Optical Metrology Third Edition JMoWA0f K%S k{' Kjell J. G˚asvik
xX}vxhN Spectra Vision AS, Trondheim, Norway
7-)Y\D
}lhJt|q c *F=wMWa Preface to the Third Edition xi
zF{5!b 1Basics 1
Nj?,'?'O} 1.1 Introduction 1
#bnFR 1.2 Wave Motion. The Electromagnetic Spectrum 1
Q|:\ 1.3 The Plane Wave. Light Rays 3
) ><{A 1.4 Phase Difference 4
Hq=RtW2 1.5 Complex Notation. Complex Amplitude 5
(d_{+O" 1.6 Oblique Incidence of A Plane Wave 5
D9JT)a 1.7 The Spherical Wave 7
Ehg5u'cj 1.8 The Intensity 8
KVJiCdg- 1.9 Geometrical Optics 8
dq[CT 1.10 The Simple Convex (Positive) Lens 10
6zyozJA 1.11 A Plane-Wave Set-Up 11
Q&yfl 2 Gaussian Optics 15
\ ddbqg?` 2.1 Introduction 15
Kg9REL@,s 2.2 Refraction at a Spherical Surface 15
_uL m !ku 2.2.1 Examples 19
!
XA07O[@ 2.3 The General Image-Forming System 19
I( pU_7mw 2.4 The Image-Formation Process 21
X)`?P*[ 2.5 Reflection at a Spherical Surface 23
$BCqz! 4K 2.6 Aspheric Lenses 25
w<5w?nP+Oh 2.7 Stops and Apertures 26
JIDE]f 2.8 Lens Aberrations. Computer Lens Design 28
Yk[yG;W 2.9 Imaging and The Lens Formula 29
n
,`!yw 2.10 Standard Optical Systems 30
}*;Hhbox 2.10.1 Afocal Systems. The Telescope 30
<Cm:4)~ 2.10.2 The Simple Magnifier 32
g {wDI7"<q 2.10.3 The Microscope 34
a(!:a+9WOP 3 Interference 37
0/;T\9 3.1 Introduction 37
co#%~KqMu 3.2 General Description 37
s>^*GQw 3.3 Coherence 38
[K,&s8N5 3.4 Interference between two Plane Waves 41
Ry tQNwv3 3.4.1 Laser Doppler Velocimetry (LDV) 45
R/U"]Rc 3.5 Interference between other Waves 46
e%#9|/uP 3.6 Interferometry 49
_<&IpT{w+ 3.6.1 Wavefront Division 50
(V}DPA 3.6.2 Amplitude Division 51
|>Kf_b Y# 3.6.3 The Dual-Frequency Michelson Interferometer 54
&!a[rvtZ+ 3.6.4 Heterodyne (Homodyne) Detection 55
9w (QM-u 3.7 Spatial and Temporal Coherence 56
b>?X8)f2e 3.8 Optical Coherence Tomography 61
76(&O 4 Diffraction 67
yin"+&<T 4.1 Introduction 67
Fod2KS;g 4.2 Diffraction from a Single Slit 67
]Ocf %( 4.3 Diffraction from a Grating 70
CZt)Q4 4.3.1 The Grating Equation. Amplitude Transmittance 70
=]E;wWC 4.3.2 The Spatial Frequency Spectrum 73
mbU[fHyV 4.4 Fourier Optics 75
D O(FG-R 4.5 Optical Filtering 76
(WX,&`a<$ 4.5.1 Practical Filtering Set-Ups 78
PKty'}KF 4.6 Physical Optics Description
rQ
LNo, of Image Formation 81
/\(0@To 4.6.1 The Coherent Transfer Function 83
3L/>=I{5
4.6.2 The Incoherent Transfer Function 85
/EA4-#uw 4.6.3 The Depth of Focus 88
D\bW' k]! 4.7 The Phase-Modulated Sinusoidal Grating 89
6(VCQ{ 5 Light Sources and Detectors 99
@?f3(Gh, 5.1 Introduction 99
?&j[Rj0pH 5.2 Radiometry. Photometry 99
+3!um 5.2.1 Lambertian Surface 102
Lr V)}1&5 5.2.2 Blackbody Radiator 103
9co1+y=i{ 5.2.3 Examples 105
U_y)p Cd 5.3 Incoherent Light Sources 108
Atzp\oO 5.4 Coherent Light Sources 109
UXnd~DA 5.4.1 Stimulated Emission 109
P] ouLjyq 5.4.2 Gas Lasers 112
`b+f^6SJn 5.4.3 Liquid Lasers 114
\ 2*<Pq 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
rX)PN3TD 5.4.5 Solid-State Lasers 117
.YKQ6 5.4.6 Other Lasers 119
`[2nxP>w` .
pg ;agtI .
p3 qlVE .