Optical Metrology Third Edition $@ous4& _&U5 u Kjell J. G˚asvik
& !adW@y Spectra Vision AS, Trondheim, Norway
rA">< pH 
/5PV|o nO 2tEA8F~k Preface to the Third Edition xi
"K!9^!4& 1Basics 1
" ,qcqG( 1.1 Introduction 1
5D~>Ed; 1.2 Wave Motion. The Electromagnetic Spectrum 1
uoryxKRjc~ 1.3 The Plane Wave. Light Rays 3
~ s C< V 1.4 Phase Difference 4
VSxls 1.5 Complex Notation. Complex Amplitude 5
2I!L+j_ 1.6 Oblique Incidence of A Plane Wave 5
Tej&1'G 1.7 The Spherical Wave 7
0c pI2 1.8 The Intensity 8
EYsf<8cl 1.9 Geometrical Optics 8
l rE| >R 1.10 The Simple Convex (Positive) Lens 10
h=1cD\^|qw 1.11 A Plane-Wave Set-Up 11
'&|]tu:q 2 Gaussian Optics 15
~ &UfnO 2.1 Introduction 15
f` [gRcZ- 2.2 Refraction at a Spherical Surface 15
x}c%8dO#J 2.2.1 Examples 19
@S-p[u 2.3 The General Image-Forming System 19
-kv'C6gB 2.4 The Image-Formation Process 21
&ND8^lR=Y; 2.5 Reflection at a Spherical Surface 23
hPM:=@ N$ 2.6 Aspheric Lenses 25
;)SWUXa;{ 2.7 Stops and Apertures 26
pYt venBy 2.8 Lens Aberrations. Computer Lens Design 28
,rO>5$ w. 2.9 Imaging and The Lens Formula 29
~@v<B
I 2.10 Standard Optical Systems 30
^< }>]F_ 2.10.1 Afocal Systems. The Telescope 30
](z?zDk 2.10.2 The Simple Magnifier 32
Bl
>)G X\l 2.10.3 The Microscope 34
h/AL `$ 3 Interference 37
v4YY6? 4 3.1 Introduction 37
bM9:h 3.2 General Description 37
z1WF@ Ej 3.3 Coherence 38
Z, ? T`[4B 3.4 Interference between two Plane Waves 41
RyJN=;5p 3.4.1 Laser Doppler Velocimetry (LDV) 45
s-z*Lq* 3.5 Interference between other Waves 46
7wm9S4+| 3.6 Interferometry 49
M<s Y_<z 3.6.1 Wavefront Division 50
Y X BU9T{r 3.6.2 Amplitude Division 51
Za&.sg3RG 3.6.3 The Dual-Frequency Michelson Interferometer 54
B F,rZZL 3.6.4 Heterodyne (Homodyne) Detection 55
+( *;F4> 3.7 Spatial and Temporal Coherence 56
v)TFpV6b{p 3.8 Optical Coherence Tomography 61
2u>
[[U1: 4 Diffraction 67
tSZd0G<A<o 4.1 Introduction 67
,%L>TD'48s 4.2 Diffraction from a Single Slit 67
, z*- 93H1 4.3 Diffraction from a Grating 70
z ]d^%>Ef 4.3.1 The Grating Equation. Amplitude Transmittance 70
@`hnp: 4.3.2 The Spatial Frequency Spectrum 73
`2j \(N, 4.4 Fourier Optics 75
X5M{No>z 4.5 Optical Filtering 76
pO;BX5(x 4.5.1 Practical Filtering Set-Ups 78
H/eyc` 4.6 Physical Optics Description
5 T,In+~Kd of Image Formation 81
HifU65"8 4.6.1 The Coherent Transfer Function 83
+&T;jad2 4.6.2 The Incoherent Transfer Function 85
N~w4|q!] 4.6.3 The Depth of Focus 88
B;r o(R 4.7 The Phase-Modulated Sinusoidal Grating 89
TC2gl[ 5 Light Sources and Detectors 99
SiM1Go}# 5.1 Introduction 99
=> PBdW 5.2 Radiometry. Photometry 99
xEA%UFB.!G 5.2.1 Lambertian Surface 102
fr YPC
Irj 5.2.2 Blackbody Radiator 103
mp{r$tc 5.2.3 Examples 105
|H,g}XWMU 5.3 Incoherent Light Sources 108
a zUEp8`| 5.4 Coherent Light Sources 109
=t+{ )d.w 5.4.1 Stimulated Emission 109
q$;'Fy%oy 5.4.2 Gas Lasers 112
_>/T<Db 5.4.3 Liquid Lasers 114
V?k"BU 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
/eoS $q 5.4.5 Solid-State Lasers 117
zW@OS Kq4 5.4.6 Other Lasers 119
CD]2a@j { .
d^&F%)AT .
e|L $e0 .
