Optical Metrology Third Edition Bf7RW[ -v k}BNFv8 Kjell J. G˚asvik
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;~@2YPj q<7Nz]Td Preface to the Third Edition xi
!q/?t XM! 1Basics 1
Ii"cDH9 1.1 Introduction 1
#v`G4d 1.2 Wave Motion. The Electromagnetic Spectrum 1
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pp8P 1.3 The Plane Wave. Light Rays 3
=}V`O> 1.4 Phase Difference 4
?d_Cy\G 1.5 Complex Notation. Complex Amplitude 5
EatpORq 1.6 Oblique Incidence of A Plane Wave 5
YZoH{p9f 1.7 The Spherical Wave 7
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J2\CP 1.8 The Intensity 8
ypml22)kz 1.9 Geometrical Optics 8
]];7ozS)X 1.10 The Simple Convex (Positive) Lens 10
U%KoG-# 1.11 A Plane-Wave Set-Up 11
Z|j8:Ohz 2 Gaussian Optics 15
?G3OAx?< 2.1 Introduction 15
uxR_(~8 2.2 Refraction at a Spherical Surface 15
a|fyo#L 2.2.1 Examples 19
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&\~4,TN 2.3 The General Image-Forming System 19
rL%xl,cn< 2.4 The Image-Formation Process 21
]`|bf2*eA 2.5 Reflection at a Spherical Surface 23
x^SE>dy ?z 2.6 Aspheric Lenses 25
."h;H^5 2.7 Stops and Apertures 26
Tn-H8;Hg 2.8 Lens Aberrations. Computer Lens Design 28
gHm^@ 2.9 Imaging and The Lens Formula 29
#4|?;C)u\ 2.10 Standard Optical Systems 30
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f0[ 2.10.1 Afocal Systems. The Telescope 30
V^f'4*~' 2.10.2 The Simple Magnifier 32
H%/$Rqg 2.10.3 The Microscope 34
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Sb 3 Interference 37
FS20OD 3.1 Introduction 37
?49wq4L;a 3.2 General Description 37
- BocWq\ 3.3 Coherence 38
7#<|``]zNf 3.4 Interference between two Plane Waves 41
7gJ`G@y 3.4.1 Laser Doppler Velocimetry (LDV) 45
CE?R/uNo{ 3.5 Interference between other Waves 46
jsL'O;K/ 3.6 Interferometry 49
z~X] v["d 3.6.1 Wavefront Division 50
SR\#>Qwx_ 3.6.2 Amplitude Division 51
.Oim7JQ8 3.6.3 The Dual-Frequency Michelson Interferometer 54
nhy3E 3.6.4 Heterodyne (Homodyne) Detection 55
"7gHn0e> 3.7 Spatial and Temporal Coherence 56
gsAcn 3.8 Optical Coherence Tomography 61
LxG :?=O. 4 Diffraction 67
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4.1 Introduction 67
ebQYk$@ 4.2 Diffraction from a Single Slit 67
v[~ U*#i 4.3 Diffraction from a Grating 70
I]} MK? 4.3.1 The Grating Equation. Amplitude Transmittance 70
D@0eYX4s 4.3.2 The Spatial Frequency Spectrum 73
]zD/W%c 4.4 Fourier Optics 75
sSvQatwS 4.5 Optical Filtering 76
D@f%&|IZ 4.5.1 Practical Filtering Set-Ups 78
M.t5,NJ 4.6 Physical Optics Description
L1aN"KGMF of Image Formation 81
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m 4.6.1 The Coherent Transfer Function 83
T$'Ja'9Kj 4.6.2 The Incoherent Transfer Function 85
VGe/;&1h 4.6.3 The Depth of Focus 88
b@,w/Uw[* 4.7 The Phase-Modulated Sinusoidal Grating 89
z[7U>q[E 5 Light Sources and Detectors 99
(I\aGGW 5.1 Introduction 99
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OQj]`K 5.2 Radiometry. Photometry 99
BI}>"', 5.2.1 Lambertian Surface 102
ofN|%g / 5.2.2 Blackbody Radiator 103
6KV&E8Gn 5.2.3 Examples 105
?Bk"3{hl 5.3 Incoherent Light Sources 108
g\n@(T$) 5.4 Coherent Light Sources 109
fOrqY,P' 5.4.1 Stimulated Emission 109
@P)GDB7A 5.4.2 Gas Lasers 112
_hXadLt 5.4.3 Liquid Lasers 114
-BB 5bsjA 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
JP[BSmhAV 5.4.5 Solid-State Lasers 117
qA*QFQ'- 5.4.6 Other Lasers 119
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