Optical Metrology Third Edition a@7we=! tQ)8HVKF Kjell J. G˚asvik
Wb|IWn H$ Spectra Vision AS, Trondheim, Norway
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LJiMtq g \\'! <Bn2d Preface to the Third Edition xi
1S=I(n?E 1Basics 1
v-l):TL+= 1.1 Introduction 1
Y,8M[UIK 1.2 Wave Motion. The Electromagnetic Spectrum 1
F| PYDC 1.3 The Plane Wave. Light Rays 3
s <5t}{x 1.4 Phase Difference 4
"#9WF} 1.5 Complex Notation. Complex Amplitude 5
9xSAWK r,l 1.6 Oblique Incidence of A Plane Wave 5
X+*| nvq] 1.7 The Spherical Wave 7
We9mkwK7C 1.8 The Intensity 8
1xx-}AIH# 1.9 Geometrical Optics 8
LHa cHv 1.10 The Simple Convex (Positive) Lens 10
XJQ[aU"[]N 1.11 A Plane-Wave Set-Up 11
X{ Nif G 2 Gaussian Optics 15
+zlaYHj 2.1 Introduction 15
8IX6MfR}C 2.2 Refraction at a Spherical Surface 15
U,]z)1#X| 2.2.1 Examples 19
sFGX W 2.3 The General Image-Forming System 19
:;JJvYIs 2.4 The Image-Formation Process 21
-aO3/Ik [q 2.5 Reflection at a Spherical Surface 23
Bf7RW[ -v 2.6 Aspheric Lenses 25
B!Qdf8We 2.7 Stops and Apertures 26
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#qD& 2.8 Lens Aberrations. Computer Lens Design 28
UyJ5}fBJ 2.9 Imaging and The Lens Formula 29
J>+Dv?Ni$ 2.10 Standard Optical Systems 30
:n>h[{ o% 2.10.1 Afocal Systems. The Telescope 30
Z |7Y1W[ 2.10.2 The Simple Magnifier 32
LAr6J 2.10.3 The Microscope 34
Q0r_+0[7j 3 Interference 37
l&C %oW 3.1 Introduction 37
}R>g(q=N 3.2 General Description 37
xF ,J[Aj 3.3 Coherence 38
1LE8,Gm& 3.4 Interference between two Plane Waves 41
p%G\5.GcJL 3.4.1 Laser Doppler Velocimetry (LDV) 45
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z c A"\ 3.6 Interferometry 49
Fc nR}TE 3.6.1 Wavefront Division 50
31_5k./ 3.6.2 Amplitude Division 51
XjX<?W 3.6.3 The Dual-Frequency Michelson Interferometer 54
<H 3}N! 3.6.4 Heterodyne (Homodyne) Detection 55
ikY=} 3.7 Spatial and Temporal Coherence 56
PvA%c<z 3.8 Optical Coherence Tomography 61
+)V6" XY-( 4 Diffraction 67
O 4}cv 4.1 Introduction 67
8Mp 4.2 Diffraction from a Single Slit 67
sd=i!r)ya 4.3 Diffraction from a Grating 70
Pajr`gU 4.3.1 The Grating Equation. Amplitude Transmittance 70
1 ltoLd\{ 4.3.2 The Spatial Frequency Spectrum 73
;/YSQt)rc> 4.4 Fourier Optics 75
lxxK6;r~> 4.5 Optical Filtering 76
-nU_eD y 4.5.1 Practical Filtering Set-Ups 78
$ D45X< 4.6 Physical Optics Description
b|xz`wUH0$ of Image Formation 81
on(W^ocnD 4.6.1 The Coherent Transfer Function 83
VR_1cwKBM 4.6.2 The Incoherent Transfer Function 85
3kJAaI8 4.6.3 The Depth of Focus 88
+C+3DwN 4.7 The Phase-Modulated Sinusoidal Grating 89
htkyywv 5 Light Sources and Detectors 99
S#ven& 5.1 Introduction 99
'T.> oP0> 5.2 Radiometry. Photometry 99
"PlM{ZI\ 5.2.1 Lambertian Surface 102
W`;E-28Dg 5.2.2 Blackbody Radiator 103
V6Q[Y>84~a 5.2.3 Examples 105
aoCyYnZD 5.3 Incoherent Light Sources 108
pM4 j=F 5.4 Coherent Light Sources 109
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OGg`1XX 5.4.1 Stimulated Emission 109
, X|oCD 5.4.2 Gas Lasers 112
zS?L3*u 5.4.3 Liquid Lasers 114
tnTr &o# 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
;)o%2#I 5.4.5 Solid-State Lasers 117
Bg34YmZ 5.4.6 Other Lasers 119
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