Optical Metrology Third Edition ||TZ[l KaOXqFT= Kjell J. G˚asvik
YU+P+m2X Spectra Vision AS, Trondheim, Norway
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A & B|n!;b %g 5#q64 Preface to the Third Edition xi
M=95E $6 1Basics 1
z^T;d^OJc 1.1 Introduction 1
E^5 1.2 Wave Motion. The Electromagnetic Spectrum 1
fibudkg'> 1.3 The Plane Wave. Light Rays 3
Qnt }:M + 1.4 Phase Difference 4
40`Qsv0# 1.5 Complex Notation. Complex Amplitude 5
Wf5 ;~RJC? 1.6 Oblique Incidence of A Plane Wave 5
{ g`!2" 1.7 The Spherical Wave 7
4|5;nxkGm8 1.8 The Intensity 8
NT5##XOB 1.9 Geometrical Optics 8
f_LXp $n 1.10 The Simple Convex (Positive) Lens 10
0g=vMLi 1.11 A Plane-Wave Set-Up 11
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0I 2 Gaussian Optics 15
;~$Q ;m 1 2.1 Introduction 15
F;_o `h 2.2 Refraction at a Spherical Surface 15
eg?p )| 2.2.1 Examples 19
N TDmOS\, 2.3 The General Image-Forming System 19
{`
bX*] 2.4 The Image-Formation Process 21
[PiMu,O[v 2.5 Reflection at a Spherical Surface 23
0[<' ygu 2.6 Aspheric Lenses 25
\h s7>5O^K 2.7 Stops and Apertures 26
ujBm"p_| 2.8 Lens Aberrations. Computer Lens Design 28
>FHx], 2.9 Imaging and The Lens Formula 29
j r .{M 2.10 Standard Optical Systems 30
ZBx,'ph}4 2.10.1 Afocal Systems. The Telescope 30
iR{@~JN=) 2.10.2 The Simple Magnifier 32
#?D[WTV 2.10.3 The Microscope 34
/y4A?*w 6 3 Interference 37
KQ6][2- 3.1 Introduction 37
?6ss SjR} 3.2 General Description 37
NYg& 8 s. 3.3 Coherence 38
nm% qm 3.4 Interference between two Plane Waves 41
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_7;G$\^&. 3.5 Interference between other Waves 46
lFcHE c 3.6 Interferometry 49
qR cg|']R 3.6.1 Wavefront Division 50
;g+fY 6 3.6.2 Amplitude Division 51
!blG c$kC 3.6.3 The Dual-Frequency Michelson Interferometer 54
S5F5Tr;TN 3.6.4 Heterodyne (Homodyne) Detection 55
@cxM#N8e 3.7 Spatial and Temporal Coherence 56
* KiY+_8> 3.8 Optical Coherence Tomography 61
:@E^oNKa0 4 Diffraction 67
<6hs<qXqi 4.1 Introduction 67
Yc~l Yz+b 4.2 Diffraction from a Single Slit 67
2sG1Hox 4.3 Diffraction from a Grating 70
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};"_Ku4#- 4.4 Fourier Optics 75
nZL!}3@< 4.5 Optical Filtering 76
?y>v"1+ 4.5.1 Practical Filtering Set-Ups 78
?5lO1( 4.6 Physical Optics Description
&,Loq r of Image Formation 81
&6Lh>n( 4.6.1 The Coherent Transfer Function 83
] {{%d4 4.6.2 The Incoherent Transfer Function 85
32anmVnf 4.6.3 The Depth of Focus 88
?aBAmyxm 4.7 The Phase-Modulated Sinusoidal Grating 89
ngd4PN>{4 5 Light Sources and Detectors 99
^c.pvC"4j 5.1 Introduction 99
^e =xEZD 5.2 Radiometry. Photometry 99
iGj,B =35 5.2.1 Lambertian Surface 102
1g,gilc 5.2.2 Blackbody Radiator 103
/RhM6N 5.2.3 Examples 105
u| "YS-dH 5.3 Incoherent Light Sources 108
Td 7Q%7p: 5.4 Coherent Light Sources 109
7oUo [ 5.4.1 Stimulated Emission 109
aY pc\jJ 5.4.2 Gas Lasers 112
>}]bKq 5.4.3 Liquid Lasers 114
F2 <Q~g Q; 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
(~F}O 5.4.5 Solid-State Lasers 117
&\ 6(iL 5.4.6 Other Lasers 119
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