Optical Metrology Third Edition ^!SwY_> qwo{34 Kjell J. G˚asvik
R#/0}+-M Spectra Vision AS, Trondheim, Norway
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S|_lb MZM D*8oFJub Preface to the Third Edition xi
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1Basics 1
pwV {@h! 1.1 Introduction 1
i.+ #a2 1.2 Wave Motion. The Electromagnetic Spectrum 1
T7*p! 0 1.3 The Plane Wave. Light Rays 3
Ft8ii|- 1.4 Phase Difference 4
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Cx;h= 1.5 Complex Notation. Complex Amplitude 5
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#Yp0, 1.6 Oblique Incidence of A Plane Wave 5
B|rf[E I> 1.7 The Spherical Wave 7
'z Qp64]F 1.8 The Intensity 8
a6g+"EcH#' 1.9 Geometrical Optics 8
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hC WK 1.10 The Simple Convex (Positive) Lens 10
u~27\oj, 1.11 A Plane-Wave Set-Up 11
$P Tl{ 2 Gaussian Optics 15
pbqJtBBDDS 2.1 Introduction 15
6Ou[t6 2.2 Refraction at a Spherical Surface 15
n Ayyjd3!S 2.2.1 Examples 19
+4K'KpFzZ 2.3 The General Image-Forming System 19
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TzsNhrU{ 2.5 Reflection at a Spherical Surface 23
xQ8?"K;iX 2.6 Aspheric Lenses 25
n^rzl6dy 2.7 Stops and Apertures 26
1!2,K ot 2.8 Lens Aberrations. Computer Lens Design 28
$9< P3J 1 2.9 Imaging and The Lens Formula 29
7XiR)jYo* 2.10 Standard Optical Systems 30
wU5= ' 2.10.1 Afocal Systems. The Telescope 30
u]t#V f-$u 2.10.2 The Simple Magnifier 32
YGkk"gFIA 2.10.3 The Microscope 34
,in"8aT}~ 3 Interference 37
m H&WoL<K 3.1 Introduction 37
-[>G@m:?e 3.2 General Description 37
S d]`) 3.3 Coherence 38
}I#,o!)Vd 3.4 Interference between two Plane Waves 41
v ce1'aW 3.4.1 Laser Doppler Velocimetry (LDV) 45
y3mJO[U0 a 3.5 Interference between other Waves 46
U9yR~pw 3.6 Interferometry 49
(k>I!Z/&2 3.6.1 Wavefront Division 50
fvw&y+|y! 3.6.2 Amplitude Division 51
|FZIUS{] 3.6.3 The Dual-Frequency Michelson Interferometer 54
'U4@Sax, 3.6.4 Heterodyne (Homodyne) Detection 55
l1}HJmom 3.7 Spatial and Temporal Coherence 56
sT F Ru 3.8 Optical Coherence Tomography 61
RhumNP <M 4 Diffraction 67
YN5p@b=FX 4.1 Introduction 67
Kv6#WN~ 4.2 Diffraction from a Single Slit 67
#W=H)6 4.3 Diffraction from a Grating 70
)R"deb=s 4.3.1 The Grating Equation. Amplitude Transmittance 70
`Z~\& r= 4.3.2 The Spatial Frequency Spectrum 73
O.wk*m!9 4.4 Fourier Optics 75
Dq~D4 | 4.5 Optical Filtering 76
t+ O7dZt%r 4.5.1 Practical Filtering Set-Ups 78
e{`DvfY21 4.6 Physical Optics Description
~er4w+" of Image Formation 81
T \$r| 4.6.1 The Coherent Transfer Function 83
kG]FB.@bG 4.6.2 The Incoherent Transfer Function 85
)\0LxsZ 4.6.3 The Depth of Focus 88
ewzZb*\ 4.7 The Phase-Modulated Sinusoidal Grating 89
\d"M& -O 5 Light Sources and Detectors 99
p +|(lrYC 5.1 Introduction 99
G bbD) 5.2 Radiometry. Photometry 99
UNd+MHE74I 5.2.1 Lambertian Surface 102
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\J3n[6; 5.2.3 Examples 105
zrCQEQq 5.3 Incoherent Light Sources 108
rQD7ZN _ R 5.4 Coherent Light Sources 109
:TN^}RML 5.4.1 Stimulated Emission 109
A+1>n^^_< 5.4.2 Gas Lasers 112
pbb6?R, 5.4.3 Liquid Lasers 114
A; #GU` 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
9 W@ Tf 5.4.5 Solid-State Lasers 117
X | X~| &j 5.4.6 Other Lasers 119
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