Optical Metrology Third Edition 1y2D]h /' >8"oO[U5> Kjell J. G˚asvik
ra0:Lg' Spectra Vision AS, Trondheim, Norway
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ryB^$Kh,, o8-BTq8 Preface to the Third Edition xi
r/$+'~apTk 1Basics 1
9TIyY`2! 1.1 Introduction 1
@{iws@. 1.2 Wave Motion. The Electromagnetic Spectrum 1
wZJpSkcEx 1.3 The Plane Wave. Light Rays 3
9%S{fd\# 1.4 Phase Difference 4
>XcbNZV 1.5 Complex Notation. Complex Amplitude 5
*p`0dvXG2 1.6 Oblique Incidence of A Plane Wave 5
AjKP -[ 1.7 The Spherical Wave 7
HgvgO\`] 1.8 The Intensity 8
IL 'i7p 1.9 Geometrical Optics 8
Uq5wN05 1.10 The Simple Convex (Positive) Lens 10
`KqMcAW 1.11 A Plane-Wave Set-Up 11
^VK-[Sz& 2 Gaussian Optics 15
4v_?i@,L 2.1 Introduction 15
/;-KWu+5= 2.2 Refraction at a Spherical Surface 15
Y9Q-<~\z 2.2.1 Examples 19
nfJ|&'T 2.3 The General Image-Forming System 19
ZM K"3c9 2.4 The Image-Formation Process 21
([R}s/)$ 2.5 Reflection at a Spherical Surface 23
*;"N kCf 2.6 Aspheric Lenses 25
ZF"f.aV8) 2.7 Stops and Apertures 26
bW(+Aw=O 2.8 Lens Aberrations. Computer Lens Design 28
|R8=yO%( 2.9 Imaging and The Lens Formula 29
D9zw' RY 2.10 Standard Optical Systems 30
&$?e D{ 2.10.1 Afocal Systems. The Telescope 30
h!5^d!2, 2.10.2 The Simple Magnifier 32
:y==O4 2.10.3 The Microscope 34
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a 3 Interference 37
#4%4iR5% 3.1 Introduction 37
]W7(}~m 3.2 General Description 37
3UU]w`At 3.3 Coherence 38
I+Qv $#S/ 3.4 Interference between two Plane Waves 41
)z&0 g2Am 3.4.1 Laser Doppler Velocimetry (LDV) 45
+-&N<U 3.5 Interference between other Waves 46
c9-$td& 3.6 Interferometry 49
e4p:Zb: 3.6.1 Wavefront Division 50
)8kcOBG^L 3.6.2 Amplitude Division 51
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,Xs%Cg_Ig 3.6.4 Heterodyne (Homodyne) Detection 55
)f1<-a"D| 3.7 Spatial and Temporal Coherence 56
_QbLg"O 3.8 Optical Coherence Tomography 61
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M(WYL{ 4 Diffraction 67
.j:.?v 4.1 Introduction 67
8J{I6nPF 4.2 Diffraction from a Single Slit 67
iDt^4=` 4.3 Diffraction from a Grating 70
9r-]@6; 4.3.1 The Grating Equation. Amplitude Transmittance 70
j}uFp|df< 4.3.2 The Spatial Frequency Spectrum 73
W7>4-gk 4.4 Fourier Optics 75
Qj5~ lX`W 4.5 Optical Filtering 76
E{kh)- 4.5.1 Practical Filtering Set-Ups 78
iwWy]V m7 4.6 Physical Optics Description
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EB`& of Image Formation 81
EF=.L{ 4.6.1 The Coherent Transfer Function 83
^wPKqu)^ 4.6.2 The Incoherent Transfer Function 85
'\\dh 4.6.3 The Depth of Focus 88
RBIf6oxdE 4.7 The Phase-Modulated Sinusoidal Grating 89
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5 Light Sources and Detectors 99
Ug_5INK 5.1 Introduction 99
$C0NvJf 5.2 Radiometry. Photometry 99
, C2qP3yg 5.2.1 Lambertian Surface 102
6kuN) 5.2.2 Blackbody Radiator 103
*(YtO 5.2.3 Examples 105
I'2:>44>I6 5.3 Incoherent Light Sources 108
@/*{8UBP 5.4 Coherent Light Sources 109
6NH.!}"G9 5.4.1 Stimulated Emission 109
;"SnCBt:> 5.4.2 Gas Lasers 112
<8Ek-aNNt 5.4.3 Liquid Lasers 114
1{4d)z UB 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
_5%SYxF*y 5.4.5 Solid-State Lasers 117
cE>K:3n 5.4.6 Other Lasers 119
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