美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications FYQS)s  
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目录： ;$g?T~v7  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations ECmW`#Otb)  
                for Nanostructure Fabrication Using Scanning $I?"lky  
                Probe Microscopy 1 p!%pP}I  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo Eu3E-K@y  
Chapter 2 Atomic Force Microscope Lithography 33 V0mn4sfs  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park YoFxW5by  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, VIf.q)_k  
                Sensing, and Modification 65 v3>UV8c'  
                C. Santschi, J. Polesel-Maris, J. Brugger, I>$&-i  
                and H. Heinzelmann FS1z`wYP  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered BiBOr}ZQ  
                Nano-Scale Structures and Devices 127 _yR^*}xJb  
               R. Mehta, J. Lund, and B. A. Parviz _aeBauD  
Chapter 5 Nanofabrication Based on Self-Assembled Tlr v={  
               Alumina Templates 159 ,a? oaPH  
               S. Sen and N. A. Kouklin )+Pus~w  
Chapter 6 Nanowire Assembly and Integration 187 ~gt@P  
                Z. Gu and D. H. Gracias '|=;^Z7.K  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 9lE_nc  
                 L. Tong and E. Mazur X@F
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Chapter 8 Extreme Ultraviolet Lithography 235 Ax}JLPz5'  
                 H. Kinoshita \fe]c :  
Chapter 9 Electron Projection Lithography 285 Flb&B1  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata aw>#P   
Chapter 10 Electron Beam Direct Writing 341 /Z4et'Lo  
                   K. Yamazaki gBD]}vo-  
Chapter 11 Electron Beam Induced Deposition 377 c:.eGH_f  
                   K. Mitsuishi <#HYqR',  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 =2x^nW  
                   P. A. Crozier and C. W. Hagen oP.7/*p  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 1h5 Akq  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi i@J;G`  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces u]@['7  
                  by Unconventional Lithographic Methods 471 &cTU sK  
                  R. C. Salvarezza and O. Azzaroni kG*~|ma  
Chapter 15 Alternative Nanofabrication Approaches A+{VGP^  
f                 or Non-CMOS Applications 499 2J;g{95z  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei v &+R^iLE  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems bZV
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                  (NEMS): Emerging Techniques 543 !|>"o7  
                  K. L. Ekinci and J. Brugger ? =+WRjF  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享

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