Optical Metrology Third Edition 3?K+wg s |sI@m@ Kjell J. G˚asvik
i=L 86Ks Spectra Vision AS, Trondheim, Norway
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h/oun2C j,Mbl"P Preface to the Third Edition xi
k-H6c 1Basics 1
*^%+PQ 1.1 Introduction 1
(/2rj[F& 1.2 Wave Motion. The Electromagnetic Spectrum 1
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Xr 1.3 The Plane Wave. Light Rays 3
B`.aQ 1.4 Phase Difference 4
DXG`% <ZMn 1.5 Complex Notation. Complex Amplitude 5
X{Fr 1.6 Oblique Incidence of A Plane Wave 5
~n8UN< 1.7 The Spherical Wave 7
c(uDkX 1.8 The Intensity 8
je@&|9h 1.9 Geometrical Optics 8
v-N4&9)%9 1.10 The Simple Convex (Positive) Lens 10
/lbj!\~ 1.11 A Plane-Wave Set-Up 11
e`co:HO`# 2 Gaussian Optics 15
8o[gzW:Q)U 2.1 Introduction 15
V@]SKbK}wN 2.2 Refraction at a Spherical Surface 15
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9i U/[d 2.3 The General Image-Forming System 19
Fm=jgt3wv8 2.4 The Image-Formation Process 21
!zt>& t 2.5 Reflection at a Spherical Surface 23
;e*okYM 2.6 Aspheric Lenses 25
i9Beap/t$ 2.7 Stops and Apertures 26
e,{k!BXU#' 2.8 Lens Aberrations. Computer Lens Design 28
T9}~]zW7P 2.9 Imaging and The Lens Formula 29
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2<9K}Of 2.10.1 Afocal Systems. The Telescope 30
^mjU3q{; 2.10.2 The Simple Magnifier 32
xe^M2$clb\ 2.10.3 The Microscope 34
Lc?"4 3 Interference 37
GZWqPM4S\ 3.1 Introduction 37
`*[\b9> 3.2 General Description 37
_h4]gZ 3.3 Coherence 38
[<5/s$,i 3.4 Interference between two Plane Waves 41
w&f>VB~,1 3.4.1 Laser Doppler Velocimetry (LDV) 45
ZB|s/ 3.5 Interference between other Waves 46
A9N8Hav 3.6 Interferometry 49
V,rR*a&p 3.6.1 Wavefront Division 50
C[<{>fl) 3.6.2 Amplitude Division 51
fPHV]8Ft| 3.6.3 The Dual-Frequency Michelson Interferometer 54
n Bd]rak' 3.6.4 Heterodyne (Homodyne) Detection 55
Y-Q)sv 3.7 Spatial and Temporal Coherence 56
mhv6.W@ 3.8 Optical Coherence Tomography 61
R<gAxO%8 4 Diffraction 67
.wp[uLE 4.1 Introduction 67
T59FRX 4.2 Diffraction from a Single Slit 67
ppRA%mhZ 4.3 Diffraction from a Grating 70
~Er0$+q=Y; 4.3.1 The Grating Equation. Amplitude Transmittance 70
cWyf04-? 4.3.2 The Spatial Frequency Spectrum 73
lwfM>%%N 4.4 Fourier Optics 75
:%33m'EV} 4.5 Optical Filtering 76
b:'8_jL 4.5.1 Practical Filtering Set-Ups 78
iDX<`) 4.6 Physical Optics Description
0LXu!iix of Image Formation 81
yUf`L=C: 4.6.1 The Coherent Transfer Function 83
x0>N{ADXQ 4.6.2 The Incoherent Transfer Function 85
n$NM 4.6.3 The Depth of Focus 88
<mki@{ ;| 4.7 The Phase-Modulated Sinusoidal Grating 89
V~#5^PF{ 5 Light Sources and Detectors 99
B_iaty 5.1 Introduction 99
7[='m{{=C 5.2 Radiometry. Photometry 99
WF*j^ %5 5.2.1 Lambertian Surface 102
;F*^c
) 5.2.2 Blackbody Radiator 103
lK/4"& 5.2.3 Examples 105
TghT{h@ 5.3 Incoherent Light Sources 108
wLiPkW 5.4 Coherent Light Sources 109
6W 5.4.1 Stimulated Emission 109
AV|:v3 5.4.2 Gas Lasers 112
c$)>$&([ 5.4.3 Liquid Lasers 114
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CXg.i 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
cAGM|% 5.4.5 Solid-State Lasers 117
olr#3te 5.4.6 Other Lasers 119
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