Optical Metrology Third Edition 5RLK]= [q.W!l4E Kjell J. G˚asvik
X_!mZ\H7 Spectra Vision AS, Trondheim, Norway
VDnAQ[T@d 
V$v;lvt^Uq =D[h0U Preface to the Third Edition xi
}4
$EN 1Basics 1
RTl7vzG 1.1 Introduction 1
M3z7P.\G 1.2 Wave Motion. The Electromagnetic Spectrum 1
0_] aF8j 1.3 The Plane Wave. Light Rays 3
P;_dil G 1.4 Phase Difference 4
Ne9
.wd 1.5 Complex Notation. Complex Amplitude 5
df J7Dhn 1.6 Oblique Incidence of A Plane Wave 5
^d=Z/d[ 1.7 The Spherical Wave 7
S'@"a%EV 1.8 The Intensity 8
Y#t"..mc' 1.9 Geometrical Optics 8
>8AtT=}w 1.10 The Simple Convex (Positive) Lens 10
Cz a)s 1.11 A Plane-Wave Set-Up 11
y mE`V 2 Gaussian Optics 15
Ck ^= H 2.1 Introduction 15
wUV%N ZB 2.2 Refraction at a Spherical Surface 15
X r)d;@yi 2.2.1 Examples 19
`GDYL7pM( 2.3 The General Image-Forming System 19
?=4 t~\g? 2.4 The Image-Formation Process 21
?,8b-U#A1 2.5 Reflection at a Spherical Surface 23
x< 3vA|o 2.6 Aspheric Lenses 25
l|up3A3) 2.7 Stops and Apertures 26
h" >X!I 2.8 Lens Aberrations. Computer Lens Design 28
O0{v`|w9+ 2.9 Imaging and The Lens Formula 29
&GZR-/ 2.10 Standard Optical Systems 30
9E#(i P 2.10.1 Afocal Systems. The Telescope 30
QV 'y6m\ 2.10.2 The Simple Magnifier 32
. /g#< 2.10.3 The Microscope 34
hBqu,A 3 Interference 37
y ( z U:. 3.1 Introduction 37
:|A db\b 3.2 General Description 37
O0l; Qi 3.3 Coherence 38
Qv= Z 3.4 Interference between two Plane Waves 41
h/VYH(Tj 3.4.1 Laser Doppler Velocimetry (LDV) 45
j,-7J*A~ 3.5 Interference between other Waves 46
e/3hb) #; 3.6 Interferometry 49
hWu)0t 3.6.1 Wavefront Division 50
:)yM9^<D 3.6.2 Amplitude Division 51
#P@r[VZ{6 3.6.3 The Dual-Frequency Michelson Interferometer 54
7U7 i2 4 3.6.4 Heterodyne (Homodyne) Detection 55
E4.IS =4S 3.7 Spatial and Temporal Coherence 56
[eN{Ft0x 3.8 Optical Coherence Tomography 61
`->k7a0<b1 4 Diffraction 67
yLX#:
nm 4.1 Introduction 67
Yt'o#"R) 4.2 Diffraction from a Single Slit 67
!{XO#e 4.3 Diffraction from a Grating 70
x M[#Ah) 4.3.1 The Grating Equation. Amplitude Transmittance 70
.0Z vCv:> 4.3.2 The Spatial Frequency Spectrum 73
e+WVN5"ID> 4.4 Fourier Optics 75
< KA@A} 4.5 Optical Filtering 76
]>,|v,i
= 4.5.1 Practical Filtering Set-Ups 78
KAzRFX), 4.6 Physical Optics Description
ZSSgc0u^? of Image Formation 81
R}Y=!qjYE= 4.6.1 The Coherent Transfer Function 83
;v'Y' !-J 4.6.2 The Incoherent Transfer Function 85
~e8n yB 4.6.3 The Depth of Focus 88
fpi6pcof 4.7 The Phase-Modulated Sinusoidal Grating 89
*~L]n4- 5 Light Sources and Detectors 99
Oe!&Jma*> 5.1 Introduction 99
/{va< CL 5.2 Radiometry. Photometry 99
[)pT{QA 5.2.1 Lambertian Surface 102
Uf<vw3 5.2.2 Blackbody Radiator 103
AVWrD[ wD2 5.2.3 Examples 105
\nWpV7TSN 5.3 Incoherent Light Sources 108
>KFJ1}b|3 5.4 Coherent Light Sources 109
Z#O3s:` 5.4.1 Stimulated Emission 109
ZB% ~> 5.4.2 Gas Lasers 112
.#J3 UZ 5.4.3 Liquid Lasers 114
k
N +( 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
1aG}-:$t' 5.4.5 Solid-State Lasers 117
BxU1Q& 5.4.6 Other Lasers 119
Z(eSnV_RL .
-`UlntEdZ: .
6f!mk:\T. .
