Optical Metrology Third Edition Wp]EaYt2D OP&[5X+Y Kjell J. G˚asvik
jG2w(h/" Spectra Vision AS, Trondheim, Norway
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5^Y/RS i L,ra=SV F Preface to the Third Edition xi
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L"\N 7 1Basics 1
K]u|V0c 1.1 Introduction 1
|")x1'M 1.2 Wave Motion. The Electromagnetic Spectrum 1
LBE".+ 1.3 The Plane Wave. Light Rays 3
YNXk32@j@e 1.4 Phase Difference 4
Y/^<t'o& 1.5 Complex Notation. Complex Amplitude 5
"h2Ny# 1.6 Oblique Incidence of A Plane Wave 5
C1/jA>XW 1.7 The Spherical Wave 7
{#%xq]r_ 1.8 The Intensity 8
3dbf! 1.9 Geometrical Optics 8
>ob/@ 1.10 The Simple Convex (Positive) Lens 10
r#Mx~Zg~ 1.11 A Plane-Wave Set-Up 11
/'1y`j< 2 Gaussian Optics 15
O)Qz$ 2.1 Introduction 15
Lm?*p>\Q 2.2 Refraction at a Spherical Surface 15
i#lo?\PO> 2.2.1 Examples 19
4yA`);r62 2.3 The General Image-Forming System 19
Z]Y4NO; 2.4 The Image-Formation Process 21
_y9P]@Q7% 2.5 Reflection at a Spherical Surface 23
1+jYpYEQW 2.6 Aspheric Lenses 25
.#@D n( 2.7 Stops and Apertures 26
d0B+syl&4l 2.8 Lens Aberrations. Computer Lens Design 28
ETOc4hMO 2.9 Imaging and The Lens Formula 29
5\S7Va;W 2.10 Standard Optical Systems 30
[*G2wP[$ 2.10.1 Afocal Systems. The Telescope 30
MT`gr 2.10.2 The Simple Magnifier 32
b8>9mKs 2.10.3 The Microscope 34
Dkb&/k:) 3 Interference 37
_p&$X 3.1 Introduction 37
`k&K"jA7$ 3.2 General Description 37
qJA.+q.e$e 3.3 Coherence 38
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7 3.4 Interference between two Plane Waves 41
!cb#fl 3.4.1 Laser Doppler Velocimetry (LDV) 45
cnthtv+(~ 3.5 Interference between other Waves 46
1 =<|h 3.6 Interferometry 49
Y+GeT#VHe 3.6.1 Wavefront Division 50
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qfu2}qUX~% 3.6.3 The Dual-Frequency Michelson Interferometer 54
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3.6.4 Heterodyne (Homodyne) Detection 55
tTH%YtG 3.7 Spatial and Temporal Coherence 56
mPin\-I 3.8 Optical Coherence Tomography 61
a1SOC=.M; 4 Diffraction 67
MPbPq3an 4.1 Introduction 67
'I]"=O, 4.2 Diffraction from a Single Slit 67
3.X0!M;x 4.3 Diffraction from a Grating 70
=on!&M 4.3.1 The Grating Equation. Amplitude Transmittance 70
Jt6J'MOq 4.3.2 The Spatial Frequency Spectrum 73
LFyceFbm 4.4 Fourier Optics 75
6# ";W2 4.5 Optical Filtering 76
.4> s2 4.5.1 Practical Filtering Set-Ups 78
o2 d~ 4.6 Physical Optics Description
|nN/x<v of Image Formation 81
AJfi,rFPg 4.6.1 The Coherent Transfer Function 83
Ki/5xK=s 4.6.2 The Incoherent Transfer Function 85
h(Ed% 4.6.3 The Depth of Focus 88
%uVJLz 4.7 The Phase-Modulated Sinusoidal Grating 89
==1/N{{R 5 Light Sources and Detectors 99
;Ia1L{472m 5.1 Introduction 99
Pki4wDCTW 5.2 Radiometry. Photometry 99
_M[[vXH 5.2.1 Lambertian Surface 102
|HGb.^f? 5.2.2 Blackbody Radiator 103
* g4Cy8$ 5.2.3 Examples 105
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{ $/Fk6qr 5.4 Coherent Light Sources 109
G.nftp(*} 5.4.1 Stimulated Emission 109
/ 7X dV 5.4.2 Gas Lasers 112
1L8ULxi_?] 5.4.3 Liquid Lasers 114
J xm9@, 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
m}[~A@qD 5.4.5 Solid-State Lasers 117
xeM':hD.o 5.4.6 Other Lasers 119
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