Optical Metrology Third Edition |3ob1/)p0 xna4W|- Kjell J. G˚asvik
M .*3qWM Spectra Vision AS, Trondheim, Norway
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\x Preface to the Third Edition xi
zG"*B_l}+ 1Basics 1
)p?p39>h 1.1 Introduction 1
d q.'[ 1.2 Wave Motion. The Electromagnetic Spectrum 1
vC j, aSW 1.3 The Plane Wave. Light Rays 3
Z+3j>_Ss 1.4 Phase Difference 4
295U< 1.5 Complex Notation. Complex Amplitude 5
dE ,NG)MH 1.6 Oblique Incidence of A Plane Wave 5
#YEOY# 1.7 The Spherical Wave 7
Uu}a! V 1.8 The Intensity 8
cq?&edjP 1.9 Geometrical Optics 8
F4o)6+YM 1.10 The Simple Convex (Positive) Lens 10
aC2cyUuaN 1.11 A Plane-Wave Set-Up 11
e7# B? 2 Gaussian Optics 15
Ei $@)qS/ 2.1 Introduction 15
]&oQ6 2.2 Refraction at a Spherical Surface 15
+?&|p0 2.2.1 Examples 19
B '@a36 2.3 The General Image-Forming System 19
n91@{U)QJ3 2.4 The Image-Formation Process 21
#z. QBG@ 2.5 Reflection at a Spherical Surface 23
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Hea76P5$P+ 2.7 Stops and Apertures 26
B#Q=Fo 6 2.8 Lens Aberrations. Computer Lens Design 28
8dBG ZwyET 2.9 Imaging and The Lens Formula 29
r=S 6yq} 2.10 Standard Optical Systems 30
.#BWu(EYV 2.10.1 Afocal Systems. The Telescope 30
Pl9Ky(Q`V 2.10.2 The Simple Magnifier 32
FxK2 1 2.10.3 The Microscope 34
I"_``*/1 3 Interference 37
- C 3.1 Introduction 37
SniKC qmC] 3.2 General Description 37
>}?4; :.= 3.3 Coherence 38
KeIk9T13O 3.4 Interference between two Plane Waves 41
|o5F%1o 3.4.1 Laser Doppler Velocimetry (LDV) 45
XH"-sZt 3.5 Interference between other Waves 46
@a[Y[F S 3.6 Interferometry 49
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3.6.1 Wavefront Division 50
) "]N f6 3.6.2 Amplitude Division 51
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r6x"D3 3.6.4 Heterodyne (Homodyne) Detection 55
hU]Gv)B 3.7 Spatial and Temporal Coherence 56
mqIcc'6f 3.8 Optical Coherence Tomography 61
/&T"w,D 4 Diffraction 67
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Gl@ -R Lo 4.2 Diffraction from a Single Slit 67
/8s+eHn&% 4.3 Diffraction from a Grating 70
h^`!kp 4.3.1 The Grating Equation. Amplitude Transmittance 70
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PrZs@ Y 4.4 Fourier Optics 75
L'KgB=5K&i 4.5 Optical Filtering 76
;O Td< 4.5.1 Practical Filtering Set-Ups 78
?)2&LVrf 4.6 Physical Optics Description
=g hN)[AZV of Image Formation 81
lY,dyNFHV 4.6.1 The Coherent Transfer Function 83
H :x{qS4Si 4.6.2 The Incoherent Transfer Function 85
iuxS=3lT"K 4.6.3 The Depth of Focus 88
.dr-I7&! 4.7 The Phase-Modulated Sinusoidal Grating 89
<h vVh9 5 Light Sources and Detectors 99
iW\Q>~0#_ 5.1 Introduction 99
0IP5 &[-P 5.2 Radiometry. Photometry 99
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J s'#= 5.2.2 Blackbody Radiator 103
u*:;O\6l 5.2.3 Examples 105
{dk%j ~w8 5.3 Incoherent Light Sources 108
Px$4.b[{_Y 5.4 Coherent Light Sources 109
-9( 9LU2 5.4.1 Stimulated Emission 109
8rXQK|A 5.4.2 Gas Lasers 112
mh8{` W & 5.4.3 Liquid Lasers 114
P_:~!+W, 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
;<? mMi@<E 5.4.5 Solid-State Lasers 117
j1sZRl)D 5.4.6 Other Lasers 119
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