Optical Metrology Third Edition F zy5k?R
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Kjell J. G˚asvik M AL;XcRR
Spectra Vision AS, Trondheim, Norway 9D7i>e%,;-
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Preface to the Third Edition xi C sN^u H
1Basics 1 [-VIojs+u
1.1 Introduction 1 )h0b}HMW)
1.2 Wave Motion. The Electromagnetic Spectrum 1 qTe@? j
1.3 The Plane Wave. Light Rays 3 D=}\]Krmay
1.4 Phase Difference 4 YVPLHwh/5
1.5 Complex Notation. Complex Amplitude 5 )Cd.1X8
1.6 Oblique Incidence of A Plane Wave 5 + .QJZo_
1.7 The Spherical Wave 7 H`rd b E
1.8 The Intensity 8 W@D. /Th
1.9 Geometrical Optics 8 s13 3N?
1.10 The Simple Convex (Positive) Lens 10 `pqT iV
1.11 A Plane-Wave Set-Up 11 :a9
2 Gaussian Optics 15 . Gb!mG
2.1 Introduction 15 dd *p_4;
2.2 Refraction at a Spherical Surface 15 xc H&B %;f
2.2.1 Examples 19 [gj>ey8T
2.3 The General Image-Forming System 19 $ByP 9=|
2.4 The Image-Formation Process 21 x
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2.5 Reflection at a Spherical Surface 23 ;*WG9Y(W
2.6 Aspheric Lenses 25 \t)`Cp6,[b
2.7 Stops and Apertures 26 .sD=k3d
2.8 Lens Aberrations. Computer Lens Design 28 |^"0bu"
2.9 Imaging and The Lens Formula 29 * NC@o*
2.10 Standard Optical Systems 30 "egpc*|]
2.10.1 Afocal Systems. The Telescope 30 PJ ^qE| X
2.10.2 The Simple Magnifier 32 @4n>I+6*&
2.10.3 The Microscope 34 WWATG =
3 Interference 37 <(i5hmuVd
3.1 Introduction 37 t8`wO+4@
3.2 General Description 37 =Q*3\ )7
3.3 Coherence 38 G=| ~SYz
3.4 Interference between two Plane Waves 41 fg4mP_
3.4.1 Laser Doppler Velocimetry (LDV) 45 d0;?GQYn:
3.5 Interference between other Waves 46 8 #:k
3.6 Interferometry 49 <>)N$$Rx&
3.6.1 Wavefront Division 50 4eJR=h1
3.6.2 Amplitude Division 51 ?hViOh$.
3.6.3 The Dual-Frequency Michelson Interferometer 54 M{4XNE]m
3.6.4 Heterodyne (Homodyne) Detection 55 iUk#hLLC
3.7 Spatial and Temporal Coherence 56 A WJA?
3.8 Optical Coherence Tomography 61 x_r*<?OZ
4 Diffraction 67 D " %>
4.1 Introduction 67 BvUiH<-D
4.2 Diffraction from a Single Slit 67 n#@ Qd!uzM
4.3 Diffraction from a Grating 70 m"QDc[^Ge
4.3.1 The Grating Equation. Amplitude Transmittance 70 n~.$ iN
4.3.2 The Spatial Frequency Spectrum 73 M=3gV?N
4.4 Fourier Optics 75 aemi;61T\
4.5 Optical Filtering 76 ck\W'Y*Q7
4.5.1 Practical Filtering Set-Ups 78 `evF?t11X
4.6 Physical Optics Description m.< u !MI
of Image Formation 81 I&31jn_o
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4.6.1 The Coherent Transfer Function 83 wE}Wh5
4.6.2 The Incoherent Transfer Function 85 MzDosr3:
4.6.3 The Depth of Focus 88 X0R EC%
4.7 The Phase-Modulated Sinusoidal Grating 89 XK})?LTD
5 Light Sources and Detectors 99 YoBe!-E
5.1 Introduction 99 $sS~hy*
5.2 Radiometry. Photometry 99 n2EPx(~
5.2.1 Lambertian Surface 102 :2K@{~ 8r
5.2.2 Blackbody Radiator 103 2_y]MXG+%
5.2.3 Examples 105
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5.3 Incoherent Light Sources 108 h9/fD5
5.4 Coherent Light Sources 109 x0 WinLQ
5.4.1 Stimulated Emission 109 "%\hDL;
5.4.2 Gas Lasers 112 _54gqD2C,
5.4.3 Liquid Lasers 114 }pIn3B)
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 Ih>s2nL
5.4.5 Solid-State Lasers 117 @bJIN]R
5.4.6 Other Lasers 119 t"Ah]sD
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