美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications T"7Ue  
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目录： zAT7^q^  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations ~uy{6U{&I  
                for Nanostructure Fabrication Using Scanning CqW:m*c  
                Probe Microscopy 1 NIZN}DnP  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo `K -j  
Chapter 2 Atomic Force Microscope Lithography 33 Py2AnpYa  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 533n z8&9@  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, \Tq !(]o^  
                Sensing, and Modification 65 &+V6mH9m@  
                C. Santschi, J. Polesel-Maris, J. Brugger, mS?.xu  
                and H. Heinzelmann g'2'K  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered _dOR-<  
                Nano-Scale Structures and Devices 127 K_/-mwA v  
               R. Mehta, J. Lund, and B. A. Parviz eeKErpj8A  
Chapter 5 Nanofabrication Based on Self-Assembled TZ#(G  
               Alumina Templates 159 hM}rf6B  
               S. Sen and N. A. Kouklin 8!8 yA  
Chapter 6 Nanowire Assembly and Integration 187 nnr g^F  
                Z. Gu and D. H. Gracias #E35%7*  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 P<<?7_ ??  
                 L. Tong and E. Mazur oU/CXz?H  
Chapter 8 Extreme Ultraviolet Lithography 235 )P&>Tc?;z  
                 H. Kinoshita \XDc{c]  
Chapter 9 Electron Projection Lithography 285 "^sh:{  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata SN w3xO!;&  
Chapter 10 Electron Beam Direct Writing 341 U*Q1(C  
                   K. Yamazaki tBR"sBiws  
Chapter 11 Electron Beam Induced Deposition 377 LxD >eA  
                   K. Mitsuishi u,h,;'J  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 fL^+Qb}  
                   P. A. Crozier and C. W. Hagen h)S223[  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 $ = uz  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi B[XV
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Chapter 14 Nano/Microstructuring of Ceramic Surfaces 0 #*M'C#  
                  by Unconventional Lithographic Methods 471 <'s_3AC  
                  R. C. Salvarezza and O. Azzaroni lw/zgR#|  
Chapter 15 Alternative Nanofabrication Approaches Qsv3`c  
f                 or Non-CMOS Applications 499 5R^e  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei &8kc0Z@y  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems 3&H#LGoV$  
                  (NEMS): Emerging Techniques 543 +Fn^@/?yC  
                  K. L. Ekinci and J. Brugger ryhme\%l;f  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享