Optical Metrology Third Edition t5[[JD1V *:O.97q@h Kjell J. G˚asvik
? 3O9eZ Y@ Spectra Vision AS, Trondheim, Norway
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F Preface to the Third Edition xi
M4 WiT<|]R 1Basics 1
V#jWege 1.1 Introduction 1
^_ojR4 1.2 Wave Motion. The Electromagnetic Spectrum 1
+ 78CvjG 1.3 The Plane Wave. Light Rays 3
\a+(=s(; 1.4 Phase Difference 4
TO-$B8*nq 1.5 Complex Notation. Complex Amplitude 5
9 fMau 1.6 Oblique Incidence of A Plane Wave 5
XO <y + 1.7 The Spherical Wave 7
#Oha(mRY 1.8 The Intensity 8
zm,@]!wI 1.9 Geometrical Optics 8
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&7*!Q 1.10 The Simple Convex (Positive) Lens 10
>O5m5@GK3a 1.11 A Plane-Wave Set-Up 11
76vy5R(. 2 Gaussian Optics 15
<9sO 2.1 Introduction 15
Er k?}E 2.2 Refraction at a Spherical Surface 15
#oJ5k8Wy 2.2.1 Examples 19
Od?qz1 2.3 The General Image-Forming System 19
oDcKtB+2 2.4 The Image-Formation Process 21
W>b(O m_% 2.5 Reflection at a Spherical Surface 23
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[%U 2.6 Aspheric Lenses 25
%okzOKKX 2.7 Stops and Apertures 26
x3rlJs`$; 2.8 Lens Aberrations. Computer Lens Design 28
+ht| N[P 2.9 Imaging and The Lens Formula 29
+-B^Z On 2.10 Standard Optical Systems 30
e:AHVep j{ 2.10.1 Afocal Systems. The Telescope 30
,&4qgp{) 2.10.2 The Simple Magnifier 32
r 6eb}z!i 2.10.3 The Microscope 34
"KJ%|pg_C 3 Interference 37
}Yv\0\~'W| 3.1 Introduction 37
~}ET?Q7t 3.2 General Description 37
>*$; 3.3 Coherence 38
>h+349 3.4 Interference between two Plane Waves 41
f+.T^es 3.4.1 Laser Doppler Velocimetry (LDV) 45
OMk5{-8B 3.5 Interference between other Waves 46
`m.eM 3.6 Interferometry 49
U4G}DCU 3.6.1 Wavefront Division 50
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3.6.2 Amplitude Division 51
_hG;.=sr 3.6.3 The Dual-Frequency Michelson Interferometer 54
iE.-FZc 3.6.4 Heterodyne (Homodyne) Detection 55
na^sBq?\ 3.7 Spatial and Temporal Coherence 56
{J5JYdK 3.8 Optical Coherence Tomography 61
Vpp; \ 4 Diffraction 67
t\v+ogbk) 4.1 Introduction 67
+}Av-47`h 4.2 Diffraction from a Single Slit 67
,_ag;pt9) 4.3 Diffraction from a Grating 70
\Ey~3&x9f 4.3.1 The Grating Equation. Amplitude Transmittance 70
7FO'{Qq 4.3.2 The Spatial Frequency Spectrum 73
IHC1G1KW=A 4.4 Fourier Optics 75
S- #q~X!yJ 4.5 Optical Filtering 76
=:+0)t=ao 4.5.1 Practical Filtering Set-Ups 78
_ q(Q 4.6 Physical Optics Description
US{3pkr;I] of Image Formation 81
iqW1#)3'R 4.6.1 The Coherent Transfer Function 83
vs6 , 4.6.2 The Incoherent Transfer Function 85
x7T + > 4.6.3 The Depth of Focus 88
O--7<Q\ 4.7 The Phase-Modulated Sinusoidal Grating 89
c<#<k}y 5 Light Sources and Detectors 99
1nPZ<^A&@ 5.1 Introduction 99
[@fz1{* 5.2 Radiometry. Photometry 99
_7a'r</@ 5.2.1 Lambertian Surface 102
7~M< cD 5.2.2 Blackbody Radiator 103
{0!#>["< 5.2.3 Examples 105
D@X+{ 5.3 Incoherent Light Sources 108
amQz^^ 5.4 Coherent Light Sources 109
%i)B*9k 5.4.1 Stimulated Emission 109
2i |B=D( 5.4.2 Gas Lasers 112
_{~]/k 5.4.3 Liquid Lasers 114
6#A:}B<? 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
@U -$dw'4 5.4.5 Solid-State Lasers 117
s ~26 5.4.6 Other Lasers 119
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