Optical Metrology Third Edition ^VW
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v Kjell J. G˚asvik
7`vEe 'qz Spectra Vision AS, Trondheim, Norway
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gXT9 r' k +:=(#Y Preface to the Third Edition xi
m`#Od^vk 1Basics 1
|@?%Ct 1.1 Introduction 1
( m\$hX 1.2 Wave Motion. The Electromagnetic Spectrum 1
_iKq~\v2 1.3 The Plane Wave. Light Rays 3
6%`&+Lq 1.4 Phase Difference 4
\]Kh[z0" 1.5 Complex Notation. Complex Amplitude 5
2M<R(W!& 1.6 Oblique Incidence of A Plane Wave 5
-& 82$mj 1.7 The Spherical Wave 7
yNW\?Z$@q 1.8 The Intensity 8
,jA)w J 1.9 Geometrical Optics 8
M wb/jTp 1.10 The Simple Convex (Positive) Lens 10
0`.^MC? 1.11 A Plane-Wave Set-Up 11
bawJ$_O_ 2 Gaussian Optics 15
7 6tdJ!4Z 2.1 Introduction 15
!g~1&Uw1 2.2 Refraction at a Spherical Surface 15
O1%pxX'`S 2.2.1 Examples 19
nMDxH $O 2.3 The General Image-Forming System 19
&uP~rEJl+ 2.4 The Image-Formation Process 21
YzosZ! L!< 2.5 Reflection at a Spherical Surface 23
rn DCqv!'P 2.6 Aspheric Lenses 25
?oZR.D|SZ 2.7 Stops and Apertures 26
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Z U Kf`m[ 2.9 Imaging and The Lens Formula 29
U<XSj#&8| 2.10 Standard Optical Systems 30
_(J&aY\ 2.10.1 Afocal Systems. The Telescope 30
@3fn)YQ' 2.10.2 The Simple Magnifier 32
9[!,c`pw 2.10.3 The Microscope 34
_AV1WS;^^8 3 Interference 37
O/:UJ( e{ 3.1 Introduction 37
tH=P6vY 3.2 General Description 37
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8u[-'pV! 3.4 Interference between two Plane Waves 41
}:: S 0l 3.4.1 Laser Doppler Velocimetry (LDV) 45
"G >3QL+O| 3.5 Interference between other Waves 46
%0#1t 5g 3.6 Interferometry 49
F4=}}k U 3.6.1 Wavefront Division 50
d]9U^iy 3.6.2 Amplitude Division 51
jq'!UN{ 3.6.3 The Dual-Frequency Michelson Interferometer 54
sGvIX D 3.6.4 Heterodyne (Homodyne) Detection 55
Li* eGlId 3.7 Spatial and Temporal Coherence 56
Y|8v O 3.8 Optical Coherence Tomography 61
?!qY,9lhH 4 Diffraction 67
.xf<=ep 4.1 Introduction 67
b~dIk5>O 4.2 Diffraction from a Single Slit 67
dEBcfya 4.3 Diffraction from a Grating 70
A!1;}x 4.3.1 The Grating Equation. Amplitude Transmittance 70
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nRd) ++ 4.4 Fourier Optics 75
jY NrD"n 4.5 Optical Filtering 76
No2b " G@ 4.5.1 Practical Filtering Set-Ups 78
B^).BQ 4.6 Physical Optics Description
rD>*j~_+P of Image Formation 81
@FdSFQ/9 4.6.1 The Coherent Transfer Function 83
c 1X1+ b, 4.6.2 The Incoherent Transfer Function 85
JNcYJ[wqv 4.6.3 The Depth of Focus 88
d[rv1s>i 4.7 The Phase-Modulated Sinusoidal Grating 89
O25lLNmO 5 Light Sources and Detectors 99
vb9OonE2 5.1 Introduction 99
P%K4[c W~ 5.2 Radiometry. Photometry 99
Spt ? >sm 5.2.1 Lambertian Surface 102
q7u'_ R,; 5.2.2 Blackbody Radiator 103
SkU9ON 5.2.3 Examples 105
:qC '$dO! 5.3 Incoherent Light Sources 108
|b go;J/ 5.4 Coherent Light Sources 109
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B 5.4.1 Stimulated Emission 109
)O:0 ]=#)) 5.4.2 Gas Lasers 112
"RIZV 5.4.3 Liquid Lasers 114
phO;c;y} 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
tHLrhH< w 5.4.5 Solid-State Lasers 117
+iOKb c' 5.4.6 Other Lasers 119
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