Optical Metrology Third Edition f3V&i)w( o]}b#U8S Kjell J. G˚asvik
X!CLOHVA a Spectra Vision AS, Trondheim, Norway
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Cr4shdN34 =1^Ru*G Preface to the Third Edition xi
c$?qN&X_K 1Basics 1
27E6S)zv 1.1 Introduction 1
7l7eUy/z 1.2 Wave Motion. The Electromagnetic Spectrum 1
_w^p~To^ 1.3 The Plane Wave. Light Rays 3
0[T!}F^%e 1.4 Phase Difference 4
ZHICpL 1.5 Complex Notation. Complex Amplitude 5
W&z .O 1.6 Oblique Incidence of A Plane Wave 5
Gc4N)oq)}b 1.7 The Spherical Wave 7
h^~eTi;c]Q 1.8 The Intensity 8
A T+|}B! 1.9 Geometrical Optics 8
H4KwbTT"+ 1.10 The Simple Convex (Positive) Lens 10
_xAdvr' W 1.11 A Plane-Wave Set-Up 11
8:$kFy\A' 2 Gaussian Optics 15
23pHB |X 2.1 Introduction 15
vp4!p~C{ 2.2 Refraction at a Spherical Surface 15
A]BG* 2.2.1 Examples 19
5xLuu KG 2.3 The General Image-Forming System 19
7SXi#{ 2.4 The Image-Formation Process 21
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'D{{ 2.5 Reflection at a Spherical Surface 23
i{ T0[\4 2.6 Aspheric Lenses 25
d~ S.PRg= 2.7 Stops and Apertures 26
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>B skw2 2.9 Imaging and The Lens Formula 29
@a>+r1 2.10 Standard Optical Systems 30
# u^F B 2.10.1 Afocal Systems. The Telescope 30
6N~~:Gt 2.10.2 The Simple Magnifier 32
a%;$l_wVT: 2.10.3 The Microscope 34
5$GE 3IER8 3 Interference 37
-Qiay/tlu 3.1 Introduction 37
bW3e*O$V 3.2 General Description 37
8\. # 3.3 Coherence 38
2 p@Rr7 3.4 Interference between two Plane Waves 41
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3.4.1 Laser Doppler Velocimetry (LDV) 45
$62ospR^Y 3.5 Interference between other Waves 46
26 o68U8&y 3.6 Interferometry 49
(
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H `),PY2 3.6.2 Amplitude Division 51
1-r1hZ- 3.6.3 The Dual-Frequency Michelson Interferometer 54
b,KQG|k 3.6.4 Heterodyne (Homodyne) Detection 55
Tp)-L0kD_k 3.7 Spatial and Temporal Coherence 56
hP`3Ao 3.8 Optical Coherence Tomography 61
b&H A_G4 4 Diffraction 67
1xL2f&bG 4.1 Introduction 67
8$OE<c?#5n 4.2 Diffraction from a Single Slit 67
[% |i 4.3 Diffraction from a Grating 70
i?qS8h{ 4.3.1 The Grating Equation. Amplitude Transmittance 70
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`Kpn@Xg 4.4 Fourier Optics 75
ud'r ?QDM 4.5 Optical Filtering 76
p!|Wp 4.5.1 Practical Filtering Set-Ups 78
#XQEfa 4.6 Physical Optics Description
BGLJ>zkq of Image Formation 81
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f`^ 4.6.1 The Coherent Transfer Function 83
-zN*2T 4.6.2 The Incoherent Transfer Function 85
I Zi1N 4.6.3 The Depth of Focus 88
c/x ^I{b* 4.7 The Phase-Modulated Sinusoidal Grating 89
oq^#mJL 5 Light Sources and Detectors 99
Rzj5B\+Rk( 5.1 Introduction 99
p8%x@%k 5.2 Radiometry. Photometry 99
E2LpQNvN%g 5.2.1 Lambertian Surface 102
dL |D 5.2.2 Blackbody Radiator 103
`L]cJ0tAs 5.2.3 Examples 105
Pqo"~&Y|~ 5.3 Incoherent Light Sources 108
-+Kx^ V#'R 5.4 Coherent Light Sources 109
\[B5j0vV, 5.4.1 Stimulated Emission 109
#If}P$! 5.4.2 Gas Lasers 112
}/S bmW8(1 5.4.3 Liquid Lasers 114
xs.>+(@|; 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
\P^WUWY 5.4.5 Solid-State Lasers 117
Xc R2]\ 5.4.6 Other Lasers 119
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