Optical Metrology Third Edition #uvJH8)D &^QPkX@p Kjell J. G˚asvik
?Myh 7 Spectra Vision AS, Trondheim, Norway
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@ 6MA X" /&s}<BMHU Preface to the Third Edition xi
,)#.a%EKA 1Basics 1
-Zy)5NB-tZ 1.1 Introduction 1
Jq1 n0O 1.2 Wave Motion. The Electromagnetic Spectrum 1
@EZ>f5IO+ 1.3 The Plane Wave. Light Rays 3
d<T%`:s< 1.4 Phase Difference 4
R } %8s* 1.5 Complex Notation. Complex Amplitude 5
wh6& >m#r 1.6 Oblique Incidence of A Plane Wave 5
A~71i& 1.7 The Spherical Wave 7
;h=S7M9. 1.8 The Intensity 8
2P}I'4C- 1.9 Geometrical Optics 8
PZOORjF8A 1.10 The Simple Convex (Positive) Lens 10
I,P!@ 1.11 A Plane-Wave Set-Up 11
ww,Z )m 2 Gaussian Optics 15
:JV\){P 2.1 Introduction 15
dr]&kqm 2.2 Refraction at a Spherical Surface 15
1 9I:%$U3 2.2.1 Examples 19
Og MI 2.3 The General Image-Forming System 19
$I8[BYblB 2.4 The Image-Formation Process 21
gxM[V>[ 2.5 Reflection at a Spherical Surface 23
AzjMv6N 2.6 Aspheric Lenses 25
SMO*({/ 2.7 Stops and Apertures 26
TA;,>f* 2.8 Lens Aberrations. Computer Lens Design 28
Z3;= w%W 2.9 Imaging and The Lens Formula 29
i^/54 2.10 Standard Optical Systems 30
>]/dOH,A 2.10.1 Afocal Systems. The Telescope 30
b(&] >z 2.10.2 The Simple Magnifier 32
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m5 gI~1(9 3 Interference 37
mw+j|{[ 3.1 Introduction 37
.TN2s\:]jw 3.2 General Description 37
Je~p%m#e;K 3.3 Coherence 38
{j@+h%sF>+ 3.4 Interference between two Plane Waves 41
pt})JMm 3.4.1 Laser Doppler Velocimetry (LDV) 45
EA yukM2 3.5 Interference between other Waves 46
V/-MIH7SF 3.6 Interferometry 49
SC q3Ds ^ 3.6.1 Wavefront Division 50
NsmVd dj 3.6.2 Amplitude Division 51
lU$X4JBzS 3.6.3 The Dual-Frequency Michelson Interferometer 54
2f{ kBD 3.6.4 Heterodyne (Homodyne) Detection 55
HD00J]y_ 3.7 Spatial and Temporal Coherence 56
NbDda/7ki 3.8 Optical Coherence Tomography 61
t-EV h~D1p 4 Diffraction 67
Mjw [:70 4.1 Introduction 67
_3&/(B%H 4.2 Diffraction from a Single Slit 67
t aV|YP$ 4.3 Diffraction from a Grating 70
V.j#E 1 P 4.3.1 The Grating Equation. Amplitude Transmittance 70
8p,>y( o 4.3.2 The Spatial Frequency Spectrum 73
P#bm uCOS 4.4 Fourier Optics 75
k~|ZO/X@l% 4.5 Optical Filtering 76
` ,-STIh) 4.5.1 Practical Filtering Set-Ups 78
Iaa|qJ4 4.6 Physical Optics Description
<G9< "{ of Image Formation 81
88YC0! Ni 4.6.1 The Coherent Transfer Function 83
>w2f8tW`PP 4.6.2 The Incoherent Transfer Function 85
swt\Ru6, 4.6.3 The Depth of Focus 88
}K;iJ~kD1 4.7 The Phase-Modulated Sinusoidal Grating 89
sH@ &* 5 Light Sources and Detectors 99
i-"<[*ePd 5.1 Introduction 99
JP%RTGu 5.2 Radiometry. Photometry 99
1>;6x^_h0S 5.2.1 Lambertian Surface 102
_UIgRkl. 5.2.2 Blackbody Radiator 103
+{^'i P 5.2.3 Examples 105
VO|u8Z" 5.3 Incoherent Light Sources 108
J ~' ~[ ,K 5.4 Coherent Light Sources 109
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kY0 \V 5.4.1 Stimulated Emission 109
4w9F+*- 5.4.2 Gas Lasers 112
k!vHO 5.4.3 Liquid Lasers 114
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6 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
v?{vg?vI 5.4.5 Solid-State Lasers 117
4K'|DO|dH 5.4.6 Other Lasers 119
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