Optical Metrology Third Edition u=& $Z nAk ;a|Q Kjell J. G˚asvik
.( X!*J]G Spectra Vision AS, Trondheim, Norway
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Qo])A6$IU (&xIB F_6 Preface to the Third Edition xi
GpGq' 8|( 1Basics 1
ldNWdz 1.1 Introduction 1
VCc57 Bo 1.2 Wave Motion. The Electromagnetic Spectrum 1
yYPFk 1.3 The Plane Wave. Light Rays 3
.7r$jmuFs 1.4 Phase Difference 4
]X<L~s_* 1.5 Complex Notation. Complex Amplitude 5
f\c%G=y 1.6 Oblique Incidence of A Plane Wave 5
zD):
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Na{&aqdz 1.8 The Intensity 8
#r;uM+ 1.9 Geometrical Optics 8
Q vm[2mb 1.10 The Simple Convex (Positive) Lens 10
L ]QBh\ 1.11 A Plane-Wave Set-Up 11
H;Cv] - 2 Gaussian Optics 15
Q)ZbnR2Z8 2.1 Introduction 15
{z*`*
O@ 2.2 Refraction at a Spherical Surface 15
7 ^n{BsN 2.2.1 Examples 19
)d7U3i 2.3 The General Image-Forming System 19
E9#.!re|^ 2.4 The Image-Formation Process 21
=8 01nZJ 2.5 Reflection at a Spherical Surface 23
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2.6 Aspheric Lenses 25
^|lG9z%Foy 2.7 Stops and Apertures 26
apd"p{ 2.8 Lens Aberrations. Computer Lens Design 28
c%x. cbu> 2.9 Imaging and The Lens Formula 29
a 8.Xy])! 2.10 Standard Optical Systems 30
%tZ[wwt 2.10.1 Afocal Systems. The Telescope 30
f <l .%B 2.10.2 The Simple Magnifier 32
&~sk7iGi 2.10.3 The Microscope 34
t0 +D~F(g 3 Interference 37
_T (MMc 3.1 Introduction 37
A]AM |2 D 3.2 General Description 37
Aj "SSX!L 3.3 Coherence 38
CQ^ I;[=d 3.4 Interference between two Plane Waves 41
axLO: Q, 3.4.1 Laser Doppler Velocimetry (LDV) 45
m_,j)A% 3.5 Interference between other Waves 46
of>}fJ_p 3.6 Interferometry 49
/<it 2= 3.6.1 Wavefront Division 50
VIg=| Oe), 3.6.2 Amplitude Division 51
*&vi3#ur 3.6.3 The Dual-Frequency Michelson Interferometer 54
h sHtLH+@ 3.6.4 Heterodyne (Homodyne) Detection 55
=*Y=u6 ? 3.7 Spatial and Temporal Coherence 56
XaR(~2 3.8 Optical Coherence Tomography 61
{p M 3f 4 Diffraction 67
Cswa5 l`af 4.1 Introduction 67
["XS|"D M 4.2 Diffraction from a Single Slit 67
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4.3 Diffraction from a Grating 70
qwDoYy yu 4.3.1 The Grating Equation. Amplitude Transmittance 70
MRL, #+VxA 4.3.2 The Spatial Frequency Spectrum 73
k80!!S=_> 4.4 Fourier Optics 75
Jej-b<HmQ 4.5 Optical Filtering 76
atWB*kqI 4.5.1 Practical Filtering Set-Ups 78
;+4X< )y*> 4.6 Physical Optics Description
2mVLR;s{_ of Image Formation 81
d&5GkD.P 4.6.1 The Coherent Transfer Function 83
iMXK_O% 4.6.2 The Incoherent Transfer Function 85
jN^09T49 4.6.3 The Depth of Focus 88
W5a>6u=g, 4.7 The Phase-Modulated Sinusoidal Grating 89
X]A bBzy 5 Light Sources and Detectors 99
NzuH&o][ 5.1 Introduction 99
6v9A7g;4. 5.2 Radiometry. Photometry 99
.W q " 5.2.1 Lambertian Surface 102
*r]Mn~3 5.2.2 Blackbody Radiator 103
f+D a W 5.2.3 Examples 105
VKXZA2<?' 5.3 Incoherent Light Sources 108
&4-rDR, 5.4 Coherent Light Sources 109
m=p< .%a 5.4.1 Stimulated Emission 109
O4w:BWVsn 5.4.2 Gas Lasers 112
x:WxEw>R 5.4.3 Liquid Lasers 114
4E.K6=k|=a 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
}%I)b U 5.4.5 Solid-State Lasers 117
0&|,HK 5.4.6 Other Lasers 119
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