Optical Metrology Third Edition !EKt$8W %0y-f Kjell J. G˚asvik
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K Spectra Vision AS, Trondheim, Norway
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l4$ sku- G HQ~{ Preface to the Third Edition xi
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bb 1Basics 1
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,cO^ 1.1 Introduction 1
K?,?.!ev 1.2 Wave Motion. The Electromagnetic Spectrum 1
bK }ZR*) 1.3 The Plane Wave. Light Rays 3
!D1#3?L 1.4 Phase Difference 4
8Ys)q x>7' 1.5 Complex Notation. Complex Amplitude 5
kVZs: 1.6 Oblique Incidence of A Plane Wave 5
fr`#s\JKw 1.7 The Spherical Wave 7
<LH6my 1.8 The Intensity 8
f{2UL ?y 1.9 Geometrical Optics 8
<v9IK$J 1.10 The Simple Convex (Positive) Lens 10
%`pi*/( 1.11 A Plane-Wave Set-Up 11
u= dj3q 2 Gaussian Optics 15
W2-l_{ 2.1 Introduction 15
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+ 2.2 Refraction at a Spherical Surface 15
q'7.lrKwa> 2.2.1 Examples 19
Q'jGNWep 2.3 The General Image-Forming System 19
6H2Bf*i 2.4 The Image-Formation Process 21
|8{ k,!P'K 2.5 Reflection at a Spherical Surface 23
mEYfsO 2.6 Aspheric Lenses 25
Ln6emXqw 2.7 Stops and Apertures 26
"4xo,JUf 2.8 Lens Aberrations. Computer Lens Design 28
XBX`L"0 2.9 Imaging and The Lens Formula 29
4/{pz$ 2.10 Standard Optical Systems 30
lE%KzX?& 2.10.1 Afocal Systems. The Telescope 30
Chl^LEN: 2.10.2 The Simple Magnifier 32
13 L&f\b 2.10.3 The Microscope 34
jQ7;-9/~N 3 Interference 37
%VB4/~ " 3.1 Introduction 37
+fM8 3.2 General Description 37
7Oe$Ou 3.3 Coherence 38
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lAG@nh^ 3.4.1 Laser Doppler Velocimetry (LDV) 45
*GYLj[ 3.5 Interference between other Waves 46
o3Yb2Nw 3.6 Interferometry 49
_~tF2`,Y_p 3.6.1 Wavefront Division 50
kz}Bc
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r2tE!gMC 3.6.3 The Dual-Frequency Michelson Interferometer 54
d^54mfgI 3.6.4 Heterodyne (Homodyne) Detection 55
-]}#Z:& 3.7 Spatial and Temporal Coherence 56
P//nYPyzg 3.8 Optical Coherence Tomography 61
%OHWGac"i 4 Diffraction 67
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4.1 Introduction 67
L;g2ZoqIr0 4.2 Diffraction from a Single Slit 67
2N |iOog 4.3 Diffraction from a Grating 70
4VvE(f 4.3.1 The Grating Equation. Amplitude Transmittance 70
z^*g2J, 4.3.2 The Spatial Frequency Spectrum 73
R-W.$-rF 4.4 Fourier Optics 75
A>Qu`%g* 4.5 Optical Filtering 76
9MJ:]F5+ 4.5.1 Practical Filtering Set-Ups 78
*1-0s*T 4.6 Physical Optics Description
^o>WCU = of Image Formation 81
mHW%^R= 4.6.1 The Coherent Transfer Function 83
F5H*z\/={ 4.6.2 The Incoherent Transfer Function 85
nfZe"|d 4.6.3 The Depth of Focus 88
O5:U2o- 4.7 The Phase-Modulated Sinusoidal Grating 89
SJc*Rl> 5 Light Sources and Detectors 99
!"/"Mqs3$ 5.1 Introduction 99
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f.Gt9[ 5.2 Radiometry. Photometry 99
"WmsBdO 5.2.1 Lambertian Surface 102
&)Zv>P8z` 5.2.2 Blackbody Radiator 103
ldU ><xc2 5.2.3 Examples 105
3HR)H-@6@7 5.3 Incoherent Light Sources 108
Fsq)co 5.4 Coherent Light Sources 109
opn6 C ) 5.4.1 Stimulated Emission 109
(6H7?nv 5.4.2 Gas Lasers 112
u f<%!=e 5.4.3 Liquid Lasers 114
v`'Iew } 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
kuLur)^ 5.4.5 Solid-State Lasers 117
Je"XIhBr 5.4.6 Other Lasers 119
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