Optical Metrology Third Edition ?GD{}f33 Y#{KGVT< Kjell J. G˚asvik
JeUFCWm Spectra Vision AS, Trondheim, Norway
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K HC4ad0Gs+{ Preface to the Third Edition xi
cGsxfwD 1Basics 1
xHykU;p@ 1.1 Introduction 1
< 5[wP)K@ 1.2 Wave Motion. The Electromagnetic Spectrum 1
k'%c| kx8U 1.3 The Plane Wave. Light Rays 3
xJ>hN@5}i 1.4 Phase Difference 4
G ~a/g6M4 1.5 Complex Notation. Complex Amplitude 5
<pYGcVB9V 1.6 Oblique Incidence of A Plane Wave 5
AWQwpaj- 1.7 The Spherical Wave 7
i3;Z:,A4NN 1.8 The Intensity 8
t wtGkkC 1.9 Geometrical Optics 8
wXXv0OzK 1.10 The Simple Convex (Positive) Lens 10
( rZq0* 1.11 A Plane-Wave Set-Up 11
Cl<` uW3 2 Gaussian Optics 15
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}%$9nq3 2.2.1 Examples 19
s.C-II?e 2.3 The General Image-Forming System 19
!pw%l4]/t 2.4 The Image-Formation Process 21
$hndb+6q 2.5 Reflection at a Spherical Surface 23
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[aUpX= 2.6 Aspheric Lenses 25
3$l'>v+5{ 2.7 Stops and Apertures 26
)5d&K8@ 2.8 Lens Aberrations. Computer Lens Design 28
0>Ki([3 2.9 Imaging and The Lens Formula 29
3Eiy/ 2.10 Standard Optical Systems 30
m++VW0Y> 2.10.1 Afocal Systems. The Telescope 30
mN3%;$ND7 2.10.2 The Simple Magnifier 32
W|D'S }J 2.10.3 The Microscope 34
lJKhP 3 Interference 37
X"iy .@7 3.1 Introduction 37
xE;fM\7pu 3.2 General Description 37
7 9:x>i= 3.3 Coherence 38
1;vn*w`p 3.4 Interference between two Plane Waves 41
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r^ #.yUz 3.5 Interference between other Waves 46
YIgzFt[L 3.6 Interferometry 49
VC>KW{&J0 3.6.1 Wavefront Division 50
N[aK#o, 3.6.2 Amplitude Division 51
(.%:Q0i1 3.6.3 The Dual-Frequency Michelson Interferometer 54
@U5 +1Hjc 3.6.4 Heterodyne (Homodyne) Detection 55
7i 334iQZ 3.7 Spatial and Temporal Coherence 56
<T 3.8 Optical Coherence Tomography 61
)u\"xxcV 4 Diffraction 67
S r2c'T" 4.1 Introduction 67
_~Lhc'^p* 4.2 Diffraction from a Single Slit 67
Pm+H!x, 4.3 Diffraction from a Grating 70
I9SO}a2p 4.3.1 The Grating Equation. Amplitude Transmittance 70
u4z]6?,"e 4.3.2 The Spatial Frequency Spectrum 73
lP9a * >=a 4.4 Fourier Optics 75
S 5m1~fz 4.5 Optical Filtering 76
g"# R>&P 4.5.1 Practical Filtering Set-Ups 78
1v`<Vb%"}T 4.6 Physical Optics Description
1vl~ [ of Image Formation 81
qUpMq: Uw 4.6.1 The Coherent Transfer Function 83
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M9bb, `X>Q 4.6.3 The Depth of Focus 88
-BQM i0 4.7 The Phase-Modulated Sinusoidal Grating 89
I \ vu?$w 5 Light Sources and Detectors 99
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0lmoI4bW}s 5.2 Radiometry. Photometry 99
l4;/[Q>Z 5.2.1 Lambertian Surface 102
Q9%N>h9 5.2.2 Blackbody Radiator 103
ru ' Xet 5.2.3 Examples 105
2R2Z6} 5.3 Incoherent Light Sources 108
*R xb qB- 5.4 Coherent Light Sources 109
: ]CZS 5.4.1 Stimulated Emission 109
=B<g_9d4 5.4.2 Gas Lasers 112
LsV!Sd 5.4.3 Liquid Lasers 114
QdC >fy 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
zq{L:.#ha 5.4.5 Solid-State Lasers 117
N^mY/`2 5.4.6 Other Lasers 119
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