Optical Metrology Third Edition EX='\~Dw 7=6p Kjell J. G˚asvik
:R"k=l1 Spectra Vision AS, Trondheim, Norway
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O HR9u Ddghw(9*H Preface to the Third Edition xi
iePpJ>( 1Basics 1
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C2oP, 1.1 Introduction 1
Ly S139P$ 1.2 Wave Motion. The Electromagnetic Spectrum 1
POtDge 1.3 The Plane Wave. Light Rays 3
44
o5I: 1.4 Phase Difference 4
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n5;fp 1.5 Complex Notation. Complex Amplitude 5
mO ?G[?*\ 1.6 Oblique Incidence of A Plane Wave 5
KQN SYI7a 1.7 The Spherical Wave 7
! -|& 1.8 The Intensity 8
)Mi #{5z 1.9 Geometrical Optics 8
(|I0C 'Ki 1.10 The Simple Convex (Positive) Lens 10
>6@*%LM 1.11 A Plane-Wave Set-Up 11
3 B KW 2 Gaussian Optics 15
q F%wl 2.1 Introduction 15
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.o 2.2 Refraction at a Spherical Surface 15
Ni(D[?mZ 2.2.1 Examples 19
[t: =%&B 2.3 The General Image-Forming System 19
Z5bmqhDo[ 2.4 The Image-Formation Process 21
:{E 3H3 2.5 Reflection at a Spherical Surface 23
H*A)U' ` 2.6 Aspheric Lenses 25
s<sqO,! 2.7 Stops and Apertures 26
<T+Pw7X 2.8 Lens Aberrations. Computer Lens Design 28
E"x 2 jP 2.9 Imaging and The Lens Formula 29
7: J6 F 2.10 Standard Optical Systems 30
F'C ]OMBE 2.10.1 Afocal Systems. The Telescope 30
=3a`NO5! 2.10.2 The Simple Magnifier 32
/7h}_zs6 2.10.3 The Microscope 34
Ipb 4{A&"\ 3 Interference 37
*O$kF.3q 3.1 Introduction 37
H_o<!YxK 3.2 General Description 37
Q^Y>T&Q 3.3 Coherence 38
P=KOw;bs 3.4 Interference between two Plane Waves 41
D4c}z#}*0 3.4.1 Laser Doppler Velocimetry (LDV) 45
MP w@O0QS 3.5 Interference between other Waves 46
q~;P^i<Y 3.6 Interferometry 49
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3.6.1 Wavefront Division 50
7`~h' (k 3.6.2 Amplitude Division 51
Sd nqM`uFo 3.6.3 The Dual-Frequency Michelson Interferometer 54
*NFy%ktu 3.6.4 Heterodyne (Homodyne) Detection 55
z=?ainnKx 3.7 Spatial and Temporal Coherence 56
qV/"30, K 3.8 Optical Coherence Tomography 61
3-h u'xSU 4 Diffraction 67
Gvt d )9^< 4.1 Introduction 67
.J&NM(q eZ 4.2 Diffraction from a Single Slit 67
o-( "S|A- 4.3 Diffraction from a Grating 70
vF ]?i 4.3.1 The Grating Equation. Amplitude Transmittance 70
fx99@%Ii 4.3.2 The Spatial Frequency Spectrum 73
YZr^;jfP 4.4 Fourier Optics 75
e@L+z 4.5 Optical Filtering 76
|uj1T=ZY 4.5.1 Practical Filtering Set-Ups 78
/fBZRd B 4.6 Physical Optics Description
`5O<U~'d of Image Formation 81
WxWgY}` 4.6.1 The Coherent Transfer Function 83
U1 1rj,7 4.6.2 The Incoherent Transfer Function 85
X.j#?? 4.6.3 The Depth of Focus 88
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X Tc%Z 4.7 The Phase-Modulated Sinusoidal Grating 89
/U N%P2>^1 5 Light Sources and Detectors 99
AWh{dM 5.1 Introduction 99
=y0! -y 5.2 Radiometry. Photometry 99
)WwysGkqol 5.2.1 Lambertian Surface 102
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w 5.2.2 Blackbody Radiator 103
U 87VaUr 5.2.3 Examples 105
!`=r ( 'l 5.3 Incoherent Light Sources 108
tN3Xn] 5.4 Coherent Light Sources 109
W=GNo9: 5.4.1 Stimulated Emission 109
:*0k:h6g 5.4.2 Gas Lasers 112
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5.4.3 Liquid Lasers 114
$Z.c9 rY1 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
rnmWw # 5.4.5 Solid-State Lasers 117
0b?9LFd 5.4.6 Other Lasers 119
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