Optical Metrology Third Edition CEYHD ?9k8 uAzV a!) Kjell J. G˚asvik
{aGQ[MH\9 Spectra Vision AS, Trondheim, Norway
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5tP0dQYd 5y=X?hF~) Preface to the Third Edition xi
TUy*wp9 1Basics 1
lxbbyy25 1.1 Introduction 1
\5s!lv*& 1.2 Wave Motion. The Electromagnetic Spectrum 1
F__DPEAc_ 1.3 The Plane Wave. Light Rays 3
s<: "rw` 1.4 Phase Difference 4
LrF'Hd=O 1.5 Complex Notation. Complex Amplitude 5
V xjHB?) 1.6 Oblique Incidence of A Plane Wave 5
@=Ly#HuUM 1.7 The Spherical Wave 7
tjDVU7um 1.8 The Intensity 8
=:~~RqHl 1.9 Geometrical Optics 8
k]R O=/ ?M 1.10 The Simple Convex (Positive) Lens 10
4$IPz7 1.11 A Plane-Wave Set-Up 11
+R2 2 Gaussian Optics 15
RF6(n8["MW 2.1 Introduction 15
vm8QKPy 2.2 Refraction at a Spherical Surface 15
Esw&ScBOP 2.2.1 Examples 19
r}f -.Fo 2.3 The General Image-Forming System 19
r+m8#uR 2.4 The Image-Formation Process 21
K/MI D H 2.5 Reflection at a Spherical Surface 23
S_?}H 2.6 Aspheric Lenses 25
He#+zE ; 2.7 Stops and Apertures 26
zXcSE" 2.8 Lens Aberrations. Computer Lens Design 28
((.PPOdJV 2.9 Imaging and The Lens Formula 29
LYWQqxB 2.10 Standard Optical Systems 30
s4~c>voQB 2.10.1 Afocal Systems. The Telescope 30
Ao{wd1 2.10.2 The Simple Magnifier 32
QR 4v6*VpD 2.10.3 The Microscope 34
YXV![gw0 3 Interference 37
7t@jj%F 3.1 Introduction 37
gkBat(Uc 3.2 General Description 37
ANT^&NjJ7 3.3 Coherence 38
NNe'5q9 3.4 Interference between two Plane Waves 41
Ij=hmTl{P 3.4.1 Laser Doppler Velocimetry (LDV) 45
HkEp}R 3.5 Interference between other Waves 46
%A82{ 3.6 Interferometry 49
B Am{Gb 3.6.1 Wavefront Division 50
{\]SvoJnJ 3.6.2 Amplitude Division 51
~0/=5 dC 3.6.3 The Dual-Frequency Michelson Interferometer 54
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3.6.4 Heterodyne (Homodyne) Detection 55
j1/J9F' 3.7 Spatial and Temporal Coherence 56
:&_@U $ 3.8 Optical Coherence Tomography 61
CZ]+B8Pl(x 4 Diffraction 67
|2n2 4.1 Introduction 67
uO"@YX/ 4.2 Diffraction from a Single Slit 67
Nkv2?o>l 4.3 Diffraction from a Grating 70
nHZ 4):` 4.3.1 The Grating Equation. Amplitude Transmittance 70
F+hsIsQ 4.3.2 The Spatial Frequency Spectrum 73
<#`<Ys3b*! 4.4 Fourier Optics 75
E(u[? 4.5 Optical Filtering 76
nH[@EL 4.5.1 Practical Filtering Set-Ups 78
"B +M5B0Z 4.6 Physical Optics Description
QF%@MK0zC of Image Formation 81
i~K~Czmok+ 4.6.1 The Coherent Transfer Function 83
.' X$SF` 4.6.2 The Incoherent Transfer Function 85
g{<3*, 4.6.3 The Depth of Focus 88
|W#^L`!G 4.7 The Phase-Modulated Sinusoidal Grating 89
oxGOn(' 5 Light Sources and Detectors 99
Ma{|+\Q.Z 5.1 Introduction 99
pdtK3Pf 5.2 Radiometry. Photometry 99
WBC' ~ h<@ 5.2.1 Lambertian Surface 102
B623B HwS 5.2.2 Blackbody Radiator 103
w7dG=a& 5.2.3 Examples 105
DbOWnXV "o 5.3 Incoherent Light Sources 108
,j5fzA 5.4 Coherent Light Sources 109
:=~([oSNW" 5.4.1 Stimulated Emission 109
[dt1%DD`M 5.4.2 Gas Lasers 112
u !g <y 5.4.3 Liquid Lasers 114
:j9; P7&"? 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
*d,SI[c%e 5.4.5 Solid-State Lasers 117
CrqWlO 5.4.6 Other Lasers 119
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