Optical Metrology Third Edition f.$[?Fi ZHjL8Iq Kjell J. G˚asvik
V-7l+C 5 Spectra Vision AS, Trondheim, Norway
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~tWh6-:|{J ),vDn}> Preface to the Third Edition xi
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8sfG ;) 1Basics 1
[uGsF0#e 1.1 Introduction 1
~}j +~ 1.2 Wave Motion. The Electromagnetic Spectrum 1
lCUYE"o 1.3 The Plane Wave. Light Rays 3
LDEc}XXb 1.4 Phase Difference 4
O$r/ {{I. 1.5 Complex Notation. Complex Amplitude 5
_ f ";zd 1.6 Oblique Incidence of A Plane Wave 5
awo' #Y2> 1.7 The Spherical Wave 7
AB\Ya4O"9 1.8 The Intensity 8
"~r)_Ko 1.9 Geometrical Optics 8
'WhJ}Uo\ 1.10 The Simple Convex (Positive) Lens 10
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1.11 A Plane-Wave Set-Up 11
i,^3aZwJ' 2 Gaussian Optics 15
sM MtU@<x 2.1 Introduction 15
?2#' >B 2.2 Refraction at a Spherical Surface 15
LA_{[VWYp> 2.2.1 Examples 19
E"VF BKB 2.3 The General Image-Forming System 19
J;Z2<x/ H 2.4 The Image-Formation Process 21
G\ F>* 2.5 Reflection at a Spherical Surface 23
;AJ Q2 2.6 Aspheric Lenses 25
dq.U#Rhrx 2.7 Stops and Apertures 26
17?YN< 2.8 Lens Aberrations. Computer Lens Design 28
7^#f)Vp 2.9 Imaging and The Lens Formula 29
Z5(9=8hB/ 2.10 Standard Optical Systems 30
_b %) 2.10.1 Afocal Systems. The Telescope 30
OWw qCPz. 2.10.2 The Simple Magnifier 32
R 39_! 2.10.3 The Microscope 34
2Q %7J3I 3 Interference 37
4 j=K3m 3.1 Introduction 37
AvrvBz[ 3.2 General Description 37
2`riI*fQ 3.3 Coherence 38
(o IGp 3.4 Interference between two Plane Waves 41
V6P-?Nd 3.4.1 Laser Doppler Velocimetry (LDV) 45
:p}8#rb 3.5 Interference between other Waves 46
CR'%=N04^ 3.6 Interferometry 49
w -o#=R_ 3.6.1 Wavefront Division 50
\X&8EW 3.6.2 Amplitude Division 51
T 'c39 3.6.3 The Dual-Frequency Michelson Interferometer 54
wjl )yo$z 3.6.4 Heterodyne (Homodyne) Detection 55
M\4 ` S& 3.7 Spatial and Temporal Coherence 56
{ rR(K"M 3.8 Optical Coherence Tomography 61
u*Xp%vNe 4 Diffraction 67
2H4vK]]Nl 4.1 Introduction 67
sq`X z 8u 4.2 Diffraction from a Single Slit 67
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>*WQ 4.3 Diffraction from a Grating 70
xA(z / % 4.3.1 The Grating Equation. Amplitude Transmittance 70
~ C%I'z' 4.3.2 The Spatial Frequency Spectrum 73
SC~k4&xy 4.4 Fourier Optics 75
an"~n`g 4.5 Optical Filtering 76
@ T\n@M] 4.5.1 Practical Filtering Set-Ups 78
# }y8hzS$ 4.6 Physical Optics Description
dWQsC| of Image Formation 81
h*l$!nEN 4.6.1 The Coherent Transfer Function 83
A811VL^ 4.6.2 The Incoherent Transfer Function 85
Qh&Qsyo% 4.6.3 The Depth of Focus 88
-:ucp2 4.7 The Phase-Modulated Sinusoidal Grating 89
At:8+S<?A 5 Light Sources and Detectors 99
]w6Q? %'9 5.1 Introduction 99
.c-a$39 5.2 Radiometry. Photometry 99
U)bv,{-q 5.2.1 Lambertian Surface 102
wUCxa>h' 5.2.2 Blackbody Radiator 103
\PE;R.v_: 5.2.3 Examples 105
IANSpWea? 5.3 Incoherent Light Sources 108
T3P 9 5.4 Coherent Light Sources 109
viAAb 5.4.1 Stimulated Emission 109
>E<ib[vK[ 5.4.2 Gas Lasers 112
'M >m$cCMZ 5.4.3 Liquid Lasers 114
FoK2h! _ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
.fl r 5.4.5 Solid-State Lasers 117
@ M"gEeI9 5.4.6 Other Lasers 119
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