Optical Metrology Third Edition P(f0R 8BE *+#8mA( Kjell J. G˚asvik
<P=twT;P Spectra Vision AS, Trondheim, Norway
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B\o Mn ++^l]8 Preface to the Third Edition xi
(^Y~ / 1Basics 1
A|<j X} 1.1 Introduction 1
s* -n^o- 1.2 Wave Motion. The Electromagnetic Spectrum 1
G U( _ 1.3 The Plane Wave. Light Rays 3
uc) {+'[ 1.4 Phase Difference 4
@fl-3q 1.5 Complex Notation. Complex Amplitude 5
G6$kv2(k`@ 1.6 Oblique Incidence of A Plane Wave 5
*Qg _ F6y 1.7 The Spherical Wave 7
,Vt/(x- 1.8 The Intensity 8
Y!nJg1 1.9 Geometrical Optics 8
N/MUwx;P 1.10 The Simple Convex (Positive) Lens 10
u=`L ) 1.11 A Plane-Wave Set-Up 11
+lHjC$ 2 Gaussian Optics 15
6G[4rD& 2.1 Introduction 15
`)T13Xv 2.2 Refraction at a Spherical Surface 15
rus tMs2p 2.2.1 Examples 19
V3^&o e% 2.3 The General Image-Forming System 19
R}*_~7r 5 2.4 The Image-Formation Process 21
+JjW_Rl?=V 2.5 Reflection at a Spherical Surface 23
pHLB = r 2.6 Aspheric Lenses 25
lPw% ErG 2.7 Stops and Apertures 26
YS/Y d[ e 2.8 Lens Aberrations. Computer Lens Design 28
UG+d-&~Ll 2.9 Imaging and The Lens Formula 29
&m-PC(W+ 2.10 Standard Optical Systems 30
RO 4Z?tz 2.10.1 Afocal Systems. The Telescope 30
^")Q YE 2.10.2 The Simple Magnifier 32
l1BtI_7p 2.10.3 The Microscope 34
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3 Interference 37
~?d Nd 3.1 Introduction 37
,( EO'T[ 3.2 General Description 37
Rh_np 3.3 Coherence 38
<G|(|E1 3.4 Interference between two Plane Waves 41
t*Sa@$p 3.4.1 Laser Doppler Velocimetry (LDV) 45
S4 Y& 3.5 Interference between other Waves 46
Ya3C#= 3.6 Interferometry 49
:~Wrf8 UQ 3.6.1 Wavefront Division 50
K,+LG7ec 3.6.2 Amplitude Division 51
&$`P,i 1) 3.6.3 The Dual-Frequency Michelson Interferometer 54
}dgfqq 3.6.4 Heterodyne (Homodyne) Detection 55
3@dL /x4A 3.7 Spatial and Temporal Coherence 56
gG<~-8uQ 3.8 Optical Coherence Tomography 61
"s0)rqf< 4 Diffraction 67
p<2L.\6" 4.1 Introduction 67
itBwCIj G 4.2 Diffraction from a Single Slit 67
/Z'L^ L%R 4.3 Diffraction from a Grating 70
v+46 QK|I& 4.3.1 The Grating Equation. Amplitude Transmittance 70
;z}i-cNae 4.3.2 The Spatial Frequency Spectrum 73
JtYP E? 4.4 Fourier Optics 75
s4A43i'g!h 4.5 Optical Filtering 76
5m \<U` 4.5.1 Practical Filtering Set-Ups 78
{< )1q ; 4.6 Physical Optics Description
HN=V"a of Image Formation 81
,(d) Qg 4.6.1 The Coherent Transfer Function 83
[uC ]*G] 4.6.2 The Incoherent Transfer Function 85
&"f"; 4.6.3 The Depth of Focus 88
TC!Yb_H}gN 4.7 The Phase-Modulated Sinusoidal Grating 89
[^Os kJ4 5 Light Sources and Detectors 99
nAW:utTB 5.1 Introduction 99
?Y-%'J( 5.2 Radiometry. Photometry 99
EMwS1~3dD 5.2.1 Lambertian Surface 102
Cl; oi}L 5.2.2 Blackbody Radiator 103
g!@<n1 L 5.2.3 Examples 105
~.{/0T 5.3 Incoherent Light Sources 108
5na~@-9p 5.4 Coherent Light Sources 109
H?<N.Dq 5.4.1 Stimulated Emission 109
PRu 6xsyA 5.4.2 Gas Lasers 112
(eI5 _`'VC 5.4.3 Liquid Lasers 114
4|buk]9 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
tI tX y 5.4.5 Solid-State Lasers 117
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