Optical Metrology Third Edition 2kS]:4)T ]*M-8_D Kjell J. G˚asvik
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Spectra Vision AS, Trondheim, Norway
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6AW{qU6 Cb5Rr +K= Preface to the Third Edition xi
|9X $@R 1Basics 1
jZX2)# a! 1.1 Introduction 1
D0 f.XWd 1.2 Wave Motion. The Electromagnetic Spectrum 1
,%zU5 hh 1.3 The Plane Wave. Light Rays 3
>% o\Ue 1.4 Phase Difference 4
bQ3EBJT{P 1.5 Complex Notation. Complex Amplitude 5
p[zKc2 TPk 1.6 Oblique Incidence of A Plane Wave 5
37S bF,G 1.7 The Spherical Wave 7
E>}(r%B 1.8 The Intensity 8
$%3"@$ 1.9 Geometrical Optics 8
nhm)P_p 1.10 The Simple Convex (Positive) Lens 10
IJ`%Zh{f 1.11 A Plane-Wave Set-Up 11
!M&Qca2 2 Gaussian Optics 15
(<"u V%1 2.1 Introduction 15
#EO@<> I 2.2 Refraction at a Spherical Surface 15
wM"P JG 2.2.1 Examples 19
>)&]Ss5J 2.3 The General Image-Forming System 19
*h `P+_Q7 2.4 The Image-Formation Process 21
=y$|2(6 2.5 Reflection at a Spherical Surface 23
l|z0aF;z 2.6 Aspheric Lenses 25
]&dU%9S 2.7 Stops and Apertures 26
v|&Nh?r 2.8 Lens Aberrations. Computer Lens Design 28
M!9gOAQ P 2.9 Imaging and The Lens Formula 29
Br,^4w[Hq 2.10 Standard Optical Systems 30
/ehmy(zL 2.10.1 Afocal Systems. The Telescope 30
p:GB"e9>H 2.10.2 The Simple Magnifier 32
i`Tp +e@a> 2.10.3 The Microscope 34
m4< 5jC`-M 3 Interference 37
7l%]/`Y- 3.1 Introduction 37
R.FC3<TTv 3.2 General Description 37
`k 5'nnyP 3.3 Coherence 38
Ob+Rnfx3 7 3.4 Interference between two Plane Waves 41
^Pq4 n%x 3.4.1 Laser Doppler Velocimetry (LDV) 45
vIL'&~C\y 3.5 Interference between other Waves 46
z; dFS 3.6 Interferometry 49
\x,q(npHi 3.6.1 Wavefront Division 50
=Z3{6y}3p 3.6.2 Amplitude Division 51
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3.6.3 The Dual-Frequency Michelson Interferometer 54
E=-ed9({: 3.6.4 Heterodyne (Homodyne) Detection 55
O Vo3. 3.7 Spatial and Temporal Coherence 56
xn fMx$fD 3.8 Optical Coherence Tomography 61
t 8}R?%u 4 Diffraction 67
C [Ap&S 4.1 Introduction 67
us ,!U 4.2 Diffraction from a Single Slit 67
"x+o(jOy 4.3 Diffraction from a Grating 70
Zt;dPYq> 4.3.1 The Grating Equation. Amplitude Transmittance 70
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biBo?k;4 4.4 Fourier Optics 75
8,0WHivg 4.5 Optical Filtering 76
Cw*:` 4.5.1 Practical Filtering Set-Ups 78
hLqRF4>L 4.6 Physical Optics Description
T ke3X\| of Image Formation 81
G<2OL#Y- 4.6.1 The Coherent Transfer Function 83
%z0;77[1 I 4.6.2 The Incoherent Transfer Function 85
[dQL6k";b 4.6.3 The Depth of Focus 88
&^v5 x" 4.7 The Phase-Modulated Sinusoidal Grating 89
1kd\Fq^z$ 5 Light Sources and Detectors 99
:?2@qWaL 5.1 Introduction 99
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; 7Nv$3 5.2 Radiometry. Photometry 99
eWgqds&# 5.2.1 Lambertian Surface 102
pdz_qj!Z 5.2.2 Blackbody Radiator 103
klwC.=?(j" 5.2.3 Examples 105
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} 5.3 Incoherent Light Sources 108
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} 5.4 Coherent Light Sources 109
4dEfXrMf 5.4.1 Stimulated Emission 109
0bR)]"K 5.4.2 Gas Lasers 112
nE 2w ? 5.4.3 Liquid Lasers 114
H 8'q Y 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
7z_EX8^ 5.4.5 Solid-State Lasers 117
8l?mNapy 5.4.6 Other Lasers 119
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