Optical Metrology Third Edition Mp DdJ, _E x*%Qf. Kjell J. G˚asvik
i-Ge *? Spectra Vision AS, Trondheim, Norway
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U{U:8== mE3SiR " Preface to the Third Edition xi
[qjAq@@N#q 1Basics 1
K%aPl~e 1.1 Introduction 1
7Y_fF1-wY 1.2 Wave Motion. The Electromagnetic Spectrum 1
zx_O"0{5 1.3 The Plane Wave. Light Rays 3
#N VF\ 1.4 Phase Difference 4
qCxD{-9x{ 1.5 Complex Notation. Complex Amplitude 5
=2vMw] 1.6 Oblique Incidence of A Plane Wave 5
3<~2"@J 1.7 The Spherical Wave 7
,_5YaX:<4 1.8 The Intensity 8
jx5[bUp4u 1.9 Geometrical Optics 8
/I`bh 1.10 The Simple Convex (Positive) Lens 10
_taHf %\4 1.11 A Plane-Wave Set-Up 11
\r1kbf7? 2 Gaussian Optics 15
J;Z>fAE7 2.1 Introduction 15
&?5{z\;1" 2.2 Refraction at a Spherical Surface 15
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2.3 The General Image-Forming System 19
Zh fD`@>& 2.4 The Image-Formation Process 21
:+?W 2.5 Reflection at a Spherical Surface 23
a vbr7X( 2.6 Aspheric Lenses 25
a2 klOX{ 2.7 Stops and Apertures 26
,;+91lR3 2.8 Lens Aberrations. Computer Lens Design 28
4/-))F &s 2.9 Imaging and The Lens Formula 29
#?b^B~ # 2.10 Standard Optical Systems 30
w $U/;C 2.10.1 Afocal Systems. The Telescope 30
W2W2WyPk 2.10.2 The Simple Magnifier 32
=|WV^0=S'% 2.10.3 The Microscope 34
Fv7%TK{oe 3 Interference 37
#ejw@bd 3.1 Introduction 37
Kt!IyIa;Ht 3.2 General Description 37
33,JUQ2u 3.3 Coherence 38
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T1Qep 3.4 Interference between two Plane Waves 41
HC;I0&v> 3.4.1 Laser Doppler Velocimetry (LDV) 45
6E\\`FE4y 3.5 Interference between other Waves 46
M~{P',l* 3.6 Interferometry 49
M_e$l`"G 3.6.1 Wavefront Division 50
:(?hLH.W[ 3.6.2 Amplitude Division 51
w;SH>Ax: 3.6.3 The Dual-Frequency Michelson Interferometer 54
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3.6.4 Heterodyne (Homodyne) Detection 55
r~ D~7MNl 3.7 Spatial and Temporal Coherence 56
8HRPJSO~g 3.8 Optical Coherence Tomography 61
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ka@?` 4 Diffraction 67
BtNW5'^ 4.1 Introduction 67
uZiY<(X 4.2 Diffraction from a Single Slit 67
CAo )v,f 4.3 Diffraction from a Grating 70
)T};Q: 4.3.1 The Grating Equation. Amplitude Transmittance 70
YaJ{"'} 4.3.2 The Spatial Frequency Spectrum 73
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m@1q!G 4.4 Fourier Optics 75
gHh.|PysW 4.5 Optical Filtering 76
N>nvt.`P 4.5.1 Practical Filtering Set-Ups 78
?lwQne8/ 4.6 Physical Optics Description
EDidg "0p of Image Formation 81
3!oQmG_T 4.6.1 The Coherent Transfer Function 83
:@@A 4.6.2 The Incoherent Transfer Function 85
Pdm6u73 4.6.3 The Depth of Focus 88
q
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`F+x]<m! 5 Light Sources and Detectors 99
9M7(_E;)B 5.1 Introduction 99
rX>y>{w~ 5.2 Radiometry. Photometry 99
72`/xryY 5.2.1 Lambertian Surface 102
3P^gP32 5.2.2 Blackbody Radiator 103
P7k$^n 5.2.3 Examples 105
Y7t{4P 5.3 Incoherent Light Sources 108
};|PFWs 5.4 Coherent Light Sources 109
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6 5.4.1 Stimulated Emission 109
, w'$T) 5.4.2 Gas Lasers 112
C8W`Oly:] 5.4.3 Liquid Lasers 114
|Q)w3\S$ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
PSQ:' 5.4.5 Solid-State Lasers 117
7" STS7_ 5.4.6 Other Lasers 119
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