Optical Metrology Third Edition ,h3,& , a3Z()|t> Kjell J. G˚asvik
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z9#jXC#OdN [MC}zd'/ Preface to the Third Edition xi
U_B`SS 1Basics 1
rUiUv (q 1.1 Introduction 1
5U<o%+^El 1.2 Wave Motion. The Electromagnetic Spectrum 1
i 3Nt?FSN 1.3 The Plane Wave. Light Rays 3
H<b4B$/ 1.4 Phase Difference 4
^e YJ7&t 1.5 Complex Notation. Complex Amplitude 5
r:^ `005 1.6 Oblique Incidence of A Plane Wave 5
g ]} ] /\ 1.7 The Spherical Wave 7
Ke& fTK 1.8 The Intensity 8
)^^}!U#|e 1.9 Geometrical Optics 8
+fIy eX 1.10 The Simple Convex (Positive) Lens 10
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}>j1j^c1=' 2 Gaussian Optics 15
zgpPu4t 2.1 Introduction 15
HoM8V"8B 2.2 Refraction at a Spherical Surface 15
+n`^ W( 2.2.1 Examples 19
z#&qWO 2.3 The General Image-Forming System 19
^h|'\-d\ 2.4 The Image-Formation Process 21
;#"`]k hd 2.5 Reflection at a Spherical Surface 23
\@n/L{}(@ 2.6 Aspheric Lenses 25
`Sj8<O} 2.7 Stops and Apertures 26
JeCEj=_Z 2.8 Lens Aberrations. Computer Lens Design 28
zjJyc? 2.9 Imaging and The Lens Formula 29
2,%ne ( 2.10 Standard Optical Systems 30
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06B)|s 2.10.1 Afocal Systems. The Telescope 30
UuA=qWC 2.10.2 The Simple Magnifier 32
sAc)X!} 2.10.3 The Microscope 34
*KV] MdS 3 Interference 37
4 ]8PF 3.1 Introduction 37
EA>$t \z 3.2 General Description 37
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tv|=` ~Y 3.4 Interference between two Plane Waves 41
PwNLJj+% 3.4.1 Laser Doppler Velocimetry (LDV) 45
I 3aE g 3.5 Interference between other Waves 46
||,;0 7 3.6 Interferometry 49
N4 mQN90t 3.6.1 Wavefront Division 50
/ci.IT$Q^ 3.6.2 Amplitude Division 51
Ap> n4~ 3.6.3 The Dual-Frequency Michelson Interferometer 54
AAl`bhx'n 3.6.4 Heterodyne (Homodyne) Detection 55
gf@'d.W} 3.7 Spatial and Temporal Coherence 56
IX3U\_I# 3.8 Optical Coherence Tomography 61
Y c5$915 4 Diffraction 67
AU$5" kBE 4.1 Introduction 67
J<zg 'Jk^ 4.2 Diffraction from a Single Slit 67
,wE M 4.3 Diffraction from a Grating 70
B .mV\W 4.3.1 The Grating Equation. Amplitude Transmittance 70
cIp h$@ 4.3.2 The Spatial Frequency Spectrum 73
F e .*O` 4.4 Fourier Optics 75
fn a>> 4.5 Optical Filtering 76
(/U1J 4.5.1 Practical Filtering Set-Ups 78
bB-v ar 4.6 Physical Optics Description
,0bM* qob of Image Formation 81
^@2Vh*k 4.6.1 The Coherent Transfer Function 83
ErC[Zh"'' 4.6.2 The Incoherent Transfer Function 85
cG:`Z j~4 4.6.3 The Depth of Focus 88
v_0!uT5~NE 4.7 The Phase-Modulated Sinusoidal Grating 89
K7c8_g*>4= 5 Light Sources and Detectors 99
|5Pbc&mH8A 5.1 Introduction 99
=jt_1 L4 5.2 Radiometry. Photometry 99
beE % %C]X 5.2.1 Lambertian Surface 102
D$E9%'ir 5.2.2 Blackbody Radiator 103
:F=nb+HZ 5.2.3 Examples 105
;G]'}$`/q 5.3 Incoherent Light Sources 108
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p%1m&/ `F 5.4.1 Stimulated Emission 109
ud D[hPJd 5.4.2 Gas Lasers 112
qGCg3u6 5.4.3 Liquid Lasers 114
a7G2C oM8 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
XD }_ 9p 5.4.5 Solid-State Lasers 117
rbbu SI 5.4.6 Other Lasers 119
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