Optical Metrology Third Edition o( zez &]n }fq Kjell J. G˚asvik
L4/ns@e Spectra Vision AS, Trondheim, Norway
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1}=D ^ul1{ Preface to the Third Edition xi
<9fXf * 1Basics 1
$oQOOa@;i) 1.1 Introduction 1
Zwc&4:5% 1.2 Wave Motion. The Electromagnetic Spectrum 1
tz;o6,eb 1.3 The Plane Wave. Light Rays 3
u5}:[4N%I 1.4 Phase Difference 4
N zQvciJ@" 1.5 Complex Notation. Complex Amplitude 5
kb2C 9< 1.6 Oblique Incidence of A Plane Wave 5
q ][kD2 1.7 The Spherical Wave 7
'69)m~B0a 1.8 The Intensity 8
7 w) 8s 1.9 Geometrical Optics 8
>]~581fYf 1.10 The Simple Convex (Positive) Lens 10
n?r8ZDJ' 1.11 A Plane-Wave Set-Up 11
(v/L 2 Gaussian Optics 15
x&;A Y 2.1 Introduction 15
Wu $ryX 2.2 Refraction at a Spherical Surface 15
ZSQiQ2\) 2.2.1 Examples 19
yg}O9!M J 2.3 The General Image-Forming System 19
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Z 2.4 The Image-Formation Process 21
Q*#Lr4cm{ 2.5 Reflection at a Spherical Surface 23
)m7%cyfC 2.6 Aspheric Lenses 25
Cu#n5SF* 2.7 Stops and Apertures 26
aF?_V!#cT 2.8 Lens Aberrations. Computer Lens Design 28
2: gh q 2.9 Imaging and The Lens Formula 29
wL),/i& < 2.10 Standard Optical Systems 30
.Bl:hk\ 2.10.1 Afocal Systems. The Telescope 30
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^<-C. 2.10.2 The Simple Magnifier 32
}XBF#BN 2.10.3 The Microscope 34
L%v@|COQ3 3 Interference 37
o4FHR+u< M 3.1 Introduction 37
e#HPU 3.2 General Description 37
)b1hF 3.3 Coherence 38
np^&cY] 3.4 Interference between two Plane Waves 41
yP$esDP 3.4.1 Laser Doppler Velocimetry (LDV) 45
e5bXgmyil 3.5 Interference between other Waves 46
n}Z%D-b$ 3.6 Interferometry 49
G]aey>) 3.6.1 Wavefront Division 50
3\m ! 3.6.2 Amplitude Division 51
$jh$nMx)! 3.6.3 The Dual-Frequency Michelson Interferometer 54
Q.B)?w m 3.6.4 Heterodyne (Homodyne) Detection 55
;?HP/dZLz 3.7 Spatial and Temporal Coherence 56
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1~_ 3.8 Optical Coherence Tomography 61
xW ) 4 Diffraction 67
8+w*,Ry` 4.1 Introduction 67
_ =I1 4.2 Diffraction from a Single Slit 67
PzKTEYJL 4.3 Diffraction from a Grating 70
`e'wW V 4.3.1 The Grating Equation. Amplitude Transmittance 70
Gf.ywqE$Y$ 4.3.2 The Spatial Frequency Spectrum 73
QYo04` Rl 4.4 Fourier Optics 75
||X3g"2W9 4.5 Optical Filtering 76
JR `$t~0t 4.5.1 Practical Filtering Set-Ups 78
>A{Dps i\ 4.6 Physical Optics Description
F;#$Q of Image Formation 81
"G>d8GbIh 4.6.1 The Coherent Transfer Function 83
ri4z^1\ 4.6.2 The Incoherent Transfer Function 85
O)&W0` VY 4.6.3 The Depth of Focus 88
%|H]T] s 4.7 The Phase-Modulated Sinusoidal Grating 89
xT&~{,9 5 Light Sources and Detectors 99
Tfh2 > 5.1 Introduction 99
K.QSt 5.2 Radiometry. Photometry 99
mF@7;dpr 5.2.1 Lambertian Surface 102
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xooU 8d 5.2.2 Blackbody Radiator 103
++b[>}; 5.2.3 Examples 105
9cB+ x`+Lu 5.3 Incoherent Light Sources 108
% 7mGMa/ 5.4 Coherent Light Sources 109
H}GGUE&c* 5.4.1 Stimulated Emission 109
nQV0I"f]?] 5.4.2 Gas Lasers 112
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z**2-4 z 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
=At" Q6-O 5.4.5 Solid-State Lasers 117
FLG"c690 5.4.6 Other Lasers 119
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