Optical Metrology Third Edition iSRpfU D,l,`jv* Kjell J. G˚asvik
< O*6T%; Spectra Vision AS, Trondheim, Norway
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4] > ]-b )-rW&"{U Preface to the Third Edition xi
tU wRE|_ 1Basics 1
~i'Nqe_ 1.1 Introduction 1
q=HHNjj8 1.2 Wave Motion. The Electromagnetic Spectrum 1
rf+:=|/_3 1.3 The Plane Wave. Light Rays 3
YEu1#N 1.4 Phase Difference 4
Z]w#vLR 1.5 Complex Notation. Complex Amplitude 5
pVp:@0h 1.6 Oblique Incidence of A Plane Wave 5
T<yP* b2E 1.7 The Spherical Wave 7
fpyz' 1.8 The Intensity 8
Ko>&)%))$X 1.9 Geometrical Optics 8
0Y=![tO8 1.10 The Simple Convex (Positive) Lens 10
?{"mP 'dD 1.11 A Plane-Wave Set-Up 11
%wV>0gQTf 2 Gaussian Optics 15
D-imL;| 2.1 Introduction 15
<|O^>s; 2.2 Refraction at a Spherical Surface 15
DH DZ_t: 2.2.1 Examples 19
h5z)Lc^ 2.3 The General Image-Forming System 19
z7.|fE)<6 2.4 The Image-Formation Process 21
EY`H}S!xy 2.5 Reflection at a Spherical Surface 23
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2.6 Aspheric Lenses 25
5(2|tJw-H; 2.7 Stops and Apertures 26
pqM~l& 2.8 Lens Aberrations. Computer Lens Design 28
NY$uq+Z> 2.9 Imaging and The Lens Formula 29
f"#m=_Xm 2.10 Standard Optical Systems 30
h 6G/O`: 2.10.1 Afocal Systems. The Telescope 30
p5=|Y^g ! 2.10.2 The Simple Magnifier 32
O/%< }3Sq 2.10.3 The Microscope 34
~cAZB9Fa 3 Interference 37
!2CL1j0( 3.1 Introduction 37
*x~xWg9^ 3.2 General Description 37
:Br5a34q 3.3 Coherence 38
gsar[gZ 3.4 Interference between two Plane Waves 41
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"TVRb 3.4.1 Laser Doppler Velocimetry (LDV) 45
HWns.[ 3.5 Interference between other Waves 46
<HWS:'1 3.6 Interferometry 49
S,fCV~Cio? 3.6.1 Wavefront Division 50
$VG*q 3.6.2 Amplitude Division 51
,iNv' 3.6.3 The Dual-Frequency Michelson Interferometer 54
n6WY&1ZE~ 3.6.4 Heterodyne (Homodyne) Detection 55
wo2@hav 3.7 Spatial and Temporal Coherence 56
&MmU 3.8 Optical Coherence Tomography 61
5OIc(YhYf 4 Diffraction 67
mN`YuR~ 4.1 Introduction 67
&ej8mq"\ 4.2 Diffraction from a Single Slit 67
6[qA`x# 4.3 Diffraction from a Grating 70
{",MCu_V 4.3.1 The Grating Equation. Amplitude Transmittance 70
4!62/df 4.3.2 The Spatial Frequency Spectrum 73
v1U?&C 4.4 Fourier Optics 75
os3 8u!3- 4.5 Optical Filtering 76
o!TQk{0 4.5.1 Practical Filtering Set-Ups 78
e;bYaM4UX 4.6 Physical Optics Description
09KcKhFB of Image Formation 81
h[KvhbD3 4.6.1 The Coherent Transfer Function 83
<E;pgw! 4.6.2 The Incoherent Transfer Function 85
5cr(S~Q; 4.6.3 The Depth of Focus 88
oq/G`{`\ 4.7 The Phase-Modulated Sinusoidal Grating 89
!9*c8bL D 5 Light Sources and Detectors 99
~8 H_u 5.1 Introduction 99
3FSqd<t;D 5.2 Radiometry. Photometry 99
kB:Uu}(=N 5.2.1 Lambertian Surface 102
#$~ba%t9% 5.2.2 Blackbody Radiator 103
h-a!q7]l 5.2.3 Examples 105
Mk 0+D# 5.3 Incoherent Light Sources 108
\mM<\-'p 5.4 Coherent Light Sources 109
L(S'6z~_9 5.4.1 Stimulated Emission 109
wCs^J48= 5.4.2 Gas Lasers 112
!2\ r LN 5.4.3 Liquid Lasers 114
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Q 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
&adI (s~ 5.4.5 Solid-State Lasers 117
V!%jf:k 5.4.6 Other Lasers 119
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