Optical Metrology Third Edition B>&eciY \dag~b< Kjell J. G˚asvik
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/y"Y o g Zr/Dfy Preface to the Third Edition xi
~|~j0 1# 1Basics 1
[o Q&}3\XJ 1.1 Introduction 1
jHx<}< 1.2 Wave Motion. The Electromagnetic Spectrum 1
W}5 H'D 1.3 The Plane Wave. Light Rays 3
qm)KO 4 1.4 Phase Difference 4
sR. ecs+ 1.5 Complex Notation. Complex Amplitude 5
zz4A,XrD 1.6 Oblique Incidence of A Plane Wave 5
ep<2u
x 1.7 The Spherical Wave 7
afMIq Q? 1.8 The Intensity 8
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%Fh 1.9 Geometrical Optics 8
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u> 1.10 The Simple Convex (Positive) Lens 10
n'#(iW)f 1.11 A Plane-Wave Set-Up 11
9)qjW &` 2 Gaussian Optics 15
\k|ZbCWg 2.1 Introduction 15
e1RtoNF ^ 2.2 Refraction at a Spherical Surface 15
$v6dB {%Qu 2.2.1 Examples 19
Z<#beT6 2.3 The General Image-Forming System 19
q#RVi8(' 2.4 The Image-Formation Process 21
{-]/ r 2.5 Reflection at a Spherical Surface 23
\8!&X cA 2.6 Aspheric Lenses 25
),-4\!7 2.7 Stops and Apertures 26
D n?P~% 2.8 Lens Aberrations. Computer Lens Design 28
RkJ\? 2.9 Imaging and The Lens Formula 29
I/s?] v 2.10 Standard Optical Systems 30
F62 arDA 2.10.1 Afocal Systems. The Telescope 30
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i}LWcD 2.10.2 The Simple Magnifier 32
X3:-+]6,d 2.10.3 The Microscope 34
1lNg} !)[K 3 Interference 37
U RW'*\Xjb 3.1 Introduction 37
OZ q/ '* 3.2 General Description 37
g'`J' 6Pn 3.3 Coherence 38
LTY@}o]\U 3.4 Interference between two Plane Waves 41
Iy](?b 3.4.1 Laser Doppler Velocimetry (LDV) 45
:!1B6Mc 3.5 Interference between other Waves 46
3X{=* wvt 3.6 Interferometry 49
zy #E qv 3.6.1 Wavefront Division 50
G2k r~FG 3.6.2 Amplitude Division 51
9b !+kJD 3.6.3 The Dual-Frequency Michelson Interferometer 54
A]{8 = 3.6.4 Heterodyne (Homodyne) Detection 55
nFlj`k<]Y 3.7 Spatial and Temporal Coherence 56
I@ch 5vl4 3.8 Optical Coherence Tomography 61
@Ns^?#u~ 4 Diffraction 67
x]k^JPX 4.1 Introduction 67
P,O9On 4.2 Diffraction from a Single Slit 67
Uc }L/ax 4.3 Diffraction from a Grating 70
&,fBg6A% 4.3.1 The Grating Equation. Amplitude Transmittance 70
~"5WQK`@ 4.3.2 The Spatial Frequency Spectrum 73
`ge{KB;*n# 4.4 Fourier Optics 75
-{ZTp8 P> 4.5 Optical Filtering 76
WW;S 4.5.1 Practical Filtering Set-Ups 78
Ah &D5,3 4.6 Physical Optics Description
6yF 4%Sz9 of Image Formation 81
7fl'nCo\" 4.6.1 The Coherent Transfer Function 83
@)m+O#a 4.6.2 The Incoherent Transfer Function 85
-)?~5Z 4.6.3 The Depth of Focus 88
^G# =>&, 4.7 The Phase-Modulated Sinusoidal Grating 89
;P _`4w3 5 Light Sources and Detectors 99
q01zN:|-1 5.1 Introduction 99
;2}0Hr'| 5.2 Radiometry. Photometry 99
+iwNM+K/gQ 5.2.1 Lambertian Surface 102
1` m ~c 5.2.2 Blackbody Radiator 103
`2NL'O: 5.2.3 Examples 105
`ivr$b# 5.3 Incoherent Light Sources 108
Uz H)fB 5.4 Coherent Light Sources 109
0pu])[P]_[ 5.4.1 Stimulated Emission 109
/,= wP) 5.4.2 Gas Lasers 112
T{|'<KT 5.4.3 Liquid Lasers 114
S]1+tj 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
x-Z`^O 5.4.5 Solid-State Lasers 117
9GkG' 5.4.6 Other Lasers 119
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