Optical Metrology Third Edition :o' |%JE &9^4- 5] Kjell J. G˚asvik
.C nZMw{' Spectra Vision AS, Trondheim, Norway
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rH!sImz, QmjE\TcK/ Preface to the Third Edition xi
{?`7D:]`^ 1Basics 1
zzh Z1;\ 1.1 Introduction 1
u 3#+fn_ 1.2 Wave Motion. The Electromagnetic Spectrum 1
(BPO*' 1.3 The Plane Wave. Light Rays 3
T 5Zh2Q@ 1.4 Phase Difference 4
:>.{w$Ln% 1.5 Complex Notation. Complex Amplitude 5
jan} }7Dly 1.6 Oblique Incidence of A Plane Wave 5
]7 Du/)$ 1.7 The Spherical Wave 7
C{}PO u 1.8 The Intensity 8
|YsR;=6wT 1.9 Geometrical Optics 8
s2"`j-i Q 1.10 The Simple Convex (Positive) Lens 10
iAZ8Y/ 1.11 A Plane-Wave Set-Up 11
t1 YB 2 Gaussian Optics 15
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YV 2.1 Introduction 15
{daX?N| V 2.2 Refraction at a Spherical Surface 15
g kO^J{_@q 2.2.1 Examples 19
cF w-JM< 2.3 The General Image-Forming System 19
>STth PO 2.4 The Image-Formation Process 21
EP#2it]0] 2.5 Reflection at a Spherical Surface 23
)-_^vB 2.6 Aspheric Lenses 25
#<< el;n 2.7 Stops and Apertures 26
{ 7ji m 2.8 Lens Aberrations. Computer Lens Design 28
g%l ,a3" 2.9 Imaging and The Lens Formula 29
$*942. =Q 2.10 Standard Optical Systems 30
wYf\!]}' 2.10.1 Afocal Systems. The Telescope 30
S?d< P 2.10.2 The Simple Magnifier 32
{o5|(^l 2.10.3 The Microscope 34
z'm}p 3 Interference 37
#Z1-+X8P 3.1 Introduction 37
j{OA%G(I 3.2 General Description 37
b'\Q/;oz> 3.3 Coherence 38
'";#v. ! 3.4 Interference between two Plane Waves 41
sJ|pR=g)! 3.4.1 Laser Doppler Velocimetry (LDV) 45
c 9f"5~ 3.5 Interference between other Waves 46
]B,tCBt 3.6 Interferometry 49
h40;Q<D 3.6.1 Wavefront Division 50
*sOb I(& 3.6.2 Amplitude Division 51
{lWV H 3.6.3 The Dual-Frequency Michelson Interferometer 54
k}v`UiGM 3.6.4 Heterodyne (Homodyne) Detection 55
}yK 7LooM 3.7 Spatial and Temporal Coherence 56
a*y9@RC} 3.8 Optical Coherence Tomography 61
;.uYWP|9 4 Diffraction 67
M !'d 4.1 Introduction 67
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w`4r 4.2 Diffraction from a Single Slit 67
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-}%J3j|R: 4.3.1 The Grating Equation. Amplitude Transmittance 70
IqYJ 4.3.2 The Spatial Frequency Spectrum 73
q13fmK(n-5 4.4 Fourier Optics 75
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3I 4.5 Optical Filtering 76
P)`^rJ6 4.5.1 Practical Filtering Set-Ups 78
E xhih^[_ 4.6 Physical Optics Description
&^"Ru?MK of Image Formation 81
Zu,:}+niU 4.6.1 The Coherent Transfer Function 83
rP4T;Clout 4.6.2 The Incoherent Transfer Function 85
OP1` !P y 4.6.3 The Depth of Focus 88
j**[[ 4.7 The Phase-Modulated Sinusoidal Grating 89
p
qz~9y~ 5 Light Sources and Detectors 99
p75 o1RU 5.1 Introduction 99
FB[b]+t`D{ 5.2 Radiometry. Photometry 99
#@B"E2F 5.2.1 Lambertian Surface 102
G 1 "QX 5.2.2 Blackbody Radiator 103
3P6O] x<-? 5.2.3 Examples 105
]gq)%T] 5.3 Incoherent Light Sources 108
euB 1}M 5.4 Coherent Light Sources 109
BuV71/Vb{Q 5.4.1 Stimulated Emission 109
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_O5^=BP 5.4.2 Gas Lasers 112
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gC 5.4.3 Liquid Lasers 114
hN2A%ds*(j 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
}n==^2 5.4.5 Solid-State Lasers 117
%Xd* 2q4* 5.4.6 Other Lasers 119
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