Optical Metrology Third Edition 7R<u=U pL}j
ZTo Kjell J. G˚asvik
'"]>`=R Spectra Vision AS, Trondheim, Norway
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oo U Sb 2}`V c{\ Preface to the Third Edition xi
-?w v}o 1Basics 1
fo\J \ 1.1 Introduction 1
a.}:d30 1.2 Wave Motion. The Electromagnetic Spectrum 1
m wEVEx24 1.3 The Plane Wave. Light Rays 3
oF b mz* 1.4 Phase Difference 4
?^48Zq6wM 1.5 Complex Notation. Complex Amplitude 5
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i 1.6 Oblique Incidence of A Plane Wave 5
18p3 1.7 The Spherical Wave 7
*fvI.cKiGP 1.8 The Intensity 8
_ 2gT1B 1.9 Geometrical Optics 8
Z!RRe]"y 1.10 The Simple Convex (Positive) Lens 10
fyg~KF} 1.11 A Plane-Wave Set-Up 11
oY2?W 2 Gaussian Optics 15
"l[ V%f E 2.1 Introduction 15
~b$z\| Y 2.2 Refraction at a Spherical Surface 15
~ 0[G/A$] 2.2.1 Examples 19
8A8xY446) 2.3 The General Image-Forming System 19
i Z.&q
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~Miin 2.5 Reflection at a Spherical Surface 23
Wr HgF*[ 2.6 Aspheric Lenses 25
cfC; eRgq~ 2.7 Stops and Apertures 26
3h[:0W!C] 2.8 Lens Aberrations. Computer Lens Design 28
s9_`Wrg? 2.9 Imaging and The Lens Formula 29
yNqm]H3<MP 2.10 Standard Optical Systems 30
t.>te'DK/ 2.10.1 Afocal Systems. The Telescope 30
C?/r}ly<\ 2.10.2 The Simple Magnifier 32
Bgk~R.l 2.10.3 The Microscope 34
w*6!?=jP 3 Interference 37
6Y>,e;R 3.1 Introduction 37
k;K>
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TM/ |K|_ 3.3 Coherence 38
jsqUMy- 3.4 Interference between two Plane Waves 41
^`TKvcgIc 3.4.1 Laser Doppler Velocimetry (LDV) 45
Q Sn;a 4f 3.5 Interference between other Waves 46
anz9lGG# 3.6 Interferometry 49
k67i` f= 3.6.1 Wavefront Division 50
:_fjm l/ 3.6.2 Amplitude Division 51
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r^90 3.6.3 The Dual-Frequency Michelson Interferometer 54
vh. Wm?qQ 3.6.4 Heterodyne (Homodyne) Detection 55
mV**9-" 3.7 Spatial and Temporal Coherence 56
GLa ZN4` 3.8 Optical Coherence Tomography 61
w8ZHk?: 4 Diffraction 67
\sHy. { 4.1 Introduction 67
x
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yd0=h7s 4.3 Diffraction from a Grating 70
,Ou1!`6?t 4.3.1 The Grating Equation. Amplitude Transmittance 70
U+9- li 4.3.2 The Spatial Frequency Spectrum 73
]uStn 4.4 Fourier Optics 75
EU^}NZW&v: 4.5 Optical Filtering 76
\'s$ZN$ k 4.5.1 Practical Filtering Set-Ups 78
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4V1>e+ 4.6 Physical Optics Description
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_uNq of Image Formation 81
.y %pGi 4.6.1 The Coherent Transfer Function 83
^(dGO)/ 4.6.2 The Incoherent Transfer Function 85
dJ%wVY0z= 4.6.3 The Depth of Focus 88
^ Hz 4.7 The Phase-Modulated Sinusoidal Grating 89
KlVi4.] 5 Light Sources and Detectors 99
a%MzNH 5.1 Introduction 99
uKR\Xo} 5.2 Radiometry. Photometry 99
#51 4a(6 5.2.1 Lambertian Surface 102
hapB! ~M? 5.2.2 Blackbody Radiator 103
u_}`y1Xu# 5.2.3 Examples 105
-! 'Oy%a# 5.3 Incoherent Light Sources 108
PmPyb>HK=P 5.4 Coherent Light Sources 109
`uIx/.L 5.4.1 Stimulated Emission 109
G| QUujl 5.4.2 Gas Lasers 112
q 9W~7 5.4.3 Liquid Lasers 114
SZim>@R 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
||{T5E-.F 5.4.5 Solid-State Lasers 117
zmy4tsmX 5.4.6 Other Lasers 119
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