Optical Metrology Third Edition Z^S!w;eu inrL'z Kjell J. G˚asvik
i[J', Spectra Vision AS, Trondheim, Norway
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f;a6ux# 1]~} 0;, Preface to the Third Edition xi
9hU@VPB~ 1Basics 1
\ S R 1.1 Introduction 1
d GjvSK<1@ 1.2 Wave Motion. The Electromagnetic Spectrum 1
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Tgv?.Q 1.3 The Plane Wave. Light Rays 3
V" 73^ 1.4 Phase Difference 4
_Qas+8NW 1.5 Complex Notation. Complex Amplitude 5
MvFXVCT# 1.6 Oblique Incidence of A Plane Wave 5
D%v yO_k 1.7 The Spherical Wave 7
TmiQq'm[b 1.8 The Intensity 8
qZG >FC37 1.9 Geometrical Optics 8
U>XGJQ<NS 1.10 The Simple Convex (Positive) Lens 10
y5}|Y{5 1.11 A Plane-Wave Set-Up 11
V y $\.2= 2 Gaussian Optics 15
Ja1*a,],L 2.1 Introduction 15
f [D#QC 2.2 Refraction at a Spherical Surface 15
xm5 D$m3# 2.2.1 Examples 19
jL<.?HE 2.3 The General Image-Forming System 19
1;V5b+b 2.4 The Image-Formation Process 21
P@#6.Bb#V 2.5 Reflection at a Spherical Surface 23
G <q@K- 2.6 Aspheric Lenses 25
sM K/l @7 2.7 Stops and Apertures 26
pV8,b 2.8 Lens Aberrations. Computer Lens Design 28
} 2S \- 2.9 Imaging and The Lens Formula 29
}{"\"Bn_ 2.10 Standard Optical Systems 30
hAdEq$ 2.10.1 Afocal Systems. The Telescope 30
D~} 4N1 2.10.2 The Simple Magnifier 32
*(rE< 2.10.3 The Microscope 34
Pcc%VQ N 3 Interference 37
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3l1$t# w 3.1 Introduction 37
_1~Sj* 3.2 General Description 37
( Lp-3Xx 3.3 Coherence 38
.IgQn|N 3.4 Interference between two Plane Waves 41
aum,bm/0J 3.4.1 Laser Doppler Velocimetry (LDV) 45
{T9g\F* 3.5 Interference between other Waves 46
TH-^tw 3.6 Interferometry 49
\Ip<b bB0 3.6.1 Wavefront Division 50
\?Z d UY 3.6.2 Amplitude Division 51
6dh PqL 3.6.3 The Dual-Frequency Michelson Interferometer 54
7~&Y"& 3.6.4 Heterodyne (Homodyne) Detection 55
g= .5*'Xlp 3.7 Spatial and Temporal Coherence 56
Dcf`+?3 3.8 Optical Coherence Tomography 61
v3p..A~XZ. 4 Diffraction 67
ntT | G0E 4.1 Introduction 67
tXx9N_/ 4.2 Diffraction from a Single Slit 67
\ gN) GR 4.3 Diffraction from a Grating 70
c8u0\X, 4.3.1 The Grating Equation. Amplitude Transmittance 70
1Sy#* 4.3.2 The Spatial Frequency Spectrum 73
/D q]=P 4.4 Fourier Optics 75
y.Py>GJJ1S 4.5 Optical Filtering 76
}y1M0^ M-$ 4.5.1 Practical Filtering Set-Ups 78
R[(,wY_1 4.6 Physical Optics Description
_F,OS<> of Image Formation 81
O]>O r3oO 4.6.1 The Coherent Transfer Function 83
qhtc?A/0} 4.6.2 The Incoherent Transfer Function 85
:X#(T- !t 4.6.3 The Depth of Focus 88
3 R m$ 4.7 The Phase-Modulated Sinusoidal Grating 89
M3'' xrpC 5 Light Sources and Detectors 99
^V:YNUqp# 5.1 Introduction 99
+38t82%YWo 5.2 Radiometry. Photometry 99
{MS&t09Wh 5.2.1 Lambertian Surface 102
5^xt/vYa) 5.2.2 Blackbody Radiator 103
+%yh@X6 5.2.3 Examples 105
d 09GD[5 5.3 Incoherent Light Sources 108
!"kvXxp^ 5.4 Coherent Light Sources 109
g^idS:GtX5 5.4.1 Stimulated Emission 109
\S9z.!7v$ 5.4.2 Gas Lasers 112
H Ow hl 5.4.3 Liquid Lasers 114
U{x'@/Ld 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
o TL "]3`' 5.4.5 Solid-State Lasers 117
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