Optical Metrology Third Edition d3 fE[/oU 2EQ:mjxk Kjell J. G˚asvik
~Jp\' P7* Spectra Vision AS, Trondheim, Norway
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!@ai=p 31Zl"-<#- Preface to the Third Edition xi
'`/1?,= 1Basics 1
QIBv}hgcy 1.1 Introduction 1
7{."Y@ 1.2 Wave Motion. The Electromagnetic Spectrum 1
; =F^G?p^ 1.3 The Plane Wave. Light Rays 3
/LPSI^l!m 1.4 Phase Difference 4
]Ny. gu 1.5 Complex Notation. Complex Amplitude 5
"%qGcC8 1.6 Oblique Incidence of A Plane Wave 5
CuT[V?^iD 1.7 The Spherical Wave 7
3::DURkjf 1.8 The Intensity 8
)-2Or aUm< 1.9 Geometrical Optics 8
c 6E@+xU 1.10 The Simple Convex (Positive) Lens 10
g2 : ^Z== 1.11 A Plane-Wave Set-Up 11
mBQ6qmK 2 Gaussian Optics 15
1wE~dpnx 2.1 Introduction 15
Y]B2-wt- 2.2 Refraction at a Spherical Surface 15
_9\ ayR>d 2.2.1 Examples 19
QmbD%kW`3 2.3 The General Image-Forming System 19
S[X bb=n 2.4 The Image-Formation Process 21
~iEH?J%i1r 2.5 Reflection at a Spherical Surface 23
_2 }i8q: 2.6 Aspheric Lenses 25
.OXvv _?< 2.7 Stops and Apertures 26
C1)TEkc"C 2.8 Lens Aberrations. Computer Lens Design 28
A;Xn#t ,(K 2.9 Imaging and The Lens Formula 29
;gK+AU 2.10 Standard Optical Systems 30
,F6i5128{ 2.10.1 Afocal Systems. The Telescope 30
$N+a 4 2.10.2 The Simple Magnifier 32
LPO3B W 2.10.3 The Microscope 34
H.|FEV@ 3 Interference 37
wEQ V"I 3.1 Introduction 37
]*ZL>fuD| 3.2 General Description 37
B~caHG1b 3.3 Coherence 38
#^yw!~:{ 3.4 Interference between two Plane Waves 41
0) yvyQ5 3.4.1 Laser Doppler Velocimetry (LDV) 45
Ko>p whR} 3.5 Interference between other Waves 46
JV(|7Sk 3.6 Interferometry 49
hgfCM 3.6.1 Wavefront Division 50
5~aSkg,MD 3.6.2 Amplitude Division 51
\96?OC dr 3.6.3 The Dual-Frequency Michelson Interferometer 54
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65=8 3.6.4 Heterodyne (Homodyne) Detection 55
EAj2uV 3.7 Spatial and Temporal Coherence 56
`fY~Lv{4d_ 3.8 Optical Coherence Tomography 61
?`,Xb.NA$K 4 Diffraction 67
fC&Egy 4.1 Introduction 67
R l^ENrv!] 4.2 Diffraction from a Single Slit 67
eaYQyMv@ 4.3 Diffraction from a Grating 70
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r z+q 4.3.1 The Grating Equation. Amplitude Transmittance 70
.!l#z|/x 4.3.2 The Spatial Frequency Spectrum 73
Y>R|Uf.o z 4.4 Fourier Optics 75
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< 4.5 Optical Filtering 76
Z[ZqQ` 7N 4.5.1 Practical Filtering Set-Ups 78
Q.DtC 4.6 Physical Optics Description
%fJ*Ql4M of Image Formation 81
UfOF's_'< 4.6.1 The Coherent Transfer Function 83
H.'MQ 4.6.2 The Incoherent Transfer Function 85
4WzB=C(f 4.6.3 The Depth of Focus 88
) $#o v-] 4.7 The Phase-Modulated Sinusoidal Grating 89
Gv?'R0s 5 Light Sources and Detectors 99
s n}U4=u 5.1 Introduction 99
%kKe"$ )0 5.2 Radiometry. Photometry 99
q, PB; TT 5.2.1 Lambertian Surface 102
[^8*9?i4 5.2.2 Blackbody Radiator 103
m%qah>11 5.2.3 Examples 105
0 #VH=p ga 5.3 Incoherent Light Sources 108
:PY~Cws 5.4 Coherent Light Sources 109
_;G"{e.= 5.4.1 Stimulated Emission 109
<,`=m|z9k 5.4.2 Gas Lasers 112
h<$V ry} 5.4.3 Liquid Lasers 114
z X2BJ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
T&tC Xi 5.4.5 Solid-State Lasers 117
(SkI9[1\@3 5.4.6 Other Lasers 119
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