Optical Metrology Third Edition lp5'-Jo }6 u)wF5 Kjell J. G˚asvik
qF-Fc q Spectra Vision AS, Trondheim, Norway
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aqI m W WX`wz>KK^ Preface to the Third Edition xi
~(NFjCUY? 1Basics 1
ME$J?3r 1.1 Introduction 1
wr (*RI" 1.2 Wave Motion. The Electromagnetic Spectrum 1
O3d Qno 1.3 The Plane Wave. Light Rays 3
j~ =<O<P 1.4 Phase Difference 4
*lu*h&Y 1.5 Complex Notation. Complex Amplitude 5
UF\k0oLz 1.6 Oblique Incidence of A Plane Wave 5
+afkpvj8 1.7 The Spherical Wave 7
tu@- +< * 1.8 The Intensity 8
u[4h|*'"| 1.9 Geometrical Optics 8
y5D3zqCG 1.10 The Simple Convex (Positive) Lens 10
" (~fl<; 1.11 A Plane-Wave Set-Up 11
3j[<nBsn. 2 Gaussian Optics 15
:uqEGnEut 2.1 Introduction 15
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|B-? 2.2 Refraction at a Spherical Surface 15
EG_P^ < z 2.2.1 Examples 19
$]W*;M TI} 2.3 The General Image-Forming System 19
"jq6FT)O 2.4 The Image-Formation Process 21
>* F#ZZv}p 2.5 Reflection at a Spherical Surface 23
^vzXT>t-M 2.6 Aspheric Lenses 25
.<YfnW5/K 2.7 Stops and Apertures 26
h Y *^rY' 2.8 Lens Aberrations. Computer Lens Design 28
1N { >00 2.9 Imaging and The Lens Formula 29
pN)>c, 2.10 Standard Optical Systems 30
C\;%IGn 2.10.1 Afocal Systems. The Telescope 30
Nv=% R 2.10.2 The Simple Magnifier 32
$RHw6*COG 2.10.3 The Microscope 34
Z^J)]UL/ 3 Interference 37
(Hmh b}H 3.1 Introduction 37
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!:uh? RW 3.3 Coherence 38
naeppBo 3.4 Interference between two Plane Waves 41
+(w9! 5?F 3.4.1 Laser Doppler Velocimetry (LDV) 45
f {\[+ > 3.5 Interference between other Waves 46
M0)ZJti 3.6 Interferometry 49
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#|t#N% 3.6.1 Wavefront Division 50
m1tc="j 3.6.2 Amplitude Division 51
#"H<k(-Cz 3.6.3 The Dual-Frequency Michelson Interferometer 54
,wHlU-% 3.6.4 Heterodyne (Homodyne) Detection 55
j.V7`x 3.7 Spatial and Temporal Coherence 56
Y9%zo~]-W' 3.8 Optical Coherence Tomography 61
mM+^v[= 4 Diffraction 67
o?3C -A| 4.1 Introduction 67
D*_. 4I 4.2 Diffraction from a Single Slit 67
{n<1uh9~$8 4.3 Diffraction from a Grating 70
f,3K;S-he: 4.3.1 The Grating Equation. Amplitude Transmittance 70
|y ?W#xb 4.3.2 The Spatial Frequency Spectrum 73
P`_Q-vu 4.4 Fourier Optics 75
k>E/)9%ep2 4.5 Optical Filtering 76
K!-iD aVI 4.5.1 Practical Filtering Set-Ups 78
o_ixdnc 4.6 Physical Optics Description
&s\/Uq of Image Formation 81
(8~Hr?1B 4.6.1 The Coherent Transfer Function 83
bZ+H u~ 4.6.2 The Incoherent Transfer Function 85
em ]0^otM 4.6.3 The Depth of Focus 88
uw`J5TND 4.7 The Phase-Modulated Sinusoidal Grating 89
.g=D70 5 Light Sources and Detectors 99
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' (3|hh)Tl 5.2 Radiometry. Photometry 99
4]%MrSjS 5.2.1 Lambertian Surface 102
k4"O} jQ O 5.2.2 Blackbody Radiator 103
!P d) 5.2.3 Examples 105
F)S? >P& 5.3 Incoherent Light Sources 108
_Pl5?5eZj 5.4 Coherent Light Sources 109
xp\6,Jyh 5.4.1 Stimulated Emission 109
{Z~ze` N/ 5.4.2 Gas Lasers 112
"`[4(j 5.4.3 Liquid Lasers 114
Z22#lF\ N 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
C3K")BO! 5.4.5 Solid-State Lasers 117
S3c%</' 5.4.6 Other Lasers 119
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