Optical Metrology Third Edition hjCFN1 #Sa GA&mM Kjell J. G˚asvik
>~O36q^w Spectra Vision AS, Trondheim, Norway
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a[TR_ uR |n9~2R Preface to the Third Edition xi
T3po.Km\{ 1Basics 1
QF^ _4Yn 1.1 Introduction 1
G 9?6qb: 1.2 Wave Motion. The Electromagnetic Spectrum 1
Be"Swz(n 1.3 The Plane Wave. Light Rays 3
cd8ZZ 8L 1.4 Phase Difference 4
JTT"t@__ 1.5 Complex Notation. Complex Amplitude 5
y!6+jrI 1.6 Oblique Incidence of A Plane Wave 5
|~'D8 g:Ak 1.7 The Spherical Wave 7
(hywT)#+ 1.8 The Intensity 8
p^^Ai 1.9 Geometrical Optics 8
s|3@\9\ 1.10 The Simple Convex (Positive) Lens 10
YG2rJY +* 1.11 A Plane-Wave Set-Up 11
7%rSo^t,L 2 Gaussian Optics 15
C+ {du^c$ 2.1 Introduction 15
jO'+r'2B9 2.2 Refraction at a Spherical Surface 15
r()%s3$q 2.2.1 Examples 19
e_C9VNP 2.3 The General Image-Forming System 19
U3SF'r8 2.4 The Image-Formation Process 21
J &,N1B 2.5 Reflection at a Spherical Surface 23
-VK 6Fq 2.6 Aspheric Lenses 25
iG<rB-" 2.7 Stops and Apertures 26
T';<;6 J** 2.8 Lens Aberrations. Computer Lens Design 28
s3m] rC 2.9 Imaging and The Lens Formula 29
sA18f2 2.10 Standard Optical Systems 30
.E !p 2.10.1 Afocal Systems. The Telescope 30
|& IS ZFSv 2.10.2 The Simple Magnifier 32
y w"Tw 2.10.3 The Microscope 34
n^QOGT.s6` 3 Interference 37
)tQG5.to 3.1 Introduction 37
7 mulNq 3.2 General Description 37
f'/@ h Na3 3.3 Coherence 38
DJl06-s V 3.4 Interference between two Plane Waves 41
a/@<KnT 3.4.1 Laser Doppler Velocimetry (LDV) 45
muLt/.EZ 3.5 Interference between other Waves 46
yQw j [ 3.6 Interferometry 49
XQEGMaZ 3.6.1 Wavefront Division 50
j7;v'eA`;7 3.6.2 Amplitude Division 51
\=+ s3p5N 3.6.3 The Dual-Frequency Michelson Interferometer 54
GD1=Fb"&) 3.6.4 Heterodyne (Homodyne) Detection 55
G?-27Jk8 3.7 Spatial and Temporal Coherence 56
?p{x t$<p 3.8 Optical Coherence Tomography 61
'[shY 4 Diffraction 67
#plwK-tPR 4.1 Introduction 67
5,:tjn 4.2 Diffraction from a Single Slit 67
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| 4.3.1 The Grating Equation. Amplitude Transmittance 70
ld1t1'I' 4.3.2 The Spatial Frequency Spectrum 73
cvn4Q- ^ 4.4 Fourier Optics 75
c mDskQ: 4.5 Optical Filtering 76
*[*E|by 4.5.1 Practical Filtering Set-Ups 78
hq9b 4.6 Physical Optics Description
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.@p of Image Formation 81
,x5`5mT3 4.6.1 The Coherent Transfer Function 83
{]ZZ] 4.6.2 The Incoherent Transfer Function 85
(_ov _3 4.6.3 The Depth of Focus 88
bw M>#@H 4.7 The Phase-Modulated Sinusoidal Grating 89
b5YjhRimS 5 Light Sources and Detectors 99
k4_Fn61J/ 5.1 Introduction 99
Auhw(b>}TW 5.2 Radiometry. Photometry 99
}~lF Rf 5.2.1 Lambertian Surface 102
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8WWRKP1V 5.2.3 Examples 105
z602(mxGg 5.3 Incoherent Light Sources 108
J'.:l} g!1 5.4 Coherent Light Sources 109
5EIhCbA 5.4.1 Stimulated Emission 109
p7(x k6W 5.4.2 Gas Lasers 112
]I" oS? 5.4.3 Liquid Lasers 114
cHK)e2 r 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
]?,47,[< 5.4.5 Solid-State Lasers 117
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