Optical Metrology Third Edition )m[!HE`cZ Yb =8\<; Kjell J. G˚asvik
'q*1HNwGp Spectra Vision AS, Trondheim, Norway
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@F7QQs3 j7-#">YL Preface to the Third Edition xi
kX1hcAa 1Basics 1
5<w0*~Zd~ 1.1 Introduction 1
7*XG]=z/ 1.2 Wave Motion. The Electromagnetic Spectrum 1
wq]nz! 1.3 The Plane Wave. Light Rays 3
GZ'hj_2%< 1.4 Phase Difference 4
8}\"LXRbo 1.5 Complex Notation. Complex Amplitude 5
V43JY_: 1.6 Oblique Incidence of A Plane Wave 5
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~[9 ]M)=O0 1.8 The Intensity 8
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N&>D/Z;" 1.10 The Simple Convex (Positive) Lens 10
Vxgc|E^J 1.11 A Plane-Wave Set-Up 11
TU. h 2 Gaussian Optics 15
Eun%uah6c 2.1 Introduction 15
R4qk/@]t 2.2 Refraction at a Spherical Surface 15
103Ik6.o 2.2.1 Examples 19
h}`<pq 2.3 The General Image-Forming System 19
gieX`} 2.4 The Image-Formation Process 21
{{DW P-v4 2.5 Reflection at a Spherical Surface 23
hrAI@.Bo 2.6 Aspheric Lenses 25
eB]ZnJ2^= 2.7 Stops and Apertures 26
1g/mzC 2.8 Lens Aberrations. Computer Lens Design 28
5d4-95['_ 2.9 Imaging and The Lens Formula 29
o!H"~5Trv! 2.10 Standard Optical Systems 30
jY?%LY@5I 2.10.1 Afocal Systems. The Telescope 30
o`sn/x 2.10.2 The Simple Magnifier 32
#-VKk 2.10.3 The Microscope 34
:!A@B.E 3 Interference 37
,zw 3.1 Introduction 37
zR<jZwo]# 3.2 General Description 37
(8ymQ!aY 3.3 Coherence 38
lp]O8^][& 3.4 Interference between two Plane Waves 41
ja>T nfu 3.4.1 Laser Doppler Velocimetry (LDV) 45
yWK[@;S]% 3.5 Interference between other Waves 46
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vMI \$E& 3.6.1 Wavefront Division 50
P2Eyqd8 3.6.2 Amplitude Division 51
p' gv5\u[w 3.6.3 The Dual-Frequency Michelson Interferometer 54
G![1+2p:Tq 3.6.4 Heterodyne (Homodyne) Detection 55
!{3pp 3.7 Spatial and Temporal Coherence 56
I%s/h4x^B[ 3.8 Optical Coherence Tomography 61
^Ta"Uk' 4 Diffraction 67
Z2 @&4_P 4.1 Introduction 67
jf2E{48P 4.2 Diffraction from a Single Slit 67
4i19HD_ 4.3 Diffraction from a Grating 70
IWQ8e$N 4.3.1 The Grating Equation. Amplitude Transmittance 70
_6[NYv$" 4.3.2 The Spatial Frequency Spectrum 73
><DE1tG 4.4 Fourier Optics 75
Gce_gZH7{ 4.5 Optical Filtering 76
@F1pu3E 4.5.1 Practical Filtering Set-Ups 78
EagI)W!s[ 4.6 Physical Optics Description
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r8 of Image Formation 81
FPMW"~v 4.6.1 The Coherent Transfer Function 83
& 3a+6!L[ 4.6.2 The Incoherent Transfer Function 85
%$}iM< 4.6.3 The Depth of Focus 88
C^~iz
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BdYh: 5 Light Sources and Detectors 99
O|/tRkDMP{ 5.1 Introduction 99
bC{~/ JP 5.2 Radiometry. Photometry 99
c*W$wr 5.2.1 Lambertian Surface 102
qjFgy)qV 5.2.2 Blackbody Radiator 103
f;Dz(~hw 5.2.3 Examples 105
2,fB$5+ 5.3 Incoherent Light Sources 108
:`|,a( 5.4 Coherent Light Sources 109
+l#2u#e 5.4.1 Stimulated Emission 109
5-J-Tn 5.4.2 Gas Lasers 112
(+@.L7>m+t 5.4.3 Liquid Lasers 114
&d2/F i+ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Psv!`K 5.4.5 Solid-State Lasers 117
KXGs'D 5.4.6 Other Lasers 119
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