Optical Metrology Third Edition 3shRrCL0mf 1/JtL>SKE Kjell J. G˚asvik
5|nT5oS Spectra Vision AS, Trondheim, Norway
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bD2):U*Fzo xE$>;30b_ Preface to the Third Edition xi
DGc5Lol~ 1Basics 1
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m'r=Z 1.1 Introduction 1
Z.^DJ9E<1 1.2 Wave Motion. The Electromagnetic Spectrum 1
VVd9VGvh 1.3 The Plane Wave. Light Rays 3
=3~5I& 1.4 Phase Difference 4
+#;t.&\80N 1.5 Complex Notation. Complex Amplitude 5
=,MX%-2 1.6 Oblique Incidence of A Plane Wave 5
W"{:|'/v 1.7 The Spherical Wave 7
=c(t;u6m- 1.8 The Intensity 8
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IKYG}T 1.9 Geometrical Optics 8
U"qR6 1.10 The Simple Convex (Positive) Lens 10
!7rk>YrY 1.11 A Plane-Wave Set-Up 11
.RazjXAY 2 Gaussian Optics 15
a^#\"c 2.1 Introduction 15
-`f 1l8LD2 2.2 Refraction at a Spherical Surface 15
s%bm1$} 2.2.1 Examples 19
MvCB|N"qy 2.3 The General Image-Forming System 19
h^B~Fv>~ 2.4 The Image-Formation Process 21
-XJXl}M. 2.5 Reflection at a Spherical Surface 23
No\3kRB4bi 2.6 Aspheric Lenses 25
n<)gS7 2.7 Stops and Apertures 26
OMY^'g%w 2.8 Lens Aberrations. Computer Lens Design 28
Kggc9^ 7 2.9 Imaging and The Lens Formula 29
! %~P[;. 2.10 Standard Optical Systems 30
cv=H6j]h| 2.10.1 Afocal Systems. The Telescope 30
F.Sc2n@7- 2.10.2 The Simple Magnifier 32
PHxU6UPqy 2.10.3 The Microscope 34
@cS(Bb!(M 3 Interference 37
Md*~hb8J 3.1 Introduction 37
Jan~Rran 3.2 General Description 37
'NAC4to;; 3.3 Coherence 38
6f'THU$ 3.4 Interference between two Plane Waves 41
K,f"Q<sU% 3.4.1 Laser Doppler Velocimetry (LDV) 45
t/vw%|AS 3.5 Interference between other Waves 46
2ophh/] 3.6 Interferometry 49
WV8vDv1jt 3.6.1 Wavefront Division 50
n>XfXt = 3.6.2 Amplitude Division 51
.T\jEH8E 3.6.3 The Dual-Frequency Michelson Interferometer 54
H
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?qmJJ5Gn 3.7 Spatial and Temporal Coherence 56
"9v4'" 3.8 Optical Coherence Tomography 61
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lkB 4 Diffraction 67
F*4zC@; 4.1 Introduction 67
j /)A<j$ 4.2 Diffraction from a Single Slit 67
}8LTYn 4.3 Diffraction from a Grating 70
;CtTdr 4.3.1 The Grating Equation. Amplitude Transmittance 70
<*3#nA-O>i 4.3.2 The Spatial Frequency Spectrum 73
Hp(wR'(g& 4.4 Fourier Optics 75
xt zjFfq 4.5 Optical Filtering 76
X(npgkVP\ 4.5.1 Practical Filtering Set-Ups 78
'89nyx&W 4.6 Physical Optics Description
K})w of Image Formation 81
Zsto8wuf# 4.6.1 The Coherent Transfer Function 83
dcH@$D@~S 4.6.2 The Incoherent Transfer Function 85
QFg{.F?3q> 4.6.3 The Depth of Focus 88
/=@V5) 4.7 The Phase-Modulated Sinusoidal Grating 89
K[^BRn 5 Light Sources and Detectors 99
([ODmZHv 5.1 Introduction 99
[Te"|K ': 5.2 Radiometry. Photometry 99
9>-]*7 5.2.1 Lambertian Surface 102
nr?| !gj 5.2.2 Blackbody Radiator 103
nJ|M 5.2.3 Examples 105
O!k C 5.3 Incoherent Light Sources 108
3Hi[Y[O`%P 5.4 Coherent Light Sources 109
le150;7 5.4.1 Stimulated Emission 109
jmJeu@( 5.4.2 Gas Lasers 112
DEQ7u`6 5.4.3 Liquid Lasers 114
V$fn$= 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
9#:B_?e= 5.4.5 Solid-State Lasers 117
^US ol/ 5.4.6 Other Lasers 119
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