Optical Metrology Third Edition NnRX 0] "_
H 9]}Q Kjell J. G˚asvik
0BP Ubp( Spectra Vision AS, Trondheim, Norway
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9 GtVcucN x(7Q5Uk\ Preface to the Third Edition xi
vw6DHN)k 1Basics 1
qGdoRrp0Ov 1.1 Introduction 1
#c$z&J7e 1.2 Wave Motion. The Electromagnetic Spectrum 1
61Wh %8- 1.3 The Plane Wave. Light Rays 3
#+8G` 1.4 Phase Difference 4
w Y=k $ 1.5 Complex Notation. Complex Amplitude 5
O"~CZh,:r} 1.6 Oblique Incidence of A Plane Wave 5
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q,T4-
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|+Cd2[hN 1.9 Geometrical Optics 8
V`m9+<.1 b 1.10 The Simple Convex (Positive) Lens 10
zuS4N?t`p 1.11 A Plane-Wave Set-Up 11
@tlWyUju 2 Gaussian Optics 15
zALtG<_t 2.1 Introduction 15
Slv91c&md, 2.2 Refraction at a Spherical Surface 15
O,Ej m<nt 2.2.1 Examples 19
lf\x`3Vd 2.3 The General Image-Forming System 19
)Wy:I_F351 2.4 The Image-Formation Process 21
#z =$ *\u 2.5 Reflection at a Spherical Surface 23
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e=`=7 H4P 2.7 Stops and Apertures 26
0M!Goqa A 2.8 Lens Aberrations. Computer Lens Design 28
6z2%/P-' 2.9 Imaging and The Lens Formula 29
yJ W/y t.l 2.10 Standard Optical Systems 30
=Q #d0Q 2.10.1 Afocal Systems. The Telescope 30
dy]ZS<Hz8G 2.10.2 The Simple Magnifier 32
IXpn(vX 2.10.3 The Microscope 34
5Z`f .}^w 3 Interference 37
LZDJ\"a- 3.1 Introduction 37
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I ZBY*kr 3.3 Coherence 38
{uurLEe? 3.4 Interference between two Plane Waves 41
q!{>Nlk 3.4.1 Laser Doppler Velocimetry (LDV) 45
XD Q<28^ 3.5 Interference between other Waves 46
`L%< 3/hF 3.6 Interferometry 49
1 s.>_ 3.6.1 Wavefront Division 50
4"veq rC 3.6.2 Amplitude Division 51
hC ?rHw
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&qP0-x) 3.6.4 Heterodyne (Homodyne) Detection 55
Of>2 m< 3.7 Spatial and Temporal Coherence 56
kS4YxtvB 3.8 Optical Coherence Tomography 61
}$b!/<7FD 4 Diffraction 67
!oYNJE Y7 4.1 Introduction 67
wz>[CXpi_ 4.2 Diffraction from a Single Slit 67
Q5HSik4 4.3 Diffraction from a Grating 70
#, h0K 4.3.1 The Grating Equation. Amplitude Transmittance 70
LfN,aW 4.3.2 The Spatial Frequency Spectrum 73
z"-oD*ICw 4.4 Fourier Optics 75
g3f; JB 4.5 Optical Filtering 76
<m~{60{ 4.5.1 Practical Filtering Set-Ups 78
]f>0P3O5& 4.6 Physical Optics Description
M(v X.kF of Image Formation 81
gYBMi)`RT 4.6.1 The Coherent Transfer Function 83
~ R eX$9 4.6.2 The Incoherent Transfer Function 85
AdR p{^w 4.6.3 The Depth of Focus 88
:!JQ<kV 4.7 The Phase-Modulated Sinusoidal Grating 89
B!U;a=ia 5 Light Sources and Detectors 99
O8~RfB 5.1 Introduction 99
-$$mr U 5.2 Radiometry. Photometry 99
tX6_n%/L 5.2.1 Lambertian Surface 102
b[J0+l\!" 5.2.2 Blackbody Radiator 103
v#?;PyeF 5.2.3 Examples 105
@w;$M]o1 5.3 Incoherent Light Sources 108
FKUo^F?z 5.4 Coherent Light Sources 109
+J#8w h 5.4.1 Stimulated Emission 109
^6J*:(eM 5.4.2 Gas Lasers 112
Ns]$+| 5.4.3 Liquid Lasers 114
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WF:4p]0~) 5.4.5 Solid-State Lasers 117
\/b[V3<" 5.4.6 Other Lasers 119
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