Optical Metrology Third Edition L,Uqt, ~M,nCG^4 Kjell J. G˚asvik
g9p#v$V Spectra Vision AS, Trondheim, Norway
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A+:K!|w LV'v7 2yUH Preface to the Third Edition xi
/ ijj;9EB 1Basics 1
ld`oIEj!P_ 1.1 Introduction 1
#%B1, .A 1.2 Wave Motion. The Electromagnetic Spectrum 1
}fL8<HM\'c 1.3 The Plane Wave. Light Rays 3
F5{~2~Cw( 1.4 Phase Difference 4
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1.5 Complex Notation. Complex Amplitude 5
Z }$. Tm 1.6 Oblique Incidence of A Plane Wave 5
CKrh14ul 1.7 The Spherical Wave 7
I6 h{S}2 1.8 The Intensity 8
lvc X}{>\ 1.9 Geometrical Optics 8
nA5v+d-<T 1.10 The Simple Convex (Positive) Lens 10
&c?-z}=G 1.11 A Plane-Wave Set-Up 11
8_m dh + 2 Gaussian Optics 15
\S1WF ?<, 2.1 Introduction 15
Fg`r:,(a 2.2 Refraction at a Spherical Surface 15
{.;MsE 2.2.1 Examples 19
R&=Y7MfZ 2.3 The General Image-Forming System 19
Xpjk2 [, 2.4 The Image-Formation Process 21
l% K9Ke 2.5 Reflection at a Spherical Surface 23
cfa# a!Y4 2.6 Aspheric Lenses 25
fHR1 ku y 2.7 Stops and Apertures 26
l'?/$?'e_Z 2.8 Lens Aberrations. Computer Lens Design 28
?Tt/,Hl?D 2.9 Imaging and The Lens Formula 29
LKftNSkg" 2.10 Standard Optical Systems 30
'I*F(4x 2.10.1 Afocal Systems. The Telescope 30
]={ :VsnL 2.10.2 The Simple Magnifier 32
$Ob]JAf} 2.10.3 The Microscope 34
IiS1ubNtZ 3 Interference 37
nEyP Nm ) 3.1 Introduction 37
.lTU[(qwu 3.2 General Description 37
wz T+V, 3.3 Coherence 38
C&K%Q3V 3.4 Interference between two Plane Waves 41
}a|S gI 3.4.1 Laser Doppler Velocimetry (LDV) 45
~\Fde^ 1 3.5 Interference between other Waves 46
H\ 8.T:> 3.6 Interferometry 49
U /wY;7{)# 3.6.1 Wavefront Division 50
!5Z?D8dcx 3.6.2 Amplitude Division 51
1K4LEg a ` 3.6.3 The Dual-Frequency Michelson Interferometer 54
#](ML:! 3.6.4 Heterodyne (Homodyne) Detection 55
u;J 9aKD 3.7 Spatial and Temporal Coherence 56
&3S;5{7_e 3.8 Optical Coherence Tomography 61
bP(V#6IJ8 4 Diffraction 67
uWv l<{2 4.1 Introduction 67
`Nc3I\tCM 4.2 Diffraction from a Single Slit 67
Dbz\8gmY 4.3 Diffraction from a Grating 70
0XvMaQXQF 4.3.1 The Grating Equation. Amplitude Transmittance 70
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BDD^*Y 4.4 Fourier Optics 75
J+w "{ O 4.5 Optical Filtering 76
GVCyVt[!- 4.5.1 Practical Filtering Set-Ups 78
cD-\fRBGK 4.6 Physical Optics Description
pcoJ\&&W of Image Formation 81
Jel%1'Dc^ 4.6.1 The Coherent Transfer Function 83
|#f
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6@; w%Ea 4.6.3 The Depth of Focus 88
z| i$eF;x3 4.7 The Phase-Modulated Sinusoidal Grating 89
@ X 5 Light Sources and Detectors 99
DM~Q+C= Yr 5.1 Introduction 99
ezC55nm 5.2 Radiometry. Photometry 99
d cYUw] 5.2.1 Lambertian Surface 102
q yQPR 5.2.2 Blackbody Radiator 103
Eki7bT@ / 5.2.3 Examples 105
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BY32)8SH 5.4 Coherent Light Sources 109
f+-w~cN 5.4.1 Stimulated Emission 109
S!up2OseW 5.4.2 Gas Lasers 112
?Ju=L| 5.4.3 Liquid Lasers 114
wa@X^]D8 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
oC >^V5 5.4.5 Solid-State Lasers 117
(E\ 7Ui0 Q 5.4.6 Other Lasers 119
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