Optical Metrology Third Edition !`[I>:Ex ^YJA\ d@ Kjell J. G˚asvik
'S7@+kJ Spectra Vision AS, Trondheim, Norway
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yM:~{;HLF yVHl T Preface to the Third Edition xi
5` '=Ko,N 1Basics 1
FJ~_0E#L 1.1 Introduction 1
/Jf`x>eiH 1.2 Wave Motion. The Electromagnetic Spectrum 1
|4. o$*0Y 1.3 The Plane Wave. Light Rays 3
q 'F_ j" 1.4 Phase Difference 4
ynZ[c8. 1.5 Complex Notation. Complex Amplitude 5
QYfAf3te 1.6 Oblique Incidence of A Plane Wave 5
n X\]i~ 1.7 The Spherical Wave 7
S~Iw?SK3 1.8 The Intensity 8
S" TMsi 1.9 Geometrical Optics 8
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ELJj 1.10 The Simple Convex (Positive) Lens 10
*C@[5#CA2z 1.11 A Plane-Wave Set-Up 11
DJYXC,r 2 Gaussian Optics 15
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R``V Q 2.2 Refraction at a Spherical Surface 15
h2"|t Tm,a 2.2.1 Examples 19
]9&q'7*L 2.3 The General Image-Forming System 19
}SMJD 2.4 The Image-Formation Process 21
#VdI{IbW 2.5 Reflection at a Spherical Surface 23
s i "` 2.6 Aspheric Lenses 25
+GYMJK`S+ 2.7 Stops and Apertures 26
\As oee F 2.8 Lens Aberrations. Computer Lens Design 28
)n}]]^Sc 2.9 Imaging and The Lens Formula 29
J'ZFIT_> 2.10 Standard Optical Systems 30
T dP{{&'9 2.10.1 Afocal Systems. The Telescope 30
qN1 -plY 2.10.2 The Simple Magnifier 32
N _~KZQ11^ 2.10.3 The Microscope 34
mE^ tzyh 3 Interference 37
J4[x,(iq( 3.1 Introduction 37
Md>f 3.2 General Description 37
VyoE5 o 3.3 Coherence 38
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3.4 Interference between two Plane Waves 41
85|95P. < 3.4.1 Laser Doppler Velocimetry (LDV) 45
K\K O5A 3.5 Interference between other Waves 46
AZy~Q9Kc 3.6 Interferometry 49
c7g.|R 3.6.1 Wavefront Division 50
Ukx/jNyYv 3.6.2 Amplitude Division 51
l0caP( 3.6.3 The Dual-Frequency Michelson Interferometer 54
1 x\V dT 3.6.4 Heterodyne (Homodyne) Detection 55
zh^jWu 3.7 Spatial and Temporal Coherence 56
VX!Y`y^a 3.8 Optical Coherence Tomography 61
F8S~wW=\w 4 Diffraction 67
*{.&R9#7U' 4.1 Introduction 67
nI*(a: 4.2 Diffraction from a Single Slit 67
PUE'Rr( Q 4.3 Diffraction from a Grating 70
(I7&8$Zl 4.3.1 The Grating Equation. Amplitude Transmittance 70
9xK4!~5V 4.3.2 The Spatial Frequency Spectrum 73
mI7rx`4H 4.4 Fourier Optics 75
Fp5NRM*-! 4.5 Optical Filtering 76
iM /*&O} 4.5.1 Practical Filtering Set-Ups 78
ayH%
qp 4.6 Physical Optics Description
mo|Pr LV of Image Formation 81
EtR@ sJ< 4.6.1 The Coherent Transfer Function 83
xxLgC;>[ 4.6.2 The Incoherent Transfer Function 85
CRc!|? 4.6.3 The Depth of Focus 88
jMf 7J 4.7 The Phase-Modulated Sinusoidal Grating 89
!bZh j3. 5 Light Sources and Detectors 99
r*i$+ Z 5.1 Introduction 99
"rjv5*z^& 5.2 Radiometry. Photometry 99
'YZI>V* 5.2.1 Lambertian Surface 102
~'^!udF- 5.2.2 Blackbody Radiator 103
l:zU_J6 5.2.3 Examples 105
1H&?UP4=( 5.3 Incoherent Light Sources 108
wR Xn9 5.4 Coherent Light Sources 109
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5.4.1 Stimulated Emission 109
%A)-m 69 5.4.2 Gas Lasers 112
h/ LR+XX! 5.4.3 Liquid Lasers 114
Gut J_2f^9 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Y7*(_P3/ 5.4.5 Solid-State Lasers 117
O)R 7t3t 5.4.6 Other Lasers 119
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