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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
'd&0Js$^ )+"'oY$]} 目录:
oY|,GvCnK Ck@J,~x1D UybW26C;aU Chapter 1 Atom, Molecule, and Nanocluster Manipulations
Cc<,z*T for Nanostructure Fabrication Using Scanning
/K{9OT@> Probe Microscopy 1
V$icWu A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
x^y" < Chapter 2 Atomic Force Microscope Lithography 33
`S.ZS}~!F N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
bY2 C]r(n Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
a9Z%JS] Sensing, and Modification 65
!>`N$-U X C. Santschi, J. Polesel-Maris, J. Brugger,
drd/ jH& and H. Heinzelmann
4)4+M Chapter 4 Using Biomolecules for Self-Assembly of Engineered
^1x*lLf Nano-Scale Structures and Devices 127
UMp/\&0 R. Mehta, J. Lund, and B. A. Parviz
7Wa?$6d Chapter 5 Nanofabrication Based on Self-Assembled
HCJ>X;(`f? Alumina Templates 159
i Q6epg1wB S. Sen and N. A. Kouklin
G,<T/f
.{$ Chapter 6 Nanowire Assembly and Integration 187
za9)Q=6FD Z. Gu and D. H. Gracias
$DC*i-}qFg Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
7GSV L. Tong and E. Mazur
X _G| hx Chapter 8 Extreme Ultraviolet Lithography 235
|R@~-Ht H. Kinoshita
*;U'[H3Q Chapter 9 Electron Projection Lithography 285
+"}=d3E6 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
}Jh: 8BNuP Chapter 10 Electron Beam Direct Writing 341
:@xm-.D K. Yamazaki
M9f?q.Bv Chapter 11 Electron Beam Induced Deposition 377
pdb1GDl0q K. Mitsuishi
-l-E_6|/W Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
T<joRR P. A. Crozier and C. W. Hagen
(j"( Chapter 13 Focused Ion Beams and Interaction with Solids 431
C"qU-&*v T. Ishitani, T. Ohnishi, and T. Yaguchi
q$.{j"cZV Chapter 14 Nano/Microstructuring of Ceramic Surfaces
Op?OruT[ by Unconventional Lithographic Methods 471
w[-Fm+A> R. C. Salvarezza and O. Azzaroni
%tt%`0 Chapter 15 Alternative Nanofabrication Approaches
cx$Gic:4 f or Non-CMOS Applications 499
%F9{EXJy C. V. Cojocaru, F. Cicoira, and F. Rosei
&Q=ZwC7# Chapter 16 Nanofabrication of Nanoelectromechanical Systems
SL&hJs4c' (NEMS): Emerging Techniques 543
C#=bW'C K. L. Ekinci and J. Brugger
";w}3+R c<BO gNr [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]