Optical Metrology Third Edition "ZA$"^ 9 AQ96 Kjell J. G˚asvik
~#HH;q_7m Spectra Vision AS, Trondheim, Norway
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doxdRYKL T:w2 Preface to the Third Edition xi
Fy4 < 1Basics 1
[[/ }1% 1.1 Introduction 1
w /Bn2bD 1.2 Wave Motion. The Electromagnetic Spectrum 1
2|T|K?R^ 1.3 The Plane Wave. Light Rays 3
_rWM] 1.4 Phase Difference 4
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-{+}U 1.5 Complex Notation. Complex Amplitude 5
l`~a}y "n 1.6 Oblique Incidence of A Plane Wave 5
I>YtWY|ed 1.7 The Spherical Wave 7
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! 1.8 The Intensity 8
fY)4]= L 1.9 Geometrical Optics 8
-@gJqoo> 1.10 The Simple Convex (Positive) Lens 10
EyKkjEXx_ 1.11 A Plane-Wave Set-Up 11
V8 KTNt% 2 Gaussian Optics 15
P!)7\.7 2.1 Introduction 15
,Do$`yO+ 2.2 Refraction at a Spherical Surface 15
:uU]rBMo 2.2.1 Examples 19
Kd ryl 2.3 The General Image-Forming System 19
1{\,5U& 2.4 The Image-Formation Process 21
P0`>{!r6@ 2.5 Reflection at a Spherical Surface 23
ec SdU> 2.6 Aspheric Lenses 25
Hz!U_? 2.7 Stops and Apertures 26
>tXufzW 2.8 Lens Aberrations. Computer Lens Design 28
I;Z`!u:+ 2.9 Imaging and The Lens Formula 29
[+:mt</HN 2.10 Standard Optical Systems 30
do?S,'(g 2.10.1 Afocal Systems. The Telescope 30
*1 ID`o 2.10.2 The Simple Magnifier 32
[#,X$O> 2.10.3 The Microscope 34
Gct&}]3p m 3 Interference 37
\U<F\i 3.1 Introduction 37
@2%VU#!m 3.2 General Description 37
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ki*79d"$ 3.4 Interference between two Plane Waves 41
f/IRO33 3.4.1 Laser Doppler Velocimetry (LDV) 45
L8?Z!0D/h 3.5 Interference between other Waves 46
,,wyydG 3.6 Interferometry 49
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3.6.1 Wavefront Division 50
9m#H24{V' 3.6.2 Amplitude Division 51
69<rsp(p 3.6.3 The Dual-Frequency Michelson Interferometer 54
+*:x#$phx 3.6.4 Heterodyne (Homodyne) Detection 55
NBbY## w0 3.7 Spatial and Temporal Coherence 56
$Kw"5cm 3.8 Optical Coherence Tomography 61
XCqfAcNQ 4 Diffraction 67
+n8I(l= 4.1 Introduction 67
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l;][Q]Z@V 4.3 Diffraction from a Grating 70
"z(fBnv 4.3.1 The Grating Equation. Amplitude Transmittance 70
<5!RAdaj+ 4.3.2 The Spatial Frequency Spectrum 73
v#<+n{B 4.4 Fourier Optics 75
i-"h"nF" 4.5 Optical Filtering 76
YiI:uG!|D 4.5.1 Practical Filtering Set-Ups 78
*`pec3" 4.6 Physical Optics Description
EDa08+Y of Image Formation 81
K9z_=c+ 4.6.1 The Coherent Transfer Function 83
Ie`SWg*WL 4.6.2 The Incoherent Transfer Function 85
%;B(_ht<-w 4.6.3 The Depth of Focus 88
WKYA9BaR 4.7 The Phase-Modulated Sinusoidal Grating 89
fXXm@tMx> 5 Light Sources and Detectors 99
J G+g88 5.1 Introduction 99
< +i`W7 5.2 Radiometry. Photometry 99
^&G O4u 5.2.1 Lambertian Surface 102
$Zu4tuXA 5.2.2 Blackbody Radiator 103
b#\ k Z/W 5.2.3 Examples 105
ETH#IM8J 5.3 Incoherent Light Sources 108
B"E (Y M 5.4 Coherent Light Sources 109
Jk6/i;4| 5.4.1 Stimulated Emission 109
>`,#%MH# 5.4.2 Gas Lasers 112
HNHhMi`w 5.4.3 Liquid Lasers 114
1rm$@L 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
enD C# 5.4.5 Solid-State Lasers 117
UgP=k ){ 5.4.6 Other Lasers 119
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