Optical Metrology Third Edition *3,GQ%~/z 942(a Kjell J. G˚asvik
[&6VI? Spectra Vision AS, Trondheim, Norway
aT v
2(_+PQ6C= ^|h5*Tb Preface to the Third Edition xi
Y}G 9(Ci& 1Basics 1
|AY`OVgcKD 1.1 Introduction 1
6EHYIN^D 1.2 Wave Motion. The Electromagnetic Spectrum 1
W(5et5DN, 1.3 The Plane Wave. Light Rays 3
Eb9 eEa<W 1.4 Phase Difference 4
B hO*Pfs 1.5 Complex Notation. Complex Amplitude 5
,4RmT\%T 1.6 Oblique Incidence of A Plane Wave 5
ccLTA 1.7 The Spherical Wave 7
;<aT|4 1.8 The Intensity 8
R`)^eqB 1.9 Geometrical Optics 8
D..dGh.MY 1.10 The Simple Convex (Positive) Lens 10
\S]"nHX 1.11 A Plane-Wave Set-Up 11
B@v\tpR 2 Gaussian Optics 15
AFd3_>h 2.1 Introduction 15
=qQH,{]c6 2.2 Refraction at a Spherical Surface 15
{km~,]N 2.2.1 Examples 19
QkEIV<T&)l 2.3 The General Image-Forming System 19
'N-nFc^ 2.4 The Image-Formation Process 21
5>E]C=maD 2.5 Reflection at a Spherical Surface 23
8T:?C~" 2.6 Aspheric Lenses 25
Z0Tpz2m 2.7 Stops and Apertures 26
MfX1&/Z+ 2.8 Lens Aberrations. Computer Lens Design 28
+<\)b( 2.9 Imaging and The Lens Formula 29
W%3<"'eP 2.10 Standard Optical Systems 30
Ec44JD 2.10.1 Afocal Systems. The Telescope 30
n^H Kf^] 2.10.2 The Simple Magnifier 32
P;A9t #\ 2.10.3 The Microscope 34
A Th<=1 3 Interference 37
h KZ<PwBi 3.1 Introduction 37
F\!Va 3.2 General Description 37
)oEHE7 y 3.3 Coherence 38
K?M{=$N 3.4 Interference between two Plane Waves 41
\Vc-W|e 3.4.1 Laser Doppler Velocimetry (LDV) 45
-i,=sZXB 3.5 Interference between other Waves 46
H$M#+EfL 3.6 Interferometry 49
j -H2h 3.6.1 Wavefront Division 50
q%G"P*g$( 3.6.2 Amplitude Division 51
|)"`v'8> 3.6.3 The Dual-Frequency Michelson Interferometer 54
oxs0)B 3.6.4 Heterodyne (Homodyne) Detection 55
'U9l 3.7 Spatial and Temporal Coherence 56
7P&O{tl( 3.8 Optical Coherence Tomography 61
X?2ub/Nr#Y 4 Diffraction 67
|OgtAI9 4.1 Introduction 67
,YEwz3$5u 4.2 Diffraction from a Single Slit 67
cO&(&*J r 4.3 Diffraction from a Grating 70
scXY~l]I* 4.3.1 The Grating Equation. Amplitude Transmittance 70
2J>v4EWC 4.3.2 The Spatial Frequency Spectrum 73
)D_\~n/5 4.4 Fourier Optics 75
anM]khs? 4.5 Optical Filtering 76
td}%reH 4.5.1 Practical Filtering Set-Ups 78
S:.Vt&+NJ 4.6 Physical Optics Description
,Pq@{i# of Image Formation 81
!>n^ ;u 4.6.1 The Coherent Transfer Function 83
dX720/R 4.6.2 The Incoherent Transfer Function 85
@X$~{Vp__ 4.6.3 The Depth of Focus 88
xI'sprNa_1 4.7 The Phase-Modulated Sinusoidal Grating 89
|%V-|\GJ~j 5 Light Sources and Detectors 99
n86=1G:% 5.1 Introduction 99
e-4 Qw#cw 5.2 Radiometry. Photometry 99
lQkCA- 5.2.1 Lambertian Surface 102
v;%>F)I 5.2.2 Blackbody Radiator 103
ji8)/ 5.2.3 Examples 105
}K
rQPg
5.3 Incoherent Light Sources 108
T@Q,1^?i 5.4 Coherent Light Sources 109
B7y^)/ 5.4.1 Stimulated Emission 109
cft'% IEs 5.4.2 Gas Lasers 112
h$[tEmD% 5.4.3 Liquid Lasers 114
aMLtZ7i> 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
8p91ni' 5.4.5 Solid-State Lasers 117
'}F=U(! 5.4.6 Other Lasers 119
x{o&nhuk[S .
R6xJw2;_ .
@ 4ccZ&` .