Optical Metrology Third Edition COHJJONR pRU6jV 6e) Kjell J. G˚asvik
4|2$b:t Spectra Vision AS, Trondheim, Norway
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$AXz/fGV {?!hUi+ Preface to the Third Edition xi
19N:9;Ixz 1Basics 1
b]JN23IS2 1.1 Introduction 1
P);Xke 1.2 Wave Motion. The Electromagnetic Spectrum 1
%ly;2HIk 1.3 The Plane Wave. Light Rays 3
]Ea7b 1.4 Phase Difference 4
x.^vWka( 1.5 Complex Notation. Complex Amplitude 5
6VE >$`m 1.6 Oblique Incidence of A Plane Wave 5
,gOQIS56 1.7 The Spherical Wave 7
}oN(nPxv9 1.8 The Intensity 8
J.nVEqLZ 1.9 Geometrical Optics 8
/GXO2zO 1.10 The Simple Convex (Positive) Lens 10
BphF+'CM 1.11 A Plane-Wave Set-Up 11
J<BdIKCma 2 Gaussian Optics 15
+.N;h-' 2.1 Introduction 15
W@ Z=1y 2.2 Refraction at a Spherical Surface 15
}cPV_^{ 2.2.1 Examples 19
>bZ# 2.3 The General Image-Forming System 19
#KK(Z\; 2.4 The Image-Formation Process 21
yBe/UFp+ 2.5 Reflection at a Spherical Surface 23
=#V11j 2.6 Aspheric Lenses 25
O#EBR<CuK 2.7 Stops and Apertures 26
\6'A^cE/PX 2.8 Lens Aberrations. Computer Lens Design 28
xw-q)u 2.9 Imaging and The Lens Formula 29
RdDcMZ 2.10 Standard Optical Systems 30
ZbrE m 2.10.1 Afocal Systems. The Telescope 30
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]@xXVf/ 2.10.2 The Simple Magnifier 32
|M?HdxPa 2.10.3 The Microscope 34
#_7c>gn 3 Interference 37
IY19G U9 3.1 Introduction 37
os.x|R]_ 3.2 General Description 37
9Ac t<(V 3.3 Coherence 38
K$]QzPXS 3.4 Interference between two Plane Waves 41
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( 3.4.1 Laser Doppler Velocimetry (LDV) 45
{Psj#.qP1 3.5 Interference between other Waves 46
Ck:J 3.6 Interferometry 49
\k,bz0 3.6.1 Wavefront Division 50
&7W6IM 3.6.2 Amplitude Division 51
Y{yr-E #~M 3.6.3 The Dual-Frequency Michelson Interferometer 54
CS{9|FNz 3.6.4 Heterodyne (Homodyne) Detection 55
TkBBHg; 3.7 Spatial and Temporal Coherence 56
w7D:0SGD 3.8 Optical Coherence Tomography 61
b910Z?B^L 4 Diffraction 67
c[y8"M5 4.1 Introduction 67
VM!x)i9z 4.2 Diffraction from a Single Slit 67
=z/F=1^< 4.3 Diffraction from a Grating 70
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(jOe 4.3.1 The Grating Equation. Amplitude Transmittance 70
8`t%QhE2 4.3.2 The Spatial Frequency Spectrum 73
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4.4 Fourier Optics 75
ry\']\k 4.5 Optical Filtering 76
"qsNySI 4.5.1 Practical Filtering Set-Ups 78
(J4utw Z 4.6 Physical Optics Description
]]Z,Qu#<- of Image Formation 81
Z:v1?v 4.6.1 The Coherent Transfer Function 83
:=Q|gRTL* 4.6.2 The Incoherent Transfer Function 85
16>uD;G 4.6.3 The Depth of Focus 88
X]fw9tZ 4.7 The Phase-Modulated Sinusoidal Grating 89
@ 7?_Yw 5 Light Sources and Detectors 99
RI(uG-Y 5.1 Introduction 99
SRTpE, 5.2 Radiometry. Photometry 99
q KM]wu0Et 5.2.1 Lambertian Surface 102
.+Ej%|l% 5.2.2 Blackbody Radiator 103
Tpukz_F 5.2.3 Examples 105
8joQPHkI\ 5.3 Incoherent Light Sources 108
gJ&!w8v. 5.4 Coherent Light Sources 109
nsT|,O 5.4.1 Stimulated Emission 109
;Kf|a}m - 5.4.2 Gas Lasers 112
vdm?d/0(^ 5.4.3 Liquid Lasers 114
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@hGS 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
_PM<25Y,@ 5.4.5 Solid-State Lasers 117
kpH;D=; 5.4.6 Other Lasers 119
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