Optical Metrology Third Edition %HS!^j 3C% z-E4-\a
Kjell J. G˚asvik
soCHwiE Spectra Vision AS, Trondheim, Norway
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2 fA9L _:0 ZOsn,nF Preface to the Third Edition xi
U~c;W@T 1Basics 1
U6 R4UK 1.1 Introduction 1
OlFn<:V K 1.2 Wave Motion. The Electromagnetic Spectrum 1
hS/'b$# 1.3 The Plane Wave. Light Rays 3
73<yrBxp 1.4 Phase Difference 4
~n\ea:. 1.5 Complex Notation. Complex Amplitude 5
<;" =ah7A 1.6 Oblique Incidence of A Plane Wave 5
|a\TUzq 1.7 The Spherical Wave 7
X Y?@^ 1.8 The Intensity 8
N* -Z Jv 1.9 Geometrical Optics 8
D'+8 ]B 1.10 The Simple Convex (Positive) Lens 10
B)NB6 dCp 1.11 A Plane-Wave Set-Up 11
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2 Gaussian Optics 15
S?tLIi/ 2.1 Introduction 15
QQcj"s 2.2 Refraction at a Spherical Surface 15
?5gpk1 2.2.1 Examples 19
_L. yt5_ 2.3 The General Image-Forming System 19
U$Z}<8 2.4 The Image-Formation Process 21
N/=3Bs0y- 2.5 Reflection at a Spherical Surface 23
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F4{<;4N0 2.7 Stops and Apertures 26
jgIzB1H 2.8 Lens Aberrations. Computer Lens Design 28
1 \kehCt 2.9 Imaging and The Lens Formula 29
z#/*LP#oY 2.10 Standard Optical Systems 30
|0mI3r 2.10.1 Afocal Systems. The Telescope 30
#{1fb%L{i 2.10.2 The Simple Magnifier 32
1=.?KAXR 2.10.3 The Microscope 34
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H 3 Interference 37
*RM'0[1F4 3.1 Introduction 37
3! W&J 3.2 General Description 37
u&bU !ZI 3.3 Coherence 38
+.cv,1Vx 3.4 Interference between two Plane Waves 41
I-"{m/PEdg 3.4.1 Laser Doppler Velocimetry (LDV) 45
dG+xr! 3.5 Interference between other Waves 46
_%B`Y ?I` 3.6 Interferometry 49
bS<p dOX_ 3.6.1 Wavefront Division 50
+Eg# 8/q 3.6.2 Amplitude Division 51
+3CMfYsr8 3.6.3 The Dual-Frequency Michelson Interferometer 54
A@r,A?( 3.6.4 Heterodyne (Homodyne) Detection 55
N R{:4zJT 3.7 Spatial and Temporal Coherence 56
2B;QS\e" 3.8 Optical Coherence Tomography 61
i/z7a%$ 4 Diffraction 67
<rs]@J'p 4.1 Introduction 67
e+ TNG &_ 4.2 Diffraction from a Single Slit 67
(#qVtN`t 4.3 Diffraction from a Grating 70
,~#hHhR_ 4.3.1 The Grating Equation. Amplitude Transmittance 70
).xWjVC 4.3.2 The Spatial Frequency Spectrum 73
QZo l( 2~Y 4.4 Fourier Optics 75
3OlY Ml 4.5 Optical Filtering 76
5" U7I{\ 4.5.1 Practical Filtering Set-Ups 78
/Z_ QCj 4.6 Physical Optics Description
u.6%n. g of Image Formation 81
DP_ \%(A 4.6.1 The Coherent Transfer Function 83
WW=7QC i 4.6.2 The Incoherent Transfer Function 85
v#xF;@G 4.6.3 The Depth of Focus 88
3$54 *J 4.7 The Phase-Modulated Sinusoidal Grating 89
Tx_ LH"8 5 Light Sources and Detectors 99
RU=%yk-gM 5.1 Introduction 99
l<+k[@Vox 5.2 Radiometry. Photometry 99
5]E5 V@C 5.2.1 Lambertian Surface 102
2Z~o frj 5.2.2 Blackbody Radiator 103
9tO_hhEQ@ 5.2.3 Examples 105
2 6A#X 5.3 Incoherent Light Sources 108
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5.4 Coherent Light Sources 109
Y i`. zm 5.4.1 Stimulated Emission 109
Qw:j2g2H7 5.4.2 Gas Lasers 112
U' Cp3> 5.4.3 Liquid Lasers 114
uvL|T4 8 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
r +Y1m\ 5.4.5 Solid-State Lasers 117
v]v f(]"" 5.4.6 Other Lasers 119
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