Optical Metrology Third Edition .^g p? '<M{)? Kjell J. G˚asvik
Ep}s}Stlr} Spectra Vision AS, Trondheim, Norway
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g=rbPbu s @C}P Preface to the Third Edition xi
`{Ul! 1Basics 1
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\0J 1.1 Introduction 1
7d vnupLh 1.2 Wave Motion. The Electromagnetic Spectrum 1
<QvOs@i* 1.3 The Plane Wave. Light Rays 3
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a 1.4 Phase Difference 4
j#6.Gq 1.5 Complex Notation. Complex Amplitude 5
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np; 1.6 Oblique Incidence of A Plane Wave 5
Xeajxcop# 1.7 The Spherical Wave 7
ww/Uzv 1.8 The Intensity 8
u4j5w 1.9 Geometrical Optics 8
P%zK;#8V 1.10 The Simple Convex (Positive) Lens 10
Y0>y8UV 1.11 A Plane-Wave Set-Up 11
D]}G.v1 2 Gaussian Optics 15
rGO8!X 3d 2.1 Introduction 15
]?*wbxU0 2.2 Refraction at a Spherical Surface 15
z:;CX@)* 2.2.1 Examples 19
v:U-6W_)| 2.3 The General Image-Forming System 19
HV.t6@\}; 2.4 The Image-Formation Process 21
MPV5P^@X 2.5 Reflection at a Spherical Surface 23
^s=8!=A( 2.6 Aspheric Lenses 25
]tD]Wx% 2.7 Stops and Apertures 26
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2.8 Lens Aberrations. Computer Lens Design 28
ys~x$ 2.9 Imaging and The Lens Formula 29
Dj +f]~ 2.10 Standard Optical Systems 30
TNth 2.10.1 Afocal Systems. The Telescope 30
&vJH$R 2.10.2 The Simple Magnifier 32
c:0L+OF}xY 2.10.3 The Microscope 34
PdCEUh\>y 3 Interference 37
TN.rrop`#g 3.1 Introduction 37
! z**y}<T 3.2 General Description 37
Z7#+pPt! 3.3 Coherence 38
/ouPg=+Nl 3.4 Interference between two Plane Waves 41
,'+kBZOv 3.4.1 Laser Doppler Velocimetry (LDV) 45
. ^u,. 3.5 Interference between other Waves 46
i$@:@&(~Y 3.6 Interferometry 49
G#CXs:1pd+ 3.6.1 Wavefront Division 50
NgwbQ7) 3.6.2 Amplitude Division 51
"{n&~H` 3.6.3 The Dual-Frequency Michelson Interferometer 54
RpK@?[4s 3.6.4 Heterodyne (Homodyne) Detection 55
Jvi#) 3.7 Spatial and Temporal Coherence 56
^"g~- 3.8 Optical Coherence Tomography 61
hc1N~$3!G 4 Diffraction 67
8QK&_n* 4.1 Introduction 67
;,TFr}p` 4.2 Diffraction from a Single Slit 67
"zc l|@ 4.3 Diffraction from a Grating 70
aYeR{Y] 4.3.1 The Grating Equation. Amplitude Transmittance 70
GmG5[?) 4.3.2 The Spatial Frequency Spectrum 73
g\U-VZ6;p 4.4 Fourier Optics 75
JVJMgim)0 4.5 Optical Filtering 76
>Q/Dk7 # 4.5.1 Practical Filtering Set-Ups 78
XkqCZHYkS 4.6 Physical Optics Description
;*N5Y}?j' of Image Formation 81
:Al!1BJQ 4.6.1 The Coherent Transfer Function 83
cR{#V1Z 4.6.2 The Incoherent Transfer Function 85
~dSr5LUD 4.6.3 The Depth of Focus 88
~@!bsLSMU 4.7 The Phase-Modulated Sinusoidal Grating 89
%)|s1B'd 5 Light Sources and Detectors 99
yX5\gO6G 5.1 Introduction 99
B[}6-2<>?C 5.2 Radiometry. Photometry 99
[m -bV$-d 5.2.1 Lambertian Surface 102
q| 7( 5.2.2 Blackbody Radiator 103
LscGTs, 5.2.3 Examples 105
S@Y39 5.3 Incoherent Light Sources 108
edD)TpmE, 5.4 Coherent Light Sources 109
7,MR*TO, 5.4.1 Stimulated Emission 109
pdMc}=K 5.4.2 Gas Lasers 112
:DNjhZ 5.4.3 Liquid Lasers 114
vIvIfE 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
k!^{eOM 5.4.5 Solid-State Lasers 117
=%7-ZH9 5.4.6 Other Lasers 119
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