Optical Metrology Third Edition ^o,@9GT s cB -XmX/ Kjell J. G˚asvik
7acAU{Rr Spectra Vision AS, Trondheim, Norway
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? ~_% I JG/sKOlA Preface to the Third Edition xi
?[XH`c, 1Basics 1
k9}im 1.1 Introduction 1
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( 1.2 Wave Motion. The Electromagnetic Spectrum 1
"<!|am( 1.3 The Plane Wave. Light Rays 3
:+E>Uz T 1.4 Phase Difference 4
T+sO(; 1.5 Complex Notation. Complex Amplitude 5
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1.6 Oblique Incidence of A Plane Wave 5
j1/J9F' 1.7 The Spherical Wave 7
:&_@U $ 1.8 The Intensity 8
CZ]+B8Pl(x 1.9 Geometrical Optics 8
|2n2 1.10 The Simple Convex (Positive) Lens 10
uO"@YX/ 1.11 A Plane-Wave Set-Up 11
Nkv2?o>l 2 Gaussian Optics 15
nHZ 4):` 2.1 Introduction 15
{jk {K6 } 2.2 Refraction at a Spherical Surface 15
dZnq 96<:| 2.2.1 Examples 19
0CTI=<; 2.3 The General Image-Forming System 19
l8^^ O 2.4 The Image-Formation Process 21
YjHGdacs 2.5 Reflection at a Spherical Surface 23
.Ta$@sP h} 2.6 Aspheric Lenses 25
zlSwKd ( 2.7 Stops and Apertures 26
]&}?J:+?0E 2.8 Lens Aberrations. Computer Lens Design 28
(%I`EAR 2.9 Imaging and The Lens Formula 29
g1&GX(4[ 2.10 Standard Optical Systems 30
\;P Bx & 2.10.1 Afocal Systems. The Telescope 30
apw8wL2 2.10.2 The Simple Magnifier 32
k)S7SbQ 2.10.3 The Microscope 34
ss,6;wfX 3 Interference 37
r/{0Y Fa 3.1 Introduction 37
v{%2`_c 3.2 General Description 37
Q%t8cJ L 3.3 Coherence 38
hKX-]+6 " 3.4 Interference between two Plane Waves 41
/j S 3.4.1 Laser Doppler Velocimetry (LDV) 45
c&'T By 3.5 Interference between other Waves 46
. 5ingB3% 3.6 Interferometry 49
:UScbPG 3.6.1 Wavefront Division 50
9KAXc(- 3.6.2 Amplitude Division 51
bZtjg 3.6.3 The Dual-Frequency Michelson Interferometer 54
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11 3.6.4 Heterodyne (Homodyne) Detection 55
0|4XV{\qT$ 3.7 Spatial and Temporal Coherence 56
I}?fy\1A& 3.8 Optical Coherence Tomography 61
B&. XGo) 4 Diffraction 67
cT.1oaAM0 4.1 Introduction 67
-.z~u /uL 4.2 Diffraction from a Single Slit 67
yq;gBIiZ 4.3 Diffraction from a Grating 70
0eUsvzz 15 4.3.1 The Grating Equation. Amplitude Transmittance 70
;PLby]=O 4.3.2 The Spatial Frequency Spectrum 73
n*_FC 4.4 Fourier Optics 75
~~yo& ] 4.5 Optical Filtering 76
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p 4.5.1 Practical Filtering Set-Ups 78
!FO||z(vb 4.6 Physical Optics Description
F;MFw2G of Image Formation 81
JsiJ=zo< 4.6.1 The Coherent Transfer Function 83
?rr%uXQjH 4.6.2 The Incoherent Transfer Function 85
m\j p$ 4.6.3 The Depth of Focus 88
F!SmCE(0x 4.7 The Phase-Modulated Sinusoidal Grating 89
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@T 5 Light Sources and Detectors 99
u FECf h 5.1 Introduction 99
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ONd 5.2 Radiometry. Photometry 99
e OLS 5.2.1 Lambertian Surface 102
}0f[x ?V 5.2.2 Blackbody Radiator 103
&|gn%<^ 5.2.3 Examples 105
wAy;ZNu 5.3 Incoherent Light Sources 108
/4=O^; 5.4 Coherent Light Sources 109
Zkxt>%20~ 5.4.1 Stimulated Emission 109
nP_ s+k 5.4.2 Gas Lasers 112
iyj&O" 5.4.3 Liquid Lasers 114
.s, hl(w, 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
.! =g 5.4.5 Solid-State Lasers 117
mtJI#P 5.4.6 Other Lasers 119
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