Optical Metrology Third Edition K*N 8Vpz( ?'^yw C` Kjell J. G˚asvik
-qpe;=g&f Spectra Vision AS, Trondheim, Norway
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p;) @R$* uOb}R Preface to the Third Edition xi
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R { 1Basics 1
YT<(2u#Ng 1.1 Introduction 1
YRU#/ TP 1.2 Wave Motion. The Electromagnetic Spectrum 1
S~V?Qe@&Z 1.3 The Plane Wave. Light Rays 3
8 )= "Ee 1.4 Phase Difference 4
J:0`* 7 1.5 Complex Notation. Complex Amplitude 5
_nec6=S6( 1.6 Oblique Incidence of A Plane Wave 5
c@{M),C~ E 1.7 The Spherical Wave 7
-!X\xA/KN 1.8 The Intensity 8
vn ^* 1.9 Geometrical Optics 8
qKNHhXi 1.10 The Simple Convex (Positive) Lens 10
gk4DoO j#P 1.11 A Plane-Wave Set-Up 11
<Gz* 2i 2 Gaussian Optics 15
6Q NO#!; 2.1 Introduction 15
kV$VKag*A 2.2 Refraction at a Spherical Surface 15
^o Q^/v~ 2.2.1 Examples 19
(ljoD[kZ 2.3 The General Image-Forming System 19
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1"O 2.4 The Image-Formation Process 21
fi'\{!!3m^ 2.5 Reflection at a Spherical Surface 23
=8E GB\P 2.6 Aspheric Lenses 25
HQ^:5 XH 2.7 Stops and Apertures 26
wZ/ b;%I! 2.8 Lens Aberrations. Computer Lens Design 28
ig4mj47wJ 2.9 Imaging and The Lens Formula 29
<ugy-vSv 2.10 Standard Optical Systems 30
/ a$B8, 2.10.1 Afocal Systems. The Telescope 30
w>&g' 2.10.2 The Simple Magnifier 32
) <_:%oB 2.10.3 The Microscope 34
e# KP3Lp 3 Interference 37
pR3K~bx^ 3.1 Introduction 37
"@rXN "4 3.2 General Description 37
}Pj;9ivz 3.3 Coherence 38
:tX, `G 3.4 Interference between two Plane Waves 41
n hG h5, 3.4.1 Laser Doppler Velocimetry (LDV) 45
pt~b=+bBm 3.5 Interference between other Waves 46
U Kf0cU 3.6 Interferometry 49
cB}6{c$_sW 3.6.1 Wavefront Division 50
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pxHJX2 3.6.4 Heterodyne (Homodyne) Detection 55
Hq "l` 3.7 Spatial and Temporal Coherence 56
h2vD*W 3.8 Optical Coherence Tomography 61
`D0H u!; 4 Diffraction 67
2E0$R %\ 4.1 Introduction 67
YfVZ59l4y6 4.2 Diffraction from a Single Slit 67
W_h!Puj_ 4.3 Diffraction from a Grating 70
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4.3.1 The Grating Equation. Amplitude Transmittance 70
6G<gA>V 4.3.2 The Spatial Frequency Spectrum 73
L+NrU+:=C 4.4 Fourier Optics 75
LRv[,]b 4.5 Optical Filtering 76
S &F 4.5.1 Practical Filtering Set-Ups 78
'<&rMn 4.6 Physical Optics Description
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m@UM*D of Image Formation 81
@xN)mi 4.6.1 The Coherent Transfer Function 83
>jpk R 4.6.2 The Incoherent Transfer Function 85
z460a[Wl 4.6.3 The Depth of Focus 88
l6< bV#_qe 4.7 The Phase-Modulated Sinusoidal Grating 89
9v(k<('_ 5 Light Sources and Detectors 99
X> ck.}F 5.1 Introduction 99
]McDN [h: 5.2 Radiometry. Photometry 99
6|]e}I@<2 5.2.1 Lambertian Surface 102
<{1=4P A 5.2.2 Blackbody Radiator 103
\mDBOC0eK 5.2.3 Examples 105
G*rlU 5.3 Incoherent Light Sources 108
4i(?5p>f 5.4 Coherent Light Sources 109
>d$Sh`a6 5.4.1 Stimulated Emission 109
n{xL1A=9 5.4.2 Gas Lasers 112
H]Vo XJ\* 5.4.3 Liquid Lasers 114
|/O_AnGI 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
!s(s^ 5.4.5 Solid-State Lasers 117
d2O x:| <) 5.4.6 Other Lasers 119
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