Optical Metrology Third Edition b4$-?f?V v<z%\`y Kjell J. G˚asvik
OBCRZ Spectra Vision AS, Trondheim, Norway
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Jn_; cN 4EiEE{9V Preface to the Third Edition xi
8N|y 1Basics 1
HV^*_ 1.1 Introduction 1
p9[J9D3~ 1.2 Wave Motion. The Electromagnetic Spectrum 1
[D=3:B&f 1.3 The Plane Wave. Light Rays 3
d!%:Ok 1.4 Phase Difference 4
#lM :BO 1.5 Complex Notation. Complex Amplitude 5
U[b$VZ} 1.6 Oblique Incidence of A Plane Wave 5
4Y[uqn[ 1.7 The Spherical Wave 7
I-Ya#s#m 1.8 The Intensity 8
Ub8|x]ix 1.9 Geometrical Optics 8
iv*Ft.1t 1.10 The Simple Convex (Positive) Lens 10
OA??fb,b 1.11 A Plane-Wave Set-Up 11
vt" 7[!O 2 Gaussian Optics 15
OE(Z)|LF 2.1 Introduction 15
MH+t`/E0] 2.2 Refraction at a Spherical Surface 15
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4AyA$t 2.2.1 Examples 19
xA-O?s"CY 2.3 The General Image-Forming System 19
bojx:g 2.4 The Image-Formation Process 21
<B*}W2\ 2.5 Reflection at a Spherical Surface 23
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fQ@ 2.6 Aspheric Lenses 25
;=IGl: 2.7 Stops and Apertures 26
VemgG)\ 2.8 Lens Aberrations. Computer Lens Design 28
LO,G2] 2.9 Imaging and The Lens Formula 29
W[]N.d7G 2.10 Standard Optical Systems 30
E.$1CGd+ 2.10.1 Afocal Systems. The Telescope 30
%.kJ@@_e 2.10.2 The Simple Magnifier 32
cCd2f>EHw 2.10.3 The Microscope 34
dHnR)[?e 3 Interference 37
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Q]7Rqslz 3.2 General Description 37
`gIlS^Q 3.3 Coherence 38
.R/`Y)4 3.4 Interference between two Plane Waves 41
<6=kwV6 3.4.1 Laser Doppler Velocimetry (LDV) 45
^d! (8vh 3.5 Interference between other Waves 46
H1H+TTZr 3.6 Interferometry 49
15i8) 4h 3.6.1 Wavefront Division 50
T/#$44ub 3.6.2 Amplitude Division 51
kETu@la} 3.6.3 The Dual-Frequency Michelson Interferometer 54
yp=(wcJ 3.6.4 Heterodyne (Homodyne) Detection 55
ssv4#8p3 3.7 Spatial and Temporal Coherence 56
xeqAFq=9? 3.8 Optical Coherence Tomography 61
S.bB.< 4 Diffraction 67
MXWCYi 4.1 Introduction 67
9 |Cu2 4.2 Diffraction from a Single Slit 67
b$kCyOg 4.3 Diffraction from a Grating 70
Tti]H9g_ 4.3.1 The Grating Equation. Amplitude Transmittance 70
IG?044Y 4.3.2 The Spatial Frequency Spectrum 73
/F;b<kIy8 4.4 Fourier Optics 75
vDgf} 4.5 Optical Filtering 76
^PY*INv 4.5.1 Practical Filtering Set-Ups 78
x?0ZzB), 4.6 Physical Optics Description
\e%H5Wx of Image Formation 81
sGjYL>* 4.6.1 The Coherent Transfer Function 83
Hn%n>Bnl 4.6.2 The Incoherent Transfer Function 85
KXEDpr 4.6.3 The Depth of Focus 88
PSX-b)wb 4.7 The Phase-Modulated Sinusoidal Grating 89
;Ub;AqY 5 Light Sources and Detectors 99
VY)!bjW. 5.1 Introduction 99
_Y'+E 5.2 Radiometry. Photometry 99
#F\}PCBe' 5.2.1 Lambertian Surface 102
Iy\{)+}aS 5.2.2 Blackbody Radiator 103
oR'8|~U@B 5.2.3 Examples 105
%/17K2g 5.3 Incoherent Light Sources 108
H tIl;E 5.4 Coherent Light Sources 109
6$TE-l 5.4.1 Stimulated Emission 109
H-GlCVq~ 5.4.2 Gas Lasers 112
)BR6?C3 5.4.3 Liquid Lasers 114
7@R;lOzL3 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Gma)8X# 5.4.5 Solid-State Lasers 117
tgn_\ - + 5.4.6 Other Lasers 119
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