Optical Metrology Third Edition S ' ?fJ. ,xj3w#`zaf Kjell J. G˚asvik
MOyT< $ Spectra Vision AS, Trondheim, Norway
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&A"e, h(^ "=ElCaP} Preface to the Third Edition xi
l7 Y8b` 1Basics 1
Vr\Q`H. 1.1 Introduction 1
VV\Xb31J 1.2 Wave Motion. The Electromagnetic Spectrum 1
i_ y:4 1.3 The Plane Wave. Light Rays 3
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1.4 Phase Difference 4
~BQV]BJ7 1.5 Complex Notation. Complex Amplitude 5
}3sN+4 1.6 Oblique Incidence of A Plane Wave 5
leIy|K>\m 1.7 The Spherical Wave 7
k<, u 0 1.8 The Intensity 8
2C{/`N 1.9 Geometrical Optics 8
8;8YA1@w 1.10 The Simple Convex (Positive) Lens 10
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VvI 1.11 A Plane-Wave Set-Up 11
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Ef#A 2 Gaussian Optics 15
l O_c/o$ 2.1 Introduction 15
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D@ 2.2 Refraction at a Spherical Surface 15
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2.2.1 Examples 19
Q!x` M 4 2.3 The General Image-Forming System 19
#~1wv^ 2.4 The Image-Formation Process 21
w~{| S7/ 2.5 Reflection at a Spherical Surface 23
s@ z{dmL 2.6 Aspheric Lenses 25
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:l 2.7 Stops and Apertures 26
R|H [lbw 2.8 Lens Aberrations. Computer Lens Design 28
Y.9~Bo<<r 2.9 Imaging and The Lens Formula 29
3XGB+$]C 2.10 Standard Optical Systems 30
r!~(R+,c 2.10.1 Afocal Systems. The Telescope 30
Lb^(E- 2.10.2 The Simple Magnifier 32
mw Z'=H 2.10.3 The Microscope 34
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5a 3 Interference 37
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m6\C5 3.1 Introduction 37
WT?b Bf 3.2 General Description 37
}z?xGW/k 3.3 Coherence 38
W8x[3,gT 3.4 Interference between two Plane Waves 41
IyT ?-R 3.4.1 Laser Doppler Velocimetry (LDV) 45
<g*.p@o 3.5 Interference between other Waves 46
Fj,(_^ 3.6 Interferometry 49
L=, Y1nO:p 3.6.1 Wavefront Division 50
n3*UgNg%fK 3.6.2 Amplitude Division 51
mw ?{LT 3.6.3 The Dual-Frequency Michelson Interferometer 54
IJldN6&\q 3.6.4 Heterodyne (Homodyne) Detection 55
Q QT G9s 3.7 Spatial and Temporal Coherence 56
,b:n1 3.8 Optical Coherence Tomography 61
^IYJEqK 4 Diffraction 67
| yS5[?.` 4.1 Introduction 67
/<6ywLD 4.2 Diffraction from a Single Slit 67
zdqnL^wb 4.3 Diffraction from a Grating 70
XN4oL[pO 4.3.1 The Grating Equation. Amplitude Transmittance 70
QP+c?ct}hF 4.3.2 The Spatial Frequency Spectrum 73
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*$JB`=Q 4.5 Optical Filtering 76
pK<%<dIc 4.5.1 Practical Filtering Set-Ups 78
,zG <7~m 4.6 Physical Optics Description
1Jl{1;c of Image Formation 81
(eki X*y 4.6.1 The Coherent Transfer Function 83
7TnM4 @*f 4.6.2 The Incoherent Transfer Function 85
m';#R9\Fz 4.6.3 The Depth of Focus 88
.|U4N/XN%q 4.7 The Phase-Modulated Sinusoidal Grating 89
Q6eN+i2 ; 5 Light Sources and Detectors 99
~Vwk:+): 5.1 Introduction 99
Gee~>:_Q{J 5.2 Radiometry. Photometry 99
"$]ls9 -%n 5.2.1 Lambertian Surface 102
nZ&T8@m 5.2.2 Blackbody Radiator 103
Mp^^!AP 9 5.2.3 Examples 105
Td5bDO 5.3 Incoherent Light Sources 108
+O&RBEa[ 5.4 Coherent Light Sources 109
f V*}c ` 5.4.1 Stimulated Emission 109
n}= rj7 5.4.2 Gas Lasers 112
KlY,NSlQ 5.4.3 Liquid Lasers 114
\>4v?\8o 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
^GE^Q\&D& 5.4.5 Solid-State Lasers 117
:jB ZK=3F> 5.4.6 Other Lasers 119
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