Optical Metrology Third Edition { }:#G /j #n Kjell J. G˚asvik
xs{3pkTYD Spectra Vision AS, Trondheim, Norway
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xsIY7Ss U bg!/%[ {M Preface to the Third Edition xi
ahJ`T*)HY 1Basics 1
L ^r#o-H< 1.1 Introduction 1
aZH:#lUlj 1.2 Wave Motion. The Electromagnetic Spectrum 1
(of#(I[m7 1.3 The Plane Wave. Light Rays 3
]Z>}6! 1.4 Phase Difference 4
TJ2=m 9Z 1.5 Complex Notation. Complex Amplitude 5
P@,XEQRd` 1.6 Oblique Incidence of A Plane Wave 5
|tKsgj 1.7 The Spherical Wave 7
[ 8Y:65 1.8 The Intensity 8
MU($|hwiL 1.9 Geometrical Optics 8
=rMUov h 1.10 The Simple Convex (Positive) Lens 10
R}-( cc%5 1.11 A Plane-Wave Set-Up 11
@bi}W` 2 Gaussian Optics 15
T]^62(So 2.1 Introduction 15
XPavReGf 2.2 Refraction at a Spherical Surface 15
gt\E`HB8E 2.2.1 Examples 19
GF"hx `zyJ 2.3 The General Image-Forming System 19
j %Y#(Q> 2.4 The Image-Formation Process 21
Yz'K]M_Dq 2.5 Reflection at a Spherical Surface 23
Wvq27YK' 2.6 Aspheric Lenses 25
Giid~e33 2.7 Stops and Apertures 26
I~[F|d> 2.8 Lens Aberrations. Computer Lens Design 28
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!-g{[19\ 2.10 Standard Optical Systems 30
hM_lsc 2.10.1 Afocal Systems. The Telescope 30
. zr-:L5{ 2.10.2 The Simple Magnifier 32
R1 s`z|? 2.10.3 The Microscope 34
V~ UN 3 Interference 37
~b(i&DVK 3.1 Introduction 37
ru'F 6?d 3.2 General Description 37
` b?R#:G 3.3 Coherence 38
EHSlK5bD, 3.4 Interference between two Plane Waves 41
DMs,y{v 3.4.1 Laser Doppler Velocimetry (LDV) 45
ajve~8/& 3.5 Interference between other Waves 46
q'+)t7! 3.6 Interferometry 49
#9=Vg 3.6.1 Wavefront Division 50
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#./fY;:cj 3.6.3 The Dual-Frequency Michelson Interferometer 54
CYt?,qk-r 3.6.4 Heterodyne (Homodyne) Detection 55
>R|/M`<ph 3.7 Spatial and Temporal Coherence 56
L Y+@o<> 3.8 Optical Coherence Tomography 61
*}Xf!"I#]N 4 Diffraction 67
J.3u^~z y 4.1 Introduction 67
ZVW'>M7. 4.2 Diffraction from a Single Slit 67
MO[2~`,Q! 4.3 Diffraction from a Grating 70
,1hxw< sNR 4.3.1 The Grating Equation. Amplitude Transmittance 70
]GUvV&6@( 4.3.2 The Spatial Frequency Spectrum 73
at @G/? 4.4 Fourier Optics 75
6S}, (= 4.5 Optical Filtering 76
1}"++Z73P 4.5.1 Practical Filtering Set-Ups 78
[]D&bYpv 4.6 Physical Optics Description
XYQ /^SI!: of Image Formation 81
i)\ L:qF5 4.6.1 The Coherent Transfer Function 83
'_<{ p3M 4.6.2 The Incoherent Transfer Function 85
/9 3M*b 4.6.3 The Depth of Focus 88
QZ!Y2Bz(4 4.7 The Phase-Modulated Sinusoidal Grating 89
1eA7>$w}[ 5 Light Sources and Detectors 99
6d:zb;Iz 5.1 Introduction 99
>3ZFzh&OYQ 5.2 Radiometry. Photometry 99
7 G)ZN{' 5.2.1 Lambertian Surface 102
p}&#jE 5.2.2 Blackbody Radiator 103
eFipIn)b 5.2.3 Examples 105
y@1+I ~@ 5.3 Incoherent Light Sources 108
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5.4 Coherent Light Sources 109
i|c'Lbre` 5.4.1 Stimulated Emission 109
PYQ;``~x 5.4.2 Gas Lasers 112
[m+2(I1 5.4.3 Liquid Lasers 114
\1d ( 9j R 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
"_P ;2N6 5.4.5 Solid-State Lasers 117
Cmu@4j& 5.4.6 Other Lasers 119
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