Optical Metrology Third Edition r(;sX m2 0:{fld Kjell J. G˚asvik
c5x2FM z Spectra Vision AS, Trondheim, Norway
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$VOSd<87 |[apLQ6 Preface to the Third Edition xi
\$GM4:R D 1Basics 1
bBwQ1,c$ 1.1 Introduction 1
coa+@g,w7# 1.2 Wave Motion. The Electromagnetic Spectrum 1
YJdM6 1.3 The Plane Wave. Light Rays 3
1t&LNIc|^ 1.4 Phase Difference 4
oasp/Y.p 1.5 Complex Notation. Complex Amplitude 5
1vKAJ<4W 1.6 Oblique Incidence of A Plane Wave 5
m'{gO9V 1.7 The Spherical Wave 7
qWz%sT?C3L 1.8 The Intensity 8
>&pB&'A a 1.9 Geometrical Optics 8
&QHZ]2%U 1.10 The Simple Convex (Positive) Lens 10
D d['e 1.11 A Plane-Wave Set-Up 11
1dDK(RBbQ 2 Gaussian Optics 15
^n Gj 7b 2.1 Introduction 15
SI_u0j4%* 2.2 Refraction at a Spherical Surface 15
og0su 2.2.1 Examples 19
Nfv.v1Tt+ 2.3 The General Image-Forming System 19
u!4i+7} 2.4 The Image-Formation Process 21
yN-o?[o 2.5 Reflection at a Spherical Surface 23
N_jpCCG~ 2.6 Aspheric Lenses 25
P){b"`f 2.7 Stops and Apertures 26
D,R"P }G 2.8 Lens Aberrations. Computer Lens Design 28
l9Xz,H 2.9 Imaging and The Lens Formula 29
1jHugss9| 2.10 Standard Optical Systems 30
{`RCh]W 2.10.1 Afocal Systems. The Telescope 30
2bIP.M2Fs 2.10.2 The Simple Magnifier 32
'PO+P~|oa& 2.10.3 The Microscope 34
a -[:RJW 3 Interference 37
95cIdF 6m 3.1 Introduction 37
eKpWFP0 3.2 General Description 37
wE*o1. 3.3 Coherence 38
'xK ,|U 3.4 Interference between two Plane Waves 41
''p7!V? 3.4.1 Laser Doppler Velocimetry (LDV) 45
{>EM=ZZfg 3.5 Interference between other Waves 46
K/T4T\ 3.6 Interferometry 49
JWB3;,S 3.6.1 Wavefront Division 50
-_`dA^ 3.6.2 Amplitude Division 51
p. %lE!v 3.6.3 The Dual-Frequency Michelson Interferometer 54
@%"+;D 3.6.4 Heterodyne (Homodyne) Detection 55
Al93x 3.7 Spatial and Temporal Coherence 56
mFk6a{+YX 3.8 Optical Coherence Tomography 61
b=87k 4 Diffraction 67
G~.bi<(v 4.1 Introduction 67
:t)<$dtf[ 4.2 Diffraction from a Single Slit 67
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KU;d[Z@g 4.3.1 The Grating Equation. Amplitude Transmittance 70
+HAd=DU 4.3.2 The Spatial Frequency Spectrum 73
OYYk[r 4.4 Fourier Optics 75
Ca]V%g( 4.5 Optical Filtering 76
7Be\^% 4.5.1 Practical Filtering Set-Ups 78
A#;TY:D2 4.6 Physical Optics Description
aG*Mj;J of Image Formation 81
e&k=fV 4.6.1 The Coherent Transfer Function 83
rl__3q 4.6.2 The Incoherent Transfer Function 85
s[dq-pc" 4.6.3 The Depth of Focus 88
A?zxF5rfp 4.7 The Phase-Modulated Sinusoidal Grating 89
<>l! 5 Light Sources and Detectors 99
=w,cdU* 5.1 Introduction 99
W)LtnD2 w 5.2 Radiometry. Photometry 99
sUe<21: 5.2.1 Lambertian Surface 102
W{!Slf 5.2.2 Blackbody Radiator 103
zZE@:P&lf 5.2.3 Examples 105
wJ>.I<F6B 5.3 Incoherent Light Sources 108
GZx?vSoHh 5.4 Coherent Light Sources 109
KlbUs\E 5.4.1 Stimulated Emission 109
35}]U= 5.4.2 Gas Lasers 112
yt5'2!jc 5.4.3 Liquid Lasers 114
L"x9O'U 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
M/x*d4b_ 5.4.5 Solid-State Lasers 117
]"X} FU 5.4.6 Other Lasers 119
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