Optical Metrology Third Edition fFSW\4JD= Kpj0IfC,10 Kjell J. G˚asvik
L$7v;R3 Spectra Vision AS, Trondheim, Norway
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dUv Preface to the Third Edition xi
ps<JKHC/c 1Basics 1
d&R/f Im 1.1 Introduction 1
hr]NW>; 1.2 Wave Motion. The Electromagnetic Spectrum 1
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1.3 The Plane Wave. Light Rays 3
&?zJ|7rh@| 1.4 Phase Difference 4
.HGEddcC 1.5 Complex Notation. Complex Amplitude 5
W&+UF'F2 1.6 Oblique Incidence of A Plane Wave 5
yDy3;*lE 1.7 The Spherical Wave 7
~^Vt)/}Q 1.8 The Intensity 8
EkXns%][L 1.9 Geometrical Optics 8
yVh]hL#4+w 1.10 The Simple Convex (Positive) Lens 10
,YH^jc 1.11 A Plane-Wave Set-Up 11
=(Gv_ 2 Gaussian Optics 15
RJBNY;0 2.1 Introduction 15
m0=CD 2.2 Refraction at a Spherical Surface 15
LX*T<|c`' 2.2.1 Examples 19
M%9PVePOe 2.3 The General Image-Forming System 19
!^`ZHJ-3>; 2.4 The Image-Formation Process 21
'%K,A-7W 2.5 Reflection at a Spherical Surface 23
}>)"!p;t_ 2.6 Aspheric Lenses 25
;O{AYF?,N 2.7 Stops and Apertures 26
q;B-np?U 2.8 Lens Aberrations. Computer Lens Design 28
gDAA>U3|$ 2.9 Imaging and The Lens Formula 29
Gi;eDrgj~ 2.10 Standard Optical Systems 30
_Vp9Y:mX2 2.10.1 Afocal Systems. The Telescope 30
9"MC< 2.10.2 The Simple Magnifier 32
x#Hq74H, 2.10.3 The Microscope 34
T(3"bS., 3 Interference 37
M-|4cd]6 3.1 Introduction 37
'lIT7MK 3.2 General Description 37
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pN%L3?2 3.4 Interference between two Plane Waves 41
7i6-Hq 3.4.1 Laser Doppler Velocimetry (LDV) 45
"p$`CUtI 3.5 Interference between other Waves 46
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! 3.6 Interferometry 49
t3U*rr|A 3.6.1 Wavefront Division 50
D%Pq*=W 3.6.2 Amplitude Division 51
i~l0XjQbs 3.6.3 The Dual-Frequency Michelson Interferometer 54
W W== 3.6.4 Heterodyne (Homodyne) Detection 55
LD^V="d 3.7 Spatial and Temporal Coherence 56
jF-z? 3.8 Optical Coherence Tomography 61
t;y>q 4 Diffraction 67
PiAA, 4.1 Introduction 67
{\lu; b! 4.2 Diffraction from a Single Slit 67
KY4|C05, 4.3 Diffraction from a Grating 70
#^Sd r- 4.3.1 The Grating Equation. Amplitude Transmittance 70
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-Z6ot{% 4.4 Fourier Optics 75
HjV83S; 4.5 Optical Filtering 76
Q[8L='E 4.5.1 Practical Filtering Set-Ups 78
Ibpk\a?A{ 4.6 Physical Optics Description
H#wn3O of Image Formation 81
.c~;/@{ 4.6.1 The Coherent Transfer Function 83
:5h&f 4.6.2 The Incoherent Transfer Function 85
G%rK{h 4.6.3 The Depth of Focus 88
D97oS!* 4.7 The Phase-Modulated Sinusoidal Grating 89
j:]/AReOL 5 Light Sources and Detectors 99
,bJZs-P0 5.1 Introduction 99
O!/J2SfuDH 5.2 Radiometry. Photometry 99
p,ZubRJ" 5.2.1 Lambertian Surface 102
[/5>)HK} C 5.2.2 Blackbody Radiator 103
$Ce`(/ 5.2.3 Examples 105
&)\0mpLK9 5.3 Incoherent Light Sources 108
<\Y>y+$3 5.4 Coherent Light Sources 109
("H:T?4Qs 5.4.1 Stimulated Emission 109
Kw925@W 5.4.2 Gas Lasers 112
PO |p53 5.4.3 Liquid Lasers 114
oPre$YT}h 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Ep?a1&b 5.4.5 Solid-State Lasers 117
0~n=|3*P 5.4.6 Other Lasers 119
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