Optical Metrology Third Edition $@^*lUw Q"F" 13 Kjell J. G˚asvik
&5d~ODO Spectra Vision AS, Trondheim, Norway
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z,xGjS P :` > bh Preface to the Third Edition xi
@<`P-+m 1Basics 1
+*L<"@ 1.1 Introduction 1
Gw-y6e'|Y 1.2 Wave Motion. The Electromagnetic Spectrum 1
c$^~7.~{Qy 1.3 The Plane Wave. Light Rays 3
#sM`>KG6T1 1.4 Phase Difference 4
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Qd 1.5 Complex Notation. Complex Amplitude 5
t 0.71( 1.6 Oblique Incidence of A Plane Wave 5
xVN( It7g 1.7 The Spherical Wave 7
yIYQ.-DkS+ 1.8 The Intensity 8
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FF -[0 1.9 Geometrical Optics 8
8@,8j!$8G 1.10 The Simple Convex (Positive) Lens 10
7A"v:e 1.11 A Plane-Wave Set-Up 11
i62GZe E 2 Gaussian Optics 15
pc2;2 ^U_ 2.1 Introduction 15
w8}jmpnI 2.2 Refraction at a Spherical Surface 15
7!/ !a*z g 2.2.1 Examples 19
7Fzj&!>ti 2.3 The General Image-Forming System 19
t$z 5m<8 2.4 The Image-Formation Process 21
bJoP@s 2.5 Reflection at a Spherical Surface 23
#Q` TH< 2.6 Aspheric Lenses 25
~$d(@T& 2.7 Stops and Apertures 26
COA*Q 2.8 Lens Aberrations. Computer Lens Design 28
`z$=J"%? y 2.9 Imaging and The Lens Formula 29
bXi(]5 2.10 Standard Optical Systems 30
3/V0w|ZgD 2.10.1 Afocal Systems. The Telescope 30
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V- 2.10.2 The Simple Magnifier 32
H5Bh?mw2 2.10.3 The Microscope 34
yb6gYN 3 Interference 37
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vzc 3.1 Introduction 37
QjOY1Xze 3.2 General Description 37
bF'Jm*f 3.3 Coherence 38
)F+wk"`+6 3.4 Interference between two Plane Waves 41
r;_*.|AH 3.4.1 Laser Doppler Velocimetry (LDV) 45
aGNb Cm 3.5 Interference between other Waves 46
5Nl?Km~ 3.6 Interferometry 49
J,:Wv`N:9~ 3.6.1 Wavefront Division 50
.z[#j]k 3.6.2 Amplitude Division 51
[ji')PCAi; 3.6.3 The Dual-Frequency Michelson Interferometer 54
0 8+\fT [ 3.6.4 Heterodyne (Homodyne) Detection 55
wOg#J 3.7 Spatial and Temporal Coherence 56
L)c] i'W Z 3.8 Optical Coherence Tomography 61
*Hz]<b? 4 Diffraction 67
E Y^?@D_< 4.1 Introduction 67
XtqhK" f% 4.2 Diffraction from a Single Slit 67
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=q}Z2 OoYh 4.3.1 The Grating Equation. Amplitude Transmittance 70
{r%T_BfY 4.3.2 The Spatial Frequency Spectrum 73
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v\n 4.4 Fourier Optics 75
_ rg*K 4.5 Optical Filtering 76
Ca -.&$f 4.5.1 Practical Filtering Set-Ups 78
Tvt(nWn(H1 4.6 Physical Optics Description
o)n= n!A of Image Formation 81
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4.6.1 The Coherent Transfer Function 83
Z7> Nd$E{ 4.6.2 The Incoherent Transfer Function 85
kB.CeG]tk 4.6.3 The Depth of Focus 88
{YG qa$+\ 4.7 The Phase-Modulated Sinusoidal Grating 89
p8FXlTk 5 Light Sources and Detectors 99
( TU/EU5 5.1 Introduction 99
oqo7Ge2 5.2 Radiometry. Photometry 99
0?cJ>)N 5.2.1 Lambertian Surface 102
=b, m3 1 5.2.2 Blackbody Radiator 103
]k8f1F 5.2.3 Examples 105
UF$O @l 5.3 Incoherent Light Sources 108
~n$\[rQ 5.4 Coherent Light Sources 109
A7 6H M@Q 5.4.1 Stimulated Emission 109
C3'?E<F 5.4.2 Gas Lasers 112
D#A6s32a 5.4.3 Liquid Lasers 114
h j}P L 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
AH-BZ8 5.4.5 Solid-State Lasers 117
ICiGZ'k 5.4.6 Other Lasers 119
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