Optical Metrology Third Edition {>PEl; ,- `\P1Ff@z0 Kjell J. G˚asvik
R )4,f~@" Spectra Vision AS, Trondheim, Norway
S_ nAO\h 
I5Ty@J # :0ltq><? Preface to the Third Edition xi
4c qf= 1Basics 1
O)DAYBv^ 1.1 Introduction 1
$ =ESY>MO 1.2 Wave Motion. The Electromagnetic Spectrum 1
t3g+>U_m 1.3 The Plane Wave. Light Rays 3
*FC|v0D 1.4 Phase Difference 4
Sb?Ua*(L: 1.5 Complex Notation. Complex Amplitude 5
h6IO ;:P) 1.6 Oblique Incidence of A Plane Wave 5
u\M xQIo'u 1.7 The Spherical Wave 7
zk!7TUZ">w 1.8 The Intensity 8
Q/]o'_[vW 1.9 Geometrical Optics 8
c<lEFk!g 1.10 The Simple Convex (Positive) Lens 10
R^=v&c{@ 1.11 A Plane-Wave Set-Up 11
}#; .b'` 2 Gaussian Optics 15
miTff[hsMa 2.1 Introduction 15
Y@< j vH1 2.2 Refraction at a Spherical Surface 15
]d~{8h!G 2.2.1 Examples 19
4;>HBCM4- 2.3 The General Image-Forming System 19
#qUGc` 2.4 The Image-Formation Process 21
G;J) [ y 2.5 Reflection at a Spherical Surface 23
@v:Eh 2.6 Aspheric Lenses 25
'/OQ[f=K 2.7 Stops and Apertures 26
bo@
?`5 2.8 Lens Aberrations. Computer Lens Design 28
)m[<lJ bw 2.9 Imaging and The Lens Formula 29
FV3[7w=D\ 2.10 Standard Optical Systems 30
RnU7|p{ 2.10.1 Afocal Systems. The Telescope 30
-"{g kjuv 2.10.2 The Simple Magnifier 32
XPZ8*8JL 2.10.3 The Microscope 34
'x<oILOG 3 Interference 37
#6~Bg)7AM 3.1 Introduction 37
A lG5n' 3.2 General Description 37
|:Maa6(W 3.3 Coherence 38
$TS97'$ 3.4 Interference between two Plane Waves 41
kj.9\ 3.4.1 Laser Doppler Velocimetry (LDV) 45
ms!|a_H7 r 3.5 Interference between other Waves 46
`S5::U6E 3.6 Interferometry 49
W'f"kM 3.6.1 Wavefront Division 50
"nb.!OG~( 3.6.2 Amplitude Division 51
w
El- 3.6.3 The Dual-Frequency Michelson Interferometer 54
+ A^|aQ 3.6.4 Heterodyne (Homodyne) Detection 55
{IvA 5^ 3.7 Spatial and Temporal Coherence 56
F |R7hqf 3.8 Optical Coherence Tomography 61
cH4 PrMm& 4 Diffraction 67
KZ% us 6 4.1 Introduction 67
5W &L cBB 4.2 Diffraction from a Single Slit 67
lN8l71N^ 4.3 Diffraction from a Grating 70
Jw&Fox7p 4.3.1 The Grating Equation. Amplitude Transmittance 70
r:g_mMvB 4.3.2 The Spatial Frequency Spectrum 73
'ey62- ^r6 4.4 Fourier Optics 75
O9o ]4; 4.5 Optical Filtering 76
](8F]J , 4.5.1 Practical Filtering Set-Ups 78
ggitUQ+t;G 4.6 Physical Optics Description
f [.'V1 of Image Formation 81
-meY[!"X 4.6.1 The Coherent Transfer Function 83
^W9O_5\g4a 4.6.2 The Incoherent Transfer Function 85
diVg|Z3T 4.6.3 The Depth of Focus 88
L;y BZLM 4.7 The Phase-Modulated Sinusoidal Grating 89
_Y/*e<bU 5 Light Sources and Detectors 99
$$W2{vr7+ 5.1 Introduction 99
~ tV7yY|zr 5.2 Radiometry. Photometry 99
'RF`XX 5.2.1 Lambertian Surface 102
-:"KFc8A 5.2.2 Blackbody Radiator 103
,6pGKCUU:y 5.2.3 Examples 105
X9SOcg3a 5.3 Incoherent Light Sources 108
Q-F$Ryj^ 5.4 Coherent Light Sources 109
`4X.UP J 5.4.1 Stimulated Emission 109
-*~
@? 5.4.2 Gas Lasers 112
: ir3u 5.4.3 Liquid Lasers 114
:g'
'GqGZ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Y'bz>@1( 5.4.5 Solid-State Lasers 117
K/*"U*9Kv 5.4.6 Other Lasers 119
^k$B x_{ .
,EVPnH[F~ .
'
Q(kx*; .
