Optical Metrology Third Edition @ROMHMd} 2C^ /;z Kjell J. G˚asvik
M7{w7}B0@ Spectra Vision AS, Trondheim, Norway
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mDz{8N9<FG 'F3Xb Preface to the Third Edition xi
p@] \ N 1Basics 1
z?`&HU Nf 1.1 Introduction 1
z>< =F,W 1.2 Wave Motion. The Electromagnetic Spectrum 1
K.c6n,' 1.3 The Plane Wave. Light Rays 3
uc9t0]o=h 1.4 Phase Difference 4
]kA0C~4 1.5 Complex Notation. Complex Amplitude 5
YG , 1.6 Oblique Incidence of A Plane Wave 5
@s RRcP~ 1.7 The Spherical Wave 7
K5gh7 1.8 The Intensity 8
@ S aU2 1.9 Geometrical Optics 8
]2\|<. 1.10 The Simple Convex (Positive) Lens 10
j#d= V@=a 1.11 A Plane-Wave Set-Up 11
YL \d2 2 Gaussian Optics 15
U<J4\|1?7' 2.1 Introduction 15
\xG> >A% 2.2 Refraction at a Spherical Surface 15
t98t &YUpm 2.2.1 Examples 19
ei)ljvvmHP 2.3 The General Image-Forming System 19
v'uWmL7C 2.4 The Image-Formation Process 21
B}_*0D 2.5 Reflection at a Spherical Surface 23
Xh"JyDTj3 2.6 Aspheric Lenses 25
OW1i{ 2.7 Stops and Apertures 26
<EFA^,3t% 2.8 Lens Aberrations. Computer Lens Design 28
UN#XP$utY 2.9 Imaging and The Lens Formula 29
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3;W 2.10 Standard Optical Systems 30
8P5yaS_ 2.10.1 Afocal Systems. The Telescope 30
c ?B@XIl 2.10.2 The Simple Magnifier 32
"&*O7cs$pA 2.10.3 The Microscope 34
% LeG.~? 3 Interference 37
b ,"gBg 3.1 Introduction 37
zu}oeAQc$ 3.2 General Description 37
! iuDmL 3.3 Coherence 38
h`n,:Y^++P 3.4 Interference between two Plane Waves 41
7/QQ&7+NkS 3.4.1 Laser Doppler Velocimetry (LDV) 45
!_CBf #0 3.5 Interference between other Waves 46
v3!oY t:l 3.6 Interferometry 49
|}N -5U 3.6.1 Wavefront Division 50
DXu9 15 3.6.2 Amplitude Division 51
QcJ?1GwA" 3.6.3 The Dual-Frequency Michelson Interferometer 54
%suSZw` 3.6.4 Heterodyne (Homodyne) Detection 55
GlkTpX^b 3.7 Spatial and Temporal Coherence 56
\M0-$&[+Z 3.8 Optical Coherence Tomography 61
o1<Y#db[ 4 Diffraction 67
-t~l!! N( 4.1 Introduction 67
!$N^A k5# 4.2 Diffraction from a Single Slit 67
g
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c,nE@~ul2 4.3.1 The Grating Equation. Amplitude Transmittance 70
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=-$>75Z 4.3.2 The Spatial Frequency Spectrum 73
D/QSC]" 4.4 Fourier Optics 75
3V ~871:-~ 4.5 Optical Filtering 76
ggQ/_F8u 4.5.1 Practical Filtering Set-Ups 78
Q\.~cIw_AQ 4.6 Physical Optics Description
pw|f4c7AH of Image Formation 81
F]]1>w*/0 4.6.1 The Coherent Transfer Function 83
yh0zW
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n{sF'n</ 4.6.3 The Depth of Focus 88
0Oy.&C T 4.7 The Phase-Modulated Sinusoidal Grating 89
K ZoI jK] 5 Light Sources and Detectors 99
G J"S*30 5.1 Introduction 99
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< 5.2 Radiometry. Photometry 99
\]RPxM:_> 5.2.1 Lambertian Surface 102
| a001_Wv 5.2.2 Blackbody Radiator 103
Y aiogA 5.2.3 Examples 105
]DVZeI03@ 5.3 Incoherent Light Sources 108
'J\nvNm 5.4 Coherent Light Sources 109
{8+FxmH 5.4.1 Stimulated Emission 109
dqF]kP,VG 5.4.2 Gas Lasers 112
+KV?W+g)` 5.4.3 Liquid Lasers 114
;e,_F/@` 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
EB R,j_ 5.4.5 Solid-State Lasers 117
.Z%y 16)T 5.4.6 Other Lasers 119
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