Optical Metrology Third Edition q<M2,YrbAI >7 ="8 Kjell J. G˚asvik
&v@a5 L Spectra Vision AS, Trondheim, Norway
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u A< n DMO Mh#[ Preface to the Third Edition xi
m;,N)<~ 1Basics 1
`EaLGzw 1.1 Introduction 1
w(L4A0K[ 1.2 Wave Motion. The Electromagnetic Spectrum 1
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1.3 The Plane Wave. Light Rays 3
')cMiX\v 1.4 Phase Difference 4
;0Tx-8l 1.5 Complex Notation. Complex Amplitude 5
HAa; hb 1.6 Oblique Incidence of A Plane Wave 5
A6thXs2 1.7 The Spherical Wave 7
c24dSNJg, 1.8 The Intensity 8
\2h!aRWR 1.9 Geometrical Optics 8
x<ZJb 1.10 The Simple Convex (Positive) Lens 10
DW[N|-L 1.11 A Plane-Wave Set-Up 11
#"G]ke1l $ 2 Gaussian Optics 15
p^w;kN 2.1 Introduction 15
' d9INz. 2.2 Refraction at a Spherical Surface 15
X9V *UXTc 2.2.1 Examples 19
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HMNLa*CL' 2.4 The Image-Formation Process 21
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bFO7C 2.5 Reflection at a Spherical Surface 23
Iy&!<r7:]0 2.6 Aspheric Lenses 25
fumm<:<CLO 2.7 Stops and Apertures 26
JxM]9<a=4 2.8 Lens Aberrations. Computer Lens Design 28
?82x dp g 2.9 Imaging and The Lens Formula 29
"~|6tQLc 2.10 Standard Optical Systems 30
|IzPgC 2.10.1 Afocal Systems. The Telescope 30
rD 3v$B 2.10.2 The Simple Magnifier 32
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R\!2l |_ 3 Interference 37
W:pIPDx1=! 3.1 Introduction 37
#cI{Fe0h 3.2 General Description 37
, s"^kFl 3.3 Coherence 38
_ 9F9W{' 3.4 Interference between two Plane Waves 41
vg32y /l]S 3.4.1 Laser Doppler Velocimetry (LDV) 45
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3.5 Interference between other Waves 46
rX2 .i7i, 3.6 Interferometry 49
W')Yg5T 3.6.1 Wavefront Division 50
n-tgX?1' 3.6.2 Amplitude Division 51
Jdj2~pTq 3.6.3 The Dual-Frequency Michelson Interferometer 54
Pd_U7&w,5 3.6.4 Heterodyne (Homodyne) Detection 55
L 0TFo_ 3.7 Spatial and Temporal Coherence 56
iv J@=pd)B 3.8 Optical Coherence Tomography 61
SE1=>S%p 4 Diffraction 67
qm/22:&v5 4.1 Introduction 67
<h0?tv] 4.2 Diffraction from a Single Slit 67
| ATvS2 4.3 Diffraction from a Grating 70
EM(gmWHij 4.3.1 The Grating Equation. Amplitude Transmittance 70
YJT&{jYi 4.3.2 The Spatial Frequency Spectrum 73
\@c, 3 4.4 Fourier Optics 75
2K/4 Rf0; 4.5 Optical Filtering 76
M P Y[X[ 4.5.1 Practical Filtering Set-Ups 78
m[~y@7AK< 4.6 Physical Optics Description
UGV+/zxIM of Image Formation 81
2*laAB 4.6.1 The Coherent Transfer Function 83
kTOzSiq 4.6.2 The Incoherent Transfer Function 85
a%JuC2 4.6.3 The Depth of Focus 88
KQ% GIz x 4.7 The Phase-Modulated Sinusoidal Grating 89
?BeiY zg 5 Light Sources and Detectors 99
Z>k#n'm^z 5.1 Introduction 99
?N *>*" 5.2 Radiometry. Photometry 99
Y!w`YYKP 5.2.1 Lambertian Surface 102
"jKY1* ? 5.2.2 Blackbody Radiator 103
/NI;P]s. 5.2.3 Examples 105
l<58A7 5.3 Incoherent Light Sources 108
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5.4 Coherent Light Sources 109
FrGgga$ 5.4.1 Stimulated Emission 109
B u~]ey1 5.4.2 Gas Lasers 112
2lH& 5.4.3 Liquid Lasers 114
k<CJ{u0< 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
gwuI-d^ 5.4.5 Solid-State Lasers 117
_Xe>V0 5.4.6 Other Lasers 119
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