Optical Metrology Third Edition 4Oy
c D OiO L 4}5( Kjell J. G˚asvik
kp$I LZ Spectra Vision AS, Trondheim, Norway
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~9c9@!RA2 Ov|j{}=L=9 Preface to the Third Edition xi
)6j:Mbz 1Basics 1
O>Sbb2q?" 1.1 Introduction 1
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Sa 1.2 Wave Motion. The Electromagnetic Spectrum 1
Mm;)O'XDE 1.3 The Plane Wave. Light Rays 3
lrE0)B5F 1.4 Phase Difference 4
qa~[fORO[ 1.5 Complex Notation. Complex Amplitude 5
?gtkf[0B| 1.6 Oblique Incidence of A Plane Wave 5
b?$09,{0 1.7 The Spherical Wave 7
w-"&;klV 1.8 The Intensity 8
mOB\ `&h5 1.9 Geometrical Optics 8
2y a `2 m 1.10 The Simple Convex (Positive) Lens 10
G#V22Wca8 1.11 A Plane-Wave Set-Up 11
J53;w:O 2 Gaussian Optics 15
hJ<2bgQo 2.1 Introduction 15
dF,FH- 2.2 Refraction at a Spherical Surface 15
r &[~/m8zl 2.2.1 Examples 19
~<%cc+;` 2.3 The General Image-Forming System 19
UE4#j \ 2.4 The Image-Formation Process 21
M($},xAvDU 2.5 Reflection at a Spherical Surface 23
-0`hJ_( 2.6 Aspheric Lenses 25
p(G ? 2.7 Stops and Apertures 26
Ae#6=]V+^ 2.8 Lens Aberrations. Computer Lens Design 28
w}0Q y 2.9 Imaging and The Lens Formula 29
=gIYa 2.10 Standard Optical Systems 30
+Xp;T`,v 2.10.1 Afocal Systems. The Telescope 30
6S<$7=$ = 2.10.2 The Simple Magnifier 32
0- UeFy 2.10.3 The Microscope 34
P1QJ'eC;T 3 Interference 37
!D3}5A1, 3.1 Introduction 37
9zyN8v2 3.2 General Description 37
I O#W#wW$M 3.3 Coherence 38
_D9=-^ 3.4 Interference between two Plane Waves 41
3(:mRb} 3.4.1 Laser Doppler Velocimetry (LDV) 45
+ LwoBn>6 3.5 Interference between other Waves 46
>D<=9G(a 3.6 Interferometry 49
x\ rZoF.NQ 3.6.1 Wavefront Division 50
WGmCQE[/c 3.6.2 Amplitude Division 51
@nP }q!y 3.6.3 The Dual-Frequency Michelson Interferometer 54
}W bN) 3.6.4 Heterodyne (Homodyne) Detection 55
l.x }I"tf 3.7 Spatial and Temporal Coherence 56
FQFENq''B 3.8 Optical Coherence Tomography 61
v~ \ 45eEA 4 Diffraction 67
u-_$?'l;~ 4.1 Introduction 67
2M?lgh4" 4.2 Diffraction from a Single Slit 67
l 5[xJH 4.3 Diffraction from a Grating 70
]3xa{ h~4 4.3.1 The Grating Equation. Amplitude Transmittance 70
lt4jnV2"a 4.3.2 The Spatial Frequency Spectrum 73
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^ 4.4 Fourier Optics 75
lF( !(>YZ 4.5 Optical Filtering 76
~ ""MeaM8[ 4.5.1 Practical Filtering Set-Ups 78
$k ma#7 4.6 Physical Optics Description
`4 bd, of Image Formation 81
`tG _O 4.6.1 The Coherent Transfer Function 83
*f SM' q; 4.6.2 The Incoherent Transfer Function 85
~8(X@~Tn* 4.6.3 The Depth of Focus 88
N o(f0g. 4.7 The Phase-Modulated Sinusoidal Grating 89
w<Cmzkf 5 Light Sources and Detectors 99
N E3wui1 V 5.1 Introduction 99
x\.i `ukx 5.2 Radiometry. Photometry 99
xbC8Amo;8" 5.2.1 Lambertian Surface 102
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6rB 5.2.2 Blackbody Radiator 103
b@/ON}gX 5.2.3 Examples 105
{*;]I?9Al 5.3 Incoherent Light Sources 108
Oq,.Kz 5.4 Coherent Light Sources 109
#2jn 4> 5.4.1 Stimulated Emission 109
{@5WeWlz~ 5.4.2 Gas Lasers 112
e6HlOGPVQH 5.4.3 Liquid Lasers 114
_[i=TqVmf 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
`E=rh3 L0o 5.4.5 Solid-State Lasers 117
|OZ>/l { 5.4.6 Other Lasers 119
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