Optical Metrology Third Edition e `Tssa+ P>ZIP*
Gr Kjell J. G˚asvik
VY "i>Ae Spectra Vision AS, Trondheim, Norway
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RU,!F99' 1 t Cr? !Y~ Preface to the Third Edition xi
(?~*.g! 1Basics 1
G!w ?\- 1.1 Introduction 1
8\CmM\R 1.2 Wave Motion. The Electromagnetic Spectrum 1
"$|ne[b2 1.3 The Plane Wave. Light Rays 3
J.n-4J #@ 1.4 Phase Difference 4
r r(UE 1.5 Complex Notation. Complex Amplitude 5
]o*-|[^? 1.6 Oblique Incidence of A Plane Wave 5
?a` $Y>?h 1.7 The Spherical Wave 7
M}`G}* 1.8 The Intensity 8
_u8d`7$*% 1.9 Geometrical Optics 8
S{c;n*x f 1.10 The Simple Convex (Positive) Lens 10
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1.11 A Plane-Wave Set-Up 11
W> rx:O+ 2 Gaussian Optics 15
Vc| uQ8Mi 2.1 Introduction 15
`r. 2.2 Refraction at a Spherical Surface 15
L@8C t 2.2.1 Examples 19
|%5nV=&\ 2.3 The General Image-Forming System 19
:faB7wduW; 2.4 The Image-Formation Process 21
B I 0 A0 2.5 Reflection at a Spherical Surface 23
w"B M J+ 2.6 Aspheric Lenses 25
- x]gp5 2.7 Stops and Apertures 26
+ xRSd * 2.8 Lens Aberrations. Computer Lens Design 28
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x0b cv 2.9 Imaging and The Lens Formula 29
^ot9Q 2.10 Standard Optical Systems 30
?K^~(D8( 2.10.1 Afocal Systems. The Telescope 30
V tJy E} 2.10.2 The Simple Magnifier 32
F x' E"d 2.10.3 The Microscope 34
c Y[qX/0~ 3 Interference 37
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a `< 3.1 Introduction 37
K!_''Fg 3.2 General Description 37
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*p 7_rY 3.4 Interference between two Plane Waves 41
o:Q.XWa@MG 3.4.1 Laser Doppler Velocimetry (LDV) 45
>X-*Hu'U# 3.5 Interference between other Waves 46
- XARew 3.6 Interferometry 49
w T-@v,$ 3.6.1 Wavefront Division 50
=hB0p^a 3.6.2 Amplitude Division 51
n ^_B0Rkv 3.6.3 The Dual-Frequency Michelson Interferometer 54
dX5|A_Ex 3.6.4 Heterodyne (Homodyne) Detection 55
.3,6O o 3.7 Spatial and Temporal Coherence 56
/V )4 B4 3.8 Optical Coherence Tomography 61
!x1ivP 4 Diffraction 67
9 aZ^m$tAt 4.1 Introduction 67
+K03yp hZr 4.2 Diffraction from a Single Slit 67
g\foBK:GE 4.3 Diffraction from a Grating 70
T&~7*j(|e 4.3.1 The Grating Equation. Amplitude Transmittance 70
d3K-| 4.3.2 The Spatial Frequency Spectrum 73
Ve^rzGU 4.4 Fourier Optics 75
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4.5 Optical Filtering 76
;OfZEy>7 4.5.1 Practical Filtering Set-Ups 78
YR}By;Bq 4.6 Physical Optics Description
5RhP^:i@C of Image Formation 81
< .B^\X$ 4.6.1 The Coherent Transfer Function 83
YUsMq3^& 4.6.2 The Incoherent Transfer Function 85
7T}r]C. 4.6.3 The Depth of Focus 88
,?zOJ,wl 4.7 The Phase-Modulated Sinusoidal Grating 89
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vzQYI 5 Light Sources and Detectors 99
<< .%Gk 5.1 Introduction 99
[p[C45d=< 5.2 Radiometry. Photometry 99
/yS/*ET8 5.2.1 Lambertian Surface 102
a #4 'X* 5.2.2 Blackbody Radiator 103
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?^H1X-; 5.3 Incoherent Light Sources 108
'`fz|.|cbB 5.4 Coherent Light Sources 109
A%c)=(, 5.4.1 Stimulated Emission 109
^NPbD<~Lb 5.4.2 Gas Lasers 112
7 O.{g 5.4.3 Liquid Lasers 114
_F9O4Q4 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
"[BDa}Il 5.4.5 Solid-State Lasers 117
JOm6Zc 5.4.6 Other Lasers 119
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