Optical Metrology Third Edition UwzE'#Q- cftn`:(&8 Kjell J. G˚asvik
FlM.D u Spectra Vision AS, Trondheim, Norway
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j/; @ P ;nHo%`Zt Preface to the Third Edition xi
X.W#=$;$: 1Basics 1
8*Nt&`@ 1.1 Introduction 1
{&Gk.ODI7 1.2 Wave Motion. The Electromagnetic Spectrum 1
! S$oaCxM 1.3 The Plane Wave. Light Rays 3
s}p GJ&C 1.4 Phase Difference 4
z.\[Va$@l 1.5 Complex Notation. Complex Amplitude 5
Z{|.xg sY 1.6 Oblique Incidence of A Plane Wave 5
K{7S 1.7 The Spherical Wave 7
Jh/M}%@| 1.8 The Intensity 8
Vtc)/OH 1.9 Geometrical Optics 8
cC (ubU R 1.10 The Simple Convex (Positive) Lens 10
Q?I"J $]&L 1.11 A Plane-Wave Set-Up 11
"|~B};|MFF 2 Gaussian Optics 15
U_=w L 2.1 Introduction 15
FcbA)7dD 2.2 Refraction at a Spherical Surface 15
~,3v<A[5Vi 2.2.1 Examples 19
cWy* K4O 2.3 The General Image-Forming System 19
%i
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PK|`}z9 2.5 Reflection at a Spherical Surface 23
PxCl]~v 2.6 Aspheric Lenses 25
3:CQMZ|;@ 2.7 Stops and Apertures 26
{/[?YTDU 2.8 Lens Aberrations. Computer Lens Design 28
#uDBF 2.9 Imaging and The Lens Formula 29
_<' kzOj 2.10 Standard Optical Systems 30
8-l)TTP&. 2.10.1 Afocal Systems. The Telescope 30
Wcay'#K, 2.10.2 The Simple Magnifier 32
QP-<$P;~ 2.10.3 The Microscope 34
{D_ 4~heF 3 Interference 37
e&]`X HC9 3.1 Introduction 37
b~jvmcr 3.2 General Description 37
C">=2OO 3.3 Coherence 38
/Vj byRwV 3.4 Interference between two Plane Waves 41
m6ZbYF-7W 3.4.1 Laser Doppler Velocimetry (LDV) 45
Fl A$ G3 3.5 Interference between other Waves 46
e7j]BzGvl 3.6 Interferometry 49
1Qc(<gM 3.6.1 Wavefront Division 50
_bV=G#qKK 3.6.2 Amplitude Division 51
E'kQ 3.6.3 The Dual-Frequency Michelson Interferometer 54
u=UM^C! 3.6.4 Heterodyne (Homodyne) Detection 55
7=ga_2 3.7 Spatial and Temporal Coherence 56
Q`wA"mw6k 3.8 Optical Coherence Tomography 61
{II7%\ya 4 Diffraction 67
'[d dE!ta 4.1 Introduction 67
SO jDtZ 4.2 Diffraction from a Single Slit 67
A#07Ly8kXn 4.3 Diffraction from a Grating 70
-gX2{d W 4.3.1 The Grating Equation. Amplitude Transmittance 70
!NY^(^ 4.3.2 The Spatial Frequency Spectrum 73
PQI,vr'R 4.4 Fourier Optics 75
Q*J ~wuE2 4.5 Optical Filtering 76
?lw[ 4.5.1 Practical Filtering Set-Ups 78
'C? f"P:X{ 4.6 Physical Optics Description
$@f3=NJ4k of Image Formation 81
d/99!+r 4.6.1 The Coherent Transfer Function 83
p<nBS" / 4.6.2 The Incoherent Transfer Function 85
m$ UT4,Ol 4.6.3 The Depth of Focus 88
v'~nABYH 4.7 The Phase-Modulated Sinusoidal Grating 89
8`*9jr 5 Light Sources and Detectors 99
0tL/:zID 5.1 Introduction 99
Vv"wf;# 5.2 Radiometry. Photometry 99
QNI|h;D 5.2.1 Lambertian Surface 102
^~IcQ!j/5 5.2.2 Blackbody Radiator 103
s^X/
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q^+NhAMz 5.3 Incoherent Light Sources 108
u~T$F/]k> 5.4 Coherent Light Sources 109
OcS`Fxs 5.4.1 Stimulated Emission 109
fvAV[9/- 5.4.2 Gas Lasers 112
\ A UtGP 5.4.3 Liquid Lasers 114
w`!foP E 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
S^"e5n2 5.4.5 Solid-State Lasers 117
uV:uXQni`` 5.4.6 Other Lasers 119
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