Optical Metrology Third Edition OO*2>Qy~z aYws{Vii Kjell J. G˚asvik
W+u-M>Cj6 Spectra Vision AS, Trondheim, Norway
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QI*< MF,1 Qkb=KS%z Preface to the Third Edition xi
$ uqB .f$ 1Basics 1
vfloha p 1.1 Introduction 1
aDZ] {; 1.2 Wave Motion. The Electromagnetic Spectrum 1
oxXCf%! 1.3 The Plane Wave. Light Rays 3
Q Zv}\C-c 1.4 Phase Difference 4
JUd Q Q 1.5 Complex Notation. Complex Amplitude 5
E8"$vl&c] 1.6 Oblique Incidence of A Plane Wave 5
Lf+"G p 1.7 The Spherical Wave 7
^vha4<'-qG 1.8 The Intensity 8
3V%ts7: a 1.9 Geometrical Optics 8
V?&P).5) 1.10 The Simple Convex (Positive) Lens 10
|ZtNCB5{^j 1.11 A Plane-Wave Set-Up 11
' mO>hD `V 2 Gaussian Optics 15
" r[Ob]/ 2.1 Introduction 15
6 U_P 2.2 Refraction at a Spherical Surface 15
jj6yf.r6 c 2.2.1 Examples 19
Hp5.jor(k 2.3 The General Image-Forming System 19
?,^ Aoy 2.4 The Image-Formation Process 21
X}B ]0z > 2.5 Reflection at a Spherical Surface 23
\@m^w"Ij 2.6 Aspheric Lenses 25
5]~4 51 2.7 Stops and Apertures 26
x4-_K% 2.8 Lens Aberrations. Computer Lens Design 28
{fa3"k_ke 2.9 Imaging and The Lens Formula 29
]Gf`nJDV 2.10 Standard Optical Systems 30
6|Xe ],u 2.10.1 Afocal Systems. The Telescope 30
]-cST tO 2.10.2 The Simple Magnifier 32
D hD^w;f] 2.10.3 The Microscope 34
hO; XJyv 3 Interference 37
-mw`f)?Ev 3.1 Introduction 37
R'Uf#. 3.2 General Description 37
aKz:hG 3.3 Coherence 38
%uDH_J|^ 3.4 Interference between two Plane Waves 41
+F+M[ef<ws 3.4.1 Laser Doppler Velocimetry (LDV) 45
< h%I-e6 3.5 Interference between other Waves 46
{Bz E 3.6 Interferometry 49
xQkvK=~$ 3.6.1 Wavefront Division 50
9P dD =9HH 3.6.2 Amplitude Division 51
vKBi jmE 3.6.3 The Dual-Frequency Michelson Interferometer 54
pD;fFLvN 3.6.4 Heterodyne (Homodyne) Detection 55
q5{h@}|M 3.7 Spatial and Temporal Coherence 56
Go(Td++HS 3.8 Optical Coherence Tomography 61
i>e?$H,/ 4 Diffraction 67
e% C_> 4.1 Introduction 67
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YO9;NA{sH 4.3.1 The Grating Equation. Amplitude Transmittance 70
oS^KC}X 4.3.2 The Spatial Frequency Spectrum 73
Ug\$Ob5=q 4.4 Fourier Optics 75
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4.5 Optical Filtering 76
8p]9A,Uq& 4.5.1 Practical Filtering Set-Ups 78
GglGFXOL- 4.6 Physical Optics Description
LkXho>y of Image Formation 81
E8BIb 'b; 4.6.1 The Coherent Transfer Function 83
iFnD`l 6) 4.6.2 The Incoherent Transfer Function 85
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4.6.3 The Depth of Focus 88
#mkf2Z=t- 4.7 The Phase-Modulated Sinusoidal Grating 89
Z@} qL1 5 Light Sources and Detectors 99
ps UT2 5.1 Introduction 99
< n/ 2 5.2 Radiometry. Photometry 99
< /2 aQn 5.2.1 Lambertian Surface 102
LGK@taw^ 5.2.2 Blackbody Radiator 103
V!/9GeIF 5.2.3 Examples 105
wf`A&P5tF 5.3 Incoherent Light Sources 108
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]kd:p*U6P 5.4.1 Stimulated Emission 109
SEVB.; 5.4.2 Gas Lasers 112
~;#sj&~ 5.4.3 Liquid Lasers 114
$O%"[w 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
*wx95?H0Z 5.4.5 Solid-State Lasers 117
Jv} &8D 5.4.6 Other Lasers 119
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