Optical Metrology Third Edition b@:OlZ~ % %36x'Dn ? Kjell J. G˚asvik
4aayMS !# Spectra Vision AS, Trondheim, Norway
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%>_[b, oy+|:[v:Fk Preface to the Third Edition xi
|dRVSVN 1Basics 1
{C1crp>q 1.1 Introduction 1
: qYp%Ub 1.2 Wave Motion. The Electromagnetic Spectrum 1
OLw]BJXYaE 1.3 The Plane Wave. Light Rays 3
LZ*8YNp1' 1.4 Phase Difference 4
mh
}M|h5Im 1.5 Complex Notation. Complex Amplitude 5
XTol|a = 1.6 Oblique Incidence of A Plane Wave 5
Uqr>8|t? 1.7 The Spherical Wave 7
yzK; 1.8 The Intensity 8
A|A~$v("R 1.9 Geometrical Optics 8
jnH\}IB 1.10 The Simple Convex (Positive) Lens 10
{>&~kM@ 1.11 A Plane-Wave Set-Up 11
De $AJl 2 Gaussian Optics 15
ju~$FNt8R 2.1 Introduction 15
b0P3S!E 2.2 Refraction at a Spherical Surface 15
dBWn y& 2.2.1 Examples 19
Z9{~t 2.3 The General Image-Forming System 19
A=|XlP$6 2.4 The Image-Formation Process 21
_ \!]MV 2.5 Reflection at a Spherical Surface 23
MJn-] E 2.6 Aspheric Lenses 25
}nx)|J*p 2.7 Stops and Apertures 26
0.GFg${v` 2.8 Lens Aberrations. Computer Lens Design 28
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\Lx=iKs< 2.10 Standard Optical Systems 30
4vhf! !1 2.10.1 Afocal Systems. The Telescope 30
= C %)(| 2.10.2 The Simple Magnifier 32
\ ovs[& 2.10.3 The Microscope 34
7*:z N 3 Interference 37
AGhenDN V 3.1 Introduction 37
7vRtTP 3.2 General Description 37
]>3Y~KH( 3.3 Coherence 38
% " RJi? 3.4 Interference between two Plane Waves 41
)ycI.[C 3.4.1 Laser Doppler Velocimetry (LDV) 45
N['DqS = 3.5 Interference between other Waves 46
L G}{ib B 3.6 Interferometry 49
k
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j,n:%5P\v 3.6.2 Amplitude Division 51
iO L$| Z( 3.6.3 The Dual-Frequency Michelson Interferometer 54
p_$^keOL 3.6.4 Heterodyne (Homodyne) Detection 55
1\hLwG6Jj 3.7 Spatial and Temporal Coherence 56
(m]l -Re 3.8 Optical Coherence Tomography 61
/ViY:-8s 4 Diffraction 67
LF| 0lAr 4.1 Introduction 67
zAgX{$/Fg 4.2 Diffraction from a Single Slit 67
*A-_*A 4.3 Diffraction from a Grating 70
w[~G^x& 4.3.1 The Grating Equation. Amplitude Transmittance 70
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F)3+IuY 4.4 Fourier Optics 75
tBo\R?YRs 4.5 Optical Filtering 76
y6(PG:L 4.5.1 Practical Filtering Set-Ups 78
h5 ?^MRZS 4.6 Physical Optics Description
a~}q]o?j of Image Formation 81
$5nMD= 4.6.1 The Coherent Transfer Function 83
InP E_ 4.6.2 The Incoherent Transfer Function 85
h nydH-;cz 4.6.3 The Depth of Focus 88
O&!R7T 4.7 The Phase-Modulated Sinusoidal Grating 89
CmE qo;Is 5 Light Sources and Detectors 99
J[/WBVFDf 5.1 Introduction 99
xAm tm" 5.2 Radiometry. Photometry 99
8SRR)O[)} 5.2.1 Lambertian Surface 102
O'4G'H) 5.2.2 Blackbody Radiator 103
f*k7 @[rSv 5.2.3 Examples 105
5 xH=w: 5.3 Incoherent Light Sources 108
~IhAO}1 5.4 Coherent Light Sources 109
zs$r>rlO 5.4.1 Stimulated Emission 109
{}$9
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#W\}v(Ke 5.4.3 Liquid Lasers 114
qqDg2,Yb 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
3,PR6a,b' 5.4.5 Solid-State Lasers 117
ch
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