Optical Metrology Third Edition C X@H G)l vzQmijr- Kjell J. G˚asvik
i2 Iu 2 Spectra Vision AS, Trondheim, Norway
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/:];2P6#X @C6DO B Preface to the Third Edition xi
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1Basics 1
% w/1Uo24 1.1 Introduction 1
LB 5EGw 1.2 Wave Motion. The Electromagnetic Spectrum 1
L zb [%? 1.3 The Plane Wave. Light Rays 3
^*T{-U' 1.4 Phase Difference 4
~ 8qFM 1.5 Complex Notation. Complex Amplitude 5
SX<>6vH& 1.6 Oblique Incidence of A Plane Wave 5
[}B{e=`! 1.7 The Spherical Wave 7
+vY`?k` 1.8 The Intensity 8
SX94,5 _Q 1.9 Geometrical Optics 8
T"jDq1C/,E 1.10 The Simple Convex (Positive) Lens 10
>5Rw~ 1.11 A Plane-Wave Set-Up 11
A-NC,3 2 Gaussian Optics 15
Kh _> V m/ 2.1 Introduction 15
?@7| Q/ 2.2 Refraction at a Spherical Surface 15
qQ\hUii 2.2.1 Examples 19
)eVDp,.^ 2.3 The General Image-Forming System 19
oHG f | 2.4 The Image-Formation Process 21
6j.( l 4} 2.5 Reflection at a Spherical Surface 23
K0bmU(Xxp 2.6 Aspheric Lenses 25
vVRCM 2.7 Stops and Apertures 26
H< 3b+Sg 2.8 Lens Aberrations. Computer Lens Design 28
L
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- cC(d$ y 2.10 Standard Optical Systems 30
# SOj4W 2.10.1 Afocal Systems. The Telescope 30
)qQg n] 2.10.2 The Simple Magnifier 32
.ceU @^ 2.10.3 The Microscope 34
{.[,ee-)9 3 Interference 37
]$%4;o4O 3.1 Introduction 37
fpC@3 itI 3.2 General Description 37
8c' -eT" 3.3 Coherence 38
K":tr~V; 3.4 Interference between two Plane Waves 41
9S`b7U=P 3.4.1 Laser Doppler Velocimetry (LDV) 45
$XzlW=3y 3.5 Interference between other Waves 46
<qZ+U4@I) 3.6 Interferometry 49
fae yk]u 3.6.1 Wavefront Division 50
Ho*R LVI0U 3.6.2 Amplitude Division 51
=Qq^=3@h 3.6.3 The Dual-Frequency Michelson Interferometer 54
tWy<9 TF 3.6.4 Heterodyne (Homodyne) Detection 55
hndRg Co 3.7 Spatial and Temporal Coherence 56
Al;oI3 3.8 Optical Coherence Tomography 61
]t 0S_ UH$ 4 Diffraction 67
T[II;[EiE 4.1 Introduction 67
U-N/Z \QD 4.2 Diffraction from a Single Slit 67
H%jIjf 4.3 Diffraction from a Grating 70
FO3*[O 4.3.1 The Grating Equation. Amplitude Transmittance 70
"+C\f) 4.3.2 The Spatial Frequency Spectrum 73
/ 1@m#ZxA: 4.4 Fourier Optics 75
>dH*FZ:c 4.5 Optical Filtering 76
\?I wR]@y 4.5.1 Practical Filtering Set-Ups 78
gDBQ\vM8 4.6 Physical Optics Description
#GJh:# tt^ of Image Formation 81
f@X*Tlx^| 4.6.1 The Coherent Transfer Function 83
q.Mck9R7 4.6.2 The Incoherent Transfer Function 85
+VFwYdW, 4.6.3 The Depth of Focus 88
qf {B 4.7 The Phase-Modulated Sinusoidal Grating 89
jCa;g{#@ 5 Light Sources and Detectors 99
~&jCz4M 5.1 Introduction 99
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XsMphZnK 5.2.1 Lambertian Surface 102
+u)$o 5.2.2 Blackbody Radiator 103
)}lV41u 5.2.3 Examples 105
M- A}(r +J 5.3 Incoherent Light Sources 108
I=-;*3g6 5.4 Coherent Light Sources 109
^aMdbB 5.4.1 Stimulated Emission 109
f@g 5.4.2 Gas Lasers 112
Um| Tf]q 5.4.3 Liquid Lasers 114
XOFaS '. 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
SZ){1Hu 5.4.5 Solid-State Lasers 117
+Enff0 =+ 5.4.6 Other Lasers 119
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