Optical Metrology Third Edition Vi<F@ji #\gx.2W7 Kjell J. G˚asvik
=J^FV_1rJ Spectra Vision AS, Trondheim, Norway
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|/O_AnGI e2L4E8ST< Preface to the Third Edition xi
`*-- vSi 1Basics 1
|M(0CYO 1.1 Introduction 1
3V@!}@y,F6 1.2 Wave Motion. The Electromagnetic Spectrum 1
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E)Fo.H 1.3 The Plane Wave. Light Rays 3
;BYv&(#u1q 1.4 Phase Difference 4
Iz[wrtDI 1 1.5 Complex Notation. Complex Amplitude 5
%q_b\K 1.6 Oblique Incidence of A Plane Wave 5
4,?ZNyl 1.7 The Spherical Wave 7
CL<m+dW%* 1.8 The Intensity 8
*&~wl(+O= 1.9 Geometrical Optics 8
' +E\-X 1.10 The Simple Convex (Positive) Lens 10
`6 ?.ihV 1.11 A Plane-Wave Set-Up 11
jQ 9i<-zc 2 Gaussian Optics 15
*/A ~lR| 2.1 Introduction 15
) (l=_[1Z5 2.2 Refraction at a Spherical Surface 15
_?a.S8LxJZ 2.2.1 Examples 19
MUvgmJsN 2.3 The General Image-Forming System 19
w4j,t 2.4 The Image-Formation Process 21
eWTbHF 2.5 Reflection at a Spherical Surface 23
&KVXU0F^z 2.6 Aspheric Lenses 25
\Ea (f**2B 2.7 Stops and Apertures 26
5F wVR3, 2.8 Lens Aberrations. Computer Lens Design 28
AMc`qh 2.9 Imaging and The Lens Formula 29
yf2 $HF 2.10 Standard Optical Systems 30
Gc{s?rB_ 2.10.1 Afocal Systems. The Telescope 30
HR$; QHl~F 2.10.2 The Simple Magnifier 32
|oV_7%mlu 2.10.3 The Microscope 34
$gysy!2}. 3 Interference 37
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Wtqv 3.2 General Description 37
w~} .c:B 3.3 Coherence 38
v7G&`4~ 3.4 Interference between two Plane Waves 41
1eMz"@ Q9 3.4.1 Laser Doppler Velocimetry (LDV) 45
`rZS\A 3.5 Interference between other Waves 46
(K3 eb 3.6 Interferometry 49
G~KYFNHr 3.6.1 Wavefront Division 50
fm&pxQjg 3.6.2 Amplitude Division 51
QT7PCHP 3.6.3 The Dual-Frequency Michelson Interferometer 54
x$=""?dd 3.6.4 Heterodyne (Homodyne) Detection 55
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q1vsvL9Q 3.8 Optical Coherence Tomography 61
-1c{Jo 4 Diffraction 67
9y( 491"o 4.1 Introduction 67
{q|O m?@ 4.2 Diffraction from a Single Slit 67
R&9Q#n- 4.3 Diffraction from a Grating 70
xBg. QV 4.3.1 The Grating Equation. Amplitude Transmittance 70
AQIBg9y7 4.3.2 The Spatial Frequency Spectrum 73
eD?f|bif 4.4 Fourier Optics 75
:XeRc "m< 4.5 Optical Filtering 76
(I\qTfN4 4.5.1 Practical Filtering Set-Ups 78
q o tWWe# 4.6 Physical Optics Description
L1YiXJ,T, of Image Formation 81
d .t$V RO 4.6.1 The Coherent Transfer Function 83
t$-!1jq 4.6.2 The Incoherent Transfer Function 85
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D7[N 4.6.3 The Depth of Focus 88
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mS^g,M- 4.7 The Phase-Modulated Sinusoidal Grating 89
i;mA | 5 Light Sources and Detectors 99
0t(js_ 5.1 Introduction 99
[LDY;k~5+ 5.2 Radiometry. Photometry 99
^Rc*X'Iz(! 5.2.1 Lambertian Surface 102
h #(J6ht 5.2.2 Blackbody Radiator 103
:FX|9h 5.2.3 Examples 105
p~f =0K 5.3 Incoherent Light Sources 108
aYws{Vii 5.4 Coherent Light Sources 109
-&JQdrs 5.4.1 Stimulated Emission 109
yNOoAnGT W 5.4.2 Gas Lasers 112
c[X:vDUX 5.4.3 Liquid Lasers 114
6gTc)rhRT 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
0UOjk.~b 5.4.5 Solid-State Lasers 117
dBEm7.nh 5.4.6 Other Lasers 119
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