Optical Metrology Third Edition @ $7l H=@S+4_bK Kjell J. G˚asvik
T]l Vwj Spectra Vision AS, Trondheim, Norway
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#gSIa6z1W 3e?a$ ~9 Preface to the Third Edition xi
83pXj=k< 1Basics 1
w)<h$ <tU 1.1 Introduction 1
eMOnzW|h 1.2 Wave Motion. The Electromagnetic Spectrum 1
K!O7q~s[D 1.3 The Plane Wave. Light Rays 3
C<E;f]d 1.4 Phase Difference 4
^$;5Z kQy 1.5 Complex Notation. Complex Amplitude 5
{SwvUWOf" 1.6 Oblique Incidence of A Plane Wave 5
&\5%C\0Z< 1.7 The Spherical Wave 7
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"%dok @v 1.9 Geometrical Optics 8
I,7n-G_' 1.10 The Simple Convex (Positive) Lens 10
E>&oe&`o' 1.11 A Plane-Wave Set-Up 11
qM9> x:V 2 Gaussian Optics 15
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VI;) VJbq 2.2 Refraction at a Spherical Surface 15
;T|hNsSt 2.2.1 Examples 19
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<x9w 2.3 The General Image-Forming System 19
MB"<^ZX 2.4 The Image-Formation Process 21
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F2C v,&' 2.6 Aspheric Lenses 25
.ZVo0 2.7 Stops and Apertures 26
;hkzL_' E) 2.8 Lens Aberrations. Computer Lens Design 28
j9 O"!9$vQ 2.9 Imaging and The Lens Formula 29
4^{~MgQWK+ 2.10 Standard Optical Systems 30
e) kVS }e? 2.10.1 Afocal Systems. The Telescope 30
o F=UjA 2.10.2 The Simple Magnifier 32
U,tWLX$@ 2.10.3 The Microscope 34
X @^"@ 3 Interference 37
q":0\ar&QT 3.1 Introduction 37
jB0ED0)wX 3.2 General Description 37
<lf6gb 3.3 Coherence 38
89l{h8R 3.4 Interference between two Plane Waves 41
`cpUl*Y= 3.4.1 Laser Doppler Velocimetry (LDV) 45
S)z5=N(Xz 3.5 Interference between other Waves 46
X.)D"+xnH 3.6 Interferometry 49
(6~~e$j 3.6.1 Wavefront Division 50
NSDls@m 3.6.2 Amplitude Division 51
)" H r3 3.6.3 The Dual-Frequency Michelson Interferometer 54
@W O>F G3 3.6.4 Heterodyne (Homodyne) Detection 55
? vocI 3.7 Spatial and Temporal Coherence 56
~,O}wT6q 3.8 Optical Coherence Tomography 61
Z)dE#A_X 4 Diffraction 67
(7?jjH^4 4.1 Introduction 67
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[a\>"I\[ 4.3 Diffraction from a Grating 70
BV512+M 4.3.1 The Grating Equation. Amplitude Transmittance 70
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z]0UW\S/ 4.4 Fourier Optics 75
A" no!AN 4.5 Optical Filtering 76
[LrA_N 4.5.1 Practical Filtering Set-Ups 78
BZ s?tbf 4.6 Physical Optics Description
3`> nQ4zC of Image Formation 81
# NR 9\ 4.6.1 The Coherent Transfer Function 83
`ILO]+`5 4.6.2 The Incoherent Transfer Function 85
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07qL@![! 5 Light Sources and Detectors 99
:P: OQ[$ 5.1 Introduction 99
^laf!kIP 5.2 Radiometry. Photometry 99
-A;4"" 5.2.1 Lambertian Surface 102
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EP}NT)z,{ 5.2.3 Examples 105
0\Ga&Q0-(O 5.3 Incoherent Light Sources 108
riY [p, 5.4 Coherent Light Sources 109
)ZQML0}P; 5.4.1 Stimulated Emission 109
q? 2kD"%$ 5.4.2 Gas Lasers 112
rul w6vTB( 5.4.3 Liquid Lasers 114
5Q.z#]L g 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
]Q*eCt;l"K 5.4.5 Solid-State Lasers 117
mZb[Fi 5.4.6 Other Lasers 119
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