Optical Metrology Third Edition DrO2 y ph-ATJ" Kjell J. G˚asvik
M-giR:, Spectra Vision AS, Trondheim, Norway
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TEaJG9RU>v IzpZwx^3'' Preface to the Third Edition xi
1+U 1Basics 1
/=gOa\k|p 1.1 Introduction 1
G 8V, 1.2 Wave Motion. The Electromagnetic Spectrum 1
oDU ;E 1.3 The Plane Wave. Light Rays 3
B}&x aY 1.4 Phase Difference 4
u6bXv( 1.5 Complex Notation. Complex Amplitude 5
!H}vu]R 1.6 Oblique Incidence of A Plane Wave 5
R@`y>X GNJ 1.7 The Spherical Wave 7
Q
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, 1.9 Geometrical Optics 8
3fh8$A 1.10 The Simple Convex (Positive) Lens 10
HdPo O; 1.11 A Plane-Wave Set-Up 11
N+ y&,N, 2 Gaussian Optics 15
m2v'WY5u 2.1 Introduction 15
`IY/9'vT 2.2 Refraction at a Spherical Surface 15
l!g]a2x* 2.2.1 Examples 19
1rDqa(7 2.3 The General Image-Forming System 19
g'|MA~4yB 2.4 The Image-Formation Process 21
*7wAkljP 2.5 Reflection at a Spherical Surface 23
>G~R,{6U 2.6 Aspheric Lenses 25
?A )hN8 2.7 Stops and Apertures 26
YR;^hs? 2.8 Lens Aberrations. Computer Lens Design 28
DmOyBtj 2.9 Imaging and The Lens Formula 29
6KOlY>m] 2.10 Standard Optical Systems 30
_z1(y}u} 2.10.1 Afocal Systems. The Telescope 30
Z%n(O(^L 2.10.2 The Simple Magnifier 32
&JtV'@>v 2.10.3 The Microscope 34
q| LDo~H 3 Interference 37
V@\%)J'g 3.1 Introduction 37
W[^qa5W<FB 3.2 General Description 37
}ga@ />Sl& 3.3 Coherence 38
Y]3>7 q% 3.4 Interference between two Plane Waves 41
m ]cHF.: 5 3.4.1 Laser Doppler Velocimetry (LDV) 45
4sP2 g& 3.5 Interference between other Waves 46
0s>/mh; 3.6 Interferometry 49
R%c SJ8O# 3.6.1 Wavefront Division 50
l}l Ii8 3.6.2 Amplitude Division 51
u3o#{~E/# 3.6.3 The Dual-Frequency Michelson Interferometer 54
NZ3/5%We/ 3.6.4 Heterodyne (Homodyne) Detection 55
$e /^u[~: 3.7 Spatial and Temporal Coherence 56
gL3"Gg3 3.8 Optical Coherence Tomography 61
'gt-s547 4 Diffraction 67
bcZf>:gVf 4.1 Introduction 67
Zw~+Pb 4.2 Diffraction from a Single Slit 67
zrU{@z$l 4.3 Diffraction from a Grating 70
B.L]Rk\4 4.3.1 The Grating Equation. Amplitude Transmittance 70
E=#0I]v[ 4.3.2 The Spatial Frequency Spectrum 73
O1`9Y}G(r 4.4 Fourier Optics 75
(k|_ J42[ 4.5 Optical Filtering 76
<En gi ! 4.5.1 Practical Filtering Set-Ups 78
UA yC.$! 4.6 Physical Optics Description
>(snII of Image Formation 81
&RTX6%'KY 4.6.1 The Coherent Transfer Function 83
=k oSUVO0 4.6.2 The Incoherent Transfer Function 85
v$ub~ Q6W 4.6.3 The Depth of Focus 88
;IpT} , 4.7 The Phase-Modulated Sinusoidal Grating 89
gy;+_'.j 5 Light Sources and Detectors 99
5P'p2x#U 5.1 Introduction 99
cDI [PJ9 5.2 Radiometry. Photometry 99
ru7RcYRq 5.2.1 Lambertian Surface 102
qBT. x,$ 5.2.2 Blackbody Radiator 103
y Z WoN& 5.2.3 Examples 105
f u9Cx 5.3 Incoherent Light Sources 108
MW+b;0U`# 5.4 Coherent Light Sources 109
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&N_K# 5.4.1 Stimulated Emission 109
''kS*3 5.4.2 Gas Lasers 112
A=j0On 5.4.3 Liquid Lasers 114
|qoKO:B4-[ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
"hQ_sgz[Z 5.4.5 Solid-State Lasers 117
;q1A*f\:# 5.4.6 Other Lasers 119
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