical Metrology Third Edition u!I Es EC(,-sz\Z Kjell J. G˚asvik
4qMqA T Spectra Vision AS, Trondheim, Norway
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a@( 4X/| 7<{g+Q~7* Preface to the Third Edition xi
X"_,#3Ko! 1Basics 1
l &3f<e 1.1 Introduction 1
U9k;)fK 1.2 Wave Motion. The Electromagnetic Spectrum 1
| R MIV 1.3 The Plane Wave. Light Rays 3
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L{m[s| 1.4 Phase Difference 4
{ No* Z'X 1.5 Complex Notation. Complex Amplitude 5
M- inlZNR 1.6 Oblique Incidence of A Plane Wave 5
:|cC7, S 1.7 The Spherical Wave 7
hBb&-/ 1.8 The Intensity 8
N- XOPwx' 1.9 Geometrical Optics 8
G.v zz-yG 1.10 The Simple Convex (Positive) Lens 10
MmUtBT 1.11 A Plane-Wave Set-Up 11
1k-YeQNe 2 Gaussian Optics 15
l 2&cwjc 2.1 Introduction 15
I5EKS0MQ! 2.2 Refraction at a Spherical Surface 15
j8Nl'" 2.2.1 Examples 19
-|E|-' 2.3 The General Image-Forming System 19
/ZC/yGdIS_ 2.4 The Image-Formation Process 21
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0 *!CJ;%N 2.6 Aspheric Lenses 25
"rhU2jT=c 2.7 Stops and Apertures 26
#4hxbRN 2.8 Lens Aberrations. Computer Lens Design 28
u!kC+0Y 2.9 Imaging and The Lens Formula 29
G@s ]HJ: 2.10 Standard Optical Systems 30
/S4$qr cM 2.10.1 Afocal Systems. The Telescope 30
@9-/p^n1 2.10.2 The Simple Magnifier 32
poJ7q ( 2.10.3 The Microscope 34
b4TZnO 3 Interference 37
$P<T`3Jg 3.1 Introduction 37
50MdZ;R-3 3.2 General Description 37
K)NB{8 _ 3.3 Coherence 38
*Uq1 q 3.4 Interference between two Plane Waves 41
m417=wf 3.4.1 Laser Doppler Velocimetry (LDV) 45
lw/zgR#| 3.5 Interference between other Waves 46
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b0p? 3.6 Interferometry 49
pPI'0x 3.6.1 Wavefront Division 50
-1\*}m%1e 3.6.2 Amplitude Division 51
oWCy%76@ 3.6.3 The Dual-Frequency Michelson Interferometer 54
"9mVBa|Q 3.6.4 Heterodyne (Homodyne) Detection 55
;%-f>'KhI7 3.7 Spatial and Temporal Coherence 56
I~:v X^%9 3.8 Optical Coherence Tomography 61
&)(>e}es 4 Diffraction 67
cJb.@8^J 4.1 Introduction 67
;ZnSWIF2 4.2 Diffraction from a Single Slit 67
jC<1bf$K 4.3 Diffraction from a Grating 70
c
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E0F8FR' 4.3.2 The Spatial Frequency Spectrum 73
<i~O0f] 4.4 Fourier Optics 75
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+y%"[6c| 4.5.1 Practical Filtering Set-Ups 78
NO(^P+s 4.6 Physical Optics Description
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i2BoOd of Image Formation 81
'. Ww*N 4.6.1 The Coherent Transfer Function 83
Eqx2 . S 4.6.2 The Incoherent Transfer Function 85
r'!HWR 4.6.3 The Depth of Focus 88
WCa>~dF> 4.7 The Phase-Modulated Sinusoidal Grating 89
{_#~&I Q 5 Light Sources and Detectors 99
E;$;g#ksf 5.1 Introduction 99
kzMul<>sl 5.2 Radiometry. Photometry 99
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5.2.1 Lambertian Surface 102
gmCW__oR 5.2.2 Blackbody Radiator 103
C!]R0L* 5.2.3 Examples 105
=bn(9Gm!J 5.3 Incoherent Light Sources 108
*$ U+ 5.4 Coherent Light Sources 109
{2|[7oNT6 5.4.1 Stimulated Emission 109
[73 \jT 5.4.2 Gas Lasers 112
<K^{36h 5.4.3 Liquid Lasers 114
uc0 1{t0, 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
cr}T ? $\K 5.4.5 Solid-State Lasers 117
wjJM\BKr` 5.4.6 Other Lasers 119
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