Optical Metrology Third Edition F@m]Imn5Dx +ucj>g1(# Kjell J. G˚asvik
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,1xX`: JQ5E; 8J> Preface to the Third Edition xi
?'RB)M=Og7 1Basics 1
Q 7< %_a 1.1 Introduction 1
Xe ;Eu 1.2 Wave Motion. The Electromagnetic Spectrum 1
D~~"wos 1.3 The Plane Wave. Light Rays 3
_=%F6}TE 1.4 Phase Difference 4
4:umD*d 3E 1.5 Complex Notation. Complex Amplitude 5
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_P5yz 1.6 Oblique Incidence of A Plane Wave 5
WBb@\|V| 1.7 The Spherical Wave 7
?vA)F)MS 1.8 The Intensity 8
x/BtB"e*5 1.9 Geometrical Optics 8
\!O3]k,r 1.10 The Simple Convex (Positive) Lens 10
G 6W _)YL 1.11 A Plane-Wave Set-Up 11
GvAP 2 Gaussian Optics 15
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|nOqy &B 2.2 Refraction at a Spherical Surface 15
/l.:GH36f 2.2.1 Examples 19
'3%J hG)# 2.3 The General Image-Forming System 19
;_$Q~X 2.4 The Image-Formation Process 21
5OHg% ^ 2.5 Reflection at a Spherical Surface 23
}j+Af["W? 2.6 Aspheric Lenses 25
`'W/uCpl 2.7 Stops and Apertures 26
aPU .fER 2.8 Lens Aberrations. Computer Lens Design 28
#%Hk-a=>)# 2.9 Imaging and The Lens Formula 29
ko-3`hX` 2.10 Standard Optical Systems 30
QR+xPY~ 2.10.1 Afocal Systems. The Telescope 30
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m!22tpb 3 Interference 37
Cs:?9G 3.1 Introduction 37
ppm =o4`s[ 3.2 General Description 37
b]0]*<~y 3.3 Coherence 38
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IOfxx>=3 3.4.1 Laser Doppler Velocimetry (LDV) 45
+N6IdDN3 3.5 Interference between other Waves 46
I45 kPfu 3.6 Interferometry 49
k kZ2Jxvx 3.6.1 Wavefront Division 50
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XC(:O(jdA2 3.6.3 The Dual-Frequency Michelson Interferometer 54
.2Q4EbM2 3.6.4 Heterodyne (Homodyne) Detection 55
t]3> X 3.7 Spatial and Temporal Coherence 56
v 9,<2 3.8 Optical Coherence Tomography 61
hQeGr 2gMq 4 Diffraction 67
g 2LY~ 4.1 Introduction 67
g g0rkg 4.2 Diffraction from a Single Slit 67
-/V,<@@T 4.3 Diffraction from a Grating 70
#r|qi tL3 4.3.1 The Grating Equation. Amplitude Transmittance 70
bIXudE[8zq 4.3.2 The Spatial Frequency Spectrum 73
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4.4 Fourier Optics 75
{})d}dEC 4.5 Optical Filtering 76
9T\uOaC" 4.5.1 Practical Filtering Set-Ups 78
d/ 8p?Km 4.6 Physical Optics Description
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of Image Formation 81
r* q 4.6.1 The Coherent Transfer Function 83
*5 QN: 4.6.2 The Incoherent Transfer Function 85
[S~/l m 4.6.3 The Depth of Focus 88
+Rj8 "p$K 4.7 The Phase-Modulated Sinusoidal Grating 89
B_uhNLd 5 Light Sources and Detectors 99
v~*Co}0OB 5.1 Introduction 99
oSf 6J:?*e 5.2 Radiometry. Photometry 99
2jVvK" C 5.2.1 Lambertian Surface 102
|Q(3rcOrV" 5.2.2 Blackbody Radiator 103
4 -CGe 5.2.3 Examples 105
}>5R 9 5.3 Incoherent Light Sources 108
dEhFuNO<2 5.4 Coherent Light Sources 109
+F?}<P_v 5.4.1 Stimulated Emission 109
|EGC1x]j= 5.4.2 Gas Lasers 112
Zt"#' 1 5.4.3 Liquid Lasers 114
{X\%7Zef+ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
KqL+R$??"( 5.4.5 Solid-State Lasers 117
~W2Od2p ! 5.4.6 Other Lasers 119
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