Optical Metrology Third Edition b'R]DS{8 M\7F1\ X Kjell J. G˚asvik
$*P + Spectra Vision AS, Trondheim, Norway
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/i (dO0`wfM Preface to the Third Edition xi
REi "Aj= 1Basics 1
d.B<1"MQ 1.1 Introduction 1
!O'p{dj][ 1.2 Wave Motion. The Electromagnetic Spectrum 1
,kYX|8SO 1.3 The Plane Wave. Light Rays 3
K>XZ rt 1.4 Phase Difference 4
<8Zs; >YuK 1.5 Complex Notation. Complex Amplitude 5
'%*hs8s 1.6 Oblique Incidence of A Plane Wave 5
s*i,Ph 1.7 The Spherical Wave 7
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bS( 1.8 The Intensity 8
c5O8,sT 1.9 Geometrical Optics 8
T xpj#JD 1.10 The Simple Convex (Positive) Lens 10
mY XL 1.11 A Plane-Wave Set-Up 11
qvhG ^b0h 2 Gaussian Optics 15
z{V#_( 2.1 Introduction 15
YWV)C?5x & 2.2 Refraction at a Spherical Surface 15
NxK.q)tj6 2.2.1 Examples 19
!A|}_K1Cr 2.3 The General Image-Forming System 19
$`0,N_C<} 2.4 The Image-Formation Process 21
a8k`Wog 2.5 Reflection at a Spherical Surface 23
1 un! 2.6 Aspheric Lenses 25
t 0p 2.7 Stops and Apertures 26
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d6KFT 2.8 Lens Aberrations. Computer Lens Design 28
[=Nv=d<[p 2.9 Imaging and The Lens Formula 29
q_BMZEM 2.10 Standard Optical Systems 30
~HtD] |7 2.10.1 Afocal Systems. The Telescope 30
o4z|XhLr 2.10.2 The Simple Magnifier 32
\lDh" 2.10.3 The Microscope 34
?A*<Z% }1? 3 Interference 37
>^<; ;8Xh 3.1 Introduction 37
HFz;"s3lWM 3.2 General Description 37
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L"jj D: 3.4 Interference between two Plane Waves 41
8/u kzY1! 3.4.1 Laser Doppler Velocimetry (LDV) 45
.O+, 1&D5 3.5 Interference between other Waves 46
c5i7mx:. 3.6 Interferometry 49
^HI2Vp 3.6.1 Wavefront Division 50
Gs04)KJm< 3.6.2 Amplitude Division 51
']OT7)_ 3.6.3 The Dual-Frequency Michelson Interferometer 54
0Y oV`D,U 3.6.4 Heterodyne (Homodyne) Detection 55
| &bucG= 3.7 Spatial and Temporal Coherence 56
4)L};B= 3.8 Optical Coherence Tomography 61
;vpq0t` 4 Diffraction 67
+#X+QG 4.1 Introduction 67
ZR{YpLFQ 4.2 Diffraction from a Single Slit 67
Y2g% {keo 4.3 Diffraction from a Grating 70
L}g#h+GP[ 4.3.1 The Grating Equation. Amplitude Transmittance 70
a ^O>i#i 4.3.2 The Spatial Frequency Spectrum 73
k@ [[vj|W 4.4 Fourier Optics 75
@XcrHnH9 4.5 Optical Filtering 76
wp:Zur5Y 4.5.1 Practical Filtering Set-Ups 78
Z
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\&H~0X of Image Formation 81
OsYZ a`$, 4.6.1 The Coherent Transfer Function 83
2IkyC` 4.6.2 The Incoherent Transfer Function 85
&{q'$oF 4.6.3 The Depth of Focus 88
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'?X?'_3 5 Light Sources and Detectors 99
Sm|TDH 5.1 Introduction 99
sdgI , 5.2 Radiometry. Photometry 99
xz +;1JAL3 5.2.1 Lambertian Surface 102
?PV@WrU>B 5.2.2 Blackbody Radiator 103
9}q)AL-ga 5.2.3 Examples 105
mFd|Jb W 5.3 Incoherent Light Sources 108
:)+)L@By 5.4 Coherent Light Sources 109
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5.4.1 Stimulated Emission 109
6_g6e2F 5.4.2 Gas Lasers 112
Ms+SJ5Lg 5.4.3 Liquid Lasers 114
w2r* $Q 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
3u;0,:X& 5.4.5 Solid-State Lasers 117
FL0yRF5 5.4.6 Other Lasers 119
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