Optical Metrology Third Edition dm" x?[2: #k/T\PQ0s Kjell J. G˚asvik
J*K=tA Spectra Vision AS, Trondheim, Norway
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XySk m2 y ( bsywM Preface to the Third Edition xi
GMZ6 dK 1Basics 1
1Hhr6T^) 1.1 Introduction 1
)(.g~Q: 1.2 Wave Motion. The Electromagnetic Spectrum 1
+8 "8s 1.3 The Plane Wave. Light Rays 3
cGo_qR/B(> 1.4 Phase Difference 4
P()n=&XO6 1.5 Complex Notation. Complex Amplitude 5
.P T7 1.6 Oblique Incidence of A Plane Wave 5
?Qd`Vlp7 1.7 The Spherical Wave 7
7Q'u>o 1.8 The Intensity 8
3&E@#I^] , 1.9 Geometrical Optics 8
*C|*{ ! 1.10 The Simple Convex (Positive) Lens 10
0n4( Rj|}2 1.11 A Plane-Wave Set-Up 11
R$IsP,Uw 2 Gaussian Optics 15
;B2&#kot7 2.1 Introduction 15
gkTwGI+w 2.2 Refraction at a Spherical Surface 15
r$M<vo6C 2.2.1 Examples 19
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2.3 The General Image-Forming System 19
ldU ><xc2 2.4 The Image-Formation Process 21
1x/ R 2.5 Reflection at a Spherical Surface 23
c*axw%Us 2.6 Aspheric Lenses 25
q~iEw#0-L 2.7 Stops and Apertures 26
$z)egh(z 2.8 Lens Aberrations. Computer Lens Design 28
3qu?qD 2.9 Imaging and The Lens Formula 29
GU1cMe 2.10 Standard Optical Systems 30
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fe. 2.10.1 Afocal Systems. The Telescope 30
dR>$vbjh1Z 2.10.2 The Simple Magnifier 32
U4Y)Jk 2.10.3 The Microscope 34
X-bM`7'H 3 Interference 37
<WmjjD 3.1 Introduction 37
bx6=LK 3.2 General Description 37
e{4e<hd 3.3 Coherence 38
1PWi~1q{Q 3.4 Interference between two Plane Waves 41
(}T},ygQ 3.4.1 Laser Doppler Velocimetry (LDV) 45
#@V<{/;49 3.5 Interference between other Waves 46
DuAix)#FN9 3.6 Interferometry 49
I_?R(V[9 3.6.1 Wavefront Division 50
#jxPh! %9 3.6.2 Amplitude Division 51
P A *U\ 3.6.3 The Dual-Frequency Michelson Interferometer 54
)FA:wsy~E 3.6.4 Heterodyne (Homodyne) Detection 55
4 u0?[v[Hu 3.7 Spatial and Temporal Coherence 56
3*7 klu 3.8 Optical Coherence Tomography 61
8In~qf 4 Diffraction 67
@kT@IQkri 4.1 Introduction 67
Xa "I 4.2 Diffraction from a Single Slit 67
k $ SMQ6 4.3 Diffraction from a Grating 70
GqP02P'2 4.3.1 The Grating Equation. Amplitude Transmittance 70
y'oH>l+n 4.3.2 The Spatial Frequency Spectrum 73
+#UawYLJ 4.4 Fourier Optics 75
?hp,h3s;n$ 4.5 Optical Filtering 76
cj2^wmkB 4.5.1 Practical Filtering Set-Ups 78
1B 0[dK2N 4.6 Physical Optics Description
=kOo( of Image Formation 81
zrE{CdG%y 4.6.1 The Coherent Transfer Function 83
!iX/Ni: 4.6.2 The Incoherent Transfer Function 85
hSps9*y 4.6.3 The Depth of Focus 88
6I _ 4 { 4.7 The Phase-Modulated Sinusoidal Grating 89
D#Mz#\4o 5 Light Sources and Detectors 99
g CL}Ba 5.1 Introduction 99
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.UN?Ak*R 5.2.1 Lambertian Surface 102
ofYZ! -V 5.2.2 Blackbody Radiator 103
'c/8|9jX 5.2.3 Examples 105
X*Q<REDB 5.3 Incoherent Light Sources 108
l F7". 5.4 Coherent Light Sources 109
1Z(9<M1!M 5.4.1 Stimulated Emission 109
j39"iAn 5.4.2 Gas Lasers 112
Az?^4 1r8 5.4.3 Liquid Lasers 114
@,G\` ;Ma 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
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|VA 5.4.5 Solid-State Lasers 117
jQfnc:' 5.4.6 Other Lasers 119
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