Optical Metrology Third Edition ^2%)Nq; O &dj/Dq@ Kjell J. G˚asvik
y0O e)oP Spectra Vision AS, Trondheim, Norway
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b">"NvlB 1B&XM^>/ Preface to the Third Edition xi
VJW8%s[ 1Basics 1
&6Lh>n( 1.1 Introduction 1
]{{%d4 1.2 Wave Motion. The Electromagnetic Spectrum 1
32anmVnf 1.3 The Plane Wave. Light Rays 3
?aBAmyxm 1.4 Phase Difference 4
ngd4PN>{4 1.5 Complex Notation. Complex Amplitude 5
;$$w`LyP 1.6 Oblique Incidence of A Plane Wave 5
[4B(rra 1.7 The Spherical Wave 7
|d6/gSiF 1.8 The Intensity 8
1g,gilc 1.9 Geometrical Optics 8
!{(crfXB 1.10 The Simple Convex (Positive) Lens 10
RhF<{U. 1.11 A Plane-Wave Set-Up 11
v1}ijls 2 Gaussian Optics 15
A>S7Ap4z> 2.1 Introduction 15
aYpc\jJ 2.2 Refraction at a Spherical Surface 15
%'=TYvB 2 2.2.1 Examples 19
F2 <Q~gQ; 2.3 The General Image-Forming System 19
5RO6YxQ 2.4 The Image-Formation Process 21
uP8 cW([ 2.5 Reflection at a Spherical Surface 23
e(1{W P 2.6 Aspheric Lenses 25
g%m-*v* 2.7 Stops and Apertures 26
^:f)XZ 2.8 Lens Aberrations. Computer Lens Design 28
HJ"sK5Q 2.9 Imaging and The Lens Formula 29
4PU@W o 2.10 Standard Optical Systems 30
_:Y|a> 2.10.1 Afocal Systems. The Telescope 30
QP!;Gwqr 2.10.2 The Simple Magnifier 32
.S=|ZP+ 2.10.3 The Microscope 34
m%"=sX7/9 3 Interference 37
#%OS=.V 3.1 Introduction 37
e9S*^2; 3.2 General Description 37
@ZV>Cl@%2 3.3 Coherence 38
94*MRn1E 3.4 Interference between two Plane Waves 41
k!+v*+R+V 3.4.1 Laser Doppler Velocimetry (LDV) 45
N5cC!K 3.5 Interference between other Waves 46
aGE}
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$}YN`:{ 3.6.1 Wavefront Division 50
7VkjnG^!: 3.6.2 Amplitude Division 51
!>K=@9NC|. 3.6.3 The Dual-Frequency Michelson Interferometer 54
tLdQO" 3.6.4 Heterodyne (Homodyne) Detection 55
S4(?=,^- 3.7 Spatial and Temporal Coherence 56
qla=LS\-A+ 3.8 Optical Coherence Tomography 61
^y|`\oyqwN 4 Diffraction 67
6B>*v`T: 4.1 Introduction 67
Ln\Gv/) 4.2 Diffraction from a Single Slit 67
2AxKB+c1` 4.3 Diffraction from a Grating 70
8zJye6f;l 4.3.1 The Grating Equation. Amplitude Transmittance 70
u^VQwu6?G 4.3.2 The Spatial Frequency Spectrum 73
(0?FZ.9% 4.4 Fourier Optics 75
pMUUF5 4.5 Optical Filtering 76
z! k 4.5.1 Practical Filtering Set-Ups 78
Nlc3S+$`z 4.6 Physical Optics Description
EW]8k@&g of Image Formation 81
]`h@[fYge 4.6.1 The Coherent Transfer Function 83
C'sA0O@O 4.6.2 The Incoherent Transfer Function 85
4Xn-L&0z 4.6.3 The Depth of Focus 88
<
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Q5Mn= 5 Light Sources and Detectors 99
<<YH4}wZ 5.1 Introduction 99
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~"R;p}5" 5.2.1 Lambertian Surface 102
O#vIn} 5.2.2 Blackbody Radiator 103
"Vwk&~B% 5.2.3 Examples 105
*tDxwD7 5.3 Incoherent Light Sources 108
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Fj<a;oV 5.4.1 Stimulated Emission 109
v:9Vp{) 5.4.2 Gas Lasers 112
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Q 9JT6 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
(|y@ftr@ 5.4.5 Solid-State Lasers 117
c&SSf_0O* 5.4.6 Other Lasers 119
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