Optical Metrology Third Edition ex.+'m<g :eSc ; Kjell J. G˚asvik
L?C\Q^0"`G Spectra Vision AS, Trondheim, Norway
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8098y,mQe j z|VF,l Preface to the Third Edition xi
FU[*8^Z 1Basics 1
g&Z"_7L~ 1.1 Introduction 1
vxb@9 eb!H 1.2 Wave Motion. The Electromagnetic Spectrum 1
x,w8r+~5 1.3 The Plane Wave. Light Rays 3
|4=ihB9+ 1.4 Phase Difference 4
SK?I. 1.5 Complex Notation. Complex Amplitude 5
Z?-;.G* 1.6 Oblique Incidence of A Plane Wave 5
Bu &So|@TL 1.7 The Spherical Wave 7
{JX f*IJ 1.8 The Intensity 8
`4_c0 q)N4 1.9 Geometrical Optics 8
dQ,Q+ON> 1.10 The Simple Convex (Positive) Lens 10
:RHm*vt 1.11 A Plane-Wave Set-Up 11
>Dxe>Q'df 2 Gaussian Optics 15
)G K+ 2.1 Introduction 15
jg?bf/$s 2.2 Refraction at a Spherical Surface 15
nkTYWw 2.2.1 Examples 19
B`#*o<eb 2.3 The General Image-Forming System 19
H*GlWgfG 2.4 The Image-Formation Process 21
f# 1/}Hq/I 2.5 Reflection at a Spherical Surface 23
[8.-(-/; 2.6 Aspheric Lenses 25
V- /YNRV 2.7 Stops and Apertures 26
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,uj7 2.8 Lens Aberrations. Computer Lens Design 28
{aoM JJq 2.9 Imaging and The Lens Formula 29
5lGQ#r 2.10 Standard Optical Systems 30
<Kg2$lu(_` 2.10.1 Afocal Systems. The Telescope 30
>}C EN 2.10.2 The Simple Magnifier 32
>[EBpYi 2.10.3 The Microscope 34
Cpe #[mE 3 Interference 37
f $vwuW 3.1 Introduction 37
Z4#v~! 3.2 General Description 37
=)(0.E 3.3 Coherence 38
Z0 aUHWms 3.4 Interference between two Plane Waves 41
nX )f'[ 7 3.4.1 Laser Doppler Velocimetry (LDV) 45
>:%BNeO 3.5 Interference between other Waves 46
-A}zJBcR 3.6 Interferometry 49
7 I@";d8~ 3.6.1 Wavefront Division 50
Yc|uD-y 3.6.2 Amplitude Division 51
&f"T,4Oh 3.6.3 The Dual-Frequency Michelson Interferometer 54
f\ 'T _ 3.6.4 Heterodyne (Homodyne) Detection 55
i *'Z3Z) 3.7 Spatial and Temporal Coherence 56
vTHq)C.7G 3.8 Optical Coherence Tomography 61
Yh$fQ:yi\& 4 Diffraction 67
';Nu& D#Ph 4.1 Introduction 67
IytDvz*| 4.2 Diffraction from a Single Slit 67
[3kl^TE 4.3 Diffraction from a Grating 70
"T7 >)fbu 4.3.1 The Grating Equation. Amplitude Transmittance 70
C s#w72N 4.3.2 The Spatial Frequency Spectrum 73
Q,~x# 4.4 Fourier Optics 75
F_v-}bbcFQ 4.5 Optical Filtering 76
Q(e{~
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Kr]z]4.d@ 4.6 Physical Optics Description
J+|/-{g of Image Formation 81
^ &NN]? 4.6.1 The Coherent Transfer Function 83
]+ZM/'X 4.6.2 The Incoherent Transfer Function 85
>Mw'eQ0(y 4.6.3 The Depth of Focus 88
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I|T7+{5 z 5 Light Sources and Detectors 99
yPN+W8}f 5.1 Introduction 99
s&VOwU 5.2 Radiometry. Photometry 99
) b0];&hw] 5.2.1 Lambertian Surface 102
toIYE*ocv= 5.2.2 Blackbody Radiator 103
IJ_ m 5.2.3 Examples 105
F,& )X>:l 5.3 Incoherent Light Sources 108
1x{kl01m% 5.4 Coherent Light Sources 109
:BD>yOlG 5.4.1 Stimulated Emission 109
uXpv*i {R 5.4.2 Gas Lasers 112
|z*>ixK 5.4.3 Liquid Lasers 114
>Nh`rkR2[ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
(:n|v% 5.4.5 Solid-State Lasers 117
Ha218Hy0W 5.4.6 Other Lasers 119
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