Optical Metrology Third Edition l3Q(TH ~I 7XTkX"zKj Kjell J. G˚asvik
vgH3<pDiU6 Spectra Vision AS, Trondheim, Norway
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YQ9'0F[l j<VFn~*_ Preface to the Third Edition xi
e.7EU 1Basics 1
1{ ~#H<K 1.1 Introduction 1
H8Bs<2 1.2 Wave Motion. The Electromagnetic Spectrum 1
+./H6! 1.3 The Plane Wave. Light Rays 3
mS$j?>m 1.4 Phase Difference 4
S1Wj8P- 1.5 Complex Notation. Complex Amplitude 5
K1"*.\?F 1.6 Oblique Incidence of A Plane Wave 5
Z<1FSk,[ 1.7 The Spherical Wave 7
c[wla<dO* 1.8 The Intensity 8
!;Yg/'vD- 1.9 Geometrical Optics 8
8dZSi 1.10 The Simple Convex (Positive) Lens 10
la0BiLzb] 1.11 A Plane-Wave Set-Up 11
XHK<AO^ 2 Gaussian Optics 15
O`x;,6Vr 2.1 Introduction 15
K6v6ynp/ 2.2 Refraction at a Spherical Surface 15
p*4':TFuD; 2.2.1 Examples 19
D[aCsaR 2.3 The General Image-Forming System 19
B(LWdap~ 2.4 The Image-Formation Process 21
([\ 2.5 Reflection at a Spherical Surface 23
BP'36?=Zo 2.6 Aspheric Lenses 25
5[k/s}g 2.7 Stops and Apertures 26
]'!f28Ng- 2.8 Lens Aberrations. Computer Lens Design 28
#>b3"[ | 2.9 Imaging and The Lens Formula 29
[R(`W#W 2.10 Standard Optical Systems 30
y~AVei& 2.10.1 Afocal Systems. The Telescope 30
&=Ar 2.10.2 The Simple Magnifier 32
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:|V$\!o'U 3 Interference 37
]/[FR 5> 3.1 Introduction 37
A-Sv;/yD_ 3.2 General Description 37
>kj`7GA 3.3 Coherence 38
R]}}$R`j 3.4 Interference between two Plane Waves 41
,&]S(|2%>t 3.4.1 Laser Doppler Velocimetry (LDV) 45
+%zAQeb 3.5 Interference between other Waves 46
<k eVrCR 3.6 Interferometry 49
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586;\ 3.6.1 Wavefront Division 50
Y;dz,}re 3.6.2 Amplitude Division 51
@Lpq~ 1eZB 3.6.3 The Dual-Frequency Michelson Interferometer 54
FcR=v0), 3.6.4 Heterodyne (Homodyne) Detection 55
}iXDa?6% 3.7 Spatial and Temporal Coherence 56
iV5yJF{ZH 3.8 Optical Coherence Tomography 61
?i7%x,g(Z 4 Diffraction 67
bR*-Ht+wd 4.1 Introduction 67
*xx'@e|<; 4.2 Diffraction from a Single Slit 67
{C 6=[ 4.3 Diffraction from a Grating 70
wKtl+}} 4.3.1 The Grating Equation. Amplitude Transmittance 70
C]O(T2l{l 4.3.2 The Spatial Frequency Spectrum 73
q
MfT>rH 4.4 Fourier Optics 75
Q8:Has 4.5 Optical Filtering 76
m'Amli@[ 4.5.1 Practical Filtering Set-Ups 78
D"Bl:W'?j 4.6 Physical Optics Description
N=4G=0 `ke of Image Formation 81
3QV *% 4.6.1 The Coherent Transfer Function 83
Jj>?GAir 4.6.2 The Incoherent Transfer Function 85
iZ#!O*> 4.6.3 The Depth of Focus 88
q!{y&.&\ 4.7 The Phase-Modulated Sinusoidal Grating 89
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^el 5 Light Sources and Detectors 99
p#ol*m5wE 5.1 Introduction 99
yQ_B)b 5.2 Radiometry. Photometry 99
(|[2J3ZET 5.2.1 Lambertian Surface 102
<":;+Ng+ 5.2.2 Blackbody Radiator 103
Hbj,[$Jb 5.2.3 Examples 105
-E^vLB)O 5.3 Incoherent Light Sources 108
b(*!$EB 5.4 Coherent Light Sources 109
\l'm[jy> 5.4.1 Stimulated Emission 109
j-4VB_N@ 5.4.2 Gas Lasers 112
*"+=K,#D 5.4.3 Liquid Lasers 114
0ZT5bg_M 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
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SL}P 5.4.5 Solid-State Lasers 117
)#BMTKA^ 5.4.6 Other Lasers 119
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