Optical Metrology Third Edition Klfg:q:j+b rD=8O#m
g Kjell J. G˚asvik
+v.uP [H Spectra Vision AS, Trondheim, Norway
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CXt9 5O? Qt` hUyL Preface to the Third Edition xi
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1Basics 1
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V;" 1.1 Introduction 1
su;u_rc, 1.2 Wave Motion. The Electromagnetic Spectrum 1
!v/5G_pr 1.3 The Plane Wave. Light Rays 3
8G$ %DZ $ 1.4 Phase Difference 4
\7rAQ[\#V 1.5 Complex Notation. Complex Amplitude 5
8:=&=9% 1.6 Oblique Incidence of A Plane Wave 5
m>yb}+ 1.7 The Spherical Wave 7
<T]%Gg8 1.8 The Intensity 8
Uytq,3Gj6 1.9 Geometrical Optics 8
_M'WTe 1.10 The Simple Convex (Positive) Lens 10
kQ~2mU 1.11 A Plane-Wave Set-Up 11
?;84 M@ 2 Gaussian Optics 15
1o"/5T:S[ 2.1 Introduction 15
ql"&E{u? 2.2 Refraction at a Spherical Surface 15
Zoe>Ow8mE` 2.2.1 Examples 19
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PdiP5S }/ 2.4 The Image-Formation Process 21
pde,@0(Fa 2.5 Reflection at a Spherical Surface 23
\f| Hk*@ 2.6 Aspheric Lenses 25
U%%fKL=S 2.7 Stops and Apertures 26
wM.z/r\p 2.8 Lens Aberrations. Computer Lens Design 28
]xGo[:k|E 2.9 Imaging and The Lens Formula 29
/`(Kbwh 2.10 Standard Optical Systems 30
.*XELP=BT 2.10.1 Afocal Systems. The Telescope 30
EWOS6Yg7 2.10.2 The Simple Magnifier 32
@1+C* 2.10.3 The Microscope 34
;R[ xo! 3 Interference 37
3#GZ6:rVJ 3.1 Introduction 37
e7e6b-"_2 3.2 General Description 37
5)h#NkA\J 3.3 Coherence 38
m$N`Xj 3.4 Interference between two Plane Waves 41
WM y97*L< 3.4.1 Laser Doppler Velocimetry (LDV) 45
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[5[}2B_t 3.6 Interferometry 49
xPBSJhla 3.6.1 Wavefront Division 50
Bmx+QO 3.6.2 Amplitude Division 51
h>Z NPP8N 3.6.3 The Dual-Frequency Michelson Interferometer 54
$ti*I;)h4 3.6.4 Heterodyne (Homodyne) Detection 55
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L1J \C 3.8 Optical Coherence Tomography 61
5cc;8i 4 Diffraction 67
Pjz_KO/ 4.1 Introduction 67
D5]AL5=Xt2 4.2 Diffraction from a Single Slit 67
tW<i;2 l 4.3 Diffraction from a Grating 70
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UI:YzR 4.3.2 The Spatial Frequency Spectrum 73
`O~NT'Ed8 4.4 Fourier Optics 75
M:t!g% 4.5 Optical Filtering 76
8CXZ7 p 4.5.1 Practical Filtering Set-Ups 78
<//82j+px 4.6 Physical Optics Description
H~Z$ pk% of Image Formation 81
y{&k`H 4.6.1 The Coherent Transfer Function 83
4%! #=JCl 4.6.2 The Incoherent Transfer Function 85
Zl,c+/ 4.6.3 The Depth of Focus 88
:LE0_ . 4.7 The Phase-Modulated Sinusoidal Grating 89
Q?"o.T'; 5 Light Sources and Detectors 99
)"( ojh 5.1 Introduction 99
|gXtP- 5.2 Radiometry. Photometry 99
E`E$ }iLs 5.2.1 Lambertian Surface 102
$}&r.=J". 5.2.2 Blackbody Radiator 103
(CUrFZT$ 5.2.3 Examples 105
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R$>]7-N} 5.4 Coherent Light Sources 109
* SAYli+@ 5.4.1 Stimulated Emission 109
PK&3nXF%4 5.4.2 Gas Lasers 112
2T3TD% 5.4.3 Liquid Lasers 114
Lj]I7ICNh 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
OGl>i 5.4.5 Solid-State Lasers 117
rw CFt6;v 5.4.6 Other Lasers 119
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