Optical Metrology Third Edition a-E-hX2 M&ij[%i Kjell J. G˚asvik
Vrj1$NL% Spectra Vision AS, Trondheim, Norway
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CdDd +h8 _0*>I1F~ Preface to the Third Edition xi
{&#~ t4 1Basics 1
VDKS_n 1.1 Introduction 1
SO <m(o)G2 1.2 Wave Motion. The Electromagnetic Spectrum 1
6lW Fx bh 1.3 The Plane Wave. Light Rays 3
dT )KvqX 1.4 Phase Difference 4
k<| l \]w 1.5 Complex Notation. Complex Amplitude 5
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2 _i 1.6 Oblique Incidence of A Plane Wave 5
daIL> c" 1.7 The Spherical Wave 7
8KtgSash 1.8 The Intensity 8
Mg QU6O< 1.9 Geometrical Optics 8
ewrWSffe 1.10 The Simple Convex (Positive) Lens 10
MXF"F:-Kn 1.11 A Plane-Wave Set-Up 11
b_jZL'en 2 Gaussian Optics 15
j 3MciQ` 2.1 Introduction 15
R5eB,FN 2.2 Refraction at a Spherical Surface 15
iEviH>b 5 2.2.1 Examples 19
UB$`;'|i 2.3 The General Image-Forming System 19
Ke?gz:9j 2.4 The Image-Formation Process 21
e4Ox`gLa*p 2.5 Reflection at a Spherical Surface 23
E^ok` wfO 2.6 Aspheric Lenses 25
) , ]2`w&k 2.7 Stops and Apertures 26
%Sn 6 *\z 2.8 Lens Aberrations. Computer Lens Design 28
*fl{Y(_OO 2.9 Imaging and The Lens Formula 29
"'!%}; 2.10 Standard Optical Systems 30
qX+gG",8 2.10.1 Afocal Systems. The Telescope 30
;:4P'FWm^ 2.10.2 The Simple Magnifier 32
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J`q}Ry; 3 Interference 37
|R;l5ZKvV 3.1 Introduction 37
7p.h{F'A 3.2 General Description 37
],F}}pv 3.3 Coherence 38
-#wVtXaSc 3.4 Interference between two Plane Waves 41
Yxd{&47 3.4.1 Laser Doppler Velocimetry (LDV) 45
H_ ?B{We 3.5 Interference between other Waves 46
@mx$sNDkL 3.6 Interferometry 49
6 %kJDY. 3.6.1 Wavefront Division 50
'^U tbp 2< 3.6.2 Amplitude Division 51
7<:Wq=e!r 3.6.3 The Dual-Frequency Michelson Interferometer 54
rocB"0 3.6.4 Heterodyne (Homodyne) Detection 55
>HPvgR/#BY 3.7 Spatial and Temporal Coherence 56
[2'm`tZL 3.8 Optical Coherence Tomography 61
Hs%QEvZl 4 Diffraction 67
g. ?*F#2 4.1 Introduction 67
xIQ/$[&v 4.2 Diffraction from a Single Slit 67
2]D$|M?$~ 4.3 Diffraction from a Grating 70
`pi-zE) 4.3.1 The Grating Equation. Amplitude Transmittance 70
aZj J]~bO 4.3.2 The Spatial Frequency Spectrum 73
*IWFeu7y 4.4 Fourier Optics 75
QtY hg$K3 4.5 Optical Filtering 76
[v0ri< sm 4.5.1 Practical Filtering Set-Ups 78
1BMB?I 4.6 Physical Optics Description
PZuq'^p of Image Formation 81
3qiJwo> 4.6.1 The Coherent Transfer Function 83
A U)1vx(\w 4.6.2 The Incoherent Transfer Function 85
*:\:5*SY 4.6.3 The Depth of Focus 88
A<SOT >m] 4.7 The Phase-Modulated Sinusoidal Grating 89
fey*la Xq 5 Light Sources and Detectors 99
E- ) VPZ1D 5.1 Introduction 99
d&|z=%9xl 5.2 Radiometry. Photometry 99
d P $8JI{ 5.2.1 Lambertian Surface 102
zb;(?!Bd# 5.2.2 Blackbody Radiator 103
y9C;T(oi; 5.2.3 Examples 105
rGnI( m. 5.3 Incoherent Light Sources 108
VYamskK[G: 5.4 Coherent Light Sources 109
)sW6iR&_i 5.4.1 Stimulated Emission 109
M3Khc#5S( 5.4.2 Gas Lasers 112
DS:>/m>) 5.4.3 Liquid Lasers 114
U*3A M_w 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
I tI0x 5.4.5 Solid-State Lasers 117
AH2 _#\ 5.4.6 Other Lasers 119
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