Optical Metrology Third Edition qf+jfc(Iby 2F^
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Kjell J. G˚asvik
pOD| Spectra Vision AS, Trondheim, Norway
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(.P;VH9R\ ]R}#3(]1 Preface to the Third Edition xi
VgZ<T,SuW 1Basics 1
>5wA B 1.1 Introduction 1
#h ;j2 1.2 Wave Motion. The Electromagnetic Spectrum 1
hxx,E>k 1.3 The Plane Wave. Light Rays 3
(}O)pqZ> 1.4 Phase Difference 4
hSaS2RLF 1.5 Complex Notation. Complex Amplitude 5
2ko7t9y& 1.6 Oblique Incidence of A Plane Wave 5
Rp A76ug 1.7 The Spherical Wave 7
- t4"BD 1.8 The Intensity 8
rfYu8- 1.9 Geometrical Optics 8
7GfgW02 1.10 The Simple Convex (Positive) Lens 10
,oIZ5u{#, 1.11 A Plane-Wave Set-Up 11
%H>vMR-,~ 2 Gaussian Optics 15
EVNTn`J_ 2.1 Introduction 15
s8}:8 2.2 Refraction at a Spherical Surface 15
9 f-T>} 2.2.1 Examples 19
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q?8MKf[N 2.4 The Image-Formation Process 21
v6oPAqj,r 2.5 Reflection at a Spherical Surface 23
G#5Cyu<r! 2.6 Aspheric Lenses 25
-QIcBzw;q 2.7 Stops and Apertures 26
]~8bh*,= 2.8 Lens Aberrations. Computer Lens Design 28
a%tm[Re 2.9 Imaging and The Lens Formula 29
<Nvw
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p1v:X? 2.10.1 Afocal Systems. The Telescope 30
_XXK1H x 2.10.2 The Simple Magnifier 32
b-]E-$Uz 2.10.3 The Microscope 34
XZcsx 3 Interference 37
5YC56,X 3.1 Introduction 37
!/< 5.9!9r 3.2 General Description 37
POH>!lHu 3.3 Coherence 38
=/6.4;8 3.4 Interference between two Plane Waves 41
k}ps-w6: 3.4.1 Laser Doppler Velocimetry (LDV) 45
?*}76u 3.5 Interference between other Waves 46
V==' 7n 3.6 Interferometry 49
(m)%5*: 3.6.1 Wavefront Division 50
<tf4j3lwH 3.6.2 Amplitude Division 51
c/;t.+g 3.6.3 The Dual-Frequency Michelson Interferometer 54
L)8 +/+ 3.6.4 Heterodyne (Homodyne) Detection 55
E=~H,~ 3.7 Spatial and Temporal Coherence 56
s%GiM 3.8 Optical Coherence Tomography 61
7b+OIZB 4 Diffraction 67
~Zl`Ap 4.1 Introduction 67
-J[zJ4z# 4.2 Diffraction from a Single Slit 67
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T~"tex] 4.3.1 The Grating Equation. Amplitude Transmittance 70
0#K@^a 4.3.2 The Spatial Frequency Spectrum 73
(n" ) 4.4 Fourier Optics 75
@kvp2P+O 4.5 Optical Filtering 76
Zt lS*id_ 4.5.1 Practical Filtering Set-Ups 78
MFW?m,It) 4.6 Physical Optics Description
#Yw^n?~~ of Image Formation 81
>-X&/i 4.6.1 The Coherent Transfer Function 83
YL){o$-N"J 4.6.2 The Incoherent Transfer Function 85
*Z{$0K 4.6.3 The Depth of Focus 88
WcH^bAY 6 4.7 The Phase-Modulated Sinusoidal Grating 89
[ R~+p#l+Q 5 Light Sources and Detectors 99
+ W@r p# 5.1 Introduction 99
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15yIPv+5 5.2.1 Lambertian Surface 102
%M}zi'qQ? 5.2.2 Blackbody Radiator 103
,9?'Q;20 5.2.3 Examples 105
`}zv17wp 5.3 Incoherent Light Sources 108
Maa5a 5.4 Coherent Light Sources 109
!ox &` 5.4.1 Stimulated Emission 109
v[Q)cqj/ 5.4.2 Gas Lasers 112
"b1_vA]03 5.4.3 Liquid Lasers 114
EHzZ9zH\ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
`b\4h/~ 5.4.5 Solid-State Lasers 117
~%<PEl| 5.4.6 Other Lasers 119
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