Optical Metrology Third Edition d^v#x[1msZ e{)giJY9 Kjell J. G˚asvik
BtJk vg(2] Spectra Vision AS, Trondheim, Norway
&CG 94 
?JuJu1 1 $ *8F Preface to the Third Edition xi
+t7HlAXB# 1Basics 1
579Q&|L. 1.1 Introduction 1
8 lF 9LZ8 1.2 Wave Motion. The Electromagnetic Spectrum 1
[ L%Ltm x 1.3 The Plane Wave. Light Rays 3
mR0`wrt 1.4 Phase Difference 4
WB jJ)vCA. 1.5 Complex Notation. Complex Amplitude 5
Jz8P':6 [ 1.6 Oblique Incidence of A Plane Wave 5
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iO{ 1.7 The Spherical Wave 7
i\xs!QU 1.8 The Intensity 8
#$WnMJ@ 1.9 Geometrical Optics 8
re/-Yu$' 1.10 The Simple Convex (Positive) Lens 10
&8VH m?h 1.11 A Plane-Wave Set-Up 11
%JeND XbI4 2 Gaussian Optics 15
6#=Iv X4 2.1 Introduction 15
Q& [!+s:2J 2.2 Refraction at a Spherical Surface 15
>N^< Q4%2 2.2.1 Examples 19
IOHWb& N6 2.3 The General Image-Forming System 19
E~y8X9HZ) 2.4 The Image-Formation Process 21
igu1s }F 2.5 Reflection at a Spherical Surface 23
qnP4wRpr 2.6 Aspheric Lenses 25
IADSWzQ@ 2.7 Stops and Apertures 26
Ana[>wSZO@ 2.8 Lens Aberrations. Computer Lens Design 28
?V`-z#y7 2.9 Imaging and The Lens Formula 29
HNkOPz+d&8 2.10 Standard Optical Systems 30
<$A,|m 2.10.1 Afocal Systems. The Telescope 30
C|y^{4 |R 2.10.2 The Simple Magnifier 32
-x ?Z2EA! 2.10.3 The Microscope 34
b dr E2m 3 Interference 37
L=(-BYS 3.1 Introduction 37
g$Tsht(rHD 3.2 General Description 37
,ei9 ?9J1 3.3 Coherence 38
~&:-c v 3.4 Interference between two Plane Waves 41
fw %p_Cm 3.4.1 Laser Doppler Velocimetry (LDV) 45
Q<>u) %92@ 3.5 Interference between other Waves 46
'D W|a 3.6 Interferometry 49
ivo3 pibk% 3.6.1 Wavefront Division 50
$HwF:L)* 3.6.2 Amplitude Division 51
d.}65{F,x 3.6.3 The Dual-Frequency Michelson Interferometer 54
. {gD w 3.6.4 Heterodyne (Homodyne) Detection 55
jTwSyW 3.7 Spatial and Temporal Coherence 56
qkfof{z 3.8 Optical Coherence Tomography 61
@<K<"`~H 4 Diffraction 67
Bo:epus}\ 4.1 Introduction 67
j+!u=E 4.2 Diffraction from a Single Slit 67
T4x%3-4 ; 4.3 Diffraction from a Grating 70
O+!4KNN.- 4.3.1 The Grating Equation. Amplitude Transmittance 70
kQI'kL8> 4.3.2 The Spatial Frequency Spectrum 73
$mxG-'x %K 4.4 Fourier Optics 75
>V.?XZ nt 4.5 Optical Filtering 76
%)i&|AV" 4.5.1 Practical Filtering Set-Ups 78
a;$V;3C{b& 4.6 Physical Optics Description
^Zl[#:E FP of Image Formation 81
8 n[( \f: 4.6.1 The Coherent Transfer Function 83
D[^K0<-Z 4.6.2 The Incoherent Transfer Function 85
oDS7do 4.6.3 The Depth of Focus 88
Q]5 _s{kiz 4.7 The Phase-Modulated Sinusoidal Grating 89
5kqI 5 Light Sources and Detectors 99
H[w';u[% 5.1 Introduction 99
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2hGkJ- 5.2 Radiometry. Photometry 99
=U84*HAv 5.2.1 Lambertian Surface 102
S^R dj ] 5.2.2 Blackbody Radiator 103
m
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*L ?~ 5.4 Coherent Light Sources 109
AXc mN 5.4.1 Stimulated Emission 109
. LAB8bg 5.4.2 Gas Lasers 112
'(iPI 5.4.3 Liquid Lasers 114
54{E&QvL8o 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
[vI ;A ! 5.4.5 Solid-State Lasers 117
P}'B~ ~9W 5.4.6 Other Lasers 119
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