Optical Metrology Third Edition IL_d:HF|1 F,5r9^,_ Kjell J. G˚asvik
0<TD/1wN Spectra Vision AS, Trondheim, Norway
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oDcKtB+2 W>b(Om_% Preface to the Third Edition xi
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[%U 1Basics 1
n8hRaNHl2 1.1 Introduction 1
VtOZ%h[# 1.2 Wave Motion. The Electromagnetic Spectrum 1
'q * Bdx 1.3 The Plane Wave. Light Rays 3
0qrqg] 1.4 Phase Difference 4
4:9KR[y/ 1.5 Complex Notation. Complex Amplitude 5
KQ[!o!% 1.6 Oblique Incidence of A Plane Wave 5
ql<rU@ 1.7 The Spherical Wave 7
LB/C-n.` 1.8 The Intensity 8
l6kmS 1.9 Geometrical Optics 8
[Ei1~n)o 1.10 The Simple Convex (Positive) Lens 10
VB<Jf'NU 1.11 A Plane-Wave Set-Up 11
"G:<7oTa 2 Gaussian Optics 15
Kq.:G% 2.1 Introduction 15
1T)Zh+?)} 2.2 Refraction at a Spherical Surface 15
VzJ5.mRQ 2.2.1 Examples 19
oQ=>'w 2.3 The General Image-Forming System 19
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u*qtp 2.4 The Image-Formation Process 21
1.q_f<U 2.5 Reflection at a Spherical Surface 23
,^8 MB. 2.6 Aspheric Lenses 25
VGqa)ri" 2.7 Stops and Apertures 26
yFhB>i 2.8 Lens Aberrations. Computer Lens Design 28
_owjTo} 2.9 Imaging and The Lens Formula 29
`c+/q2M 2.10 Standard Optical Systems 30
\ (p{t 2.10.1 Afocal Systems. The Telescope 30
{RB-lfrWs 2.10.2 The Simple Magnifier 32
7DlOW1| 2.10.3 The Microscope 34
h3gWOU 3 Interference 37
vKoP|z=m 3.1 Introduction 37
#'4OYY. 3.2 General Description 37
vB!|\eJ 3.3 Coherence 38
hO[3 Z^X 3.4 Interference between two Plane Waves 41
N -w(e 3.4.1 Laser Doppler Velocimetry (LDV) 45
3/JyUh? 3.5 Interference between other Waves 46
Iak0 [6Ey 3.6 Interferometry 49
gK|R =J 3.6.1 Wavefront Division 50
2l5KJlfj>k 3.6.2 Amplitude Division 51
[Vdz^_@Y 3.6.3 The Dual-Frequency Michelson Interferometer 54
h8jD}9^ 3.6.4 Heterodyne (Homodyne) Detection 55
Y\2|x*KwvF 3.7 Spatial and Temporal Coherence 56
V^Rkt%JY 3.8 Optical Coherence Tomography 61
$j)hNWI 4 Diffraction 67
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E2B>b[ 4.2 Diffraction from a Single Slit 67
8dK0o>|} 4.3 Diffraction from a Grating 70
*^ \FIUd 4.3.1 The Grating Equation. Amplitude Transmittance 70
uIMe 4.3.2 The Spatial Frequency Spectrum 73
S'B6jJK2x 4.4 Fourier Optics 75
hY<{t.ws 4.5 Optical Filtering 76
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uP\>vRy 4.5.1 Practical Filtering Set-Ups 78
G%#05jH 4.6 Physical Optics Description
Lv1{k\aw of Image Formation 81
Eaad,VBtU 4.6.1 The Coherent Transfer Function 83
Fl>]&x*~ 4.6.2 The Incoherent Transfer Function 85
^%y`u1ab 4.6.3 The Depth of Focus 88
g<\z= H 4.7 The Phase-Modulated Sinusoidal Grating 89
+ E"[ 5 Light Sources and Detectors 99
ezTZnutZ 5.1 Introduction 99
HI&kP+,y 5.2 Radiometry. Photometry 99
-Cid3~mX3 5.2.1 Lambertian Surface 102
OY"6J@[z 5.2.2 Blackbody Radiator 103
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+f4W"t 5.3 Incoherent Light Sources 108
em2_pq9q 5.4 Coherent Light Sources 109
Y|0ow_oH 5.4.1 Stimulated Emission 109
*Zd84wRSj 5.4.2 Gas Lasers 112
LZ*R[ 5.4.3 Liquid Lasers 114
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e,A)U5X 5.4.5 Solid-State Lasers 117
}1+%_|Y-E 5.4.6 Other Lasers 119
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