美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications ]|
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目录: Ue! Q. "
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations 8t[t{"
for Nanostructure Fabrication Using Scanning ,]q%/yxi
Probe Microscopy 1 M5O'=\+,F
A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo K(3&27sGN
Chapter 2 Atomic Force Microscope Lithography 33 :\bfGSD/gd
N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park q~h:<,5
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, )E-E0Hl>7
Sensing, and Modification 65 ;($1Z7j+
C. Santschi, J. Polesel-Maris, J. Brugger, I4~^TrznRa
and H. Heinzelmann <T4(H[9B
Chapter 4 Using Biomolecules for Self-Assembly of Engineered 4swKjN
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Nano-Scale Structures and Devices 127 DqlK.
R. Mehta, J. Lund, and B. A. Parviz s OQcx\dK
Chapter 5 Nanofabrication Based on Self-Assembled RH~sbnZ)F
Alumina Templates 159 o(Kcs-W2
S. Sen and N. A. Kouklin H+`*Y<F@
Chapter 6 Nanowire Assembly and Integration 187 u`6/I#q`
Z. Gu and D. H. Gracias G"> 0]LQ
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 T V;BNCg
L. Tong and E. Mazur GoD ?K C
Chapter 8 Extreme Ultraviolet Lithography 235 9U'[88
H. Kinoshita 85hQk+Bu4
Chapter 9 Electron Projection Lithography 285 &k+*3.X
T. Miura, K. Suzuki, H. Arimoto, and S. Kawata 4+Ti7p06&\
Chapter 10 Electron Beam Direct Writing 341 bKUyBk,\#
K. Yamazaki )&z4_l8`=
Chapter 11 Electron Beam Induced Deposition 377 N7pt:G2~%
K. Mitsuishi d$[8w/5Of
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 =ybGb7?
P. A. Crozier and C. W. Hagen w[sR7T9*
Chapter 13 Focused Ion Beams and Interaction with Solids 431 Fr;lG
T. Ishitani, T. Ohnishi, and T. Yaguchi _:%U_U
Chapter 14 Nano/Microstructuring of Ceramic Surfaces Qi:j)uDW
by Unconventional Lithographic Methods 471 Snx<