Optical Metrology Third Edition $N4i)>&T2 af=lzKt* Kjell J. G˚asvik
ii ^Nxnc= Spectra Vision AS, Trondheim, Norway
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3nx*M= ~W_ T3@ Preface to the Third Edition xi
rxeOT# N} 1Basics 1
d. y-R#F_] 1.1 Introduction 1
Yc M 0A~< 1.2 Wave Motion. The Electromagnetic Spectrum 1
~mT( [ V 1.3 The Plane Wave. Light Rays 3
]!WD">d: 1.4 Phase Difference 4
i MF-TR 1.5 Complex Notation. Complex Amplitude 5
v2vtkYQN 1.6 Oblique Incidence of A Plane Wave 5
/)V8X# , 1.7 The Spherical Wave 7
8 HD I] 1.8 The Intensity 8
i(S}gH4*o 1.9 Geometrical Optics 8
zoau5t 1.10 The Simple Convex (Positive) Lens 10
( usPAslr 1.11 A Plane-Wave Set-Up 11
9y;zk$ O8 2 Gaussian Optics 15
>oyZD^gj 2.1 Introduction 15
@KU^B_{i 2.2 Refraction at a Spherical Surface 15
fczH^+mI 2.2.1 Examples 19
s<8|_Dt 2.3 The General Image-Forming System 19
gV-A+;u 2.4 The Image-Formation Process 21
{fn1sGA 2.5 Reflection at a Spherical Surface 23
C=DC g 2.6 Aspheric Lenses 25
mzn#4;m$ 2.7 Stops and Apertures 26
2J t *s$ 2.8 Lens Aberrations. Computer Lens Design 28
AN+S6 t 2.9 Imaging and The Lens Formula 29
vgKdhN2kI 2.10 Standard Optical Systems 30
Yo,n#<3 7 2.10.1 Afocal Systems. The Telescope 30
I= 7 YAm[W 2.10.2 The Simple Magnifier 32
}J_#N.y 2.10.3 The Microscope 34
=u. hHkx 3 Interference 37
"lKR~Qi 3.1 Introduction 37
[9~6, ;6 3.2 General Description 37
=la~D]T*g 3.3 Coherence 38
1*OZu.NdK 3.4 Interference between two Plane Waves 41
^x}k1F3 3.4.1 Laser Doppler Velocimetry (LDV) 45
4R9y~~+ 3.5 Interference between other Waves 46
77 %I%<# 3.6 Interferometry 49
:Mq{ES% 3.6.1 Wavefront Division 50
{\n?IGP?wd 3.6.2 Amplitude Division 51
\!4_ m8? 3.6.3 The Dual-Frequency Michelson Interferometer 54
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}%S#d&wh$_ 3.7 Spatial and Temporal Coherence 56
)8V=!73 3.8 Optical Coherence Tomography 61
ev z@c)8 4 Diffraction 67
4u7^v1/ 4.1 Introduction 67
]=(P tzVa 4.2 Diffraction from a Single Slit 67
b4>1UZGW- 4.3 Diffraction from a Grating 70
4X$| jGQ\ 4.3.1 The Grating Equation. Amplitude Transmittance 70
\mNN ) K@ 4.3.2 The Spatial Frequency Spectrum 73
1"RC! 4.4 Fourier Optics 75
n?8xRaEf 4.5 Optical Filtering 76
Z<[: v2 4.5.1 Practical Filtering Set-Ups 78
X 3(*bj>P 4.6 Physical Optics Description
azl!#% of Image Formation 81
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X=%e'P*X 4.6.2 The Incoherent Transfer Function 85
mh,a} bX{ 4.6.3 The Depth of Focus 88
x\K,@ 4.7 The Phase-Modulated Sinusoidal Grating 89
!5 >PZ{J 5 Light Sources and Detectors 99
f_ | =EQ 5.1 Introduction 99
6~a 4-5;>z 5.2 Radiometry. Photometry 99
$)VnHr `hy 5.2.1 Lambertian Surface 102
HEe_K!_ 5.2.2 Blackbody Radiator 103
Eb9n6Fg 5.2.3 Examples 105
=v=u+n O 5.3 Incoherent Light Sources 108
|L(h+/>aWX 5.4 Coherent Light Sources 109
sQLjb8!7 5.4.1 Stimulated Emission 109
sQMfU{S / 5.4.2 Gas Lasers 112
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G=32B 5.4.3 Liquid Lasers 114
!qug^ F 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
M^.>UZKyl 5.4.5 Solid-State Lasers 117
.:B ;%* 5.4.6 Other Lasers 119
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