Optical Metrology Third Edition 9
RgVK{F &ee~p&S,> Kjell J. G˚asvik
<]t%8GB2V Spectra Vision AS, Trondheim, Norway
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z=\&i\>;Z+ +4~_Ei[i Preface to the Third Edition xi
Igt#V;kK"2 1Basics 1
*!t/"b 1.1 Introduction 1
nsC3 1.2 Wave Motion. The Electromagnetic Spectrum 1
U[-o> W# 1.3 The Plane Wave. Light Rays 3
vzAax k% 1.4 Phase Difference 4
z6\UGSL 1.5 Complex Notation. Complex Amplitude 5
_Kf% \xg 1.6 Oblique Incidence of A Plane Wave 5
Ms#M+[a 1.7 The Spherical Wave 7
N7zft 1.8 The Intensity 8
yjX9oxhtL 1.9 Geometrical Optics 8
ZgcMv,= 1.10 The Simple Convex (Positive) Lens 10
h
0Q5-EA 1.11 A Plane-Wave Set-Up 11
'3tCH)s 2 Gaussian Optics 15
ibk6|pp 2.1 Introduction 15
7hcYD!DS 2.2 Refraction at a Spherical Surface 15
f|c{5$N! 2.2.1 Examples 19
CNyIQ}NJ 2.3 The General Image-Forming System 19
,AFu C< 2.4 The Image-Formation Process 21
s?}e^/"v 2.5 Reflection at a Spherical Surface 23
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(N_ 2.6 Aspheric Lenses 25
z'n:@E 2.7 Stops and Apertures 26
`p-cSxR_ 2.8 Lens Aberrations. Computer Lens Design 28
*u [BP@vE 2.9 Imaging and The Lens Formula 29
OX!tsARC@ 2.10 Standard Optical Systems 30
u'DRN,h+ 2.10.1 Afocal Systems. The Telescope 30
D_*WYV 2.10.2 The Simple Magnifier 32
_S1>j7RQo 2.10.3 The Microscope 34
lvz7#f L~ 3 Interference 37
Y eo]]i{ 3.1 Introduction 37
dn+KH+v 3.2 General Description 37
\'D0'\:vz 3.3 Coherence 38
xJ8M6O8 3.4 Interference between two Plane Waves 41
"?xHlYj@+ 3.4.1 Laser Doppler Velocimetry (LDV) 45
(m/G(wg 3.5 Interference between other Waves 46
v>)"HL"XG 3.6 Interferometry 49
PiIpnoM 3.6.1 Wavefront Division 50
HCs?iJ 3.6.2 Amplitude Division 51
Jhhb7uU+ 3.6.3 The Dual-Frequency Michelson Interferometer 54
)9`qG:b' 3.6.4 Heterodyne (Homodyne) Detection 55
0R'?~`aTt 3.7 Spatial and Temporal Coherence 56
<0&*9ZeD 3.8 Optical Coherence Tomography 61
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"4n: 4 Diffraction 67
$ @`V 4.1 Introduction 67
IueFx u 4.2 Diffraction from a Single Slit 67
J @1!Oq> 4.3 Diffraction from a Grating 70
.}TZxla0Zr 4.3.1 The Grating Equation. Amplitude Transmittance 70
<uw9DU7G 4.3.2 The Spatial Frequency Spectrum 73
m8hk:4Ae 4.4 Fourier Optics 75
*fS"ym@ 4.5 Optical Filtering 76
K`zdc`/ 4.5.1 Practical Filtering Set-Ups 78
9IfmW^0 4.6 Physical Optics Description
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+_t-5 of Image Formation 81
h2]P]@nW;W 4.6.1 The Coherent Transfer Function 83
!ons]^km 4.6.2 The Incoherent Transfer Function 85
*H2r@)Y[~ 4.6.3 The Depth of Focus 88
#a,PZDaE 4.7 The Phase-Modulated Sinusoidal Grating 89
k(G^z 5 Light Sources and Detectors 99
f+)L#>Gl? 5.1 Introduction 99
L48_96 5.2 Radiometry. Photometry 99
xr Jg\to{i 5.2.1 Lambertian Surface 102
,m|h<faZL 5.2.2 Blackbody Radiator 103
j-}O0~Jz 5.2.3 Examples 105
plstZ,#j 5.3 Incoherent Light Sources 108
"&?kC2Y| 5.4 Coherent Light Sources 109
>jLY" 5.4.1 Stimulated Emission 109
$Sip$\+* 5.4.2 Gas Lasers 112
}V`"s^ 5.4.3 Liquid Lasers 114
DA,?} 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
p%=u#QNi 5.4.5 Solid-State Lasers 117
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<nF^ 5.4.6 Other Lasers 119
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