Optical Metrology Third Edition /GN4I!LA {G%3*=?,j Kjell J. G˚asvik
i*68- n Spectra Vision AS, Trondheim, Norway
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ZRP y~wy> Xb0!( (A Preface to the Third Edition xi
dQK`sLChv 1Basics 1
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G 1.1 Introduction 1
hLo>R'@uN 1.2 Wave Motion. The Electromagnetic Spectrum 1
j/'
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KC ]tY9 FK 1.4 Phase Difference 4
P9s_2 KOF 1.5 Complex Notation. Complex Amplitude 5
B%mtp;) P 1.6 Oblique Incidence of A Plane Wave 5
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LC 1.7 The Spherical Wave 7
rei5 {PC 1.8 The Intensity 8
#<]Iz'\` 1.9 Geometrical Optics 8
m_$JWv\|\ 1.10 The Simple Convex (Positive) Lens 10
dE GX3 - 1.11 A Plane-Wave Set-Up 11
+N8aq<l 2 Gaussian Optics 15
xl9(ze 2.1 Introduction 15
IX.sy 2.2 Refraction at a Spherical Surface 15
)$h-ZYc 2.2.1 Examples 19
cd+^=esSO 2.3 The General Image-Forming System 19
Z)5klg$c 2.4 The Image-Formation Process 21
3a9u"8lG 2.5 Reflection at a Spherical Surface 23
%",ULtZ+ 2.6 Aspheric Lenses 25
Z'e\_C 2.7 Stops and Apertures 26
F+3!uWUK 2.8 Lens Aberrations. Computer Lens Design 28
*l {4lu 2.9 Imaging and The Lens Formula 29
(V)9s\ Le_ 2.10 Standard Optical Systems 30
pND48 g; 2.10.1 Afocal Systems. The Telescope 30
D$$3fN.iEL 2.10.2 The Simple Magnifier 32
O{n C^`X 2.10.3 The Microscope 34
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%V 3 Interference 37
B>@D,)/bT5 3.1 Introduction 37
BvQUn@ XE 3.2 General Description 37
F:_FjxU 3.3 Coherence 38
5Xj|:qz<( 3.4 Interference between two Plane Waves 41
Pj._/$R[/ 3.4.1 Laser Doppler Velocimetry (LDV) 45
CWBbS Gk 3.5 Interference between other Waves 46
$ hoYkA 3.6 Interferometry 49
80HEAv,O 3.6.1 Wavefront Division 50
H4 =IY 3.6.2 Amplitude Division 51
F@ EZ;[ 3.6.3 The Dual-Frequency Michelson Interferometer 54
r.?+gW!C 3.6.4 Heterodyne (Homodyne) Detection 55
O "8 P#Ed 3.7 Spatial and Temporal Coherence 56
;M-,HK4= 3.8 Optical Coherence Tomography 61
umryA{Ps 4 Diffraction 67
9\:w8M X' 4.1 Introduction 67
/3s@6Ex}E 4.2 Diffraction from a Single Slit 67
C[g&F 0 6 4.3 Diffraction from a Grating 70
Cc *|Zw 4.3.1 The Grating Equation. Amplitude Transmittance 70
Bu' :2"7 4.3.2 The Spatial Frequency Spectrum 73
HwM /}-t 4.4 Fourier Optics 75
R@&?i=gk 4.5 Optical Filtering 76
PYaOH_X. 4.5.1 Practical Filtering Set-Ups 78
.jCk#@+ 4.6 Physical Optics Description
h~ZNHSP: of Image Formation 81
gsi<S6DQ8 4.6.1 The Coherent Transfer Function 83
N4s$.` 4.6.2 The Incoherent Transfer Function 85
v >NTh 4.6.3 The Depth of Focus 88
IQ#So]9~Y 4.7 The Phase-Modulated Sinusoidal Grating 89
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5 Light Sources and Detectors 99
pIL`WE1' 5.1 Introduction 99
S`4e@Z$ 5.2 Radiometry. Photometry 99
u$\Tg3du2 5.2.1 Lambertian Surface 102
ypxC1E 5.2.2 Blackbody Radiator 103
h|)2 ' 07 5.2.3 Examples 105
+Z]y #= 5.3 Incoherent Light Sources 108
X=\x&Wt 5.4 Coherent Light Sources 109
uz8nRS s 5.4.1 Stimulated Emission 109
[&fWF~D-p< 5.4.2 Gas Lasers 112
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:3:)E 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
W%w82@' 5.4.5 Solid-State Lasers 117
N#mK7|\c?: 5.4.6 Other Lasers 119
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