Optical Metrology Third Edition hW]:CIqk R{/nlS5 Kjell J. G˚asvik
lbMb Spectra Vision AS, Trondheim, Norway
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iCx}v[;Ol =MA$xz3 Preface to the Third Edition xi
@hp@*$#& 9 1Basics 1
Y2 }\~I0 1.1 Introduction 1
\G2& 1.2 Wave Motion. The Electromagnetic Spectrum 1
>Qr(#Bt) 1.3 The Plane Wave. Light Rays 3
{qK>A?9 1.4 Phase Difference 4
C/!kMMh>vV 1.5 Complex Notation. Complex Amplitude 5
X180_Kt2 1.6 Oblique Incidence of A Plane Wave 5
=98@MX%P 1.7 The Spherical Wave 7
W2s6!_AN 1.8 The Intensity 8
SD |5v* 1.9 Geometrical Optics 8
Ahm*_E2E 1.10 The Simple Convex (Positive) Lens 10
rF'q\tJDz 1.11 A Plane-Wave Set-Up 11
J'W6NitMr 2 Gaussian Optics 15
YFeF(k!!n 2.1 Introduction 15
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2.2 Refraction at a Spherical Surface 15
rz5AIe>Hm 2.2.1 Examples 19
(U4]d` 2.3 The General Image-Forming System 19
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J T7 2.4 The Image-Formation Process 21
JHBX'1GQa 2.5 Reflection at a Spherical Surface 23
,5.ve)/dE 2.6 Aspheric Lenses 25
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@-)jU! 2.8 Lens Aberrations. Computer Lens Design 28
gy0l@ 5 N 2.9 Imaging and The Lens Formula 29
:@mb.' %*! 2.10 Standard Optical Systems 30
ly9.2<oz}L 2.10.1 Afocal Systems. The Telescope 30
p@ 0 Va 2.10.2 The Simple Magnifier 32
')zdI]@ M 2.10.3 The Microscope 34
< j^8L^ 3 Interference 37
llN#4D9s 3.1 Introduction 37
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EVX*YGxx6 3.3 Coherence 38
8Th{(J_ 3.4 Interference between two Plane Waves 41
JlR (U. " 3.4.1 Laser Doppler Velocimetry (LDV) 45
lcO;3CrJ! 3.5 Interference between other Waves 46
Wb4+U;C^!' 3.6 Interferometry 49
8iQ8s;@S&> 3.6.1 Wavefront Division 50
_HjS!(lMk 3.6.2 Amplitude Division 51
:(ni/,~Q 3.6.3 The Dual-Frequency Michelson Interferometer 54
,ELbm 3.6.4 Heterodyne (Homodyne) Detection 55
[M?'N w/[S 3.7 Spatial and Temporal Coherence 56
F|nJ3:v 3.8 Optical Coherence Tomography 61
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S~W cu 4 Diffraction 67
t*KgCk 1 4.1 Introduction 67
SA!P:Q?h 4.2 Diffraction from a Single Slit 67
v"-@'qN' 4.3 Diffraction from a Grating 70
`3GYV|LeQ 4.3.1 The Grating Equation. Amplitude Transmittance 70
vf^ `' 4.3.2 The Spatial Frequency Spectrum 73
f_'#wc6 4.4 Fourier Optics 75
.d/e?H: 4.5 Optical Filtering 76
(@X].oM^y 4.5.1 Practical Filtering Set-Ups 78
K FM x(fD 4.6 Physical Optics Description
d^ pzMaCI of Image Formation 81
?9W2wqN>o 4.6.1 The Coherent Transfer Function 83
HF lMx 4.6.2 The Incoherent Transfer Function 85
o>~xrV`E 4.6.3 The Depth of Focus 88
HX}9;O 4.7 The Phase-Modulated Sinusoidal Grating 89
Oc A;+}> 5 Light Sources and Detectors 99
*{TB<^ * 5.1 Introduction 99
d K.k,7 R 5.2 Radiometry. Photometry 99
I.'(n8* 5.2.1 Lambertian Surface 102
ZE393FnE 5.2.2 Blackbody Radiator 103
% XvJJ 5.2.3 Examples 105
+s$` kl 5.3 Incoherent Light Sources 108
):<9j"Z;At 5.4 Coherent Light Sources 109
KcPI ,.4{ 5.4.1 Stimulated Emission 109
QTe>EJ12 5.4.2 Gas Lasers 112
?azi(ja 5.4.3 Liquid Lasers 114
s[2 >r#M 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
8>4@g!9E 5.4.5 Solid-State Lasers 117
]&+,`1_q 5.4.6 Other Lasers 119
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