Optical Metrology Third Edition $#p5BQQ|
WZY+c Kjell J. G˚asvik
tx~,7TMS/ Spectra Vision AS, Trondheim, Norway
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Preface to the Third Edition xi
..X _nF 1Basics 1
7 QNx*8 p 1.1 Introduction 1
=CJ`0yDQ> 1.2 Wave Motion. The Electromagnetic Spectrum 1
DXI4DM"15I 1.3 The Plane Wave. Light Rays 3
!Q15qvRS 1.4 Phase Difference 4
l`ZL^uT 1.5 Complex Notation. Complex Amplitude 5
A|S)cr8z 1.6 Oblique Incidence of A Plane Wave 5
v xTn 1.7 The Spherical Wave 7
BDvkY 1.8 The Intensity 8
s_XCKhN: 1.9 Geometrical Optics 8
r KUtTj 1.10 The Simple Convex (Positive) Lens 10
hxH 6Ii]\ 1.11 A Plane-Wave Set-Up 11
GDSXBa*7 2 Gaussian Optics 15
cWZITT{A 2.1 Introduction 15
|oLG c!i 2.2 Refraction at a Spherical Surface 15
4
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GdI,&| / 2.3 The General Image-Forming System 19
*X/Vt$P 2.4 The Image-Formation Process 21
sTl^j gV7j 2.5 Reflection at a Spherical Surface 23
I`X!M!dB) 2.6 Aspheric Lenses 25
gr zmW4Cw 2.7 Stops and Apertures 26
Q=Mv"~2>B 2.8 Lens Aberrations. Computer Lens Design 28
uX3yq<lK" 2.9 Imaging and The Lens Formula 29
@jm +TW 2.10 Standard Optical Systems 30
2HmK['( 2.10.1 Afocal Systems. The Telescope 30
zKGZg>q 2.10.2 The Simple Magnifier 32
Nh }-6|M 2.10.3 The Microscope 34
k>mXh{ ( 3 Interference 37
V 97ORI 3.1 Introduction 37
pxgf%P<7 3.2 General Description 37
r9WR1&T) 3.3 Coherence 38
'g)f5n a[ 3.4 Interference between two Plane Waves 41
kC%H E 3.4.1 Laser Doppler Velocimetry (LDV) 45
dN3^PK 3.5 Interference between other Waves 46
Ie /_gz^ 3.6 Interferometry 49
XYuX+&XW/ 3.6.1 Wavefront Division 50
m(U.BXo 3.6.2 Amplitude Division 51
SNOc1c<~ 3.6.3 The Dual-Frequency Michelson Interferometer 54
_>\33V-?b 3.6.4 Heterodyne (Homodyne) Detection 55
:38h)9>RK 3.7 Spatial and Temporal Coherence 56
YiO }" 3.8 Optical Coherence Tomography 61
'1LN) Yw 4 Diffraction 67
v4s4D1} 4.1 Introduction 67
v77UE"4|c 4.2 Diffraction from a Single Slit 67
yO7y`;Q(sF 4.3 Diffraction from a Grating 70
"h_f- vP 4.3.1 The Grating Equation. Amplitude Transmittance 70
]pBEoktp 4.3.2 The Spatial Frequency Spectrum 73
81x/ bx@L% 4.4 Fourier Optics 75
e:nByzdH0[ 4.5 Optical Filtering 76
hRX9Du`$ 4.5.1 Practical Filtering Set-Ups 78
y,`n9[$K\ 4.6 Physical Optics Description
#~nXAs]Q of Image Formation 81
Ve%ua]qA 4.6.1 The Coherent Transfer Function 83
j!i* & 4.6.2 The Incoherent Transfer Function 85
/)J]ItJlz 4.6.3 The Depth of Focus 88
>8I~i:hn 4.7 The Phase-Modulated Sinusoidal Grating 89
: ?zq! 5 Light Sources and Detectors 99
!AE;s}v)0{ 5.1 Introduction 99
h<3b+*wYJC 5.2 Radiometry. Photometry 99
g 4=1['wW 5.2.1 Lambertian Surface 102
[;,E c w^ 5.2.2 Blackbody Radiator 103
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rtz-kQ38R 5.3 Incoherent Light Sources 108
WUie `p 5.4 Coherent Light Sources 109
Y+Z+Y)K 5.4.1 Stimulated Emission 109
b'+Wf#.]f0 5.4.2 Gas Lasers 112
y4jiOh F<d 5.4.3 Liquid Lasers 114
@NA+Ma{N 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
|e@1@q(a[] 5.4.5 Solid-State Lasers 117
,dQ*0XO! 5.4.6 Other Lasers 119
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