Optical Metrology Third Edition vH/<!jtI vFz%#zk> Kjell J. G˚asvik
?O (KmDH Spectra Vision AS, Trondheim, Norway
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CoJJ 8:^`r w4a0 Preface to the Third Edition xi
Ncr38~;w 1Basics 1
"^E/N},%u5 1.1 Introduction 1
?mKj+ Bk2 1.2 Wave Motion. The Electromagnetic Spectrum 1
w#.Tp-AZ;\ 1.3 The Plane Wave. Light Rays 3
E +\?|q !T 1.4 Phase Difference 4
4a3Xz,[(a 1.5 Complex Notation. Complex Amplitude 5
BzBij^h 1.6 Oblique Incidence of A Plane Wave 5
6v~` jS%3 1.7 The Spherical Wave 7
8m,PsUp7 1.8 The Intensity 8
62lG,y_L 1.9 Geometrical Optics 8
0sq?;~U 1.10 The Simple Convex (Positive) Lens 10
n5CjwLgu\b 1.11 A Plane-Wave Set-Up 11
~Wy&xs Z H 2 Gaussian Optics 15
E^ua u=F 2.1 Introduction 15
rmpx8C Y" 2.2 Refraction at a Spherical Surface 15
3GVE/GtU 2.2.1 Examples 19
BG:l Zj'I 2.3 The General Image-Forming System 19
'@enl]J 2.4 The Image-Formation Process 21
cx%[hM09 2.5 Reflection at a Spherical Surface 23
;% "YA 2.6 Aspheric Lenses 25
&atT7m 2.7 Stops and Apertures 26
ZqKUz5M4 2.8 Lens Aberrations. Computer Lens Design 28
'Gwa[ |6i 2.9 Imaging and The Lens Formula 29
)zw}+z3st 2.10 Standard Optical Systems 30
XrR@cDNx{ 2.10.1 Afocal Systems. The Telescope 30
#N%ATV 2.10.2 The Simple Magnifier 32
;\(Wz5Ok&J 2.10.3 The Microscope 34
6<0-GD}M 3 Interference 37
VB6EM|bphl 3.1 Introduction 37
klHOAb1 3.2 General Description 37
_4qP0LCa 3.3 Coherence 38
, VZ;= 3.4 Interference between two Plane Waves 41
Z}bUvr XP 3.4.1 Laser Doppler Velocimetry (LDV) 45
c\GJfsVk 3.5 Interference between other Waves 46
T' O5> e 3.6 Interferometry 49
BLx tS 3.6.1 Wavefront Division 50
Z9-HQ5> 3.6.2 Amplitude Division 51
zTi %j$o 3.6.3 The Dual-Frequency Michelson Interferometer 54
W[S4s/)m g 3.6.4 Heterodyne (Homodyne) Detection 55
tBEZ4 W>67 3.7 Spatial and Temporal Coherence 56
>XzCHtEP 3.8 Optical Coherence Tomography 61
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J ej P91 4.2 Diffraction from a Single Slit 67
@91Q=S 4.3 Diffraction from a Grating 70
~d oOt 4.3.1 The Grating Equation. Amplitude Transmittance 70
` P;fD /I 4.3.2 The Spatial Frequency Spectrum 73
$ijWwrh 4.4 Fourier Optics 75
!>XG$-$`Z 4.5 Optical Filtering 76
d ; (&_; 4.5.1 Practical Filtering Set-Ups 78
Y9F78=Q 4.6 Physical Optics Description
S.o 9AUv9 of Image Formation 81
(QQ /I; 4.6.1 The Coherent Transfer Function 83
C~o6 ]'+F_ 4.6.2 The Incoherent Transfer Function 85
I!bzvPJ]xc 4.6.3 The Depth of Focus 88
cVv>"oF;~* 4.7 The Phase-Modulated Sinusoidal Grating 89
E <]l]? 5 Light Sources and Detectors 99
51 .! S 5.1 Introduction 99
J;+A G^U< 5.2 Radiometry. Photometry 99
77/&M^0 5.2.1 Lambertian Surface 102
]p3hq1u3& 5.2.2 Blackbody Radiator 103
x7 $U 5.2.3 Examples 105
*yAC8 \ v 5.3 Incoherent Light Sources 108
FG8genCH@ 5.4 Coherent Light Sources 109
0Eq.l < 5.4.1 Stimulated Emission 109
5A]IiX4Z 5.4.2 Gas Lasers 112
#W<D~C[I _ 5.4.3 Liquid Lasers 114
A lh"G6 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Ve>*KHDSt 5.4.5 Solid-State Lasers 117
,s PsL9]$ 5.4.6 Other Lasers 119
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