Optical Metrology Third Edition I&v B\A @%TQ/L^| Kjell J. G˚asvik
^Uf`w7"iY Spectra Vision AS, Trondheim, Norway
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H}$#aXEAn lu{}j4 Preface to the Third Edition xi
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nTm 1Basics 1
EtL= _D- 1.1 Introduction 1
>2 |#b 1.2 Wave Motion. The Electromagnetic Spectrum 1
&B.r&K& 1.3 The Plane Wave. Light Rays 3
)N=wJN 1 1.4 Phase Difference 4
*\`C! r 1.5 Complex Notation. Complex Amplitude 5
hT_snb;ow 1.6 Oblique Incidence of A Plane Wave 5
i3GvTg-X 1.7 The Spherical Wave 7
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st 1.8 The Intensity 8
j[HKC0C 6 1.9 Geometrical Optics 8
u)V* o 1.10 The Simple Convex (Positive) Lens 10
Z5U~g? 1.11 A Plane-Wave Set-Up 11
~\/ J& 2 Gaussian Optics 15
4H,DG`[Mo 2.1 Introduction 15
'l}3Iua6qk 2.2 Refraction at a Spherical Surface 15
ZN)/doK 2.2.1 Examples 19
-Rvxjy)[N 2.3 The General Image-Forming System 19
h}oQr0"c 2.4 The Image-Formation Process 21
::R^ w" 2.5 Reflection at a Spherical Surface 23
\?g%>D:O; 2.6 Aspheric Lenses 25
%MIu;u FR 2.7 Stops and Apertures 26
9@j~1G% ^ 2.8 Lens Aberrations. Computer Lens Design 28
M&K@><6k,k 2.9 Imaging and The Lens Formula 29
c`>\R<Z ] 2.10 Standard Optical Systems 30
w iq{ Jo# 2.10.1 Afocal Systems. The Telescope 30
P] TT 2.10.2 The Simple Magnifier 32
0{ ,zE 2.10.3 The Microscope 34
F>M$|Sc2 3 Interference 37
i~,k2*o 3.1 Introduction 37
JC#@sJ4az) 3.2 General Description 37
T 'V(%\w 3.3 Coherence 38
4/jY;YN,2 3.4 Interference between two Plane Waves 41
oY ] VP+b! 3.4.1 Laser Doppler Velocimetry (LDV) 45
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j@ "`!uPz 3.6 Interferometry 49
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ELPJ}moWZ 3.6.3 The Dual-Frequency Michelson Interferometer 54
2 9]8[Z,4 3.6.4 Heterodyne (Homodyne) Detection 55
QA3l:D}u 3.7 Spatial and Temporal Coherence 56
Z^|C~lp;n 3.8 Optical Coherence Tomography 61
U VLcR 4 Diffraction 67
{$t*Mb0 4.1 Introduction 67
^Pf&C0xXv 4.2 Diffraction from a Single Slit 67
zbR.Lb 4.3 Diffraction from a Grating 70
x o%iL 4.3.1 The Grating Equation. Amplitude Transmittance 70
NWg\{a 4.3.2 The Spatial Frequency Spectrum 73
HB}gn2 .1& 4.4 Fourier Optics 75
PYUY bRn 4.5 Optical Filtering 76
9JtvHUkO 4.5.1 Practical Filtering Set-Ups 78
V588Leb? 4.6 Physical Optics Description
Yfal sQ8 of Image Formation 81
K4y YNlY 4.6.1 The Coherent Transfer Function 83
5 Qe Gx3' 4.6.2 The Incoherent Transfer Function 85
KC u6:)6 ' 4.6.3 The Depth of Focus 88
M~Slc*_% 4.7 The Phase-Modulated Sinusoidal Grating 89
;!}SgzSH} 5 Light Sources and Detectors 99
h=tu +pn 5.1 Introduction 99
Psa8OJa n 5.2 Radiometry. Photometry 99
p^:Lj 9Qax 5.2.1 Lambertian Surface 102
9H}&Ri% 5.2.2 Blackbody Radiator 103
7`/qL " 5.2.3 Examples 105
c 2@@Rd~M 5.3 Incoherent Light Sources 108
OW}A48X[+ 5.4 Coherent Light Sources 109
+ m.8*^ 5.4.1 Stimulated Emission 109
$iPN5@F 5.4.2 Gas Lasers 112
tb{{oxa,k 5.4.3 Liquid Lasers 114
_pGv iGR 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
}ELCnN 5.4.5 Solid-State Lasers 117
>l1Yhxd_0* 5.4.6 Other Lasers 119
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