Optical Metrology Third Edition R]Yhuo9,&n ~Op1NE Kjell J. G˚asvik
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HJ61C Spectra Vision AS, Trondheim, Norway
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"|G,P-5G " 5->PDp Preface to the Third Edition xi
;?o C=c 1Basics 1
f!J^vDl 1.1 Introduction 1
$F-XXBp 1.2 Wave Motion. The Electromagnetic Spectrum 1
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1.3 The Plane Wave. Light Rays 3
,pASjFWi 1.4 Phase Difference 4
CbH Nb~ 1.5 Complex Notation. Complex Amplitude 5
P8VU&b\ 1.6 Oblique Incidence of A Plane Wave 5
Qm.kXlsDI 1.7 The Spherical Wave 7
1}uDgz^ 1.8 The Intensity 8
* Z:PB%d5 1.9 Geometrical Optics 8
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7?% Hg 1.10 The Simple Convex (Positive) Lens 10
9A_7:V ] _ 1.11 A Plane-Wave Set-Up 11
jwq"B$ap 2 Gaussian Optics 15
gCJ'wv)6|% 2.1 Introduction 15
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.2sB6} 2.2 Refraction at a Spherical Surface 15
= e;wEf%` 2.2.1 Examples 19
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lzw 2.3 The General Image-Forming System 19
CN=&Je%I 2.4 The Image-Formation Process 21
H+;wnI>@ 2.5 Reflection at a Spherical Surface 23
eI}VH BAz 2.6 Aspheric Lenses 25
+Y~+o-_ 2.7 Stops and Apertures 26
m#nxw 2.8 Lens Aberrations. Computer Lens Design 28
-"zu"H~t4 2.9 Imaging and The Lens Formula 29
}S V3PdE 2.10 Standard Optical Systems 30
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2.10.1 Afocal Systems. The Telescope 30
wF uh6!J 2.10.2 The Simple Magnifier 32
zFtGc 2.10.3 The Microscope 34
QC4T=E]` j 3 Interference 37
n{t',r50 3.1 Introduction 37
[tzSr=,Cg 3.2 General Description 37
^PQV3\N 3.3 Coherence 38
#FB>}:L{h* 3.4 Interference between two Plane Waves 41
W\,lII0 3.4.1 Laser Doppler Velocimetry (LDV) 45
0'hx w 3# 3.5 Interference between other Waves 46
.NT&>X~.V 3.6 Interferometry 49
gn"&/M9E 3.6.1 Wavefront Division 50
XX-T", 3.6.2 Amplitude Division 51
]uvbQ.l_t 3.6.3 The Dual-Frequency Michelson Interferometer 54
5gD)2Q6 3.6.4 Heterodyne (Homodyne) Detection 55
pC mJY 3.7 Spatial and Temporal Coherence 56
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3u 3.8 Optical Coherence Tomography 61
6Qb)Uq3}] 4 Diffraction 67
[bv@qBL 4.1 Introduction 67
*?D2gaCta 4.2 Diffraction from a Single Slit 67
2Nkn C>9(\ 4.3 Diffraction from a Grating 70
l~YNmmv _ 4.3.1 The Grating Equation. Amplitude Transmittance 70
aELT"b,x 4.3.2 The Spatial Frequency Spectrum 73
J J?ri, 4.4 Fourier Optics 75
C/waH[Yzan 4.5 Optical Filtering 76
g&T Cff 4.5.1 Practical Filtering Set-Ups 78
LtztjAm. 4.6 Physical Optics Description
ennz/' of Image Formation 81
z[%v _S 4.6.1 The Coherent Transfer Function 83
6\ V u# r 4.6.2 The Incoherent Transfer Function 85
_-\s[p5 4.6.3 The Depth of Focus 88
;CMC`h9, 4.7 The Phase-Modulated Sinusoidal Grating 89
]z U<=b@ 5 Light Sources and Detectors 99
9'q /&uH 5.1 Introduction 99
0juIkN# 5.2 Radiometry. Photometry 99
t!SQLgA 5.2.1 Lambertian Surface 102
T DIOK 5.2.2 Blackbody Radiator 103
a{HgIQg_>R 5.2.3 Examples 105
s| r7DdI 5.3 Incoherent Light Sources 108
9! HMQ 5.4 Coherent Light Sources 109
$D s]\j* 5.4.1 Stimulated Emission 109
ff1B)e 5.4.2 Gas Lasers 112
Z 03 4wn\N 5.4.3 Liquid Lasers 114
ev%t5NZ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
K4/P( *r` 5.4.5 Solid-State Lasers 117
0^.4eX:E_ 5.4.6 Other Lasers 119
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