Optical Metrology Third Edition hkDew0k uwc@~=; Kjell J. G˚asvik
VT2f\d[Q Spectra Vision AS, Trondheim, Norway
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yfZYGhPN( y4N2gBTKu Preface to the Third Edition xi
nU,~*Us 1Basics 1
l&_PsnU 1.1 Introduction 1
D$fWeG{f 1.2 Wave Motion. The Electromagnetic Spectrum 1
:I(d-,C 1.3 The Plane Wave. Light Rays 3
ho%G 1.4 Phase Difference 4
Zo#c[9IaC 1.5 Complex Notation. Complex Amplitude 5
(2(y9r*1 1.6 Oblique Incidence of A Plane Wave 5
(b"kN( 1.7 The Spherical Wave 7
ld[BiP`B2V 1.8 The Intensity 8
9P&{Xhs7 1.9 Geometrical Optics 8
5BS !6o;P' 1.10 The Simple Convex (Positive) Lens 10
G<>h>c1>z 1.11 A Plane-Wave Set-Up 11
)ml#2XP!f 2 Gaussian Optics 15
j_0xE;g"] 2.1 Introduction 15
H+5S )r 2.2 Refraction at a Spherical Surface 15
)S^[b2P]y_ 2.2.1 Examples 19
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2.3 The General Image-Forming System 19
i}/Het+( 2.4 The Image-Formation Process 21
T-y5U}, 2.5 Reflection at a Spherical Surface 23
`4-m$ab 2.6 Aspheric Lenses 25
o]aMhSol 2.7 Stops and Apertures 26
Ns$,.D 2.8 Lens Aberrations. Computer Lens Design 28
l9z{pZ\KM 2.9 Imaging and The Lens Formula 29
Wrf+5 ;,, 2.10 Standard Optical Systems 30
qZ%0p*P#_ 2.10.1 Afocal Systems. The Telescope 30
ttY[\D&ZS 2.10.2 The Simple Magnifier 32
9.wZhcqqU 2.10.3 The Microscope 34
Vx%!j& 3 Interference 37
l}~9xa}:D| 3.1 Introduction 37
Bej k^V~ 3.2 General Description 37
I.- I4F)D 3.3 Coherence 38
_Jn@+NoO 3.4 Interference between two Plane Waves 41
ss4YeZa 3.4.1 Laser Doppler Velocimetry (LDV) 45
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;umbld0 3.6 Interferometry 49
kC
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H`nd | 3.6.2 Amplitude Division 51
vT#m 8Kg 3.6.3 The Dual-Frequency Michelson Interferometer 54
=kb/4eRg 3.6.4 Heterodyne (Homodyne) Detection 55
Ga\kvMtr 3.7 Spatial and Temporal Coherence 56
t[:G45].-k 3.8 Optical Coherence Tomography 61
Vo%DoZg 4 Diffraction 67
.>NPgdI 4.1 Introduction 67
km29]V=} 4.2 Diffraction from a Single Slit 67
0Om<+]).R 4.3 Diffraction from a Grating 70
z{nd4qOsD 4.3.1 The Grating Equation. Amplitude Transmittance 70
7 b8pWM 4.3.2 The Spatial Frequency Spectrum 73
I+rLKGZC 4.4 Fourier Optics 75
/%AA\`:6 4.5 Optical Filtering 76
}1|FES 4.5.1 Practical Filtering Set-Ups 78
jZ0/@zOf 4.6 Physical Optics Description
z}-8pDD' of Image Formation 81
.RPh#FI6J 4.6.1 The Coherent Transfer Function 83
c@lH 4.6.2 The Incoherent Transfer Function 85
r85j/YK 4.6.3 The Depth of Focus 88
ZOy^TR 4.7 The Phase-Modulated Sinusoidal Grating 89
$AHdjQ[;6- 5 Light Sources and Detectors 99
V U~r~ 5.1 Introduction 99
#zg"E< 5.2 Radiometry. Photometry 99
S$qpClXS, 5.2.1 Lambertian Surface 102
~b})=7 n. 5.2.2 Blackbody Radiator 103
r#w.yg4EX 5.2.3 Examples 105
yc0_7Im? 5.3 Incoherent Light Sources 108
kyL]4:@W` 5.4 Coherent Light Sources 109
B<jVo%og 5.4.1 Stimulated Emission 109
AtP!.p"j 5.4.2 Gas Lasers 112
<[V1z=Eo/] 5.4.3 Liquid Lasers 114
U98e=57N 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
[#2X 5.4.5 Solid-State Lasers 117
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Jn!> 5.4.6 Other Lasers 119
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