Optical Metrology Third Edition 1!RD
kZwe CtwMMZXX3 Kjell J. G˚asvik
/i+8b(x Spectra Vision AS, Trondheim, Norway
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euHX7 ^'DrU<o Preface to the Third Edition xi
!*wK4UcX" 1Basics 1
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#(Ux 1.1 Introduction 1
[o)P 1.2 Wave Motion. The Electromagnetic Spectrum 1
/ey[cm2#[s 1.3 The Plane Wave. Light Rays 3
N1ZHaZ 1.4 Phase Difference 4
<,,U>0?3 1.5 Complex Notation. Complex Amplitude 5
P)~PrTa% 1.6 Oblique Incidence of A Plane Wave 5
2 @g'3M 1.7 The Spherical Wave 7
7~[1%` 1.8 The Intensity 8
B[^mWVp6L 1.9 Geometrical Optics 8
wU.K+4-k 1.10 The Simple Convex (Positive) Lens 10
STp}?Cb 1.11 A Plane-Wave Set-Up 11
fG O.wb 2 Gaussian Optics 15
2~+Iu+ 2.1 Introduction 15
k*\=IacX0 2.2 Refraction at a Spherical Surface 15
vB, X) 2.2.1 Examples 19
;p%a!Im_< 2.3 The General Image-Forming System 19
?\:ysTVu 2.4 The Image-Formation Process 21
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)HR 2.5 Reflection at a Spherical Surface 23
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1"9u\w 2.6 Aspheric Lenses 25
+x$;T*0 2.7 Stops and Apertures 26
Y3jb'S4( 2.8 Lens Aberrations. Computer Lens Design 28
F7^d@hSV 2.9 Imaging and The Lens Formula 29
Qh-k[w0 2.10 Standard Optical Systems 30
CqDMq ! 2.10.1 Afocal Systems. The Telescope 30
v"Bv\5f,Ys 2.10.2 The Simple Magnifier 32
H@er" boi 2.10.3 The Microscope 34
Y'kD_T`f, 3 Interference 37
aX6.XHWbDf 3.1 Introduction 37
_T^ip.o 3.2 General Description 37
^1U2&S 3.3 Coherence 38
u2'xM0nQ 3.4 Interference between two Plane Waves 41
r7sPFM 3.4.1 Laser Doppler Velocimetry (LDV) 45
Dm6WSp1|b 3.5 Interference between other Waves 46
X\\WQxj 3.6 Interferometry 49
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1 3.6.1 Wavefront Division 50
$(_Xt- 6 3.6.2 Amplitude Division 51
UT$G?D";M 3.6.3 The Dual-Frequency Michelson Interferometer 54
&O(z|-&| x 3.6.4 Heterodyne (Homodyne) Detection 55
:h1itn 3.7 Spatial and Temporal Coherence 56
GOHRBV 3.8 Optical Coherence Tomography 61
=x}27f%-Mg 4 Diffraction 67
>:5/V0;, 4.1 Introduction 67
G}mJtXT#= 4.2 Diffraction from a Single Slit 67
;ej;<7+ 4.3 Diffraction from a Grating 70
nn$,|/ 4.3.1 The Grating Equation. Amplitude Transmittance 70
;7&RmIXKh' 4.3.2 The Spatial Frequency Spectrum 73
v]gJ 7x 4.4 Fourier Optics 75
3+"z 4.5 Optical Filtering 76
5#+!|S[PK 4.5.1 Practical Filtering Set-Ups 78
j&)+qTV 4.6 Physical Optics Description
"y/GK1C of Image Formation 81
MT BN&4[ 4.6.1 The Coherent Transfer Function 83
UO8#8 4.6.2 The Incoherent Transfer Function 85
NMmk, 4.6.3 The Depth of Focus 88
dkJ+*L5 4.7 The Phase-Modulated Sinusoidal Grating 89
-uN5DJSW 5 Light Sources and Detectors 99
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;_E 5.1 Introduction 99
XX~~SvSM 5.2 Radiometry. Photometry 99
[2.uwn]i 5.2.1 Lambertian Surface 102
~:Dr]kt 5.2.2 Blackbody Radiator 103
U$6N-q 5.2.3 Examples 105
ZeF PwW 5.3 Incoherent Light Sources 108
l,HM m|oU 5.4 Coherent Light Sources 109
s$J0^8Q~i 5.4.1 Stimulated Emission 109
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5.4.2 Gas Lasers 112
Q&^ti)vB 5.4.3 Liquid Lasers 114
>f4H<V- 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
#/!a=0 5.4.5 Solid-State Lasers 117
` :Am#"j]} 5.4.6 Other Lasers 119
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