Optical Metrology Third Edition C |P (,Xp PPj%.i) Kjell J. G˚asvik
JO&+W^$uY} Spectra Vision AS, Trondheim, Norway
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7loIjT7 [*d<LAnuWP Preface to the Third Edition xi
TH? wXd\ 1Basics 1
}PxP J$o 1.1 Introduction 1
KdLj1T 1.2 Wave Motion. The Electromagnetic Spectrum 1
H1hADn 1.3 The Plane Wave. Light Rays 3
9&'HhJm 1.4 Phase Difference 4
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` 1.5 Complex Notation. Complex Amplitude 5
l vfplA 1.6 Oblique Incidence of A Plane Wave 5
)q>q]eHz 1.7 The Spherical Wave 7
4/ Xu,pT 1.8 The Intensity 8
*&$2us0%% 1.9 Geometrical Optics 8
0 ;2ApYks 1.10 The Simple Convex (Positive) Lens 10
P/T`q:<H 1.11 A Plane-Wave Set-Up 11
ETrL3W < 2 Gaussian Optics 15
rz.`$ 2.1 Introduction 15
5@ `dKFB5 2.2 Refraction at a Spherical Surface 15
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2.2.1 Examples 19
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&6\f;T4 2.4 The Image-Formation Process 21
K'S \$ 2.5 Reflection at a Spherical Surface 23
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. 2.6 Aspheric Lenses 25
#EIcP=1m4 2.7 Stops and Apertures 26
SfUbjs@a 2.8 Lens Aberrations. Computer Lens Design 28
-k,?cEjCs 2.9 Imaging and The Lens Formula 29
jF|LP W l 2.10 Standard Optical Systems 30
!X+}W[Ic^ 2.10.1 Afocal Systems. The Telescope 30
ivJTE 2.10.2 The Simple Magnifier 32
+"JQ5~7 2.10.3 The Microscope 34
RW^e#z>m"E 3 Interference 37
|!*abc\`(` 3.1 Introduction 37
R|R3Ob.e 3.2 General Description 37
$c7Utm s 3.3 Coherence 38
>W^)1E,Qh 3.4 Interference between two Plane Waves 41
QUz_2rN^ 3.4.1 Laser Doppler Velocimetry (LDV) 45
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%QFeQ(b/( 3.6 Interferometry 49
DUyUA'*4n| 3.6.1 Wavefront Division 50
#s|,o Im 3.6.2 Amplitude Division 51
?EA&kZR] 3.6.3 The Dual-Frequency Michelson Interferometer 54
(]sk3
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z i3gE$7 3.7 Spatial and Temporal Coherence 56
la 89> pF 3.8 Optical Coherence Tomography 61
15"[MX A 4 Diffraction 67
Pv Vn}i 4.1 Introduction 67
?<D1] Xv 4.2 Diffraction from a Single Slit 67
zN7Ou . 4.3 Diffraction from a Grating 70
1ow e'7\J 4.3.1 The Grating Equation. Amplitude Transmittance 70
Pt?d+ aBtV 4.3.2 The Spatial Frequency Spectrum 73
ts ;C:.X 4.4 Fourier Optics 75
'2v$xOh!y 4.5 Optical Filtering 76
AqjEz+TVt 4.5.1 Practical Filtering Set-Ups 78
7*g'4p- 4.6 Physical Optics Description
-59;Zn/ of Image Formation 81
vKTCS 4.6.1 The Coherent Transfer Function 83
.oz(,$CS" 4.6.2 The Incoherent Transfer Function 85
r l XMrn 4.6.3 The Depth of Focus 88
gbN@EJ 4.7 The Phase-Modulated Sinusoidal Grating 89
o g8"#% 5 Light Sources and Detectors 99
[OQ+&\ 5.1 Introduction 99
ki9vJ< 5.2 Radiometry. Photometry 99
-k }&{v 5.2.1 Lambertian Surface 102
I8L oXY 5.2.2 Blackbody Radiator 103
f}{Oj-:"CC 5.2.3 Examples 105
-ZBSkyMGy 5.3 Incoherent Light Sources 108
?CZ*MMV 5.4 Coherent Light Sources 109
Pc=:j( 5.4.1 Stimulated Emission 109
l#;o^H i 5.4.2 Gas Lasers 112
}R)A%FKi@ 5.4.3 Liquid Lasers 114
uG 7ll5Yy 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
.:2=VLuj U 5.4.5 Solid-State Lasers 117
|n\(I$ 5.4.6 Other Lasers 119
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