Optical Metrology Third Edition _FEFx a:S - Kjell J. G˚asvik
s79r@])= Spectra Vision AS, Trondheim, Norway
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+*^H#|! tjnIN?YT Preface to the Third Edition xi
I0a<%;JJW 1Basics 1
s<Fl p 1.1 Introduction 1
Vg23!E 1.2 Wave Motion. The Electromagnetic Spectrum 1
o14cwb 1.3 The Plane Wave. Light Rays 3
akT6^cP^ 1.4 Phase Difference 4
"]iB6 1.5 Complex Notation. Complex Amplitude 5
Ev P{p 1.6 Oblique Incidence of A Plane Wave 5
j.kG};f 1.7 The Spherical Wave 7
\;-|-8Q 1.8 The Intensity 8
05k0n E 1.9 Geometrical Optics 8
BB'OCN 1.10 The Simple Convex (Positive) Lens 10
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mEy 1.11 A Plane-Wave Set-Up 11
6R5Qy]]E 2 Gaussian Optics 15
*#Wdc O`- 2.1 Introduction 15
|I|fMF2K 2.2 Refraction at a Spherical Surface 15
d/Q%IeEL. 2.2.1 Examples 19
y Wya&|D9 2.3 The General Image-Forming System 19
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=6l 2.4 The Image-Formation Process 21
X76e&~ 2.5 Reflection at a Spherical Surface 23
/=, nGk> 2.6 Aspheric Lenses 25
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6@]Dm 2.8 Lens Aberrations. Computer Lens Design 28
Lxk[;j+ 2.9 Imaging and The Lens Formula 29
e$pV%5= 2.10 Standard Optical Systems 30
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:M{F$ 2.10.1 Afocal Systems. The Telescope 30
nLiY%x`S 2.10.2 The Simple Magnifier 32
V_:&S2j 2.10.3 The Microscope 34
J")#I91 3 Interference 37
4H-'Dr=G 3.1 Introduction 37
X|8c>_} 3.2 General Description 37
##o#eZq:" 3.3 Coherence 38
F\KUZ[% 3.4 Interference between two Plane Waves 41
pD74+/DD 3.4.1 Laser Doppler Velocimetry (LDV) 45
]cN1c} 3.5 Interference between other Waves 46
N"1B/u 3.6 Interferometry 49
B+0hzkPY 3.6.1 Wavefront Division 50
3Hm/(C 3.6.2 Amplitude Division 51
6 _ow%Rx~F 3.6.3 The Dual-Frequency Michelson Interferometer 54
!L8#@BjU 3.6.4 Heterodyne (Homodyne) Detection 55
AFfAtu 3.7 Spatial and Temporal Coherence 56
2"S}bfrX 3.8 Optical Coherence Tomography 61
U3:j'Su4H? 4 Diffraction 67
4,0{7MLgK 4.1 Introduction 67
IkXx# ) 4.2 Diffraction from a Single Slit 67
wuqJr:q*# 4.3 Diffraction from a Grating 70
GDy9qUV 4.3.1 The Grating Equation. Amplitude Transmittance 70
"x /OIf 4.3.2 The Spatial Frequency Spectrum 73
8h4'(yGQQW 4.4 Fourier Optics 75
jb;hcraR 4.5 Optical Filtering 76
(Clkv 4.5.1 Practical Filtering Set-Ups 78
S/I /-Bp~ 4.6 Physical Optics Description
^<-+@v* of Image Formation 81
7`hP?a= 4.6.1 The Coherent Transfer Function 83
,i@:5X/t 4.6.2 The Incoherent Transfer Function 85
C{XmVc. 4.6.3 The Depth of Focus 88
-7(@1@1 4.7 The Phase-Modulated Sinusoidal Grating 89
~F?u)~QZ# 5 Light Sources and Detectors 99
O<;3M'y\ 5.1 Introduction 99
3 SGDy] 5.2 Radiometry. Photometry 99
13=.H5 5.2.1 Lambertian Surface 102
bnLPlf 5.2.2 Blackbody Radiator 103
.eP.& 5.2.3 Examples 105
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Vl!6W@g 5.4 Coherent Light Sources 109
4X(H; 5.4.1 Stimulated Emission 109
U!Z,xx[] 5.4.2 Gas Lasers 112
9]wN Bd 5.4.3 Liquid Lasers 114
M[112%[+4 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
dmN&+t 5.4.5 Solid-State Lasers 117
~<OSYb 5.4.6 Other Lasers 119
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