Optical Metrology Third Edition B#SVN Lv 0Q_*Z ( Kjell J. G˚asvik
zN|k*}j1J Spectra Vision AS, Trondheim, Norway
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fAf Preface to the Third Edition xi
_J W|3 q 1Basics 1
I _u/ 1.1 Introduction 1
Y6 sX|~Zy 1.2 Wave Motion. The Electromagnetic Spectrum 1
#m{* ]mY@ 1.3 The Plane Wave. Light Rays 3
HRDpFMA/~ 1.4 Phase Difference 4
y3s+.5; 1.5 Complex Notation. Complex Amplitude 5
o1$u;}^ | 1.6 Oblique Incidence of A Plane Wave 5
S NH 3C1 1.7 The Spherical Wave 7
R5 4[U 1.8 The Intensity 8
vb6EO[e% I 1.9 Geometrical Optics 8
9 =;mY 1.10 The Simple Convex (Positive) Lens 10
~RuX2u-2&u 1.11 A Plane-Wave Set-Up 11
t n5 2 Gaussian Optics 15
cr P2jF! 2.1 Introduction 15
&R_7]f+%) 2.2 Refraction at a Spherical Surface 15
m3lz#Pm'0 2.2.1 Examples 19
7 D#y 2.3 The General Image-Forming System 19
!V37ePFje 2.4 The Image-Formation Process 21
?s^3 o{!<W 2.5 Reflection at a Spherical Surface 23
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8=b,EI 2.6 Aspheric Lenses 25
&S*~EM.l8 2.7 Stops and Apertures 26
Wx GD*% 2.8 Lens Aberrations. Computer Lens Design 28
hb5K"9Y 2.9 Imaging and The Lens Formula 29
D'#Q`H 2.10 Standard Optical Systems 30
#lLUBJ#: 2.10.1 Afocal Systems. The Telescope 30
g8%O^)d=> 2.10.2 The Simple Magnifier 32
\7/yWd{N$ 2.10.3 The Microscope 34
fq6%@M~ 3 Interference 37
[fa4 3.1 Introduction 37
Vi8A4 3.2 General Description 37
YNU}R/u6^ 3.3 Coherence 38
XZM3zl g* 3.4 Interference between two Plane Waves 41
YzI ;) 3.4.1 Laser Doppler Velocimetry (LDV) 45
`R[ZY!=+ 3.5 Interference between other Waves 46
U4pIRa )S 3.6 Interferometry 49
.z`70ot? 3.6.1 Wavefront Division 50
@%R<3!3v 3.6.2 Amplitude Division 51
A]/o-S_ 3.6.3 The Dual-Frequency Michelson Interferometer 54
- [V-f> : 3.6.4 Heterodyne (Homodyne) Detection 55
ump~)?_B 3.7 Spatial and Temporal Coherence 56
lrT2*$ w3 3.8 Optical Coherence Tomography 61
d]l8ei@>h 4 Diffraction 67
ZYwcB]xE z 4.1 Introduction 67
lS.Adl^k 4.2 Diffraction from a Single Slit 67
F3qK6Ah. 4.3 Diffraction from a Grating 70
)?*YrWO{ 4.3.1 The Grating Equation. Amplitude Transmittance 70
$E\|\g 4.3.2 The Spatial Frequency Spectrum 73
jV3PTU 4.4 Fourier Optics 75
%SM;B-/zHt 4.5 Optical Filtering 76
;!4gDvm 4.5.1 Practical Filtering Set-Ups 78
y p.K- 4.6 Physical Optics Description
BPba3G9H of Image Formation 81
)\fY1WD 4.6.1 The Coherent Transfer Function 83
&r5q,l&@n 4.6.2 The Incoherent Transfer Function 85
2d ! '9mA 4.6.3 The Depth of Focus 88
h4? x_"V" 4.7 The Phase-Modulated Sinusoidal Grating 89
#@S%?`4, 5 Light Sources and Detectors 99
86r5!@WN 5.1 Introduction 99
!Lf<hS^ 5.2 Radiometry. Photometry 99
x%G3 L\ 5 5.2.1 Lambertian Surface 102
B[t^u \Fk 5.2.2 Blackbody Radiator 103
%iN>4;T8 5.2.3 Examples 105
9)q3cjP{< 5.3 Incoherent Light Sources 108
SiratkP9n7 5.4 Coherent Light Sources 109
yw3"j dcl 5.4.1 Stimulated Emission 109
y/lF1{}5 5.4.2 Gas Lasers 112
,fVD`RR(W? 5.4.3 Liquid Lasers 114
11[lc2 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
:S + K\ 5.4.5 Solid-State Lasers 117
#< im? 5.4.6 Other Lasers 119
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