Optical Metrology Third Edition xDUaHE1co c.0]1 Kjell J. G˚asvik
as# J qE Spectra Vision AS, Trondheim, Norway
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cQn)^jx= FT( iX `YQ Preface to the Third Edition xi
??(Kwtx{ 1Basics 1
n,sY \=vB 1.1 Introduction 1
> H~6NBd5D 1.2 Wave Motion. The Electromagnetic Spectrum 1
2( _= SfQ 1.3 The Plane Wave. Light Rays 3
wVE:X3Ei 1.4 Phase Difference 4
-dG,*0 > 1.5 Complex Notation. Complex Amplitude 5
3~<}bee5|q 1.6 Oblique Incidence of A Plane Wave 5
"xn|zB 1.7 The Spherical Wave 7
y l/a:Q 1.8 The Intensity 8
"{ FoA3g| 1.9 Geometrical Optics 8
${>DhfF 1.10 The Simple Convex (Positive) Lens 10
a:b^!H># 1.11 A Plane-Wave Set-Up 11
lhxdx 2 Gaussian Optics 15
:Eo8v$W\RB 2.1 Introduction 15
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{ 8p\ Y 2.2.1 Examples 19
VMF|iB 2.3 The General Image-Forming System 19
Onw24 & 2.4 The Image-Formation Process 21
]Uh 1l.O 2.5 Reflection at a Spherical Surface 23
6v>z h 2.6 Aspheric Lenses 25
Nn O I:X { 2.7 Stops and Apertures 26
Dft%ip2 2.8 Lens Aberrations. Computer Lens Design 28
;RHNRVP 2.9 Imaging and The Lens Formula 29
!.-.#<<_a 2.10 Standard Optical Systems 30
c{4R*|^ 2.10.1 Afocal Systems. The Telescope 30
"lrA%~3%[P 2.10.2 The Simple Magnifier 32
PU Cx]5 2.10.3 The Microscope 34
tl^ m=(ZQ 3 Interference 37
(3W&A M 3.1 Introduction 37
q% E C 3.2 General Description 37
N"1 Q X6 3.3 Coherence 38
I N_gF_@% 3.4 Interference between two Plane Waves 41
.CS v|:'1 3.4.1 Laser Doppler Velocimetry (LDV) 45
q~O>a0f0 3.5 Interference between other Waves 46
#8UseK 3.6 Interferometry 49
~6HDW 3.6.1 Wavefront Division 50
JJ-i_5\q 3.6.2 Amplitude Division 51
d.cCbr: 3.6.3 The Dual-Frequency Michelson Interferometer 54
RUX8qT(Z 3.6.4 Heterodyne (Homodyne) Detection 55
-_|]N/v\ 3.7 Spatial and Temporal Coherence 56
y \z > /q 3.8 Optical Coherence Tomography 61
7P*Z0% Q 4 Diffraction 67
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m6) 4.1 Introduction 67
YxyG\J \|, 4.2 Diffraction from a Single Slit 67
wT/6aJoX 4.3 Diffraction from a Grating 70
xiCN
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*8UYS A~v 4.3.2 The Spatial Frequency Spectrum 73
Wj O H/$( 4.4 Fourier Optics 75
2LK]Q/WG,+ 4.5 Optical Filtering 76
1Z 6SI>p 4.5.1 Practical Filtering Set-Ups 78
4m /TW) 4.6 Physical Optics Description
O9e.=l of Image Formation 81
j ug'g 4.6.1 The Coherent Transfer Function 83
|D<+X^0' 4.6.2 The Incoherent Transfer Function 85
S &01S X6 4.6.3 The Depth of Focus 88
[+gzdLad 4.7 The Phase-Modulated Sinusoidal Grating 89
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FxtLG,F 5 Light Sources and Detectors 99
p8>R#9 5.1 Introduction 99
7&#m]t^ ^ 5.2 Radiometry. Photometry 99
xFwXW ) 5.2.1 Lambertian Surface 102
?Pnx ~m{%* 5.2.2 Blackbody Radiator 103
D$hQyhz' 5.2.3 Examples 105
~6sE an3p 5.3 Incoherent Light Sources 108
:~33U)?{T 5.4 Coherent Light Sources 109
^#w{/C/n 5.4.1 Stimulated Emission 109
PkJcd-> 5.4.2 Gas Lasers 112
#>bT< 5.4.3 Liquid Lasers 114
4=s9A 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
SSQT ;> 5.4.5 Solid-State Lasers 117
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