Optical Metrology Third Edition oaK.kO o X P;Bhz3j Kjell J. G˚asvik
<J& 7 ]6Z Spectra Vision AS, Trondheim, Norway
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&+01+-1hW z C=a3 Preface to the Third Edition xi
*nRNg.i3D 1Basics 1
y S!(A p 1.1 Introduction 1
hJ f2o 1.2 Wave Motion. The Electromagnetic Spectrum 1
{:b N/zV# 1.3 The Plane Wave. Light Rays 3
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mQXgG 1.4 Phase Difference 4
E)W@{?.o# 1.5 Complex Notation. Complex Amplitude 5
]]2k}A[-I 1.6 Oblique Incidence of A Plane Wave 5
O- #TZ 1.7 The Spherical Wave 7
F}36IM9/: 1.8 The Intensity 8
@pFj9[N 1.9 Geometrical Optics 8
$ J1f.YE 1.10 The Simple Convex (Positive) Lens 10
sZ g6@s= 1.11 A Plane-Wave Set-Up 11
t> xd]ti 2 Gaussian Optics 15
ut_pHj@ 2.1 Introduction 15
_w!a`w*3 2.2 Refraction at a Spherical Surface 15
O,s. D,S 2.2.1 Examples 19
1$pb (OK 2.3 The General Image-Forming System 19
fPqr6O Yz 2.4 The Image-Formation Process 21
%d2!\x%bG 2.5 Reflection at a Spherical Surface 23
Vn, >< g 2.6 Aspheric Lenses 25
s_[ VHPN 2.7 Stops and Apertures 26
|yKud 2.8 Lens Aberrations. Computer Lens Design 28
.tnkT;T 2.9 Imaging and The Lens Formula 29
L(G92,. 2.10 Standard Optical Systems 30
X%}nFgqQ 2.10.1 Afocal Systems. The Telescope 30
O=}g 4c 2.10.2 The Simple Magnifier 32
jVWK0Zba 2.10.3 The Microscope 34
"35A/V 3 Interference 37
T%IK/"N|+ 3.1 Introduction 37
2eb1 lJdS 3.2 General Description 37
Da.G4,vLh 3.3 Coherence 38
8e&p\%1 3.4 Interference between two Plane Waves 41
28I^$> [ 3.4.1 Laser Doppler Velocimetry (LDV) 45
Z>P*@S,6G 3.5 Interference between other Waves 46
7TX2&kMoc 3.6 Interferometry 49
{ci.V*:" 3.6.1 Wavefront Division 50
/M=3X|| 3.6.2 Amplitude Division 51
56}X/ u 3.6.3 The Dual-Frequency Michelson Interferometer 54
Vzg=@A # 3.6.4 Heterodyne (Homodyne) Detection 55
Yh<WA>= 3.7 Spatial and Temporal Coherence 56
M 4yI`dr6 3.8 Optical Coherence Tomography 61
C! 9} 4 Diffraction 67
i=S~(gp 4.1 Introduction 67
h6:#!Rg 4.2 Diffraction from a Single Slit 67
*ZrSiIPP 4.3 Diffraction from a Grating 70
6 46JDX[o 4.3.1 The Grating Equation. Amplitude Transmittance 70
(?0`d 4.3.2 The Spatial Frequency Spectrum 73
L |j%S 4.4 Fourier Optics 75
m Y ,|J\w@ 4.5 Optical Filtering 76
%aRT>_6" 4.5.1 Practical Filtering Set-Ups 78
=r2]uW9 4.6 Physical Optics Description
L2UsqVU of Image Formation 81
g}LAks 4.6.1 The Coherent Transfer Function 83
U/ od~29 4.6.2 The Incoherent Transfer Function 85
j<< 3Pr 4.6.3 The Depth of Focus 88
2J GL;U$ 4.7 The Phase-Modulated Sinusoidal Grating 89
0RFRbi@n( 5 Light Sources and Detectors 99
soRv1) el 5.1 Introduction 99
D{8PQ 2x> 5.2 Radiometry. Photometry 99
Smw QET<H 5.2.1 Lambertian Surface 102
4T6 {Y 5.2.2 Blackbody Radiator 103
aB ~S?.l 5.2.3 Examples 105
/] ^#b 5.3 Incoherent Light Sources 108
@(g_<@Jz 5.4 Coherent Light Sources 109
saf&dd 5.4.1 Stimulated Emission 109
KLW n?` 5.4.2 Gas Lasers 112
zi9[)YqxPH 5.4.3 Liquid Lasers 114
&A NP`= 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
: aCrX 5.4.5 Solid-State Lasers 117
Yr.sm !xA 5.4.6 Other Lasers 119
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