美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications 3q~":bpAp  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations (SgEt  
                for Nanostructure Fabrication Using Scanning (PCimT=5  
                Probe Microscopy 1 R&u)=~O\5  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo yj}bY?4I  
Chapter 2 Atomic Force Microscope Lithography 33 J6@(X8w{j  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park KKx&UKjV  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, HGP%a1RF#  
                Sensing, and Modification 65 e.)yV'%L  
                C. Santschi, J. Polesel-Maris, J. Brugger, J8sJ~FnUj  
                and H. Heinzelmann d1srV`  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered iQ]T+}nn_  
                Nano-Scale Structures and Devices 127 9TYw@o5V  
               R. Mehta, J. Lund, and B. A. Parviz >< <$  
Chapter 5 Nanofabrication Based on Self-Assembled ..P=D <'f  
               Alumina Templates 159 8Pr&F  
               S. Sen and N. A. Kouklin ?6gDbE%  
Chapter 6 Nanowire Assembly and Integration 187 A%NK0j$;}  
                Z. Gu and D. H. Gracias EmtDrx4!(f  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 "?2  
                 L. Tong and E. Mazur p6&LZ=tL3  
Chapter 8 Extreme Ultraviolet Lithography 235 o1 hdO  
                 H. Kinoshita zh#OD{  
Chapter 9 Electron Projection Lithography 285 X_-Hrp!h  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata jQ.>2-;H9  
Chapter 10 Electron Beam Direct Writing 341 )1ZJ  
                   K. Yamazaki 5
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Chapter 11 Electron Beam Induced Deposition 377 B#qL$M,|  
                   K. Mitsuishi "k\Ff50  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 PTuCN  
                   P. A. Crozier and C. W. Hagen \j2: 6]Hm  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 6i9Q,4~  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi wf~5lpI[  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces ~.PPf/ Z8]  
                  by Unconventional Lithographic Methods 471 vxbH^b  
                  R. C. Salvarezza and O. Azzaroni 'mBLf&fB  
Chapter 15 Alternative Nanofabrication Approaches r
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f                 or Non-CMOS Applications 499 N27K  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei E>l#0Zw  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems HobGl0<y  
                  (NEMS): Emerging Techniques 543 Q>SPV8s  
                  K. L. Ekinci and J. Brugger *#prSS  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享

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