Optical Metrology Third Edition }
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>M Kjell J. G˚asvik
YEoQIR Spectra Vision AS, Trondheim, Norway
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u8pJjn; n?*Fr sZ Preface to the Third Edition xi
TI -8I) 1Basics 1
SwV{t}I 1.1 Introduction 1
<6`_Xr7) 1.2 Wave Motion. The Electromagnetic Spectrum 1
_}.BZ[i 1.3 The Plane Wave. Light Rays 3
(tV/.x*G 1.4 Phase Difference 4
dEU +\NY 1.5 Complex Notation. Complex Amplitude 5
!|{T>yy 1.6 Oblique Incidence of A Plane Wave 5
+]-~UsM 1.7 The Spherical Wave 7
<A +VS 1.8 The Intensity 8
: T(3!}4 1.9 Geometrical Optics 8
1.YDIB|| 1.10 The Simple Convex (Positive) Lens 10
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d 1.11 A Plane-Wave Set-Up 11
'#REbY5ev 2 Gaussian Optics 15
m @) ~.E 2.1 Introduction 15
4QODuyl2H 2.2 Refraction at a Spherical Surface 15
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F% 3b47 2.3 The General Image-Forming System 19
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x 5vvY 2.5 Reflection at a Spherical Surface 23
A{mv[x-XN 2.6 Aspheric Lenses 25
ohqi4Y!j/~ 2.7 Stops and Apertures 26
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u d 2.8 Lens Aberrations. Computer Lens Design 28
\EF^Ag 2.9 Imaging and The Lens Formula 29
s86Ij>VLf 2.10 Standard Optical Systems 30
t<5 $85Y~ 2.10.1 Afocal Systems. The Telescope 30
J ylav: 2.10.2 The Simple Magnifier 32
Vo^
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F )' kN2 3 Interference 37
fB+4mEG@ 3.1 Introduction 37
CAdq oCz| 3.2 General Description 37
Lu,72i0O ^ 3.3 Coherence 38
};"-6e/9 3.4 Interference between two Plane Waves 41
c8!q_H~ 3.4.1 Laser Doppler Velocimetry (LDV) 45
U: xY~> 3.5 Interference between other Waves 46
2m j? &p? 3.6 Interferometry 49
{2 J o|z 3.6.1 Wavefront Division 50
k^ B<t' 3.6.2 Amplitude Division 51
x"q! =&>f 3.6.3 The Dual-Frequency Michelson Interferometer 54
&5:83#*Oj 3.6.4 Heterodyne (Homodyne) Detection 55
? S^ U-.` 3.7 Spatial and Temporal Coherence 56
Vx$ ?)& 3.8 Optical Coherence Tomography 61
"J|{'k` 4 Diffraction 67
^ Q]I)U 4.1 Introduction 67
EaaLN<i@0 4.2 Diffraction from a Single Slit 67
53efF bo 4.3 Diffraction from a Grating 70
o ?z A'5q 4.3.1 The Grating Equation. Amplitude Transmittance 70
yClX!OL 4.3.2 The Spatial Frequency Spectrum 73
&`+tWL6L 4.4 Fourier Optics 75
W]b>k lp; 4.5 Optical Filtering 76
PhTMXv<cE 4.5.1 Practical Filtering Set-Ups 78
J:g4ES-/ 4.6 Physical Optics Description
r'!L}^n of Image Formation 81
wq$+m ( 4.6.1 The Coherent Transfer Function 83
XS+2OutVo 4.6.2 The Incoherent Transfer Function 85
c'#w 8 V 4.6.3 The Depth of Focus 88
%0 cFs' 4.7 The Phase-Modulated Sinusoidal Grating 89
yOHVL~F 5 Light Sources and Detectors 99
`5 da 5.1 Introduction 99
e$'|EE.=q+ 5.2 Radiometry. Photometry 99
~jcdnm] 5.2.1 Lambertian Surface 102
ejs_ ? 5.2.2 Blackbody Radiator 103
(R^X3 5.2.3 Examples 105
L\;n[, . 5.3 Incoherent Light Sources 108
Egy#_ RT{ 5.4 Coherent Light Sources 109
})~M}d2LXB 5.4.1 Stimulated Emission 109
{v CB$@/o 5.4.2 Gas Lasers 112
(%p@G5GU 5.4.3 Liquid Lasers 114
tZ|0wPp 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
3vdh oS| 5.4.5 Solid-State Lasers 117
);*:Uz sC_ 5.4.6 Other Lasers 119
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