美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications ~~[Sz#(  
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目录： tlw$/tMa  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations ~b+TkPU   
                for Nanostructure Fabrication Using Scanning ("{JNA/  
                Probe Microscopy 1 a!MhxM5  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo @OOnO+g  
Chapter 2 Atomic Force Microscope Lithography 33 aC0[OmbG  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park ;D^%)v/i  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, VeO$n*O  
                Sensing, and Modification 65 ]M
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                C. Santschi, J. Polesel-Maris, J. Brugger, _@CY_`a  
                and H. Heinzelmann Fy|tKMhnc  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered \|20E51B[  
                Nano-Scale Structures and Devices 127 SVsLu2tVY  
               R. Mehta, J. Lund, and B. A. Parviz ]>fAV(ix  
Chapter 5 Nanofabrication Based on Self-Assembled tx}}Kd  
               Alumina Templates 159 %4#,y(dO  
               S. Sen and N. A. Kouklin NvH9?Ek"  
Chapter 6 Nanowire Assembly and Integration 187 wjk-$p  
                Z. Gu and D. H. Gracias hzIP ?0^E  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 7.fpGzUM  
                 L. Tong and E. Mazur 4`lt 4L  
Chapter 8 Extreme Ultraviolet Lithography 235 ;K<e]RI;?  
                 H. Kinoshita 5Hvg%g-c  
Chapter 9 Electron Projection Lithography 285 f}q4~NPn-  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata |4uH  
Chapter 10 Electron Beam Direct Writing 341 (lbF/F>v  
                   K. Yamazaki 1@Dp<Q  
Chapter 11 Electron Beam Induced Deposition 377 !g}?x3  
                   K. Mitsuishi tydD~a  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 hS]g^S==2h  
                   P. A. Crozier and C. W. Hagen ~ZeF5  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 mm-!UsT  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi ^)ouL25Z*2  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces 3R(GO.n=]  
                  by Unconventional Lithographic Methods 471 Xd%c00"U  
                  R. C. Salvarezza and O. Azzaroni CJB   
Chapter 15 Alternative Nanofabrication Approaches Gt4| ]  
f                 or Non-CMOS Applications 499 $0WO 4C%M  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei 32!jF}qpD  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems ^'EeJN  
                  (NEMS): Emerging Techniques 543 z@\C/wX  
                  K. L. Ekinci and J. Brugger 5wM*(H^c[  
% 1Y!|306  

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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享