Optical Metrology Third Edition T\6dm/5 j|DsG, Kjell J. G˚asvik
hP%M?M KC Spectra Vision AS, Trondheim, Norway
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oQ/E}Zk@ Tj` ,Z5vy Preface to the Third Edition xi
5FPM`hLT 1Basics 1
x*\Y)9Vgy 1.1 Introduction 1
+;(c:@>@, 1.2 Wave Motion. The Electromagnetic Spectrum 1
`t>l:<@% 1.3 The Plane Wave. Light Rays 3
A7Cm5>Y _S 1.4 Phase Difference 4
`iFmrC< 1.5 Complex Notation. Complex Amplitude 5
#K_ii)n 1.6 Oblique Incidence of A Plane Wave 5
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9rA0lqr]5 1.8 The Intensity 8
h ohfE3rd 1.9 Geometrical Optics 8
@|Cz-J;D 1.10 The Simple Convex (Positive) Lens 10
GE:vp>>}` 1.11 A Plane-Wave Set-Up 11
!3c\NbU 2 Gaussian Optics 15
xf\ C|@i 2.1 Introduction 15
I YE~t 2.2 Refraction at a Spherical Surface 15
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? 2.2.1 Examples 19
i(rL|d+' 2.3 The General Image-Forming System 19
Fj 8 z 2.4 The Image-Formation Process 21
xC?6v ' 2.5 Reflection at a Spherical Surface 23
wv>^0\o 2.6 Aspheric Lenses 25
]NQfX[ 2.7 Stops and Apertures 26
xjUT{iwS 2.8 Lens Aberrations. Computer Lens Design 28
g{]0sn# 2.9 Imaging and The Lens Formula 29
Y #ap* 2.10 Standard Optical Systems 30
3V+ ] 9; 2.10.1 Afocal Systems. The Telescope 30
]!W=^! 2.10.2 The Simple Magnifier 32
kf\PioD8 2.10.3 The Microscope 34
r Xt}6[S 3 Interference 37
m^!Z_]A![ 3.1 Introduction 37
:[.vM 3.2 General Description 37
,1.p%UE]> 3.3 Coherence 38
{K~ 'K+TPu 3.4 Interference between two Plane Waves 41
. Bl\Z 3.4.1 Laser Doppler Velocimetry (LDV) 45
M~Tuj1? 3.5 Interference between other Waves 46
+[6G5cH 3.6 Interferometry 49
yM6pd U]i 3.6.1 Wavefront Division 50
UP$.+<vm 3.6.2 Amplitude Division 51
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pP50Cu 3.6.3 The Dual-Frequency Michelson Interferometer 54
Ljm[?*H# 3.6.4 Heterodyne (Homodyne) Detection 55
G{As,`{ 3.7 Spatial and Temporal Coherence 56
p#ZCvPE;uH 3.8 Optical Coherence Tomography 61
F$y$'Rzu_B 4 Diffraction 67
ozyX$tp 4.1 Introduction 67
( U D nsF 4.2 Diffraction from a Single Slit 67
H5/6TX72N 4.3 Diffraction from a Grating 70
rK 8lBy:< 4.3.1 The Grating Equation. Amplitude Transmittance 70
Fk&c=V;SU 4.3.2 The Spatial Frequency Spectrum 73
`P@< 3] 4.4 Fourier Optics 75
<)C#_w)- 4.5 Optical Filtering 76
{r,.!;mHu 4.5.1 Practical Filtering Set-Ups 78
E<rp7~# 4.6 Physical Optics Description
nUaJz Pl of Image Formation 81
.r=4pQ@# 4.6.1 The Coherent Transfer Function 83
>>4qJ%bL 4.6.2 The Incoherent Transfer Function 85
zF`0J 4.6.3 The Depth of Focus 88
<q58uuK 4.7 The Phase-Modulated Sinusoidal Grating 89
~ gJwW+ 5 Light Sources and Detectors 99
KWbI '}_z 5.1 Introduction 99
Po+.&7F 5.2 Radiometry. Photometry 99
i'<[DjMDlm 5.2.1 Lambertian Surface 102
dM.f]-g 5.2.2 Blackbody Radiator 103
A7 {\</Z 5.2.3 Examples 105
''cInTCr 5.3 Incoherent Light Sources 108
B&M%I:i 5.4 Coherent Light Sources 109
1 &jc/*Z" 5.4.1 Stimulated Emission 109
+uF>2b6' 5.4.2 Gas Lasers 112
,C\i^>= 5.4.3 Liquid Lasers 114
8L=HW G!1 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
j<m(PHS e 5.4.5 Solid-State Lasers 117
c1(RuP:S 5.4.6 Other Lasers 119
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