Optical Metrology Third Edition q"-Vh,8h viVn Kjell J. G˚asvik
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5+)_d%v=6! 'qeUI}[ Preface to the Third Edition xi
aecvz0}@R 1Basics 1
y! j>_m){w 1.1 Introduction 1
)P.,h&h/ 1.2 Wave Motion. The Electromagnetic Spectrum 1
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nw 1.3 The Plane Wave. Light Rays 3
3V]psZS 1.4 Phase Difference 4
<F| S<\Y. 1.5 Complex Notation. Complex Amplitude 5
yT(86#st 1.6 Oblique Incidence of A Plane Wave 5
7 S %`]M4; 1.7 The Spherical Wave 7
zEe ix,IU 1.8 The Intensity 8
. ;D' 1.9 Geometrical Optics 8
2 $gFiZ 1.10 The Simple Convex (Positive) Lens 10
%\%&1 1.11 A Plane-Wave Set-Up 11
pf3- 2 Gaussian Optics 15
HZ\=NDz 2.1 Introduction 15
W7IAW7w8U 2.2 Refraction at a Spherical Surface 15
X)8Edw[?N3 2.2.1 Examples 19
>DW%i\k1V~ 2.3 The General Image-Forming System 19
#|Je%t}~ 2.4 The Image-Formation Process 21
14y>~~3C4 2.5 Reflection at a Spherical Surface 23
BkDq9> 2.6 Aspheric Lenses 25
K%/g!t) 2.7 Stops and Apertures 26
X`I=Z ysB 2.8 Lens Aberrations. Computer Lens Design 28
HA0yX?f] 2.9 Imaging and The Lens Formula 29
AgdU@&^ 2.10 Standard Optical Systems 30
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O{ZO 2.10.1 Afocal Systems. The Telescope 30
_ ^^5 2.10.2 The Simple Magnifier 32
&hzr(v~; 2.10.3 The Microscope 34
o1Wf#Zq 3 Interference 37
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8sL+ik" 3.2 General Description 37
/IC]}0kkp 3.3 Coherence 38
X|60W 3.4 Interference between two Plane Waves 41
p vu% p8 3.4.1 Laser Doppler Velocimetry (LDV) 45
z'EphL7r 3.5 Interference between other Waves 46
Aa c7k m 3.6 Interferometry 49
c* )PS`]t 3.6.1 Wavefront Division 50
(HeIO 3.6.2 Amplitude Division 51
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3.6.4 Heterodyne (Homodyne) Detection 55
?:RW He.P 3.7 Spatial and Temporal Coherence 56
zM'2opiUY 3.8 Optical Coherence Tomography 61
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2g 4 Diffraction 67
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4.1 Introduction 67
J5\2`U_FZ 4.2 Diffraction from a Single Slit 67
vu/P"?F 4.3 Diffraction from a Grating 70
"o<&3c4 4.3.1 The Grating Equation. Amplitude Transmittance 70
?qtL*; 4.3.2 The Spatial Frequency Spectrum 73
bj 0-72V 4.4 Fourier Optics 75
1ka58_^ 4.5 Optical Filtering 76
]@sLX ek 4.5.1 Practical Filtering Set-Ups 78
~ G ~:R 4.6 Physical Optics Description
" =9)|{=m of Image Formation 81
b"~Ct}6f 4.6.1 The Coherent Transfer Function 83
BctU`. 4.6.2 The Incoherent Transfer Function 85
XN'<H(G 4.6.3 The Depth of Focus 88
=,Lh My 4.7 The Phase-Modulated Sinusoidal Grating 89
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I* 5 Light Sources and Detectors 99
,j \UZ 5.1 Introduction 99
=]sM,E,n 5.2 Radiometry. Photometry 99
/f,*| 5.2.1 Lambertian Surface 102
IQ9Rvnna 5.2.2 Blackbody Radiator 103
G~Fjla\?Q 5.2.3 Examples 105
a]R1Fi0n 5.3 Incoherent Light Sources 108
1?T^jcny:M 5.4 Coherent Light Sources 109
XO4r rAYvW 5.4.1 Stimulated Emission 109
D -\z'gS 5.4.2 Gas Lasers 112
&0euNHH;sL 5.4.3 Liquid Lasers 114
xA"7a 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
r o@`S: 5.4.5 Solid-State Lasers 117
+~M`rR* 5.4.6 Other Lasers 119
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