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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
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目录:
X7!A(q+h Z?[J_[ZtR3 6h"?3w Chapter 1 Atom, Molecule, and Nanocluster Manipulations
KUV{]?' for Nanostructure Fabrication Using Scanning
_'v )Fy Probe Microscopy 1
6q7Y`%j A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
T>?1+mruM Chapter 2 Atomic Force Microscope Lithography 33
4y)1*V U: N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
m#(x D~V Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
BU .G~0 Sensing, and Modification 65
u9%:2$[ C. Santschi, J. Polesel-Maris, J. Brugger,
Gs?sO?j and H. Heinzelmann
C'"6@-~ Chapter 4 Using Biomolecules for Self-Assembly of Engineered
c'4 \F9 Nano-Scale Structures and Devices 127
J)~=b_'< R. Mehta, J. Lund, and B. A. Parviz
XX;%:?n Chapter 5 Nanofabrication Based on Self-Assembled
RLr-xg$K-t Alumina Templates 159
r!=VV!XZ S. Sen and N. A. Kouklin
pfIvBU? Chapter 6 Nanowire Assembly and Integration 187
O~1p]j Z. Gu and D. H. Gracias
Eu}A{[^\ Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
8XE0 p7 L. Tong and E. Mazur
D{}\7qe Chapter 8 Extreme Ultraviolet Lithography 235
{=Y&q~:8v H. Kinoshita
Sa(rl^qZ2 Chapter 9 Electron Projection Lithography 285
4df1)<}U- T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
8BdeqgU/_ Chapter 10 Electron Beam Direct Writing 341
DA\O,^49h K. Yamazaki
Fs~-exY1 Chapter 11 Electron Beam Induced Deposition 377
>.A:6 K. Mitsuishi
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69 Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
r-uIFhV^ P. A. Crozier and C. W. Hagen
mI18A#[ 3 Chapter 13 Focused Ion Beams and Interaction with Solids 431
43fA;Uc{Y` T. Ishitani, T. Ohnishi, and T. Yaguchi
{hR23eE)# Chapter 14 Nano/Microstructuring of Ceramic Surfaces
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A.A by Unconventional Lithographic Methods 471
n*uZ=M_/Q R. C. Salvarezza and O. Azzaroni
O2B$c\pw Chapter 15 Alternative Nanofabrication Approaches
C<)&qx3 f or Non-CMOS Applications 499
Sn,z$-;h; C. V. Cojocaru, F. Cicoira, and F. Rosei
;RYKqUE Chapter 16 Nanofabrication of Nanoelectromechanical Systems
Lr &tpB< (NEMS): Emerging Techniques 543
n40Z K. L. Ekinci and J. Brugger
gr7_oJ:R .YlM'E*X [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]