Optical Metrology Third Edition Gf9O\wrs ="Azg8W Kjell J. G˚asvik
Z *v`kl Spectra Vision AS, Trondheim, Norway
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9\kEyb$F= _(8N*q*w Preface to the Third Edition xi
yLl:G; 1Basics 1
X76rme 1.1 Introduction 1
%j{*`} 1.2 Wave Motion. The Electromagnetic Spectrum 1
* <?KOM 1.3 The Plane Wave. Light Rays 3
ST4[d'|j 1.4 Phase Difference 4
R+/kx#^ 1.5 Complex Notation. Complex Amplitude 5
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1.6 Oblique Incidence of A Plane Wave 5
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n*A-j< 1.7 The Spherical Wave 7
_=cuOo"! 1.8 The Intensity 8
PfhKomt" 1.9 Geometrical Optics 8
ofgNL .u 1.10 The Simple Convex (Positive) Lens 10
r CUs 1.11 A Plane-Wave Set-Up 11
d4A:XNKB 2 Gaussian Optics 15
b'ir$RL] c 2.1 Introduction 15
$`lGPi(Jc 2.2 Refraction at a Spherical Surface 15
wARd^Iw 2.2.1 Examples 19
d*@K5?O. 2.3 The General Image-Forming System 19
3q6FV7Fv&b 2.4 The Image-Formation Process 21
<u?\%iJ" 2.5 Reflection at a Spherical Surface 23
i.FdZN{ 2.6 Aspheric Lenses 25
v`@N R06 2.7 Stops and Apertures 26
GNW.n(a 2.8 Lens Aberrations. Computer Lens Design 28
%xp 69 2.9 Imaging and The Lens Formula 29
F&lSRL+v 2.10 Standard Optical Systems 30
|f$gQI!XW 2.10.1 Afocal Systems. The Telescope 30
\vpX6!T 2.10.2 The Simple Magnifier 32
y7'9KQ 2.10.3 The Microscope 34
eF4f7>5Cv 3 Interference 37
N,F[x0&? 3.1 Introduction 37
3S%/>)k 3.2 General Description 37
SR<W3a\ 3.3 Coherence 38
i|S/g.r 3.4 Interference between two Plane Waves 41
F9r|EU#; 3.4.1 Laser Doppler Velocimetry (LDV) 45
uw@-.N^ 3.5 Interference between other Waves 46
P#rS.CIh 3.6 Interferometry 49
PMQlJ& 3.6.1 Wavefront Division 50
uOh 3.6.2 Amplitude Division 51
o,$K=#Iv 3.6.3 The Dual-Frequency Michelson Interferometer 54
)t2 eg1a: 3.6.4 Heterodyne (Homodyne) Detection 55
h66mzV:` 3.7 Spatial and Temporal Coherence 56
>3I|5kZ6 3.8 Optical Coherence Tomography 61
i\#?M " 4 Diffraction 67
~;t/VsgGW 4.1 Introduction 67
vSCJ xSt#e 4.2 Diffraction from a Single Slit 67
f'Oj01[ 4.3 Diffraction from a Grating 70
)vY )Mg 4.3.1 The Grating Equation. Amplitude Transmittance 70
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{CX06BP 4.4 Fourier Optics 75
\J-D@b; 4.5 Optical Filtering 76
_Y)Wi[ 4.5.1 Practical Filtering Set-Ups 78
bH%d* 4.6 Physical Optics Description
E0u&hBd3_ of Image Formation 81
I(z16wQ 4.6.1 The Coherent Transfer Function 83
#f_. 4.6.2 The Incoherent Transfer Function 85
3A.lS+P1 4.6.3 The Depth of Focus 88
\9}DAM_ 4.7 The Phase-Modulated Sinusoidal Grating 89
[&lH[:Y# 5 Light Sources and Detectors 99
"}S6a?]V 5.1 Introduction 99
&&zsUAkS 5.2 Radiometry. Photometry 99
j&q%@%Gm 5.2.1 Lambertian Surface 102
RQ 8;_)% 5.2.2 Blackbody Radiator 103
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e^N}(Kpy 5.3 Incoherent Light Sources 108
y<l(F?_ 5.4 Coherent Light Sources 109
]UGk"s5A 5.4.1 Stimulated Emission 109
N).'> 5.4.2 Gas Lasers 112
w=5<mw 5.4.3 Liquid Lasers 114
l4U 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
E=]|v+#~ 5.4.5 Solid-State Lasers 117
%{?9#)) 5.4.6 Other Lasers 119
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