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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
ONpvx5'# *5s*-^'#! 目录:
Yuf+d-% 6+ptL-Zt< 1~E4]Ef:W Chapter 1 Atom, Molecule, and Nanocluster Manipulations
$gYGnh_,Q for Nanostructure Fabrication Using Scanning
vyWx{@ Probe Microscopy 1
37?X@@Z= A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
q^^R|X1 Chapter 2 Atomic Force Microscope Lithography 33
}#E]efjs N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
1/ j>| Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
T1Z*>(M Sensing, and Modification 65
{0fQE@5@ C. Santschi, J. Polesel-Maris, J. Brugger,
wi.E$RckD and H. Heinzelmann
'
i5}`\ Chapter 4 Using Biomolecules for Self-Assembly of Engineered
AEWrrE Nano-Scale Structures and Devices 127
RZq_}-P,.c R. Mehta, J. Lund, and B. A. Parviz
Oi~Dio_? Chapter 5 Nanofabrication Based on Self-Assembled
M
e:l)8+ Alumina Templates 159
QALr S. Sen and N. A. Kouklin
@~7au9.V=X Chapter 6 Nanowire Assembly and Integration 187
ir\)Hz2P Z. Gu and D. H. Gracias
]xb2W~ Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
"^{Hta L. Tong and E. Mazur
T\4>4eX- Chapter 8 Extreme Ultraviolet Lithography 235
:TKx>~` H. Kinoshita
g%^/^<ei Chapter 9 Electron Projection Lithography 285
LB$0'dZU T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
\0;w7tdo Chapter 10 Electron Beam Direct Writing 341
z,dFDl$ K. Yamazaki
In:V.'D/>t Chapter 11 Electron Beam Induced Deposition 377
fn7?g K. Mitsuishi
!P=L0A` Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
n++ak\ P. A. Crozier and C. W. Hagen
8~.8"gQ Chapter 13 Focused Ion Beams and Interaction with Solids 431
>bhF{*t#;y T. Ishitani, T. Ohnishi, and T. Yaguchi
9|@5eN:N Chapter 14 Nano/Microstructuring of Ceramic Surfaces
C~.\2D`zy by Unconventional Lithographic Methods 471
$5\sV4 8f R. C. Salvarezza and O. Azzaroni
oL>o*/ Chapter 15 Alternative Nanofabrication Approaches
2p 7;v7)y f or Non-CMOS Applications 499
7rGp^ C. V. Cojocaru, F. Cicoira, and F. Rosei
\oGU6h< Chapter 16 Nanofabrication of Nanoelectromechanical Systems
9]G~i`QQ (NEMS): Emerging Techniques 543
E/1:4?1 S K. L. Ekinci and J. Brugger
;8e}X6YU 9MQwc [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]