Optical Metrology Third Edition W8;!rFW M]/DKo Kjell J. G˚asvik
I3d}DpPx% Spectra Vision AS, Trondheim, Norway
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Kr `/sWZ ;[(d=6{hc] Preface to the Third Edition xi
E0 E K8 8 1Basics 1
R^ P> yk8 1.1 Introduction 1
f fBd 1.2 Wave Motion. The Electromagnetic Spectrum 1
n${k^e -= 1.3 The Plane Wave. Light Rays 3
g|7o1{ 1.4 Phase Difference 4
r\Kcg~D> 1.5 Complex Notation. Complex Amplitude 5
sowwXrECg@ 1.6 Oblique Incidence of A Plane Wave 5
SW'e TG 1.7 The Spherical Wave 7
cC+2%q B 1.8 The Intensity 8
5,g +OY=\ 1.9 Geometrical Optics 8
%'Q2c'r 1.10 The Simple Convex (Positive) Lens 10
7')W+`o8eL 1.11 A Plane-Wave Set-Up 11
<c:H u{D 2 Gaussian Optics 15
!2Z" Lm 2.1 Introduction 15
=WBfaxL} 2.2 Refraction at a Spherical Surface 15
( }Bb=~ 2.2.1 Examples 19
/> /e 2.3 The General Image-Forming System 19
Gn_DIFa 2.4 The Image-Formation Process 21
z ynu0X 2.5 Reflection at a Spherical Surface 23
&>E gKL 2.6 Aspheric Lenses 25
4KnBb_w 2.7 Stops and Apertures 26
Y?3tf0 t/ 2.8 Lens Aberrations. Computer Lens Design 28
J p+'" a 2.9 Imaging and The Lens Formula 29
9OW8/H&! 2.10 Standard Optical Systems 30
&} `a"tYr 2.10.1 Afocal Systems. The Telescope 30
2A[hMbL 2.10.2 The Simple Magnifier 32
LdN[N^n[H 2.10.3 The Microscope 34
lv'WRS'} 3 Interference 37
<r$h =hM 3.1 Introduction 37
v^8sL` F 3.2 General Description 37
V
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q!@!eC[b 3.4 Interference between two Plane Waves 41
[|=M<>?[ 3.4.1 Laser Doppler Velocimetry (LDV) 45
f:<BUq a 3.5 Interference between other Waves 46
a%`%("g! 3.6 Interferometry 49
p?,<{mAe 3.6.1 Wavefront Division 50
j-W$)c3X 3.6.2 Amplitude Division 51
R_KD Y 3.6.3 The Dual-Frequency Michelson Interferometer 54
|%v:>XEO 3.6.4 Heterodyne (Homodyne) Detection 55
hr 6j+p: 3.7 Spatial and Temporal Coherence 56
. _^ne=Lx 3.8 Optical Coherence Tomography 61
( I#6!Yt9J 4 Diffraction 67
c e}A!v 4.1 Introduction 67
?X@[ibH6 4.2 Diffraction from a Single Slit 67
-P/DmSS8V 4.3 Diffraction from a Grating 70
AJxN9[Z!N 4.3.1 The Grating Equation. Amplitude Transmittance 70
Op c szq5n 4.3.2 The Spatial Frequency Spectrum 73
_lwKa, } 4.4 Fourier Optics 75
bS r"k 4.5 Optical Filtering 76
$5)#L$!,] 4.5.1 Practical Filtering Set-Ups 78
"8ellKh 4.6 Physical Optics Description
$DIy ?kZ of Image Formation 81
Hy&Z0W'l 4.6.1 The Coherent Transfer Function 83
Vb\g49\o/ 4.6.2 The Incoherent Transfer Function 85
OB$Jv<C@ 4.6.3 The Depth of Focus 88
3zD#V3 = 4.7 The Phase-Modulated Sinusoidal Grating 89
:VZS7$5 5 Light Sources and Detectors 99
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5.1 Introduction 99
e8^/S^ =&d 5.2 Radiometry. Photometry 99
wTU$jd1;+ 5.2.1 Lambertian Surface 102
#NYnZ^6e 5.2.2 Blackbody Radiator 103
T :d+Q z\ 5.2.3 Examples 105
u@ #%SX 5.3 Incoherent Light Sources 108
\2 N;V E 5.4 Coherent Light Sources 109
9]oT/ooM 5.4.1 Stimulated Emission 109
h]ae^ M 5.4.2 Gas Lasers 112
vu\ W5M 5.4.3 Liquid Lasers 114
* $fM}6} 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
}%/mPbd# 5.4.5 Solid-State Lasers 117
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5.4.6 Other Lasers 119
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