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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
YQ]H3GA 3-mw-;. 目录:
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0 Chapter 1 Atom, Molecule, and Nanocluster Manipulations
/M3D[aR<d for Nanostructure Fabrication Using Scanning
GwW#Ww;Oc Probe Microscopy 1
pK8nzGQl7 A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
p_z"Uwp Chapter 2 Atomic Force Microscope Lithography 33
-ufmpq. N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
<{) 4gvH Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
MtYP3: Sensing, and Modification 65
nUd\4;J# C. Santschi, J. Polesel-Maris, J. Brugger,
sd[QtK^ and H. Heinzelmann
wFJK!9KA8 Chapter 4 Using Biomolecules for Self-Assembly of Engineered
Agi1r]W Nano-Scale Structures and Devices 127
EORRSP,$2 R. Mehta, J. Lund, and B. A. Parviz
aydal9M Chapter 5 Nanofabrication Based on Self-Assembled
NdNfai Alumina Templates 159
s{k\1P(G} S. Sen and N. A. Kouklin
k_a'a)`$6 Chapter 6 Nanowire Assembly and Integration 187
qXI30Yo#d Z. Gu and D. H. Gracias
J7\q#] ? Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
y[|g!9Rp L. Tong and E. Mazur
?:FotnU*p Chapter 8 Extreme Ultraviolet Lithography 235
JG<3,>@% H. Kinoshita
KB"iF}\P0 Chapter 9 Electron Projection Lithography 285
AfEEYP)N T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
Lq [wabF Chapter 10 Electron Beam Direct Writing 341
s =5H.q%PV K. Yamazaki
iTt=aQjd Chapter 11 Electron Beam Induced Deposition 377
<kSaSW K. Mitsuishi
KNg5Ptk Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
=CVT8(N* P. A. Crozier and C. W. Hagen
J:lwq@u Chapter 13 Focused Ion Beams and Interaction with Solids 431
Dgm%Ng T. Ishitani, T. Ohnishi, and T. Yaguchi
9(l'xu X Chapter 14 Nano/Microstructuring of Ceramic Surfaces
,xz^k/. by Unconventional Lithographic Methods 471
H n!vTB R. C. Salvarezza and O. Azzaroni
m6x. "jG Chapter 15 Alternative Nanofabrication Approaches
Qf|}%}%fp f or Non-CMOS Applications 499
K D-_~uIF C. V. Cojocaru, F. Cicoira, and F. Rosei
7:L~n(QpP Chapter 16 Nanofabrication of Nanoelectromechanical Systems
4sj%: (NEMS): Emerging Techniques 543
.V3Dql@z" K. L. Ekinci and J. Brugger
+r$.v|6 z=p [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]