美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications wFD.3!  
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目录： *,(`%b[  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations Wd7*sa3T  
                for Nanostructure Fabrication Using Scanning VC@o]t5  
                Probe Microscopy 1 *QLbrR  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo bFpwq#PDW>  
Chapter 2 Atomic Force Microscope Lithography 33 *\/UT  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park Je/R'QP^8  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, n1QO/1} :  
                Sensing, and Modification 65 nm)F tX|A  
                C. Santschi, J. Polesel-Maris, J. Brugger, >,[(icyzn  
                and H. Heinzelmann D`ZYF)[}J  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered z)ydQw>  
                Nano-Scale Structures and Devices 127 ~HELMS~-  
               R. Mehta, J. Lund, and B. A. Parviz FY'f{gD^  
Chapter 5 Nanofabrication Based on Self-Assembled TCVJ[LbJ  
               Alumina Templates 159 \oi=fu=}*  
               S. Sen and N. A. Kouklin =hA/;  
Chapter 6 Nanowire Assembly and Integration 187 8WAg{lV
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                Z. Gu and D. H. Gracias h:|aQJG5  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 $V[ob   
                 L. Tong and E. Mazur U@9n7F  
Chapter 8 Extreme Ultraviolet Lithography 235 6wGf47  
                 H. Kinoshita *ce h ]v  
Chapter 9 Electron Projection Lithography 285 fE(rDQI  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata j9Lc2'  
Chapter 10 Electron Beam Direct Writing 341 de"*<+   
                   K. Yamazaki qZ4DO*%b3  
Chapter 11 Electron Beam Induced Deposition 377 WPPmh~:  
                   K. Mitsuishi UW\.!TV  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 |')Z;  
                   P. A. Crozier and C. W. Hagen kWgxswl7H  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 ]1klfp,`  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi G,J$lTX  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces n04Zji(F@  
                  by Unconventional Lithographic Methods 471 y'(;!5w  
                  R. C. Salvarezza and O. Azzaroni k}/0B  
Chapter 15 Alternative Nanofabrication Approaches "Li"NxObCA  
f                 or Non-CMOS Applications 499 HH>]"mv  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei uoF9&j5E@Z  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems $Q62 7  
                  (NEMS): Emerging Techniques 543 :B
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                  K. L. Ekinci and J. Brugger #SO9e.yhI  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享