Optical Metrology Third Edition h&j9 ' I!;vy/r Kjell J. G˚asvik
)h,-zAnZ Spectra Vision AS, Trondheim, Norway
iDrQ4> 
U Rb tX
3y{W10" Preface to the Third Edition xi
1y}tPkOe7O 1Basics 1
7zEpuw 1.1 Introduction 1
BFH=cs 1.2 Wave Motion. The Electromagnetic Spectrum 1
S1D;Xv@ 1.3 The Plane Wave. Light Rays 3
$mLiEsJ 1.4 Phase Difference 4
iyr'9BA 1.5 Complex Notation. Complex Amplitude 5
zPt0 IB_j' 1.6 Oblique Incidence of A Plane Wave 5
fOkB|E] 1.7 The Spherical Wave 7
e =Teq~K 1.8 The Intensity 8
6 Z7J<0 1.9 Geometrical Optics 8
vQhi2J' 1.10 The Simple Convex (Positive) Lens 10
TB(!*t 1.11 A Plane-Wave Set-Up 11
m0_B [dw 2 Gaussian Optics 15
<Z^q BM 2.1 Introduction 15
/{HK0fd 2.2 Refraction at a Spherical Surface 15
V^ 5Z9! 2.2.1 Examples 19
Aa`'g0wmc 2.3 The General Image-Forming System 19
@(_f}S gfE 2.4 The Image-Formation Process 21
*^t7 ?f[ 2.5 Reflection at a Spherical Surface 23
C8bv%9 2.6 Aspheric Lenses 25
>S=,ype~G 2.7 Stops and Apertures 26
! tPHT 2.8 Lens Aberrations. Computer Lens Design 28
tFKR~?Gc 2.9 Imaging and The Lens Formula 29
^#)M,.G^ 2.10 Standard Optical Systems 30
Cv;\cI"& 2.10.1 Afocal Systems. The Telescope 30
@!:_r5R~N 2.10.2 The Simple Magnifier 32
nps"n ggk 2.10.3 The Microscope 34
)'Yoii{dSU 3 Interference 37
Hg%8Q@ 3.1 Introduction 37
+KKx\m* 3.2 General Description 37
9a;8^?Ld%S 3.3 Coherence 38
dpI9DzA; 3.4 Interference between two Plane Waves 41
KuohUH+ 3.4.1 Laser Doppler Velocimetry (LDV) 45
**L3T3$) 3.5 Interference between other Waves 46
?7CHHk 3.6 Interferometry 49
yNk E> 3.6.1 Wavefront Division 50
e lzKt Vw 3.6.2 Amplitude Division 51
Mh;rhQ 3.6.3 The Dual-Frequency Michelson Interferometer 54
h&$,mbEoI 3.6.4 Heterodyne (Homodyne) Detection 55
[tY+P7j9) 3.7 Spatial and Temporal Coherence 56
iz pFl@WS 3.8 Optical Coherence Tomography 61
96. Vm*/7 4 Diffraction 67
I7/X6^/} 4.1 Introduction 67
6K
6uB
~ 4.2 Diffraction from a Single Slit 67
kx _PMp c 4.3 Diffraction from a Grating 70
|nTZ/MXbw 4.3.1 The Grating Equation. Amplitude Transmittance 70
LJII7<k 4.3.2 The Spatial Frequency Spectrum 73
PS${B
4.4 Fourier Optics 75
[osm\w49 4.5 Optical Filtering 76
`.8#q^ 4.5.1 Practical Filtering Set-Ups 78
LwL\CE_6+ 4.6 Physical Optics Description
[H8QxJk of Image Formation 81
a{%]X('; 4.6.1 The Coherent Transfer Function 83
VG+WV k 4.6.2 The Incoherent Transfer Function 85
Wy.X x-3W 4.6.3 The Depth of Focus 88
06peo
d 4.7 The Phase-Modulated Sinusoidal Grating 89
?
(f44Zgm 5 Light Sources and Detectors 99
&}/h[v_#' 5.1 Introduction 99
0;pO QF 5.2 Radiometry. Photometry 99
RIQw+RG > 5.2.1 Lambertian Surface 102
6
SosVE>Z 5.2.2 Blackbody Radiator 103
bu|e cv 5.2.3 Examples 105
wBK%=7 5.3 Incoherent Light Sources 108
[6Nw)r(a( 5.4 Coherent Light Sources 109
/n|`a1! 5.4.1 Stimulated Emission 109
U& < Nhh 5.4.2 Gas Lasers 112
QC\][I> 5.4.3 Liquid Lasers 114
rJ UXA<:2 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
@JL+xfz 5.4.5 Solid-State Lasers 117
u/8urxp y 5.4.6 Other Lasers 119
_hb@O2f .
d|8iD`sZz .
/2\%X`]< .
