Optical Metrology Third Edition \vuWypo GKG:iR) Kjell J. G˚asvik
OJ.oHf=K! Spectra Vision AS, Trondheim, Norway
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wp@6RJ jV<5GWq Preface to the Third Edition xi
P H?<)Wj9i 1Basics 1
^}<]sjmk 1.1 Introduction 1
g9IIC5 1.2 Wave Motion. The Electromagnetic Spectrum 1
q35=_'\ W 1.3 The Plane Wave. Light Rays 3
$-\%%n0>6 1.4 Phase Difference 4
|:`)sx3@# 1.5 Complex Notation. Complex Amplitude 5
ciW;sK8 1.6 Oblique Incidence of A Plane Wave 5
Qh]k)]+*| 1.7 The Spherical Wave 7
7}(YCZny5 1.8 The Intensity 8
'G`xD3 E3, 1.9 Geometrical Optics 8
Q_*.1L 1.10 The Simple Convex (Positive) Lens 10
_Ecs{'k 1.11 A Plane-Wave Set-Up 11
_6]tbni?v 2 Gaussian Optics 15
ZR8y9mx2" 2.1 Introduction 15
]UZP dw1D 2.2 Refraction at a Spherical Surface 15
f+Fzpd?w S 2.2.1 Examples 19
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2.3 The General Image-Forming System 19
'yh)6mid 2.4 The Image-Formation Process 21
IcNZUZGE 2.5 Reflection at a Spherical Surface 23
F'ez{ B\AX 2.6 Aspheric Lenses 25
q^L"@Q5; 2.7 Stops and Apertures 26
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l 2.8 Lens Aberrations. Computer Lens Design 28
khQ fLA 2.9 Imaging and The Lens Formula 29
q~{O^,4S 2.10 Standard Optical Systems 30
WI SK-z 2.10.1 Afocal Systems. The Telescope 30
JYLAu4s6 2.10.2 The Simple Magnifier 32
Tq8U5#NF 2.10.3 The Microscope 34
&0+Ba[Z ^ 3 Interference 37
)H&ZHaO,_ 3.1 Introduction 37
T6\d ] 3.2 General Description 37
semTAoqH 3.3 Coherence 38
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j3[kG# 3.4.1 Laser Doppler Velocimetry (LDV) 45
WGUd@lC~ 3.5 Interference between other Waves 46
s2#}@b6'. 3.6 Interferometry 49
eXkpU7w; 3.6.1 Wavefront Division 50
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3.6.2 Amplitude Division 51
#6#%y~N 3.6.3 The Dual-Frequency Michelson Interferometer 54
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) 1 <GSr9 3.7 Spatial and Temporal Coherence 56
'"6*C*XS 3.8 Optical Coherence Tomography 61
}#n d &ND 4 Diffraction 67
e_Fo NT 4.1 Introduction 67
mlz|KI~\F; 4.2 Diffraction from a Single Slit 67
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jTC+0u 4.3.1 The Grating Equation. Amplitude Transmittance 70
WHRBYq_ 4.3.2 The Spatial Frequency Spectrum 73
>Hd!o"I 4.4 Fourier Optics 75
~6[3Km|2 4.5 Optical Filtering 76
]zI*}(adu 4.5.1 Practical Filtering Set-Ups 78
}'uV{$ 4.6 Physical Optics Description
V} h)e3X of Image Formation 81
l_ LH!Tu 4.6.1 The Coherent Transfer Function 83
6dRvx;d 4.6.2 The Incoherent Transfer Function 85
p<B*)1Tj0 4.6.3 The Depth of Focus 88
- R`nitf 4.7 The Phase-Modulated Sinusoidal Grating 89
d\t A1&k71 5 Light Sources and Detectors 99
Uu|R]azbO 5.1 Introduction 99
/^`d o3a } 5.2 Radiometry. Photometry 99
W Qe Q`pM 5.2.1 Lambertian Surface 102
PE6ZzxR|U< 5.2.2 Blackbody Radiator 103
8(H!iKHe 5.2.3 Examples 105
Qn/ 6gRL j 5.3 Incoherent Light Sources 108
BD M"";u 5.4 Coherent Light Sources 109
gbu)bqu2x 5.4.1 Stimulated Emission 109
cq$ _$jRx 5.4.2 Gas Lasers 112
Yr>7c1FZi 5.4.3 Liquid Lasers 114
IkQ,#Bsb[ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
O/oLQoH 5.4.5 Solid-State Lasers 117
+rKV*XX@ 5.4.6 Other Lasers 119
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