Optical Metrology Third Edition ! B )Em , H[o .r= Kjell J. G˚asvik
$ \P!P. Spectra Vision AS, Trondheim, Norway
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s@3!G+ -} l_}c[bAUu Preface to the Third Edition xi
TS1 k'<c? 1Basics 1
;wvV hQ 1.1 Introduction 1
i,bFe&7J 1.2 Wave Motion. The Electromagnetic Spectrum 1
Z3#3xG5pl 1.3 The Plane Wave. Light Rays 3
(iS94}-) 1.4 Phase Difference 4
#4" \\ 1.5 Complex Notation. Complex Amplitude 5
\< z{ @ 1.6 Oblique Incidence of A Plane Wave 5
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6 1.7 The Spherical Wave 7
}Rt<^oya* 1.8 The Intensity 8
s}HT x Y ; 1.9 Geometrical Optics 8
v1)j Z.: 1.10 The Simple Convex (Positive) Lens 10
^ AEg?[q 1.11 A Plane-Wave Set-Up 11
E26ZVFg 2 Gaussian Optics 15
^|gN?:fA} 2.1 Introduction 15
oHa6fi 2.2 Refraction at a Spherical Surface 15
Y8CXin h 2.2.1 Examples 19
+" d{P,[3J 2.3 The General Image-Forming System 19
Y}Qu-fm 2.4 The Image-Formation Process 21
o\2#}eie 2.5 Reflection at a Spherical Surface 23
m*a0V 2.6 Aspheric Lenses 25
.Wa6?r<g 2.7 Stops and Apertures 26
]AfeaU'> 2.8 Lens Aberrations. Computer Lens Design 28
Z& } 94 2.9 Imaging and The Lens Formula 29
s jzZl*GSy 2.10 Standard Optical Systems 30
8ztY_"]3p 2.10.1 Afocal Systems. The Telescope 30
b8`O7@ar 2.10.2 The Simple Magnifier 32
f d)}I23Q' 2.10.3 The Microscope 34
;xj ^*b 3 Interference 37
L;v#9^Fq 3.1 Introduction 37
NVOY,g=3X 3.2 General Description 37
{cG&l:-r 3.3 Coherence 38
8cW ]jm 3.4 Interference between two Plane Waves 41
w1iQ#.4K_ 3.4.1 Laser Doppler Velocimetry (LDV) 45
`|] ju c 3.5 Interference between other Waves 46
K@?S0K MK 3.6 Interferometry 49
oFY'Ek;d 3.6.1 Wavefront Division 50
EnfSVG8kB8 3.6.2 Amplitude Division 51
~>qcV=F^d, 3.6.3 The Dual-Frequency Michelson Interferometer 54
G2e m>W_n 3.6.4 Heterodyne (Homodyne) Detection 55
;%Z)$+Z_)< 3.7 Spatial and Temporal Coherence 56
xOEj+%M 3.8 Optical Coherence Tomography 61
%3~jg 4 Diffraction 67
s 3t{freM 4.1 Introduction 67
'jfI1 ]q 4.2 Diffraction from a Single Slit 67
-1U ]@s 4.3 Diffraction from a Grating 70
n!f @JHL 4.3.1 The Grating Equation. Amplitude Transmittance 70
'5{gWV` 4.3.2 The Spatial Frequency Spectrum 73
$@DXS~ UQA 4.4 Fourier Optics 75
|*8 J.H*r 4.5 Optical Filtering 76
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%) 4.5.1 Practical Filtering Set-Ups 78
$e0sa=/ 4.6 Physical Optics Description
.PF~8@1ju of Image Formation 81
k2O==IG]6 4.6.1 The Coherent Transfer Function 83
y5oiH 4.6.2 The Incoherent Transfer Function 85
E*k=8$Y 4.6.3 The Depth of Focus 88
t*n!kXa 4.7 The Phase-Modulated Sinusoidal Grating 89
Wny{qj)= 5 Light Sources and Detectors 99
V<(cW'zA/ 5.1 Introduction 99
Z(CzU {7c 5.2 Radiometry. Photometry 99
?L7z\b"_~ 5.2.1 Lambertian Surface 102
Vbz$dpT 5.2.2 Blackbody Radiator 103
5J1,Usm 5.2.3 Examples 105
esFBWJ 5.3 Incoherent Light Sources 108
]BX|G`CCc 5.4 Coherent Light Sources 109
^Z;5e @S 5.4.1 Stimulated Emission 109
2}hEBw68 5.4.2 Gas Lasers 112
3M/kfy 5.4.3 Liquid Lasers 114
4R}2H>VV% 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
(LQ*U3J]_ 5.4.5 Solid-State Lasers 117
i?||R|>;"' 5.4.6 Other Lasers 119
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