Optical Metrology Third Edition m7M *)N8 R1P ,0 Yf Kjell J. G˚asvik
(5yg\3Jvp Spectra Vision AS, Trondheim, Norway
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k ,<L#?,a (Mtc&+n{ Preface to the Third Edition xi
~Zj?%4 1Basics 1
-CL7^ 1.1 Introduction 1
d9Q%GG0] 1.2 Wave Motion. The Electromagnetic Spectrum 1
5lU`o 1.3 The Plane Wave. Light Rays 3
6eS#L2 1* 1.4 Phase Difference 4
B1LnuB% 1.5 Complex Notation. Complex Amplitude 5
qbP[ 9 1.6 Oblique Incidence of A Plane Wave 5
hlUF9} 1.7 The Spherical Wave 7
,%KB\;1mn' 1.8 The Intensity 8
'|]zBpz 1.9 Geometrical Optics 8
%djx0sy 1.10 The Simple Convex (Positive) Lens 10
H<NYm#a" 1.11 A Plane-Wave Set-Up 11
3}h&/KN{ 2 Gaussian Optics 15
_&dG o( B 2.1 Introduction 15
Zb9@U: \ 2.2 Refraction at a Spherical Surface 15
5T 2.2.1 Examples 19
dUe"qH29s 2.3 The General Image-Forming System 19
5m Fi)0={y 2.4 The Image-Formation Process 21
5X`.2q=d 2.5 Reflection at a Spherical Surface 23
D6ck1pxkx 2.6 Aspheric Lenses 25
zM@iG]?kc 2.7 Stops and Apertures 26
=} vG| 2.8 Lens Aberrations. Computer Lens Design 28
4uu*&B 2.9 Imaging and The Lens Formula 29
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hG
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Cog:6Gnw 2.10.2 The Simple Magnifier 32
T.(SBP 2.10.3 The Microscope 34
Jhj]rsGk 3 Interference 37
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3.2 General Description 37
94a _ W9 3.3 Coherence 38
ZDVaKDqZ_ 3.4 Interference between two Plane Waves 41
`nizGg~1 3.4.1 Laser Doppler Velocimetry (LDV) 45
SU#|&_wtr! 3.5 Interference between other Waves 46
Br yMq ! 3.6 Interferometry 49
?&X6VNbU 3.6.1 Wavefront Division 50
V!Joh5=a 3.6.2 Amplitude Division 51
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yqBu7E$X 3.6.4 Heterodyne (Homodyne) Detection 55
k,@1rOf 3.7 Spatial and Temporal Coherence 56
de`6%%| 3.8 Optical Coherence Tomography 61
[2FXs52 4 Diffraction 67
k[ zf` x^ 4.1 Introduction 67
'8Gw{&& 4.2 Diffraction from a Single Slit 67
3; M!]9ms 4.3 Diffraction from a Grating 70
t*<c+Ixu 4.3.1 The Grating Equation. Amplitude Transmittance 70
XG [%oL 4.3.2 The Spatial Frequency Spectrum 73
1/fvk 4.4 Fourier Optics 75
S3=J1R, 4.5 Optical Filtering 76
e1IuobT 4.5.1 Practical Filtering Set-Ups 78
<y'ttxe S 4.6 Physical Optics Description
!PQRlgcG of Image Formation 81
$"UAJ - 4.6.1 The Coherent Transfer Function 83
;{ezK8FJ}@ 4.6.2 The Incoherent Transfer Function 85
>N3{* W 4.6.3 The Depth of Focus 88
9 rid98~d 4.7 The Phase-Modulated Sinusoidal Grating 89
WkO . 5 Light Sources and Detectors 99
\ agC Q& 5.1 Introduction 99
cbteNA!> 5.2 Radiometry. Photometry 99
s =d?}.E$ 5.2.1 Lambertian Surface 102
pE`( kD 5.2.2 Blackbody Radiator 103
C4G)anT 5.2.3 Examples 105
xz%ig^L 5.3 Incoherent Light Sources 108
~ ACB #D% 5.4 Coherent Light Sources 109
zH_q6 @ 4 5.4.1 Stimulated Emission 109
ECSC,o J 5.4.2 Gas Lasers 112
h\dIp`H 5.4.3 Liquid Lasers 114
@V-ZV 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
fSP~~YSeU 5.4.5 Solid-State Lasers 117
mrbIoN==` 5.4.6 Other Lasers 119
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