Optical Metrology Third Edition HPl!r0 h )w];eF0c Kjell J. G˚asvik
g*C&Pr3 Spectra Vision AS, Trondheim, Norway
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R r! PU f"t\-ux.b Preface to the Third Edition xi
Nw ;BhBt 1Basics 1
2GOQ| Z 1.1 Introduction 1
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',9 1.2 Wave Motion. The Electromagnetic Spectrum 1
Kn3qq 1.3 The Plane Wave. Light Rays 3
Y: &?xR 1.4 Phase Difference 4
'teToE<i 1.5 Complex Notation. Complex Amplitude 5
'7G'R 1.6 Oblique Incidence of A Plane Wave 5
L4`bGZl55 1.7 The Spherical Wave 7
}Kc[pp|9< 1.8 The Intensity 8
^2E\{$J 1.9 Geometrical Optics 8
~qQSt% 1.10 The Simple Convex (Positive) Lens 10
Pk/{~!+
$ 1.11 A Plane-Wave Set-Up 11
&ywAzGV{s 2 Gaussian Optics 15
J'^H@L/E 2.1 Introduction 15
nEu,1 2.2 Refraction at a Spherical Surface 15
P#-9{T 2.2.1 Examples 19
9bvz t8pc 2.3 The General Image-Forming System 19
[uCW8:e 2.4 The Image-Formation Process 21
j`jF{k b 2.5 Reflection at a Spherical Surface 23
^@?-YWt 2.6 Aspheric Lenses 25
ipU,.@~# 2.7 Stops and Apertures 26
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nlJi1f 2.8 Lens Aberrations. Computer Lens Design 28
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H:Y8j 2.9 Imaging and The Lens Formula 29
!G E-5 \* 2.10 Standard Optical Systems 30
'>dsROB-> 2.10.1 Afocal Systems. The Telescope 30
I^|6gaP|6 2.10.2 The Simple Magnifier 32
#xL^S9P 2.10.3 The Microscope 34
ERcj$ [:T( 3 Interference 37
ELoE-b)Cb 3.1 Introduction 37
RbB
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.ko8`J%%M 3.3 Coherence 38
Pd-0u>k 3.4 Interference between two Plane Waves 41
qr>:meJy4 3.4.1 Laser Doppler Velocimetry (LDV) 45
lx9tUTaus/ 3.5 Interference between other Waves 46
L3[r7 b 3.6 Interferometry 49
&w\E*$ 3.6.1 Wavefront Division 50
I*cB
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hE.NW 3.6.3 The Dual-Frequency Michelson Interferometer 54
yt,xA;g 3.6.4 Heterodyne (Homodyne) Detection 55
/)I:Cz/f 3.7 Spatial and Temporal Coherence 56
Hkq""'Mx+w 3.8 Optical Coherence Tomography 61
tXj28sh$ 4 Diffraction 67
PDN3=PAR/A 4.1 Introduction 67
ul0]\(sS: 4.2 Diffraction from a Single Slit 67
E`vCYhf{ 4.3 Diffraction from a Grating 70
&8VB{S>r 4.3.1 The Grating Equation. Amplitude Transmittance 70
EC[2rROn\ 4.3.2 The Spatial Frequency Spectrum 73
tbz?th\# 4.4 Fourier Optics 75
Z^t" !oY 4.5 Optical Filtering 76
k.Tu#7 4.5.1 Practical Filtering Set-Ups 78
Pl|e?Np 4.6 Physical Optics Description
1&{]jG{# of Image Formation 81
t~mbe 4.6.1 The Coherent Transfer Function 83
3`y9V2&b 4.6.2 The Incoherent Transfer Function 85
A2Je*Gz 4.6.3 The Depth of Focus 88
_`6fGu& W 4.7 The Phase-Modulated Sinusoidal Grating 89
?.E ixGzI^ 5 Light Sources and Detectors 99
[x}]sT`#a 5.1 Introduction 99
U@#YKv 5.2 Radiometry. Photometry 99
V6)e Jy 5.2.1 Lambertian Surface 102
4VtI8f! 5.2.2 Blackbody Radiator 103
WzM9{c 5.2.3 Examples 105
0bY}<x(; 5.3 Incoherent Light Sources 108
u\~dsD2)q 5.4 Coherent Light Sources 109
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5.4.1 Stimulated Emission 109
<]f
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*5( h,s3& 5.4.3 Liquid Lasers 114
~udi=J| 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
_g+^ jR4 5.4.5 Solid-State Lasers 117
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