Optical Metrology Third Edition n6f3H\/P& 7kz-V. Kjell J. G˚asvik
pCt}66k} Spectra Vision AS, Trondheim, Norway
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4;<DJ.XlN= ])$S\fFm Preface to the Third Edition xi
XVUf,N, 1Basics 1
S<oQ}+4[~ 1.1 Introduction 1
*SZ>upg 1.2 Wave Motion. The Electromagnetic Spectrum 1
o/JPYBhdl 1.3 The Plane Wave. Light Rays 3
rx:lKoOnB 1.4 Phase Difference 4
:C%47qv 1.5 Complex Notation. Complex Amplitude 5
I'IB_YRL4 1.6 Oblique Incidence of A Plane Wave 5
?0J0Ij, 1.7 The Spherical Wave 7
0j@Ix EPs 1.8 The Intensity 8
T-P@u-DU 1.9 Geometrical Optics 8
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1F0Nw 1.10 The Simple Convex (Positive) Lens 10
2V$9ei6 1.11 A Plane-Wave Set-Up 11
(!n-Age 2 Gaussian Optics 15
N$Hqa^!'T 2.1 Introduction 15
`^%GN8d}nm 2.2 Refraction at a Spherical Surface 15
1g i}H) 2.2.1 Examples 19
raQYn?[ 2.3 The General Image-Forming System 19
|h,FUj<r 2.4 The Image-Formation Process 21
v MWC(m 2.5 Reflection at a Spherical Surface 23
f[@#7,2~M 2.6 Aspheric Lenses 25
cEi<}9r 2.7 Stops and Apertures 26
F*<Ws;j 2.8 Lens Aberrations. Computer Lens Design 28
'3%*U*I 2.9 Imaging and The Lens Formula 29
#$u ZDQY_ 2.10 Standard Optical Systems 30
ngqUH 2.10.1 Afocal Systems. The Telescope 30
8|<f8Z65! 2.10.2 The Simple Magnifier 32
7ukDS] 2.10.3 The Microscope 34
UCF[oO>v 3 Interference 37
):E'`ZP!F 3.1 Introduction 37
JS2!)aqc 3.2 General Description 37
^'Zh;WjI7 3.3 Coherence 38
N7B}O*; 3.4 Interference between two Plane Waves 41
B}5XRgq 3.4.1 Laser Doppler Velocimetry (LDV) 45
*2:Yf7rvI+ 3.5 Interference between other Waves 46
ddMM74 3.6 Interferometry 49
v<fWc971 3.6.1 Wavefront Division 50
:eLLDp< 3.6.2 Amplitude Division 51
h>Rpb#] 3.6.3 The Dual-Frequency Michelson Interferometer 54
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p,^>*/O> 3.7 Spatial and Temporal Coherence 56
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.Bijc G 4 Diffraction 67
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V9]uFL 4.2 Diffraction from a Single Slit 67
]eL~L_[G\ 4.3 Diffraction from a Grating 70
"j;!_v>=f` 4.3.1 The Grating Equation. Amplitude Transmittance 70
n(# c`t* 4.3.2 The Spatial Frequency Spectrum 73
Ug` 4.4 Fourier Optics 75
| &\^n2`> 4.5 Optical Filtering 76
,,2_/u\"/i 4.5.1 Practical Filtering Set-Ups 78
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4.6 Physical Optics Description
F13%)G( of Image Formation 81
[ 1D)$" 4.6.1 The Coherent Transfer Function 83
#|D:f~"d3 4.6.2 The Incoherent Transfer Function 85
g&8 .A( 4.6.3 The Depth of Focus 88
{Bv`i8e 4.7 The Phase-Modulated Sinusoidal Grating 89
o}W7.7^2 5 Light Sources and Detectors 99
Z~B+*HF 5.1 Introduction 99
<m9JXO:5 5.2 Radiometry. Photometry 99
s-o~@(r6 5.2.1 Lambertian Surface 102
XAGiu;<,= 5.2.2 Blackbody Radiator 103
dR?5$V( 5.2.3 Examples 105
N}1-2 5.3 Incoherent Light Sources 108
"N]WL5$i 5.4 Coherent Light Sources 109
!-@SS> 5.4.1 Stimulated Emission 109
5vl2yN 5.4.2 Gas Lasers 112
F.&*D~f 5.4.3 Liquid Lasers 114
0$(jBnE 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
4v i B=> 5.4.5 Solid-State Lasers 117
p@`4 Qz 5.4.6 Other Lasers 119
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