Optical Metrology Third Edition 3+j^E6@ Agz=8=S% Kjell J. G˚asvik
\Me"'.F? Spectra Vision AS, Trondheim, Norway
j+ I*Xw ZDfS0]0F K` 2i Preface to the Third Edition xi
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9l& A 1Basics 1
K1<k+t/V 1.1 Introduction 1
2G H)iUmc 1.2 Wave Motion. The Electromagnetic Spectrum 1
$Q=$?>4U 1.3 The Plane Wave. Light Rays 3
KjC[q 1.4 Phase Difference 4
w gmWo8 1.5 Complex Notation. Complex Amplitude 5
v,8Si'"i+ 1.6 Oblique Incidence of A Plane Wave 5
J#+Op/mmo 1.7 The Spherical Wave 7
M.X}K7Z_/ 1.8 The Intensity 8
$G)&J2zL 1.9 Geometrical Optics 8
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X!aC 1.10 The Simple Convex (Positive) Lens 10
} mgVC 1.11 A Plane-Wave Set-Up 11
Nz}|%.GP" 2 Gaussian Optics 15
1T:)Zv' 2.1 Introduction 15
I{Rz,D uAL 2.2 Refraction at a Spherical Surface 15
N=.}h\{0 2.2.1 Examples 19
Un]DFu 2.3 The General Image-Forming System 19
wQ@Zwbx 2.4 The Image-Formation Process 21
[1e.i 2.5 Reflection at a Spherical Surface 23
=Z^un&' 2.6 Aspheric Lenses 25
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L^ 2.7 Stops and Apertures 26
.x]'eq} 2.8 Lens Aberrations. Computer Lens Design 28
ixg\[5.Q+ 2.9 Imaging and The Lens Formula 29
F|9a}(-7 2.10 Standard Optical Systems 30
*q+oeAYX 2.10.1 Afocal Systems. The Telescope 30
hjw4Xzju 2.10.2 The Simple Magnifier 32
gfV]^v 2.10.3 The Microscope 34
!'+\]eA 3 Interference 37
D\@e{.$MZ| 3.1 Introduction 37
w 7Cne%J8 3.2 General Description 37
dvC0 <*V 3.3 Coherence 38
| h 3.4 Interference between two Plane Waves 41
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er#8D6* 3.5 Interference between other Waves 46
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r4;^c} 3.6.1 Wavefront Division 50
Cm9 9?K 3.6.2 Amplitude Division 51
L00Sp#$\ 3.6.3 The Dual-Frequency Michelson Interferometer 54
]6jHIk| 3.6.4 Heterodyne (Homodyne) Detection 55
)Uc$t${en 3.7 Spatial and Temporal Coherence 56
?a*fy}A| 3.8 Optical Coherence Tomography 61
6s> sj7 4 Diffraction 67
z]'|nX 4.1 Introduction 67
0~Um^q*'3 4.2 Diffraction from a Single Slit 67
`\Uc4lRS 4.3 Diffraction from a Grating 70
+ZY2a7uI 4.3.1 The Grating Equation. Amplitude Transmittance 70
LZgwIMd 4.3.2 The Spatial Frequency Spectrum 73
#(m`2Z`H 4.4 Fourier Optics 75
0*/mc9 6 4.5 Optical Filtering 76
MA~|y_V 4.5.1 Practical Filtering Set-Ups 78
#9URVq, 4.6 Physical Optics Description
AN|jFSQ' of Image Formation 81
R>Z,TQU 4.6.1 The Coherent Transfer Function 83
ORUWslMt 4.6.2 The Incoherent Transfer Function 85
6-)7:9y 4.6.3 The Depth of Focus 88
6 ,7/8 4.7 The Phase-Modulated Sinusoidal Grating 89
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+] 5 Light Sources and Detectors 99
Oz"@yL} 5.1 Introduction 99
W@R$'r,@O 5.2 Radiometry. Photometry 99
rD:gN%B= 5.2.1 Lambertian Surface 102
x.j Yip 5.2.2 Blackbody Radiator 103
"`gf y 5.2.3 Examples 105
h;cB_6vt 5.3 Incoherent Light Sources 108
6ON 5.4 Coherent Light Sources 109
?$>u!V<' 5.4.1 Stimulated Emission 109
DLwC5Iir 5.4.2 Gas Lasers 112
=NVZ$K OZ 5.4.3 Liquid Lasers 114
W}#QKZ)MB 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
WZ-4^WM=! 5.4.5 Solid-State Lasers 117
L8,H9T#e 5.4.6 Other Lasers 119
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