Optical Metrology Third Edition S-|)QGxV6 S_IU V) Kjell J. G˚asvik
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Spectra Vision AS, Trondheim, Norway
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mh{1*T$fP [.uG5%fa Preface to the Third Edition xi
428>BQA 1Basics 1
gh8F 2V;< 1.1 Introduction 1
<y NM%P<Oy 1.2 Wave Motion. The Electromagnetic Spectrum 1
[c|]f_ZdK 1.3 The Plane Wave. Light Rays 3
ikv Wh<=>H 1.4 Phase Difference 4
5jgR4a*_v 1.5 Complex Notation. Complex Amplitude 5
5?F__Hx*2 1.6 Oblique Incidence of A Plane Wave 5
ap+JQ@b 1.7 The Spherical Wave 7
/*X2c6 <d 1.8 The Intensity 8
9E>|=d|(d 1.9 Geometrical Optics 8
\}"$ ?d'f 1.10 The Simple Convex (Positive) Lens 10
V^Q#:@0 1.11 A Plane-Wave Set-Up 11
9E"vN 2 Gaussian Optics 15
"q.\>M Cv 2.1 Introduction 15
.xm.DRk3 2.2 Refraction at a Spherical Surface 15
V#S9H!hm$ 2.2.1 Examples 19
K)DDk9* 2.3 The General Image-Forming System 19
P>NF.B Cq 2.4 The Image-Formation Process 21
a@UZb 2.5 Reflection at a Spherical Surface 23
SfaQvstN 2.6 Aspheric Lenses 25
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T{3o;A 2.7 Stops and Apertures 26
|m^k_d!d 2.8 Lens Aberrations. Computer Lens Design 28
M$>1L 2.9 Imaging and The Lens Formula 29
rp!oO>F 2.10 Standard Optical Systems 30
{_ i\f ]L 2.10.1 Afocal Systems. The Telescope 30
v{ 0= 2.10.2 The Simple Magnifier 32
%R}.#,Suo 2.10.3 The Microscope 34
5BlR1* 3 Interference 37
U J CYs`y 3.1 Introduction 37
c*L0@Ak% 3.2 General Description 37
yl7&5)b#9 3.3 Coherence 38
{pnS Q 3.4 Interference between two Plane Waves 41
~nh:s|l6%M 3.4.1 Laser Doppler Velocimetry (LDV) 45
<FcG
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XH }\15X 3.6 Interferometry 49
QSszn`e 3.6.1 Wavefront Division 50
8TLgNQP 3.6.2 Amplitude Division 51
QD:{U8YbF$ 3.6.3 The Dual-Frequency Michelson Interferometer 54
o4 K ~ 3.6.4 Heterodyne (Homodyne) Detection 55
2ZG5<"DQ" 3.7 Spatial and Temporal Coherence 56
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;7 E7!t^ 4 Diffraction 67
N`L0Vd 4.1 Introduction 67
I+[>I =ewa 4.2 Diffraction from a Single Slit 67
>aj7||K 4.3 Diffraction from a Grating 70
:7!0OVQla\ 4.3.1 The Grating Equation. Amplitude Transmittance 70
,^w?6?,&l} 4.3.2 The Spatial Frequency Spectrum 73
v*SEb~[ 4.4 Fourier Optics 75
+wN^c#~7 4.5 Optical Filtering 76
8&?s#5zA 4.5.1 Practical Filtering Set-Ups 78
a1t4Dd 4.6 Physical Optics Description
#xQr<p$L6 of Image Formation 81
ZjQ
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- bT)]gA2 4.6.2 The Incoherent Transfer Function 85
a 1+#3X. 4.6.3 The Depth of Focus 88
2.l Z:VLN 4.7 The Phase-Modulated Sinusoidal Grating 89
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K 5 Light Sources and Detectors 99
Y&d00 5.1 Introduction 99
jv %kOovj 5.2 Radiometry. Photometry 99
-EkWs/'h 5.2.1 Lambertian Surface 102
<SgM@0m 5.2.2 Blackbody Radiator 103
t>urc 5.2.3 Examples 105
W&& ;:Fr 5.3 Incoherent Light Sources 108
f78An 8 5.4 Coherent Light Sources 109
jr /pj? 5.4.1 Stimulated Emission 109
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s;S ?;(QI 5.4.3 Liquid Lasers 114
T arIPp 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
}L+ L"l& 5.4.5 Solid-State Lasers 117
w$z }r 5.4.6 Other Lasers 119
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