Optical Metrology Third Edition y (@j;Q3(r
mo+zq~,M Kjell J. G˚asvik
7iMBDkb7 Spectra Vision AS, Trondheim, Norway
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hE US&`K 4efIw<1_ Preface to the Third Edition xi
/e5' YV P 1Basics 1
}MQNzaXY^ 1.1 Introduction 1
(mbC! !> 1.2 Wave Motion. The Electromagnetic Spectrum 1
{ 9?++G"\ 1.3 The Plane Wave. Light Rays 3
KYa}k0tVAp 1.4 Phase Difference 4
qaJ$0,]H+ 1.5 Complex Notation. Complex Amplitude 5
riw0w 1.6 Oblique Incidence of A Plane Wave 5
.)=T1^[hI 1.7 The Spherical Wave 7
@uA=v />+ 1.8 The Intensity 8
c=d` DJ 1.9 Geometrical Optics 8
(zbV-4C 1.10 The Simple Convex (Positive) Lens 10
eb1WT K@ 1.11 A Plane-Wave Set-Up 11
X!H[/b:1O 2 Gaussian Optics 15
Q1f)u wh 2.1 Introduction 15
YX*NjXL 2.2 Refraction at a Spherical Surface 15
~EIK 2.2.1 Examples 19
wHx@&Tp 2.3 The General Image-Forming System 19
ox:m;-Ml?_ 2.4 The Image-Formation Process 21
]hE%Tk- 2.5 Reflection at a Spherical Surface 23
a(.q=W 2.6 Aspheric Lenses 25
HGycF|]2 2.7 Stops and Apertures 26
, e^&,5b 2.8 Lens Aberrations. Computer Lens Design 28
oF'_x,0 2.9 Imaging and The Lens Formula 29
<MK4# I1I 2.10 Standard Optical Systems 30
zXX =WH 2.10.1 Afocal Systems. The Telescope 30
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2.10.2 The Simple Magnifier 32
Z4ekBdmCL 2.10.3 The Microscope 34
!s^[|2D_U 3 Interference 37
[A jY ~ 3.1 Introduction 37
BjX*Gm6l 3.2 General Description 37
+ az=EF 3.3 Coherence 38
B`{7-Asc1 3.4 Interference between two Plane Waves 41
*2,tGZ 3.4.1 Laser Doppler Velocimetry (LDV) 45
s!73To}> 3.5 Interference between other Waves 46
,8. Fd|#L 3.6 Interferometry 49
g \.O5H9Od 3.6.1 Wavefront Division 50
]?p 9)d=%< 3.6.2 Amplitude Division 51
u uaoBf 3.6.3 The Dual-Frequency Michelson Interferometer 54
,I|3.4z 3.6.4 Heterodyne (Homodyne) Detection 55
]mzghH:E 3.7 Spatial and Temporal Coherence 56
wWYo\WH' 3.8 Optical Coherence Tomography 61
o?,c#g 4 Diffraction 67
(V(8E%<c 4.1 Introduction 67
\]Bwib%h 4.2 Diffraction from a Single Slit 67
" fXs! 4.3 Diffraction from a Grating 70
=w !>/#U 4.3.1 The Grating Equation. Amplitude Transmittance 70
eP(|]Rk 4.3.2 The Spatial Frequency Spectrum 73
"udA-;!@& 4.4 Fourier Optics 75
Dpb prT7_ 4.5 Optical Filtering 76
JnE\z*NB 4.5.1 Practical Filtering Set-Ups 78
"!S7D >2y# 4.6 Physical Optics Description
bU4l|i;j of Image Formation 81
x@*RF:\} 4.6.1 The Coherent Transfer Function 83
,7:? Du} 4.6.2 The Incoherent Transfer Function 85
!8Y $} 4.6.3 The Depth of Focus 88
0{^ 0>H0 4.7 The Phase-Modulated Sinusoidal Grating 89
#i;y[dQ 5 Light Sources and Detectors 99
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5.1 Introduction 99
99GK6}~TGm 5.2 Radiometry. Photometry 99
@| 2sF 5.2.1 Lambertian Surface 102
#1)#W6 h\ 5.2.2 Blackbody Radiator 103
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`RlMfd 5.3 Incoherent Light Sources 108
b3 NEYn 5.4 Coherent Light Sources 109
=D 3K})& 5.4.1 Stimulated Emission 109
r=gF&Og,? 5.4.2 Gas Lasers 112
d~abWBgC` 5.4.3 Liquid Lasers 114
4k_y;$4WN 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
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ooA%/ 5.4.6 Other Lasers 119
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