Optical Metrology Third Edition 0c8_& DrbjklcUU Kjell J. G˚asvik
nJ/}b/A{ Spectra Vision AS, Trondheim, Norway
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^ SW9J^9 g/\cN(X Preface to the Third Edition xi
uBn35% 1Basics 1
M{jq6c 1.1 Introduction 1
\=` j o$S 1.2 Wave Motion. The Electromagnetic Spectrum 1
,oPxt 1.3 The Plane Wave. Light Rays 3
pf+VYZ#) 1.4 Phase Difference 4
4sW ~7:vU 1.5 Complex Notation. Complex Amplitude 5
bI_MF/r'' 1.6 Oblique Incidence of A Plane Wave 5
s:(z;cj/ 1.7 The Spherical Wave 7
;>;it5 l= 1.8 The Intensity 8
@K}h4Yok 1.9 Geometrical Optics 8
^ ".6~{ 1.10 The Simple Convex (Positive) Lens 10
3 TTQf f 1.11 A Plane-Wave Set-Up 11
"WO0 rh` 2 Gaussian Optics 15
pU[yr'D.r 2.1 Introduction 15
7,8TMd1`M 2.2 Refraction at a Spherical Surface 15
@`8a 3sL) 2.2.1 Examples 19
ez)Ks` 2.3 The General Image-Forming System 19
$$< I}eMd> 2.4 The Image-Formation Process 21
2JcP4!RD 2.5 Reflection at a Spherical Surface 23
JAI.NKB3 2.6 Aspheric Lenses 25
%tZrP$DQ 2.7 Stops and Apertures 26
12_ 7UWZ" 2.8 Lens Aberrations. Computer Lens Design 28
g+c%J#F= 2.9 Imaging and The Lens Formula 29
wO`G_!W9 2.10 Standard Optical Systems 30
.+<Ka0 2.10.1 Afocal Systems. The Telescope 30
n}fV$qu 2.10.2 The Simple Magnifier 32
i}i >ho-8 2.10.3 The Microscope 34
; DVg[# 3 Interference 37
fn y6`_O 3.1 Introduction 37
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vy2"B ch 3.3 Coherence 38
9_e_Ne`i`? 3.4 Interference between two Plane Waves 41
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/L@6Ae 3.5 Interference between other Waves 46
~C>Q+tR8 3.6 Interferometry 49
ir >+p>s. 3.6.1 Wavefront Division 50
KaH e( 3.6.2 Amplitude Division 51
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u"zox 3.6.3 The Dual-Frequency Michelson Interferometer 54
qDhZC*"9#D 3.6.4 Heterodyne (Homodyne) Detection 55
<RY ! Mc 3.7 Spatial and Temporal Coherence 56
6A}tA$*s7 3.8 Optical Coherence Tomography 61
Z,81L3#6 4 Diffraction 67
J& }1=s 4.1 Introduction 67
`D$^SHfyz 4.2 Diffraction from a Single Slit 67
3 bjCa\ " 4.3 Diffraction from a Grating 70
W}}ZP]; 4.3.1 The Grating Equation. Amplitude Transmittance 70
p~""1m01,D 4.3.2 The Spatial Frequency Spectrum 73
G ;ZN>8NB 4.4 Fourier Optics 75
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Fp [49 4.5.1 Practical Filtering Set-Ups 78
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4Y*NtV7 4.6 Physical Optics Description
QnS#"hc\a of Image Formation 81
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6E:H 4.6.2 The Incoherent Transfer Function 85
d6 -q" 4.6.3 The Depth of Focus 88
L~by `q N_ 4.7 The Phase-Modulated Sinusoidal Grating 89
sG[qlzR=8 5 Light Sources and Detectors 99
lN{>.q@V`r 5.1 Introduction 99
Z7[S698 5.2 Radiometry. Photometry 99
w'V uC82SZ 5.2.1 Lambertian Surface 102
[7[Qw]J 5.2.2 Blackbody Radiator 103
B,%KvL&xMX 5.2.3 Examples 105
!|]k2=+I 5.3 Incoherent Light Sources 108
qLc&.O.= 5.4 Coherent Light Sources 109
pv&iJ7RN 5.4.1 Stimulated Emission 109
|Tkicge S 5.4.2 Gas Lasers 112
m qUDve( 5.4.3 Liquid Lasers 114
Fm6]mz%~u# 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
9F6dKPN: 5.4.5 Solid-State Lasers 117
-f1}N|hy 5.4.6 Other Lasers 119
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