Optical Metrology Third Edition NEq_!!/sF t `o"K Kjell J. G˚asvik
R"t#dG]1t Spectra Vision AS, Trondheim, Norway
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a'VQegP(f\ DDrR9}k Preface to the Third Edition xi
CS[]T9|_ 1Basics 1
\YvG+7a 1.1 Introduction 1
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vTFJ 1.2 Wave Motion. The Electromagnetic Spectrum 1
'@{:Fr G*U 1.3 The Plane Wave. Light Rays 3
Bu:%trlgV 1.4 Phase Difference 4
gFaZ ._ 1.5 Complex Notation. Complex Amplitude 5
&da=hc,>% 1.6 Oblique Incidence of A Plane Wave 5
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4 1.7 The Spherical Wave 7
5 ^{~xOM5 1.8 The Intensity 8
khy'Y&\F; 1.9 Geometrical Optics 8
ob 7'''i 1.10 The Simple Convex (Positive) Lens 10
%-n) L 1.11 A Plane-Wave Set-Up 11
't<iB&wgF 2 Gaussian Optics 15
"| '~y}v_ 2.1 Introduction 15
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nXR8t.r 2.2 Refraction at a Spherical Surface 15
L)'G _)Sl 2.2.1 Examples 19
0%f}Q7*R 2.3 The General Image-Forming System 19
BE?]P?r? 2.4 The Image-Formation Process 21
tJ(xeb 2.5 Reflection at a Spherical Surface 23
OUulG16kK 2.6 Aspheric Lenses 25
YSnh2 Bq 2.7 Stops and Apertures 26
^+(5[z 2.8 Lens Aberrations. Computer Lens Design 28
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|"6< 2.9 Imaging and The Lens Formula 29
Z mu 2.10 Standard Optical Systems 30
Nc+0_|, 2.10.1 Afocal Systems. The Telescope 30
T<]{:\*n 2.10.2 The Simple Magnifier 32
#cY[c1cNv 2.10.3 The Microscope 34
Y:\msq1xp 3 Interference 37
!Rv ;~f/2 3.1 Introduction 37
Gk:fw#R 3.2 General Description 37
)LP' 4* 3.3 Coherence 38
NpVL;6?7T 3.4 Interference between two Plane Waves 41
S`-I-VS=L 3.4.1 Laser Doppler Velocimetry (LDV) 45
O,%UNjx9K 3.5 Interference between other Waves 46
N#u'SGTG 3.6 Interferometry 49
i c{I 3.6.1 Wavefront Division 50
5_9`v@-4_ 3.6.2 Amplitude Division 51
>i T mILA 3.6.3 The Dual-Frequency Michelson Interferometer 54
;.h /D4 3.6.4 Heterodyne (Homodyne) Detection 55
u$?! 3.7 Spatial and Temporal Coherence 56
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' A1 3.8 Optical Coherence Tomography 61
OX"Na2-el 4 Diffraction 67
m>uG{4< - 4.1 Introduction 67
3 Zp<# 4.2 Diffraction from a Single Slit 67
_ZRmD\_t 4.3 Diffraction from a Grating 70
8^_:9&) i 4.3.1 The Grating Equation. Amplitude Transmittance 70
p3P8@M 4.3.2 The Spatial Frequency Spectrum 73
'aNkU 4.4 Fourier Optics 75
D`XXR}8V 4.5 Optical Filtering 76
P>_O :xD 4.5.1 Practical Filtering Set-Ups 78
J6#h~fp v 4.6 Physical Optics Description
YJ~<p H of Image Formation 81
9a_P 9s3w 4.6.1 The Coherent Transfer Function 83
gJ l^K 4.6.2 The Incoherent Transfer Function 85
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`F[0- 4.6.3 The Depth of Focus 88
W ^<AUT 4.7 The Phase-Modulated Sinusoidal Grating 89
2|k$Vfz 5 Light Sources and Detectors 99
=1[_#Moc6 5.1 Introduction 99
k8 #8)d 5.2 Radiometry. Photometry 99
;0eVE 5.2.1 Lambertian Surface 102
e;6:U85LS 5.2.2 Blackbody Radiator 103
s9C^Cy^su 5.2.3 Examples 105
s#7"ZN 5.3 Incoherent Light Sources 108
i9 aR# 5.4 Coherent Light Sources 109
RLf-Rdx/ 5.4.1 Stimulated Emission 109
(aYu[ML 5.4.2 Gas Lasers 112
Jxl'!8t 5.4.3 Liquid Lasers 114
c =m#MMc) 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
$#V' m{Hh 5.4.5 Solid-State Lasers 117
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s>Y,y 5.4.6 Other Lasers 119
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