Optical Metrology Third Edition o#D;H[' A !i ys\ AV Kjell J. G˚asvik
<WH u</ Spectra Vision AS, Trondheim, Norway
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lBpy0lo# TbUou oc Preface to the Third Edition xi
Q1 b<=, 1Basics 1
QGR}`n2D 1.1 Introduction 1
ag_RKlM3 1.2 Wave Motion. The Electromagnetic Spectrum 1
t-gLh(-. 1.3 The Plane Wave. Light Rays 3
69 > - 1.4 Phase Difference 4
;ewqGDe'3 1.5 Complex Notation. Complex Amplitude 5
fLt N-w6t 1.6 Oblique Incidence of A Plane Wave 5
nQ tp 4 1.7 The Spherical Wave 7
tFi'R R Z 1.8 The Intensity 8
>-%}'iz+ 1.9 Geometrical Optics 8
+E7Os|m 1.10 The Simple Convex (Positive) Lens 10
@(m+B\ 1.11 A Plane-Wave Set-Up 11
mm l`,t8 2 Gaussian Optics 15
U diogXZ 2.1 Introduction 15
4 k NiS^h 2.2 Refraction at a Spherical Surface 15
$o uw *|< 2.2.1 Examples 19
InAx;2'A: 2.3 The General Image-Forming System 19
_s 1pif 2.4 The Image-Formation Process 21
Un~8N 2.5 Reflection at a Spherical Surface 23
t1Zc r#b> 2.6 Aspheric Lenses 25
1GaM!OC 9 2.7 Stops and Apertures 26
Mur)' 2.8 Lens Aberrations. Computer Lens Design 28
N4xC Zb 2.9 Imaging and The Lens Formula 29
6dN W2_ 2.10 Standard Optical Systems 30
h:4U v}Z 2.10.1 Afocal Systems. The Telescope 30
9sgyg3fv>5 2.10.2 The Simple Magnifier 32
M3 TsalF 2.10.3 The Microscope 34
a7? )x])e 3 Interference 37
[J{M'+a 3.1 Introduction 37
Q| 6lp 3.2 General Description 37
PX} ~ 3.3 Coherence 38
S.I3m- 3.4 Interference between two Plane Waves 41
-PG81F&K 3.4.1 Laser Doppler Velocimetry (LDV) 45
vOIzfwYG9 3.5 Interference between other Waves 46
|*T`3@R;3 3.6 Interferometry 49
F%]Z yO9 3.6.1 Wavefront Division 50
#B^A"?*S 3.6.2 Amplitude Division 51
YcmLc)a7 3.6.3 The Dual-Frequency Michelson Interferometer 54
,\Q^[e!m~ 3.6.4 Heterodyne (Homodyne) Detection 55
q;)+O#CR 3.7 Spatial and Temporal Coherence 56
TdCC,/c 3 3.8 Optical Coherence Tomography 61
_=\J :r|Y: 4 Diffraction 67
L,+m5wKj[ 4.1 Introduction 67
g0Ff$-#7 4.2 Diffraction from a Single Slit 67
Fcz}Gs4 4.3 Diffraction from a Grating 70
$!ATj`}kb 4.3.1 The Grating Equation. Amplitude Transmittance 70
. XVW2ISv 4.3.2 The Spatial Frequency Spectrum 73
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9* <=K 4.5.1 Practical Filtering Set-Ups 78
+W7#G `> 4.6 Physical Optics Description
8k0f&Cak= of Image Formation 81
D^30R*gV 4.6.1 The Coherent Transfer Function 83
y"L 7.B 4.6.2 The Incoherent Transfer Function 85
o?O> pK 4.6.3 The Depth of Focus 88
WSKub n?7B 4.7 The Phase-Modulated Sinusoidal Grating 89
(>R 5 Light Sources and Detectors 99
B*3<(eI 5.1 Introduction 99
qj #C8Tc7 5.2 Radiometry. Photometry 99
i[#XYX'\ 5.2.1 Lambertian Surface 102
;S5J"1)O~ 5.2.2 Blackbody Radiator 103
XZ&cTjNB& 5.2.3 Examples 105
"8#EA<lsS 5.3 Incoherent Light Sources 108
Ifu[L&U 5.4 Coherent Light Sources 109
DmA~Vj!a^y 5.4.1 Stimulated Emission 109
T1\@4x 5.4.2 Gas Lasers 112
~85>.o2RDW 5.4.3 Liquid Lasers 114
w~%Rxdh?8W 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
Ds<~Jf Vl 5.4.5 Solid-State Lasers 117
QSNPraT 5.4.6 Other Lasers 119
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