Optical Metrology Third Edition EdPN= #Rkld v' Kjell J. G˚asvik
k<M~co;L Spectra Vision AS, Trondheim, Norway
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XFg.Z+ # dWI.t1` i Preface to the Third Edition xi
VnJ-nf A 1Basics 1
|= frsf~? 1.1 Introduction 1
BI\+ NGrB 1.2 Wave Motion. The Electromagnetic Spectrum 1
^ 3-Wxn9& 1.3 The Plane Wave. Light Rays 3
B U="BB/[ 1.4 Phase Difference 4
=!#iC?I 1.5 Complex Notation. Complex Amplitude 5
VhAZncw 1.6 Oblique Incidence of A Plane Wave 5
Z-{!Z;T)z 1.7 The Spherical Wave 7
ZQ^kS9N i 1.8 The Intensity 8
WL AJqmC] 1.9 Geometrical Optics 8
9 o7d3 ir) 1.10 The Simple Convex (Positive) Lens 10
Rro{A+[,X 1.11 A Plane-Wave Set-Up 11
J\%<.S> 2 Gaussian Optics 15
!7g
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1@ j>2>i 2.2 Refraction at a Spherical Surface 15
|-zwl8E 2.2.1 Examples 19
:);]E-ch 2.3 The General Image-Forming System 19
!k&~|_$0@ 2.4 The Image-Formation Process 21
@HfWA FT 2.5 Reflection at a Spherical Surface 23
FNDLqf!j 2.6 Aspheric Lenses 25
MGO.dRy_ 2.7 Stops and Apertures 26
_e.b #{=9 2.8 Lens Aberrations. Computer Lens Design 28
~EU[? 2.9 Imaging and The Lens Formula 29
~?}/L'q!b 2.10 Standard Optical Systems 30
8j,_ 2.10.1 Afocal Systems. The Telescope 30
kC R)k=* 2.10.2 The Simple Magnifier 32
16\U'< 2.10.3 The Microscope 34
6bg+U`&g 3 Interference 37
bH 41#B 3.1 Introduction 37
Gc9^Z= 3.2 General Description 37
7[-jr;v 3.3 Coherence 38
wS2iyrIB 3.4 Interference between two Plane Waves 41
2`* %NJ 3.4.1 Laser Doppler Velocimetry (LDV) 45
g[;iVX^1& 3.5 Interference between other Waves 46
ru`;cXa, 3.6 Interferometry 49
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t.pg ;# 3.6.2 Amplitude Division 51
LeW.uh3. 3.6.3 The Dual-Frequency Michelson Interferometer 54
&,Q{l$`X 3.6.4 Heterodyne (Homodyne) Detection 55
2t { Cpw 3.7 Spatial and Temporal Coherence 56
{K'SOh H4? 3.8 Optical Coherence Tomography 61
81_3{OrE< 4 Diffraction 67
bq4H4? j 4.1 Introduction 67
ABV\:u 4.2 Diffraction from a Single Slit 67
B>?Y(" E 4.3 Diffraction from a Grating 70
{I 7pk6Qd 4.3.1 The Grating Equation. Amplitude Transmittance 70
4Uf+t?U9 4.3.2 The Spatial Frequency Spectrum 73
g]xZ^M+ 4.4 Fourier Optics 75
>B~jPU 4.5 Optical Filtering 76
0iX qAa 4.5.1 Practical Filtering Set-Ups 78
MatC2-aV1 4.6 Physical Optics Description
Y%:p(f< of Image Formation 81
tL+8nTL 4.6.1 The Coherent Transfer Function 83
l7{hq}@;cC 4.6.2 The Incoherent Transfer Function 85
?<frU ,{ 4.6.3 The Depth of Focus 88
z K8#gif@ 4.7 The Phase-Modulated Sinusoidal Grating 89
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<R9V 5 Light Sources and Detectors 99
%Z{J = 5.1 Introduction 99
d L%E0o 5.2 Radiometry. Photometry 99
, m|9L{ 5.2.1 Lambertian Surface 102
`^J~^Z7Y- 5.2.2 Blackbody Radiator 103
A?}OOjA 5.2.3 Examples 105
>KY\Bx 5.3 Incoherent Light Sources 108
s*CK FEb# 5.4 Coherent Light Sources 109
xN"KSQpu 5.4.1 Stimulated Emission 109
xdo{4XY^*W 5.4.2 Gas Lasers 112
]bn xOk 5.4.3 Liquid Lasers 114
N2 &aU?`e 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
*vAOUqX`x 5.4.5 Solid-State Lasers 117
GvzPT2E! 5.4.6 Other Lasers 119
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