Optical Metrology Third Edition .ATpwFal xI,3( A. Kjell J. G˚asvik
[REH*_ Spectra Vision AS, Trondheim, Norway
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@ Preface to the Third Edition xi
[3dGHf;miw 1Basics 1
:k9T `Aa] 1.1 Introduction 1
l!1_~!{y 1.2 Wave Motion. The Electromagnetic Spectrum 1
`.@udfog^0 1.3 The Plane Wave. Light Rays 3
yp~z-aRa 1.4 Phase Difference 4
^"Bhp:o2 1.5 Complex Notation. Complex Amplitude 5
S @[]znH 1.6 Oblique Incidence of A Plane Wave 5
$uLTYu 1.7 The Spherical Wave 7
6{I7=.V 1.8 The Intensity 8
bI.hG32 1.9 Geometrical Optics 8
SX,$ $43 1.10 The Simple Convex (Positive) Lens 10
@@ j\OR 1.11 A Plane-Wave Set-Up 11
j32*9 2 Gaussian Optics 15
c{^1`(#? 2.1 Introduction 15
L I KuK# 2.2 Refraction at a Spherical Surface 15
:@(1~Hm 2.2.1 Examples 19
%=z>kU1| 2.3 The General Image-Forming System 19
a3 n
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p$"~v A . 2.5 Reflection at a Spherical Surface 23
5$i(f8* 2.6 Aspheric Lenses 25
",apO 2.7 Stops and Apertures 26
Pk&=\i< 2.8 Lens Aberrations. Computer Lens Design 28
hq"n RH 2.9 Imaging and The Lens Formula 29
"s@Hg1 2.10 Standard Optical Systems 30
n)N!6u 2.10.1 Afocal Systems. The Telescope 30
[ __P-h{J 2.10.2 The Simple Magnifier 32
{~&] 2.10.3 The Microscope 34
H2iIBGu |L 3 Interference 37
L1_O!EQ 3.1 Introduction 37
PE.UNo>o 3.2 General Description 37
@l3&vt2=J 3.3 Coherence 38
HRTNIx 3.4 Interference between two Plane Waves 41
rvx2{1}I 3.4.1 Laser Doppler Velocimetry (LDV) 45
zMepF]V 3.5 Interference between other Waves 46
"IS; o o$g 3.6 Interferometry 49
E2l" e?AN~ 3.6.1 Wavefront Division 50
~ LI } 3.6.2 Amplitude Division 51
Uhu?G0>O 3.6.3 The Dual-Frequency Michelson Interferometer 54
\[!{tbK`2 3.6.4 Heterodyne (Homodyne) Detection 55
vJr,lBHEk 3.7 Spatial and Temporal Coherence 56
JQ LQS 3.8 Optical Coherence Tomography 61
ju:}%' 4 Diffraction 67
~ M7X] 4.1 Introduction 67
zEjl@Kf 4.2 Diffraction from a Single Slit 67
shGUG; 4.3 Diffraction from a Grating 70
C{U*{0} 4.3.1 The Grating Equation. Amplitude Transmittance 70
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ry= 4.3.2 The Spatial Frequency Spectrum 73
^G qO>1U 4.4 Fourier Optics 75
.NWsr*Tel 4.5 Optical Filtering 76
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4.5.1 Practical Filtering Set-Ups 78
'RwfW| ~6 4.6 Physical Optics Description
=Cr l{Ax of Image Formation 81
f2tCB1[D+ 4.6.1 The Coherent Transfer Function 83
TlO=dLR7d 4.6.2 The Incoherent Transfer Function 85
ZYY`f/qi 4.6.3 The Depth of Focus 88
;7[DFlS\P 4.7 The Phase-Modulated Sinusoidal Grating 89
P:J |![ 5 Light Sources and Detectors 99
p v4#`.m 5.1 Introduction 99
rhYAR r' 5.2 Radiometry. Photometry 99
ZT"vVX- )G 5.2.1 Lambertian Surface 102
GRpwEfG 5.2.2 Blackbody Radiator 103
{Mo[C% 5.2.3 Examples 105
alxIc.[ 5.3 Incoherent Light Sources 108
Bd *Ok] 5.4 Coherent Light Sources 109
Na]IT CVR 5.4.1 Stimulated Emission 109
@WXRZEz 5.4.2 Gas Lasers 112
R,7.o4Wt 5.4.3 Liquid Lasers 114
8/B8yY-O 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
DZ`,QWuA 5.4.5 Solid-State Lasers 117
Z a,o 5.4.6 Other Lasers 119
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