Optical Metrology Third Edition yL2o}ZbS JNJ=e,O, Kjell J. G˚asvik
+h r@#n4A Spectra Vision AS, Trondheim, Norway
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5a hVeY vJ-q*qM1 Preface to the Third Edition xi
LQngK7> 1Basics 1
b"vv>Q~U 1.1 Introduction 1
!U'QqnT 1.2 Wave Motion. The Electromagnetic Spectrum 1
,^eYlmT>6 1.3 The Plane Wave. Light Rays 3
\kU &^H i 1.4 Phase Difference 4
BA%pY|"Q 1.5 Complex Notation. Complex Amplitude 5
o1h={ao 1.6 Oblique Incidence of A Plane Wave 5
Vp3ZwS 1.7 The Spherical Wave 7
}Du}c3 1.8 The Intensity 8
j]aoR 1.9 Geometrical Optics 8
2&^]k`Aj6D 1.10 The Simple Convex (Positive) Lens 10
=A!@6Nw 1.11 A Plane-Wave Set-Up 11
4:d H] 2 Gaussian Optics 15
zhpt%7So 2.1 Introduction 15
o! {w"K 2.2 Refraction at a Spherical Surface 15
#w\~& 0 2.2.1 Examples 19
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t ]_VG 2.4 The Image-Formation Process 21
32/MkuY^u 2.5 Reflection at a Spherical Surface 23
2E)wpgUc?e 2.6 Aspheric Lenses 25
JAQb{KefdO 2.7 Stops and Apertures 26
S/ODq L| 2.8 Lens Aberrations. Computer Lens Design 28
%Ntcvp) 2.9 Imaging and The Lens Formula 29
O"c;|zCc> 2.10 Standard Optical Systems 30
O]1y0BOQ 2.10.1 Afocal Systems. The Telescope 30
!,Va(E|= 2.10.2 The Simple Magnifier 32
/q5v"iX]T 2.10.3 The Microscope 34
RkBb$q9F] 3 Interference 37
JQ6zVS2SSS 3.1 Introduction 37
9& ` 2V 3.2 General Description 37
O0pD d4)" 3.3 Coherence 38
NR5oIKP? 3.4 Interference between two Plane Waves 41
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i5K[>5 3.5 Interference between other Waves 46
:=\Hoz 3.6 Interferometry 49
Te}8!_ohyC 3.6.1 Wavefront Division 50
obNqsyc77R 3.6.2 Amplitude Division 51
Ft;^g3N 3.6.3 The Dual-Frequency Michelson Interferometer 54
w &(| e < 3.6.4 Heterodyne (Homodyne) Detection 55
!VI]oRgP 3.7 Spatial and Temporal Coherence 56
t_qNq{ 3.8 Optical Coherence Tomography 61
-2 A(5B9Fq 4 Diffraction 67
qIIv6''5@ 4.1 Introduction 67
{yB&xj[z 4.2 Diffraction from a Single Slit 67
I^8"{J.Q)[ 4.3 Diffraction from a Grating 70
}#Qc \eud 4.3.1 The Grating Equation. Amplitude Transmittance 70
+L9Eqll 4.3.2 The Spatial Frequency Spectrum 73
elFtBnL' 4.4 Fourier Optics 75
= aoM ii 4.5 Optical Filtering 76
#EsNeBu 4.5.1 Practical Filtering Set-Ups 78
0iwZT&O 4.6 Physical Optics Description
/x[jQM\ of Image Formation 81
Nd cg/ d 4.6.1 The Coherent Transfer Function 83
@ vrV*! 4.6.2 The Incoherent Transfer Function 85
P:aJ # 4.6.3 The Depth of Focus 88
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m 4.7 The Phase-Modulated Sinusoidal Grating 89
`R=HKtr? 5 Light Sources and Detectors 99
Dqe^E%mc 5.1 Introduction 99
< !dqTJos 5.2 Radiometry. Photometry 99
s8#X3Rp 5.2.1 Lambertian Surface 102
e^[H[d.WMC 5.2.2 Blackbody Radiator 103
iCcB@GlA 5.2.3 Examples 105
X7i/fm{l' 5.3 Incoherent Light Sources 108
}C>{u Xv 5.4 Coherent Light Sources 109
0 SNIYkGE 5.4.1 Stimulated Emission 109
Oms. e 5.4.2 Gas Lasers 112
o17ekM L 5.4.3 Liquid Lasers 114
-cSP _1 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
j(k:
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km1~yQ"bH 5.4.6 Other Lasers 119
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