Optical Metrology Third Edition s0TORl6Z| <[a=ceL]| Kjell J. G˚asvik
'2A)}uR Spectra Vision AS, Trondheim, Norway
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z}77 Eh< %OL$ 57Ia Preface to the Third Edition xi
b"<liGh"n- 1Basics 1
+ B,}Q r 1.1 Introduction 1
60^`JVGWH 1.2 Wave Motion. The Electromagnetic Spectrum 1
6fE7W>la 1.3 The Plane Wave. Light Rays 3
sg^zH8,3 1.4 Phase Difference 4
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fh& nu"& 1.6 Oblique Incidence of A Plane Wave 5
\}yc`7T:L0 1.7 The Spherical Wave 7
'| 6]_ 1.8 The Intensity 8
<yV"6/l 0 1.9 Geometrical Optics 8
9d0@wq. 1.10 The Simple Convex (Positive) Lens 10
wyH[x!QX 1.11 A Plane-Wave Set-Up 11
r(>@qGN 2 Gaussian Optics 15
gMi0FO ' 2.1 Introduction 15
$8)+XmsCr 2.2 Refraction at a Spherical Surface 15
F>SRs =_ 2.2.1 Examples 19
{ T/[cu< 2.3 The General Image-Forming System 19
d~])K #oJ 2.4 The Image-Formation Process 21
@o].He@L<j 2.5 Reflection at a Spherical Surface 23
|"q5sym8Y_ 2.6 Aspheric Lenses 25
2lZ
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hk;5w{t}} 2.8 Lens Aberrations. Computer Lens Design 28
M><yGaaX/ 2.9 Imaging and The Lens Formula 29
Ye%~I`@? 2.10 Standard Optical Systems 30
'0;l]/i. 2.10.1 Afocal Systems. The Telescope 30
j.[.1 G*(" 2.10.2 The Simple Magnifier 32
x;O[c3 I 2.10.3 The Microscope 34
C!O 0xhs 3 Interference 37
_O)>$.^6 3.1 Introduction 37
( q/e1L-S 3.2 General Description 37
h:))@@7MJ 3.3 Coherence 38
EgEa1l!NSQ 3.4 Interference between two Plane Waves 41
;DQ ZT 3.4.1 Laser Doppler Velocimetry (LDV) 45
`{@8Vsmy: 3.5 Interference between other Waves 46
7uqzm 3.6 Interferometry 49
x`eo"5.$ 3.6.1 Wavefront Division 50
+q<jAW A 3.6.2 Amplitude Division 51
Y sC>i`n9 3.6.3 The Dual-Frequency Michelson Interferometer 54
TIqtF&@o4 3.6.4 Heterodyne (Homodyne) Detection 55
df8k7D;~e 3.7 Spatial and Temporal Coherence 56
.fqN|[> 3.8 Optical Coherence Tomography 61
93>jr<A 4 Diffraction 67
o+iiST JEe 4.1 Introduction 67
Hzm:xg 4.2 Diffraction from a Single Slit 67
G<z wv3 4.3 Diffraction from a Grating 70
/obfw ^ 4.3.1 The Grating Equation. Amplitude Transmittance 70
wq`s-qZu 4.3.2 The Spatial Frequency Spectrum 73
fivw~z|[@ 4.4 Fourier Optics 75
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sP pH*,( 4.5.1 Practical Filtering Set-Ups 78
*uRBzO} 4.6 Physical Optics Description
ZL&qp04} of Image Formation 81
#FLb*%Nr 4.6.1 The Coherent Transfer Function 83
4&lv6`G ` 4.6.2 The Incoherent Transfer Function 85
q4h] o^ + 4.6.3 The Depth of Focus 88
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/|m2WxK) 5 Light Sources and Detectors 99
4HXo >0 5.1 Introduction 99
:1Xz4wkWS* 5.2 Radiometry. Photometry 99
='r!g 5.2.1 Lambertian Surface 102
JAnZdfRt 5.2.2 Blackbody Radiator 103
`6(S^P 5.2.3 Examples 105
"m$##X\ 5.3 Incoherent Light Sources 108
JPI3 [ .o 5.4 Coherent Light Sources 109
Jl8H|<g~/ 5.4.1 Stimulated Emission 109
/ y40(l? 5.4.2 Gas Lasers 112
G^|:N[>B 5.4.3 Liquid Lasers 114
Pl06:g2I 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
8}x:`vDK 5.4.5 Solid-State Lasers 117
e `_ LEv 5.4.6 Other Lasers 119
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