Optical Metrology Third Edition !9/`PcNIpy Q+
V< & Kjell J. G˚asvik
G'/G DN^j Spectra Vision AS, Trondheim, Norway
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@L!^2 v OU,FU@6,7w Preface to the Third Edition xi
*2a" 2o 1Basics 1
}UW*[dCf>C 1.1 Introduction 1
G:$kGzhJ 1.2 Wave Motion. The Electromagnetic Spectrum 1
= exCpW> 1.3 The Plane Wave. Light Rays 3
jC>ZMy8U)4 1.4 Phase Difference 4
ch0^g8@Q[ 1.5 Complex Notation. Complex Amplitude 5
F:ycV~bE 1.6 Oblique Incidence of A Plane Wave 5
>E J{ * 1.7 The Spherical Wave 7
T/P\j0hR 1.8 The Intensity 8
?tjEXg>ny 1.9 Geometrical Optics 8
J 2VPOn 1.10 The Simple Convex (Positive) Lens 10
?Xypn#OPt 1.11 A Plane-Wave Set-Up 11
F7 JO/U^oU 2 Gaussian Optics 15
]o uoRlb/ 2.1 Introduction 15
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w 2.2 Refraction at a Spherical Surface 15
c%do NY9Q 2.2.1 Examples 19
n&;JW6VQS 2.3 The General Image-Forming System 19
W $hCI)m( 2.4 The Image-Formation Process 21
jD S\ 2.5 Reflection at a Spherical Surface 23
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Z<\R0 2.6 Aspheric Lenses 25
x/<]/D 2.7 Stops and Apertures 26
]C,j80+pK 2.8 Lens Aberrations. Computer Lens Design 28
~wW]n tZm 2.9 Imaging and The Lens Formula 29
C<^i`[&P$ 2.10 Standard Optical Systems 30
tB>!1}v 2.10.1 Afocal Systems. The Telescope 30
sX~E ~$_g 2.10.2 The Simple Magnifier 32
R|qrK 2.10.3 The Microscope 34
t^":.}[Q 3 Interference 37
\UK}B 3.1 Introduction 37
u/j\pDl. 3.2 General Description 37
2: gh q 3.3 Coherence 38
wL),/i& < 3.4 Interference between two Plane Waves 41
.Bl:hk\ 3.4.1 Laser Doppler Velocimetry (LDV) 45
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^<-C. 3.5 Interference between other Waves 46
}XBF#BN 3.6 Interferometry 49
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3.6.1 Wavefront Division 50
&qXobJRM 3.6.2 Amplitude Division 51
AJ i+JO- 3.6.3 The Dual-Frequency Michelson Interferometer 54
?Sh]kJ O 3.6.4 Heterodyne (Homodyne) Detection 55
-r cEG! 3.7 Spatial and Temporal Coherence 56
fU$Jh/#": 3.8 Optical Coherence Tomography 61
8wkhbD|; 4 Diffraction 67
xFp$JN 4.1 Introduction 67
2K>1,[ C'Z 4.2 Diffraction from a Single Slit 67
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LTG. 4.3 Diffraction from a Grating 70
9)t b= 4.3.1 The Grating Equation. Amplitude Transmittance 70
NHyUHFY 4.3.2 The Spatial Frequency Spectrum 73
X:Z3R0 4.4 Fourier Optics 75
:} =lE"2 4.5 Optical Filtering 76
QO;Dyef7b 4.5.1 Practical Filtering Set-Ups 78
/a3 2QuS 4.6 Physical Optics Description
M%ecWr!tj of Image Formation 81
`"CA$Se 8 4.6.1 The Coherent Transfer Function 83
o$L%t@ 4.6.2 The Incoherent Transfer Function 85
ZskX!{ 4.6.3 The Depth of Focus 88
x @43ZH_ 4.7 The Phase-Modulated Sinusoidal Grating 89
Nut&g"u2 5 Light Sources and Detectors 99
B`eK_ '7t 5.1 Introduction 99
,4"N 7_!7 5.2 Radiometry. Photometry 99
'M6+(`x 5.2.1 Lambertian Surface 102
kB@gy } 5.2.2 Blackbody Radiator 103
r*b+kSh 5.2.3 Examples 105
|Yw k 5.3 Incoherent Light Sources 108
ddN(L`nd 5.4 Coherent Light Sources 109
)=GPhC/sw 5.4.1 Stimulated Emission 109
b(N\R_IQ~ 5.4.2 Gas Lasers 112
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` 5.4.3 Liquid Lasers 114
i=<;$+tW 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
_( J#RH 5.4.5 Solid-State Lasers 117
MUl7o@{' 5.4.6 Other Lasers 119
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