Optical Metrology Third Edition ,1"w2, = D2`tWRm0 Kjell J. G˚asvik
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!vU$^>zo~ ?d*0-mhQ, Preface to the Third Edition xi
xhAORhw# 1Basics 1
q][{? 1.1 Introduction 1
=|lKB; 1.2 Wave Motion. The Electromagnetic Spectrum 1
g.v)qB 1.3 The Plane Wave. Light Rays 3
Hz}6XS@ 1.4 Phase Difference 4
k\T,CZ< 1.5 Complex Notation. Complex Amplitude 5
P<+5So0 1.6 Oblique Incidence of A Plane Wave 5
*^XfEO 1.7 The Spherical Wave 7
8#OcrJzC 1.8 The Intensity 8
0W|}5(C 1.9 Geometrical Optics 8
L~yu 1.10 The Simple Convex (Positive) Lens 10
!$"DD[~\ 1.11 A Plane-Wave Set-Up 11
SCClD6k=V 2 Gaussian Optics 15
gWo `i 2.1 Introduction 15
W|K"0ab 2.2 Refraction at a Spherical Surface 15
h 7feZ_ 2.2.1 Examples 19
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qnF4 2.3 The General Image-Forming System 19
yv:8=.r}M 2.4 The Image-Formation Process 21
3@ a 2.5 Reflection at a Spherical Surface 23
LFsrqdzJ 2.6 Aspheric Lenses 25
=#N;ZG 2.7 Stops and Apertures 26
<_HK@E<_HO 2.8 Lens Aberrations. Computer Lens Design 28
\bze-|C 2.9 Imaging and The Lens Formula 29
CKShz]1 2.10 Standard Optical Systems 30
as1ZLfN. 2.10.1 Afocal Systems. The Telescope 30
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8Z TN 2.10.3 The Microscope 34
;\@co5.= 3 Interference 37
?UC3ES 3.1 Introduction 37
IL?mt2I Q> 3.2 General Description 37
M+<xX) 3.3 Coherence 38
X|'E yZ 3.4 Interference between two Plane Waves 41
,6,sz]3- 3.4.1 Laser Doppler Velocimetry (LDV) 45
Y}_J@&: 3.5 Interference between other Waves 46
C WJGr:}& 3.6 Interferometry 49
j rX.e 3.6.1 Wavefront Division 50
BlF]-dF\ 3.6.2 Amplitude Division 51
[|gh q 3.6.3 The Dual-Frequency Michelson Interferometer 54
{{b&l! 3.6.4 Heterodyne (Homodyne) Detection 55
L-}>;M$Y) 3.7 Spatial and Temporal Coherence 56
2s{PE 3.8 Optical Coherence Tomography 61
nezdk=8J/ 4 Diffraction 67
G.2ij%Zz 4.1 Introduction 67
Tu Q@b 4.2 Diffraction from a Single Slit 67
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$d1+ d;Mn 4.3.2 The Spatial Frequency Spectrum 73
- aCtk$3 4.4 Fourier Optics 75
2Y~6~*8*~ 4.5 Optical Filtering 76
h_K(8{1 4.5.1 Practical Filtering Set-Ups 78
6fvzTd}, 4.6 Physical Optics Description
J: of Image Formation 81
Mp:/[%9Fi 4.6.1 The Coherent Transfer Function 83
SG1o<#> 4.6.2 The Incoherent Transfer Function 85
R u^v!l`!7 4.6.3 The Depth of Focus 88
[AzQP!gi 4.7 The Phase-Modulated Sinusoidal Grating 89
__p\`3(,' 5 Light Sources and Detectors 99
]C|Zs=5 5.1 Introduction 99
uJz<:/rwZ- 5.2 Radiometry. Photometry 99
N zY}-:{ 5.2.1 Lambertian Surface 102
c}iVBN6~.< 5.2.2 Blackbody Radiator 103
2Yd0:$a 5.2.3 Examples 105
% AqUVt9} 5.3 Incoherent Light Sources 108
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5.4 Coherent Light Sources 109
lv_|ws 5.4.1 Stimulated Emission 109
Vv=/{31 5.4.2 Gas Lasers 112
d,}fp) 5.4.3 Liquid Lasers 114
B4^+&B# 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
0be1aY;m& 5.4.5 Solid-State Lasers 117
)clSW 5.4.6 Other Lasers 119
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