Optical Metrology Third Edition /Ir|& < yB -T
s8y Kjell J. G˚asvik
rh8.kW-K_ Spectra Vision AS, Trondheim, Norway
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l zK J y ]m>N!Iu Preface to the Third Edition xi
&8l4A=l$ 1Basics 1
?gq',F FDq 1.1 Introduction 1
<Z$r\Huf 1.2 Wave Motion. The Electromagnetic Spectrum 1
6I)1[tU 1.3 The Plane Wave. Light Rays 3
))pp{X2m 1.4 Phase Difference 4
Z5oX "Yx 1.5 Complex Notation. Complex Amplitude 5
sRM3G]nUr 1.6 Oblique Incidence of A Plane Wave 5
oAMB}a; 1.7 The Spherical Wave 7
!<ae~#]3 P 1.8 The Intensity 8
K2W$I H:. 1.9 Geometrical Optics 8
/c`s$h4- 1.10 The Simple Convex (Positive) Lens 10
ylV.ZoY6 1.11 A Plane-Wave Set-Up 11
D<.zdTo 2 Gaussian Optics 15
r*n _#&-7 2.1 Introduction 15
|5if gSZ 2.2 Refraction at a Spherical Surface 15
[i8,rOa7 2.2.1 Examples 19
q,< A W> 2.3 The General Image-Forming System 19
6{XdL I 2.4 The Image-Formation Process 21
nA!Xb'y& 2.5 Reflection at a Spherical Surface 23
[lSQ? 2.6 Aspheric Lenses 25
,u^R Z[} 2.7 Stops and Apertures 26
][ ,NNXrc& 2.8 Lens Aberrations. Computer Lens Design 28
G k.;<d 2.9 Imaging and The Lens Formula 29
F(-1m A&- 2.10 Standard Optical Systems 30
Xv` c@n ) 2.10.1 Afocal Systems. The Telescope 30
!' -|]xx( 2.10.2 The Simple Magnifier 32
rCwjy&SuU^ 2.10.3 The Microscope 34
x J;DkPh 3 Interference 37
12NV 3.1 Introduction 37
-rEg(@S % 3.2 General Description 37
Jb~ nu 3.3 Coherence 38
. ] S{T 3.4 Interference between two Plane Waves 41
bt$+l [U^J 3.4.1 Laser Doppler Velocimetry (LDV) 45
STC'j1U 3.5 Interference between other Waves 46
_` %z 3.6 Interferometry 49
7R$]BY= 3.6.1 Wavefront Division 50
WsA(8Ck< 3.6.2 Amplitude Division 51
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~}SOd<n)| 3.6.4 Heterodyne (Homodyne) Detection 55
:QSCky*i 3.7 Spatial and Temporal Coherence 56
e[3 rz%'Q 3.8 Optical Coherence Tomography 61
nFVQOr; 4 Diffraction 67
Iw ? M>'l 4.1 Introduction 67
++s=$D 4.2 Diffraction from a Single Slit 67
7VP[U, 4.3 Diffraction from a Grating 70
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` "Gd/ 4.3.2 The Spatial Frequency Spectrum 73
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z Uw9 4.5 Optical Filtering 76
u -CC UMR 4.5.1 Practical Filtering Set-Ups 78
t=`bXBX1 4.6 Physical Optics Description
FyXz(l: of Image Formation 81
PV2cZ/ 4.6.1 The Coherent Transfer Function 83
39W"G7n?v 4.6.2 The Incoherent Transfer Function 85
zU+` o?al 4.6.3 The Depth of Focus 88
qlT'gUt=H 4.7 The Phase-Modulated Sinusoidal Grating 89
GC{)3) _ t 5 Light Sources and Detectors 99
mUj=NRq 5.1 Introduction 99
1 :xN )M,s 5.2 Radiometry. Photometry 99
);LkEXC_' 5.2.1 Lambertian Surface 102
4XkSj9D~z 5.2.2 Blackbody Radiator 103
4= VAJ 5.2.3 Examples 105
zc<C %t[~y 5.3 Incoherent Light Sources 108
k^|P8 v+"D 5.4 Coherent Light Sources 109
DR."C+ 5.4.1 Stimulated Emission 109
XO)|l8t#$= 5.4.2 Gas Lasers 112
/4\!zPPj. 5.4.3 Liquid Lasers 114
QyJ2P{z 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
y<|vcg8x 5.4.5 Solid-State Lasers 117
S`LS/) 5.4.6 Other Lasers 119
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