Optical Metrology Third Edition &,2h=H,M N;7Xt9l Kjell J. G˚asvik
>tnQuFKg] Spectra Vision AS, Trondheim, Norway
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hex:e2x .v%H%z~Rl# Preface to the Third Edition xi
0'`>20Y 1Basics 1
Cfu]umZLn 1.1 Introduction 1
>S3iP?V7 1.2 Wave Motion. The Electromagnetic Spectrum 1
`:!mPNW# 1.3 The Plane Wave. Light Rays 3
O^48c$Apv 1.4 Phase Difference 4
:}0y[qc3 1.5 Complex Notation. Complex Amplitude 5
9l9nT 1.6 Oblique Incidence of A Plane Wave 5
Vm6G5QwM 1.7 The Spherical Wave 7
Tw"u{%t 1.8 The Intensity 8
$-m@cObw!. 1.9 Geometrical Optics 8
>4`("# 1.10 The Simple Convex (Positive) Lens 10
b;# 3X) 1.11 A Plane-Wave Set-Up 11
bsy\L|wd 2 Gaussian Optics 15
[ ps5; 2.1 Introduction 15
]7n+|@3x 2.2 Refraction at a Spherical Surface 15
, j^ /~ 2.2.1 Examples 19
vO!p8r
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%KK6}d# 2.4 The Image-Formation Process 21
[ !/u, 2.5 Reflection at a Spherical Surface 23
Y&KI/]ly,L 2.6 Aspheric Lenses 25
`P<}MeJ\l 2.7 Stops and Apertures 26
(:Rj:8{ 2.8 Lens Aberrations. Computer Lens Design 28
wgxr8;8`q 2.9 Imaging and The Lens Formula 29
T;qP"KWZ 2.10 Standard Optical Systems 30
SYRr|Lg 2.10.1 Afocal Systems. The Telescope 30
R!b<Sg 2.10.2 The Simple Magnifier 32
VVO C-: 2.10.3 The Microscope 34
wUj[c7Y% 3 Interference 37
C-lv=FJEk/ 3.1 Introduction 37
4;'o`K~* 3.2 General Description 37
Nw[TP
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_0ki19rs 3.4 Interference between two Plane Waves 41
&2[OH}4 3.4.1 Laser Doppler Velocimetry (LDV) 45
&^Q-:Kxs8 3.5 Interference between other Waves 46
i1$ $86 3.6 Interferometry 49
nI.K|hU:P 3.6.1 Wavefront Division 50
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3.6.2 Amplitude Division 51
.Nz2K[ 3.6.3 The Dual-Frequency Michelson Interferometer 54
6r{NW9y' 3.6.4 Heterodyne (Homodyne) Detection 55
Z8*E-y0 3.7 Spatial and Temporal Coherence 56
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3.8 Optical Coherence Tomography 61
gKoB)n<[ 4 Diffraction 67
<VI.A" Qk~ 4.1 Introduction 67
xX$'u"dsA 4.2 Diffraction from a Single Slit 67
>J!4x(;Yh 4.3 Diffraction from a Grating 70
"/[xak!g 4.3.1 The Grating Equation. Amplitude Transmittance 70
TELN4* 4.3.2 The Spatial Frequency Spectrum 73
t=o2:p6& 4.4 Fourier Optics 75
=]jc{Y%o 4.5 Optical Filtering 76
\Fg%V> 4.5.1 Practical Filtering Set-Ups 78
W5 ^eCYHoi 4.6 Physical Optics Description
w%F~4|F of Image Formation 81
S?ELFq(g 4.6.1 The Coherent Transfer Function 83
4{4VC"fa 4.6.2 The Incoherent Transfer Function 85
4FUY1p 4.6.3 The Depth of Focus 88
RQhS]y@e 4.7 The Phase-Modulated Sinusoidal Grating 89
Kab"r_' 5 Light Sources and Detectors 99
jez=q 5.1 Introduction 99
TLbnG$VQS 5.2 Radiometry. Photometry 99
oS3'q\ 5.2.1 Lambertian Surface 102
/vC|_G|{ 5.2.2 Blackbody Radiator 103
6Hoc F/Ye 5.2.3 Examples 105
4.Luy 5.3 Incoherent Light Sources 108
B8A-|S!,U 5.4 Coherent Light Sources 109
&$$KC?!w 5.4.1 Stimulated Emission 109
ZLm?8g6- 5.4.2 Gas Lasers 112
Kv(2x3(" 5.4.3 Liquid Lasers 114
[Z~h!} 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
!YX$4_I 5.4.5 Solid-State Lasers 117
Kz>bfq7 5.4.6 Other Lasers 119
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