Optical Metrology Third Edition Z
zp"CK 5 |Ox='.oIb Kjell J. G˚asvik
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Z Spectra Vision AS, Trondheim, Norway
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]9@ XpE847!soL Preface to the Third Edition xi
fn5-Tnsq* 1Basics 1
N]|>\ 1.1 Introduction 1
gVR]z9 1.2 Wave Motion. The Electromagnetic Spectrum 1
9^8OIv?m8 1.3 The Plane Wave. Light Rays 3
[2Nux0g 1.4 Phase Difference 4
eMFxdtH 1.5 Complex Notation. Complex Amplitude 5
o59$vX, 1.6 Oblique Incidence of A Plane Wave 5
Vq{3:QBR 1.7 The Spherical Wave 7
"&4r!2A 1.8 The Intensity 8
|Nj6RB7 1.9 Geometrical Optics 8
Za3}:7`Gu 1.10 The Simple Convex (Positive) Lens 10
{]dtA&8( 1.11 A Plane-Wave Set-Up 11
^i!6z2/ 2 Gaussian Optics 15
DC-d@N+ 2.1 Introduction 15
|rZMcl/ 2.2 Refraction at a Spherical Surface 15
$YcB=l 2.2.1 Examples 19
Dat',5 2.3 The General Image-Forming System 19
fHH 2.4 The Image-Formation Process 21
?7LvJ8 2.5 Reflection at a Spherical Surface 23
bGgpPV 2.6 Aspheric Lenses 25
{$yju _[ 2.7 Stops and Apertures 26
73Jm 2.8 Lens Aberrations. Computer Lens Design 28
m}=E$zPbO 2.9 Imaging and The Lens Formula 29
pb)8?1O|s 2.10 Standard Optical Systems 30
$$&.}}., 2.10.1 Afocal Systems. The Telescope 30
.#|?-5q/iN 2.10.2 The Simple Magnifier 32
hdrsa}{g 2.10.3 The Microscope 34
3)\fZYu) 3 Interference 37
5h6o} 3.1 Introduction 37
pxd=a!( 3.2 General Description 37
@&WHX# 3.3 Coherence 38
q=BljSX 3.4 Interference between two Plane Waves 41
Uza '%R 3.4.1 Laser Doppler Velocimetry (LDV) 45
JDE_*xaUV 3.5 Interference between other Waves 46
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f6`GU$H 3.6.1 Wavefront Division 50
_J W|3q 3.6.2 Amplitude Division 51
=huV(THU 3.6.3 The Dual-Frequency Michelson Interferometer 54
S\&3t}_ 3.6.4 Heterodyne (Homodyne) Detection 55
!#O[RS 3.7 Spatial and Temporal Coherence 56
~:bdS 4w 3.8 Optical Coherence Tomography 61
Ws@'2i\; 4 Diffraction 67
L8PX SJ 4.1 Introduction 67
K=v:qY4Z 4.2 Diffraction from a Single Slit 67
<dH@e 4.3 Diffraction from a Grating 70
Wa<<"x$ 4.3.1 The Grating Equation. Amplitude Transmittance 70
j"69uj` R 4.3.2 The Spatial Frequency Spectrum 73
\BXzmok 4.4 Fourier Optics 75
CG=c@-"n/ 4.5 Optical Filtering 76
FHSoj= 4.5.1 Practical Filtering Set-Ups 78
gtA34iw 4.6 Physical Optics Description
!EB<N<P"t of Image Formation 81
$El-pMq 4.6.1 The Coherent Transfer Function 83
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"[|b,fxR 4.6.3 The Depth of Focus 88
x [FLV8`b| 4.7 The Phase-Modulated Sinusoidal Grating 89
[fa4 5 Light Sources and Detectors 99
Vi8A4 5.1 Introduction 99
EE!}$qOR 5.2 Radiometry. Photometry 99
+JU, ^A#X 5.2.1 Lambertian Surface 102
G-Tmk7m 5.2.2 Blackbody Radiator 103
e /JQ #A 5.2.3 Examples 105
Mn.,?IF`K 5.3 Incoherent Light Sources 108
~-BF7f6C 5.4 Coherent Light Sources 109
a[O6xA% 5.4.1 Stimulated Emission 109
neDXzMxF 5.4.2 Gas Lasers 112
(8JU!lin 5.4.3 Liquid Lasers 114
F3qK6Ah. 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
I9*cEZ!l=e 5.4.5 Solid-State Lasers 117
hi0HEm\ 5.4.6 Other Lasers 119
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