Optical Metrology Third Edition b!^M}s6 \Sq"3_m4T Kjell J. G˚asvik
74}eF)(me Spectra Vision AS, Trondheim, Norway
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D207 Preface to the Third Edition xi
\\2k}TsB 1Basics 1
=UB*xm%! 1.1 Introduction 1
Oj4u!SY\j 1.2 Wave Motion. The Electromagnetic Spectrum 1
7i+!^Qj?y 1.3 The Plane Wave. Light Rays 3
DQ n`@ 1.4 Phase Difference 4
rKy-u 1.5 Complex Notation. Complex Amplitude 5
b5n]Gp 1.6 Oblique Incidence of A Plane Wave 5
68J 9T^84 1.7 The Spherical Wave 7
35%[DUkb 1.8 The Intensity 8
x#:BE 1.9 Geometrical Optics 8
z*dQIC 1.10 The Simple Convex (Positive) Lens 10
{#w A!>. 1.11 A Plane-Wave Set-Up 11
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2 Gaussian Optics 15
;Oi[:Ck 2.1 Introduction 15
[yYH>~SuwZ 2.2 Refraction at a Spherical Surface 15
C`yvBt40r 2.2.1 Examples 19
_[$T29:8\] 2.3 The General Image-Forming System 19
c9*1$~(v0I 2.4 The Image-Formation Process 21
4[LLnF-- 2.5 Reflection at a Spherical Surface 23
!Ig|m+ 2.6 Aspheric Lenses 25
fd5ZaE#f 2.7 Stops and Apertures 26
:~ZqB\>i 2.8 Lens Aberrations. Computer Lens Design 28
*gM,x4 Y 2.9 Imaging and The Lens Formula 29
jIx8k8 2.10 Standard Optical Systems 30
;LQ# *NjL\ 2.10.1 Afocal Systems. The Telescope 30
w PG1P'w; 2.10.2 The Simple Magnifier 32
Ss#@=:"P 2.10.3 The Microscope 34
d%#!nq{vd 3 Interference 37
"'z,[v50& 3.1 Introduction 37
wDT>">&d 3.2 General Description 37
LC,*H0 3.3 Coherence 38
4GU/V\e| 3.4 Interference between two Plane Waves 41
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0kNe?Xi 3.6 Interferometry 49
Z>(r9R3{ 3.6.1 Wavefront Division 50
"EcX_> 3.6.2 Amplitude Division 51
yqC Q24 3.6.3 The Dual-Frequency Michelson Interferometer 54
c-4m8Kg?L 3.6.4 Heterodyne (Homodyne) Detection 55
nabBU4;h 3.7 Spatial and Temporal Coherence 56
A9\]3 LY 3.8 Optical Coherence Tomography 61
fBf4]^ 4 Diffraction 67
_pz,okO[V 4.1 Introduction 67
JmU<y 4.2 Diffraction from a Single Slit 67
heE}_,$| 4.3 Diffraction from a Grating 70
54q4CagFq 4.3.1 The Grating Equation. Amplitude Transmittance 70
HE#,(;1i 4.3.2 The Spatial Frequency Spectrum 73
Q0zW ]a 4.4 Fourier Optics 75
Q^z=w![z 4.5 Optical Filtering 76
fm(mO% 4.5.1 Practical Filtering Set-Ups 78
:]P~.PD5, 4.6 Physical Optics Description
Zg
-]sp] of Image Formation 81
b]!9eV$ 4.6.1 The Coherent Transfer Function 83
S~@r 4.6.2 The Incoherent Transfer Function 85
:a_BD 4.6.3 The Depth of Focus 88
\#4m@ 4.7 The Phase-Modulated Sinusoidal Grating 89
Tub1Sv>J 5 Light Sources and Detectors 99
q,[k7&HS 5.1 Introduction 99
J>rka]* 5.2 Radiometry. Photometry 99
E,{GU 5.2.1 Lambertian Surface 102
:ozV3`%$( 5.2.2 Blackbody Radiator 103
uije#cj#O 5.2.3 Examples 105
&+mV7o 5.3 Incoherent Light Sources 108
~I{EE[F>qL 5.4 Coherent Light Sources 109
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KcC!N{ 5.4.2 Gas Lasers 112
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La^HS 5.4.3 Liquid Lasers 114
ShQ|{P9 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
?Bo?JMV 5.4.5 Solid-State Lasers 117
#SKfE 5.4.6 Other Lasers 119
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