Optical Metrology Third Edition {NX c<0 a( Yv E$fX= Kjell J. G˚asvik
LGKkT?fcSC Spectra Vision AS, Trondheim, Norway
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"0 \U>h -X5rGp++ Preface to the Third Edition xi
!YSAQi ;I 1Basics 1
~F^=7oq 1.1 Introduction 1
-}@3,G 1.2 Wave Motion. The Electromagnetic Spectrum 1
048BQ 1.3 The Plane Wave. Light Rays 3
[>::@[ 1.4 Phase Difference 4
d_ gm' 1.5 Complex Notation. Complex Amplitude 5
o0&jel1a 1.6 Oblique Incidence of A Plane Wave 5
L B1 ui 1.7 The Spherical Wave 7
Lg pj<H[ 1.8 The Intensity 8
y 562g`"U 1.9 Geometrical Optics 8
F h9`8 1.10 The Simple Convex (Positive) Lens 10
6tB- 1.11 A Plane-Wave Set-Up 11
dQ@ e+u5 2 Gaussian Optics 15
&e@2zfl7 2.1 Introduction 15
{co(w
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g
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(o)nN8 2.3 The General Image-Forming System 19
@4Z>; 2.4 The Image-Formation Process 21
yd[}? 2.5 Reflection at a Spherical Surface 23
#qT 97NQ 2.6 Aspheric Lenses 25
dbSIC[q 2.7 Stops and Apertures 26
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F34 2.8 Lens Aberrations. Computer Lens Design 28
}MW*xtGV 2.9 Imaging and The Lens Formula 29
P\KP )bkC 2.10 Standard Optical Systems 30
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2.10.1 Afocal Systems. The Telescope 30
nzE 4P3 C+ 2.10.2 The Simple Magnifier 32
0vNEl3f'O 2.10.3 The Microscope 34
HE(|x 1C)j 3 Interference 37
Y v }G"-= 3.1 Introduction 37
frbKi _1 3.2 General Description 37
> xkl7D 3.3 Coherence 38
g* F? 3.4 Interference between two Plane Waves 41
R<{bb ' 3.4.1 Laser Doppler Velocimetry (LDV) 45
9V`/zq? 3.5 Interference between other Waves 46
=HmV0 3.6 Interferometry 49
wX@&Qv 3.6.1 Wavefront Division 50
N[d*_KN.! 3.6.2 Amplitude Division 51
HGfV2FtT z 3.6.3 The Dual-Frequency Michelson Interferometer 54
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.x5Y fe 3.7 Spatial and Temporal Coherence 56
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3`"p5u 3.8 Optical Coherence Tomography 61
z kQV$n{ 4 Diffraction 67
7)!(0.& 4.1 Introduction 67
y[Zl ,v7 4.2 Diffraction from a Single Slit 67
9KRH o%m 4.3 Diffraction from a Grating 70
XW V) 4.3.1 The Grating Equation. Amplitude Transmittance 70
I8@NQ=UV0 4.3.2 The Spatial Frequency Spectrum 73
U(3+*'8r,1 4.4 Fourier Optics 75
I=6\z^: 4.5 Optical Filtering 76
]#P9.c_} 4.5.1 Practical Filtering Set-Ups 78
&$t BD@7 4.6 Physical Optics Description
K@Q_q/(%; of Image Formation 81
)(~4fA5j) 4.6.1 The Coherent Transfer Function 83
mv|eEz)r 4.6.2 The Incoherent Transfer Function 85
W z}RJC7p 4.6.3 The Depth of Focus 88
$D
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h
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ewg&DBbN" 5.1 Introduction 99
r/'9@oM 5.2 Radiometry. Photometry 99
)$Xd#bzD| 5.2.1 Lambertian Surface 102
jnsV'@v8Nj 5.2.2 Blackbody Radiator 103
c e th )Xm 5.2.3 Examples 105
_"_ W KlN 5.3 Incoherent Light Sources 108
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3US}( ' 5.4.1 Stimulated Emission 109
|>@Gb gw^M 5.4.2 Gas Lasers 112
<h:> :%# k 5.4.3 Liquid Lasers 114
{%5k1,/( 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
$7eO33Bm 5.4.5 Solid-State Lasers 117
pXf@Y}mH 5.4.6 Other Lasers 119
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