Optical Metrology Third Edition fc<,kRp <899r \ Kjell J. G˚asvik
KhPDXY]! Spectra Vision AS, Trondheim, Norway
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-5\.\L3y) !MOcF5M Preface to the Third Edition xi
m:g%5' qDZ 1Basics 1
z-|d /#h 1.1 Introduction 1
(9)uZ-BF, 1.2 Wave Motion. The Electromagnetic Spectrum 1
ioslarw1J 1.3 The Plane Wave. Light Rays 3
?#:!!.I: 1.4 Phase Difference 4
t?p>L* 1.5 Complex Notation. Complex Amplitude 5
m xy=3cUi 1.6 Oblique Incidence of A Plane Wave 5
"77l~3 1.7 The Spherical Wave 7
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d2to5 ( 1.8 The Intensity 8
CelM~W$=u 1.9 Geometrical Optics 8
@iVEnb.' 1.10 The Simple Convex (Positive) Lens 10
hAB:;r XlI 1.11 A Plane-Wave Set-Up 11
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~i,R 2 Gaussian Optics 15
=I $:-[( 2.1 Introduction 15
?`B6I!S0[ 2.2 Refraction at a Spherical Surface 15
Wh L"- f 2.2.1 Examples 19
1! R:}r3t 2.3 The General Image-Forming System 19
=/ N0^ 2.4 The Image-Formation Process 21
E;r~8^9) 2.5 Reflection at a Spherical Surface 23
&RlYw#*1. 2.6 Aspheric Lenses 25
\qbEC.-K 2.7 Stops and Apertures 26
6}_J;g\| 2.8 Lens Aberrations. Computer Lens Design 28
(k %0|%eR 2.9 Imaging and The Lens Formula 29
0[s<!k9= 2.10 Standard Optical Systems 30
!_:|mu' 2.10.1 Afocal Systems. The Telescope 30
8 =3$U+ 2.10.2 The Simple Magnifier 32
EkP(] F 2.10.3 The Microscope 34
B 3eNvUFZg 3 Interference 37
jAD{?/RB} 3.1 Introduction 37
M-5zsN 3.2 General Description 37
3UGdXufw 3.3 Coherence 38
z h4m`}p 3.4 Interference between two Plane Waves 41
ulXe;2 3.4.1 Laser Doppler Velocimetry (LDV) 45
T) cbpkH4 3.5 Interference between other Waves 46
84-7!< 6i 3.6 Interferometry 49
Yi fTC-Q; 3.6.1 Wavefront Division 50
?tYc2R9x6" 3.6.2 Amplitude Division 51
jhE3@c@pT 3.6.3 The Dual-Frequency Michelson Interferometer 54
ACH!Gw~ 3.6.4 Heterodyne (Homodyne) Detection 55
-KC Q!0\F 3.7 Spatial and Temporal Coherence 56
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oz?6$oE(bt 4 Diffraction 67
{q BbzBG 4.1 Introduction 67
N Z~"2~Hh 4.2 Diffraction from a Single Slit 67
@xAfD{}f! 4.3 Diffraction from a Grating 70
!'%`g,,r 4.3.1 The Grating Equation. Amplitude Transmittance 70
0Yc#f D 4.3.2 The Spatial Frequency Spectrum 73
y &%2 4.4 Fourier Optics 75
9 Dx9alJR 4.5 Optical Filtering 76
86 f/R
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2aGK}sS6 4.6 Physical Optics Description
J OH=)+xj of Image Formation 81
Fy]j33E 4.6.1 The Coherent Transfer Function 83
51x)fZQ 4.6.2 The Incoherent Transfer Function 85
,9ZN k@q 4.6.3 The Depth of Focus 88
rKW kT" 4.7 The Phase-Modulated Sinusoidal Grating 89
,xIWyI. 5 Light Sources and Detectors 99
(~n0,$ 5.1 Introduction 99
@c{b\is2 5.2 Radiometry. Photometry 99
@&]%%o+ 5.2.1 Lambertian Surface 102
?1MaA 5.2.2 Blackbody Radiator 103
J9/}ZD^ 5.2.3 Examples 105
Q u@T}Ci 5.3 Incoherent Light Sources 108
NpY zN|W: 5.4 Coherent Light Sources 109
. vQCX1V( 5.4.1 Stimulated Emission 109
6}e"$Ee}9 5.4.2 Gas Lasers 112
b$'}IWNV 5.4.3 Liquid Lasers 114
`}f wR 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
+0WI;M4i 5.4.5 Solid-State Lasers 117
fRd^@@, [ 5.4.6 Other Lasers 119
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