Optical Metrology Third Edition Ix<!0!
vk E|jU8qz>P Kjell J. G˚asvik
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50PU Spectra Vision AS, Trondheim, Norway
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O%6D2d * dk(<g=fM Preface to the Third Edition xi
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E+)Bt 1Basics 1
fVVD}GM= 1.1 Introduction 1
kbJ4CF}H 1.2 Wave Motion. The Electromagnetic Spectrum 1
~B?Wg! 1.3 The Plane Wave. Light Rays 3
)heHERbJ 1.4 Phase Difference 4
qJ<l$Ig 1.5 Complex Notation. Complex Amplitude 5
n)z:C{ 1.6 Oblique Incidence of A Plane Wave 5
b'z\|jY 1.7 The Spherical Wave 7
SLUQFoz} 1.8 The Intensity 8
/Ahh6=qQY 1.9 Geometrical Optics 8
p )]x,F 1.10 The Simple Convex (Positive) Lens 10
Hl'AnxE 1.11 A Plane-Wave Set-Up 11
rvK%m_r 2 Gaussian Optics 15
xI/8[JW* 2.1 Introduction 15
?;.=o?e9 2.2 Refraction at a Spherical Surface 15
M4CC&?6\ 2.2.1 Examples 19
6V}xgfB 2.3 The General Image-Forming System 19
o^MoU2c 2.4 The Image-Formation Process 21
@8+v6z 2.5 Reflection at a Spherical Surface 23
{"2CI^!/U. 2.6 Aspheric Lenses 25
E7_OI7C 2.7 Stops and Apertures 26
Z",2db 2.8 Lens Aberrations. Computer Lens Design 28
WK@<# 2.9 Imaging and The Lens Formula 29
>"|t*kS 2.10 Standard Optical Systems 30
pd& HC 2.10.1 Afocal Systems. The Telescope 30
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j)Kd'Va 2.10.3 The Microscope 34
U0srwt97S 3 Interference 37
B@VAXmCaoV 3.1 Introduction 37
%DA`.Z9# 3.2 General Description 37
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0|!g"E>$ 3.3 Coherence 38
AT1{D!b 3.4 Interference between two Plane Waves 41
t7sEY 3.4.1 Laser Doppler Velocimetry (LDV) 45
=dQ/^C_hj 3.5 Interference between other Waves 46
DyA/!%g 3.6 Interferometry 49
UO!} 0' 3.6.1 Wavefront Division 50
@A(jo 32 3.6.2 Amplitude Division 51
$|TLt{ K 3.6.3 The Dual-Frequency Michelson Interferometer 54
Zy8tI# 3.6.4 Heterodyne (Homodyne) Detection 55
<h}x7y? 3.7 Spatial and Temporal Coherence 56
mZmEE2h 3.8 Optical Coherence Tomography 61
s.n:;8RibP 4 Diffraction 67
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=6i+K.}e 4.2 Diffraction from a Single Slit 67
!c-MC| 4.3 Diffraction from a Grating 70
81!;W t(? 4.3.1 The Grating Equation. Amplitude Transmittance 70
Q&_#R(3j; 4.3.2 The Spatial Frequency Spectrum 73
7Cbr'!E\_V 4.4 Fourier Optics 75
ccp9nXv 4.5 Optical Filtering 76
25 :v c0 4.5.1 Practical Filtering Set-Ups 78
5,V*aP 4.6 Physical Optics Description
&GvSgdttv of Image Formation 81
|"9vq<` 4.6.1 The Coherent Transfer Function 83
&0 "*.:J9 4.6.2 The Incoherent Transfer Function 85
mFxt +\ 4.6.3 The Depth of Focus 88
Msfxce 4.7 The Phase-Modulated Sinusoidal Grating 89
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, 5 Light Sources and Detectors 99
e"XolM0IM 5.1 Introduction 99
a1u4v/Qu9 5.2 Radiometry. Photometry 99
o@]n<ZYo 5.2.1 Lambertian Surface 102
rKdsVW 5.2.2 Blackbody Radiator 103
*.+F]- 5.2.3 Examples 105
]` A*7 5.3 Incoherent Light Sources 108
n<<arO"cv 5.4 Coherent Light Sources 109
s{V&vRr 5.4.1 Stimulated Emission 109
N'$P(
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^Jdg%U? 5.4.3 Liquid Lasers 114
\u(Gj]B#" 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
oIIi_yc 5.4.5 Solid-State Lasers 117
yf`_?gJ6d 5.4.6 Other Lasers 119
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