Optical Metrology Third Edition {8I,uQO .(RZ&*4 Kjell J. G˚asvik
N j;5iy Spectra Vision AS, Trondheim, Norway
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? ;VsA>PV }W)b Preface to the Third Edition xi
WEYZ(a| 1Basics 1
% n RgHN> 1.1 Introduction 1
cO$xT;kK 1.2 Wave Motion. The Electromagnetic Spectrum 1
dbJ3E)rF 1.3 The Plane Wave. Light Rays 3
A+|bJ>q 1.4 Phase Difference 4
nll=Vd[ 1.5 Complex Notation. Complex Amplitude 5
EHy 15RL 1.6 Oblique Incidence of A Plane Wave 5
!9.k%B: 1.7 The Spherical Wave 7
+E^2]F7Zk 1.8 The Intensity 8
qj9[mBkP" 1.9 Geometrical Optics 8
jW]"Um-] 1.10 The Simple Convex (Positive) Lens 10
AJ+\Qs(0 1.11 A Plane-Wave Set-Up 11
-Uan.#~S 2 Gaussian Optics 15
L;lu)|b" 2.1 Introduction 15
z3Yi$*q < 2.2 Refraction at a Spherical Surface 15
qV9}N-sS 2.2.1 Examples 19
DIABR%0 2.3 The General Image-Forming System 19
_@i- ?Q 2.4 The Image-Formation Process 21
eC"k-a8j+ 2.5 Reflection at a Spherical Surface 23
egK~w8`W% 2.6 Aspheric Lenses 25
3 [j,d]\| 2.7 Stops and Apertures 26
~!S/{Un 2.8 Lens Aberrations. Computer Lens Design 28
DKJ_g.]X 2.9 Imaging and The Lens Formula 29
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lz!(OO,g 2.10.2 The Simple Magnifier 32
R?zlZS.~ 2.10.3 The Microscope 34
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N5{v;~Cm}V 3.1 Introduction 37
Tw djBMte 3.2 General Description 37
F?$Vx)HI 3.3 Coherence 38
+oh |r'~ 3.4 Interference between two Plane Waves 41
=igTY1|af 3.4.1 Laser Doppler Velocimetry (LDV) 45
^KdT,^6T 3.5 Interference between other Waves 46
v4W q0>o 3.6 Interferometry 49
#]dq^B~~ 3.6.1 Wavefront Division 50
WH4rZ }Z` 3.6.2 Amplitude Division 51
)!kt9lK 3.6.3 The Dual-Frequency Michelson Interferometer 54
Mq#m;v$E 3.6.4 Heterodyne (Homodyne) Detection 55
mKjTJzS 3.7 Spatial and Temporal Coherence 56
Z^]jy>dj 3.8 Optical Coherence Tomography 61
5kGQf 4 Diffraction 67
A@Q6}ESD 4.1 Introduction 67
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4.2 Diffraction from a Single Slit 67
r95 ,X! 4.3 Diffraction from a Grating 70
JNY ?] |= 4.3.1 The Grating Equation. Amplitude Transmittance 70
*v%gNq 4.3.2 The Spatial Frequency Spectrum 73
0I x,c( % 4.4 Fourier Optics 75
r!1f>F*dt 4.5 Optical Filtering 76
- . o,bg 4.5.1 Practical Filtering Set-Ups 78
u(FO SmNkN 4.6 Physical Optics Description
%X's/;(Lx` of Image Formation 81
%3*|Su%uC 4.6.1 The Coherent Transfer Function 83
IqV" 4 4.6.2 The Incoherent Transfer Function 85
A1F$//a 4.6.3 The Depth of Focus 88
6/#+#T 4.7 The Phase-Modulated Sinusoidal Grating 89
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K>vl o/#! 5.1 Introduction 99
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SHs [te[ 5.2.1 Lambertian Surface 102
|{(JUXo6K 5.2.2 Blackbody Radiator 103
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qtdkK LT 5.3 Incoherent Light Sources 108
U# [T!E 5.4 Coherent Light Sources 109
? A;RTM 5.4.1 Stimulated Emission 109
.rG~\Ws 5.4.2 Gas Lasers 112
S !#5 5.4.3 Liquid Lasers 114
]zVQL_%, 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
P>u2""c 5.4.5 Solid-State Lasers 117
6eUGE 4NF( 5.4.6 Other Lasers 119
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