Optical Metrology Third Edition z^O>'9# :J5xO%WA( Kjell J. G˚asvik
C ]p3,G,oN Spectra Vision AS, Trondheim, Norway
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) j_g*< bncIxxe Preface to the Third Edition xi
?,O{,2} 1Basics 1
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1.1 Introduction 1
&U *=D8!0 1.2 Wave Motion. The Electromagnetic Spectrum 1
3u3(BY{"\F 1.3 The Plane Wave. Light Rays 3
_T 7t q 1.4 Phase Difference 4
e@F9'z4 1.5 Complex Notation. Complex Amplitude 5
=6Ihk 1.6 Oblique Incidence of A Plane Wave 5
/MO|q 1.7 The Spherical Wave 7
S zsq|T 1.8 The Intensity 8
oyi EOC 1.9 Geometrical Optics 8
Re0ma %~LP 1.10 The Simple Convex (Positive) Lens 10
udMDE=1~L 1.11 A Plane-Wave Set-Up 11
M`- .0 2 Gaussian Optics 15
bO^#RVH 2.1 Introduction 15
VZ 5EV'D8! 2.2 Refraction at a Spherical Surface 15
"} Of f 2.2.1 Examples 19
RU|{'zC\v 2.3 The General Image-Forming System 19
Gcna:w>6d 2.4 The Image-Formation Process 21
t-) C0< 2.5 Reflection at a Spherical Surface 23
h S/oOeG<Y 2.6 Aspheric Lenses 25
TW8E^k 7 2.7 Stops and Apertures 26
GNlP]9wX 2.8 Lens Aberrations. Computer Lens Design 28
3.Oc8(N^} 2.9 Imaging and The Lens Formula 29
$*tq$DZ4& 2.10 Standard Optical Systems 30
@2yi%_ ]h 2.10.1 Afocal Systems. The Telescope 30
JBo/<W#| 2.10.2 The Simple Magnifier 32
mp:%k\cF| 2.10.3 The Microscope 34
u_[s+ J/ 3 Interference 37
8%n b1CA 3.1 Introduction 37
- ^`]tF`M 3.2 General Description 37
_@3@_GE 3.3 Coherence 38
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yCy4t6`e 3.4.1 Laser Doppler Velocimetry (LDV) 45
q90eB6G0g 3.5 Interference between other Waves 46
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"5S ; 3.6 Interferometry 49
{7L O|E }7 3.6.1 Wavefront Division 50
eZ#n ZB 3.6.2 Amplitude Division 51
u=JI 1 3.6.3 The Dual-Frequency Michelson Interferometer 54
M^JRHpTn 3.6.4 Heterodyne (Homodyne) Detection 55
`j{q$Y=AG 3.7 Spatial and Temporal Coherence 56
q{gt2OWqX 3.8 Optical Coherence Tomography 61
&=oW=g 2 4 Diffraction 67
S-&[Tp+N 4.1 Introduction 67
:Y`cgi0vkd 4.2 Diffraction from a Single Slit 67
g .ty#Z=: 4.3 Diffraction from a Grating 70
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4.3.1 The Grating Equation. Amplitude Transmittance 70
"E =\Vz 4.3.2 The Spatial Frequency Spectrum 73
Bvj-LT=) 4.4 Fourier Optics 75
r<,W{Va 4.5 Optical Filtering 76
2iYf)M C 4.5.1 Practical Filtering Set-Ups 78
TO7 %TW{L 4.6 Physical Optics Description
B:Ec(USe of Image Formation 81
5RCZv\Wd& 4.6.1 The Coherent Transfer Function 83
(=c R;\s< 4.6.2 The Incoherent Transfer Function 85
d~1Nct$: 4.6.3 The Depth of Focus 88
$R4[TQY).! 4.7 The Phase-Modulated Sinusoidal Grating 89
`!rH 0 ]vy 5 Light Sources and Detectors 99
_R-[*ucq 5.1 Introduction 99
#K:|@d 5.2 Radiometry. Photometry 99
]y= ff6 Q 5.2.1 Lambertian Surface 102
PYX]ld.E 5.2.2 Blackbody Radiator 103
!g{9]"Z1T 5.2.3 Examples 105
` KBgVhS> 5.3 Incoherent Light Sources 108
bI/d(Q%#< 5.4 Coherent Light Sources 109
~?TG SD@( 5.4.1 Stimulated Emission 109
H. U wM 5.4.2 Gas Lasers 112
lL_M=td8W 5.4.3 Liquid Lasers 114
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F[uy'~;@ 5.4.5 Solid-State Lasers 117
,&[2z! 5.4.6 Other Lasers 119
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