Optical Metrology Third Edition }3"FQ/6C 5L'bF2SI Kjell J. G˚asvik
HH\6gs]u Spectra Vision AS, Trondheim, Norway
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7(q E HZEr 5iG+O4n% Preface to the Third Edition xi
xS4B" / 1Basics 1
Jj~c&LxrO 1.1 Introduction 1
+, SUJ| 1.2 Wave Motion. The Electromagnetic Spectrum 1
:|GC~JElo5 1.3 The Plane Wave. Light Rays 3
@dy<=bh~ 1.4 Phase Difference 4
zjzW;bo( d 1.5 Complex Notation. Complex Amplitude 5
` q NhB\ 1.6 Oblique Incidence of A Plane Wave 5
(#dwIBBFt 1.7 The Spherical Wave 7
^^ Q'AE 1.8 The Intensity 8
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j 1.9 Geometrical Optics 8
tP?pN]Q$, 1.10 The Simple Convex (Positive) Lens 10
`*A!vO8 1.11 A Plane-Wave Set-Up 11
)CYm/dk 2 Gaussian Optics 15
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xhbM; 2.1 Introduction 15
lHV&8fny 2.2 Refraction at a Spherical Surface 15
h\jV@g$ 2.2.1 Examples 19
RS$!TTeQ 2.3 The General Image-Forming System 19
] Q 'Ed 2.4 The Image-Formation Process 21
*K{-J* 2.5 Reflection at a Spherical Surface 23
jkPy e{j 2.6 Aspheric Lenses 25
vS! TnmF 2.7 Stops and Apertures 26
0I8w'/s_g9 2.8 Lens Aberrations. Computer Lens Design 28
@AXRKYQ{t 2.9 Imaging and The Lens Formula 29
w3l+BUn:X 2.10 Standard Optical Systems 30
:GXD-6}^| 2.10.1 Afocal Systems. The Telescope 30
[r_ YQ*+ej 2.10.2 The Simple Magnifier 32
x6, #Jp 2.10.3 The Microscope 34
DNP %]{J 3 Interference 37
ZB+N[VJs) 3.1 Introduction 37
X& B2&e; 3.2 General Description 37
X-tc Ud 3.3 Coherence 38
dSD7(s! 3.4 Interference between two Plane Waves 41
sXD.*D 3.4.1 Laser Doppler Velocimetry (LDV) 45
&a'H vQ V 3.5 Interference between other Waves 46
#E[{ 3.6 Interferometry 49
_TB,2 R 3.6.1 Wavefront Division 50
1;; is 3.6.2 Amplitude Division 51
CXb-{|I}d 3.6.3 The Dual-Frequency Michelson Interferometer 54
4K_ fN 3.6.4 Heterodyne (Homodyne) Detection 55
%n^jho5 3.7 Spatial and Temporal Coherence 56
]BY^.!Y 3.8 Optical Coherence Tomography 61
4 CzT<cp 4 Diffraction 67
{,Y?+F 4.1 Introduction 67
X+'z@xpj 4.2 Diffraction from a Single Slit 67
.RI{\ i` 4.3 Diffraction from a Grating 70
B74L/h 4.3.1 The Grating Equation. Amplitude Transmittance 70
*5SOXrvhu6 4.3.2 The Spatial Frequency Spectrum 73
9WXJz; 4.4 Fourier Optics 75
_QD##`< 4.5 Optical Filtering 76
i.eu$ ~F 4.5.1 Practical Filtering Set-Ups 78
-~nU&$ccL 4.6 Physical Optics Description
C*;g!~{ of Image Formation 81
T-0[P; 4.6.1 The Coherent Transfer Function 83
J j< UtD+ 4.6.2 The Incoherent Transfer Function 85
[D]9M"L,vQ 4.6.3 The Depth of Focus 88
=}:9y6QR. 4.7 The Phase-Modulated Sinusoidal Grating 89
QB<9Be@e 5 Light Sources and Detectors 99
~Rs_ep'+Q2 5.1 Introduction 99
a3 &&7 n 5.2 Radiometry. Photometry 99
mSn> 5.2.1 Lambertian Surface 102
8\z5* IPGs 5.2.2 Blackbody Radiator 103
$1QQidB 5.2.3 Examples 105
Z9:erKT 5.3 Incoherent Light Sources 108
'6^20rj 5.4 Coherent Light Sources 109
n*tT < 5.4.1 Stimulated Emission 109
.'zXO 5.4.2 Gas Lasers 112
o"O=Epg 5.4.3 Liquid Lasers 114
~! *xi 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
=")}wl=s 5.4.5 Solid-State Lasers 117
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