Optical Metrology Third Edition 4]dPhsey 1m 
+ZZiZ&y +>:X4A * Preface to the Third Edition xi
Y":hb;& 1Basics 1
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1.1 Introduction 1
Y0eu ^p) 1.2 Wave Motion. The Electromagnetic Spectrum 1
GzR;`,_O/ 1.3 The Plane Wave. Light Rays 3
T:}Ed_m}q 1.4 Phase Difference 4
-nd6 h x 1.5 Complex Notation. Complex Amplitude 5
u?'X%'K* 1.6 Oblique Incidence of A Plane Wave 5
.OWIlT4K 1.7 The Spherical Wave 7
hQet?*diU 1.8 The Intensity 8
, 1`eH[ 1.9 Geometrical Optics 8
P4N{lQ.> 1.10 The Simple Convex (Positive) Lens 10
8;Pdd1GyUL 1.11 A Plane-Wave Set-Up 11
(sl]%RjGa 2 Gaussian Optics 15
?3z x?>sG 2.1 Introduction 15
mV4} - 2.2 Refraction at a Spherical Surface 15
OVivJx 2.2.1 Examples 19
` 8 6b 2.3 The General Image-Forming System 19
Fvv6<E 2.4 The Image-Formation Process 21
Tw`l4S& 2.5 Reflection at a Spherical Surface 23
Aw| 3W ] 2.6 Aspheric Lenses 25
}5S2v+zE 2.7 Stops and Apertures 26
tx.YW9xD 2.8 Lens Aberrations. Computer Lens Design 28
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Q,DumOq 2.10 Standard Optical Systems 30
$L`7 J$'^ 2.10.1 Afocal Systems. The Telescope 30
vu#:D1/BB 2.10.2 The Simple Magnifier 32
IM@Qe|5 2.10.3 The Microscope 34
#Gg^f m 3 Interference 37
\ o3i9Q9C 3.1 Introduction 37
gM= ~dBz 3.2 General Description 37
Hm iwpI 3.3 Coherence 38
@a3<fmJ 3.4 Interference between two Plane Waves 41
>H%8~ Oek 3.4.1 Laser Doppler Velocimetry (LDV) 45
nv8,O= #s 3.5 Interference between other Waves 46
}Jtaq[y\r 3.6 Interferometry 49
oC?b]tzj 3.6.1 Wavefront Division 50
1ii.nt1 u 3.6.2 Amplitude Division 51
i &KbzOY 3.6.3 The Dual-Frequency Michelson Interferometer 54
XH*^#c 3.6.4 Heterodyne (Homodyne) Detection 55
mee-Qq:} 3.7 Spatial and Temporal Coherence 56
n/ 8fv~zU 3.8 Optical Coherence Tomography 61
[+%*s3`c# 4 Diffraction 67
~/.&Z`ls 4.1 Introduction 67
+HcH]D; 4.2 Diffraction from a Single Slit 67
Fb}9cpz { 4.3 Diffraction from a Grating 70
N0Y! 4.3.1 The Grating Equation. Amplitude Transmittance 70
. = +7H`A 4.3.2 The Spatial Frequency Spectrum 73
O4#zsr:" 4.4 Fourier Optics 75
2 n7[Op 4.5 Optical Filtering 76
-^Lj ~O 4.5.1 Practical Filtering Set-Ups 78
m Ph; 4.6 Physical Optics Description
#" OKO6] of Image Formation 81
tJn2:}-s 4.6.1 The Coherent Transfer Function 83
9 o18VJR 4.6.2 The Incoherent Transfer Function 85
Z*Y?"1ar 4.6.3 The Depth of Focus 88
j IW:O 4.7 The Phase-Modulated Sinusoidal Grating 89
XNl!(2x'pb 5 Light Sources and Detectors 99
!hc7i=V ? 5.1 Introduction 99
l&yR-FJ7KY 5.2 Radiometry. Photometry 99
/bb4nM_E/ 5.2.1 Lambertian Surface 102
] x Kmz 5.2.2 Blackbody Radiator 103
I2Us!W>6- 5.2.3 Examples 105
1,mf]7k$ 5.3 Incoherent Light Sources 108
FStfGN 5.4 Coherent Light Sources 109
ox*Ka] 5.4.1 Stimulated Emission 109
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6 5.4.2 Gas Lasers 112
J'7Oxjlg 5.4.3 Liquid Lasers 114
7 +fik0F 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
;F:(5GBi 5.4.5 Solid-State Lasers 117
N,O[pTwj 5.4.6 Other Lasers 119
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