美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications L=A\ J^%  
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目录： *re 44  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations r
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                for Nanostructure Fabrication Using Scanning L
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                Probe Microscopy 1 $ad&#q7  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo Lt<oi8'N  
Chapter 2 Atomic Force Microscope Lithography 33 EZAm)5:]A  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park )mD\d|7f  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, t[O+B6  
                Sensing, and Modification 65 Z;*`fd?8  
                C. Santschi, J. Polesel-Maris, J. Brugger, >ZCo 8aK  
                and H. Heinzelmann h;Mu[`  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered <q6`~F~|  
                Nano-Scale Structures and Devices 127 [}k|  
               R. Mehta, J. Lund, and B. A. Parviz QT}iaeC1i  
Chapter 5 Nanofabrication Based on Self-Assembled wXCyj+XB*  
               Alumina Templates 159 mTd<2Hy  
               S. Sen and N. A. Kouklin Q;gQfr"c7  
Chapter 6 Nanowire Assembly and Integration 187 ,V2#iY.%}N  
                Z. Gu and D. H. Gracias D0M!"c>\  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 gE=Wcb!  
                 L. Tong and E. Mazur Vu|dV\N0*  
Chapter 8 Extreme Ultraviolet Lithography 235 c,BAa*]K  
                 H. Kinoshita vl~%o@*_  
Chapter 9 Electron Projection Lithography 285 Q
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                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata |0w~P s  
Chapter 10 Electron Beam Direct Writing 341 u[[/w&UV.,  
                   K. Yamazaki h#R&=t1,^  
Chapter 11 Electron Beam Induced Deposition 377 PJwEA  
                   K. Mitsuishi ?'LM7RE$X6  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 $~o3}&az  
                   P. A. Crozier and C. W. Hagen Lw*1 .~  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 +3?`M<L0  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi :|($,3*  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces 0~i qG  
                  by Unconventional Lithographic Methods 471 cUM_ncYOP  
                  R. C. Salvarezza and O. Azzaroni rG5i-'  
Chapter 15 Alternative Nanofabrication Approaches Ph"iX'J  
f                 or Non-CMOS Applications 499 Ltg-w\?]

 
                   C. V. Cojocaru, F. Cicoira, and F. Rosei 5=.7\#D  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems e5qvyUJM  
                  (NEMS): Emerging Techniques 543 u;(K34!)  
                  K. L. Ekinci and J. Brugger _DrnL}9I7  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享