美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications <_=JMA5  
TihnSb  
目录： nWKO8C>  
"w>rlsT<O  
fKFnCng  
Chapter 1 Atom, Molecule, and Nanocluster Manipulations ${wU+E*  
                for Nanostructure Fabrication Using Scanning C_6GOpl  
                Probe Microscopy 1 Cq-hPa}2  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo H~~7~1"x  
Chapter 2 Atomic Force Microscope Lithography 33 ^!q 08`0  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 8w03{H 0  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, E7V38Z  
                Sensing, and Modification 65 qsD?dHi7  
                C. Santschi, J. Polesel-Maris, J. Brugger, VEL:JsY  
                and H. Heinzelmann \El|U#$u'  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered XPar_8I  
                Nano-Scale Structures and Devices 127 r3n=<l!Jr  
               R. Mehta, J. Lund, and B. A. Parviz j kSc&  
Chapter 5 Nanofabrication Based on Self-Assembled W/#KX}4  
               Alumina Templates 159 f+*J ue  
               S. Sen and N. A. Kouklin
`)0Rv|?  
Chapter 6 Nanowire Assembly and Integration 187 !y.ei1diw  
                Z. Gu and D. H. Gracias  `2Wl  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 3"^a rK^N  
                 L. Tong and E. Mazur !x`;>0  
Chapter 8 Extreme Ultraviolet Lithography 235 &mX5&e  
                 H. Kinoshita ^wvH,>Yo  
Chapter 9 Electron Projection Lithography 285
qlz( W  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata AQE eIFH  
Chapter 10 Electron Beam Direct Writing 341 z8 hTZU  
                   K. Yamazaki $Sp*)A]E`  
Chapter 11 Electron Beam Induced Deposition 377 D2Vb{%(4.  
                   K. Mitsuishi w%>aR_G  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 @WhZx*1  
                   P. A. Crozier and C. W. Hagen l[tY,Y:4qO  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 59&T
/  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi bRx2 c  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces G> f^2  
                  by Unconventional Lithographic Methods 471 'CP/ymf/a  
                  R. C. Salvarezza and O. Azzaroni 9V|E1-")E  
Chapter 15 Alternative Nanofabrication Approaches /X(@|tk:  
f                 or Non-CMOS Applications 499 hB|H9+  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei clh3  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems G3Idxs  
                  (NEMS): Emerging Techniques 543 Mfnlue](  
                  K. L. Ekinci and J. Brugger FZ[@])B  
jA20c(O  

附件6-10

附件11-13

3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享