美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications XSl!T/d  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations w^U}|h"  
                for Nanostructure Fabrication Using Scanning
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                Probe Microscopy 1 zS?n>ElI  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo qM*S*,s  
Chapter 2 Atomic Force Microscope Lithography 33 IW]*i?L  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 0`Gai2\1@  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, KJ pj  
                Sensing, and Modification 65 &PSTwZd  
                C. Santschi, J. Polesel-Maris, J. Brugger, [88{@
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                and H. Heinzelmann enPLaiJ'|q  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered ,,}sK  
                Nano-Scale Structures and Devices 127 K{N%kk%F  
               R. Mehta, J. Lund, and B. A. Parviz Tr$i= M  
Chapter 5 Nanofabrication Based on Self-Assembled `1$y(w]  
               Alumina Templates 159 +h|K[=l\  
               S. Sen and N. A. Kouklin + lP5XY{  
Chapter 6 Nanowire Assembly and Integration 187 EFwL.'Fh  
                Z. Gu and D. H. Gracias +/w(K,  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 ret0z|  
                 L. Tong and E. Mazur .`mtA`
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Chapter 8 Extreme Ultraviolet Lithography 235 y]J3hKs  
                 H. Kinoshita `LE^:a:8,  
Chapter 9 Electron Projection Lithography 285 ;fj9n-  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata ^aT;aP^l  
Chapter 10 Electron Beam Direct Writing 341 6QW<RXom  
                   K. Yamazaki #TIX_RXh  
Chapter 11 Electron Beam Induced Deposition 377 VOg/VGJ  
                   K. Mitsuishi 2J)74SeH  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 PK_Fx';ke^  
                   P. A. Crozier and C. W. Hagen VkWO}  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 [\88@B=jXP  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi QP+c?ct}hF  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces 6mi$.' qP  
                  by Unconventional Lithographic Methods 471 T^N L:78  
                  R. C. Salvarezza and O. Azzaroni )F
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Chapter 15 Alternative Nanofabrication Approaches ,7t3>9-M"  
f                 or Non-CMOS Applications 499 ,zG<7~m  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei Q5hb0O%a  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems Ew>~a8!Fq  
                  (NEMS): Emerging Techniques 543 >H)^6sJ;%b  
                  K. L. Ekinci and J. Brugger ot]>}[  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享