Optical Metrology Third Edition j;vaNg|vQ {.)D)8`<d Kjell J. G˚asvik
~Q]M_,`M Spectra Vision AS, Trondheim, Norway
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sZ$ ~abX c9k,Dc Preface to the Third Edition xi
+t6m>IBu 1Basics 1
7dW&|U 1.1 Introduction 1
Y5pNKL 1.2 Wave Motion. The Electromagnetic Spectrum 1
t)+dW~g 1.3 The Plane Wave. Light Rays 3
hidweg*7 1.4 Phase Difference 4
j3F=P 1.5 Complex Notation. Complex Amplitude 5
o%7yhCY 1.6 Oblique Incidence of A Plane Wave 5
4h(Hy&1C 1.7 The Spherical Wave 7
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7x 1.8 The Intensity 8
9)X<}*(qo 1.9 Geometrical Optics 8
\rO>FE 1.10 The Simple Convex (Positive) Lens 10
2J <Z4Ap 1.11 A Plane-Wave Set-Up 11
mY9K)]8 2 Gaussian Optics 15
tx-bzLo\ 2.1 Introduction 15
+r"$?bw' 2.2 Refraction at a Spherical Surface 15
6dlPS{H#U 2.2.1 Examples 19
[V~bo/n 2.3 The General Image-Forming System 19
b@Cvs4 2.4 The Image-Formation Process 21
aP gG+tu 2.5 Reflection at a Spherical Surface 23
bp_@e0 2.6 Aspheric Lenses 25
sP!qv"u 2.7 Stops and Apertures 26
"yk%/:G+ 2.8 Lens Aberrations. Computer Lens Design 28
[?2mt`g 2.9 Imaging and The Lens Formula 29
aKO@_R,: 2.10 Standard Optical Systems 30
sP7 (1)\ 2.10.1 Afocal Systems. The Telescope 30
"f+2_8%s+ 2.10.2 The Simple Magnifier 32
{5`?0+ 2.10.3 The Microscope 34
'z:p8"h} 3 Interference 37
@TDcj~oR? 3.1 Introduction 37
=uTV\) 3.2 General Description 37
1C{n\_hR 3.3 Coherence 38
pj6Cvq4bD 3.4 Interference between two Plane Waves 41
NST6pu\,U 3.4.1 Laser Doppler Velocimetry (LDV) 45
?HTwTi5!) 3.5 Interference between other Waves 46
[x,&Gwa 3.6 Interferometry 49
v2Y=vr 3.6.1 Wavefront Division 50
4 vphLAm 3.6.2 Amplitude Division 51
dQb?Zi7g 3.6.3 The Dual-Frequency Michelson Interferometer 54
\8ZNXCP 3.6.4 Heterodyne (Homodyne) Detection 55
~sD'pS 3.7 Spatial and Temporal Coherence 56
AJmzg 3.8 Optical Coherence Tomography 61
:h@:F7N _ 4 Diffraction 67
3[4]G@ 4.1 Introduction 67
u a-p^X`w 4.2 Diffraction from a Single Slit 67
mLO6`]p{H 4.3 Diffraction from a Grating 70
I(SE)%!%S 4.3.1 The Grating Equation. Amplitude Transmittance 70
oxZ(qfjS 4.3.2 The Spatial Frequency Spectrum 73
WP9=@X Z 4.4 Fourier Optics 75
l(W3|W#P 4.5 Optical Filtering 76
Yaqim<j 4.5.1 Practical Filtering Set-Ups 78
Z)~2{) 4.6 Physical Optics Description
&[uGfm+@ of Image Formation 81
so*7LM?ib> 4.6.1 The Coherent Transfer Function 83
B=7L+6 4.6.2 The Incoherent Transfer Function 85
c-F&4V 4.6.3 The Depth of Focus 88
\kx9V|A' 4.7 The Phase-Modulated Sinusoidal Grating 89
F(9T;F 5 Light Sources and Detectors 99
+]X^bB[ 5.1 Introduction 99
_=b[b]Ec$s 5.2 Radiometry. Photometry 99
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BpRi N 5.2.1 Lambertian Surface 102
P%c<0y"O:> 5.2.2 Blackbody Radiator 103
sXTO`W/ 5.2.3 Examples 105
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\X 5.3 Incoherent Light Sources 108
jsj" W&J 5.4 Coherent Light Sources 109
&x3y.}1 5.4.1 Stimulated Emission 109
qM)^]2_- 5.4.2 Gas Lasers 112
c<=1,TB"-_ 5.4.3 Liquid Lasers 114
!TcjB;q' 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
=0Mmxd&o=M 5.4.5 Solid-State Lasers 117
?`xId;}J#7 5.4.6 Other Lasers 119
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