Optical Metrology Third Edition x '=3&vc4 N)vk0IM! Kjell J. G˚asvik
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; Oi[:Ck Preface to the Third Edition xi
[yYH>~SuwZ 1Basics 1
C`yvBt40 r 1.1 Introduction 1
_[$T29:8\] 1.2 Wave Motion. The Electromagnetic Spectrum 1
c9*1$~(v0I 1.3 The Plane Wave. Light Rays 3
]8xc?*i8 1.4 Phase Difference 4
6=G~6Qu 1.5 Complex Notation. Complex Amplitude 5
, N @Yk. 1.6 Oblique Incidence of A Plane Wave 5
~|r'2V* 1.7 The Spherical Wave 7
]< s\V-y 1.8 The Intensity 8
uXG`6|? 1.9 Geometrical Optics 8
9k=U0]!ch 1.10 The Simple Convex (Positive) Lens 10
FU yB"-< 1.11 A Plane-Wave Set-Up 11
_4.]A 3;} 2 Gaussian Optics 15
w'oo-.k 2.1 Introduction 15
$S6HZG:N 2.2 Refraction at a Spherical Surface 15
o [bE 2.2.1 Examples 19
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n*vTVt)dJ 2.4 The Image-Formation Process 21
~|y^\U@ 2.5 Reflection at a Spherical Surface 23
tb:,Uf>E 2.6 Aspheric Lenses 25
7xv4E<r2 2.7 Stops and Apertures 26
5|<yfk8*J 2.8 Lens Aberrations. Computer Lens Design 28
~7lTqY\ 2.9 Imaging and The Lens Formula 29
?Do^stq'4 2.10 Standard Optical Systems 30
hzT{3YtY2 2.10.1 Afocal Systems. The Telescope 30
,67" C2Y 2.10.2 The Simple Magnifier 32
(~j,mk 2.10.3 The Microscope 34
mQd4#LJ_ 3 Interference 37
]>R`;"( 3.1 Introduction 37
aN^]bs?R 3.2 General Description 37
*#&k+{a^2 3.3 Coherence 38
qj~flw1: 3.4 Interference between two Plane Waves 41
<*s"e)XeqF 3.4.1 Laser Doppler Velocimetry (LDV) 45
YG0Px Zmi 3.5 Interference between other Waves 46
_ztZ> ' 3.6 Interferometry 49
g>2aIun_Q 3.6.1 Wavefront Division 50
di6B!YQP 3.6.2 Amplitude Division 51
[>W"R1/ 3.6.3 The Dual-Frequency Michelson Interferometer 54
lLb:f6N 3.6.4 Heterodyne (Homodyne) Detection 55
~7dM!g{W 3.7 Spatial and Temporal Coherence 56
?QCmSK=L 3.8 Optical Coherence Tomography 61
A6Ghj{~ 4 Diffraction 67
o& (wg(Rv 4.1 Introduction 67
YBb)/ZghY 4.2 Diffraction from a Single Slit 67
z$J X'(<Z7 4.3 Diffraction from a Grating 70
wP[xmO-% 4.3.1 The Grating Equation. Amplitude Transmittance 70
:83,[;GO2 4.3.2 The Spatial Frequency Spectrum 73
2 \^G['9 4.4 Fourier Optics 75
c |>=S)| 4.5 Optical Filtering 76
di~]HUZh) 4.5.1 Practical Filtering Set-Ups 78
K)\(wxv 4.6 Physical Optics Description
e]lJqC of Image Formation 81
|u@+`4o 4.6.1 The Coherent Transfer Function 83
nz4<pvC,* 4.6.2 The Incoherent Transfer Function 85
"(s6aqO$ 4.6.3 The Depth of Focus 88
1HMUHZT 4.7 The Phase-Modulated Sinusoidal Grating 89
;{|X,;s 5 Light Sources and Detectors 99
;Vg^!]LL# 5.1 Introduction 99
t )YUPDQ@J 5.2 Radiometry. Photometry 99
rh@r\ H@j 5.2.1 Lambertian Surface 102
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Vc lr)}5 5.2.3 Examples 105
~12_D'8D[ 5.3 Incoherent Light Sources 108
S_J,[#& 5.4 Coherent Light Sources 109
t/ }L36@+ 5.4.1 Stimulated Emission 109
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5.4.2 Gas Lasers 112
>lr hHU 5.4.3 Liquid Lasers 114
{m[s<A( 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
<OTWT`G2 5.4.5 Solid-State Lasers 117
(a[.vw^g 5.4.6 Other Lasers 119
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