Optical Metrology Third Edition y| *X o;+$AU1 f Kjell J. G˚asvik
y<bA Y_-[ Spectra Vision AS, Trondheim, Norway
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m0+X 109 SnsOuC5Ah Preface to the Third Edition xi
I;]Q}SUsm 1Basics 1
<RfPd+</ 1.1 Introduction 1
kZ XsL 1.2 Wave Motion. The Electromagnetic Spectrum 1
dGU io? 1.3 The Plane Wave. Light Rays 3
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3 ;@CO 1.4 Phase Difference 4
t {n|!T& 1.5 Complex Notation. Complex Amplitude 5
iq_y80g`8h 1.6 Oblique Incidence of A Plane Wave 5
>h+[#3vD 1.7 The Spherical Wave 7
bkfwsYZx 1.8 The Intensity 8
$Fx:w 1.9 Geometrical Optics 8
v o vc,4} 1.10 The Simple Convex (Positive) Lens 10
|F _ Z 1.11 A Plane-Wave Set-Up 11
{[~cQgCI 2 Gaussian Optics 15
]PQ] f*Ik> 2.1 Introduction 15
=SJw CT0; 2.2 Refraction at a Spherical Surface 15
o RT<h 2.2.1 Examples 19
Ml`tDt |; 2.3 The General Image-Forming System 19
i7g+8 zd8d 2.4 The Image-Formation Process 21
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g. 2.5 Reflection at a Spherical Surface 23
EugQr<sM# 2.6 Aspheric Lenses 25
#jdo54- 2.7 Stops and Apertures 26
IR ; DdF 2.8 Lens Aberrations. Computer Lens Design 28
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v A}U.z 2.9 Imaging and The Lens Formula 29
K:Mm?28s 2.10 Standard Optical Systems 30
qI-q%]l 2.10.1 Afocal Systems. The Telescope 30
X$:r 2.10.2 The Simple Magnifier 32
n3w(zB 2.10.3 The Microscope 34
xlQl1lOX 3 Interference 37
/">A3bq 3.1 Introduction 37
)Ih '0> = 3.2 General Description 37
.yp"6S^b 3.3 Coherence 38
oNV5su 3.4 Interference between two Plane Waves 41
!FwR7`i 3.4.1 Laser Doppler Velocimetry (LDV) 45
fJ" #c<n 3.5 Interference between other Waves 46
QIl![% 3.6 Interferometry 49
VT.BHZ 3.6.1 Wavefront Division 50
< YU+W"jQT 3.6.2 Amplitude Division 51
jA ?tDAx` 3.6.3 The Dual-Frequency Michelson Interferometer 54
-P!_<\q\l 3.6.4 Heterodyne (Homodyne) Detection 55
vwZ d@%BO 3.7 Spatial and Temporal Coherence 56
Of| e]GR 3.8 Optical Coherence Tomography 61
DtBIDU] 4 Diffraction 67
YDEUiZ~ 4.1 Introduction 67
jn+NX)9 4.2 Diffraction from a Single Slit 67
}T!2IaAB 4.3 Diffraction from a Grating 70
z:PH _N~ 4.3.1 The Grating Equation. Amplitude Transmittance 70
/+pPcK 4.3.2 The Spatial Frequency Spectrum 73
b?&=gm%oU 4.4 Fourier Optics 75
C^Jf&a 4.5 Optical Filtering 76
(GnwK1f 4.5.1 Practical Filtering Set-Ups 78
Wj N0KA 4.6 Physical Optics Description
@D.]P Zf of Image Formation 81
F^i v1b 4.6.1 The Coherent Transfer Function 83
fn eg[K 4.6.2 The Incoherent Transfer Function 85
TF %8pIg>Z 4.6.3 The Depth of Focus 88
H*U\P 2C!) 4.7 The Phase-Modulated Sinusoidal Grating 89
|.D _[QI 5 Light Sources and Detectors 99
r30t`o12i 5.1 Introduction 99
j[/'`1tOe 5.2 Radiometry. Photometry 99
>m!l5/ 5.2.1 Lambertian Surface 102
FrSeR9b 5.2.2 Blackbody Radiator 103
4 uip!@$K 5.2.3 Examples 105
YM9oVF- 5.3 Incoherent Light Sources 108
&dSw[C#f 5.4 Coherent Light Sources 109
A@/DGrZX 5.4.1 Stimulated Emission 109
am I$0 5.4.2 Gas Lasers 112
jjgY4<n 5.4.3 Liquid Lasers 114
"i$uV3d 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
tMaJ; 4 5.4.5 Solid-State Lasers 117
WWF#&)ti 5.4.6 Other Lasers 119
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