美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications !)}z{,Jx  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations n2[h`zm1{B  
                for Nanostructure Fabrication Using Scanning @bnw$U`+  
                Probe Microscopy 1 6_tl_O7  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo Q yQ[H  
Chapter 2 Atomic Force Microscope Lithography 33 /Vx EqIK  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 2%H_%Zu9  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, ,hT**(W  
                Sensing, and Modification 65 }R
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                C. Santschi, J. Polesel-Maris, J. Brugger, Sj8fo^K50  
                and H. Heinzelmann "`a,/h'  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered RYl\Q,#  
                Nano-Scale Structures and Devices 127 jz\>VYi(7  
               R. Mehta, J. Lund, and B. A. Parviz f&$$*a  
Chapter 5 Nanofabrication Based on Self-Assembled k6\&[BQs  
               Alumina Templates 159 {?3i^
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               S. Sen and N. A. Kouklin 6&2{V? W3  
Chapter 6 Nanowire Assembly and Integration 187 bp}]'NA  
                Z. Gu and D. H. Gracias <0jM07\<  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 yK_$d0ZGE~  
                 L. Tong and E. Mazur |H5$VSw  
Chapter 8 Extreme Ultraviolet Lithography 235 yv)-QIC3  
                 H. Kinoshita 'P%&*%  
Chapter 9 Electron Projection Lithography 285 vrvi] Y8  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata 0p\Kf(|E*6  
Chapter 10 Electron Beam Direct Writing 341 m YhDi  
                   K. Yamazaki ?]TtUoY=)F  
Chapter 11 Electron Beam Induced Deposition 377 p DU+(A4>  
                   K. Mitsuishi lr -+|>M)  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 _skE\7&>X  
                   P. A. Crozier and C. W. Hagen zYftgH_o  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 i+I1h=  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi J DOs.w  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces f\Q_]%^W  
                  by Unconventional Lithographic Methods 471 v~YGef;D  
                  R. C. Salvarezza and O. Azzaroni d%p{l)Hd  
Chapter 15 Alternative Nanofabrication Approaches Qv8 =CnuOT  
f                 or Non-CMOS Applications 499 "|PX5  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei +NOq>kH@  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems H8Z|gq1r  
                  (NEMS): Emerging Techniques 543 7--E$!9O,  
                  K. L. Ekinci and J. Brugger T[J8zLO  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享

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