Optical Metrology Third Edition eOF*|9 $p4e8j[EJ Kjell J. G˚asvik
F[yofRN Spectra Vision AS, Trondheim, Norway
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K sE$^` ~%g,Uypi Preface to the Third Edition xi
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([ 1Basics 1
,=4,eCS 1.1 Introduction 1
njg0MZBqA 1.2 Wave Motion. The Electromagnetic Spectrum 1
WysWg7,r 1.3 The Plane Wave. Light Rays 3
*pSnEWwE 1.4 Phase Difference 4
2EZ7Vdz2 1.5 Complex Notation. Complex Amplitude 5
'@ Y@Fs 1.6 Oblique Incidence of A Plane Wave 5
,f>9oOqqA 1.7 The Spherical Wave 7
`iM%R3& 1.8 The Intensity 8
jX8)Ov5Mv 1.9 Geometrical Optics 8
2|& S2uq 1.10 The Simple Convex (Positive) Lens 10
w43b=7 1.11 A Plane-Wave Set-Up 11
3en67l 2 Gaussian Optics 15
: slO0 2.1 Introduction 15
Xb>SA|6[| 2.2 Refraction at a Spherical Surface 15
gN:F5 0 2.2.1 Examples 19
.R"VLE| 2.3 The General Image-Forming System 19
{}ADsh@7d' 2.4 The Image-Formation Process 21
aK;OzB) 2.5 Reflection at a Spherical Surface 23
ksOsJ~3) 2.6 Aspheric Lenses 25
t,JX6ni 2.7 Stops and Apertures 26
y$]<m+1 2.8 Lens Aberrations. Computer Lens Design 28
gDLS)4^w 2.9 Imaging and The Lens Formula 29
^@RvCJ+ 2.10 Standard Optical Systems 30
6',Hs 2.10.1 Afocal Systems. The Telescope 30
l1'v`! 2.10.2 The Simple Magnifier 32
jQ3dLctn 2.10.3 The Microscope 34
iJ^}{- 3 Interference 37
Gg~0>XS 3.1 Introduction 37
Gt*K:KT=L 3.2 General Description 37
yTg|L9 3.3 Coherence 38
WA43}CyAe 3.4 Interference between two Plane Waves 41
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Y{ 3.4.1 Laser Doppler Velocimetry (LDV) 45
{\0V$#q 3.5 Interference between other Waves 46
ud5}jyJ 3.6 Interferometry 49
CZu=/8? 3.6.1 Wavefront Division 50
6A]I" E]5 3.6.2 Amplitude Division 51
[O&}Qk 3.6.3 The Dual-Frequency Michelson Interferometer 54
Bt}90# 3.6.4 Heterodyne (Homodyne) Detection 55
RIXeV*ix 3.7 Spatial and Temporal Coherence 56
Q\kWQOB_ 3.8 Optical Coherence Tomography 61
gs3(B/";c 4 Diffraction 67
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C 4C/ 4.2 Diffraction from a Single Slit 67
\L~^c1s3r 4.3 Diffraction from a Grating 70
Z+y'w#MZL 4.3.1 The Grating Equation. Amplitude Transmittance 70
WVpx 4.3.2 The Spatial Frequency Spectrum 73
/ kK*%TP 4.4 Fourier Optics 75
~^a>C 4.5 Optical Filtering 76
\u[} 4.5.1 Practical Filtering Set-Ups 78
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aH uMm& of Image Formation 81
*w(n%f 4.6.1 The Coherent Transfer Function 83
Lg!E 4.6.2 The Incoherent Transfer Function 85
wods 4.6.3 The Depth of Focus 88
4>V@+#Ec5 4.7 The Phase-Modulated Sinusoidal Grating 89
b7\> = 5 Light Sources and Detectors 99
y@I9>}"y 5.1 Introduction 99
sYDav)L. 5.2 Radiometry. Photometry 99
3c6e$/ 5.2.1 Lambertian Surface 102
n5UUoBv 5.2.2 Blackbody Radiator 103
,:L^vG@* 5.2.3 Examples 105
AP,ZMpw 5.3 Incoherent Light Sources 108
Cfmd*, 5.4 Coherent Light Sources 109
Uvm.|p_V 5.4.1 Stimulated Emission 109
L5`k3ap| 5.4.2 Gas Lasers 112
dFw+nGN 5.4.3 Liquid Lasers 114
lPxhqF5pP 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Fy<:iv0>t 5.4.5 Solid-State Lasers 117
eo4z!@pRN 5.4.6 Other Lasers 119
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