Optical Metrology Third Edition EH-sZAv 9)D6Nm Kjell J. G˚asvik
;d@#XIS&-( Spectra Vision AS, Trondheim, Norway
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qT I:E`PZ B*eC3ok3z Preface to the Third Edition xi
,[N%Q# 1Basics 1
k6;?)~. 1.1 Introduction 1
-m\u 1.2 Wave Motion. The Electromagnetic Spectrum 1
raW>xOivR 1.3 The Plane Wave. Light Rays 3
W6^5YH% 1.4 Phase Difference 4
nxO"ua 1.5 Complex Notation. Complex Amplitude 5
<KJ/<0l 1.6 Oblique Incidence of A Plane Wave 5
@CNi{. RX 1.7 The Spherical Wave 7
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1.8 The Intensity 8
q?H|o( 1.9 Geometrical Optics 8
S~<$Hy*kh 1.10 The Simple Convex (Positive) Lens 10
##q2mm:a9P 1.11 A Plane-Wave Set-Up 11
UgRhWV~f0 2 Gaussian Optics 15
0^v`T%|fTX 2.1 Introduction 15
*o]L|Vu 2.2 Refraction at a Spherical Surface 15
;p.v]0]is 2.2.1 Examples 19
&U{#Kt5q 2.3 The General Image-Forming System 19
Z
EQ@IS:Y 2.4 The Image-Formation Process 21
2d>z1%' 2.5 Reflection at a Spherical Surface 23
fPU`/6 2.6 Aspheric Lenses 25
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>|J`s~? 2.8 Lens Aberrations. Computer Lens Design 28
hMa]B*o/- 2.9 Imaging and The Lens Formula 29
E}%B;"b/Tj 2.10 Standard Optical Systems 30
c|f<u{' 2.10.1 Afocal Systems. The Telescope 30
;Y)w@bNt@ 2.10.2 The Simple Magnifier 32
Z3%}ajPu[ 2.10.3 The Microscope 34
l(yZO$ 3 Interference 37
4M^=nae 3.1 Introduction 37
ke!?BZx 3.2 General Description 37
?K1/ <PE+ 3.3 Coherence 38
&`h{iK7 3.4 Interference between two Plane Waves 41
D,FHZDt 3.4.1 Laser Doppler Velocimetry (LDV) 45
*$#W]bO 3.5 Interference between other Waves 46
sZ'nYo 3.6 Interferometry 49
{0r0\D>bw 3.6.1 Wavefront Division 50
bUs0 M0y 3.6.2 Amplitude Division 51
i)\L:qF5 3.6.3 The Dual-Frequency Michelson Interferometer 54
'_<{p3M 3.6.4 Heterodyne (Homodyne) Detection 55
Fzm*Pz3 3.7 Spatial and Temporal Coherence 56
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} j<)L, 4 Diffraction 67
\c,ap49RC 4.1 Introduction 67
/pm]BC 4.2 Diffraction from a Single Slit 67
\TIT:1 4.3 Diffraction from a Grating 70
CJtcn_.F 4.3.1 The Grating Equation. Amplitude Transmittance 70
5CuuG<0 4.3.2 The Spatial Frequency Spectrum 73
y~(h>gi,x 4.4 Fourier Optics 75
2{D{sa 4.5 Optical Filtering 76
lVd^
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rUTcpGH 4.6 Physical Optics Description
mD/9J5: of Image Formation 81
02Y]`CXj 4.6.1 The Coherent Transfer Function 83
E~,F 4.6.2 The Incoherent Transfer Function 85
a@8v^G 4.6.3 The Depth of Focus 88
% BVs47g 4.7 The Phase-Modulated Sinusoidal Grating 89
v/@^Q1G/: 5 Light Sources and Detectors 99
^9m\=5d 5.1 Introduction 99
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toLV4BtIG 5.2.1 Lambertian Surface 102
phQUD 5.2.2 Blackbody Radiator 103
Y1L[;)H n 5.2.3 Examples 105
16w|O|^< 5.3 Incoherent Light Sources 108
9 *xR6 5.4 Coherent Light Sources 109
R$v[!A+:' 5.4.1 Stimulated Emission 109
9FoHD 5.4.2 Gas Lasers 112
r`=+ L-! 5.4.3 Liquid Lasers 114
09|K>UC)v 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
i3dkYevs? 5.4.5 Solid-State Lasers 117
vNVox0V 5.4.6 Other Lasers 119
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