Optical Metrology Third Edition M[A-1]' -Bj.hx* Kjell J. G˚asvik
LFCTr/ , Spectra Vision AS, Trondheim, Norway
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>=0ye &k b\,mQ Preface to the Third Edition xi
Y mq3ty]Pe 1Basics 1
\ 0D$Mie 1.1 Introduction 1
TW>?h=.z 1.2 Wave Motion. The Electromagnetic Spectrum 1
(G#} * 1.3 The Plane Wave. Light Rays 3
>&BrCu[u 1.4 Phase Difference 4
H \ 3M 1.5 Complex Notation. Complex Amplitude 5
HC J;&C73& 1.6 Oblique Incidence of A Plane Wave 5
.%_)*NUZ 1.7 The Spherical Wave 7
u2 7S %2P 1.8 The Intensity 8
Z )NrhJC 1.9 Geometrical Optics 8
G=1m] >I8 1.10 The Simple Convex (Positive) Lens 10
26M~<Ic 1.11 A Plane-Wave Set-Up 11
<_t5:3HL 2 Gaussian Optics 15
rw &y,%2 2.1 Introduction 15
(s0 88O 2.2 Refraction at a Spherical Surface 15
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2.2.1 Examples 19
=Ci13< KQ 2.3 The General Image-Forming System 19
qh$X ^%g 2.4 The Image-Formation Process 21
58J_ w X 2.5 Reflection at a Spherical Surface 23
uMHRUi 2.6 Aspheric Lenses 25
)`<6taKx@n 2.7 Stops and Apertures 26
Q skUdzQ= 2.8 Lens Aberrations. Computer Lens Design 28
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('gQ[ 2.9 Imaging and The Lens Formula 29
Ss 2$n 2.10 Standard Optical Systems 30
3EmcYC 2.10.1 Afocal Systems. The Telescope 30
PT+c&5A S 2.10.2 The Simple Magnifier 32
P])L8zK 2.10.3 The Microscope 34
' X}7 ]y 3 Interference 37
AQe !Sqg' 3.1 Introduction 37
?NlSeh 3.2 General Description 37
K}N a3}m 3.3 Coherence 38
U%q:^S%#eG 3.4 Interference between two Plane Waves 41
~Zmi(Ra 3.4.1 Laser Doppler Velocimetry (LDV) 45
[%jxf\9jJ_ 3.5 Interference between other Waves 46
E`tQe5K 3.6 Interferometry 49
N#UXP5C( 3.6.1 Wavefront Division 50
rCE;'? Y 3.6.2 Amplitude Division 51
dnwdFsf 3.6.3 The Dual-Frequency Michelson Interferometer 54
qC..\{z 3.6.4 Heterodyne (Homodyne) Detection 55
".E5t@ }?m 3.7 Spatial and Temporal Coherence 56
?g N9kd) 3.8 Optical Coherence Tomography 61
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DnMjK\M 4 Diffraction 67
y^G>{?Tha 4.1 Introduction 67
#d% vT!Bz~ 4.2 Diffraction from a Single Slit 67
8)Zk24:])_ 4.3 Diffraction from a Grating 70
XIRR Al(, 4.3.1 The Grating Equation. Amplitude Transmittance 70
2 h< U 4.3.2 The Spatial Frequency Spectrum 73
[fxuUmU 4.4 Fourier Optics 75
Pcdf$a"` 4.5 Optical Filtering 76
U{}!y3[wK 4.5.1 Practical Filtering Set-Ups 78
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4>YU8/Rw of Image Formation 81
|!Fk 2Je, 4.6.1 The Coherent Transfer Function 83
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kEOKmO 4.6.2 The Incoherent Transfer Function 85
f^?uY8< 4.6.3 The Depth of Focus 88
um[! |g/ 4.7 The Phase-Modulated Sinusoidal Grating 89
(]XbPW 5 Light Sources and Detectors 99
%[ /<+ 5.1 Introduction 99
IA2GUnUhu 5.2 Radiometry. Photometry 99
7 ]s%r ya 5.2.1 Lambertian Surface 102
f ;wc{qy 5.2.2 Blackbody Radiator 103
UiIF6-ZZ! 5.2.3 Examples 105
+T2HE\ 5.3 Incoherent Light Sources 108
B+Z13;} B 5.4 Coherent Light Sources 109
k2p'G ')H 5.4.1 Stimulated Emission 109
HIGNRm 5.4.2 Gas Lasers 112
q{E"pyt36R 5.4.3 Liquid Lasers 114
PrSkHxm 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
4P%m>[ 5.4.5 Solid-State Lasers 117
VFSz-<L 5.4.6 Other Lasers 119
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