Optical Metrology Third Edition f;%=S:3 ' j\~> a3\ Kjell J. G˚asvik
uC|bC#; Spectra Vision AS, Trondheim, Norway
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v[4-?7- M mQk@~ Preface to the Third Edition xi
WCP2x.gb5 1Basics 1
4C }#lW9 1.1 Introduction 1
S@ @#L 1.2 Wave Motion. The Electromagnetic Spectrum 1
] Jn rs 1.3 The Plane Wave. Light Rays 3
owz cc-g 1.4 Phase Difference 4
iBk1QRdn 1.5 Complex Notation. Complex Amplitude 5
@6Z6@Pq(xQ 1.6 Oblique Incidence of A Plane Wave 5
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h,i pQ > 1.8 The Intensity 8
J|u_45< 1.9 Geometrical Optics 8
eWr2UXv$ 1.10 The Simple Convex (Positive) Lens 10
r<[G~n 1.11 A Plane-Wave Set-Up 11
BUUc9&f3o 2 Gaussian Optics 15
^g=j`f[ T 2.1 Introduction 15
ap<r )<u 2.2 Refraction at a Spherical Surface 15
i|xC#hV 2.2.1 Examples 19
ub]s>aqy 2.3 The General Image-Forming System 19
m#^;V 2.4 The Image-Formation Process 21
bh+m_$X~ 2.5 Reflection at a Spherical Surface 23
+ZR>ul-c 2.6 Aspheric Lenses 25
YJ}9VY<}1K 2.7 Stops and Apertures 26
#s{EIj~YR_ 2.8 Lens Aberrations. Computer Lens Design 28
,7)z avA 2.9 Imaging and The Lens Formula 29
UHS "{% 2.10 Standard Optical Systems 30
G%>{Z?!B 2.10.1 Afocal Systems. The Telescope 30
> . K 2.10.2 The Simple Magnifier 32
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y\=^pla 3 Interference 37
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3.1 Introduction 37
%?BygG 3.2 General Description 37
" %w E>E 3.3 Coherence 38
] 4B&8n! 3.4 Interference between two Plane Waves 41
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E-deXY 3.5 Interference between other Waves 46
A+Kp ECP 3.6 Interferometry 49
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jd.w7 .8 3.6.2 Amplitude Division 51
_QneaPm% 3.6.3 The Dual-Frequency Michelson Interferometer 54
H#3Ma1z 3.6.4 Heterodyne (Homodyne) Detection 55
[&)*jc16 3.7 Spatial and Temporal Coherence 56
A]MX^eY 3.8 Optical Coherence Tomography 61
IeAi ' 4 Diffraction 67
Nv=& gOy= 4.1 Introduction 67
& kQj ) 4.2 Diffraction from a Single Slit 67
Qx8O&C?Ti 4.3 Diffraction from a Grating 70
h>A~yDT[ 4.3.1 The Grating Equation. Amplitude Transmittance 70
xmejoOF 4.3.2 The Spatial Frequency Spectrum 73
jx Z_-1 4.4 Fourier Optics 75
LC qWL 1 4.5 Optical Filtering 76
i^)JxEPr w 4.5.1 Practical Filtering Set-Ups 78
=3=8oF x8 4.6 Physical Optics Description
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3TKg of Image Formation 81
19i =kdH 4.6.1 The Coherent Transfer Function 83
zqLOwzMlLx 4.6.2 The Incoherent Transfer Function 85
Bqw/\Lxwlf 4.6.3 The Depth of Focus 88
-HRa6 4.7 The Phase-Modulated Sinusoidal Grating 89
_$yS4= . 5 Light Sources and Detectors 99
*t`=1Ioj 5.1 Introduction 99
]+Z,HY@;- 5.2 Radiometry. Photometry 99
cA~bH 6 5.2.1 Lambertian Surface 102
{6mFI1;q 5.2.2 Blackbody Radiator 103
|<#yXSi 5.2.3 Examples 105
\*Z:w3;r 5.3 Incoherent Light Sources 108
G@U}4' V9 5.4 Coherent Light Sources 109
0U ! _ o2] 5.4.1 Stimulated Emission 109
_pkmHj( 5.4.2 Gas Lasers 112
} a!HbH 5.4.3 Liquid Lasers 114
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5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
EME}G42KN 5.4.5 Solid-State Lasers 117
2>)::9e4 5.4.6 Other Lasers 119
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