Optical Metrology Third Edition T/.U Mw N^M6*,F,J Kjell J. G˚asvik
EOZ 6F-': Spectra Vision AS, Trondheim, Norway
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BCuoFw) ULhXyItL Preface to the Third Edition xi
WD_{bd ) 1Basics 1
(<
>L fn 1.1 Introduction 1
rvU^W+d 1.2 Wave Motion. The Electromagnetic Spectrum 1
l^^Z}3^Rk 1.3 The Plane Wave. Light Rays 3
#].q jOj 1.4 Phase Difference 4
>& 4) : 1.5 Complex Notation. Complex Amplitude 5
/1p5KVTKv 1.6 Oblique Incidence of A Plane Wave 5
C}|.z 1.7 The Spherical Wave 7
lcLDCt ? 1.8 The Intensity 8
U[2;Fkapi 1.9 Geometrical Optics 8
3 l}9'j 1.10 The Simple Convex (Positive) Lens 10
ACy}w?D< 1.11 A Plane-Wave Set-Up 11
"TP~TjXf q 2 Gaussian Optics 15
bIlNA )g 2.1 Introduction 15
p>i8aN 2.2 Refraction at a Spherical Surface 15
pN)x,<M) 2.2.1 Examples 19
d&AO 4^ 2.3 The General Image-Forming System 19
c&P/v#U_ 2.4 The Image-Formation Process 21
=1k%T {> 2.5 Reflection at a Spherical Surface 23
q7r b3d 2.6 Aspheric Lenses 25
5} Id[%.x 2.7 Stops and Apertures 26
*~YdL 7f)J 2.8 Lens Aberrations. Computer Lens Design 28
\#]C ! JQ 2.9 Imaging and The Lens Formula 29
<Y6 zJ#BD 2.10 Standard Optical Systems 30
$P#x>#+[A 2.10.1 Afocal Systems. The Telescope 30
$f _C~O 2.10.2 The Simple Magnifier 32
4JU 2x 2.10.3 The Microscope 34
1Jdx#K 3 Interference 37
zRd.!R v 3.1 Introduction 37
F: d2 ; 3.2 General Description 37
$)$ r 3.3 Coherence 38
UmvnVmnv 3.4 Interference between two Plane Waves 41
gaxM# 3.4.1 Laser Doppler Velocimetry (LDV) 45
xJAQ'ANr 3.5 Interference between other Waves 46
XI |k,Ko< 3.6 Interferometry 49
8V}| (b# 3.6.1 Wavefront Division 50
$U. | 3.6.2 Amplitude Division 51
D/Ok 3.6.3 The Dual-Frequency Michelson Interferometer 54
.%)uCLZr $ 3.6.4 Heterodyne (Homodyne) Detection 55
@87Y/_l 3.7 Spatial and Temporal Coherence 56
\q *-9_M 3.8 Optical Coherence Tomography 61
JV@G 9PT 4 Diffraction 67
\+nV~Pi"A 4.1 Introduction 67
$./aK J1B 4.2 Diffraction from a Single Slit 67
/V{UTMSz 4.3 Diffraction from a Grating 70
& !ds#- 4.3.1 The Grating Equation. Amplitude Transmittance 70
0;@>jo6,! 4.3.2 The Spatial Frequency Spectrum 73
i-w$-2w 4.4 Fourier Optics 75
cD6 ^7QF 4.5 Optical Filtering 76
#R:&Irh 4.5.1 Practical Filtering Set-Ups 78
.)$ MZyo 4.6 Physical Optics Description
pDYJLh-C of Image Formation 81
TE$6=; 4.6.1 The Coherent Transfer Function 83
I hf)gfHj 4.6.2 The Incoherent Transfer Function 85
37kVJQcA1 4.6.3 The Depth of Focus 88
:N _]*> 4.7 The Phase-Modulated Sinusoidal Grating 89
i!}6FB Z 5 Light Sources and Detectors 99
[T,^ l#S1 5.1 Introduction 99
Y%kOq`uT=n 5.2 Radiometry. Photometry 99
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WA,D =)GP 5.2.2 Blackbody Radiator 103
A.("jb@I 5.2.3 Examples 105
lct 5.3 Incoherent Light Sources 108
/hu>MZ(\ 5.4 Coherent Light Sources 109
HV)aVkr/& 5.4.1 Stimulated Emission 109
8U(o@ 1PT 5.4.2 Gas Lasers 112
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=k .%#h{ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
]vB\yQE 5.4.5 Solid-State Lasers 117
Li} 5aK 5.4.6 Other Lasers 119
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