Optical Metrology Third Edition Lq6nmjL 2t? >0)*m Kjell J. G˚asvik
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3FO - 9H /y UKUXi Preface to the Third Edition xi
/Gb)BJk! 1Basics 1
p R`nQM-D 1.1 Introduction 1
)N3/;U; 1.2 Wave Motion. The Electromagnetic Spectrum 1
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1.3 The Plane Wave. Light Rays 3
v- !Spf 1.4 Phase Difference 4
td$RDtW[3 1.5 Complex Notation. Complex Amplitude 5
r@'~cF]m 1.6 Oblique Incidence of A Plane Wave 5
/a-s9< 1.7 The Spherical Wave 7
$kR%G {j 4 1.8 The Intensity 8
&!'R'{/?X 1.9 Geometrical Optics 8
@l_rB~ 1.10 The Simple Convex (Positive) Lens 10
mL;oR 4{ 1.11 A Plane-Wave Set-Up 11
`tKs|GQf 2 Gaussian Optics 15
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% 2.1 Introduction 15
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SD:Bw0gzrI 2.2.1 Examples 19
fL'Ci;.;+ 2.3 The General Image-Forming System 19
@K #}nKN' 2.4 The Image-Formation Process 21
mpIR: Im 2.5 Reflection at a Spherical Surface 23
7o*~zDh@fH 2.6 Aspheric Lenses 25
~ `{{Z& 2.7 Stops and Apertures 26
?g *.7Wc 2.8 Lens Aberrations. Computer Lens Design 28
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4VsttT 2.10 Standard Optical Systems 30
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2.10.1 Afocal Systems. The Telescope 30
H~ >\HV* 2.10.2 The Simple Magnifier 32
M4d4b 2.10.3 The Microscope 34
3Dj>U*f P 3 Interference 37
FiXE0ZI$0q 3.1 Introduction 37
VIod 6Vk 3.2 General Description 37
+& M >J| 3.3 Coherence 38
(ze9-!% 3.4 Interference between two Plane Waves 41
5GJa+St? 3.4.1 Laser Doppler Velocimetry (LDV) 45
RW Jyd= 3.5 Interference between other Waves 46
6mIRa(6V 3.6 Interferometry 49
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Jep/%cT$w 3.6.2 Amplitude Division 51
V4,\vgGu 3.6.3 The Dual-Frequency Michelson Interferometer 54
C,< FV+r=^ 3.6.4 Heterodyne (Homodyne) Detection 55
criNeKa 3.7 Spatial and Temporal Coherence 56
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o7v9xm+ 4 Diffraction 67
# %z@yg 4.1 Introduction 67
5'wFZ=>vMt 4.2 Diffraction from a Single Slit 67
2 jxh7\zE 4.3 Diffraction from a Grating 70
T{'oR .g, 4.3.1 The Grating Equation. Amplitude Transmittance 70
-J i uq 4.3.2 The Spatial Frequency Spectrum 73
qUQP.4Z9 5 4.4 Fourier Optics 75
6\QsK96_ 4.5 Optical Filtering 76
+' .o 4.5.1 Practical Filtering Set-Ups 78
eF Qz G+/ 4.6 Physical Optics Description
wu} Zu of Image Formation 81
iYr*0:M 4.6.1 The Coherent Transfer Function 83
!]z4'* )W 4.6.2 The Incoherent Transfer Function 85
WBD"d<>' 4.6.3 The Depth of Focus 88
Ff[GR$m 4.7 The Phase-Modulated Sinusoidal Grating 89
(S& D 5 Light Sources and Detectors 99
E@Yq2FBpnn 5.1 Introduction 99
'f7s*V KG 5.2 Radiometry. Photometry 99
&?9~e>.OS 5.2.1 Lambertian Surface 102
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A_.}- dzF 5.2.3 Examples 105
kNrd=s,-]D 5.3 Incoherent Light Sources 108
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"3Ckc"G@ 5.4.1 Stimulated Emission 109
v C ^n_ 5.4.2 Gas Lasers 112
_= I&zUF 5.4.3 Liquid Lasers 114
[O3) s] | 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
&&sm7F% 5.4.5 Solid-State Lasers 117
X;dUlSi 5.4.6 Other Lasers 119
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