Optical Metrology Third Edition MdE Z839J 8 +uOYNXsA Kjell J. G˚asvik
G H^i,88 Spectra Vision AS, Trondheim, Norway
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c%i/ '<Afr |!rD2T\Ef Preface to the Third Edition xi
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[ 1Basics 1
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1.1 Introduction 1
+2C:] 1.2 Wave Motion. The Electromagnetic Spectrum 1
"t4~xs`~X 1.3 The Plane Wave. Light Rays 3
=_L"x~0I- 1.4 Phase Difference 4
&\c$s 1.5 Complex Notation. Complex Amplitude 5
wm@1jLjrQ 1.6 Oblique Incidence of A Plane Wave 5
0)9GkHVu( 1.7 The Spherical Wave 7
&o:ZOD. 1.8 The Intensity 8
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; d 1.9 Geometrical Optics 8
{b]WLBy 1.10 The Simple Convex (Positive) Lens 10
DB%=/ \U 1.11 A Plane-Wave Set-Up 11
OL=IUg" 2 Gaussian Optics 15
(A R- 8 2.1 Introduction 15
S/7D}h J 2.2 Refraction at a Spherical Surface 15
.;*0odxv 2.2.1 Examples 19
vxbO>c 2.3 The General Image-Forming System 19
183'1Z$KA 2.4 The Image-Formation Process 21
N}.h_~6 2.5 Reflection at a Spherical Surface 23
WY<ip< 2.6 Aspheric Lenses 25
) `;?%N\ 2.7 Stops and Apertures 26
x ?Q;o+2v 2.8 Lens Aberrations. Computer Lens Design 28
gEPCXf 2.9 Imaging and The Lens Formula 29
5l{_E:.1 2.10 Standard Optical Systems 30
^ @ L 2.10.1 Afocal Systems. The Telescope 30
q Ybod+UX 2.10.2 The Simple Magnifier 32
.Jou09+ 2.10.3 The Microscope 34
CIYD'zR[2 3 Interference 37
-FE5sW 3.1 Introduction 37
Xo]FOJ 5 3.2 General Description 37
MZ% P(5 3.3 Coherence 38
uXK $5" 3.4 Interference between two Plane Waves 41
KOw Ew~ 3.4.1 Laser Doppler Velocimetry (LDV) 45
dd98v Vj 3.5 Interference between other Waves 46
E%/E%9-7\ 3.6 Interferometry 49
!f_Kq$.{ 3.6.1 Wavefront Division 50
PJkEBdM . 3.6.2 Amplitude Division 51
> `z^AB 3.6.3 The Dual-Frequency Michelson Interferometer 54
zb:p,T@5 3.6.4 Heterodyne (Homodyne) Detection 55
~EX/IIa { 3.7 Spatial and Temporal Coherence 56
]9b*!n<z 3.8 Optical Coherence Tomography 61
MPM_/dn- 4 Diffraction 67
}ZR3 4.1 Introduction 67
{?eD7xL:- 4.2 Diffraction from a Single Slit 67
N V*t 4.3 Diffraction from a Grating 70
#gi&pR'$ 4.3.1 The Grating Equation. Amplitude Transmittance 70
bYow EzieF 4.3.2 The Spatial Frequency Spectrum 73
t'R &$;z@b 4.4 Fourier Optics 75
`? `\!uP" 4.5 Optical Filtering 76
ii{5z;I]X 4.5.1 Practical Filtering Set-Ups 78
Eepy%-\ 4.6 Physical Optics Description
U_oMR$/Z of Image Formation 81
3%k@,Vvt 4.6.1 The Coherent Transfer Function 83
:c<C;. 4.6.2 The Incoherent Transfer Function 85
6VC w>x 4.6.3 The Depth of Focus 88
`[Z?&'CRQ 4.7 The Phase-Modulated Sinusoidal Grating 89
5b| _?Em7 5 Light Sources and Detectors 99
njvmf*A?S 5.1 Introduction 99
) ~ C)4 5.2 Radiometry. Photometry 99
8 I,(\<Xv 5.2.1 Lambertian Surface 102
9SMM%(3, r 5.2.2 Blackbody Radiator 103
?XW+&!ar 5.2.3 Examples 105
>W 8!YOc 5.3 Incoherent Light Sources 108
1xcx2L+R 5.4 Coherent Light Sources 109
# Wh"_zpM+ 5.4.1 Stimulated Emission 109
*i)GoQoB 5.4.2 Gas Lasers 112
Rp9uUJ 6o 5.4.3 Liquid Lasers 114
\XmtSfFC 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
vmW 4a3 5.4.5 Solid-State Lasers 117
$6ITa }o 5.4.6 Other Lasers 119
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