Optical Metrology Third Edition Wmxw! \BaN5+ B6 Kjell J. G˚asvik
"!6~*!]c Spectra Vision AS, Trondheim, Norway
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9 ~'Ip7X,! | / =p Preface to the Third Edition xi
Y~hd<8 ~ 1Basics 1
)^S^s >3 1.1 Introduction 1
RK:sQWG 1.2 Wave Motion. The Electromagnetic Spectrum 1
X1[R*a/p 1.3 The Plane Wave. Light Rays 3
ioa_AG6B 1.4 Phase Difference 4
@-@rG>y^: 1.5 Complex Notation. Complex Amplitude 5
w^E] N 1.6 Oblique Incidence of A Plane Wave 5
PB<Sc>{U 1.7 The Spherical Wave 7
I+?$4SC 1.8 The Intensity 8
W#7-%o T 1.9 Geometrical Optics 8
-sH.yAvC6 1.10 The Simple Convex (Positive) Lens 10
OGi4m | 1.11 A Plane-Wave Set-Up 11
ae#HA[\0 G 2 Gaussian Optics 15
B
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'a/6]%QFd! 2.2 Refraction at a Spherical Surface 15
G%8)6m'3 2.2.1 Examples 19
RyQ\5^z 2.3 The General Image-Forming System 19
o p5^9`" 2.4 The Image-Formation Process 21
`(Q_ 65y 2.5 Reflection at a Spherical Surface 23
\]#;!6ge 2.6 Aspheric Lenses 25
C\ 2 >7 2.7 Stops and Apertures 26
m *bKy;'8 2.8 Lens Aberrations. Computer Lens Design 28
N T9- j#V 2.9 Imaging and The Lens Formula 29
_E<O+leWf 2.10 Standard Optical Systems 30
dms:i)L2 2.10.1 Afocal Systems. The Telescope 30
Wl RZ|. 2.10.2 The Simple Magnifier 32
VBsFT2XiL 2.10.3 The Microscope 34
l^y?L 4hg) 3 Interference 37
)tI2 ?YIR 3.1 Introduction 37
-KJ! 3.2 General Description 37
grfd vN 3.3 Coherence 38
9 Bvn>+_K 3.4 Interference between two Plane Waves 41
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q,,>:]f# 3.5 Interference between other Waves 46
- Zoo) 3.6 Interferometry 49
Hs`#{W{. 3.6.1 Wavefront Division 50
I1 R\Ts@ 3.6.2 Amplitude Division 51
yH"$t/cU"R 3.6.3 The Dual-Frequency Michelson Interferometer 54
IJBJebqL 3.6.4 Heterodyne (Homodyne) Detection 55
sa gBmA~ 3.7 Spatial and Temporal Coherence 56
$h]Y<&('G 3.8 Optical Coherence Tomography 61
C|~JPcl 4 Diffraction 67
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#b"5L2D`y' 4.2 Diffraction from a Single Slit 67
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"G-0i KW; 4.3.2 The Spatial Frequency Spectrum 73
v z #wP 4.4 Fourier Optics 75
v!{'23`87 4.5 Optical Filtering 76
Vq)gpR 4.5.1 Practical Filtering Set-Ups 78
T.w}6? 2 4.6 Physical Optics Description
E
^SM` of Image Formation 81
K0DXOVT\ 4.6.1 The Coherent Transfer Function 83
;]oXEq` 4.6.2 The Incoherent Transfer Function 85
HHIUl,P 4.6.3 The Depth of Focus 88
o
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3VRZM@i 5 Light Sources and Detectors 99
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5.1 Introduction 99
WP@JrnxO\` 5.2 Radiometry. Photometry 99
D_19sN@0m 5.2.1 Lambertian Surface 102
.M53, 8X 5.2.2 Blackbody Radiator 103
6aF'^6+a 5.2.3 Examples 105
?4,*RCa I 5.3 Incoherent Light Sources 108
6|9g4@Hy 5.4 Coherent Light Sources 109
X v7U<q 5.4.1 Stimulated Emission 109
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$ kD`$L@U 5.4.3 Liquid Lasers 114
WP% {{zR$ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
),y!<\oQ 5.4.5 Solid-State Lasers 117
XC/]u%n8]( 5.4.6 Other Lasers 119
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