Optical Metrology Third Edition E0*'AZi& ` -N&cc Kjell J. G˚asvik
= pS\gLQu Spectra Vision AS, Trondheim, Norway
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kM?p >V6 :{tvAdMl7 Preface to the Third Edition xi
Az2$\ 1Basics 1
s/K}]F 1.1 Introduction 1
w{"GA ~= 1.2 Wave Motion. The Electromagnetic Spectrum 1
Z qg(\ 1.3 The Plane Wave. Light Rays 3
b_ | 1.4 Phase Difference 4
PaFJw5f 1.5 Complex Notation. Complex Amplitude 5
0fP qO2 1.6 Oblique Incidence of A Plane Wave 5
wQ,RZO3 1.7 The Spherical Wave 7
pTK|u! fs 1.8 The Intensity 8
K/u`W z ~A 1.9 Geometrical Optics 8
E#FyL>:.h 1.10 The Simple Convex (Positive) Lens 10
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_r 1.11 A Plane-Wave Set-Up 11
n]@+<TA<uA 2 Gaussian Optics 15
97Qng*i 2.1 Introduction 15
`8TM<az-L 2.2 Refraction at a Spherical Surface 15
[hS?d.D 2.2.1 Examples 19
j]<T\O>t> 2.3 The General Image-Forming System 19
R6Cm:4m}I 2.4 The Image-Formation Process 21
_|Ml6;1 aZ 2.5 Reflection at a Spherical Surface 23
]Nvtiw 6 2.6 Aspheric Lenses 25
|Tz4 xTK 2.7 Stops and Apertures 26
k[ Iwxl;/ 2.8 Lens Aberrations. Computer Lens Design 28
v[6 BESu 2.9 Imaging and The Lens Formula 29
| pp @ 2.10 Standard Optical Systems 30
&hba{!`y 2.10.1 Afocal Systems. The Telescope 30
Y(SgfWeK@1 2.10.2 The Simple Magnifier 32
~]/X,Cf 2.10.3 The Microscope 34
N) h>Ie 3 Interference 37
XI\aZ\v 3.1 Introduction 37
7Yxy2[ 3.2 General Description 37
G6eC.vU]j 3.3 Coherence 38
}FMl4 _}u 3.4 Interference between two Plane Waves 41
vd /_`l.D 3.4.1 Laser Doppler Velocimetry (LDV) 45
('uYA&9 3.5 Interference between other Waves 46
]+ ':=&+: 3.6 Interferometry 49
&bj :,$@ 3.6.1 Wavefront Division 50
&u"*vG (U[ 3.6.2 Amplitude Division 51
`z)!!y 3.6.3 The Dual-Frequency Michelson Interferometer 54
im+2)9f 3.6.4 Heterodyne (Homodyne) Detection 55
BPrA*u }T 3.7 Spatial and Temporal Coherence 56
i :kWO7aP 3.8 Optical Coherence Tomography 61
P+3G*M=} 4 Diffraction 67
0 \ LkJ*i 4.1 Introduction 67
_ |TE )h 4.2 Diffraction from a Single Slit 67
G-3.- 4.3 Diffraction from a Grating 70
%T6#c7U_ 4.3.1 The Grating Equation. Amplitude Transmittance 70
&J hN &Ur 4.3.2 The Spatial Frequency Spectrum 73
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4.4 Fourier Optics 75
yK?~X V: 4.5 Optical Filtering 76
Ti3BlWQH 4.5.1 Practical Filtering Set-Ups 78
#4//2N 4.6 Physical Optics Description
Q '+N72= of Image Formation 81
p!ae L}g` 4.6.1 The Coherent Transfer Function 83
X=\ #n-* 4.6.2 The Incoherent Transfer Function 85
4!k={Pd 4.6.3 The Depth of Focus 88
"}SER C7 4.7 The Phase-Modulated Sinusoidal Grating 89
4rM77Uw> 5 Light Sources and Detectors 99
<YeF?$S} 5.1 Introduction 99
38q@4U=aiw 5.2 Radiometry. Photometry 99
XFu@XUk!K 5.2.1 Lambertian Surface 102
`8dE8:# Y 5.2.2 Blackbody Radiator 103
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- Ez| 5.3 Incoherent Light Sources 108
>>$IHz4Z" 5.4 Coherent Light Sources 109
eF8`an5S 5.4.1 Stimulated Emission 109
INbjk;k 5.4.2 Gas Lasers 112
cZ!s/^o?f 5.4.3 Liquid Lasers 114
0dcXgP 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
km c9P& 5.4.5 Solid-State Lasers 117
o~-X7)] 5.4.6 Other Lasers 119
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