Optical Metrology Third Edition CS5?Ti6 '~<m~UXvD# Kjell J. G˚asvik
B\=8_z Spectra Vision AS, Trondheim, Norway
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W~; `WR;. %QGC8T z Preface to the Third Edition xi
,j{,h_Op 1Basics 1
h Ge/ ;@% 1.1 Introduction 1
"@@u3`# 1.2 Wave Motion. The Electromagnetic Spectrum 1
AaOu L,l 1.3 The Plane Wave. Light Rays 3
)gIK H{JYL 1.4 Phase Difference 4
Ad8n<zt| 1.5 Complex Notation. Complex Amplitude 5
=F~S ?y 1.6 Oblique Incidence of A Plane Wave 5
S>6 ~lb8G 1.7 The Spherical Wave 7
}Yzco 52 1.8 The Intensity 8
I\{ 1u 1.9 Geometrical Optics 8
7
:x fPx 1.10 The Simple Convex (Positive) Lens 10
~{g [<Qi 1.11 A Plane-Wave Set-Up 11
@7] yl&LZ 2 Gaussian Optics 15
u@UMP@"# 2.1 Introduction 15
eS\Vib 2.2 Refraction at a Spherical Surface 15
) e+>w=t 2.2.1 Examples 19
Tod&&T'UW 2.3 The General Image-Forming System 19
h$>-.- 2.4 The Image-Formation Process 21
IGQaDFr 2.5 Reflection at a Spherical Surface 23
T{. pM4Hd 2.6 Aspheric Lenses 25
f!uw zHA`? 2.7 Stops and Apertures 26
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[/M/ 2.8 Lens Aberrations. Computer Lens Design 28
2j88<Yh]H 2.9 Imaging and The Lens Formula 29
1>_8d"<Gd 2.10 Standard Optical Systems 30
Vp z\.] 2.10.1 Afocal Systems. The Telescope 30
Ts[_u@ 2.10.2 The Simple Magnifier 32
@ $ ;q ; 2.10.3 The Microscope 34
QUc= &5 % 3 Interference 37
#ym'A N 3.1 Introduction 37
%K hI>O< 3.2 General Description 37
v5#j Z $<F 3.3 Coherence 38
D9=KXo^ 3.4 Interference between two Plane Waves 41
@ s;;O\ 3.4.1 Laser Doppler Velocimetry (LDV) 45
q460iL7yF} 3.5 Interference between other Waves 46
x.!V^HQSN 3.6 Interferometry 49
{0wIR_dGX 3.6.1 Wavefront Division 50
O|{d[ eX 3.6.2 Amplitude Division 51
4K#>f4(U`g 3.6.3 The Dual-Frequency Michelson Interferometer 54
5h=} j 3.6.4 Heterodyne (Homodyne) Detection 55
.+3g*Dv{& 3.7 Spatial and Temporal Coherence 56
iAEbu&XG 3.8 Optical Coherence Tomography 61
ooj,/IEQ 4 Diffraction 67
+NZ_D#u 4.1 Introduction 67
30#s a GV 4.2 Diffraction from a Single Slit 67
#uG%j 4.3 Diffraction from a Grating 70
XFHYQ2ME2 4.3.1 The Grating Equation. Amplitude Transmittance 70
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"{ }% 4.3.2 The Spatial Frequency Spectrum 73
UT~4x|b:O 4.4 Fourier Optics 75
; ; OAQ` 4.5 Optical Filtering 76
s 8jV(P(O 4.5.1 Practical Filtering Set-Ups 78
A Ru2W1g 4.6 Physical Optics Description
TCwFPlF| of Image Formation 81
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BQE|8g'&T 4.6.2 The Incoherent Transfer Function 85
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6EV$*dRL 4.6.3 The Depth of Focus 88
SuJ aL-; 4.7 The Phase-Modulated Sinusoidal Grating 89
*e Tq VG. 5 Light Sources and Detectors 99
D09Sg%w 5.1 Introduction 99
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jjB~ G^n 5.2.1 Lambertian Surface 102
,G bR!j@6 5.2.2 Blackbody Radiator 103
<s GVR5NR 5.2.3 Examples 105
)1J R# 5.3 Incoherent Light Sources 108
8sWJcmVo 5.4 Coherent Light Sources 109
r"3=44St 5.4.1 Stimulated Emission 109
FF`T \&u 5.4.2 Gas Lasers 112
:1. L}4"gg 5.4.3 Liquid Lasers 114
Y1W1=Uc uk 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
,*TmIPNK 5.4.5 Solid-State Lasers 117
[[Ls_ZL!= 5.4.6 Other Lasers 119
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