Optical Metrology Third Edition zsTbdF -Fwh3F4g Kjell J. G˚asvik
m7 XjP2 Spectra Vision AS, Trondheim, Norway
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"xwM+ AC C%H9[%k Preface to the Third Edition xi
c"Y!$'|Q 1Basics 1
_dmL}t- 1.1 Introduction 1
a[O6YgO 1.2 Wave Motion. The Electromagnetic Spectrum 1
g_D-(J`IK, 1.3 The Plane Wave. Light Rays 3
$@87?Ab 1.4 Phase Difference 4
kG3!(?: 1.5 Complex Notation. Complex Amplitude 5
jL4>A$ 1.6 Oblique Incidence of A Plane Wave 5
}]h\/, 1.7 The Spherical Wave 7
<lld*IH 1.8 The Intensity 8
$U'3MEEw 1.9 Geometrical Optics 8
r<FQX3 1.10 The Simple Convex (Positive) Lens 10
F2oJ]th.3 1.11 A Plane-Wave Set-Up 11
F RH&B5w 2 Gaussian Optics 15
SgSk!lj 2.1 Introduction 15
$Qq_qTJu?G 2.2 Refraction at a Spherical Surface 15
>rRf9wO1l 2.2.1 Examples 19
zHxmA 2.3 The General Image-Forming System 19
{,V$* 2.4 The Image-Formation Process 21
q,,j',8kq/ 2.5 Reflection at a Spherical Surface 23
T]2U fi. 2.6 Aspheric Lenses 25
me'(lQ6^ 2.7 Stops and Apertures 26
<3#<I)# 2.8 Lens Aberrations. Computer Lens Design 28
tBl#o ^ 2.9 Imaging and The Lens Formula 29
Zps&[;R$- 2.10 Standard Optical Systems 30
y\_wW E 2.10.1 Afocal Systems. The Telescope 30
i=da,W=0 2.10.2 The Simple Magnifier 32
(@?eLJlT 2.10.3 The Microscope 34
6:RMU 3 Interference 37
z_(eQP]) 3.1 Introduction 37
9A*rE.B+W 3.2 General Description 37
Dm4B 3.3 Coherence 38
"8t\MKt( 3.4 Interference between two Plane Waves 41
o4'v> b 3.4.1 Laser Doppler Velocimetry (LDV) 45
s-5wbi.C 3.5 Interference between other Waves 46
T:#S86m 3.6 Interferometry 49
,|x\MHd?t_ 3.6.1 Wavefront Division 50
9%TT>2# 3.6.2 Amplitude Division 51
5byeWH0n3 3.6.3 The Dual-Frequency Michelson Interferometer 54
4.k`[q8 3.6.4 Heterodyne (Homodyne) Detection 55
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>kmIw' 3.7 Spatial and Temporal Coherence 56
UG=I~{L 3.8 Optical Coherence Tomography 61
As}eUm)B5c 4 Diffraction 67
ZV#$Z 4.1 Introduction 67
.P%ym~S 4.2 Diffraction from a Single Slit 67
f#mx:Q.7I 4.3 Diffraction from a Grating 70
V(I7*_ZFl 4.3.1 The Grating Equation. Amplitude Transmittance 70
@{bb'q['@ 4.3.2 The Spatial Frequency Spectrum 73
9i[4"&K 4.4 Fourier Optics 75
uri*lC 4.5 Optical Filtering 76
^cb)f_90 4.5.1 Practical Filtering Set-Ups 78
u
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~1d!hq?/q of Image Formation 81
THr8o V5 4.6.1 The Coherent Transfer Function 83
YME[%c2x 4.6.2 The Incoherent Transfer Function 85
-Qg,99M 4.6.3 The Depth of Focus 88
Uir*%*4: 4.7 The Phase-Modulated Sinusoidal Grating 89
() <`t}FQ 5 Light Sources and Detectors 99
:B+Rg cqi 5.1 Introduction 99
Rd vn)K 5.2 Radiometry. Photometry 99
$"1pws?d 5.2.1 Lambertian Surface 102
x~Pvh+O 5.2.2 Blackbody Radiator 103
x i.IRAZX 5.2.3 Examples 105
p70,\&@3 5.3 Incoherent Light Sources 108
9c6 ' 5.4 Coherent Light Sources 109
!3QRzkJX~ 5.4.1 Stimulated Emission 109
hafECs 5.4.2 Gas Lasers 112
BP:(IP!& 5.4.3 Liquid Lasers 114
w=5 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
,y%ziay 5.4.5 Solid-State Lasers 117
\"J?@ 5.4.6 Other Lasers 119
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