Optical Metrology Third Edition "$r1$mBi r|<6Aae& Kjell J. G˚asvik
eIsT!V"7 Spectra Vision AS, Trondheim, Norway
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o OQ'*7_ Q<1L`_.> Preface to the Third Edition xi
76_<xUt{ 1Basics 1
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G:D 1.1 Introduction 1
^,`M0g\$ 1.2 Wave Motion. The Electromagnetic Spectrum 1
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1.3 The Plane Wave. Light Rays 3
p3 e|j 1.4 Phase Difference 4
MF^_Z3GS' 1.5 Complex Notation. Complex Amplitude 5
>otJF3zw 1.6 Oblique Incidence of A Plane Wave 5
j|mv+O 1.7 The Spherical Wave 7
$2Q YxY9s 1.8 The Intensity 8
V3Yd&HVWNQ 1.9 Geometrical Optics 8
lY8`5Uz 1.10 The Simple Convex (Positive) Lens 10
nZxSMN0] 1.11 A Plane-Wave Set-Up 11
8TW5(fl 2 Gaussian Optics 15
b4)k &*dfR 2.1 Introduction 15
6Kp}_^|z 2.2 Refraction at a Spherical Surface 15
"b`7[ ;a 2.2.1 Examples 19
*,&S' ,S- 2.3 The General Image-Forming System 19
(xu=% 2.4 The Image-Formation Process 21
[]gRfM]$& 2.5 Reflection at a Spherical Surface 23
N}DL(-SQ3 2.6 Aspheric Lenses 25
.;g}%C 2.7 Stops and Apertures 26
#3+~.,X9 2.8 Lens Aberrations. Computer Lens Design 28
p31oL{D 2.9 Imaging and The Lens Formula 29
n+rM"Gxz 2.10 Standard Optical Systems 30
gHZqA_*T8U 2.10.1 Afocal Systems. The Telescope 30
l!:^6i 2.10.2 The Simple Magnifier 32
\E77SO,$ 2.10.3 The Microscope 34
Fm5Q&'`l 3 Interference 37
!3V{2-y$- 3.1 Introduction 37
f3vF"O 3.2 General Description 37
oqYt/4^Q 3.3 Coherence 38
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3.4 Interference between two Plane Waves 41
!D;c,{Oz 3.4.1 Laser Doppler Velocimetry (LDV) 45
NH4?q!'G 3.5 Interference between other Waves 46
vY_eDJ~' 3.6 Interferometry 49
%J!NL0x_ 3.6.1 Wavefront Division 50
ot }6D 3.6.2 Amplitude Division 51
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3.6.3 The Dual-Frequency Michelson Interferometer 54
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A(:" 3.6.4 Heterodyne (Homodyne) Detection 55
6@YH#{~Zpv 3.7 Spatial and Temporal Coherence 56
0 sh~I 3.8 Optical Coherence Tomography 61
/NU103F yt 4 Diffraction 67
+>}o;`hPe 4.1 Introduction 67
B`1kG Ex . 4.2 Diffraction from a Single Slit 67
{OP~8e" 4.3 Diffraction from a Grating 70
QD4:W"i 4.3.1 The Grating Equation. Amplitude Transmittance 70
jkt6/H 4.3.2 The Spatial Frequency Spectrum 73
O:YJ%;w 4.4 Fourier Optics 75
R5kH0{zM 4.5 Optical Filtering 76
)i-gs4[(QN 4.5.1 Practical Filtering Set-Ups 78
(:7a&2/M 4.6 Physical Optics Description
:j,}{)5= of Image Formation 81
9yL6W'B! 4.6.1 The Coherent Transfer Function 83
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c:Zx! 4.6.2 The Incoherent Transfer Function 85
+?AW>&68y 4.6.3 The Depth of Focus 88
qrE0H 4.7 The Phase-Modulated Sinusoidal Grating 89
x<>YUw8` 5 Light Sources and Detectors 99
U=QA e 5.1 Introduction 99
(NaK3_ 5.2 Radiometry. Photometry 99
E}YIWTX 5.2.1 Lambertian Surface 102
Ao"C<.gUYP 5.2.2 Blackbody Radiator 103
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?@ 5.2.3 Examples 105
y/tSGkMv 5.3 Incoherent Light Sources 108
nNQ-"t 5.4 Coherent Light Sources 109
m9t$h 5.4.1 Stimulated Emission 109
H+x#gK2l 5.4.2 Gas Lasers 112
vQHpf>o 5.4.3 Liquid Lasers 114
mNDuwDd$S 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
%*K;np-q{ 5.4.5 Solid-State Lasers 117
iRve) 5.4.6 Other Lasers 119
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