Optical Metrology Third Edition 0[xpEiDx 'T,c.Vj) Kjell J. G˚asvik
tfYB _N Spectra Vision AS, Trondheim, Norway
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lnh+a7a) c_.-b=zm Preface to the Third Edition xi
};,/0Fu 1Basics 1
l_{8+\`! 1.1 Introduction 1
YoKs:e2/: 1.2 Wave Motion. The Electromagnetic Spectrum 1
}Fa%%} 1.3 The Plane Wave. Light Rays 3
,Na^%A@TJ 1.4 Phase Difference 4
f> polxB%N 1.5 Complex Notation. Complex Amplitude 5
;65D 1.6 Oblique Incidence of A Plane Wave 5
9U f j 1.7 The Spherical Wave 7
PuL<^aJ 1.8 The Intensity 8
=*Z5!W'd 1.9 Geometrical Optics 8
>C r\y 1.10 The Simple Convex (Positive) Lens 10
0 1V^L} 1.11 A Plane-Wave Set-Up 11
[ "3\eFg 2 Gaussian Optics 15
2;2}wM[ 2.1 Introduction 15
Ki br ]w 2.2 Refraction at a Spherical Surface 15
d0'H DVd 2.2.1 Examples 19
#_i`#d) 2.3 The General Image-Forming System 19
!do?~$Og 2.4 The Image-Formation Process 21
9'[ N1Un.= 2.5 Reflection at a Spherical Surface 23
x,n,Qlb 2.6 Aspheric Lenses 25
o0bM=njok 2.7 Stops and Apertures 26
U{@5*4 2.8 Lens Aberrations. Computer Lens Design 28
lpB3&H8& 2.9 Imaging and The Lens Formula 29
K`g7$r)U[ 2.10 Standard Optical Systems 30
wkUlrL/~ 2.10.1 Afocal Systems. The Telescope 30
c{3wk7 2.10.2 The Simple Magnifier 32
T;5r{{ 2.10.3 The Microscope 34
Q~{H@D`< 3 Interference 37
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Pe;Y1Qq>> 3.2 General Description 37
"N?+VkZEv 3.3 Coherence 38
d5`3wd]]'v 3.4 Interference between two Plane Waves 41
AlXNg!j;5K 3.4.1 Laser Doppler Velocimetry (LDV) 45
P!G858V( 3.5 Interference between other Waves 46
#S]ER907 3.6 Interferometry 49
c y yVg!+ 3.6.1 Wavefront Division 50
4JGtI*%5lq 3.6.2 Amplitude Division 51
TS 2ZF {m 3.6.3 The Dual-Frequency Michelson Interferometer 54
ZyrI R 3.6.4 Heterodyne (Homodyne) Detection 55
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3.7 Spatial and Temporal Coherence 56
*z*uEcitW 3.8 Optical Coherence Tomography 61
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?i I4x%y 4.1 Introduction 67
5,-U.B} 4.2 Diffraction from a Single Slit 67
+Z M) bbB 4.3 Diffraction from a Grating 70
o%9*B%HO/ 4.3.1 The Grating Equation. Amplitude Transmittance 70
L >y J 4.3.2 The Spatial Frequency Spectrum 73
aI^/X {d 4.4 Fourier Optics 75
{8)zg<rL+M 4.5 Optical Filtering 76
t3(]YgF 4.5.1 Practical Filtering Set-Ups 78
SN7"7jo P< 4.6 Physical Optics Description
ia\eLzj of Image Formation 81
9l,a^@Y: 4.6.1 The Coherent Transfer Function 83
3b' QLfU&# 4.6.2 The Incoherent Transfer Function 85
aT>'.*\ ] 4.6.3 The Depth of Focus 88
l&iq5}[n& 4.7 The Phase-Modulated Sinusoidal Grating 89
}by;F9&B 5 Light Sources and Detectors 99
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h3LE>}6D 5.2 Radiometry. Photometry 99
$,+O9 Et 5.2.1 Lambertian Surface 102
X/iT)R]b 5.2.2 Blackbody Radiator 103
1%4sHSN 5.2.3 Examples 105
x=ul&|^7D 5.3 Incoherent Light Sources 108
a}%#* J)! 5.4 Coherent Light Sources 109
At7>V-f} 5.4.1 Stimulated Emission 109
F a'k0/_j 5.4.2 Gas Lasers 112
):i&`}SY 5.4.3 Liquid Lasers 114
d&ex5CU5 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
\jOA+FU [ 5.4.5 Solid-State Lasers 117
Ecd;<$tk 5.4.6 Other Lasers 119
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