Optical Metrology Third Edition \&U"7gSL )Y"t$Iw" Kjell J. G˚asvik
,u!_mV Spectra Vision AS, Trondheim, Norway
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A0Q1"b= Ik@MIxLK Preface to the Third Edition xi
%o`Cp64`Q 1Basics 1
Mko,((>I1 1.1 Introduction 1
~q}]/0-m 1.2 Wave Motion. The Electromagnetic Spectrum 1
Ri}JM3\J 1.3 The Plane Wave. Light Rays 3
}:1qK67S 1.4 Phase Difference 4
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9 WHarv2 @ 1.6 Oblique Incidence of A Plane Wave 5
/b6j<]H 1.7 The Spherical Wave 7
o =F!&]+ 1.8 The Intensity 8
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1.9 Geometrical Optics 8
w( ic$ 1.10 The Simple Convex (Positive) Lens 10
fSGaUBi q} 1.11 A Plane-Wave Set-Up 11
Eh[NKgYL 2 Gaussian Optics 15
C\|HN=2eh 2.1 Introduction 15
};*&;GFe 2.2 Refraction at a Spherical Surface 15
GkKoc v 2.2.1 Examples 19
Q qcAmp 2.3 The General Image-Forming System 19
W#wC 2.4 The Image-Formation Process 21
u!b0 <E 2.5 Reflection at a Spherical Surface 23
7]hRAhJ8I 2.6 Aspheric Lenses 25
tMo=q7ig 2.7 Stops and Apertures 26
a`Q-5* \;z 2.8 Lens Aberrations. Computer Lens Design 28
6c}nP[6| 2.9 Imaging and The Lens Formula 29
'[b w7T 2.10 Standard Optical Systems 30
5 L-6@@/ 2.10.1 Afocal Systems. The Telescope 30
y@Td]6|f 2.10.2 The Simple Magnifier 32
[kPl7[ OL 2.10.3 The Microscope 34
w2K>k/v{- 3 Interference 37
'%a:L^a? 3.1 Introduction 37
1z@ ncqe 3.2 General Description 37
59?$9}ob 3.3 Coherence 38
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3.4 Interference between two Plane Waves 41
P{,=a]x,mz 3.4.1 Laser Doppler Velocimetry (LDV) 45
ntZHO}' 3.5 Interference between other Waves 46
gpCWXz')i 3.6 Interferometry 49
`|:` yl 3.6.1 Wavefront Division 50
q-e3 ;$ 3.6.2 Amplitude Division 51
cQ0+kX< 3.6.3 The Dual-Frequency Michelson Interferometer 54
0 Gq<APtr 3.6.4 Heterodyne (Homodyne) Detection 55
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1NK,:m 4 Diffraction 67
]_4HtcL4 4.1 Introduction 67
+V#dJ[,8;. 4.2 Diffraction from a Single Slit 67
|s!n7%|,7 4.3 Diffraction from a Grating 70
5[^Rf' wy 4.3.1 The Grating Equation. Amplitude Transmittance 70
ZPH atC 4.3.2 The Spatial Frequency Spectrum 73
\r &(l1R 4.4 Fourier Optics 75
[Fr <tKtB 4.5 Optical Filtering 76
q c6d,z/ 4.5.1 Practical Filtering Set-Ups 78
^5-SL?E 4.6 Physical Optics Description
sT91>'& of Image Formation 81
<In+V 4.6.1 The Coherent Transfer Function 83
0EC/l
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yeV|j\TJI. 4.6.3 The Depth of Focus 88
/qd~|[Kx: 4.7 The Phase-Modulated Sinusoidal Grating 89
?6:e%YT 5 Light Sources and Detectors 99
"}< baz 5.1 Introduction 99
s6I/%R3 5.2 Radiometry. Photometry 99
e ,A9N%M 5.2.1 Lambertian Surface 102
D]K?ntS[* 5.2.2 Blackbody Radiator 103
OL623jQX 5.2.3 Examples 105
p Acu{5#7 5.3 Incoherent Light Sources 108
AHLXmQl 5.4 Coherent Light Sources 109
U@)WTH6d 5.4.1 Stimulated Emission 109
8`q"] BQN 5.4.2 Gas Lasers 112
\%.&$z3wz 5.4.3 Liquid Lasers 114
RNX>I,2sh 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
u"kB`|| ( 5.4.5 Solid-State Lasers 117
w.Go]dpK 5.4.6 Other Lasers 119
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