Optical Metrology Third Edition
Wx}-H/t'2 %V;* E] Kjell J. G˚asvik
v,opyTwG| Spectra Vision AS, Trondheim, Norway
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JI8l`S Preface to the Third Edition xi
")9 ^ 1Basics 1
qbQ dx Kk 1.1 Introduction 1
h}|.#!C3 1.2 Wave Motion. The Electromagnetic Spectrum 1
2iKteJ@h) 1.3 The Plane Wave. Light Rays 3
WUau KRR. 1.4 Phase Difference 4
5222"yn"c 1.5 Complex Notation. Complex Amplitude 5
H|e7 IsY% 1.6 Oblique Incidence of A Plane Wave 5
[.Fm-$M- 1.7 The Spherical Wave 7
aAP86MHO 1.8 The Intensity 8
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Wq 1.10 The Simple Convex (Positive) Lens 10
#"oLz"{ 1.11 A Plane-Wave Set-Up 11
d_ :f- 2 Gaussian Optics 15
W)Mz1v #s 2.1 Introduction 15
+9]t]Vrw 2.2 Refraction at a Spherical Surface 15
Cq WO 0 2.2.1 Examples 19
)Ko~6 .:5H 2.3 The General Image-Forming System 19
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;>/Mal 2.5 Reflection at a Spherical Surface 23
rR ^o 2.6 Aspheric Lenses 25
HoX={^aG% 2.7 Stops and Apertures 26
;TC]<N.YJT 2.8 Lens Aberrations. Computer Lens Design 28
IRR b^Q6 2.9 Imaging and The Lens Formula 29
'k }w|gNB 2.10 Standard Optical Systems 30
lt rti.& 2.10.1 Afocal Systems. The Telescope 30
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V:t{m u5j 2.10.3 The Microscope 34
t%,:L.?J# 3 Interference 37
t(vyi 3.1 Introduction 37
-`\n/"#X6i 3.2 General Description 37
;y7+ Q 3.3 Coherence 38
3xRn 3.4 Interference between two Plane Waves 41
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9W-" mD; 3.5 Interference between other Waves 46
*Cp:<M nd 3.6 Interferometry 49
g0Q YBrp 3.6.1 Wavefront Division 50
'xG{q+jj' 3.6.2 Amplitude Division 51
J !|R1 3.6.3 The Dual-Frequency Michelson Interferometer 54
N/#x 3.6.4 Heterodyne (Homodyne) Detection 55
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T33X)h% 3.7 Spatial and Temporal Coherence 56
Myn51pcz l 3.8 Optical Coherence Tomography 61
6uUz ky 4 Diffraction 67
}Q9+krrow 4.1 Introduction 67
kZ6:= l 4.2 Diffraction from a Single Slit 67
vV=rBO0a? 4.3 Diffraction from a Grating 70
eu]qgtg~U 4.3.1 The Grating Equation. Amplitude Transmittance 70
Yu HXm3[ 4.3.2 The Spatial Frequency Spectrum 73
KR R)pT 4.4 Fourier Optics 75
GbQg(%2F 4.5 Optical Filtering 76
gw">x t5 4.5.1 Practical Filtering Set-Ups 78
V@y&n1?6 4.6 Physical Optics Description
pI. 8Ip_r of Image Formation 81
fGA#0/_` 4.6.1 The Coherent Transfer Function 83
t+pA9^$[ ` 4.6.2 The Incoherent Transfer Function 85
tCRsaDK> 4.6.3 The Depth of Focus 88
5zZQt +Ip 4.7 The Phase-Modulated Sinusoidal Grating 89
C]3:&dx9 5 Light Sources and Detectors 99
ang~_Ec. 5.1 Introduction 99
{~#PM>f 5.2 Radiometry. Photometry 99
a-nn[ j 5.2.1 Lambertian Surface 102
BW3Q03SW6 5.2.2 Blackbody Radiator 103
.h/2-pQ> 5.2.3 Examples 105
ePR9r } 5.3 Incoherent Light Sources 108
6Hy_7\$(- 5.4 Coherent Light Sources 109
M+j*5wNy 5.4.1 Stimulated Emission 109
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M#LB&Pe 5.4.2 Gas Lasers 112
;;C2t&( 5.4.3 Liquid Lasers 114
MO| Dwuaf 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
?|Z~mE 5.4.5 Solid-State Lasers 117
cdGBo4 5.4.6 Other Lasers 119
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