Optical Metrology Third Edition _m],(J=,z sw|:Z(` Kjell J. G˚asvik
7X(]r1-+ \ Spectra Vision AS, Trondheim, Norway
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N Preface to the Third Edition xi
/ \rq$W_ 1Basics 1
/y)"j#-eW 1.1 Introduction 1
Y/H^*1 1.2 Wave Motion. The Electromagnetic Spectrum 1
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!x$ 1.3 The Plane Wave. Light Rays 3
8/"|VE DOr 1.4 Phase Difference 4
w y {>gvqK 1.5 Complex Notation. Complex Amplitude 5
7E`(8i 1.6 Oblique Incidence of A Plane Wave 5
`mjx4Lb 1.7 The Spherical Wave 7
to qzS!&.v 1.8 The Intensity 8
e({fY.)SGo 1.9 Geometrical Optics 8
c^O#O 1.10 The Simple Convex (Positive) Lens 10
GQ2Pm nV + 1.11 A Plane-Wave Set-Up 11
]<gCq/V # 2 Gaussian Optics 15
~AanU1U< 2.1 Introduction 15
HhmVV"g 2.2 Refraction at a Spherical Surface 15
_A YC|R| 2.2.1 Examples 19
c%@~%IGF 2.3 The General Image-Forming System 19
k%}89glm 2.4 The Image-Formation Process 21
liqR#< 2.5 Reflection at a Spherical Surface 23
[Cj}nld 2.6 Aspheric Lenses 25
rAWl0y_m 2.7 Stops and Apertures 26
zN+* R;Ds 2.8 Lens Aberrations. Computer Lens Design 28
3g [j%`k 2.9 Imaging and The Lens Formula 29
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;F ; 2.10 Standard Optical Systems 30
QZ3(u<f 2.10.1 Afocal Systems. The Telescope 30
.^lb LN^2 2.10.2 The Simple Magnifier 32
3 ;MjO*- 2.10.3 The Microscope 34
+}Q BzG W` 3 Interference 37
V tO;UN 3.1 Introduction 37
^qO=~U!{ 3.2 General Description 37
7TkxvSL X 3.3 Coherence 38
Z .':&7Y 3.4 Interference between two Plane Waves 41
vA"niO 3.4.1 Laser Doppler Velocimetry (LDV) 45
}l( m5 3.5 Interference between other Waves 46
6WN(22Io 3.6 Interferometry 49
^8NLe9~p3? 3.6.1 Wavefront Division 50
F|?'9s*;6G 3.6.2 Amplitude Division 51
=6L *!JP< 3.6.3 The Dual-Frequency Michelson Interferometer 54
$tCcjB K\ 3.6.4 Heterodyne (Homodyne) Detection 55
Ae j 3.7 Spatial and Temporal Coherence 56
3z )"U 3.8 Optical Coherence Tomography 61
-, Q $ 4 Diffraction 67
?96-" l 4.1 Introduction 67
qC1U&b#MVx 4.2 Diffraction from a Single Slit 67
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("E!Jyc! 4.3.1 The Grating Equation. Amplitude Transmittance 70
BKQIo)g.G 4.3.2 The Spatial Frequency Spectrum 73
*SkiFEoD 4.4 Fourier Optics 75
3` k[!! 4.5 Optical Filtering 76
r jL?eTU"s 4.5.1 Practical Filtering Set-Ups 78
f[Fgh@4cj 4.6 Physical Optics Description
vZE|Z[M+< of Image Formation 81
T+WZ E 4.6.1 The Coherent Transfer Function 83
E-sSRt 4.6.2 The Incoherent Transfer Function 85
~J1;tZS 4.6.3 The Depth of Focus 88
cRh\USS 4.7 The Phase-Modulated Sinusoidal Grating 89
8jggc#. 5 Light Sources and Detectors 99
/e|[SITe 5.1 Introduction 99
SgpZ ;\_ 5.2 Radiometry. Photometry 99
kxm:g)`=[ 5.2.1 Lambertian Surface 102
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C[xJ U 6z 5.2.3 Examples 105
3zB|!p C6s 5.3 Incoherent Light Sources 108
9K ;k% 5.4 Coherent Light Sources 109
uZ\wwYY#M 5.4.1 Stimulated Emission 109
X_u @D;$ 5.4.2 Gas Lasers 112
PNbcy!\U 5.4.3 Liquid Lasers 114
rToaG Qh 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
SbS$(Gt#Bv 5.4.5 Solid-State Lasers 117
mA(nyF 5.4.6 Other Lasers 119
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