Optical Metrology Third Edition
B/G-Yh$E WF2NG;f= Kjell J. G˚asvik
} g|nz8 Spectra Vision AS, Trondheim, Norway
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5r b-U7 / |S&5es-yW Preface to the Third Edition xi
]N^*tO 1Basics 1
:P$#M C 1.1 Introduction 1
Dw_D+7>(v 1.2 Wave Motion. The Electromagnetic Spectrum 1
%T!J$a)qf 1.3 The Plane Wave. Light Rays 3
(&[[46 1.4 Phase Difference 4
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.$&Q[r3Lu 1.6 Oblique Incidence of A Plane Wave 5
pu+ ur=5& 1.7 The Spherical Wave 7
Ql %qQ ZV 1.8 The Intensity 8
#DFV=:|~ 1.9 Geometrical Optics 8
: =Kx/E:1 1.10 The Simple Convex (Positive) Lens 10
fuUm}N7 1.11 A Plane-Wave Set-Up 11
gd7^3q[$h 2 Gaussian Optics 15
@%hCAm 2.1 Introduction 15
JBC$Ku 2.2 Refraction at a Spherical Surface 15
-)jax 2.2.1 Examples 19
ff e1lw% 2.3 The General Image-Forming System 19
l>6@:nq|R 2.4 The Image-Formation Process 21
oH#v6{y 2.5 Reflection at a Spherical Surface 23
}tG3tz0%fX 2.6 Aspheric Lenses 25
-F\qnsZ2 2.7 Stops and Apertures 26
4-R ^/A0 2.8 Lens Aberrations. Computer Lens Design 28
^e Gue 2.9 Imaging and The Lens Formula 29
; @3FF 2.10 Standard Optical Systems 30
En6H%^d2 2.10.1 Afocal Systems. The Telescope 30
:7g=b%; 2.10.2 The Simple Magnifier 32
P[ r];e 2.10.3 The Microscope 34
2HD]?:Fk7 3 Interference 37
R@iUCT^$ 3.1 Introduction 37
pI.+"H z 3.2 General Description 37
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m ee$"Y 3.4 Interference between two Plane Waves 41
HYK!}& 3.4.1 Laser Doppler Velocimetry (LDV) 45
$t~@xCi]S 3.5 Interference between other Waves 46
| ?yo 3 3.6 Interferometry 49
3;[D J 5 3.6.1 Wavefront Division 50
l?8M
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6KZf%)$ 3.6.3 The Dual-Frequency Michelson Interferometer 54
/9pM>Cd*Z 3.6.4 Heterodyne (Homodyne) Detection 55
4|?{VQ 3.7 Spatial and Temporal Coherence 56
*sw7niw 3.8 Optical Coherence Tomography 61
_>m-AI4^ 4 Diffraction 67
23!;}zHp 4.1 Introduction 67
X2|Y 4.2 Diffraction from a Single Slit 67
nH|,T % 4.3 Diffraction from a Grating 70
D*PYr{z' 4.3.1 The Grating Equation. Amplitude Transmittance 70
qZv
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!7bw 5H 4.5 Optical Filtering 76
p d[ncL 4.5.1 Practical Filtering Set-Ups 78
V'Kgdj 4.6 Physical Optics Description
)D&M2CUw"f of Image Formation 81
V/d/L3p 4.6.1 The Coherent Transfer Function 83
@ f+8%I3D 4.6.2 The Incoherent Transfer Function 85
:O<bA& :d 4.6.3 The Depth of Focus 88
wC_l@7 t 4.7 The Phase-Modulated Sinusoidal Grating 89
nl aM 5 Light Sources and Detectors 99
H9)m^ * 5.1 Introduction 99
M:KbD| 5.2 Radiometry. Photometry 99
*l+OlQI0+ 5.2.1 Lambertian Surface 102
B+d<F[ | 5.2.2 Blackbody Radiator 103
*^\HU=& 5.2.3 Examples 105
*OJ/V O 5.3 Incoherent Light Sources 108
h%; e0Xz| 5.4 Coherent Light Sources 109
GN f 482 5.4.1 Stimulated Emission 109
l%ayI 5.4.2 Gas Lasers 112
eN? Y7 5.4.3 Liquid Lasers 114
K,' *Dz 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
&3F}6W6A 5.4.5 Solid-State Lasers 117
^9OUzTF 5.4.6 Other Lasers 119
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