Optical Metrology Third Edition G]P4[#5
@KOa5-u Kjell J. G˚asvik
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g Spectra Vision AS, Trondheim, Norway
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!Q.c8GRUQ fEVuH] Preface to the Third Edition xi
Xid>8 1Basics 1
dZ%b|CUb 1.1 Introduction 1
`yQHPN0/ 1.2 Wave Motion. The Electromagnetic Spectrum 1
3BY/ &'oX 1.3 The Plane Wave. Light Rays 3
T" QY@#E 1.4 Phase Difference 4
3 0DpIkf 1.5 Complex Notation. Complex Amplitude 5
* uE U9fX 1.6 Oblique Incidence of A Plane Wave 5
v/m`rc]e 1.7 The Spherical Wave 7
P* aD2("Z 1.8 The Intensity 8
N e^ #5 T 1.9 Geometrical Optics 8
@b>]q$)(} 1.10 The Simple Convex (Positive) Lens 10
]m 4LY.SQ 1.11 A Plane-Wave Set-Up 11
// J:p,AF 2 Gaussian Optics 15
T&R `s+7 2.1 Introduction 15
e\yj>tQJg 2.2 Refraction at a Spherical Surface 15
*s%s|/ 2.2.1 Examples 19
(S2<6Nm8 2.3 The General Image-Forming System 19
2Cr+Z(f 2.4 The Image-Formation Process 21
>hQR 2.5 Reflection at a Spherical Surface 23
i se@,[! 2.6 Aspheric Lenses 25
..~{cU4Tt 2.7 Stops and Apertures 26
=x7ODBYW^ 2.8 Lens Aberrations. Computer Lens Design 28
:+R5"my 2.9 Imaging and The Lens Formula 29
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2.10 Standard Optical Systems 30
qh2.N}lW 2.10.1 Afocal Systems. The Telescope 30
{# [a4@B0 2.10.2 The Simple Magnifier 32
W2<X 5' 2.10.3 The Microscope 34
0(i`~ g5 3 Interference 37
2f:'~ P56 3.1 Introduction 37
r p @= 3.2 General Description 37
#5H@/o8!s= 3.3 Coherence 38
;JZXS M-3 3.4 Interference between two Plane Waves 41
D>|:f-Z6Z 3.4.1 Laser Doppler Velocimetry (LDV) 45
'@fk(~| 3.5 Interference between other Waves 46
F;b| A`M 3.6 Interferometry 49
1B1d>V$* 3.6.1 Wavefront Division 50
+$UfP(XmH 3.6.2 Amplitude Division 51
<=zGaU, 3.6.3 The Dual-Frequency Michelson Interferometer 54
<;XJ::d 3.6.4 Heterodyne (Homodyne) Detection 55
|hdh4P$+| 3.7 Spatial and Temporal Coherence 56
B}M J ?uvA 3.8 Optical Coherence Tomography 61
/C(L(X 4 Diffraction 67
fk"{G>&8 4.1 Introduction 67
}!d}febk_ 4.2 Diffraction from a Single Slit 67
5G!X4%a 4.3 Diffraction from a Grating 70
)`Fr*H3{ 4.3.1 The Grating Equation. Amplitude Transmittance 70
Oln o9_' 4.3.2 The Spatial Frequency Spectrum 73
l ,X;<&-[ 4.4 Fourier Optics 75
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b R 4.5 Optical Filtering 76
jNyC%$ 4.5.1 Practical Filtering Set-Ups 78
eT|_0kx1 4.6 Physical Optics Description
c8'8DM of Image Formation 81
[%@zH 4.6.1 The Coherent Transfer Function 83
gSGe] 4.6.2 The Incoherent Transfer Function 85
D~y]d 4.6.3 The Depth of Focus 88
>u4e:/ 5] 4.7 The Phase-Modulated Sinusoidal Grating 89
=3T?U_u@ 5 Light Sources and Detectors 99
n;=A'g|Q 5.1 Introduction 99
jPs+i 5.2 Radiometry. Photometry 99
-?]ltn9! 5.2.1 Lambertian Surface 102
B.WJ6.DkS 5.2.2 Blackbody Radiator 103
{c1qC z M4 5.2.3 Examples 105
+/X'QB$R 5.3 Incoherent Light Sources 108
5{5A BV 5.4 Coherent Light Sources 109
Y n#8uaU 5.4.1 Stimulated Emission 109
H|!s. 5.4.2 Gas Lasers 112
6,7omYof 5.4.3 Liquid Lasers 114
7*5ctc!dG 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
~3%3{a a 5.4.5 Solid-State Lasers 117
g\l;> 5.4.6 Other Lasers 119
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