Optical Metrology Third Edition }ri7@HCY4 6Ol)SQE, Kjell J. G˚asvik
U}<zn+SI#V Spectra Vision AS, Trondheim, Norway
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O4a~(*f }1sd<<\` Preface to the Third Edition xi
f=4q]y#& X 1Basics 1
HGj[\kU~ 1.1 Introduction 1
poi39B/Vt 1.2 Wave Motion. The Electromagnetic Spectrum 1
kCoEdQ_ 1.3 The Plane Wave. Light Rays 3
\[B#dw# 1.4 Phase Difference 4
i(q a'* 1.5 Complex Notation. Complex Amplitude 5
akgvV~5 1.6 Oblique Incidence of A Plane Wave 5
SvQj'5~< 1.7 The Spherical Wave 7
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8+J 1.8 The Intensity 8
ET6}V"UD 1.9 Geometrical Optics 8
2)q$HUIX 1.10 The Simple Convex (Positive) Lens 10
i^}DIx{ 1.11 A Plane-Wave Set-Up 11
0{Zwg0& 2 Gaussian Optics 15
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\ B 2.1 Introduction 15
86Xf6Ea 2.2 Refraction at a Spherical Surface 15
#CB`7}jq 2.2.1 Examples 19
09Z\F^*$F 2.3 The General Image-Forming System 19
3.?oG5P# 2.4 The Image-Formation Process 21
Hegj_FQ 2.5 Reflection at a Spherical Surface 23
^p\n/#B 2.6 Aspheric Lenses 25
pr1>:0dg 2.7 Stops and Apertures 26
%b ^.Gw\L 2.8 Lens Aberrations. Computer Lens Design 28
hBW,J$B 2.9 Imaging and The Lens Formula 29
Bjb8#n04 2.10 Standard Optical Systems 30
M8FC-zFs 2.10.1 Afocal Systems. The Telescope 30
PV/ hnVUl 2.10.2 The Simple Magnifier 32
"/\-?YJjw 2.10.3 The Microscope 34
S%Z2J)H" 3 Interference 37
KKw J=za 3.1 Introduction 37
F4&`0y: 3.2 General Description 37
~t.i;eu 3.3 Coherence 38
5jc y*G}[ 3.4 Interference between two Plane Waves 41
`g(r.`t^ 3.4.1 Laser Doppler Velocimetry (LDV) 45
$-mwr,i 3.5 Interference between other Waves 46
qI1JM = 3.6 Interferometry 49
;J?zD9 3.6.1 Wavefront Division 50
ItQ3|-^ 3.6.2 Amplitude Division 51
{,o =K4CD 3.6.3 The Dual-Frequency Michelson Interferometer 54
(V8lmp-F 3.6.4 Heterodyne (Homodyne) Detection 55
hKQg:30< 3.7 Spatial and Temporal Coherence 56
SA-r61 3.8 Optical Coherence Tomography 61
9m2Yrj93 4 Diffraction 67
:c&F\Q= 4.1 Introduction 67
1Qo2Z;h@ 4.2 Diffraction from a Single Slit 67
u-X P` 4.3 Diffraction from a Grating 70
/y5a~3 4.3.1 The Grating Equation. Amplitude Transmittance 70
rqi|8gKY 4.3.2 The Spatial Frequency Spectrum 73
0BHSeO, 4.4 Fourier Optics 75
E&2mFg 4.5 Optical Filtering 76
koOp:7r 4.5.1 Practical Filtering Set-Ups 78
(>gHfC>(lq 4.6 Physical Optics Description
:=,lG ou of Image Formation 81
lRA! 4.6.1 The Coherent Transfer Function 83
':?MFkYC 4.6.2 The Incoherent Transfer Function 85
$3:O}X> 4.6.3 The Depth of Focus 88
/AUXO] 4.7 The Phase-Modulated Sinusoidal Grating 89
mMtX: 5 Light Sources and Detectors 99
lEiOE] 5.1 Introduction 99
'0E^th#u-0 5.2 Radiometry. Photometry 99
%0^taA 5.2.1 Lambertian Surface 102
>{w"aJ" F 5.2.2 Blackbody Radiator 103
vip&
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sT% ^W 5.3 Incoherent Light Sources 108
$@4(Lq1. 5.4 Coherent Light Sources 109
~z*A%vp6ER 5.4.1 Stimulated Emission 109
Uz;
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gye'_AR?k 5.4.3 Liquid Lasers 114
|H@1g=q 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
-JB~yO?0 5.4.5 Solid-State Lasers 117
@m(ja@YC 5.4.6 Other Lasers 119
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