美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications r2T?LO0N{  
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目录： ucj)t7O   
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations ![5<\  
                for Nanostructure Fabrication Using Scanning 8mA6l0  
                Probe Microscopy 1 |Z;wk&  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo JMOP/]%D  
Chapter 2 Atomic Force Microscope Lithography 33 z1+rz%  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park nRQIrUNq  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, wc%  
                Sensing, and Modification 65 P&aH6*p1  
                C. Santschi, J. Polesel-Maris, J. Brugger, *:.0c  
                and H. Heinzelmann ke>\.|HT}  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered bT-G<h*M  
                Nano-Scale Structures and Devices 127 lSyp k-c  
               R. Mehta, J. Lund, and B. A. Parviz zs"AYxr  
Chapter 5 Nanofabrication Based on Self-Assembled +>qBK}`  
               Alumina Templates 159 =zA=D.D2  
               S. Sen and N. A. Kouklin |->y'V  
Chapter 6 Nanowire Assembly and Integration 187 ~+7yi4(i  
                Z. Gu and D. H. Gracias ~v>w%]  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 i`]M2Q   
                 L. Tong and E. Mazur ,.FTw,<  
Chapter 8 Extreme Ultraviolet Lithography 235 wHZ!t,g  
                 H. Kinoshita r-YQsu&  
Chapter 9 Electron Projection Lithography 285 TjI NxP-O  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata 0HD1Ob^@  
Chapter 10 Electron Beam Direct Writing 341 eZ
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                   K. Yamazaki iL 4SL}P  
Chapter 11 Electron Beam Induced Deposition 377 xYu~}kMu  
                   K. Mitsuishi 3}:pD]`h  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 om_&|9B)  
                   P. A. Crozier and C. W. Hagen w78Ius,  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 paBGJ~{=  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi 1]>KuXd r  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces Bh' vr3|  
                  by Unconventional Lithographic Methods 471 oh@r0`J]x  
                  R. C. Salvarezza and O. Azzaroni nnGA_7-t  
Chapter 15 Alternative Nanofabrication Approaches V2FE|+R%g  
f                 or Non-CMOS Applications 499 wCt+{Y3T  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei qfYb\b
 
Chapter 16 Nanofabrication of Nanoelectromechanical Systems Mqh~5NM  
                  (NEMS): Emerging Techniques 543 Ee|+uQ981>  
                  K. L. Ekinci and J. Brugger $g$`fR)  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享