Optical Metrology Third Edition oLh2:c li +MnLt Kjell J. G˚asvik
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ox&PFI0Gn 6`JY:~V" Preface to the Third Edition xi
<j<V{Wc 1Basics 1
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wE 1.1 Introduction 1
~M!9E]) 1.2 Wave Motion. The Electromagnetic Spectrum 1
|RS(QU<QE 1.3 The Plane Wave. Light Rays 3
~B2,edkM 1.4 Phase Difference 4
|3:e$ 1.5 Complex Notation. Complex Amplitude 5
b rpsZU 1.6 Oblique Incidence of A Plane Wave 5
x&4gy%b 1.7 The Spherical Wave 7
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vhz[ H 1.9 Geometrical Optics 8
]aDU* tk 1.10 The Simple Convex (Positive) Lens 10
d J|/.J$d 1.11 A Plane-Wave Set-Up 11
>[A7oH 2 Gaussian Optics 15
Xk]:]pl4W 2.1 Introduction 15
{)5tov1 2.2 Refraction at a Spherical Surface 15
WW&agr 2.2.1 Examples 19
KccI Yn~ 2.3 The General Image-Forming System 19
7/># yR 2.4 The Image-Formation Process 21
:5DL&,,Q3 2.5 Reflection at a Spherical Surface 23
= 9K5f#;e 2.6 Aspheric Lenses 25
JsA.jqkB 2.7 Stops and Apertures 26
W-8U~*/ 2.8 Lens Aberrations. Computer Lens Design 28
y~'h/tjM@= 2.9 Imaging and The Lens Formula 29
[(kC/W)! 2.10 Standard Optical Systems 30
f$|AU-|< 2.10.1 Afocal Systems. The Telescope 30
>bUxb-8 2.10.2 The Simple Magnifier 32
xRp;y* 2.10.3 The Microscope 34
B_3:.1>"BM 3 Interference 37
'&+5L. 3.1 Introduction 37
'lIj89h<E 3.2 General Description 37
E/:mO~1< c 3.3 Coherence 38
Q8GI;`Rb 3.4 Interference between two Plane Waves 41
5B)z}g^h 3.4.1 Laser Doppler Velocimetry (LDV) 45
j-%@A`j; 3.5 Interference between other Waves 46
iU1yJ= 3.6 Interferometry 49
]K!NLvz 3.6.1 Wavefront Division 50
\ y}!yrQ 3.6.2 Amplitude Division 51
nb|KIW 3.6.3 The Dual-Frequency Michelson Interferometer 54
\96aHOk< 3.6.4 Heterodyne (Homodyne) Detection 55
~\]lMsk+ 3.7 Spatial and Temporal Coherence 56
Iss)7I 3.8 Optical Coherence Tomography 61
TRJ5m?x 4 Diffraction 67
0n)99Osq(u 4.1 Introduction 67
*2^+QKDG 4.2 Diffraction from a Single Slit 67
+aoenUm5 4.3 Diffraction from a Grating 70
_@L{]6P%V 4.3.1 The Grating Equation. Amplitude Transmittance 70
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4.3.2 The Spatial Frequency Spectrum 73
(`cXS5R 4.4 Fourier Optics 75
p*5QV 4.5 Optical Filtering 76
/<e<-C*d&< 4.5.1 Practical Filtering Set-Ups 78
s.IYPH|pn 4.6 Physical Optics Description
2qgm(jo *y of Image Formation 81
@lhjO>@#I 4.6.1 The Coherent Transfer Function 83
Bid+,, 4.6.2 The Incoherent Transfer Function 85
hYSzr-) 4.6.3 The Depth of Focus 88
#e*jP&1S 4.7 The Phase-Modulated Sinusoidal Grating 89
J-U5_>S 5 Light Sources and Detectors 99
!l|fzS8g 5.1 Introduction 99
ZFFKv 5.2 Radiometry. Photometry 99
*$ kpSph 5.2.1 Lambertian Surface 102
3k_bhK zI 5.2.2 Blackbody Radiator 103
Y=$PsDh! 5.2.3 Examples 105
/3KPK4!m 5.3 Incoherent Light Sources 108
;_iDiLC; 5.4 Coherent Light Sources 109
H-C$Jy)f" 5.4.1 Stimulated Emission 109
*/)O8`}2 5.4.2 Gas Lasers 112
S9kA69O 5.4.3 Liquid Lasers 114
w,!IvDCAw 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Qk[YF 5.4.5 Solid-State Lasers 117
LM2S%._cj; 5.4.6 Other Lasers 119
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