Optical Metrology Third Edition +[ J/Zw0{ m~lpy Aw Kjell J. G˚asvik
T6pLoaKu Spectra Vision AS, Trondheim, Norway
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3+J0!FVla l;sy0S"DO] Preface to the Third Edition xi
.bVmqR` 1Basics 1
l{VSb92f 1.1 Introduction 1
/%A;mlf{ 1.2 Wave Motion. The Electromagnetic Spectrum 1
+,v- =~5 1.3 The Plane Wave. Light Rays 3
<`!P CuR 1.4 Phase Difference 4
mR8W]'gl.L 1.5 Complex Notation. Complex Amplitude 5
](eN@Xi&@ 1.6 Oblique Incidence of A Plane Wave 5
=`Y.=RL+'n 1.7 The Spherical Wave 7
q> s-Y| 1.8 The Intensity 8
CSV;+ ,Vv 1.9 Geometrical Optics 8
p"*y58 1.10 The Simple Convex (Positive) Lens 10
@<M*qK1h 1.11 A Plane-Wave Set-Up 11
Qp2I[Ioz3 2 Gaussian Optics 15
NNG}M(/V 2.1 Introduction 15
$|$e% 2.2 Refraction at a Spherical Surface 15
^). ) 2.2.1 Examples 19
y<XlRTy[} 2.3 The General Image-Forming System 19
24Z]%+b*E 2.4 The Image-Formation Process 21
{F N;'Uc 2.5 Reflection at a Spherical Surface 23
V@d )?T 2.6 Aspheric Lenses 25
5]1leT 2.7 Stops and Apertures 26
'!Gs>T+ 2.8 Lens Aberrations. Computer Lens Design 28
5 cK@WE: 2.9 Imaging and The Lens Formula 29
;nmM7TZ; 2.10 Standard Optical Systems 30
fag^7r z 2.10.1 Afocal Systems. The Telescope 30
aTGdmj! 2.10.2 The Simple Magnifier 32
7ou46v|m5 2.10.3 The Microscope 34
9 1of~ffh 3 Interference 37
e75UMWaeC 3.1 Introduction 37
0a R,H[r[? 3.2 General Description 37
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.X"D8 3.3 Coherence 38
7%OKH<i\2< 3.4 Interference between two Plane Waves 41
*QM~O'WhD 3.4.1 Laser Doppler Velocimetry (LDV) 45
[oc~iDx%W 3.5 Interference between other Waves 46
`\<37E\N} 3.6 Interferometry 49
NYABmI/0c 3.6.1 Wavefront Division 50
4z:#I ; 3.6.2 Amplitude Division 51
rZ_>`}O2 3.6.3 The Dual-Frequency Michelson Interferometer 54
gQ~5M'# 3.6.4 Heterodyne (Homodyne) Detection 55
IfDx@ ?OB 3.7 Spatial and Temporal Coherence 56
JO@ Bf 3.8 Optical Coherence Tomography 61
)[&_scSa 4 Diffraction 67
U},=LsDsW4 4.1 Introduction 67
`-B+JQmen 4.2 Diffraction from a Single Slit 67
lEPAP|~u w 4.3 Diffraction from a Grating 70
[O-sV YB 4.3.1 The Grating Equation. Amplitude Transmittance 70
d~ng6pA 4.3.2 The Spatial Frequency Spectrum 73
vMSW$Bx ; 4.4 Fourier Optics 75
&jV_"_3n 4.5 Optical Filtering 76
%Hi~aRz 4.5.1 Practical Filtering Set-Ups 78
dMl+ko 4.6 Physical Optics Description
tJ& 5tNl of Image Formation 81
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Tvvq(?T 4.6.1 The Coherent Transfer Function 83
*! :QdWLq 4.6.2 The Incoherent Transfer Function 85
%-;b u| 4.6.3 The Depth of Focus 88
tn/T6C^ ) 4.7 The Phase-Modulated Sinusoidal Grating 89
, 7|; k2 5 Light Sources and Detectors 99
`PI(%N 5.1 Introduction 99
P\~{3U 5.2 Radiometry. Photometry 99
W( *V2<$o 5.2.1 Lambertian Surface 102
F.q|x|9j 5.2.2 Blackbody Radiator 103
=lr) gj 5.2.3 Examples 105
\tJFAc 5.3 Incoherent Light Sources 108
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<n 5.4 Coherent Light Sources 109
yno(' 1B@ 5.4.1 Stimulated Emission 109
<o:@dS 5.4.2 Gas Lasers 112
!)Ni dG 5.4.3 Liquid Lasers 114
A q#/2t 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
d c 0@Y 5.4.5 Solid-State Lasers 117
H!IDV }dn 5.4.6 Other Lasers 119
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