Optical Metrology Third Edition UcZ20i nj0 #le1
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<w7 Kjell J. G˚asvik
S}@J4}*u[" Spectra Vision AS, Trondheim, Norway
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}XJA#@ 8 ` QbUQ6 Preface to the Third Edition xi
us/}_r74N* 1Basics 1
b 4 Y< 1.1 Introduction 1
` 7v"( 1.2 Wave Motion. The Electromagnetic Spectrum 1
?Xdb%. 1.3 The Plane Wave. Light Rays 3
(gdi 2 1.4 Phase Difference 4
_6y#?8RMB 1.5 Complex Notation. Complex Amplitude 5
8dgi"/[3 1.6 Oblique Incidence of A Plane Wave 5
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V[ 1.7 The Spherical Wave 7
]Alv5?E60 1.8 The Intensity 8
uq.!{3)8 1.9 Geometrical Optics 8
K{]9Yo 1.10 The Simple Convex (Positive) Lens 10
&7K 4 tL 1.11 A Plane-Wave Set-Up 11
Wu}84W"!.V 2 Gaussian Optics 15
0| a ,bwZ 2.1 Introduction 15
~Ox !7Lp 2.2 Refraction at a Spherical Surface 15
.paKV"LJ 2.2.1 Examples 19
F.]D\"0` 2.3 The General Image-Forming System 19
(hB+DPi 2.4 The Image-Formation Process 21
O,a1?_m8 2.5 Reflection at a Spherical Surface 23
`#/0q *$ 2.6 Aspheric Lenses 25
, QB]y|: 2.7 Stops and Apertures 26
$(3mpQAg 2.8 Lens Aberrations. Computer Lens Design 28
n<GTc{>Z 2.9 Imaging and The Lens Formula 29
<8 $fo 2.10 Standard Optical Systems 30
8)Z)pCN 2.10.1 Afocal Systems. The Telescope 30
&nKb<o 2.10.2 The Simple Magnifier 32
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2.10.3 The Microscope 34
JX .3b_O 3 Interference 37
G\X}gqe(OJ 3.1 Introduction 37
>cTS X 3.2 General Description 37
>/BMA;` 3.3 Coherence 38
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I&l0Fx 3.4 Interference between two Plane Waves 41
n+'gVEBA 3.4.1 Laser Doppler Velocimetry (LDV) 45
tL>c@w#P v 3.5 Interference between other Waves 46
"j 2th. 3.6 Interferometry 49
[3@Pu.-I+M 3.6.1 Wavefront Division 50
bgk+PQ#S- 3.6.2 Amplitude Division 51
;2k!KW@ 3.6.3 The Dual-Frequency Michelson Interferometer 54
_A>?@3La9 3.6.4 Heterodyne (Homodyne) Detection 55
s*g`| E{M 3.7 Spatial and Temporal Coherence 56
(C3:_cM 5 3.8 Optical Coherence Tomography 61
;4MC/Q / 4 Diffraction 67
M:PEY *4H 4.1 Introduction 67
Bu ]PNKIi 4.2 Diffraction from a Single Slit 67
prk@uYCa = 4.3 Diffraction from a Grating 70
^t 2b`n60 4.3.1 The Grating Equation. Amplitude Transmittance 70
F|wT']1Y 4.3.2 The Spatial Frequency Spectrum 73
qh]D=i 4.4 Fourier Optics 75
z^FJ 4.5 Optical Filtering 76
* ^+]`S 4.5.1 Practical Filtering Set-Ups 78
Pg''>6w> 4.6 Physical Optics Description
[C0"v OTUb of Image Formation 81
_spW~"|G 4.6.1 The Coherent Transfer Function 83
` P,-NVB 4.6.2 The Incoherent Transfer Function 85
3Fgl zJ 4.6.3 The Depth of Focus 88
kMz*10$gn 4.7 The Phase-Modulated Sinusoidal Grating 89
= $w QA 5 Light Sources and Detectors 99
Q?g#?z&Pu\ 5.1 Introduction 99
X$Y\/|!z 5.2 Radiometry. Photometry 99
Q"Pl)Q\ 5.2.1 Lambertian Surface 102
l^cz&k=+ 5.2.2 Blackbody Radiator 103
p=d,kY 5.2.3 Examples 105
59l9^<{A 5.3 Incoherent Light Sources 108
;"9$LHH* 5.4 Coherent Light Sources 109
.FdzEauVc 5.4.1 Stimulated Emission 109
VE $Kdo^ 5.4.2 Gas Lasers 112
B>kVJK`X 5.4.3 Liquid Lasers 114
f;`7}7C 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Fy# 7 <Hp 5.4.5 Solid-State Lasers 117
'}N4SrU$ 5.4.6 Other Lasers 119
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