Optical Metrology Third Edition qe?Qeh(!X n#4Gv|{XMD Kjell J. G˚asvik
8'_ 0g[s Spectra Vision AS, Trondheim, Norway
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I b._m 8z ~ Preface to the Third Edition xi
eJHp6)2 1Basics 1
kx:jI^ 1.1 Introduction 1
;$7v%Ls= 1.2 Wave Motion. The Electromagnetic Spectrum 1
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1.3 The Plane Wave. Light Rays 3
:=*}htP4C 1.4 Phase Difference 4
" !-Kd'V 1.5 Complex Notation. Complex Amplitude 5
Q8q@Y R# 1.6 Oblique Incidence of A Plane Wave 5
Mu{BUtkzG 1.7 The Spherical Wave 7
iCP~O 1.8 The Intensity 8
IxOc':/jY 1.9 Geometrical Optics 8
dFW.}"^c 1.10 The Simple Convex (Positive) Lens 10
$e
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GKZN}bOm\ 2 Gaussian Optics 15
m2xBS!fm 2.1 Introduction 15
+6l]] *H 2.2 Refraction at a Spherical Surface 15
?'eq",c#4N 2.2.1 Examples 19
2/B)O)#ls 2.3 The General Image-Forming System 19
gzf-)J 2.4 The Image-Formation Process 21
X`:'i?(yj 2.5 Reflection at a Spherical Surface 23
\K7t'20 2.6 Aspheric Lenses 25
T_LLJ}6M 2.7 Stops and Apertures 26
+BL{@,zr 2.8 Lens Aberrations. Computer Lens Design 28
eh(<m8I 2.9 Imaging and The Lens Formula 29
$shp(T,q 2.10 Standard Optical Systems 30
| kXm}K 2.10.1 Afocal Systems. The Telescope 30
)&,{?$ . 2.10.2 The Simple Magnifier 32
_Zc4=c,K 2.10.3 The Microscope 34
6ZOy&fd,Ty 3 Interference 37
xq[Yg15d% 3.1 Introduction 37
D."=k{r. 3.2 General Description 37
Q`ME@vz 3.3 Coherence 38
T2=HG Z 3.4 Interference between two Plane Waves 41
@0NJ{ 3.4.1 Laser Doppler Velocimetry (LDV) 45
fDh]tua 3.5 Interference between other Waves 46
N|K4{Frm 3.6 Interferometry 49
vWjnI*6T# 3.6.1 Wavefront Division 50
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V5p0h~PK 3.6.3 The Dual-Frequency Michelson Interferometer 54
nlc.u}# 3.6.4 Heterodyne (Homodyne) Detection 55
iPj~I 3.7 Spatial and Temporal Coherence 56
RLVATM5 3.8 Optical Coherence Tomography 61
QJGKQ2^ n 4 Diffraction 67
0N;%2=2_E 4.1 Introduction 67
8e&p\%1 4.2 Diffraction from a Single Slit 67
28I^$> [ 4.3 Diffraction from a Grating 70
Z>P*@S,6G 4.3.1 The Grating Equation. Amplitude Transmittance 70
7TX2&kMoc 4.3.2 The Spatial Frequency Spectrum 73
{ci.V*:" 4.4 Fourier Optics 75
/M=3X|| 4.5 Optical Filtering 76
56}X/u 4.5.1 Practical Filtering Set-Ups 78
rD
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{tiKH=&J of Image Formation 81
@'6"7g 4.6.1 The Coherent Transfer Function 83
O;uG?.\ 4.6.2 The Incoherent Transfer Function 85
lDU_YEQ> 4.6.3 The Depth of Focus 88
r^fe4b 4.7 The Phase-Modulated Sinusoidal Grating 89
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i|WQ0fD 5.1 Introduction 99
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G`0V)S 5.2.1 Lambertian Surface 102
eWs&J24 5.2.2 Blackbody Radiator 103
/F)H\* 5.2.3 Examples 105
j5$GFi\kB 5.3 Incoherent Light Sources 108
E_T2z4lw 5.4 Coherent Light Sources 109
YHXLv#8 5.4.1 Stimulated Emission 109
hz:pbes 5.4.2 Gas Lasers 112
fmX!6Kv 5.4.3 Liquid Lasers 114
O`[aU%4b 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
dT|vYK}\ 5.4.5 Solid-State Lasers 117
|{>ER,<- 5.4.6 Other Lasers 119
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