Optical Metrology Third Edition 7<FI[ ..jc^'L Kjell J. G˚asvik
%oPW`r Spectra Vision AS, Trondheim, Norway
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U9w0kcUw#J 6ub-NtVu Preface to the Third Edition xi
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Dq{h 1Basics 1
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3 H" 1.1 Introduction 1
^`M,ju 1.2 Wave Motion. The Electromagnetic Spectrum 1
\"=4)Huv 1.3 The Plane Wave. Light Rays 3
BK>3rjXi>a 1.4 Phase Difference 4
Z;M}.'BE 1.5 Complex Notation. Complex Amplitude 5
TCShS}q;% 1.6 Oblique Incidence of A Plane Wave 5
HURrk~[ 1.7 The Spherical Wave 7
/QuuBtp 1.8 The Intensity 8
VF#2I%R* 1.9 Geometrical Optics 8
r?cDyQE 1.10 The Simple Convex (Positive) Lens 10
KX8$j$yW 1.11 A Plane-Wave Set-Up 11
=VA5!-6<Uq 2 Gaussian Optics 15
pO]{Y?X: 2.1 Introduction 15
iczJXA+ 2.2 Refraction at a Spherical Surface 15
i'XW)n 2.2.1 Examples 19
/%qw-v9qPV 2.3 The General Image-Forming System 19
Xn:5pd;?B6 2.4 The Image-Formation Process 21
[l~Gwaul> 2.5 Reflection at a Spherical Surface 23
Ml-GAkgG 2.6 Aspheric Lenses 25
.`w[A 2.7 Stops and Apertures 26
_#f+@)vR 2.8 Lens Aberrations. Computer Lens Design 28
X8(H#Ef[ 2.9 Imaging and The Lens Formula 29
cf\PG&S 2.10 Standard Optical Systems 30
T2EQQFs 2.10.1 Afocal Systems. The Telescope 30
UXs=7H". 2.10.2 The Simple Magnifier 32
96a2G,c>V 2.10.3 The Microscope 34
H]]UsY` 3 Interference 37
6?B'3~r 3.1 Introduction 37
R1,.H92 3.2 General Description 37
%w9/gD 3.3 Coherence 38
&P2tzY' 3.4 Interference between two Plane Waves 41
3)D' Yx 3.4.1 Laser Doppler Velocimetry (LDV) 45
sGBm[lplz 3.5 Interference between other Waves 46
K!AW8FnHkZ 3.6 Interferometry 49
+-%&,>R 3.6.1 Wavefront Division 50
4k$i:st; 3.6.2 Amplitude Division 51
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c{ 3.6.3 The Dual-Frequency Michelson Interferometer 54
D./!/>@f 3.6.4 Heterodyne (Homodyne) Detection 55
mBAI";L3 3.7 Spatial and Temporal Coherence 56
vw.rkAGY 3.8 Optical Coherence Tomography 61
Kp]\r-5UD> 4 Diffraction 67
>JSk/]" 4.1 Introduction 67
5yA1<&z 4.2 Diffraction from a Single Slit 67
)># Y,/q 4.3 Diffraction from a Grating 70
v8{ jEAK 4.3.1 The Grating Equation. Amplitude Transmittance 70
So6ZNh9 4.3.2 The Spatial Frequency Spectrum 73
DHI%R< 4.4 Fourier Optics 75
+ConK>; 4.5 Optical Filtering 76
a9f!f %9 4.5.1 Practical Filtering Set-Ups 78
to2#PXf]y 4.6 Physical Optics Description
aLo^f=S of Image Formation 81
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?cyBF*o 4.6.2 The Incoherent Transfer Function 85
r%:Q(|v? 4.6.3 The Depth of Focus 88
6H]rO3[8 4.7 The Phase-Modulated Sinusoidal Grating 89
2`Dqu"TWh 5 Light Sources and Detectors 99
U{`Q_Uw@$: 5.1 Introduction 99
HpXQD; 5.2 Radiometry. Photometry 99
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k vuSE 5.2.2 Blackbody Radiator 103
^i"~6QYE 5.2.3 Examples 105
bmid;X| 5.3 Incoherent Light Sources 108
!^Ly#$-X 5.4 Coherent Light Sources 109
<2.87: 5.4.1 Stimulated Emission 109
{M_*hR;lL 5.4.2 Gas Lasers 112
`] fud{ 5.4.3 Liquid Lasers 114
>b1#dEY 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
c4Leh"ry 5.4.5 Solid-State Lasers 117
/W|=Or2oR 5.4.6 Other Lasers 119
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