Optical Metrology Third Edition ^G,]("di` T(< C8 Kjell J. G˚asvik
+_8*;k@F' Spectra Vision AS, Trondheim, Norway
m CFScT 
k,xY\r$ !\a'GO[ Preface to the Third Edition xi
Cwxy ~.mI 1Basics 1
F6gboo)SD 1.1 Introduction 1
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_3 1.2 Wave Motion. The Electromagnetic Spectrum 1
?~e 8:/@ 1.3 The Plane Wave. Light Rays 3
h sVf/% 1.4 Phase Difference 4
;}b.gpG 1.5 Complex Notation. Complex Amplitude 5
9PA\Eo|Yb 1.6 Oblique Incidence of A Plane Wave 5
/q4<ZS# 1.7 The Spherical Wave 7
fA
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1.9 Geometrical Optics 8
H|4O`I;~( 1.10 The Simple Convex (Positive) Lens 10
Tp.0@aC 1.11 A Plane-Wave Set-Up 11
[N}:Di,S 2 Gaussian Optics 15
3,8>\yf` 2.1 Introduction 15
@N`) Z3P+ 2.2 Refraction at a Spherical Surface 15
0x Vue[ep 2.2.1 Examples 19
Z8P{Cr~ U9 2.3 The General Image-Forming System 19
vdloh , 2.4 The Image-Formation Process 21
x8Rmap@L. 2.5 Reflection at a Spherical Surface 23
I| qoH N,g 2.6 Aspheric Lenses 25
wRL=9/5(8 2.7 Stops and Apertures 26
O_#Ag K<A 2.8 Lens Aberrations. Computer Lens Design 28
!HM|~G7 2.9 Imaging and The Lens Formula 29
'~{^c } 2.10 Standard Optical Systems 30
ST3a iyG 2.10.1 Afocal Systems. The Telescope 30
oagxTFh8~ 2.10.2 The Simple Magnifier 32
/sf:.TpVh 2.10.3 The Microscope 34
?Gc9^b B I 3 Interference 37
f%0^89 ) 3.1 Introduction 37
TY[1jW~{r 3.2 General Description 37
%D|27gh 3.3 Coherence 38
dUOvv/,FZT 3.4 Interference between two Plane Waves 41
I"4j152P| 3.4.1 Laser Doppler Velocimetry (LDV) 45
.'C$w1[w 3.5 Interference between other Waves 46
7@u0;5 p| 3.6 Interferometry 49
Paz
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q1sK:)Hu+ 3.6.2 Amplitude Division 51
$9dm2#0d 3.6.3 The Dual-Frequency Michelson Interferometer 54
N\ ?%944R 3.6.4 Heterodyne (Homodyne) Detection 55
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9"g=it2Rh6 3.8 Optical Coherence Tomography 61
HDU tLU d 4 Diffraction 67
;aKdRhDo 4.1 Introduction 67
F
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Z -`j)3Y 4.3 Diffraction from a Grating 70
& IVwm" 4.3.1 The Grating Equation. Amplitude Transmittance 70
jW5n^Y ) 4.3.2 The Spatial Frequency Spectrum 73
(.,`<rXw 4.4 Fourier Optics 75
aJlSIw*Q, 4.5 Optical Filtering 76
$}0q=Lg%wv 4.5.1 Practical Filtering Set-Ups 78
oR>o/$z$)g 4.6 Physical Optics Description
V`$J an of Image Formation 81
`JyTS~ v$ 4.6.1 The Coherent Transfer Function 83
Tx%6whd/' 4.6.2 The Incoherent Transfer Function 85
E]` ) 4.6.3 The Depth of Focus 88
%-!ruc "} 4.7 The Phase-Modulated Sinusoidal Grating 89
R9Wh/@J] 5 Light Sources and Detectors 99
hc}d S$=C 5.1 Introduction 99
6k"'3AKaR 5.2 Radiometry. Photometry 99
d?(#NP# ; 5.2.1 Lambertian Surface 102
Q6Z%T.1 5.2.2 Blackbody Radiator 103
)=TD} Xb 5.2.3 Examples 105
@BWroNg{ 5.3 Incoherent Light Sources 108
'+ 1<7jl&I 5.4 Coherent Light Sources 109
^D 8 YF 5.4.1 Stimulated Emission 109
v]|^.x: 5.4.2 Gas Lasers 112
:nYl]Rm 5.4.3 Liquid Lasers 114
sXp>4MomV 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
h(!x&kZq. 5.4.5 Solid-State Lasers 117
{"l_x]q 5.4.6 Other Lasers 119
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