Optical Metrology Third Edition I,&
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L |,\s Kjell J. G˚asvik
BuC\Bd^0 Spectra Vision AS, Trondheim, Norway
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M-t h_\W 7xt Preface to the Third Edition xi
pB%oFWqK 1Basics 1
j^f54Ky. 1.1 Introduction 1
37M,Os1( 1.2 Wave Motion. The Electromagnetic Spectrum 1
X .K*</(g 1.3 The Plane Wave. Light Rays 3
]}]+aB 1.4 Phase Difference 4
nI+.De~ 1.5 Complex Notation. Complex Amplitude 5
eU]I ! pI< 1.6 Oblique Incidence of A Plane Wave 5
mOLz(0 1.7 The Spherical Wave 7
+#X+QG 1.8 The Intensity 8
ZR{YpLFQ 1.9 Geometrical Optics 8
Y2g% {keo 1.10 The Simple Convex (Positive) Lens 10
vn@sPT 1.11 A Plane-Wave Set-Up 11
* $1F|G 2 Gaussian Optics 15
8e`HXU(A 2.1 Introduction 15
6W;`}'ap 2.2 Refraction at a Spherical Surface 15
Ggv*EsN/cC 2.2.1 Examples 19
#AO}JP 2.3 The General Image-Forming System 19
$" 0`2C 2.4 The Image-Formation Process 21
wg:\$_Og 2.5 Reflection at a Spherical Surface 23
uOd1:\%* 2.6 Aspheric Lenses 25
Zl]@ ;*u 2.7 Stops and Apertures 26
eV;nTj 2.8 Lens Aberrations. Computer Lens Design 28
r.=.,R 2.9 Imaging and The Lens Formula 29
%?S[{ 4A& 2.10 Standard Optical Systems 30
u:wijkx 2.10.1 Afocal Systems. The Telescope 30
.I^Y[ _.G 2.10.2 The Simple Magnifier 32
} R hSt] 2.10.3 The Microscope 34
: 'jVA 3 Interference 37
F
hyY+{% 3.1 Introduction 37
)$*B 3.2 General Description 37
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$&vjC 3.3 Coherence 38
,bB}lU) 3.4 Interference between two Plane Waves 41
YnCuF0> 3.4.1 Laser Doppler Velocimetry (LDV) 45
"tA.`* 3.5 Interference between other Waves 46
fM*aZc*Y 3.6 Interferometry 49
TA#pA(k 3.6.1 Wavefront Division 50
r& :v( 3.6.2 Amplitude Division 51
;L% \[H>G 3.6.3 The Dual-Frequency Michelson Interferometer 54
lhBAT%U\ 3.6.4 Heterodyne (Homodyne) Detection 55
Jt?`(H 3.7 Spatial and Temporal Coherence 56
@?0))@kPc3 3.8 Optical Coherence Tomography 61
nwDGzC~y< 4 Diffraction 67
a% /x 4.1 Introduction 67
*WWDwY@!u 4.2 Diffraction from a Single Slit 67
G('UF1F 4.3 Diffraction from a Grating 70
Q7mikg=1- 4.3.1 The Grating Equation. Amplitude Transmittance 70
cf%2A1I2W 4.3.2 The Spatial Frequency Spectrum 73
`bd9N !K 4.4 Fourier Optics 75
%PK(Z* > 4.5 Optical Filtering 76
(^<skx> 4.5.1 Practical Filtering Set-Ups 78
_m%Ab3iT~ 4.6 Physical Optics Description
v\}{eP' of Image Formation 81
<jL L2-5r0 4.6.1 The Coherent Transfer Function 83
ZiaFByLy 4.6.2 The Incoherent Transfer Function 85
W&&C[@Jd3 4.6.3 The Depth of Focus 88
T~?&hZ> 4.7 The Phase-Modulated Sinusoidal Grating 89
H8Z |gq1r 5 Light Sources and Detectors 99
7--E$ !9O, 5.1 Introduction 99
gf/<sH2} 5.2 Radiometry. Photometry 99
C7&L9k~jf 5.2.1 Lambertian Surface 102
9 *r l7 5.2.2 Blackbody Radiator 103
bGlr>@;-r 5.2.3 Examples 105
.j"@7# tW 5.3 Incoherent Light Sources 108
A 0;ng2& 5.4 Coherent Light Sources 109
| "eC0u 5.4.1 Stimulated Emission 109
Sx X 5.4.2 Gas Lasers 112
@ xT VX'$ 5.4.3 Liquid Lasers 114
1h{7d LA 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
'\"5qB 5.4.5 Solid-State Lasers 117
_) UnHp_^ 5.4.6 Other Lasers 119
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