Optical Metrology Third Edition & pHSX t V?- Kjell J. G˚asvik
b'q ru~i Spectra Vision AS, Trondheim, Norway
_D+pJ{@W 
n8 UG{.
= d*$L$1 S Preface to the Third Edition xi
#q LsAw--Q 1Basics 1
[=<vapZt 1.1 Introduction 1
f$>KTb({B 1.2 Wave Motion. The Electromagnetic Spectrum 1
$8> k k 1.3 The Plane Wave. Light Rays 3
AQ%B&Q(V1 1.4 Phase Difference 4
| $|B0mj 1.5 Complex Notation. Complex Amplitude 5
n (uzqd 1.6 Oblique Incidence of A Plane Wave 5
Mi~x(W@}3 1.7 The Spherical Wave 7
E] 6]c!2: 1.8 The Intensity 8
Qm_IU!b 1.9 Geometrical Optics 8
p!> 5}f6 1.10 The Simple Convex (Positive) Lens 10
p40;@gUug 1.11 A Plane-Wave Set-Up 11
CCHGd&\Z 2 Gaussian Optics 15
k"3@ G?JY 2.1 Introduction 15
E "%d O 2.2 Refraction at a Spherical Surface 15
lVv'_9yg 2.2.1 Examples 19
3A cS$.G 2.3 The General Image-Forming System 19
DD5cUlOSu 2.4 The Image-Formation Process 21
2c*w{\X 2.5 Reflection at a Spherical Surface 23
23d*;ri5 2.6 Aspheric Lenses 25
T mK[^ 2.7 Stops and Apertures 26
|.K B 2.8 Lens Aberrations. Computer Lens Design 28
{uDH-b(R 2.9 Imaging and The Lens Formula 29
8-_ atL 2.10 Standard Optical Systems 30
-zg 6^f_pW 2.10.1 Afocal Systems. The Telescope 30
B/*\Ih9y 2.10.2 The Simple Magnifier 32
A vww @$ 2.10.3 The Microscope 34
0.\}D:x(z 3 Interference 37
KV 8O k 3.1 Introduction 37
C{:U<q 3.2 General Description 37
x4i&;SP0 3.3 Coherence 38
j #~ S"t 3.4 Interference between two Plane Waves 41
<(t{C8>g% 3.4.1 Laser Doppler Velocimetry (LDV) 45
-d 9L 3.5 Interference between other Waves 46
3 *T/ 7\ 3.6 Interferometry 49
X?YT>+g; 3.6.1 Wavefront Division 50
ZkWMo= vL 3.6.2 Amplitude Division 51
7z_ZD0PxPc 3.6.3 The Dual-Frequency Michelson Interferometer 54
Mtl`A'KQ/K 3.6.4 Heterodyne (Homodyne) Detection 55
U2r[.Ru 3.7 Spatial and Temporal Coherence 56
NoMlTh(O 3.8 Optical Coherence Tomography 61
OHwH(}H? 4 Diffraction 67
{e$ @i 4.1 Introduction 67
`,O"^zR)z 4.2 Diffraction from a Single Slit 67
JqUft=p5 4.3 Diffraction from a Grating 70
]Q,&7D
Ah 4.3.1 The Grating Equation. Amplitude Transmittance 70
GTi=VSGqF 4.3.2 The Spatial Frequency Spectrum 73
Y[| 9
+T 4.4 Fourier Optics 75
'[HBKn$` 4.5 Optical Filtering 76
rmi&{o: 4.5.1 Practical Filtering Set-Ups 78
-'}#j\ 4.6 Physical Optics Description
aT fc>A; of Image Formation 81
Q8A+\LR~) 4.6.1 The Coherent Transfer Function 83
xi =0 kO 4.6.2 The Incoherent Transfer Function 85
S'`G7ht 4.6.3 The Depth of Focus 88
o^/ fr&,9 4.7 The Phase-Modulated Sinusoidal Grating 89
+U<.MVOo. 5 Light Sources and Detectors 99
[0 rH/{ 5.1 Introduction 99
lKf kRyO_S 5.2 Radiometry. Photometry 99
0$NzRPbH 5.2.1 Lambertian Surface 102
M?Fv'YE 5.2.2 Blackbody Radiator 103
P9R-41! 5.2.3 Examples 105
H]*B5Jv~ 5.3 Incoherent Light Sources 108
c}!`tBTm 5.4 Coherent Light Sources 109
3s RI 7g 5.4.1 Stimulated Emission 109
dNCd-ep 5.4.2 Gas Lasers 112
@ Z7s3b 5.4.3 Liquid Lasers 114
Qp iDBJCL 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Hq ~SRc~ 5.4.5 Solid-State Lasers 117
CKSs(-hkJ 5.4.6 Other Lasers 119
d| `8\fq .
5!wjYQt3 .
tR 4+]K .
