Optical Metrology Third Edition hEFOT]P4 V`8\)FFG Kjell J. G˚asvik
'6cXCO-_P Spectra Vision AS, Trondheim, Norway
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q+} \ (| !X9^ L^v} Preface to the Third Edition xi
P;eXUF+jn 1Basics 1
A&A{Thz 1.1 Introduction 1
~)VI` 36X 1.2 Wave Motion. The Electromagnetic Spectrum 1
dZo x;_b 1.3 The Plane Wave. Light Rays 3
CEVisKcE: 1.4 Phase Difference 4
lD{*Z spz 1.5 Complex Notation. Complex Amplitude 5
_' 4 S1 1.6 Oblique Incidence of A Plane Wave 5
+`iJ+ 1.7 The Spherical Wave 7
(I#mo2 1.8 The Intensity 8
*I[tIO\ 1.9 Geometrical Optics 8
<'QI_mP* 1.10 The Simple Convex (Positive) Lens 10
ROXa / 1.11 A Plane-Wave Set-Up 11
?E<9H/ 2 Gaussian Optics 15
Sx8C<S5r< 2.1 Introduction 15
Omi/sKFM i 2.2 Refraction at a Spherical Surface 15
p: )=i"uL 2.2.1 Examples 19
7 ?D?s!%\ 2.3 The General Image-Forming System 19
GKKDO+A=! 2.4 The Image-Formation Process 21
fwiP3*j+Nn 2.5 Reflection at a Spherical Surface 23
d tE"1nR 2.6 Aspheric Lenses 25
a;v4R[lQ 2.7 Stops and Apertures 26
0 6M?ecN 2.8 Lens Aberrations. Computer Lens Design 28
"%b Gw v 2.9 Imaging and The Lens Formula 29
do*a E 2.10 Standard Optical Systems 30
:[CEHRc7x 2.10.1 Afocal Systems. The Telescope 30
*U}ztH-+/ 2.10.2 The Simple Magnifier 32
VkO*+"cGv 2.10.3 The Microscope 34
(L1F ],Au 3 Interference 37
f7 |Tp m 3.1 Introduction 37
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&po !X ) 3.3 Coherence 38
Pf/8tXs} 3.4 Interference between two Plane Waves 41
1w,34*- } 3.4.1 Laser Doppler Velocimetry (LDV) 45
IT)3Et@Y 3.5 Interference between other Waves 46
1J72*`4O K 3.6 Interferometry 49
I~6 o<HO 3.6.1 Wavefront Division 50
!{ {gL=_@ 3.6.2 Amplitude Division 51
6`vW4]zu 3.6.3 The Dual-Frequency Michelson Interferometer 54
pp@B]We 3.6.4 Heterodyne (Homodyne) Detection 55
yn"4qC#Z 3.7 Spatial and Temporal Coherence 56
AW E ab 3.8 Optical Coherence Tomography 61
\* Yr&Lm 4 Diffraction 67
Pjn{3/*wi 4.1 Introduction 67
nt+OaXe5D 4.2 Diffraction from a Single Slit 67
i(OeE"YA 4.3 Diffraction from a Grating 70
oam;hmw 4.3.1 The Grating Equation. Amplitude Transmittance 70
qGX#(,E9; 4.3.2 The Spatial Frequency Spectrum 73
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4.4 Fourier Optics 75
4 R(m$!E! 4.5 Optical Filtering 76
|2 %|= 4.5.1 Practical Filtering Set-Ups 78
q3#+G:nh 4.6 Physical Optics Description
&r~s3S{pQ of Image Formation 81
RKE"}|i +S 4.6.1 The Coherent Transfer Function 83
7(oA(l 1V 4.6.2 The Incoherent Transfer Function 85
4P"bOt5izR 4.6.3 The Depth of Focus 88
FUl hEH 4.7 The Phase-Modulated Sinusoidal Grating 89
.Zj`_5C 5 Light Sources and Detectors 99
G maNi 5.1 Introduction 99
_Gf-s51s 5.2 Radiometry. Photometry 99
p:K%-^ 5.2.1 Lambertian Surface 102
y4LUC;[n 5.2.2 Blackbody Radiator 103
1_#;+S 5.2.3 Examples 105
q 5L^>" 5.3 Incoherent Light Sources 108
f $6N 5.4 Coherent Light Sources 109
cJv/)hRaz 5.4.1 Stimulated Emission 109
P tLWFO 5.4.2 Gas Lasers 112
fISK3t/=C 5.4.3 Liquid Lasers 114
G}^= (,jl 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
HZZZ [km 5.4.5 Solid-State Lasers 117
\/?J)k3H. 5.4.6 Other Lasers 119
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