Optical Metrology Third Edition M ##h<3 I b%> vhj&F Kjell J. G˚asvik
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H Spectra Vision AS, Trondheim, Norway
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q)R&npP7 lV! ecJw$ Preface to the Third Edition xi
b}'XDw 1Basics 1
# UGtY D}" 1.1 Introduction 1
.zr2!}lB 1.2 Wave Motion. The Electromagnetic Spectrum 1
*k'D%}N: 1.3 The Plane Wave. Light Rays 3
J \U}U'qP 1.4 Phase Difference 4
sxM0 c 1.5 Complex Notation. Complex Amplitude 5
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P8.{$ 1.6 Oblique Incidence of A Plane Wave 5
#mY*H^jI]~ 1.7 The Spherical Wave 7
'9cShe 1.8 The Intensity 8
w^N xR , 1.9 Geometrical Optics 8
]$/ TsN 1.10 The Simple Convex (Positive) Lens 10
7M#2Tze} 1.11 A Plane-Wave Set-Up 11
[G:wPp.y 2 Gaussian Optics 15
K~**. NF-n 2.1 Introduction 15
)f]E<*k'E 2.2 Refraction at a Spherical Surface 15
QU d`({/@: 2.2.1 Examples 19
w^tNYN,i 2.3 The General Image-Forming System 19
,aS6|~ac4 2.4 The Image-Formation Process 21
m@o/ W 2.5 Reflection at a Spherical Surface 23
FNlzpCT~L 2.6 Aspheric Lenses 25
v,w /g| 2.7 Stops and Apertures 26
[ 9 )9>- 2.8 Lens Aberrations. Computer Lens Design 28
SPKGbp& 2.9 Imaging and The Lens Formula 29
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s6SG%Vd 2.10.1 Afocal Systems. The Telescope 30
J$6tCF D 2.10.2 The Simple Magnifier 32
g2L^cP>2 2.10.3 The Microscope 34
\/,54c2 3 Interference 37
FyY D7E 3.1 Introduction 37
bTB/M= M 3.2 General Description 37
HN,E+ dQ 3.3 Coherence 38
H@0i}!U64 3.4 Interference between two Plane Waves 41
TV)bX 3.4.1 Laser Doppler Velocimetry (LDV) 45
6wH]W+A 3.5 Interference between other Waves 46
`` (D01< 3.6 Interferometry 49
xe} d& 3.6.1 Wavefront Division 50
TR 3_!0 3.6.2 Amplitude Division 51
KK" uSC 3.6.3 The Dual-Frequency Michelson Interferometer 54
jSVIO v: 3.6.4 Heterodyne (Homodyne) Detection 55
|@KW~YlE 3.7 Spatial and Temporal Coherence 56
I3 uS?c 3.8 Optical Coherence Tomography 61
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mk ?&`_X1 4.1 Introduction 67
4Z >KrFO 4.2 Diffraction from a Single Slit 67
{J3;4p-& 4.3 Diffraction from a Grating 70
bqpy@WiI S 4.3.1 The Grating Equation. Amplitude Transmittance 70
u50 o1^<X 4.3.2 The Spatial Frequency Spectrum 73
3]DUUXg$ 4.4 Fourier Optics 75
.G# wXsJj 4.5 Optical Filtering 76
lN$#lyy 4.5.1 Practical Filtering Set-Ups 78
E5 "%-fAJ 4.6 Physical Optics Description
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ih of Image Formation 81
dc UaZfON 4.6.1 The Coherent Transfer Function 83
l; ^Id#N 4.6.2 The Incoherent Transfer Function 85
fT1 /@ 4.6.3 The Depth of Focus 88
{HP Kp&kl 4.7 The Phase-Modulated Sinusoidal Grating 89
y]$%>N0vLX 5 Light Sources and Detectors 99
Sw HrHj 5.1 Introduction 99
s 0,c4y 5.2 Radiometry. Photometry 99
M.|O+K z 5.2.1 Lambertian Surface 102
^g/ 5.2.2 Blackbody Radiator 103
0~{jgN~ 5.2.3 Examples 105
p^PAbCP'|3 5.3 Incoherent Light Sources 108
b4%sOn, 5.4 Coherent Light Sources 109
)P 5.4.1 Stimulated Emission 109
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e1a8>>bcI 5.4.3 Liquid Lasers 114
"H I&dC 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
TZ8:3ti 5.4.5 Solid-State Lasers 117
m' D_zb9+ 5.4.6 Other Lasers 119
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