Optical Metrology Third Edition a M9v P&sWn?q Ol Kjell J. G˚asvik
~4khIz Spectra Vision AS, Trondheim, Norway
/i3JP}
lhHH|~t0 -Y@tx fu- Preface to the Third Edition xi
Rjq Xz6 1Basics 1
&y5"0mA 1.1 Introduction 1
RI@\cJ\} 1.2 Wave Motion. The Electromagnetic Spectrum 1
o>_})WM1[ 1.3 The Plane Wave. Light Rays 3
Sp492W+ 1.4 Phase Difference 4
ka~_iUU4 1.5 Complex Notation. Complex Amplitude 5
(B>/LsTu 1.6 Oblique Incidence of A Plane Wave 5
>*RU:X 1.7 The Spherical Wave 7
K_;vqi^1^& 1.8 The Intensity 8
S7)qq 1.9 Geometrical Optics 8
SK
lvZ
1.10 The Simple Convex (Positive) Lens 10
4d`YZNvZW/ 1.11 A Plane-Wave Set-Up 11
=}0Uw4ub(u 2 Gaussian Optics 15
iqvLu{ 2.1 Introduction 15
*[{j'7*cc 2.2 Refraction at a Spherical Surface 15
!gve]>M 2.2.1 Examples 19
}:m/@LKB 2.3 The General Image-Forming System 19
~f h 2.4 The Image-Formation Process 21
QkBw59L7 2.5 Reflection at a Spherical Surface 23
)GkJ%o#H2 2.6 Aspheric Lenses 25
zMR)w77 2.7 Stops and Apertures 26
>E>yA d 2.8 Lens Aberrations. Computer Lens Design 28
m,lZy#02s3 2.9 Imaging and The Lens Formula 29
>G:Q/3jh 2.10 Standard Optical Systems 30
G
IN|cv= 2.10.1 Afocal Systems. The Telescope 30
w}gmVJ#p 2.10.2 The Simple Magnifier 32
!l9{R8m>eJ 2.10.3 The Microscope 34
^ +SE_ -+] 3 Interference 37
Z^_qXerjP 3.1 Introduction 37
6;Z-Y>\c 3.2 General Description 37
BM<q;;pO 3.3 Coherence 38
V4+|D2 3.4 Interference between two Plane Waves 41
x~V[}4E%> 3.4.1 Laser Doppler Velocimetry (LDV) 45
cD0rU8x 3.5 Interference between other Waves 46
&eHRn_st5b 3.6 Interferometry 49
h^SWb91"G 3.6.1 Wavefront Division 50
5MVa;m 3.6.2 Amplitude Division 51
inWLIXC,
3.6.3 The Dual-Frequency Michelson Interferometer 54
t>[W]%op 3.6.4 Heterodyne (Homodyne) Detection 55
iApq!u, 3.7 Spatial and Temporal Coherence 56
m\56BP-AM 3.8 Optical Coherence Tomography 61
hq
3n&/ 4 Diffraction 67
@@AL@.* 4.1 Introduction 67
}|.<EkA 4.2 Diffraction from a Single Slit 67
~[HzGm% 4.3 Diffraction from a Grating 70
L[x`i'0B 4.3.1 The Grating Equation. Amplitude Transmittance 70
M7TLQqaF 4.3.2 The Spatial Frequency Spectrum 73
r{;NGQYs 4.4 Fourier Optics 75
P.y +jyu 4.5 Optical Filtering 76
ZwkUd-=0i 4.5.1 Practical Filtering Set-Ups 78
=rA?,74 4.6 Physical Optics Description
zMsup4cl of Image Formation 81
=Kd'(ct 4.6.1 The Coherent Transfer Function 83
:C:6bDQ 4.6.2 The Incoherent Transfer Function 85
dH y9
wU 4.6.3 The Depth of Focus 88
o;$xN3f, 4.7 The Phase-Modulated Sinusoidal Grating 89
iFd
!ED 5 Light Sources and Detectors 99
1&|]8=pG7 5.1 Introduction 99
UzxL" `^7 5.2 Radiometry. Photometry 99
{7o3wxsS 5.2.1 Lambertian Surface 102
UxGu1a 5.2.2 Blackbody Radiator 103
C[L 5H 5.2.3 Examples 105
[E1qv; 5.3 Incoherent Light Sources 108
ek][^^4o 5.4 Coherent Light Sources 109
YO$Ig:a# 5.4.1 Stimulated Emission 109
o{PG&
}K 5.4.2 Gas Lasers 112
i#'K7XM2 5.4.3 Liquid Lasers 114
L7$f01* 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
IL*B@E8 5.4.5 Solid-State Lasers 117
csy6_q( 5.4.6 Other Lasers 119
("8 Hku? .
@7Ec(]yp .
^Hx}.?1 .