Optical Metrology Third Edition **1=|aa: 5*90t{# Kjell J. G˚asvik
Y(T$k9%}+ Spectra Vision AS, Trondheim, Norway
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#BH]`A J I?\P^f Preface to the Third Edition xi
Ax O.adQE% 1Basics 1
2sEG# /Y= 1.1 Introduction 1
! g|[A7<| 1.2 Wave Motion. The Electromagnetic Spectrum 1
c3<H272\ 1.3 The Plane Wave. Light Rays 3
X %;4G^%ZI 1.4 Phase Difference 4
v=&xiw z} 1.5 Complex Notation. Complex Amplitude 5
m|]"e@SF2 1.6 Oblique Incidence of A Plane Wave 5
/%{ CJ0Y 1.7 The Spherical Wave 7
)lU ocm 1.8 The Intensity 8
o62GEl25 1.9 Geometrical Optics 8
x%W~@_ 1.10 The Simple Convex (Positive) Lens 10
ox";%|PP1 1.11 A Plane-Wave Set-Up 11
o JE<}~_k 2 Gaussian Optics 15
#a]\3X 2.1 Introduction 15
`J7@G]X;2 2.2 Refraction at a Spherical Surface 15
kaECjZ _&+ 2.2.1 Examples 19
"/taatcH 2.3 The General Image-Forming System 19
HuN_$aP 2.4 The Image-Formation Process 21
,Vz-w;oDn 2.5 Reflection at a Spherical Surface 23
;xai JJK { 2.6 Aspheric Lenses 25
Gsm.a 2.7 Stops and Apertures 26
k@>(sXs 2.8 Lens Aberrations. Computer Lens Design 28
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2.9 Imaging and The Lens Formula 29
+lf `Dd3 2.10 Standard Optical Systems 30
{9Q**U`w 2.10.1 Afocal Systems. The Telescope 30
j~9![s! 2.10.2 The Simple Magnifier 32
HA&hu /mw_ 2.10.3 The Microscope 34
jG#e% `' 3 Interference 37
,WoV)L '? 3.1 Introduction 37
e_ S,N0 3.2 General Description 37
N~?#Qh|ZnU 3.3 Coherence 38
mK^E@uxN 3.4 Interference between two Plane Waves 41
}%y5<n *v\ 3.4.1 Laser Doppler Velocimetry (LDV) 45
nLrCy5R: 3.5 Interference between other Waves 46
&C?4'e 3.6 Interferometry 49
c;#gvE 3.6.1 Wavefront Division 50
6mxzE3?G 3.6.2 Amplitude Division 51
(H]NL 3.6.3 The Dual-Frequency Michelson Interferometer 54
CRNt5T>qH 3.6.4 Heterodyne (Homodyne) Detection 55
T*(mi{[T 3.7 Spatial and Temporal Coherence 56
4P7r\ hs 3.8 Optical Coherence Tomography 61
cF"}}c1*M 4 Diffraction 67
.rl Lt 5b% 4.1 Introduction 67
"837b/>/ 4.2 Diffraction from a Single Slit 67
YYe=E,q 4.3 Diffraction from a Grating 70
8>I4e5Ym 4.3.1 The Grating Equation. Amplitude Transmittance 70
^i@0P}K< 4.3.2 The Spatial Frequency Spectrum 73
, $cpm =1 4.4 Fourier Optics 75
D'UIxc 8 4.5 Optical Filtering 76
_]0<G8|Rv 4.5.1 Practical Filtering Set-Ups 78
F$YT4414 4.6 Physical Optics Description
Ju"c!vu~ of Image Formation 81
s WVapu p? 4.6.1 The Coherent Transfer Function 83
wS|hc+1 4.6.2 The Incoherent Transfer Function 85
2LCOB&-Ww 4.6.3 The Depth of Focus 88
}YU \}T-P 4.7 The Phase-Modulated Sinusoidal Grating 89
J)H*tz g 5 Light Sources and Detectors 99
-O $!sFmY 5.1 Introduction 99
gBXoEn] 5.2 Radiometry. Photometry 99
-x!JTx[ K 5.2.1 Lambertian Surface 102
{?}^H W9{ 5.2.2 Blackbody Radiator 103
z)u\(W*\iA 5.2.3 Examples 105
xd+aO=)Td 5.3 Incoherent Light Sources 108
Xhpcu1nA 5.4 Coherent Light Sources 109
B~YOU 3 5.4.1 Stimulated Emission 109
n 3\~H9 5.4.2 Gas Lasers 112
3/,}&SX 5.4.3 Liquid Lasers 114
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xPd 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
$OzVo&P; 5.4.5 Solid-State Lasers 117
jK{qw 5.4.6 Other Lasers 119
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