美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications ~sZqa+jB0  
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目录： *>EI2HX  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations |Dl*w/n  
                for Nanostructure Fabrication Using Scanning !S
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                Probe Microscopy 1 |z.Gh1GCy  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo MDMtOfe|  
Chapter 2 Atomic Force Microscope Lithography 33 k)?,xY\AV  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park \;nD)<)J  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, s/r5,IFR  
                Sensing, and Modification 65 \pjRv  
                C. Santschi, J. Polesel-Maris, J. Brugger, Nr>c'TH  
                and H. Heinzelmann r^?)F?n!  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered | \ s2  
                Nano-Scale Structures and Devices 127 ;k9 ?  
               R. Mehta, J. Lund, and B. A. Parviz h$E\2lsE  
Chapter 5 Nanofabrication Based on Self-Assembled kWzuz#  
               Alumina Templates 159 3!i.Fmo  
               S. Sen and N. A. Kouklin KC
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Chapter 6 Nanowire Assembly and Integration 187 k! J4Z${k  
                Z. Gu and D. H. Gracias TYs+XJ'Xj  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 Q%M'[L?[  
                 L. Tong and E. Mazur 1{SrHdD=  
Chapter 8 Extreme Ultraviolet Lithography 235 <_##YSGh,  
                 H. Kinoshita $sA,$x:^xI  
Chapter 9 Electron Projection Lithography 285 ioE66-n  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata w$w>N(e  
Chapter 10 Electron Beam Direct Writing 341 -@EBbM&  
                   K. Yamazaki .8u$z`j  
Chapter 11 Electron Beam Induced Deposition 377 C><<0VhU  
                   K. Mitsuishi oUW)H  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 tIz<+T_  
                   P. A. Crozier and C. W. Hagen \_m\U.*  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 Z!C`f/h9  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi 2ApDpH`fiJ  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces RB S[*D  
                  by Unconventional Lithographic Methods 471 *u|lmALs  
                  R. C. Salvarezza and O. Azzaroni h(C#\{V  
Chapter 15 Alternative Nanofabrication Approaches {-xi0
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f                 or Non-CMOS Applications 499 #rn4$  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei viW~'}^k7  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems 6%\7.h  
                  (NEMS): Emerging Techniques 543 =oL8d6nI  
                  K. L. Ekinci and J. Brugger 4A\BGD*5  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享