Optical Metrology Third Edition =31"fS@ Bm.afsM; Kjell J. G˚asvik
jy7\+i Spectra Vision AS, Trondheim, Norway
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!y#"l$"xK 6f;fx}y Preface to the Third Edition xi
|VKK#J/ 1Basics 1
oYHj~t 1.1 Introduction 1
{Z{75} 1.2 Wave Motion. The Electromagnetic Spectrum 1
z^KJ*E 1.3 The Plane Wave. Light Rays 3
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P 1.4 Phase Difference 4
Pnw]Tm}g 1.5 Complex Notation. Complex Amplitude 5
PEN\-*Pv 1.6 Oblique Incidence of A Plane Wave 5
o-;E>N7t 1.7 The Spherical Wave 7
YW-usvl& 1.8 The Intensity 8
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]3j! 1.9 Geometrical Optics 8
xE1 eT, 1.10 The Simple Convex (Positive) Lens 10
<DpevoF 1.11 A Plane-Wave Set-Up 11
(VS5V31" 2 Gaussian Optics 15
L%">iQOG# 2.1 Introduction 15
b>_o xK 2.2 Refraction at a Spherical Surface 15
so^lb?g 2.2.1 Examples 19
,?PTcQF 2.3 The General Image-Forming System 19
BMhy=+\ 2.4 The Image-Formation Process 21
~L]|?d" 2.5 Reflection at a Spherical Surface 23
|\w=u6jX 2.6 Aspheric Lenses 25
rMXN[,|v 2.7 Stops and Apertures 26
KgV3j]d 2.8 Lens Aberrations. Computer Lens Design 28
=nz}XH%= 2.9 Imaging and The Lens Formula 29
soPLA68 2.10 Standard Optical Systems 30
g$n7CXoT 2.10.1 Afocal Systems. The Telescope 30
YZP(tn 2.10.2 The Simple Magnifier 32
@*>@AFnf\Z 2.10.3 The Microscope 34
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MLK7+ 3 Interference 37
,_|]Ufr!a 3.1 Introduction 37
lT4Hn;tnN 3.2 General Description 37
`/_o!(Z` 3.3 Coherence 38
l;af~ef)' 3.4 Interference between two Plane Waves 41
W>!_|[a 3.4.1 Laser Doppler Velocimetry (LDV) 45
tc_286'x 3.5 Interference between other Waves 46
pqUCqo!m\ 3.6 Interferometry 49
cbeLu'DWB. 3.6.1 Wavefront Division 50
wNq;;AJ$ 3.6.2 Amplitude Division 51
nv)2!mAh\ 3.6.3 The Dual-Frequency Michelson Interferometer 54
"mX\&%i6\p 3.6.4 Heterodyne (Homodyne) Detection 55
*+'x~a 3.7 Spatial and Temporal Coherence 56
Rfn9s(m 3.8 Optical Coherence Tomography 61
6W@UJx}w5 4 Diffraction 67
& +4gSr 4.1 Introduction 67
^?$WVB 4.2 Diffraction from a Single Slit 67
P-`M 4.3 Diffraction from a Grating 70
ur*T%b9& 4.3.1 The Grating Equation. Amplitude Transmittance 70
m7&O9?X 4.3.2 The Spatial Frequency Spectrum 73
U ?'vXa 4.4 Fourier Optics 75
A3vUPWdDk 4.5 Optical Filtering 76
|M8WyW 4.5.1 Practical Filtering Set-Ups 78
t(GR)&>.2 4.6 Physical Optics Description
'jmTXWq* of Image Formation 81
3VuW#m#j 4.6.1 The Coherent Transfer Function 83
{)DHH:n 4.6.2 The Incoherent Transfer Function 85
}>)@WL:q 4.6.3 The Depth of Focus 88
";BlIovT=R 4.7 The Phase-Modulated Sinusoidal Grating 89
p7);uF^O% 5 Light Sources and Detectors 99
Av?2< 5.1 Introduction 99
R E}?5XHb 5.2 Radiometry. Photometry 99
1?)Xp|O 5.2.1 Lambertian Surface 102
GQ*wc?f3 5.2.2 Blackbody Radiator 103
[(o7$i29|% 5.2.3 Examples 105
h tx;8: 5.3 Incoherent Light Sources 108
7uT:b!^f[ 5.4 Coherent Light Sources 109
GFfq+=se 5.4.1 Stimulated Emission 109
V<D.sd< 5.4.2 Gas Lasers 112
7~9S 9 5.4.3 Liquid Lasers 114
Op"M.]# 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
:`E8Z:-R 5.4.5 Solid-State Lasers 117
bfA=3S"0 5.4.6 Other Lasers 119
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