Optical Metrology Third Edition 4NGA/
G *vflscgt Kjell J. G˚asvik
IzsphBI Spectra Vision AS, Trondheim, Norway
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m=?KZ?U` DKne'3pH Preface to the Third Edition xi
{kp"nl$< 1Basics 1
_]yn"p 1.1 Introduction 1
0KYEb%44 1.2 Wave Motion. The Electromagnetic Spectrum 1
K#EvFs`s; 1.3 The Plane Wave. Light Rays 3
}'""(,2 1.4 Phase Difference 4
]+(6,ct&. 1.5 Complex Notation. Complex Amplitude 5
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_pw!z 1.6 Oblique Incidence of A Plane Wave 5
87Oad@FOr 1.7 The Spherical Wave 7
V"*O=h 1.8 The Intensity 8
>*]Hq.&8 1.9 Geometrical Optics 8
@{YS}&Q/ 1.10 The Simple Convex (Positive) Lens 10
|kw)KEi}H 1.11 A Plane-Wave Set-Up 11
yOphx07 ( 2 Gaussian Optics 15
{6"Ph(I1 2.1 Introduction 15
;gBRCZ 2.2 Refraction at a Spherical Surface 15
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2.2.1 Examples 19
|o{:ZmzM 2.3 The General Image-Forming System 19
Zw*v 2.4 The Image-Formation Process 21
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i 2.5 Reflection at a Spherical Surface 23
M:-.o 2.6 Aspheric Lenses 25
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|a0h7e 2.7 Stops and Apertures 26
8dZ0rPd? 2.8 Lens Aberrations. Computer Lens Design 28
j/>$, 2.9 Imaging and The Lens Formula 29
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,8:(OB|a 2.10.1 Afocal Systems. The Telescope 30
%<E$,w> 2.10.2 The Simple Magnifier 32
{p;zuCF1 2.10.3 The Microscope 34
/<HRwG\w 3 Interference 37
vV[eWd.o6M 3.1 Introduction 37
g6Q !8 3.2 General Description 37
{k>Ca 3.3 Coherence 38
qR(\5} 3.4 Interference between two Plane Waves 41
h!&prYx 3.4.1 Laser Doppler Velocimetry (LDV) 45
$UgA0]qn 3.5 Interference between other Waves 46
o=21|z 3.6 Interferometry 49
2W/?q!t 3.6.1 Wavefront Division 50
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3.6.2 Amplitude Division 51
Db)?i?o}t 3.6.3 The Dual-Frequency Michelson Interferometer 54
& @s!<9$W 3.6.4 Heterodyne (Homodyne) Detection 55
6,d@p 3.7 Spatial and Temporal Coherence 56
]Bm/eRy" 3.8 Optical Coherence Tomography 61
Pdt6nzfr 4 Diffraction 67
u:[vaBh91 4.1 Introduction 67
jgbLN/_{ 4.2 Diffraction from a Single Slit 67
_{r=.W+w 4.3 Diffraction from a Grating 70
VG,u7A*Z# 4.3.1 The Grating Equation. Amplitude Transmittance 70
BlXB7q, 4.3.2 The Spatial Frequency Spectrum 73
ANJ$'3tg 4.4 Fourier Optics 75
x*?x=^I{ 4.5 Optical Filtering 76
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T'4z=Z]w 4.6 Physical Optics Description
Hj:r[/ of Image Formation 81
T(e!_VY|m 4.6.1 The Coherent Transfer Function 83
c}y [[EX 4.6.2 The Incoherent Transfer Function 85
FP;Ccl"s 4.6.3 The Depth of Focus 88
P^w#S 4.7 The Phase-Modulated Sinusoidal Grating 89
}&n<uUD H 5 Light Sources and Detectors 99
sYjpU 5.1 Introduction 99
:@ %4 5.2 Radiometry. Photometry 99
"NgxkbDEbG 5.2.1 Lambertian Surface 102
bKrhIU[ 5.2.2 Blackbody Radiator 103
Ytz)d/3T 5.2.3 Examples 105
qjf[zF 5.3 Incoherent Light Sources 108
TQx.KM>y 5.4 Coherent Light Sources 109
kMtwiB|7j 5.4.1 Stimulated Emission 109
<FWF<r3F 5.4.2 Gas Lasers 112
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[c+. 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
^1Zeb$Nw' 5.4.5 Solid-State Lasers 117
Q(<)KZIK 5.4.6 Other Lasers 119
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