Optical Metrology Third Edition CBC0X}_` yLfb'Ba Kjell J. G˚asvik
9F8"( Spectra Vision AS, Trondheim, Norway
JGH;&UYP 
zcC X;N \( 9hg.E Preface to the Third Edition xi
B4k ~~ ;| 1Basics 1
`usX(snY 1.1 Introduction 1
s{v!jZ 1.2 Wave Motion. The Electromagnetic Spectrum 1
2CX'J8Sy 1.3 The Plane Wave. Light Rays 3
=n_r \z 1.4 Phase Difference 4
>5Vv6_CI0? 1.5 Complex Notation. Complex Amplitude 5
BLzl XhHn 1.6 Oblique Incidence of A Plane Wave 5
.
IBy' 1.7 The Spherical Wave 7
@y,pf Wh` 1.8 The Intensity 8
$ZSjq 1.9 Geometrical Optics 8
Q[t|+RNKv2 1.10 The Simple Convex (Positive) Lens 10
>3R)&N 1.11 A Plane-Wave Set-Up 11
5[Sa7Mk 2 Gaussian Optics 15
u~Zx9>f 2.1 Introduction 15
/]~Oa#SQ: 2.2 Refraction at a Spherical Surface 15
{ETuaFDM 2.2.1 Examples 19
?[#nh@mI 2.3 The General Image-Forming System 19
> sW9n [ 2.4 The Image-Formation Process 21
w0n.Y-v4i 2.5 Reflection at a Spherical Surface 23
;c1ar )G7 2.6 Aspheric Lenses 25
Bi7QY i/ 2.7 Stops and Apertures 26
zTODV<-` 2.8 Lens Aberrations. Computer Lens Design 28
\{W} 2.9 Imaging and The Lens Formula 29
o+e:H jZZ 2.10 Standard Optical Systems 30
x9U F 2.10.1 Afocal Systems. The Telescope 30
3 ZO\ P u 2.10.2 The Simple Magnifier 32
F91'5D,u0 2.10.3 The Microscope 34
Wr.G9zq.+ 3 Interference 37
eH.~c3o 3.1 Introduction 37
L;d(|7BV v 3.2 General Description 37
Ke0 j8| 3.3 Coherence 38
|tl4I2AV 3.4 Interference between two Plane Waves 41
H+ UA 3.4.1 Laser Doppler Velocimetry (LDV) 45
dtHB@\1 3.5 Interference between other Waves 46
~(W q 5<v 3.6 Interferometry 49
kk6Af\N Z 3.6.1 Wavefront Division 50
(~ 6oA f 3.6.2 Amplitude Division 51
8 KH|:>s= 3.6.3 The Dual-Frequency Michelson Interferometer 54
|KF_h ^ 3.6.4 Heterodyne (Homodyne) Detection 55
Fk01j;k.H 3.7 Spatial and Temporal Coherence 56
@L Qe[` 3.8 Optical Coherence Tomography 61
i,5mH$a&u: 4 Diffraction 67
V\U,PNkZQ 4.1 Introduction 67
.wj?}Fr?97 4.2 Diffraction from a Single Slit 67
^Ec);Z 4.3 Diffraction from a Grating 70
6M({T2e 4.3.1 The Grating Equation. Amplitude Transmittance 70
p%;n4* b2 4.3.2 The Spatial Frequency Spectrum 73
b^WTX 4.4 Fourier Optics 75
`_`\jd@ 4.5 Optical Filtering 76
mUFg(;ya 4.5.1 Practical Filtering Set-Ups 78
<Lz/J-w 4.6 Physical Optics Description
3aL8GMiu of Image Formation 81
IGKF&s*;{[ 4.6.1 The Coherent Transfer Function 83
*}mk$bA 4.6.2 The Incoherent Transfer Function 85
=1qM`M 4.6.3 The Depth of Focus 88
)YSS>V 4.7 The Phase-Modulated Sinusoidal Grating 89
@)"= b!q= 5 Light Sources and Detectors 99
;JQ:S~K9 5.1 Introduction 99
tGq0f"}'J 5.2 Radiometry. Photometry 99
OAGI|`E$/- 5.2.1 Lambertian Surface 102
X@:[.eI~ 5.2.2 Blackbody Radiator 103
z"[}Sk 5.2.3 Examples 105
jIpc^iu`, 5.3 Incoherent Light Sources 108
Yz6+
x] 5.4 Coherent Light Sources 109
g9N_s,3jC 5.4.1 Stimulated Emission 109
a!iG;:K
5.4.2 Gas Lasers 112
Qf HJZ7K.4 5.4.3 Liquid Lasers 114
y2nwDw( xF 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
a#Yo^"* 1 5.4.5 Solid-State Lasers 117
Jat|n97$ 5.4.6 Other Lasers 119
'J A<q-Gn .
M$@Do nx .
Sz z:$!t .
