Optical Metrology Third Edition 5)+(McJC )mz [2Sfg Kjell J. G˚asvik
s #/JMvQ# Spectra Vision AS, Trondheim, Norway
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LYhgBG, \bw7 1( Q Preface to the Third Edition xi
S7N3L." 1Basics 1
!@{_Qt1 1.1 Introduction 1
<W2}^q7F^ 1.2 Wave Motion. The Electromagnetic Spectrum 1
nyWA(%N1 1.3 The Plane Wave. Light Rays 3
%6j|/|#] 1.4 Phase Difference 4
odMjxWY 1.5 Complex Notation. Complex Amplitude 5
&W:Wv,3 1.6 Oblique Incidence of A Plane Wave 5
V @&zn8? 1.7 The Spherical Wave 7
VO] Jvf 1.8 The Intensity 8
Tvi C1 {2 1.9 Geometrical Optics 8
>*(4evU 1.10 The Simple Convex (Positive) Lens 10
T8h.!Vef 1.11 A Plane-Wave Set-Up 11
oUIa/}}w5 2 Gaussian Optics 15
XAR~d6iZ 2.1 Introduction 15
ck>|p09q'9 2.2 Refraction at a Spherical Surface 15
*/sVuD^b` 2.2.1 Examples 19
LKieOgX 2.3 The General Image-Forming System 19
7} (wEC 2.4 The Image-Formation Process 21
kbJ/7 2.5 Reflection at a Spherical Surface 23
X+)68 2.6 Aspheric Lenses 25
$IX>o&S@| 2.7 Stops and Apertures 26
W?mn8Y;{` 2.8 Lens Aberrations. Computer Lens Design 28
58,_ 2.9 Imaging and The Lens Formula 29
5Al 59] 2.10 Standard Optical Systems 30
lBqu}88q0 2.10.1 Afocal Systems. The Telescope 30
H_sLviYLu 2.10.2 The Simple Magnifier 32
mVfg+d( 2.10.3 The Microscope 34
N3g[,B E 3 Interference 37
q{@j$fMt0 3.1 Introduction 37
pXL_`=3Q 3.2 General Description 37
M >P-0IC 3.3 Coherence 38
E@^`B9 ;Q7 3.4 Interference between two Plane Waves 41
;Xg6'yxJ 3.4.1 Laser Doppler Velocimetry (LDV) 45
wU HuykF 3.5 Interference between other Waves 46
,LKY?=T$z 3.6 Interferometry 49
1,=U^W.G 3.6.1 Wavefront Division 50
aF2 eGh 3.6.2 Amplitude Division 51
sJg-FVe2 3.6.3 The Dual-Frequency Michelson Interferometer 54
y?GRxoCD"e 3.6.4 Heterodyne (Homodyne) Detection 55
^Crl~~Gk` 3.7 Spatial and Temporal Coherence 56
/s.sW l 3.8 Optical Coherence Tomography 61
dFD0l?0 N 4 Diffraction 67
hPF9y@lh 4.1 Introduction 67
$]|fjB#D 4.2 Diffraction from a Single Slit 67
SoeL_#+^W 4.3 Diffraction from a Grating 70
ke_Dd? 4.3.1 The Grating Equation. Amplitude Transmittance 70
I$xfCu 4.3.2 The Spatial Frequency Spectrum 73
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2c@4<kyfP 4.5 Optical Filtering 76
?&EPZq I 4.5.1 Practical Filtering Set-Ups 78
]S9~2;2^, 4.6 Physical Optics Description
9:"% j of Image Formation 81
zR N_` U 4.6.1 The Coherent Transfer Function 83
mG@xehH 4.6.2 The Incoherent Transfer Function 85
\_}Y4 4.6.3 The Depth of Focus 88
/*!K4)$-*2 4.7 The Phase-Modulated Sinusoidal Grating 89
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(9`b{ 5 Light Sources and Detectors 99
%$ |=_K)Ks 5.1 Introduction 99
A+w51Q 5.2 Radiometry. Photometry 99
Q!(1 6 5.2.1 Lambertian Surface 102
)D_# 5.2.2 Blackbody Radiator 103
eE5U|y) _ 5.2.3 Examples 105
VeeQmR?u- 5.3 Incoherent Light Sources 108
\72(d 5.4 Coherent Light Sources 109
\M(0@#-$C 5.4.1 Stimulated Emission 109
0G ^73Z 5.4.2 Gas Lasers 112
e}Cp;c]= 5.4.3 Liquid Lasers 114
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\> 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
4<fKB& 5.4.5 Solid-State Lasers 117
ku3Vr\s 5.4.6 Other Lasers 119
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