Optical Metrology Third Edition n"T ^ v:/\;2 Kjell J. G˚asvik
s{R,- \_ Spectra Vision AS, Trondheim, Norway
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!#_2 ![ c0'ryS_Z9 Preface to the Third Edition xi
0t%]z! 1Basics 1
!IdVg $7 1.1 Introduction 1
rAfz? 1.2 Wave Motion. The Electromagnetic Spectrum 1
" Q?~LB 1.3 The Plane Wave. Light Rays 3
Ba8=nGa4KY 1.4 Phase Difference 4
-yBKA]"<I 1.5 Complex Notation. Complex Amplitude 5
RW+u5Y 1.6 Oblique Incidence of A Plane Wave 5
9Z!n!o7D 1.7 The Spherical Wave 7
PXYLLX\3 1.8 The Intensity 8
}LS8q 1.9 Geometrical Optics 8
fMg9h9U 1.10 The Simple Convex (Positive) Lens 10
pQBn8H|Y 1.11 A Plane-Wave Set-Up 11
UjQz 2 Gaussian Optics 15
\/YRhQ 2.1 Introduction 15
nH?6o#]N 2.2 Refraction at a Spherical Surface 15
0|FxSc 2.2.1 Examples 19
Rtz~:v% 2.3 The General Image-Forming System 19
dhob]8b 2.4 The Image-Formation Process 21
wDh]vH[ 2.5 Reflection at a Spherical Surface 23
,{HQKHg 2.6 Aspheric Lenses 25
p"p~Bx 2.7 Stops and Apertures 26
Sp5:R75vI 2.8 Lens Aberrations. Computer Lens Design 28
N'VTdf? 2.9 Imaging and The Lens Formula 29
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1*u]v{JJ( 2.10.1 Afocal Systems. The Telescope 30
'wk,t^) 2.10.2 The Simple Magnifier 32
K<*6E@+i 2.10.3 The Microscope 34
}x`Cnn 3 Interference 37
MGm*({% 3.1 Introduction 37
I{cH$jt< 3.2 General Description 37
rgzra"u) 3.3 Coherence 38
W+#Q>^ Q> 3.4 Interference between two Plane Waves 41
\L(cFjLIl 3.4.1 Laser Doppler Velocimetry (LDV) 45
l; _IH|A 3.5 Interference between other Waves 46
/S"jO[n9b 3.6 Interferometry 49
?d-w#<AiV 3.6.1 Wavefront Division 50
\,G9'c 'u 3.6.2 Amplitude Division 51
hz4?ku 3.6.3 The Dual-Frequency Michelson Interferometer 54
1OMXg=Y 3.6.4 Heterodyne (Homodyne) Detection 55
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3.7 Spatial and Temporal Coherence 56
=|z:wlOs 3.8 Optical Coherence Tomography 61
T<pG$4_ 4 Diffraction 67
Sc[#]2 } 4.1 Introduction 67
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Dhn7N8(LF! 4.3 Diffraction from a Grating 70
J;>epM;* 4.3.1 The Grating Equation. Amplitude Transmittance 70
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8 4.3.2 The Spatial Frequency Spectrum 73
HXa[0VOx 4.4 Fourier Optics 75
dR]-R/1| 4.5 Optical Filtering 76
E)$>t}$ 4.5.1 Practical Filtering Set-Ups 78
gUru=p 4.6 Physical Optics Description
D8wf`RUt of Image Formation 81
pNb2t/8%% 4.6.1 The Coherent Transfer Function 83
^<OYW|q?\r 4.6.2 The Incoherent Transfer Function 85
G^W0!u,@ 4.6.3 The Depth of Focus 88
x8rg/y 4.7 The Phase-Modulated Sinusoidal Grating 89
5U~KYy^v 5 Light Sources and Detectors 99
o4kLgY !Q 5.1 Introduction 99
=Pl@+RgK+ 5.2 Radiometry. Photometry 99
+<1 |apS1 5.2.1 Lambertian Surface 102
[_'A(. 5.2.2 Blackbody Radiator 103
~-zTY&c_ 5.2.3 Examples 105
skcyLIb 5.3 Incoherent Light Sources 108
2xLtJR4L 5.4 Coherent Light Sources 109
9i5?J ]o^ 5.4.1 Stimulated Emission 109
+-<G(^ 5.4.2 Gas Lasers 112
_U^[h ! 5.4.3 Liquid Lasers 114
[nO3%7t@ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
v@Uk% O/ 5.4.5 Solid-State Lasers 117
" !EnQB= 5.4.6 Other Lasers 119
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