Optical Metrology Third Edition r .b!3CoQ m dTCe
HX Kjell J. G˚asvik
/<$ \)|r Spectra Vision AS, Trondheim, Norway
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YCd[ s[ Preface to the Third Edition xi
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yz8 1Basics 1
u:f.g?!`" 1.1 Introduction 1
Wc+)EX~KS 1.2 Wave Motion. The Electromagnetic Spectrum 1
9vZD ?6D,n 1.3 The Plane Wave. Light Rays 3
g",htYoEnj 1.4 Phase Difference 4
5J4'\M 1.5 Complex Notation. Complex Amplitude 5
t\$P*_ 1.6 Oblique Incidence of A Plane Wave 5
.` 3O4]N[ 1.7 The Spherical Wave 7
mew,S)dq! 1.8 The Intensity 8
TZk.?@s5 1.9 Geometrical Optics 8
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WEdf+ 1.10 The Simple Convex (Positive) Lens 10
sox0:9Oqnf 1.11 A Plane-Wave Set-Up 11
lU[" ZFP 2 Gaussian Optics 15
IE| $mUabm 2.1 Introduction 15
RHc-kggk! 2.2 Refraction at a Spherical Surface 15
fGtUr _D 2.2.1 Examples 19
VNcxST15a 2.3 The General Image-Forming System 19
YxUC.2V|7$ 2.4 The Image-Formation Process 21
)E.!jL:g 2.5 Reflection at a Spherical Surface 23
S_VZ^1X] 2.6 Aspheric Lenses 25
=x/Ap1 2.7 Stops and Apertures 26
fvDt_g9 oI 2.8 Lens Aberrations. Computer Lens Design 28
i0y^b5@MOb 2.9 Imaging and The Lens Formula 29
*+ql{\am4N 2.10 Standard Optical Systems 30
n5~7x 2.10.1 Afocal Systems. The Telescope 30
^T#bla893 2.10.2 The Simple Magnifier 32
1webk;IM 2.10.3 The Microscope 34
\Y0o~JD 3 Interference 37
`H.~ # $ 3.1 Introduction 37
O#g'4 S 3.2 General Description 37
oK5"RW 3.3 Coherence 38
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qBKRm0< W 3.4.1 Laser Doppler Velocimetry (LDV) 45
x9 s 7:F 3.5 Interference between other Waves 46
]b"Oy}ARW 3.6 Interferometry 49
]{Ytf'bG 3.6.1 Wavefront Division 50
N<|_ tC+ct 3.6.2 Amplitude Division 51
<GbF4\ue 3.6.3 The Dual-Frequency Michelson Interferometer 54
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G>/Gw 90E 3.7 Spatial and Temporal Coherence 56
Stkyz:,( 3.8 Optical Coherence Tomography 61
Z-fQ{&a{ 4 Diffraction 67
p=7 { 4.1 Introduction 67
S4m??B 4.2 Diffraction from a Single Slit 67
%MQU&H9 [ 4.3 Diffraction from a Grating 70
rff=ud>Jf 4.3.1 The Grating Equation. Amplitude Transmittance 70
m UmU_L u8 4.3.2 The Spatial Frequency Spectrum 73
mIK-a {?G 4.4 Fourier Optics 75
@%7IZg;P6 4.5 Optical Filtering 76
/A8ua=Kn 4.5.1 Practical Filtering Set-Ups 78
v-k~Q$7~ 4.6 Physical Optics Description
g ni=S~u of Image Formation 81
G% |$3 4.6.1 The Coherent Transfer Function 83
8
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eF[CiO8F2 4.6.3 The Depth of Focus 88
Aj854 L(! 4.7 The Phase-Modulated Sinusoidal Grating 89
0h[p w 5 Light Sources and Detectors 99
bjQp6!TsZ 5.1 Introduction 99
uANG_sX^n 5.2 Radiometry. Photometry 99
/k$h2,O"* 5.2.1 Lambertian Surface 102
3D"2yTM( 5.2.2 Blackbody Radiator 103
#y<KO`Es 5.2.3 Examples 105
G E=J Y 5.3 Incoherent Light Sources 108
*Kpk1 5.4 Coherent Light Sources 109
x)Y?kVw21" 5.4.1 Stimulated Emission 109
1S&GhJ<wJ 5.4.2 Gas Lasers 112
ne]P -5 0 5.4.3 Liquid Lasers 114
NUlp4i~Q 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
LW={| 3} 5.4.5 Solid-State Lasers 117
xJphG 5.4.6 Other Lasers 119
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