Optical Metrology Third Edition %XF>k) g &E3Wc Kjell J. G˚asvik
2Dc2uU@`r Spectra Vision AS, Trondheim, Norway
RA];hQI? /RG>n oz.#+t%X$b Preface to the Third Edition xi
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DM 1Basics 1
!=uaB. 1.1 Introduction 1
6&J7=g%G 1.2 Wave Motion. The Electromagnetic Spectrum 1
[I~&vLTe 1.3 The Plane Wave. Light Rays 3
gWK[%.Jnw 1.4 Phase Difference 4
19h@fA[: 1.5 Complex Notation. Complex Amplitude 5
b((>?=hh 1.6 Oblique Incidence of A Plane Wave 5
I$0O4 1.7 The Spherical Wave 7
nrEG4X9 1.8 The Intensity 8
?)-#\z=6G 1.9 Geometrical Optics 8
]z77hcjB1 1.10 The Simple Convex (Positive) Lens 10
ID_#a9N 1.11 A Plane-Wave Set-Up 11
`erKHZ]S 2 Gaussian Optics 15
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4; 2.1 Introduction 15
^-^ii3G` 2.2 Refraction at a Spherical Surface 15
z=FOymvC 2.2.1 Examples 19
C0K0c6A(4 2.3 The General Image-Forming System 19
;_~9".'<d 2.4 The Image-Formation Process 21
urbSprdF 2.5 Reflection at a Spherical Surface 23
@S<6#zR 2.6 Aspheric Lenses 25
K[q{)>,9 2.7 Stops and Apertures 26
ln1!%B; 2.8 Lens Aberrations. Computer Lens Design 28
Ndz'^c 2.9 Imaging and The Lens Formula 29
N^Hj%5 2.10 Standard Optical Systems 30
''Y'ZsQ; 2.10.1 Afocal Systems. The Telescope 30
%lK/2- 2.10.2 The Simple Magnifier 32
xqQLri} 2.10.3 The Microscope 34
|Cm6RH$( 3 Interference 37
yM2}JsC 3.1 Introduction 37
#3knKBH 3.2 General Description 37
2MU$OI0| 3.3 Coherence 38
C0gY 3.4 Interference between two Plane Waves 41
91#rP|88; 3.4.1 Laser Doppler Velocimetry (LDV) 45
6 h%,% 3.5 Interference between other Waves 46
VPr`[XPXb 3.6 Interferometry 49
FP<mFqy 3.6.1 Wavefront Division 50
p]eVby" 3.6.2 Amplitude Division 51
^wIg|Gc 3.6.3 The Dual-Frequency Michelson Interferometer 54
E[ttamU 3.6.4 Heterodyne (Homodyne) Detection 55
Gk']Ma2J} 3.7 Spatial and Temporal Coherence 56
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3.8 Optical Coherence Tomography 61
IZ_?1%q>} 4 Diffraction 67
&_$0lIDQ 4.1 Introduction 67
<MyT ; 4.2 Diffraction from a Single Slit 67
ZOBcV,K 4.3 Diffraction from a Grating 70
X> T_Xc 4.3.1 The Grating Equation. Amplitude Transmittance 70
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nv<t$r 4.4 Fourier Optics 75
3;JF5e\?x 4.5 Optical Filtering 76
9Ca }+ 4.5.1 Practical Filtering Set-Ups 78
Sq SiuO.D 4.6 Physical Optics Description
$@HW|Y of Image Formation 81
7n)ob![\d 4.6.1 The Coherent Transfer Function 83
nX_w F`n" 4.6.2 The Incoherent Transfer Function 85
YuUJgt .1 4.6.3 The Depth of Focus 88
&n'@L9v81 4.7 The Phase-Modulated Sinusoidal Grating 89
K!,9qH 5 Light Sources and Detectors 99
5gSe=|we*p 5.1 Introduction 99
@u@,Edh 5.2 Radiometry. Photometry 99
j#jwK(:] 5.2.1 Lambertian Surface 102
,MjlA{0 5.2.2 Blackbody Radiator 103
%i) 0sET 5.2.3 Examples 105
J9/EJ'My 5.3 Incoherent Light Sources 108
0|DyYu 5.4 Coherent Light Sources 109
jf.WmiDC 5.4.1 Stimulated Emission 109
dsn(h5,Q' 5.4.2 Gas Lasers 112
H0f] Swh0a 5.4.3 Liquid Lasers 114
=pBr_pGz= 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
q 2P_37 5.4.5 Solid-State Lasers 117
S6<#] 6Z 5.4.6 Other Lasers 119
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