Optical Metrology Third Edition 0roCP =; '9q6 aM/& Kjell J. G˚asvik
c<jB6|.=2 Spectra Vision AS, Trondheim, Norway
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GV6mzD@ < e{!vNJ0` Preface to the Third Edition xi
_B$"e[:yX 1Basics 1
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H~ww (D 1.1 Introduction 1
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~1 SF 1.2 Wave Motion. The Electromagnetic Spectrum 1
'{VM> Q 1.3 The Plane Wave. Light Rays 3
,Rz }=j 1.4 Phase Difference 4
Z % EQt 1.5 Complex Notation. Complex Amplitude 5
Dl A Z"C 1.6 Oblique Incidence of A Plane Wave 5
'C~9]Y]. 1.7 The Spherical Wave 7
7 zGMkl 1.8 The Intensity 8
Pz` hX$ 1.9 Geometrical Optics 8
MGybGbd 1.10 The Simple Convex (Positive) Lens 10
}4h0 bI 1.11 A Plane-Wave Set-Up 11
zYr z0 8PJ 2 Gaussian Optics 15
2 ~-( A 2.1 Introduction 15
' ^a!`"Bc 2.2 Refraction at a Spherical Surface 15
bU+9Gi@ v 2.2.1 Examples 19
x)R0F\ _ 2.3 The General Image-Forming System 19
SRf5W'4y 2.4 The Image-Formation Process 21
(\vXA4Oa, 2.5 Reflection at a Spherical Surface 23
}cW#045es 2.6 Aspheric Lenses 25
[H^ X"D 2.7 Stops and Apertures 26
x+^Vg3 q 2.8 Lens Aberrations. Computer Lens Design 28
Y i Zx{5 2.9 Imaging and The Lens Formula 29
E}$V2ha0zu 2.10 Standard Optical Systems 30
5~l2!PY 2.10.1 Afocal Systems. The Telescope 30
rPO}6lsc 2.10.2 The Simple Magnifier 32
]o*$h$? s 2.10.3 The Microscope 34
|Fp'/~|w2d 3 Interference 37
wPH+n-&e 3.1 Introduction 37
& +- e 3.2 General Description 37
6"%2,`Nu 3.3 Coherence 38
?Aw 3lH#: 3.4 Interference between two Plane Waves 41
=v 0~[ E4 3.4.1 Laser Doppler Velocimetry (LDV) 45
Fu# #'# 3.5 Interference between other Waves 46
j38 6gL 3.6 Interferometry 49
]l&'k23~p 3.6.1 Wavefront Division 50
=4> @8=JA 3.6.2 Amplitude Division 51
yVYkuO 3.6.3 The Dual-Frequency Michelson Interferometer 54
z!Hx @){| 3.6.4 Heterodyne (Homodyne) Detection 55
X6kaL 3L} 3.7 Spatial and Temporal Coherence 56
s<VJ`Ur 3.8 Optical Coherence Tomography 61
\Tkp 4 Diffraction 67
e & R b 4.1 Introduction 67
FmI;lVF0j 4.2 Diffraction from a Single Slit 67
!. eAOuq 4.3 Diffraction from a Grating 70
f{_)rsqf 4.3.1 The Grating Equation. Amplitude Transmittance 70
veO?k.u ( 4.3.2 The Spatial Frequency Spectrum 73
61,O%lV 4.4 Fourier Optics 75
kf K[u/<i 4.5 Optical Filtering 76
E9R]sXf8 4.5.1 Practical Filtering Set-Ups 78
^A#x<J+ 4.6 Physical Optics Description
w4A#>;Qu* of Image Formation 81
BS.= 4.6.1 The Coherent Transfer Function 83
\(bj(any 4.6.2 The Incoherent Transfer Function 85
yHOqzq56 4.6.3 The Depth of Focus 88
!Bj^i
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Gh+f1)\FA" 5 Light Sources and Detectors 99
UR,?! rJ^B 5.1 Introduction 99
Z@oKz:U 5.2 Radiometry. Photometry 99
JWWInuH 5.2.1 Lambertian Surface 102
-XW8 LaQB 5.2.2 Blackbody Radiator 103
uMpl#N p 5.2.3 Examples 105
UM\}aq=, 5.3 Incoherent Light Sources 108
xT=ySa$|> 5.4 Coherent Light Sources 109
KBj@V6Q 5.4.1 Stimulated Emission 109
l7~Pa0qD 5.4.2 Gas Lasers 112
|0]YA 5.4.3 Liquid Lasers 114
#[(gIOrNn8 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
GGM5m |4 5.4.5 Solid-State Lasers 117
zzE ]M}s 5.4.6 Other Lasers 119
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