Optical Metrology Third Edition tr< Nm6! J\ +0[~~ Kjell J. G˚asvik
cqQ#p2<% Spectra Vision AS, Trondheim, Norway
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pmuvg6@h dq(uVW^&ae Preface to the Third Edition xi
CDsSr Khx 1Basics 1
LInz<bc<( 1.1 Introduction 1
,]|#[ 8 1.2 Wave Motion. The Electromagnetic Spectrum 1
dG@%jD) 1.3 The Plane Wave. Light Rays 3
a!a-b~#cx 1.4 Phase Difference 4
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: 1.5 Complex Notation. Complex Amplitude 5
,)0H3t 1.6 Oblique Incidence of A Plane Wave 5
;Y 00TGU 1.7 The Spherical Wave 7
uZ NTHD 1.8 The Intensity 8
v\c>b:AofD 1.9 Geometrical Optics 8
%'b M){ 1.10 The Simple Convex (Positive) Lens 10
~-ia+A6GIV 1.11 A Plane-Wave Set-Up 11
<CS(c|7 2 Gaussian Optics 15
5 h-@ |t 2.1 Introduction 15
2M.fLQ? 2.2 Refraction at a Spherical Surface 15
bGN: =Y' 2.2.1 Examples 19
`95r0t0hh\ 2.3 The General Image-Forming System 19
&-;4.op 2.4 The Image-Formation Process 21
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. 2.5 Reflection at a Spherical Surface 23
+9M^7 /}H 2.6 Aspheric Lenses 25
K* %9 )hq 2.7 Stops and Apertures 26
caIL&G, 2.8 Lens Aberrations. Computer Lens Design 28
SEo'(-5 2.9 Imaging and The Lens Formula 29
Xnt~]k\" 2.10 Standard Optical Systems 30
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TQ 2.10.1 Afocal Systems. The Telescope 30
o*-)Tq8GHE 2.10.2 The Simple Magnifier 32
QX!-B 2.10.3 The Microscope 34
U bXh,QEG* 3 Interference 37
dzA RI` 3.1 Introduction 37
`tB gH_$M 3.2 General Description 37
caU0\VS 3.3 Coherence 38
%aHB"vi6 3.4 Interference between two Plane Waves 41
$:8x(&+/@ 3.4.1 Laser Doppler Velocimetry (LDV) 45
>tYm+coS 3.5 Interference between other Waves 46
/z4$gb7Y 3.6 Interferometry 49
Jb0` 42 3.6.1 Wavefront Division 50
zZ7;jyD 3.6.2 Amplitude Division 51
7S- ys+ 3.6.3 The Dual-Frequency Michelson Interferometer 54
*F+KqZ.2 3.6.4 Heterodyne (Homodyne) Detection 55
-f3p U:G8 3.7 Spatial and Temporal Coherence 56
XeW< B0~ 3.8 Optical Coherence Tomography 61
xqeyD* s 4 Diffraction 67
:G [|CPm- 4.1 Introduction 67
.7Dtm<K# 4.2 Diffraction from a Single Slit 67
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4.3 Diffraction from a Grating 70
9Z|jx y 4.3.1 The Grating Equation. Amplitude Transmittance 70
Q! o'}nA 4.3.2 The Spatial Frequency Spectrum 73
5-|:^hU9 4.4 Fourier Optics 75
zvvhF N2s 4.5 Optical Filtering 76
"~#3& 3HVS 4.5.1 Practical Filtering Set-Ups 78
Tre]"2l 4.6 Physical Optics Description
&T+atL `N of Image Formation 81
Vr jc~>X 4.6.1 The Coherent Transfer Function 83
wu7Lk3 4.6.2 The Incoherent Transfer Function 85
$~~Jw] 4.6.3 The Depth of Focus 88
'vVQg 4.7 The Phase-Modulated Sinusoidal Grating 89
(lXGmx8 5 Light Sources and Detectors 99
61Bwb]\f/| 5.1 Introduction 99
Mz9 r5 5.2 Radiometry. Photometry 99
L(/e&J@>< 5.2.1 Lambertian Surface 102
qaqBOHI6G 5.2.2 Blackbody Radiator 103
++bf#qS<8D 5.2.3 Examples 105
LSm$dK 5.3 Incoherent Light Sources 108
J & o |QG 5.4 Coherent Light Sources 109
0Be < X 5.4.1 Stimulated Emission 109
N"pc,Q\xU 5.4.2 Gas Lasers 112
*!4Z#Y 5.4.3 Liquid Lasers 114
3YeG$^y" 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
fWCo;4<5? 5.4.5 Solid-State Lasers 117
_mzW'~9wN 5.4.6 Other Lasers 119
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