Optical Metrology Third Edition _%; $y5]v &voyEvX/S Kjell J. G˚asvik
Cz+>S3v M Spectra Vision AS, Trondheim, Norway
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G TNN4 $dgY#ST% Preface to the Third Edition xi
H{ E223 1Basics 1
Qy *`s 1.1 Introduction 1
&$qqF& 1.2 Wave Motion. The Electromagnetic Spectrum 1
*rK}Ai 1.3 The Plane Wave. Light Rays 3
UOZ"#cQ 1.4 Phase Difference 4
GG5wiN*2S 1.5 Complex Notation. Complex Amplitude 5
!B P/# 1.6 Oblique Incidence of A Plane Wave 5
8U*}D~%! 1.7 The Spherical Wave 7
votv rZ= 1.8 The Intensity 8
7d]}BLpjWz 1.9 Geometrical Optics 8
4W*52*'F, 1.10 The Simple Convex (Positive) Lens 10
C3u/8Mrt7 1.11 A Plane-Wave Set-Up 11
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bf@|] 2 Gaussian Optics 15
#O/ihRoaO 2.1 Introduction 15
D?)9 1 P/R 2.2 Refraction at a Spherical Surface 15
x D,BlDV 2.2.1 Examples 19
"e0$/WQ6J 2.3 The General Image-Forming System 19
[: 2.4 The Image-Formation Process 21
>93vMk~hU 2.5 Reflection at a Spherical Surface 23
e]'ui<` 2.6 Aspheric Lenses 25
:,Q\!s! 2.7 Stops and Apertures 26
cclx$)X1X 2.8 Lens Aberrations. Computer Lens Design 28
?V4?r2$c 2.9 Imaging and The Lens Formula 29
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5(^&0c>P 2.10.1 Afocal Systems. The Telescope 30
UIi;&[ 2.10.2 The Simple Magnifier 32
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)/1AF^ E 3 Interference 37
Ya<S/9c 3.1 Introduction 37
JQj?+PI 3.2 General Description 37
|77.Lqqy, 3.3 Coherence 38
NGOc:>}k> 3.4 Interference between two Plane Waves 41
|,c QJ 3.4.1 Laser Doppler Velocimetry (LDV) 45
P
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2w>WS# 3.6 Interferometry 49
0/S|h"-L 3.6.1 Wavefront Division 50
~,WG284 3.6.2 Amplitude Division 51
epI&R) ] 3.6.3 The Dual-Frequency Michelson Interferometer 54
rG|lRT3-K 3.6.4 Heterodyne (Homodyne) Detection 55
)y4bb^; z 3.7 Spatial and Temporal Coherence 56
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$A]2Iw!& 4 Diffraction 67
0+L:+S 4.1 Introduction 67
{4J:t_<nKO 4.2 Diffraction from a Single Slit 67
1O] 'iS" 4.3 Diffraction from a Grating 70
Yj3j?.JJk 4.3.1 The Grating Equation. Amplitude Transmittance 70
F6 ?4&h?n 4.3.2 The Spatial Frequency Spectrum 73
-c|dTZ8D)8 4.4 Fourier Optics 75
xl8=y 4.5 Optical Filtering 76
M3P\1 4.5.1 Practical Filtering Set-Ups 78
: 8dQ8p; 4.6 Physical Optics Description
]CHO5' %,$ of Image Formation 81
}N[|2n R' 4.6.1 The Coherent Transfer Function 83
W^# HR 4.6.2 The Incoherent Transfer Function 85
FcVQ_6 4.6.3 The Depth of Focus 88
E[q:65xl 4.7 The Phase-Modulated Sinusoidal Grating 89
HHVCw7r0 5 Light Sources and Detectors 99
$/*1 9 e~ 5.1 Introduction 99
KmS$CFsGL 5.2 Radiometry. Photometry 99
8_ byS<b8 5.2.1 Lambertian Surface 102
.TZ 0F xW 5.2.2 Blackbody Radiator 103
_=0%3Sh 5.2.3 Examples 105
NZT2ni4 5.3 Incoherent Light Sources 108
#J=^CE 5.4 Coherent Light Sources 109
eb1WT K@ 5.4.1 Stimulated Emission 109
QA|87alh 5.4.2 Gas Lasers 112
p G|-<6WY 5.4.3 Liquid Lasers 114
|Y |6`9; 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
j IO2uTM~ 5.4.5 Solid-State Lasers 117
5SV w71 * 5.4.6 Other Lasers 119
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