Optical Metrology Third Edition n}A\2 bO E'1+ Yq Kjell J. G˚asvik
: FAH\ Spectra Vision AS, Trondheim, Norway
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jHt\ QQk{\ PV Preface to the Third Edition xi
rA0,`}8\ 1Basics 1
A >V I{ 1.1 Introduction 1
* v8T s 1.2 Wave Motion. The Electromagnetic Spectrum 1
-71dN0hWh 1.3 The Plane Wave. Light Rays 3
g ]* 1.4 Phase Difference 4
nmlPX7!{$ 1.5 Complex Notation. Complex Amplitude 5
ZaFb*XRgS 1.6 Oblique Incidence of A Plane Wave 5
s/"&9F3 1.7 The Spherical Wave 7
bLz *A- 1.8 The Intensity 8
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[y 1.9 Geometrical Optics 8
*fO3]+)d+ 1.10 The Simple Convex (Positive) Lens 10
& a!BD/ 1.11 A Plane-Wave Set-Up 11
/)N@ M 2 Gaussian Optics 15
0YH+B 2.1 Introduction 15
,~ ? 'Ef80 2.2 Refraction at a Spherical Surface 15
3 <|`0pt} 2.2.1 Examples 19
=9L$L|W 2.3 The General Image-Forming System 19
4A{|[}! 2.4 The Image-Formation Process 21
_ |<d5TI 2.5 Reflection at a Spherical Surface 23
Q8p&Ki;i 2.6 Aspheric Lenses 25
0)Y bI! 2.7 Stops and Apertures 26
mtic> 2.8 Lens Aberrations. Computer Lens Design 28
C2]Kc{4 2.9 Imaging and The Lens Formula 29
HDM<w+ZxX 2.10 Standard Optical Systems 30
"_L?2ta 2.10.1 Afocal Systems. The Telescope 30
ZWc+),X 2.10.2 The Simple Magnifier 32
K.tlo^#^B[ 2.10.3 The Microscope 34
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3 Interference 37
D;BFl(l 3.1 Introduction 37
7: jSP$ 3.2 General Description 37
V0wK.^]+}/ 3.3 Coherence 38
v*FCE 1HI 3.4 Interference between two Plane Waves 41
CSt6}_c! 3.4.1 Laser Doppler Velocimetry (LDV) 45
*`| .:' 3.5 Interference between other Waves 46
Y($"i<rN 3.6 Interferometry 49
'9{H(DA 3.6.1 Wavefront Division 50
I BES$[ 3.6.2 Amplitude Division 51
ZSKk*<= 3.6.3 The Dual-Frequency Michelson Interferometer 54
]2h~Db= 3.6.4 Heterodyne (Homodyne) Detection 55
AGLzA+6M 3.7 Spatial and Temporal Coherence 56
WVJN6YNd V 3.8 Optical Coherence Tomography 61
<0JW [m 4 Diffraction 67
;,Lq*x2s 4.1 Introduction 67
lua t1#~J 4.2 Diffraction from a Single Slit 67
V9B $_j4 4.3 Diffraction from a Grating 70
2=["jP!B 4.3.1 The Grating Equation. Amplitude Transmittance 70
>'Y] C\ 4.3.2 The Spatial Frequency Spectrum 73
vJl4.nk 4.4 Fourier Optics 75
e)cmZ8~S 4.5 Optical Filtering 76
?y ] 3kU 4.5.1 Practical Filtering Set-Ups 78
:S~XE 4.6 Physical Optics Description
=qI JXV of Image Formation 81
iOj m j0 4.6.1 The Coherent Transfer Function 83
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H^tV? 4.6.2 The Incoherent Transfer Function 85
/x0zZ+}V 4.6.3 The Depth of Focus 88
pf] sL/ g 4.7 The Phase-Modulated Sinusoidal Grating 89
>jN)9}3>-# 5 Light Sources and Detectors 99
0sV;TQt+f 5.1 Introduction 99
w
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s )~Q@ze2 5.2.1 Lambertian Surface 102
%8S!l;\H5 5.2.2 Blackbody Radiator 103
]%>;R^HY 5.2.3 Examples 105
#G)ZhgB^ 5.3 Incoherent Light Sources 108
-qid. 5.4 Coherent Light Sources 109
s7a\L=#p( 5.4.1 Stimulated Emission 109
9R'rFI 5.4.2 Gas Lasers 112
-PEpy3dMY 5.4.3 Liquid Lasers 114
<Ni]\-* 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
|M9x&(H;Hw 5.4.5 Solid-State Lasers 117
-2% [ ] 5.4.6 Other Lasers 119
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