Optical Metrology Third Edition pLMt 2 G dzVi ~wt_& Kjell J. G˚asvik
i\R0+ O{ Spectra Vision AS, Trondheim, Norway
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&q uY^j 'B @`gA Preface to the Third Edition xi
.3!Wr*o 1Basics 1
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1.1 Introduction 1
]hl*6 1.2 Wave Motion. The Electromagnetic Spectrum 1
la!]Y-s)'4 1.3 The Plane Wave. Light Rays 3
6Q.S 1.4 Phase Difference 4
*S$v SDJCW 1.5 Complex Notation. Complex Amplitude 5
Jt~Iv n, 1.6 Oblique Incidence of A Plane Wave 5
ZsmOn#`=^} 1.7 The Spherical Wave 7
+v~x gU s 1.8 The Intensity 8
q=1 N&#R G 1.9 Geometrical Optics 8
)rc!irac] 1.10 The Simple Convex (Positive) Lens 10
y^. 66BH 1.11 A Plane-Wave Set-Up 11
B#sCB&( 2 Gaussian Optics 15
mScv7S~/s 2.1 Introduction 15
GES}o9?# 2.2 Refraction at a Spherical Surface 15
T j$'B[cv 2.2.1 Examples 19
MKK ^-T 2.3 The General Image-Forming System 19
@s5=6z]=H 2.4 The Image-Formation Process 21
tC[ZWL 2.5 Reflection at a Spherical Surface 23
blO4)7m 2.6 Aspheric Lenses 25
oXPA<ef o 2.7 Stops and Apertures 26
m</m9h8 2.8 Lens Aberrations. Computer Lens Design 28
V<ESj K8 2.9 Imaging and The Lens Formula 29
b3(* /KgK 2.10 Standard Optical Systems 30
<_?zln:4. 2.10.1 Afocal Systems. The Telescope 30
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3%WB?k c 2.10.3 The Microscope 34
LoF/45|-< 3 Interference 37
<-lM9}v d 3.1 Introduction 37
Pt]>AW;i 3.2 General Description 37
WBe0^=x 3.3 Coherence 38
iP:i6U] 3.4 Interference between two Plane Waves 41
SZ` 7t=I2 3.4.1 Laser Doppler Velocimetry (LDV) 45
t)SZ2G1r 3.5 Interference between other Waves 46
PyeNu3Il4 3.6 Interferometry 49
dFg>uo 3.6.1 Wavefront Division 50
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C@M-_Ud>Q 3.6.3 The Dual-Frequency Michelson Interferometer 54
V&Y`?Edc 3.6.4 Heterodyne (Homodyne) Detection 55
"ra$x2 |=} 3.7 Spatial and Temporal Coherence 56
>e]g T 3.8 Optical Coherence Tomography 61
#2Rz=QI 4 Diffraction 67
>w,L= z = 4.1 Introduction 67
oFk2y ^>u 4.2 Diffraction from a Single Slit 67
}\ _.Mg^y 4.3 Diffraction from a Grating 70
O\}C`CiC 4.3.1 The Grating Equation. Amplitude Transmittance 70
+Y;P*U}Qg[ 4.3.2 The Spatial Frequency Spectrum 73
_3IT3mb2n 4.4 Fourier Optics 75
,@$5,rNf 4.5 Optical Filtering 76
*v<f#hB" 4.5.1 Practical Filtering Set-Ups 78
!2!~_*sGe 4.6 Physical Optics Description
4 jT6 h9% of Image Formation 81
kc'$4 J4Tw 4.6.1 The Coherent Transfer Function 83
ew;;e|24 4.6.2 The Incoherent Transfer Function 85
xC76jE4 4.6.3 The Depth of Focus 88
r&=ulg 4.7 The Phase-Modulated Sinusoidal Grating 89
g)Z8WH$;H3 5 Light Sources and Detectors 99
2=c x`"a$ 5.1 Introduction 99
W'G|sk 5.2 Radiometry. Photometry 99
8}%F`=Y0 5.2.1 Lambertian Surface 102
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5.2.2 Blackbody Radiator 103
RB>= #03 5.2.3 Examples 105
Ou[K7-m%& 5.3 Incoherent Light Sources 108
]4~Yi1] 5.4 Coherent Light Sources 109
3@Ndn 5.4.1 Stimulated Emission 109
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H4M=&"ll} 5.4.3 Liquid Lasers 114
s.1F=u 9a 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
:UwBs 5.4.5 Solid-State Lasers 117
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5.4.6 Other Lasers 119
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