Optical Metrology Third Edition us +z8Mz
6 ZfL-E{ Kjell J. G˚asvik
)]kxLf# Spectra Vision AS, Trondheim, Norway
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,Oe:SZ J> )D ~ 5 Preface to the Third Edition xi
E+lr{~ 1Basics 1
:W;eW%Y 1.1 Introduction 1
G.`},c;A- 1.2 Wave Motion. The Electromagnetic Spectrum 1
-Aojk8tc 1.3 The Plane Wave. Light Rays 3
Tl2( %qB 1.4 Phase Difference 4
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XJ5@/BW 1.6 Oblique Incidence of A Plane Wave 5
Iq iU 1.7 The Spherical Wave 7
-K3d u&j 1.8 The Intensity 8
U $Z<lx2P 1.9 Geometrical Optics 8
&>&6OV]P' 1.10 The Simple Convex (Positive) Lens 10
2vh }:A_ 1.11 A Plane-Wave Set-Up 11
9 p{n7. 2 Gaussian Optics 15
[$; cjys 2.1 Introduction 15
R:$E'PSx 2.2 Refraction at a Spherical Surface 15
7F2 RH 8 ) 2.2.1 Examples 19
bN7m[GRO. 2.3 The General Image-Forming System 19
un4fnoc 2.4 The Image-Formation Process 21
3n)$\aBE 2.5 Reflection at a Spherical Surface 23
JsNj!aeU% 2.6 Aspheric Lenses 25
`hdff0 2.7 Stops and Apertures 26
Z,O* p,Gzn 2.8 Lens Aberrations. Computer Lens Design 28
;i\N!T{> 2.9 Imaging and The Lens Formula 29
v bn=ywz 2.10 Standard Optical Systems 30
@ &Z^WN,x 2.10.1 Afocal Systems. The Telescope 30
-fXQ62:S 2.10.2 The Simple Magnifier 32
S 3l^h4 2.10.3 The Microscope 34
g(W+[kj) 3 Interference 37
Kei0>hBi 3.1 Introduction 37
s .<.6t:G4 3.2 General Description 37
qB (Pqv 3.3 Coherence 38
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B{R [z%Y 3.4.1 Laser Doppler Velocimetry (LDV) 45
0&j90J$` 3.5 Interference between other Waves 46
>mX6;6FF 3.6 Interferometry 49
tT>LOI_z 3.6.1 Wavefront Division 50
J@2wPKh?Yp 3.6.2 Amplitude Division 51
)~)l^0X 3.6.3 The Dual-Frequency Michelson Interferometer 54
Ht4 O5yl" 3.6.4 Heterodyne (Homodyne) Detection 55
Vj 9X6u}{ 3.7 Spatial and Temporal Coherence 56
E&
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&>C+5`bg 4 Diffraction 67
v: /\; 2 4.1 Introduction 67
vhbHt_!u& 4.2 Diffraction from a Single Slit 67
?b VIH? 4.3 Diffraction from a Grating 70
O*GF/ R8B 4.3.1 The Grating Equation. Amplitude Transmittance 70
rAfz? 4.3.2 The Spatial Frequency Spectrum 73
V%s7*`U 4.4 Fourier Optics 75
c>K]$ ;} 4.5 Optical Filtering 76
CTW\Dt5 4.5.1 Practical Filtering Set-Ups 78
myR{ }G 4.6 Physical Optics Description
U%s@np of Image Formation 81
KCyV |,+n 4.6.1 The Coherent Transfer Function 83
2I [zV7 @t 4.6.2 The Incoherent Transfer Function 85
9>w~B|/ 4.6.3 The Depth of Focus 88
wDh]vH[ 4.7 The Phase-Modulated Sinusoidal Grating 89
k3qQU) 5 Light Sources and Detectors 99
u_$4xNmQ 5.1 Introduction 99
H?];8wq$G 5.2 Radiometry. Photometry 99
&|{1Ws 5.2.1 Lambertian Surface 102
AJ7^'p9Y 5.2.2 Blackbody Radiator 103
JE-*o"& 5.2.3 Examples 105
'G l~P><e 5.3 Incoherent Light Sources 108
?'TK~,dG/ 5.4 Coherent Light Sources 109
yO1
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\,G9'c 'u 5.4.2 Gas Lasers 112
U_"!\lI_yg 5.4.3 Liquid Lasers 114
sh_;98^ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
C*b[J 5.4.5 Solid-State Lasers 117
!6'N -b1 5.4.6 Other Lasers 119
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