Optical Metrology Third Edition J!QzF)$4J wNuS'P_(:T Kjell J. G˚asvik
Q-[^!RAK? Spectra Vision AS, Trondheim, Norway
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; b2)WM: Xf.w( - Preface to the Third Edition xi
5@+8*Fdk 1Basics 1
5Dy800.B2 1.1 Introduction 1
/:a~;i 1.2 Wave Motion. The Electromagnetic Spectrum 1
sa~.qmqu 1.3 The Plane Wave. Light Rays 3
>s E5zj|V 1.4 Phase Difference 4
Aa5IccR 1.5 Complex Notation. Complex Amplitude 5
/hue]ZaQq 1.6 Oblique Incidence of A Plane Wave 5
<dTo-P 1.7 The Spherical Wave 7
lA39$oJ 1.8 The Intensity 8
8KpG0DC 1.9 Geometrical Optics 8
|5}{4k~9J 1.10 The Simple Convex (Positive) Lens 10
2#nn}HEOC 1.11 A Plane-Wave Set-Up 11
/X i:k 2 Gaussian Optics 15
jZ < *XX 2.1 Introduction 15
^P-!pK* 2.2 Refraction at a Spherical Surface 15
C!SB5G>OH 2.2.1 Examples 19
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:s6W%W1* 2.3 The General Image-Forming System 19
P
7 [p$Z 2.4 The Image-Formation Process 21
BCya5!uy 2.5 Reflection at a Spherical Surface 23
5Mb1 ==/R 2.6 Aspheric Lenses 25
%Gn(b 1X 2.7 Stops and Apertures 26
%m a1LN[ 2.8 Lens Aberrations. Computer Lens Design 28
{y|y68y0+ 2.9 Imaging and The Lens Formula 29
EIl _QV6 2.10 Standard Optical Systems 30
O{rgZ/4Au 2.10.1 Afocal Systems. The Telescope 30
a pUV6h-v 2.10.2 The Simple Magnifier 32
5:f}bW* 2.10.3 The Microscope 34
l\5}\9yS 3 Interference 37
d]h[]Su/? 3.1 Introduction 37
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% .I=| 3.2 General Description 37
W K# lE&V3 3.3 Coherence 38
H7)(<6b,z 3.4 Interference between two Plane Waves 41
vKDPg p<j 3.4.1 Laser Doppler Velocimetry (LDV) 45
U %Aj~K^b 3.5 Interference between other Waves 46
T7n;Bf 3.6 Interferometry 49
dL")E|\\k 3.6.1 Wavefront Division 50
Dw{C_e 3.6.2 Amplitude Division 51
Hu x#v>e 3.6.3 The Dual-Frequency Michelson Interferometer 54
cGC&O%`i,\ 3.6.4 Heterodyne (Homodyne) Detection 55
_y `'T;~OY 3.7 Spatial and Temporal Coherence 56
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3.8 Optical Coherence Tomography 61
0; OpT0 4 Diffraction 67
w IT`OT6Q 4.1 Introduction 67
v}-'L#6 4.2 Diffraction from a Single Slit 67
@ky5X V 4.3 Diffraction from a Grating 70
6R@
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~@R=]l" 4.3.2 The Spatial Frequency Spectrum 73
/NLpk7r[\q 4.4 Fourier Optics 75
0_Etm83Wq6 4.5 Optical Filtering 76
f&^K>Jt1@# 4.5.1 Practical Filtering Set-Ups 78
l4u`R(!n5 4.6 Physical Optics Description
av
wU)6L of Image Formation 81
qX:54$t 4.6.1 The Coherent Transfer Function 83
9ZG.%+l 4.6.2 The Incoherent Transfer Function 85
bQ0m=BzF 4.6.3 The Depth of Focus 88
w0moC9#$? 4.7 The Phase-Modulated Sinusoidal Grating 89
k `.-PU 5 Light Sources and Detectors 99
-CY?~W L& 5.1 Introduction 99
Lt H;#Q 5.2 Radiometry. Photometry 99
34]f[jJ| 5.2.1 Lambertian Surface 102
[F+l Vb 5.2.2 Blackbody Radiator 103
V|xR`Q 5.2.3 Examples 105
IcPIOCmOc 5.3 Incoherent Light Sources 108
^#exs Xy 5.4 Coherent Light Sources 109
ykl./uY' 5.4.1 Stimulated Emission 109
^5u} 5.4.2 Gas Lasers 112
e|AJxn] 5.4.3 Liquid Lasers 114
} RG 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
VILzx+v
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fVo)# Bj 5.4.6 Other Lasers 119
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