Optical Metrology Third Edition hTa(^
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Kjell J. G˚asvik In?=$_p
Spectra Vision AS, Trondheim, Norway B2e"
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Preface to the Third Edition xi @(Y!$><Is
1Basics 1 @^xtxtjzux
1.1 Introduction 1 VGmvfhf#"
1.2 Wave Motion. The Electromagnetic Spectrum 1 &'SD1m1P
1.3 The Plane Wave. Light Rays 3 &E_a0*)e
1.4 Phase Difference 4 )V\@N*L`ik
1.5 Complex Notation. Complex Amplitude 5 7
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1.6 Oblique Incidence of A Plane Wave 5 h:nybLw?
1.7 The Spherical Wave 7 7~ PL8
1.8 The Intensity 8 OvtE)ul@
1.9 Geometrical Optics 8 sU"%,Q5
1.10 The Simple Convex (Positive) Lens 10 DcW?L^Mst
1.11 A Plane-Wave Set-Up 11 G
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2 Gaussian Optics 15 >>
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2.1 Introduction 15 LWyr
2.2 Refraction at a Spherical Surface 15 N%
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2.2.1 Examples 19 >#w;67he2
2.3 The General Image-Forming System 19 X` zWw_i
2.4 The Image-Formation Process 21 <7M-?g:vj
2.5 Reflection at a Spherical Surface 23 #;$]M4
2.6 Aspheric Lenses 25 j{@6y
2.7 Stops and Apertures 26 TxX =(7V
2.8 Lens Aberrations. Computer Lens Design 28 s
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2.9 Imaging and The Lens Formula 29 u=
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2.10 Standard Optical Systems 30 &EfQ%r}C
2.10.1 Afocal Systems. The Telescope 30 Fl-\{vOn
2.10.2 The Simple Magnifier 32 )S
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2.10.3 The Microscope 34 <h/%jM>9/
3 Interference 37 >2'"}np*
3.1 Introduction 37 ?13qDD:
3.2 General Description 37 V)j[`,M:
3.3 Coherence 38 =V[uXm
3.4 Interference between two Plane Waves 41 y0%1YY
3.4.1 Laser Doppler Velocimetry (LDV) 45 w&q[%(G_
3.5 Interference between other Waves 46 =]Vz=<
3.6 Interferometry 49 \84t\jKR
3.6.1 Wavefront Division 50 Ao\xse{E
3.6.2 Amplitude Division 51 c.ow4~>
3.6.3 The Dual-Frequency Michelson Interferometer 54 o4);5~1l
3.6.4 Heterodyne (Homodyne) Detection 55 nlwqS Xw
3.7 Spatial and Temporal Coherence 56 F$C6( C?
3.8 Optical Coherence Tomography 61 T5(S2^)o
4 Diffraction 67 Y;"k5+ q
4.1 Introduction 67
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4.2 Diffraction from a Single Slit 67 ~HZdIPcC
4.3 Diffraction from a Grating 70 d$zJLgkA
4.3.1 The Grating Equation. Amplitude Transmittance 70 Y%pab/Y
4.3.2 The Spatial Frequency Spectrum 73 2cR[~\_9.
4.4 Fourier Optics 75 xN 1P#
4.5 Optical Filtering 76 o~Se[p
4.5.1 Practical Filtering Set-Ups 78 &{}Mds
4.6 Physical Optics Description L*6'u17y
of Image Formation 81 U1[)e D`
4.6.1 The Coherent Transfer Function 83 Qp>leEs]+6
4.6.2 The Incoherent Transfer Function 85
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4.6.3 The Depth of Focus 88 Ri. tA
4.7 The Phase-Modulated Sinusoidal Grating 89 Zh"m;l/]
5 Light Sources and Detectors 99 >f(?Mxh2
5.1 Introduction 99 M]x>u@JH
5.2 Radiometry. Photometry 99 |9CikLX)7
5.2.1 Lambertian Surface 102 /jY
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5.2.2 Blackbody Radiator 103 J2YQdCL
5.2.3 Examples 105 B5b:znW2@
5.3 Incoherent Light Sources 108 ]&cnc8tC
5.4 Coherent Light Sources 109 fB+L%+mr8
5.4.1 Stimulated Emission 109 w;z7vN~/O
5.4.2 Gas Lasers 112 (|gQ
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5.4.3 Liquid Lasers 114 D(!^$9e9b
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 ~b f\fPm
5.4.5 Solid-State Lasers 117 H_+n_r*
5.4.6 Other Lasers 119 #9vC]Gm
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