Optical Metrology Third Edition BUb(BzC @I&"P:E0F; Kjell J. G˚asvik
.*j+? Spectra Vision AS, Trondheim, Norway
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oo!g?X[[ }$-VI\96 Preface to the Third Edition xi
BGX@n#: 1Basics 1
US4Um>j 1.1 Introduction 1
AJT0)FCpR 1.2 Wave Motion. The Electromagnetic Spectrum 1
z7q2+;L 1.3 The Plane Wave. Light Rays 3
9zJ`;1 1.4 Phase Difference 4
Iqsk\2W]a3 1.5 Complex Notation. Complex Amplitude 5
K +~v<F 1.6 Oblique Incidence of A Plane Wave 5
*3$,f>W^ 1.7 The Spherical Wave 7
W(aRO 1.8 The Intensity 8
ZhsZywM 1.9 Geometrical Optics 8
=FmU]DV 1.10 The Simple Convex (Positive) Lens 10
=@2V#X]M* 1.11 A Plane-Wave Set-Up 11
>v[(w1?rX 2 Gaussian Optics 15
%'e(3;YI 2.1 Introduction 15
Y9;Mey*oW 2.2 Refraction at a Spherical Surface 15
!qlGt)G3 2.2.1 Examples 19
blcKtrYg 2.3 The General Image-Forming System 19
*K|aK p} 2.4 The Image-Formation Process 21
vi8~j 2.5 Reflection at a Spherical Surface 23
yUO|3ONT 2.6 Aspheric Lenses 25
^%&x{F. 2.7 Stops and Apertures 26
8(>.^667 2.8 Lens Aberrations. Computer Lens Design 28
<^U(ya 2.9 Imaging and The Lens Formula 29
g5Rm!T+@I< 2.10 Standard Optical Systems 30
91H0mP>ki 2.10.1 Afocal Systems. The Telescope 30
FE}!bKh 2.10.2 The Simple Magnifier 32
#ja`+w} 2.10.3 The Microscope 34
`?JgHk 3 Interference 37
(L$~zw5gr 3.1 Introduction 37
hZ<btN.y5 3.2 General Description 37
U*Qq5=dqD 3.3 Coherence 38
U$)Hhn|X 3.4 Interference between two Plane Waves 41
rf->mk{ 3.4.1 Laser Doppler Velocimetry (LDV) 45
-kbm$~P 3.5 Interference between other Waves 46
T3./V0]\I 3.6 Interferometry 49
1>w^ q`P 3.6.1 Wavefront Division 50
b`W*vduf 3.6.2 Amplitude Division 51
L\NZDkd 3.6.3 The Dual-Frequency Michelson Interferometer 54
gvNZrp>e! 3.6.4 Heterodyne (Homodyne) Detection 55
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]Oxx{|} 3.7 Spatial and Temporal Coherence 56
V:BX"$J1 3.8 Optical Coherence Tomography 61
rxj@NwAno 4 Diffraction 67
xGfDz*t 4.1 Introduction 67
PuCDsojclh 4.2 Diffraction from a Single Slit 67
_}OJPahw 4.3 Diffraction from a Grating 70
c1kxKxE 4.3.1 The Grating Equation. Amplitude Transmittance 70
/;AZ/Ocy! 4.3.2 The Spatial Frequency Spectrum 73
VONAw3k7! 4.4 Fourier Optics 75
*Ca)RgM 4.5 Optical Filtering 76
=`~Z@IbdI 4.5.1 Practical Filtering Set-Ups 78
"F$o!Vk 4.6 Physical Optics Description
=nx:GT3&[ of Image Formation 81
S9R]Zl7{- 4.6.1 The Coherent Transfer Function 83
F,M"/hnPT 4.6.2 The Incoherent Transfer Function 85
drKjLo[y 4.6.3 The Depth of Focus 88
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+)/$4 4.7 The Phase-Modulated Sinusoidal Grating 89
{Y91vXTz7 5 Light Sources and Detectors 99
JhCkkw 5.1 Introduction 99
lhoq3A 5.2 Radiometry. Photometry 99
tx5T^K7[ 5.2.1 Lambertian Surface 102
;{f?? G 5.2.2 Blackbody Radiator 103
rA1r#ksQ 5.2.3 Examples 105
$[iT~B$ 5.3 Incoherent Light Sources 108
ny(GTKoUz 5.4 Coherent Light Sources 109
g'ZMV6b?K 5.4.1 Stimulated Emission 109
@f{_=~+ 5.4.2 Gas Lasers 112
;Q=GJ5`B 5.4.3 Liquid Lasers 114
b/B`&CIA0" 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
[OZ=iz. 5.4.5 Solid-State Lasers 117
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