Optical Metrology Third Edition t:LcNlN| fFjH "2WD Kjell J. G˚asvik
>+5?F*`\D* Spectra Vision AS, Trondheim, Norway
1{_A:<VBl
'&;yT[ >!6i3E^ Preface to the Third Edition xi
7kKy\W 1Basics 1
R_sC! - 1.1 Introduction 1
9;%CHb& 1.2 Wave Motion. The Electromagnetic Spectrum 1
f`>/
H!<2 1.3 The Plane Wave. Light Rays 3
~7!7\i,Y8\ 1.4 Phase Difference 4
D\/xu-& 1.5 Complex Notation. Complex Amplitude 5
ZtVAEIZ) 1.6 Oblique Incidence of A Plane Wave 5
W(fr<<hL 1.7 The Spherical Wave 7
J/);"bg_O 1.8 The Intensity 8
QCPID: 1.9 Geometrical Optics 8
I|$
RJkD 1.10 The Simple Convex (Positive) Lens 10
)Z+{|^`kJ 1.11 A Plane-Wave Set-Up 11
i~J;G#b 2 Gaussian Optics 15
*=Z26 2.1 Introduction 15
&/.hx(#d 2.2 Refraction at a Spherical Surface 15
W\f9jfD 2.2.1 Examples 19
}Vu\(~ 2.3 The General Image-Forming System 19
TST4Vy3 2.4 The Image-Formation Process 21
~8`:7m? 2.5 Reflection at a Spherical Surface 23
9]$8MY 2.6 Aspheric Lenses 25
-VDo[Zy 2.7 Stops and Apertures 26
8&"(WuZ@ 2.8 Lens Aberrations. Computer Lens Design 28
#sKWd 2.9 Imaging and The Lens Formula 29
Kt>X[o3m, 2.10 Standard Optical Systems 30
mmw^{MK! 2.10.1 Afocal Systems. The Telescope 30
=G~~?>=@2 2.10.2 The Simple Magnifier 32
Q-rL$%~=' 2.10.3 The Microscope 34
BcA31% 3 Interference 37
/W#O + 3.1 Introduction 37
[=*E+Oc 3.2 General Description 37
q^rl) 3.3 Coherence 38
mxwdugr` 3.4 Interference between two Plane Waves 41
*p ? e.%nd 3.4.1 Laser Doppler Velocimetry (LDV) 45
!\[+99F# 3.5 Interference between other Waves 46
I>h<b_y 3.6 Interferometry 49
f]~c)P
Cs 3.6.1 Wavefront Division 50
uQLlA&I" 3.6.2 Amplitude Division 51
^C&+
~+ 3.6.3 The Dual-Frequency Michelson Interferometer 54
?(KvQK|d4 3.6.4 Heterodyne (Homodyne) Detection 55
(\puf+ 3.7 Spatial and Temporal Coherence 56
RaSz>-3d 3.8 Optical Coherence Tomography 61
P];JKE% 4 Diffraction 67
0@1:M
4.1 Introduction 67
~$O1`IT 4.2 Diffraction from a Single Slit 67
c.H?4j7ga 4.3 Diffraction from a Grating 70
WKA'=,`v 4.3.1 The Grating Equation. Amplitude Transmittance 70
@E`?<|B} 4.3.2 The Spatial Frequency Spectrum 73
i`%. 4.4 Fourier Optics 75
`29TY&p+" 4.5 Optical Filtering 76
\o3"~\|6C 4.5.1 Practical Filtering Set-Ups 78
$mco0%$ 4.6 Physical Optics Description
xSpC'"
of Image Formation 81
Y ?]G}5 4.6.1 The Coherent Transfer Function 83
9Z\z96O- 4.6.2 The Incoherent Transfer Function 85
A,~Hlw 4.6.3 The Depth of Focus 88
b'>8ZIY 4.7 The Phase-Modulated Sinusoidal Grating 89
ApPy]IdwX 5 Light Sources and Detectors 99
`NwdbKX 5.1 Introduction 99
_J?SIm 5.2 Radiometry. Photometry 99
>Pe:I 5.2.1 Lambertian Surface 102
E(+T* 5.2.2 Blackbody Radiator 103
{g/wY%u= 5.2.3 Examples 105
o}8{Bh^ 5.3 Incoherent Light Sources 108
`0BdMKjA 5.4 Coherent Light Sources 109
eNySJf 5.4.1 Stimulated Emission 109
%|3e.1oX 5.4.2 Gas Lasers 112
&yH#s
8^8 5.4.3 Liquid Lasers 114
2]jPv0u 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
twqFs 5.4.5 Solid-State Lasers 117
i%(yk#=V 5.4.6 Other Lasers 119
(b/d0HCND .
t\5c@j p .
.PVLWW .