Optical Metrology Third Edition amMj uyW Z^{+,$H@ Kjell J. G˚asvik
]G Qv4 -y Spectra Vision AS, Trondheim, Norway
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ujiZM '/ihL ^^@L Preface to the Third Edition xi
7Pwg+| 1Basics 1
l<W*/}3 1.1 Introduction 1
h4tC. i~k 1.2 Wave Motion. The Electromagnetic Spectrum 1
c6t2Q6zV 1.3 The Plane Wave. Light Rays 3
#FEa 5 1.4 Phase Difference 4
B*y;>q "{U 1.5 Complex Notation. Complex Amplitude 5
ZH_FA 1.6 Oblique Incidence of A Plane Wave 5
"\4]X"3<+ 1.7 The Spherical Wave 7
&S<? 07Z 1.8 The Intensity 8
y!SF/i?Py 1.9 Geometrical Optics 8
kxygf9I!; 1.10 The Simple Convex (Positive) Lens 10
L E8 K)i 1.11 A Plane-Wave Set-Up 11
nDyvX1] 2 Gaussian Optics 15
Vu_&~z7h 2.1 Introduction 15
;&If9O 1 2.2 Refraction at a Spherical Surface 15
UHr { 2.2.1 Examples 19
PP!l 2.3 The General Image-Forming System 19
jo<>H c{g> 2.4 The Image-Formation Process 21
ri"?, }( 2.5 Reflection at a Spherical Surface 23
wTHK=n\i 2.6 Aspheric Lenses 25
{EOn r1 2.7 Stops and Apertures 26
g iaD9$C 2.8 Lens Aberrations. Computer Lens Design 28
*4-r`k|@>/ 2.9 Imaging and The Lens Formula 29
r4 9 UJE 2.10 Standard Optical Systems 30
h0T< :X 2.10.1 Afocal Systems. The Telescope 30
2IKxh 2.10.2 The Simple Magnifier 32
*Hx j_ 2.10.3 The Microscope 34
2_Pz^L 3 Interference 37
f B _4f{E 3.1 Introduction 37
l{nB.m2 3.2 General Description 37
}Vs~RJM)} 3.3 Coherence 38
o,g 6JTh 3.4 Interference between two Plane Waves 41
DhY;pG,t 3.4.1 Laser Doppler Velocimetry (LDV) 45
F<h &3 3.5 Interference between other Waves 46
sVE>=0TVP 3.6 Interferometry 49
/uC+.B9k 3.6.1 Wavefront Division 50
lO551Y^ 3.6.2 Amplitude Division 51
''$`;?t> 3.6.3 The Dual-Frequency Michelson Interferometer 54
Tf9&,!> V 3.6.4 Heterodyne (Homodyne) Detection 55
W H{cJ7wCL 3.7 Spatial and Temporal Coherence 56
h |s*i 3.8 Optical Coherence Tomography 61
)W[KD,0+j 4 Diffraction 67
'u4}t5Bu 5 4.1 Introduction 67
)o05Vda 4.2 Diffraction from a Single Slit 67
^fA3<| 4.3 Diffraction from a Grating 70
Sja"( sJ 4.3.1 The Grating Equation. Amplitude Transmittance 70
;[?J5X, 4.3.2 The Spatial Frequency Spectrum 73
A28ZSL 4.4 Fourier Optics 75
$.ymby 4.5 Optical Filtering 76
29R_n )ne 4.5.1 Practical Filtering Set-Ups 78
9QX&7cs&[ 4.6 Physical Optics Description
6$W - ? of Image Formation 81
2Som0T<2 4.6.1 The Coherent Transfer Function 83
zb@L) % 4.6.2 The Incoherent Transfer Function 85
=@bXGMsV! 4.6.3 The Depth of Focus 88
O{;M6U8C\ 4.7 The Phase-Modulated Sinusoidal Grating 89
JA }S{ 5 Light Sources and Detectors 99
uU8*$+ " 5.1 Introduction 99
3c1o,2 5.2 Radiometry. Photometry 99
ODM>Z8@W/ 5.2.1 Lambertian Surface 102
)v*v 5.2.2 Blackbody Radiator 103
gg lNpzj 5.2.3 Examples 105
P Xyyyir{ 5.3 Incoherent Light Sources 108
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OU0xZ=G 5.4.1 Stimulated Emission 109
/V#MLPA 5.4.2 Gas Lasers 112
0!3!?E < 5.4.3 Liquid Lasers 114
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U*= 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Jm{As*W> 5.4.5 Solid-State Lasers 117
F!z! :yp 5.4.6 Other Lasers 119
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