Optical Metrology Third Edition AamVms ?ER-25S Kjell J. G˚asvik
Q]rD}Ckv- Spectra Vision AS, Trondheim, Norway
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X1 ZgSs+i +A~\tK{ Preface to the Third Edition xi
3 nY1[, 1Basics 1
jBaB@LO9G 1.1 Introduction 1
2F%W8Y 3 1.2 Wave Motion. The Electromagnetic Spectrum 1
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Y 1.3 The Plane Wave. Light Rays 3
8/z3=O & 1.4 Phase Difference 4
}F+zs*S 1.5 Complex Notation. Complex Amplitude 5
~&\ f|% 1.6 Oblique Incidence of A Plane Wave 5
T#pk]c6Q 1.7 The Spherical Wave 7
B?$ "\;& 1.8 The Intensity 8
&V>fYgui 1.9 Geometrical Optics 8
pZ#a p<|>I 1.10 The Simple Convex (Positive) Lens 10
^m_yf|D$ 1.11 A Plane-Wave Set-Up 11
lTU$0CG 2 Gaussian Optics 15
R),zl_d_ 2.1 Introduction 15
zqDR7+] 2.2 Refraction at a Spherical Surface 15
RE.r4uOJg 2.2.1 Examples 19
c9R 5w.t: 2.3 The General Image-Forming System 19
" P)*FT 2.4 The Image-Formation Process 21
\c[IbL07 2.5 Reflection at a Spherical Surface 23
]|_\xO( 2.6 Aspheric Lenses 25
&C>/L; 2.7 Stops and Apertures 26
DF 6 c| 2.8 Lens Aberrations. Computer Lens Design 28
OT^% 3:zg 2.9 Imaging and The Lens Formula 29
i&8FBV- 2.10 Standard Optical Systems 30
T0)"1D<l 2.10.1 Afocal Systems. The Telescope 30
y2O4I'/5< 2.10.2 The Simple Magnifier 32
|*RYq2y 2.10.3 The Microscope 34
p;?*}xa 3 Interference 37
3:%QB9qc]' 3.1 Introduction 37
LQnkcV 3.2 General Description 37
bqanFQj 3.3 Coherence 38
yfU<UQ!1 3.4 Interference between two Plane Waves 41
MxzLK%am 3.4.1 Laser Doppler Velocimetry (LDV) 45
P;PQeXKw 3.5 Interference between other Waves 46
`IYuz: 3.6 Interferometry 49
K
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VL9-NfeqR 3.6.2 Amplitude Division 51
lyCW=nc 3.6.3 The Dual-Frequency Michelson Interferometer 54
`>DP,D)w( 3.6.4 Heterodyne (Homodyne) Detection 55
@pGZLq 3.7 Spatial and Temporal Coherence 56
D@EO=08<b 3.8 Optical Coherence Tomography 61
9+,R`v 4 Diffraction 67
.oEm U+ 4.1 Introduction 67
]]}tdn _ 4.2 Diffraction from a Single Slit 67
t>B^q3\q? 4.3 Diffraction from a Grating 70
8Ry74|`=R 4.3.1 The Grating Equation. Amplitude Transmittance 70
q P ;A}C 4.3.2 The Spatial Frequency Spectrum 73
E1;@=#t2i 4.4 Fourier Optics 75
OL7_'2_z. 4.5 Optical Filtering 76
8+m H:O 4.5.1 Practical Filtering Set-Ups 78
s95vK7I 4.6 Physical Optics Description
] 4+s$rG of Image Formation 81
fAZiC+ 4.6.1 The Coherent Transfer Function 83
d2X[(3 4.6.2 The Incoherent Transfer Function 85
TwyM\9l7 4.6.3 The Depth of Focus 88
?)'~~ @NkH 4.7 The Phase-Modulated Sinusoidal Grating 89
( *G\g=D 5 Light Sources and Detectors 99
K.g Ej*@ 5.1 Introduction 99
*%Qn{x 5.2 Radiometry. Photometry 99
o`khz{SU: 5.2.1 Lambertian Surface 102
*M7E#bQ5B 5.2.2 Blackbody Radiator 103
~f|Z%&l| 5.2.3 Examples 105
7j5f ;O^+ 5.3 Incoherent Light Sources 108
lq.Te,Y%w 5.4 Coherent Light Sources 109
yV)m"j 5.4.1 Stimulated Emission 109
,wwZI`>- 5.4.2 Gas Lasers 112
(2?G:+C 7 5.4.3 Liquid Lasers 114
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{- 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
{F&-7 u0 5.4.5 Solid-State Lasers 117
xr0haN\p" 5.4.6 Other Lasers 119
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