Optical Metrology Third Edition :HhLc'1Jw P\bW k p0 Kjell J. G˚asvik
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N K1RTAFf / Preface to the Third Edition xi
M@@"-dy 1Basics 1
Pz3jc|Ga 1.1 Introduction 1
\XwXs5"G 1.2 Wave Motion. The Electromagnetic Spectrum 1
*ie#9jA 1.3 The Plane Wave. Light Rays 3
G`E%uyjG$j 1.4 Phase Difference 4
N3E Qq~lX 1.5 Complex Notation. Complex Amplitude 5
mJb>)bOl 1.6 Oblique Incidence of A Plane Wave 5
-Zfzl`r 1.7 The Spherical Wave 7
5}gcJjz 1.8 The Intensity 8
#9z\Wblr 1.9 Geometrical Optics 8
vvw6 GB,M 1.10 The Simple Convex (Positive) Lens 10
ewB&PR 1.11 A Plane-Wave Set-Up 11
*{:FPmDU 2 Gaussian Optics 15
[>#?C*s 2.1 Introduction 15
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2.2 Refraction at a Spherical Surface 15
B&|F9Z6D 2.2.1 Examples 19
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k<ds7k1m 2.4 The Image-Formation Process 21
7QL>f5Q 2.5 Reflection at a Spherical Surface 23
[r_,BH\nu 2.6 Aspheric Lenses 25
V_Kpb*3 2.7 Stops and Apertures 26
l){l*~5zl2 2.8 Lens Aberrations. Computer Lens Design 28
|0n h 2.9 Imaging and The Lens Formula 29
cl{x5>.'# 2.10 Standard Optical Systems 30
j['Z|Am"l 2.10.1 Afocal Systems. The Telescope 30
-?<wvUbR{ 2.10.2 The Simple Magnifier 32
2;.7c+r0 2.10.3 The Microscope 34
=3lUr<Ze 3 Interference 37
Hx2.2A^ 3.1 Introduction 37
[(}f3W & 3.2 General Description 37
'#[U7(lIQ 3.3 Coherence 38
^dH#n~Wx0 3.4 Interference between two Plane Waves 41
Y[Us"K` 3.4.1 Laser Doppler Velocimetry (LDV) 45
<QTu"i 3.5 Interference between other Waves 46
rP,i,1Ar 4 3.6 Interferometry 49
P"W$ZX 3.6.1 Wavefront Division 50
2?rg&og6 3.6.2 Amplitude Division 51
i{PRjkR 3.6.3 The Dual-Frequency Michelson Interferometer 54
h;f5@#F 3.6.4 Heterodyne (Homodyne) Detection 55
')I/D4v 3.7 Spatial and Temporal Coherence 56
K97lP~Hu 3.8 Optical Coherence Tomography 61
$ t_s7 4 Diffraction 67
-cNh5~p= 4.1 Introduction 67
#wbaRx@rc 4.2 Diffraction from a Single Slit 67
sLzcTGa2:z 4.3 Diffraction from a Grating 70
wlBdA 4.3.1 The Grating Equation. Amplitude Transmittance 70
2fTkHBhn& 4.3.2 The Spatial Frequency Spectrum 73
z~+_sTu 4.4 Fourier Optics 75
UZMo(rG.]{ 4.5 Optical Filtering 76
qO[6?q=c: 4.5.1 Practical Filtering Set-Ups 78
d z&| 3o 4.6 Physical Optics Description
yAR''> of Image Formation 81
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cH'*J/ 4.6.2 The Incoherent Transfer Function 85
:h0as!2@dp 4.6.3 The Depth of Focus 88
IPa08/ 4.7 The Phase-Modulated Sinusoidal Grating 89
neJNMdv@T 5 Light Sources and Detectors 99
;r>?V2,tm 5.1 Introduction 99
$4'I3{$ 5.2 Radiometry. Photometry 99
z,}1K! 5.2.1 Lambertian Surface 102
DSYtj}> 5.2.2 Blackbody Radiator 103
C9x'yBDv 5.2.3 Examples 105
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1 5.3 Incoherent Light Sources 108
*RUB`tEL 5.4 Coherent Light Sources 109
8,=Ti7_ 5.4.1 Stimulated Emission 109
IyIh0B~i 5.4.2 Gas Lasers 112
)-|A|1Uo 5.4.3 Liquid Lasers 114
Fp+^`;j 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
v<_}Br2I[ 5.4.5 Solid-State Lasers 117
UP 1Y3 5.4.6 Other Lasers 119
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