Optical Metrology Third Edition omisfu_~E 6q-X$ Kjell J. G˚asvik
C @3a/<6m Spectra Vision AS, Trondheim, Norway
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dT?/9JIv 7jPPN Preface to the Third Edition xi
)z zZYs&| 1Basics 1
>NwS0j$j@ 1.1 Introduction 1
!6{; z/Hy 1.2 Wave Motion. The Electromagnetic Spectrum 1
qS1byqq78l 1.3 The Plane Wave. Light Rays 3
! ~#zH0# 1.4 Phase Difference 4
(1Q G]1q 1.5 Complex Notation. Complex Amplitude 5
YflM*F` 1.6 Oblique Incidence of A Plane Wave 5
|h}/#qhR 1.7 The Spherical Wave 7
*m)+|v} 1.8 The Intensity 8
,/*L|M/&5 1.9 Geometrical Optics 8
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wl2P^Pj 1.11 A Plane-Wave Set-Up 11
!:"$1kh1(" 2 Gaussian Optics 15
G (joamfM 2.1 Introduction 15
36iDiT_ 2.2 Refraction at a Spherical Surface 15
<~s{&cL!%# 2.2.1 Examples 19
k;BXt:jDq 2.3 The General Image-Forming System 19
<vS3 [( 2.4 The Image-Formation Process 21
E "9` 2.5 Reflection at a Spherical Surface 23
Lmh4ezrdH 2.6 Aspheric Lenses 25
e x" E5 0 2.7 Stops and Apertures 26
$o}Ao@WkO 2.8 Lens Aberrations. Computer Lens Design 28
U aA1HZ1 2.9 Imaging and The Lens Formula 29
&/wd_;d^A 2.10 Standard Optical Systems 30
Lh`B5 2.10.1 Afocal Systems. The Telescope 30
`_ "F7Czn 2.10.2 The Simple Magnifier 32
55LW[Pc 2.10.3 The Microscope 34
XM?>#^nC?u 3 Interference 37
EGJ d:>k 3.1 Introduction 37
T'C ^,,if 3.2 General Description 37
tE=;V) %we 3.3 Coherence 38
e"g=A=S 3.4 Interference between two Plane Waves 41
P qU jBP\ 3.4.1 Laser Doppler Velocimetry (LDV) 45
%BBM%Lj 3.5 Interference between other Waves 46
0o-. m 3.6 Interferometry 49
K3g<NC 3.6.1 Wavefront Division 50
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}(MI}o} 3.6.3 The Dual-Frequency Michelson Interferometer 54
dbVMG-z8 3.6.4 Heterodyne (Homodyne) Detection 55
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3.7 Spatial and Temporal Coherence 56
V7~tIhuJH 3.8 Optical Coherence Tomography 61
IZ2(F,{o 4 Diffraction 67
kz3 0! L 4.1 Introduction 67
^\ "@r%| 4.2 Diffraction from a Single Slit 67
41^ =z[k 4.3 Diffraction from a Grating 70
z:gp\ 4.3.1 The Grating Equation. Amplitude Transmittance 70
FUTD/y]L u 4.3.2 The Spatial Frequency Spectrum 73
@*>kOZ (3 4.4 Fourier Optics 75
r. z= 4.5 Optical Filtering 76
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esh7*,7-z* 4.6 Physical Optics Description
9I1D'7wI^^ of Image Formation 81
&d,!^9 4.6.1 The Coherent Transfer Function 83
ue8"_N 4.6.2 The Incoherent Transfer Function 85
3:]c> GPQ 4.6.3 The Depth of Focus 88
_dQg5CmlG 4.7 The Phase-Modulated Sinusoidal Grating 89
xa"8"8 5 Light Sources and Detectors 99
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5.1 Introduction 99
H\vd0DD; 5.2 Radiometry. Photometry 99
lq'ML g 5.2.1 Lambertian Surface 102
f\+ E&p. 5.2.2 Blackbody Radiator 103
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u2 a#qU5* 5.3 Incoherent Light Sources 108
`>1XL 2 5.4 Coherent Light Sources 109
W[VbFsI&b 5.4.1 Stimulated Emission 109
6, ~Y(# 5.4.2 Gas Lasers 112
_-+x zdGvX 5.4.3 Liquid Lasers 114
n Y)H-u^ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
|$:y8H'J 5.4.5 Solid-State Lasers 117
4it^-M 5.4.6 Other Lasers 119
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