美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications K5 5} Wi  
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目录： g&{gD^9)4  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations K~`
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                for Nanostructure Fabrication Using Scanning JX2mTQ  
                Probe Microscopy 1 BjH~Ml2  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo 4kWg>
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Chapter 2 Atomic Force Microscope Lithography 33 cSY2#u|v  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park Ko1AaX(I'+  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, t9?R/:B%  
                Sensing, and Modification 65 ~!8%_J_  
                C. Santschi, J. Polesel-Maris, J. Brugger, Tg3:VD  
                and H. Heinzelmann 8]sTX9  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered I++W0wa.n  
                Nano-Scale Structures and Devices 127 U(rr vNt:t  
               R. Mehta, J. Lund, and B. A. Parviz ]cx"  
Chapter 5 Nanofabrication Based on Self-Assembled //#xK D  
               Alumina Templates 159 J!=](s5|
  
               S. Sen and N. A. Kouklin Gojl0?  
Chapter 6 Nanowire Assembly and Integration 187 ^t\kLU  
                Z. Gu and D. H. Gracias M3DxapG  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 3C>2x(]M  
                 L. Tong and E. Mazur -s9Y(>  
Chapter 8 Extreme Ultraviolet Lithography 235 i!CKA}",  
                 H. Kinoshita >v^2^$^u  
Chapter 9 Electron Projection Lithography 285 XD;15a  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata lAdOC5+JX  
Chapter 10 Electron Beam Direct Writing 341 cEDDO&u  
                   K. Yamazaki @J~lV\  
Chapter 11 Electron Beam Induced Deposition 377 ]NaMZ  
                   K. Mitsuishi iifc;62  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 :'5G_4y)h  
                   P. A. Crozier and C. W. Hagen ?D RFsA  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 F3kC"H  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi UI|v/(_^F  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces 2uvQf&,  
                  by Unconventional Lithographic Methods 471 z1B
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                  R. C. Salvarezza and O. Azzaroni Gl?P.BCW.&  
Chapter 15 Alternative Nanofabrication Approaches X@6zI-Y%  
f                 or Non-CMOS Applications 499 {toyQ)C7  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei el <<D  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems /2g)Z!&+L  
                  (NEMS): Emerging Techniques 543 [<#<:h
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                  K. L. Ekinci and J. Brugger uS! 35{.>  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享