Optical Metrology Third Edition nlOM4fJ( $!)Sgb Kjell J. G˚asvik
L0H;y6& Spectra Vision AS, Trondheim, Norway
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ms@*JCL!t .$pW?C 3e Preface to the Third Edition xi
@KfFtR-; 1Basics 1
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^ 1.1 Introduction 1
>~8;H x].d 1.2 Wave Motion. The Electromagnetic Spectrum 1
h,o/(GNnW 1.3 The Plane Wave. Light Rays 3
fl #gWAM 1.4 Phase Difference 4
e[.c^Hw 1.5 Complex Notation. Complex Amplitude 5
bi;?)7p&ZY 1.6 Oblique Incidence of A Plane Wave 5
:8\!; ! 1.7 The Spherical Wave 7
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'G%%%;4 1.8 The Intensity 8
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nE 1.9 Geometrical Optics 8
, 7&`V=C 1.10 The Simple Convex (Positive) Lens 10
?f<JwF< 1.11 A Plane-Wave Set-Up 11
5 0uYU[W 2 Gaussian Optics 15
+[Cdd{2 2.1 Introduction 15
~47Bbom 2.2 Refraction at a Spherical Surface 15
(C>FM8$J 2.2.1 Examples 19
Y /$`vgqs 2.3 The General Image-Forming System 19
<ZGEmQ 2.4 The Image-Formation Process 21
`@1y|j:m 2.5 Reflection at a Spherical Surface 23
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b1& 2.6 Aspheric Lenses 25
Ysbd4rN 2.7 Stops and Apertures 26
HI)MBrj;r 2.8 Lens Aberrations. Computer Lens Design 28
d$Y3 a^O| 2.9 Imaging and The Lens Formula 29
o8Vtxnkg 2.10 Standard Optical Systems 30
3NAU|//J 2.10.1 Afocal Systems. The Telescope 30
&~gqEl6RF 2.10.2 The Simple Magnifier 32
itClCEOA 2.10.3 The Microscope 34
R1OC7q 3 Interference 37
{@, } M 3.1 Introduction 37
RP 'VEJ 3.2 General Description 37
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hiO:VA 3.4 Interference between two Plane Waves 41
aV"K%#N 3.4.1 Laser Doppler Velocimetry (LDV) 45
['~j1!/;6 3.5 Interference between other Waves 46
`2`Nu:r^ 3.6 Interferometry 49
Rj6:.KEJ 3.6.1 Wavefront Division 50
9ZFvN*Zf' 3.6.2 Amplitude Division 51
&S[tI$ 3.6.3 The Dual-Frequency Michelson Interferometer 54
O92a*) 3.6.4 Heterodyne (Homodyne) Detection 55
64xq@_+ 3.7 Spatial and Temporal Coherence 56
5y-8_)y8o 3.8 Optical Coherence Tomography 61
banie{ e 4 Diffraction 67
Z)}q=NjA 4.1 Introduction 67
Xvu|ss 4.2 Diffraction from a Single Slit 67
5dOA^P@`,M 4.3 Diffraction from a Grating 70
'D#iT}Vu 4.3.1 The Grating Equation. Amplitude Transmittance 70
0s )B~ 4.3.2 The Spatial Frequency Spectrum 73
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4.4 Fourier Optics 75
*I,3,zO 4.5 Optical Filtering 76
oEPO0O 4.5.1 Practical Filtering Set-Ups 78
^@f%A< 4.6 Physical Optics Description
GtI]6t of Image Formation 81
zWvG];fsN 4.6.1 The Coherent Transfer Function 83
@gzm4 4.6.2 The Incoherent Transfer Function 85
eBiP\ 4.6.3 The Depth of Focus 88
8was/^9; 4.7 The Phase-Modulated Sinusoidal Grating 89
Ch-56
5 Light Sources and Detectors 99
c*MSd 5.1 Introduction 99
*4}lV8 5.2 Radiometry. Photometry 99
Yas! w' 5.2.1 Lambertian Surface 102
b(&~f@%| 5.2.2 Blackbody Radiator 103
_\yrR.HIa 5.2.3 Examples 105
Y#'mALC2 5.3 Incoherent Light Sources 108
lsmzy_gV7 5.4 Coherent Light Sources 109
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I 5.4.1 Stimulated Emission 109
:()(P9? 5.4.2 Gas Lasers 112
H{|a+ 5.4.3 Liquid Lasers 114
s'%KKC 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
pL` snVz 5.4.5 Solid-State Lasers 117
CORX .PQ 5.4.6 Other Lasers 119
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