Optical Metrology Third Edition vq
B)PL5) sF :3|Yy0 Kjell J. G˚asvik
(x2I*<7 P Spectra Vision AS, Trondheim, Norway
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DI'wZySS^ \SkCsE#H Preface to the Third Edition xi
f`*Ip? V- 1Basics 1
Mf^ ;('~ 1.1 Introduction 1
f>g>7OsD] 1.2 Wave Motion. The Electromagnetic Spectrum 1
3 (Kj| u 1.3 The Plane Wave. Light Rays 3
RAxAy{ 1.4 Phase Difference 4
n{J<7I e"* 1.5 Complex Notation. Complex Amplitude 5
w ^sM,c5d 1.6 Oblique Incidence of A Plane Wave 5
#G:~6^A 1.7 The Spherical Wave 7
4nzUDeI3MG 1.8 The Intensity 8
U{ gJn#e/. 1.9 Geometrical Optics 8
w8:~LX.n 1.10 The Simple Convex (Positive) Lens 10
dW
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2~AG Ox 2 Gaussian Optics 15
M$d DExd~ 2.1 Introduction 15
gm B?L0UV 2.2 Refraction at a Spherical Surface 15
&EYO[~D06 2.2.1 Examples 19
7Q7z6p/\v 2.3 The General Image-Forming System 19
#>g]CRN 2.4 The Image-Formation Process 21
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2.5 Reflection at a Spherical Surface 23
,~`R{,N` 2.6 Aspheric Lenses 25
,kfUlv= 2.7 Stops and Apertures 26
ZC'(^liAp 2.8 Lens Aberrations. Computer Lens Design 28
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% 2.9 Imaging and The Lens Formula 29
@5K/ z<p% 2.10 Standard Optical Systems 30
3N|,c]| 2.10.1 Afocal Systems. The Telescope 30
W2J"W=:z 2.10.2 The Simple Magnifier 32
BY.' 0,H=k 2.10.3 The Microscope 34
yeqZPz n 3 Interference 37
MYFRrcu; 3.1 Introduction 37
j4$XAq~ W 3.2 General Description 37
sqFMO+ 3.3 Coherence 38
g|tnY N 3.4 Interference between two Plane Waves 41
WBLfxr 3.4.1 Laser Doppler Velocimetry (LDV) 45
yxh8sAZ 3.5 Interference between other Waves 46
Rb\M63q 3.6 Interferometry 49
k)o D 3.6.1 Wavefront Division 50
JL45!+ 3.6.2 Amplitude Division 51
Q9=X| 3.6.3 The Dual-Frequency Michelson Interferometer 54
rwGY )9 | 3.6.4 Heterodyne (Homodyne) Detection 55
.YKqYN?y4 3.7 Spatial and Temporal Coherence 56
E#X(0(A) 3.8 Optical Coherence Tomography 61
v@TP_Ka 4 Diffraction 67
6cQh8_/>{# 4.1 Introduction 67
6|+I~zJ88 4.2 Diffraction from a Single Slit 67
%:yJ/&-Q,Z 4.3 Diffraction from a Grating 70
ZNNgi@6> 4.3.1 The Grating Equation. Amplitude Transmittance 70
?N oG. 4.3.2 The Spatial Frequency Spectrum 73
uA dgR 4.4 Fourier Optics 75
Dp4\rps 4.5 Optical Filtering 76
gF,9Kv ~ 4.5.1 Practical Filtering Set-Ups 78
# 9uNJla 4.6 Physical Optics Description
BR*,E~% of Image Formation 81
. S4Xw2MS 4.6.1 The Coherent Transfer Function 83
e$}x;&c Q 4.6.2 The Incoherent Transfer Function 85
&[ ejxK" 4.6.3 The Depth of Focus 88
=Bu> }$BD 4.7 The Phase-Modulated Sinusoidal Grating 89
$x# 0m 5 Light Sources and Detectors 99
o5)lTVQ~~ 5.1 Introduction 99
J24<X9b 5.2 Radiometry. Photometry 99
]E$h7 I 5.2.1 Lambertian Surface 102
'|V "!R) 5.2.2 Blackbody Radiator 103
' ^L|}e 5.2.3 Examples 105
#e:cB' f 5.3 Incoherent Light Sources 108
VgLrufJ 5.4 Coherent Light Sources 109
KvW {M 5.4.1 Stimulated Emission 109
UPQ?vh2F2 5.4.2 Gas Lasers 112
xwoK#eC~ F 5.4.3 Liquid Lasers 114
3.>M=K~09 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
tjYqdbA) 5.4.5 Solid-State Lasers 117
=0!PnBGYn 5.4.6 Other Lasers 119
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