Optical Metrology Third Edition JOIbxU{U_ j@b4)t Kjell J. G˚asvik
ctL@&~*nY Spectra Vision AS, Trondheim, Norway
]l'W=_XDg 
}$ Am;%?p {>c O&eiCt Preface to the Third Edition xi
mS zBNvc i 1Basics 1
bG0t7~!{E 1.1 Introduction 1
_KkLH\1g$ 1.2 Wave Motion. The Electromagnetic Spectrum 1
+`x8[A)- 1.3 The Plane Wave. Light Rays 3
O9k9hRE]z 1.4 Phase Difference 4
98os4}r 1.5 Complex Notation. Complex Amplitude 5
r^k:$wJbRK 1.6 Oblique Incidence of A Plane Wave 5
~o+HAc `=v 1.7 The Spherical Wave 7
M"]~}* 1.8 The Intensity 8
>]k'3|vV 1.9 Geometrical Optics 8
'%`W y@ 1.10 The Simple Convex (Positive) Lens 10
!#n lWX :~ 1.11 A Plane-Wave Set-Up 11
:sBg+MS 2 Gaussian Optics 15
*Ki ],>_~ 2.1 Introduction 15
gHC -Y 0_ 2.2 Refraction at a Spherical Surface 15
gC#PqK~ 2.2.1 Examples 19
{7)D/WY5 2.3 The General Image-Forming System 19
u5 EHzoq 2.4 The Image-Formation Process 21
d\dt}&S 5 2.5 Reflection at a Spherical Surface 23
|w Z8O}O{E 2.6 Aspheric Lenses 25
0f
1Lu)
2 2.7 Stops and Apertures 26
lV-7bZ 2.8 Lens Aberrations. Computer Lens Design 28
(@dh"=Lt\ 2.9 Imaging and The Lens Formula 29
;jTP|q?|{ 2.10 Standard Optical Systems 30
% zs 1v] 2.10.1 Afocal Systems. The Telescope 30
S"UFT-N 2.10.2 The Simple Magnifier 32
V,($I'&/ 2.10.3 The Microscope 34
S ; x;FU 3 Interference 37
Mrp'wF
D 3.1 Introduction 37
6v0^'} 3.2 General Description 37
RV|: mI 3.3 Coherence 38
tZ[Y~] ,F 3.4 Interference between two Plane Waves 41
Gv}*T w $ 3.4.1 Laser Doppler Velocimetry (LDV) 45
A}sb 2P 3.5 Interference between other Waves 46
iZQwo3"8r 3.6 Interferometry 49
Te~"\`omJ3 3.6.1 Wavefront Division 50
{hX. R 3.6.2 Amplitude Division 51
0CxQ@~ttl 3.6.3 The Dual-Frequency Michelson Interferometer 54
Pn5@7~ 3.6.4 Heterodyne (Homodyne) Detection 55
c@:r\ ] 3.7 Spatial and Temporal Coherence 56
|$":7)e H! 3.8 Optical Coherence Tomography 61
Mu18s} 4 Diffraction 67
UcDJ%vI 4.1 Introduction 67
I;L $Nf{v 4.2 Diffraction from a Single Slit 67
5,'?NEyw 4.3 Diffraction from a Grating 70
:*e0Z2= 4.3.1 The Grating Equation. Amplitude Transmittance 70
2"NRnCx * 4.3.2 The Spatial Frequency Spectrum 73
.
x~tEe 4.4 Fourier Optics 75
s@f4f__(] 4.5 Optical Filtering 76
_$By c(.c 4.5.1 Practical Filtering Set-Ups 78
-@G |i$! 4.6 Physical Optics Description
_n2PoE:5@P of Image Formation 81
= O w}MX 4.6.1 The Coherent Transfer Function 83
yE-&TW_q:> 4.6.2 The Incoherent Transfer Function 85
V# |#%
8 4.6.3 The Depth of Focus 88
/g712\?M 4 4.7 The Phase-Modulated Sinusoidal Grating 89
'bk ecC 5 Light Sources and Detectors 99
,-t3gc1~X 5.1 Introduction 99
Y*O7lZuF% 5.2 Radiometry. Photometry 99
XZA3T Z 5.2.1 Lambertian Surface 102
t-lWvxXe 5.2.2 Blackbody Radiator 103
z?h\7
R 5.2.3 Examples 105
R5G~A{w0 5.3 Incoherent Light Sources 108
+M
(\R?@gr 5.4 Coherent Light Sources 109
Nc[>CgX"@ 5.4.1 Stimulated Emission 109
&Hc8u ,| 5.4.2 Gas Lasers 112
=V_ } z3b 5.4.3 Liquid Lasers 114
ji`N1e,l 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
,>2ijk# 5.4.5 Solid-State Lasers 117
A7
.[OC 5.4.6 Other Lasers 119
P@p(Y2&~g .
|t|+pBB .
)m"NO/sJ2 .
