Optical Metrology Third Edition blkPsp)m" TQQh:y Kjell J. G˚asvik
#6C<P!]V Spectra Vision AS, Trondheim, Norway
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2dDhO equi26jhr Preface to the Third Edition xi
b&RsxW7 1Basics 1
02-% B~oP 1.1 Introduction 1
! iK{q0 1.2 Wave Motion. The Electromagnetic Spectrum 1
`r0lu_.$]4 1.3 The Plane Wave. Light Rays 3
&%u m#XE 1.4 Phase Difference 4
7t/Y5Qf 1.5 Complex Notation. Complex Amplitude 5
L yG`q3@ 1.6 Oblique Incidence of A Plane Wave 5
& u6ydN1xe 1.7 The Spherical Wave 7
#L &/o9| 1.8 The Intensity 8
G? Z a/G 1.9 Geometrical Optics 8
% pAbkb3m 1.10 The Simple Convex (Positive) Lens 10
`$3kt Q $ 1.11 A Plane-Wave Set-Up 11
{e0(M*u 2 Gaussian Optics 15
$Z8riVJ7j- 2.1 Introduction 15
^UFNds'q 2.2 Refraction at a Spherical Surface 15
.9UrWBW\I 2.2.1 Examples 19
] 2A2<Q_, 2.3 The General Image-Forming System 19
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sH]T1z 2.5 Reflection at a Spherical Surface 23
,V{Bpr 2.6 Aspheric Lenses 25
+x<OyjY5?] 2.7 Stops and Apertures 26
~(:0&w%e 2.8 Lens Aberrations. Computer Lens Design 28
? ?("0U 2.9 Imaging and The Lens Formula 29
Q% ^_<u 2.10 Standard Optical Systems 30
hDc2T 2.10.1 Afocal Systems. The Telescope 30
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\C{Zqo, 2.10.3 The Microscope 34
=)a %,H 3 Interference 37
G"".;}AV 3.1 Introduction 37
lwIxn1n 3.2 General Description 37
[ u ^/3N 3.3 Coherence 38
_joW%`T8 3.4 Interference between two Plane Waves 41
\S{ihS@J 3.4.1 Laser Doppler Velocimetry (LDV) 45
T&}KUX~Q/ 3.5 Interference between other Waves 46
XV,ce~ro[ 3.6 Interferometry 49
XJk~bgO* 3.6.1 Wavefront Division 50
?yu@e o 3.6.2 Amplitude Division 51
fUPYCw6F 3.6.3 The Dual-Frequency Michelson Interferometer 54
Dn#UcMO>W 3.6.4 Heterodyne (Homodyne) Detection 55
-#R6 3f& 3.7 Spatial and Temporal Coherence 56
;vn0b"Fi3 3.8 Optical Coherence Tomography 61
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4 Diffraction 67
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4.1 Introduction 67
v 9(N}hoP 4.2 Diffraction from a Single Slit 67
b fkFk 4.3 Diffraction from a Grating 70
-OnKvpeI 4.3.1 The Grating Equation. Amplitude Transmittance 70
fA=Lb^,M 4.3.2 The Spatial Frequency Spectrum 73
ID,os_ T= 4.4 Fourier Optics 75
Dj 6^|R$z& 4.5 Optical Filtering 76
$4og{ 4.5.1 Practical Filtering Set-Ups 78
L=P8; Gj) 4.6 Physical Optics Description
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kf( of Image Formation 81
@g*[}`8]y 4.6.1 The Coherent Transfer Function 83
Y@q ugQ M> 4.6.2 The Incoherent Transfer Function 85
o@C|*TXN 4.6.3 The Depth of Focus 88
zvfdfQ-i 4.7 The Phase-Modulated Sinusoidal Grating 89
ch0cFF^] 5 Light Sources and Detectors 99
G oPMWbI7 5.1 Introduction 99
[jEA|rd~} 5.2 Radiometry. Photometry 99
/AY q^ 5.2.1 Lambertian Surface 102
. k#O[^~] 5.2.2 Blackbody Radiator 103
dKL9}:oUa 5.2.3 Examples 105
6j|~oMYP 5.3 Incoherent Light Sources 108
1&Ma`M(' 5.4 Coherent Light Sources 109
8cRc5X 5.4.1 Stimulated Emission 109
?9?o8! 5.4.2 Gas Lasers 112
m~&>+q ^7 5.4.3 Liquid Lasers 114
p:ZQ*Ue 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
X7gB.=\X 5.4.5 Solid-State Lasers 117
Lmw)Ts> 5.4.6 Other Lasers 119
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