Optical Metrology Third Edition {yMkd4v KYq<n& s Kjell J. G˚asvik
tv; ?W=&P Spectra Vision AS, Trondheim, Norway
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4z^~,7J^ QHtN_Q_F Preface to the Third Edition xi
v7D0E[)~ 1Basics 1
_j~y;R) 1.1 Introduction 1
vF'IK, 1.2 Wave Motion. The Electromagnetic Spectrum 1
{& FOa'bP 1.3 The Plane Wave. Light Rays 3
_6L'}X$)N 1.4 Phase Difference 4
^Gi WU +` 1.5 Complex Notation. Complex Amplitude 5
}$* z:E 1.6 Oblique Incidence of A Plane Wave 5
|_a^+!P 1.7 The Spherical Wave 7
W~s:SN 1.8 The Intensity 8
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? 1.9 Geometrical Optics 8
~$1g"jIw 1.10 The Simple Convex (Positive) Lens 10
8rNf4]5@X( 1.11 A Plane-Wave Set-Up 11
%PPkT]~\ 2 Gaussian Optics 15
r/QI-Cf& 2.1 Introduction 15
) [=C@U 2.2 Refraction at a Spherical Surface 15
eUD 5 V 2.2.1 Examples 19
" J ` # 2.3 The General Image-Forming System 19
y"H(F,(N 2.4 The Image-Formation Process 21
A>*#Nw5L 2.5 Reflection at a Spherical Surface 23
CU/Id`"tW 2.6 Aspheric Lenses 25
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w!}kcn< 2.8 Lens Aberrations. Computer Lens Design 28
5{-54mwo 2.9 Imaging and The Lens Formula 29
X#X /P 2.10 Standard Optical Systems 30
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9-d 2.10.1 Afocal Systems. The Telescope 30
-)DxF<8B 2.10.2 The Simple Magnifier 32
[5GzY`/m 2.10.3 The Microscope 34
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WM 3 Interference 37
%B\VY+ 3.1 Introduction 37
)W1[{? 3.2 General Description 37
uY3?(f# 3.3 Coherence 38
+77j2W_0 3.4 Interference between two Plane Waves 41
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*7x7|z 3.4.1 Laser Doppler Velocimetry (LDV) 45
I1p{(f J 3.5 Interference between other Waves 46
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WqHp 23 3.6.1 Wavefront Division 50
xzf/W+.>. 3.6.2 Amplitude Division 51
xk^`4; 3.6.3 The Dual-Frequency Michelson Interferometer 54
S= $ \S9 3.6.4 Heterodyne (Homodyne) Detection 55
2l~qzT- 3.7 Spatial and Temporal Coherence 56
V\AF%=6} 3.8 Optical Coherence Tomography 61
`U>]*D6 8 4 Diffraction 67
" rp P 4.1 Introduction 67
)t,efg 4.2 Diffraction from a Single Slit 67
c2PBYFCyC 4.3 Diffraction from a Grating 70
]oKHS $W9 4.3.1 The Grating Equation. Amplitude Transmittance 70
66po SZR@ 4.3.2 The Spatial Frequency Spectrum 73
_A=i2?g 4.4 Fourier Optics 75
R l)g[s 4.5 Optical Filtering 76
"}0)~,{x B 4.5.1 Practical Filtering Set-Ups 78
- P4X@s_; 4.6 Physical Optics Description
1W7ClT_cQ of Image Formation 81
$$'[ % 4.6.1 The Coherent Transfer Function 83
$;)A:*e 4.6.2 The Incoherent Transfer Function 85
Zy>y7O(, 4.6.3 The Depth of Focus 88
~hT(uxU/ 4.7 The Phase-Modulated Sinusoidal Grating 89
uao#=]?) 5 Light Sources and Detectors 99
G6X 5`eLQ 5.1 Introduction 99
- I~\ 5.2 Radiometry. Photometry 99
f;b f R&v 5.2.1 Lambertian Surface 102
X$_z"t 5.2.2 Blackbody Radiator 103
^fbzlu?G4- 5.2.3 Examples 105
Xzqx 8Kd 5.3 Incoherent Light Sources 108
fhro"5/4 5.4 Coherent Light Sources 109
?%b#FXA 5.4.1 Stimulated Emission 109
gc W' 5.4.2 Gas Lasers 112
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35fj-J$8 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
UvL=^*tm 5.4.5 Solid-State Lasers 117
(^~~&/U_U$ 5.4.6 Other Lasers 119
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