Optical Metrology Third Edition Xb1is\JB *):s**BJ$ Kjell J. G˚asvik
qex:: Qf Spectra Vision AS, Trondheim, Norway
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;tfGhHpQn hGo /Ve+@ Preface to the Third Edition xi
X92I==-w 1Basics 1
N`7+] T 1.1 Introduction 1
xm> y3WC 1.2 Wave Motion. The Electromagnetic Spectrum 1
q`HK4~i, 1.3 The Plane Wave. Light Rays 3
z=qxZuFkDs 1.4 Phase Difference 4
VaTA|=[; 1.5 Complex Notation. Complex Amplitude 5
xhncQhf\ 1.6 Oblique Incidence of A Plane Wave 5
'o1lJ?~ kH 1.7 The Spherical Wave 7
kDc/]Zb% 1.8 The Intensity 8
cEEn R 1 1.9 Geometrical Optics 8
X'usd$[ . 1.10 The Simple Convex (Positive) Lens 10
+l>X Z 1.11 A Plane-Wave Set-Up 11
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Ei6I- 2 Gaussian Optics 15
HVNX"`]" 2.1 Introduction 15
+(oExp(! 2.2 Refraction at a Spherical Surface 15
@EUvx 2.2.1 Examples 19
&[ $t% :` 2.3 The General Image-Forming System 19
|6~ Kin 2.4 The Image-Formation Process 21
.wkW<F7 2.5 Reflection at a Spherical Surface 23
^fti<Lw5 2.6 Aspheric Lenses 25
%`]fZr A]# 2.7 Stops and Apertures 26
h]k1vp)Q y 2.8 Lens Aberrations. Computer Lens Design 28
+e&Q<q!,q 2.9 Imaging and The Lens Formula 29
(o1o);AO 2.10 Standard Optical Systems 30
M(W-\ L 2.10.1 Afocal Systems. The Telescope 30
` 6o5[2V 2.10.2 The Simple Magnifier 32
?cgb3^R' 2.10.3 The Microscope 34
M[^EHa<i 3 Interference 37
|7b@w;q,D 3.1 Introduction 37
ePTN^#|W 3.2 General Description 37
h~k+!\ 3.3 Coherence 38
6jz~q~ I 3.4 Interference between two Plane Waves 41
8lF:70wia 3.4.1 Laser Doppler Velocimetry (LDV) 45
r1.OLn?C 3.5 Interference between other Waves 46
'PdUSv|lH 3.6 Interferometry 49
r& nE M6 3.6.1 Wavefront Division 50
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1|5TuljTd 3.6.3 The Dual-Frequency Michelson Interferometer 54
MDfC%2Q 3.6.4 Heterodyne (Homodyne) Detection 55
iLf* m~Q 3.7 Spatial and Temporal Coherence 56
[ejl #'*5 3.8 Optical Coherence Tomography 61
G_ 6!w// 4 Diffraction 67
( 2r808^2 4.1 Introduction 67
- _BjzA| 4.2 Diffraction from a Single Slit 67
w/Wd^+I In 4.3 Diffraction from a Grating 70
|JTDwmR 4.3.1 The Grating Equation. Amplitude Transmittance 70
qz|xow/ns@ 4.3.2 The Spatial Frequency Spectrum 73
-FQS5Zb.! 4.4 Fourier Optics 75
DcEGIaW 4.5 Optical Filtering 76
zc!q a"4yM 4.5.1 Practical Filtering Set-Ups 78
rqhRrG{L|& 4.6 Physical Optics Description
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y_2" of Image Formation 81
}K9Ji]tOK: 4.6.1 The Coherent Transfer Function 83
.< -~k@ P 4.6.2 The Incoherent Transfer Function 85
k]yv#Pa 4.6.3 The Depth of Focus 88
tD No; f 4.7 The Phase-Modulated Sinusoidal Grating 89
)!d_Td\- 5 Light Sources and Detectors 99
/UiB1-*b 5.1 Introduction 99
(h% xqXs 5.2 Radiometry. Photometry 99
910N 1E 5.2.1 Lambertian Surface 102
RzqU`<// 5.2.2 Blackbody Radiator 103
#\MkbZc d 5.2.3 Examples 105
wW0m}L 5.3 Incoherent Light Sources 108
dlc'=M 5.4 Coherent Light Sources 109
D ?r% Y 5.4.1 Stimulated Emission 109
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~{!,Z nO* 5.4.3 Liquid Lasers 114
n2&M?MGX 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Q He : 5.4.5 Solid-State Lasers 117
-A1:S'aN- 5.4.6 Other Lasers 119
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