Optical Metrology Third Edition %Q"zU9 +kTAOf M Kjell J. G˚asvik
RGYky3mQK Spectra Vision AS, Trondheim, Norway
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P$_Y:XI ! g(<02t!OT= Preface to the Third Edition xi
\lHi=}0 1Basics 1
^T"9ZBkb 1.1 Introduction 1
9oS \{[x. 1.2 Wave Motion. The Electromagnetic Spectrum 1
ie^:PcU 1.3 The Plane Wave. Light Rays 3
B5Rm z& 1.4 Phase Difference 4
T_ Q/KhLU 1.5 Complex Notation. Complex Amplitude 5
f]"][!e!, 1.6 Oblique Incidence of A Plane Wave 5
Taxi79cH 1.7 The Spherical Wave 7
#C|:] moe 1.8 The Intensity 8
,$ 5; 1.9 Geometrical Optics 8
Q_/{TE/sO5 1.10 The Simple Convex (Positive) Lens 10
C- ]H+p 1.11 A Plane-Wave Set-Up 11
Gdnk1_D> 2 Gaussian Optics 15
'GQ1;9A57 2.1 Introduction 15
>`=
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o1"U'y-9V 2.2.1 Examples 19
y= YD4m2 W 2.3 The General Image-Forming System 19
g. f!Uc{ 2.4 The Image-Formation Process 21
V S2p"0$3D 2.5 Reflection at a Spherical Surface 23
//KTEAYyy# 2.6 Aspheric Lenses 25
Q6Q >b4 .3 2.7 Stops and Apertures 26
"-XL Y_ 2.8 Lens Aberrations. Computer Lens Design 28
`m<l8'g 2.9 Imaging and The Lens Formula 29
|Z6rP- 2.10 Standard Optical Systems 30
1JgnuBX" 2.10.1 Afocal Systems. The Telescope 30
UV)[a%/SB& 2.10.2 The Simple Magnifier 32
W5}.W Fu 2.10.3 The Microscope 34
m }6GVQ'Q 3 Interference 37
Nt67Ye3; 3.1 Introduction 37
NFY,$ 3.2 General Description 37
s2g}IZfo 3.3 Coherence 38
yXY8 o E 3.4 Interference between two Plane Waves 41
! Qrlb>1z- 3.4.1 Laser Doppler Velocimetry (LDV) 45
)vO Zp& 3.5 Interference between other Waves 46
gj\r>~S 3.6 Interferometry 49
'mpY2|]\$ 3.6.1 Wavefront Division 50
'1ff| c!x9 3.6.2 Amplitude Division 51
h0 Acpd2 3.6.3 The Dual-Frequency Michelson Interferometer 54
L':;Vv~- 3.6.4 Heterodyne (Homodyne) Detection 55
EiI3$y3; 3.7 Spatial and Temporal Coherence 56
s['F?GWg 3.8 Optical Coherence Tomography 61
En+4@BC 4 Diffraction 67
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4.1 Introduction 67
2|tZ xlt- 4.2 Diffraction from a Single Slit 67
dGQxG t1 4.3 Diffraction from a Grating 70
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RET 4.3.1 The Grating Equation. Amplitude Transmittance 70
e+bpbyV_# 4.3.2 The Spatial Frequency Spectrum 73
s!Y>\3rMW 4.4 Fourier Optics 75
Ia)wlA02S 4.5 Optical Filtering 76
/#9O{) 4.5.1 Practical Filtering Set-Ups 78
sB S\S 4.6 Physical Optics Description
ckP&N:tC of Image Formation 81
g63:WX-\ 4.6.1 The Coherent Transfer Function 83
s7 O?)f f 4.6.2 The Incoherent Transfer Function 85
4 a>z]&s 4.6.3 The Depth of Focus 88
//Ioh (N 4.7 The Phase-Modulated Sinusoidal Grating 89
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}( 5 Light Sources and Detectors 99
,nMLu a\ 5.1 Introduction 99
)<DL' 5.2 Radiometry. Photometry 99
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5.2.1 Lambertian Surface 102
Xo(K*eIN 5.2.2 Blackbody Radiator 103
&AGV0{NMh] 5.2.3 Examples 105
> 2 Al+m<w 5.3 Incoherent Light Sources 108
^qiTO`lg 5.4 Coherent Light Sources 109
gTW(2?xYf 5.4.1 Stimulated Emission 109
T9{94Ra 5.4.2 Gas Lasers 112
eN >=x40 5.4.3 Liquid Lasers 114
#1z}~1- 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
{#=q[jVi%1 5.4.5 Solid-State Lasers 117
-#3B>VY 5.4.6 Other Lasers 119
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