Optical Metrology Third Edition Ox%.We 5 '7yVvd Kjell J. G˚asvik
Qz4n %| Spectra Vision AS, Trondheim, Norway
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o |"iW" + $ISx0 l~ Preface to the Third Edition xi
~{00moN"m 1Basics 1
w:3CWF4q] 1.1 Introduction 1
?' /#Gt` 1.2 Wave Motion. The Electromagnetic Spectrum 1
`gE_ u 1.3 The Plane Wave. Light Rays 3
w|[{xn^R 1.4 Phase Difference 4
"QLp%B,A 1.5 Complex Notation. Complex Amplitude 5
4S\S t < 1.6 Oblique Incidence of A Plane Wave 5
u ;Rm /. 1.7 The Spherical Wave 7
E oh{+>:6 1.8 The Intensity 8
I4Rd2G_ 1.9 Geometrical Optics 8
p/ au.mc 1.10 The Simple Convex (Positive) Lens 10
S]g`Ds< 1.11 A Plane-Wave Set-Up 11
c.{t +OR 2 Gaussian Optics 15
$*qQ/h i 2.1 Introduction 15
:TRhk. 2.2 Refraction at a Spherical Surface 15
i~ITRi@ 2.2.1 Examples 19
f l+dL#] 2.3 The General Image-Forming System 19
E5Zxp3 N 2.4 The Image-Formation Process 21
_)a! g-Do7 2.5 Reflection at a Spherical Surface 23
N?l 2.6 Aspheric Lenses 25
&pFP =|Pq 2.7 Stops and Apertures 26
&'"dYZj{ 2.8 Lens Aberrations. Computer Lens Design 28
,tl(\4n 2.9 Imaging and The Lens Formula 29
JWV n@)s 2.10 Standard Optical Systems 30
7*(K%e"U 2.10.1 Afocal Systems. The Telescope 30
z|v/h UrD 2.10.2 The Simple Magnifier 32
zOn % \ 2.10.3 The Microscope 34
>o4Ih ^VB 3 Interference 37
=v6qr~ 3.1 Introduction 37
$^5 c8wT 3.2 General Description 37
il~A(`+YO 3.3 Coherence 38
<G /a-Z 3.4 Interference between two Plane Waves 41
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n?$ZC~ 3.4.1 Laser Doppler Velocimetry (LDV) 45
8],tGMu 3.5 Interference between other Waves 46
UI_u:a9Q/ 3.6 Interferometry 49
W/G75o~6 3.6.1 Wavefront Division 50
@XN *H- | 3.6.2 Amplitude Division 51
[?S-on. 3.6.3 The Dual-Frequency Michelson Interferometer 54
.q5WK#^ 3.6.4 Heterodyne (Homodyne) Detection 55
> vZ ^D 3.7 Spatial and Temporal Coherence 56
AkA2/7<[ 3.8 Optical Coherence Tomography 61
W;QU6z> 4 Diffraction 67
~mk>9Gp 4.1 Introduction 67
nEfQLkb[| 4.2 Diffraction from a Single Slit 67
=@s {H + 4.3 Diffraction from a Grating 70
LLd5Z44v 4.3.1 The Grating Equation. Amplitude Transmittance 70
Z3N^)j8 4.3.2 The Spatial Frequency Spectrum 73
;6tGRh$b 4.4 Fourier Optics 75
|`Q2K9'4bL 4.5 Optical Filtering 76
I`S?2i2H 4.5.1 Practical Filtering Set-Ups 78
, A;wLI 4.6 Physical Optics Description
[_1K1i"m of Image Formation 81
Z> _F:1x 4.6.1 The Coherent Transfer Function 83
eK =v<X 4.6.2 The Incoherent Transfer Function 85
H'x) [2 4.6.3 The Depth of Focus 88
arb'.:[z^ 4.7 The Phase-Modulated Sinusoidal Grating 89
6rh^?B 5 Light Sources and Detectors 99
VL/KC -6 5.1 Introduction 99
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{LqahO* 5.2.1 Lambertian Surface 102
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* %w8bB 5.2.3 Examples 105
?;ovh nY) 5.3 Incoherent Light Sources 108
(dQsR sA 5.4 Coherent Light Sources 109
2i~zAD' 5.4.1 Stimulated Emission 109
?7\$zn)v# 5.4.2 Gas Lasers 112
:nn(Ndlz9 5.4.3 Liquid Lasers 114
UU DZ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
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Lw 5.4.5 Solid-State Lasers 117
vhL/L?NB$ 5.4.6 Other Lasers 119
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