Optical Metrology Third Edition Q>nq~#3? ]G YO`, Kjell J. G˚asvik
v*5n$UFV Spectra Vision AS, Trondheim, Norway
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ZLdvzH @' %R5APMg1 Preface to the Third Edition xi
vy#n7hdCc 1Basics 1
e*uaxh +7 1.1 Introduction 1
SsDz> PP 1.2 Wave Motion. The Electromagnetic Spectrum 1
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WiL 1.3 The Plane Wave. Light Rays 3
wJJ4F$"b 1.4 Phase Difference 4
Vg/{;uLAe 1.5 Complex Notation. Complex Amplitude 5
w[z ^B& 1.6 Oblique Incidence of A Plane Wave 5
hG cq> Cvf 1.7 The Spherical Wave 7
a
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y3$i?}?A 1.9 Geometrical Optics 8
d$ s1l 1.10 The Simple Convex (Positive) Lens 10
)J8dm'wH92 1.11 A Plane-Wave Set-Up 11
W-%oj.BMA 2 Gaussian Optics 15
\pZ,gF;y 2.1 Introduction 15
l ?~SH[V 2.2 Refraction at a Spherical Surface 15
6\)61o_1| 2.2.1 Examples 19
s;q]:+#7g 2.3 The General Image-Forming System 19
E;~gQ6vAI 2.4 The Image-Formation Process 21
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uq 2.5 Reflection at a Spherical Surface 23
6%NX| 4_ 2.6 Aspheric Lenses 25
.M uS"R{y 2.7 Stops and Apertures 26
<3z]d?u 2.8 Lens Aberrations. Computer Lens Design 28
S pDVD 2.9 Imaging and The Lens Formula 29
nnIBN4 2.10 Standard Optical Systems 30
dg 0`0k 2.10.1 Afocal Systems. The Telescope 30
0F sz 2.10.2 The Simple Magnifier 32
u&`7 C 2.10.3 The Microscope 34
b9[;qqq@' 3 Interference 37
UiA\J 3.1 Introduction 37
.pQH>;k]K 3.2 General Description 37
ivC1=+ 3.3 Coherence 38
J&S$ F:HM 3.4 Interference between two Plane Waves 41
zcD&x oL\H 3.4.1 Laser Doppler Velocimetry (LDV) 45
8Wid.o-U 3.5 Interference between other Waves 46
-, Cx|Nl 3.6 Interferometry 49
A D =@ 3.6.1 Wavefront Division 50
aOfL;I 3.6.2 Amplitude Division 51
-Ep cX!i 3.6.3 The Dual-Frequency Michelson Interferometer 54
$"C]y$} 3.6.4 Heterodyne (Homodyne) Detection 55
p>=YPi/d 3.7 Spatial and Temporal Coherence 56
p*F&G=ZE 3.8 Optical Coherence Tomography 61
R9D< lX0% 4 Diffraction 67
4&)*PKq 4.1 Introduction 67
cu(2BDfiL 4.2 Diffraction from a Single Slit 67
ji<b #YO4 4.3 Diffraction from a Grating 70
z`((l#( 4.3.1 The Grating Equation. Amplitude Transmittance 70
t>f<4~%MJ 4.3.2 The Spatial Frequency Spectrum 73
p!>FPS 4.4 Fourier Optics 75
V0z.w:- 4.5 Optical Filtering 76
!HL7a]PB 4.5.1 Practical Filtering Set-Ups 78
*W,"UL6U8y 4.6 Physical Optics Description
8AT;9wZqt of Image Formation 81
Hv(0<k6oH 4.6.1 The Coherent Transfer Function 83
R! ;tF|] 4.6.2 The Incoherent Transfer Function 85
g}0}$WgH: 4.6.3 The Depth of Focus 88
FGu:8`c9 4.7 The Phase-Modulated Sinusoidal Grating 89
ej>8$^y 5 Light Sources and Detectors 99
CE-ySIa 5.1 Introduction 99
(%"M% Qko 5.2 Radiometry. Photometry 99
u _s 5.2.1 Lambertian Surface 102
w-};\]I 5.2.2 Blackbody Radiator 103
y$7Fq' 5.2.3 Examples 105
;$l!mv 7 5.3 Incoherent Light Sources 108
k'}}eu/ q 5.4 Coherent Light Sources 109
r^-3( 77n 5.4.1 Stimulated Emission 109
aiGT!2 5.4.2 Gas Lasers 112
dG}fpQ3& 5.4.3 Liquid Lasers 114
7 (^<Z5@ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
6c>t|=Ss( 5.4.5 Solid-State Lasers 117
vC[)/w 5.4.6 Other Lasers 119
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