Optical Metrology Third Edition Fw {68ggk n*' :,m Kjell J. G˚asvik
k3 e6y Spectra Vision AS, Trondheim, Norway
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08{^Ksg :-<30LS $ Preface to the Third Edition xi
->o[ S0 1Basics 1
tC oE4Ed 1.1 Introduction 1
JiO8 EIM 1.2 Wave Motion. The Electromagnetic Spectrum 1
w ^^l, 1.3 The Plane Wave. Light Rays 3
6uKth mr 1.4 Phase Difference 4
\x: U`T 1.5 Complex Notation. Complex Amplitude 5
Iw`|,-| 1.6 Oblique Incidence of A Plane Wave 5
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u%%O8 1.7 The Spherical Wave 7
+'iqGg- 1.8 The Intensity 8
xLLTp7b( 1.9 Geometrical Optics 8
I Z*) 1.10 The Simple Convex (Positive) Lens 10
?Q+*[YEJ5 1.11 A Plane-Wave Set-Up 11
zY@0R`{@p 2 Gaussian Optics 15
f Ayh9 2.1 Introduction 15
OwPHp&{ Y 2.2 Refraction at a Spherical Surface 15
yB/F 6/B~ 2.2.1 Examples 19
8z7eL> ) 2.3 The General Image-Forming System 19
QVkji7)ZT 2.4 The Image-Formation Process 21
w1(5,~OB 2.5 Reflection at a Spherical Surface 23
b/JjA 2.6 Aspheric Lenses 25
z_ '!?K{ 2.7 Stops and Apertures 26
[{ R>'~ 2.8 Lens Aberrations. Computer Lens Design 28
5} <OB-9 2.9 Imaging and The Lens Formula 29
=8TBkxG 2.10 Standard Optical Systems 30
k%\y,b* 2.10.1 Afocal Systems. The Telescope 30
J %B/(v ` 2.10.2 The Simple Magnifier 32
JUj.:n2e 2.10.3 The Microscope 34
^!i4d)) 3 Interference 37
i `p1e5$ 3.1 Introduction 37
BFP@Yn~k 3.2 General Description 37
6[RTL2&W 3.3 Coherence 38
]q4LN o 3.4 Interference between two Plane Waves 41
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2 M\7j 3.5 Interference between other Waves 46
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#0v# {o 3.6 Interferometry 49
f<$*,P 3.6.1 Wavefront Division 50
)c1Pj#| 3.6.2 Amplitude Division 51
hR:i! 3.6.3 The Dual-Frequency Michelson Interferometer 54
8' '1H<f 3.6.4 Heterodyne (Homodyne) Detection 55
6(t'B!x 3.7 Spatial and Temporal Coherence 56
7\$ b%A 3.8 Optical Coherence Tomography 61
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D#o 4 Diffraction 67
.HGK 3 4.1 Introduction 67
])bgUH 4.2 Diffraction from a Single Slit 67
y!:vX6l 4.3 Diffraction from a Grating 70
xXI WEZA 4.3.1 The Grating Equation. Amplitude Transmittance 70
=jpRv<X|, 4.3.2 The Spatial Frequency Spectrum 73
N+5f.c+S- 4.4 Fourier Optics 75
UM`$aPz 4.5 Optical Filtering 76
xaB#GdD 4.5.1 Practical Filtering Set-Ups 78
g`C"t3~%S 4.6 Physical Optics Description
sh0x <_ of Image Formation 81
|0>rojMq 4.6.1 The Coherent Transfer Function 83
_8-1wx 4.6.2 The Incoherent Transfer Function 85
-kP2Brm 4.6.3 The Depth of Focus 88
Q>;Aq!mr= 4.7 The Phase-Modulated Sinusoidal Grating 89
j jv'"K2 5 Light Sources and Detectors 99
w)qmq 5.1 Introduction 99
r 4gLoHD) 5.2 Radiometry. Photometry 99
r3OtQ 5.2.1 Lambertian Surface 102
/#"9!8%V 5.2.2 Blackbody Radiator 103
W>?aZv 5.2.3 Examples 105
tQyQ+1 5.3 Incoherent Light Sources 108
.wWf#bB 5.4 Coherent Light Sources 109
Z\QN n 5.4.1 Stimulated Emission 109
wt'"<UN 5.4.2 Gas Lasers 112
t1oT Z 5.4.3 Liquid Lasers 114
9^ C6ZgNS 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
z Z~t ,> 5.4.5 Solid-State Lasers 117
; Z;` BGZJ 5.4.6 Other Lasers 119
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