Optical Metrology Third Edition Karyipn} fa6L+wt4O Kjell J. G˚asvik
:oZ30} Spectra Vision AS, Trondheim, Norway
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#2`tsZ]=I i,V~5dE[I< Preface to the Third Edition xi
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wZ7-\ 1Basics 1
.]jKuTC\< 1.1 Introduction 1
K~Xt` 1.2 Wave Motion. The Electromagnetic Spectrum 1
ABx0IdOcI 1.3 The Plane Wave. Light Rays 3
>uI|S 1.4 Phase Difference 4
<vPIC G) 1.5 Complex Notation. Complex Amplitude 5
<7)@Jds\ 1.6 Oblique Incidence of A Plane Wave 5
/*8"S mte 1.7 The Spherical Wave 7
|D<~a(0 1.8 The Intensity 8
JNsK 1.9 Geometrical Optics 8
_El=M0 1.10 The Simple Convex (Positive) Lens 10
qUVV374N 1.11 A Plane-Wave Set-Up 11
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\G8g,@ 2 Gaussian Optics 15
Qn6&M 2.1 Introduction 15
ni3^J5X W 2.2 Refraction at a Spherical Surface 15
T3Tk:r 2.2.1 Examples 19
PDtaL 2.3 The General Image-Forming System 19
Ldig/: 2.4 The Image-Formation Process 21
W>h[aVTO 2.5 Reflection at a Spherical Surface 23
sKNN ahGjh 2.6 Aspheric Lenses 25
C:H9C 2.7 Stops and Apertures 26
|)0kvf? 2.8 Lens Aberrations. Computer Lens Design 28
I|08[
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UoBu0Rx 2.10 Standard Optical Systems 30
"&>$/b$ 2.10.1 Afocal Systems. The Telescope 30
=0O`VSb 2.10.2 The Simple Magnifier 32
Wb^YqqE 2.10.3 The Microscope 34
0OlB; 3 Interference 37
eH75:` 3.1 Introduction 37
Xd{"+'29 3.2 General Description 37
r`mfLA]d 3.3 Coherence 38
b}axw+ 3.4 Interference between two Plane Waves 41
yht_*7.lM 3.4.1 Laser Doppler Velocimetry (LDV) 45
MQLa+I,S4 3.5 Interference between other Waves 46
w+[r$+z!k 3.6 Interferometry 49
)x8Izn 3.6.1 Wavefront Division 50
nIdvff 3.6.2 Amplitude Division 51
^cX);koO 3.6.3 The Dual-Frequency Michelson Interferometer 54
&;*jMu6 3.6.4 Heterodyne (Homodyne) Detection 55
pO x0f;'G+ 3.7 Spatial and Temporal Coherence 56
0f1*#8-6 3.8 Optical Coherence Tomography 61
v=@Z,- 4 Diffraction 67
f%d7?<rw 4.1 Introduction 67
Bg Uf:PT 4.2 Diffraction from a Single Slit 67
uh@ZHef[l 4.3 Diffraction from a Grating 70
Pij*?qmeQ 4.3.1 The Grating Equation. Amplitude Transmittance 70
eSJ5YeY) 4.3.2 The Spatial Frequency Spectrum 73
>f74]J=V 4.4 Fourier Optics 75
z[[|'02{ 4.5 Optical Filtering 76
1VH7z 4.5.1 Practical Filtering Set-Ups 78
S9U`-\L0 4.6 Physical Optics Description
j<e`8ex? of Image Formation 81
11O^)_|c 4.6.1 The Coherent Transfer Function 83
%Q]m6ciAM 4.6.2 The Incoherent Transfer Function 85
wxN'Lv=R 4.6.3 The Depth of Focus 88
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1vX; 4.7 The Phase-Modulated Sinusoidal Grating 89
6f{Kj) 5 Light Sources and Detectors 99
x^xlH!Sc 5.1 Introduction 99
%h(J+_"L6 5.2 Radiometry. Photometry 99
p^MV<}kk 5.2.1 Lambertian Surface 102
e@w-4G(; 5.2.2 Blackbody Radiator 103
!S$LRm\' 5.2.3 Examples 105
Jvgx+{Xu 5.3 Incoherent Light Sources 108
aF]4%E 5.4 Coherent Light Sources 109
.\".}4qQ 5.4.1 Stimulated Emission 109
*FmY4w 5.4.2 Gas Lasers 112
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y) 5.4.3 Liquid Lasers 114
NirG99kyo 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
[x{'NwP? 5.4.5 Solid-State Lasers 117
STtjkZ6 5.4.6 Other Lasers 119
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