Optical Metrology Third Edition 2_X0Og8s[ J]B5w{??b Kjell J. G˚asvik
q3`t0eLZ Spectra Vision AS, Trondheim, Norway
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? Q}{&J y{JkY\g Preface to the Third Edition xi
BYU.ptiJJ 1Basics 1
N{g=Pf?I} 1.1 Introduction 1
zn|}YovY+ 1.2 Wave Motion. The Electromagnetic Spectrum 1
n4johV.# 1.3 The Plane Wave. Light Rays 3
qa6~N3* 1.4 Phase Difference 4
<!^Z|E 1.5 Complex Notation. Complex Amplitude 5
{wI0 =U 1.6 Oblique Incidence of A Plane Wave 5
n} { cs 1.7 The Spherical Wave 7
l1WVt} 1.8 The Intensity 8
{'!~j !1'j 1.9 Geometrical Optics 8
v<1;1m 1.10 The Simple Convex (Positive) Lens 10
p~IvkW>ln) 1.11 A Plane-Wave Set-Up 11
^ a:F*<D 2 Gaussian Optics 15
qv\yQ&pj 2.1 Introduction 15
`2B+8,{% 2.2 Refraction at a Spherical Surface 15
*Y Ox`z!R 2.2.1 Examples 19
whCv9)x 2.3 The General Image-Forming System 19
v0=~PN~E 2.4 The Image-Formation Process 21
1 <+^$QL 2.5 Reflection at a Spherical Surface 23
vaL-Mi( _ 2.6 Aspheric Lenses 25
7~'@m(9e 2.7 Stops and Apertures 26
DxHeZQ"LL 2.8 Lens Aberrations. Computer Lens Design 28
{Hu0 2.9 Imaging and The Lens Formula 29
jLTs1`I/F 2.10 Standard Optical Systems 30
u2QJDLMJv 2.10.1 Afocal Systems. The Telescope 30
8@-US , | 2.10.2 The Simple Magnifier 32
uypD`%pC 2.10.3 The Microscope 34
wal }[F# 3 Interference 37
^-ZqS 3.1 Introduction 37
/hQ!dU.+ 3.2 General Description 37
<vs.Ucxx 3.3 Coherence 38
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[ z\*Zg 3.4.1 Laser Doppler Velocimetry (LDV) 45
1a<~Rmcil 3.5 Interference between other Waves 46
^d,d<Uc 3.6 Interferometry 49
J3=jC5=J4 3.6.1 Wavefront Division 50
w]_a0{Uh 3.6.2 Amplitude Division 51
?= /l@ d 3.6.3 The Dual-Frequency Michelson Interferometer 54
%:lQ ~yn 3.6.4 Heterodyne (Homodyne) Detection 55
Sc&_6} K 3.7 Spatial and Temporal Coherence 56
\T0`GpE 3.8 Optical Coherence Tomography 61
'PZJ{8= 4 Diffraction 67
tBrVg<]t 4.1 Introduction 67
5zU$_ M 4.2 Diffraction from a Single Slit 67
@y +Wl*: 4.3 Diffraction from a Grating 70
<3HJkcYGz 4.3.1 The Grating Equation. Amplitude Transmittance 70
6o!"$IH4 4.3.2 The Spatial Frequency Spectrum 73
8QU`SoS9 4.4 Fourier Optics 75
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4.5 Optical Filtering 76
c}A^ 0,"z> 4.5.1 Practical Filtering Set-Ups 78
b> | oU 4.6 Physical Optics Description
9 wc=B(a| of Image Formation 81
&PbH!]yd 4.6.1 The Coherent Transfer Function 83
\ gd d 4.6.2 The Incoherent Transfer Function 85
Z\x 6 4.6.3 The Depth of Focus 88
/=%4gWtr 4.7 The Phase-Modulated Sinusoidal Grating 89
Nbr{)h 5 Light Sources and Detectors 99
?G@%haqn6 5.1 Introduction 99
n}2} 4^ 5.2 Radiometry. Photometry 99
ZP1EO Z 5.2.1 Lambertian Surface 102
. @.CQB=E 5.2.2 Blackbody Radiator 103
k:f Rk<C 5.2.3 Examples 105
/Mv'fich( 5.3 Incoherent Light Sources 108
F)C8 LH 5.4 Coherent Light Sources 109
fI6F};I5}T 5.4.1 Stimulated Emission 109
so;aN'{6@ 5.4.2 Gas Lasers 112
DGcd|>q 5.4.3 Liquid Lasers 114
[X|P(&\hQd 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
2l9_$evK~ 5.4.5 Solid-State Lasers 117
gbvBgOp 5.4.6 Other Lasers 119
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