美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications \A)Pcc}7  
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目录：
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations GLX{EG9Z  
                for Nanostructure Fabrication Using Scanning IAmZ_2  
                Probe Microscopy 1 :8HVq*itS  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo Od:-fw  
Chapter 2 Atomic Force Microscope Lithography 33 c((bUjS'=Y  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park dCo3VF"u  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, Dwr 9}Z-]  
                Sensing, and Modification 65 *)Cr1d k  
                C. Santschi, J. Polesel-Maris, J. Brugger, !IA\c(c^  
                and H. Heinzelmann ei{tW3 H$  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered /+8VW;4|I  
                Nano-Scale Structures and Devices 127 cbs ;  
               R. Mehta, J. Lund, and B. A. Parviz '@Yp@ _  
Chapter 5 Nanofabrication Based on Self-Assembled HFlExau  
               Alumina Templates 159 Tku6X/LF  
               S. Sen and N. A. Kouklin WW>m`RU`  
Chapter 6 Nanowire Assembly and Integration 187 V!>j:"  
                Z. Gu and D. H. Gracias ]>Gi_20*
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Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 1[$zdv{A  
                 L. Tong and E. Mazur Px9 K  
Chapter 8 Extreme Ultraviolet Lithography 235 3^xq+{\)  
                 H. Kinoshita w7&.Uqjf  
Chapter 9 Electron Projection Lithography 285 O0s!3hKu  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata = ^Vp \  
Chapter 10 Electron Beam Direct Writing 341 iz{TSU  
                   K. Yamazaki os&FrtDg  
Chapter 11 Electron Beam Induced Deposition 377 . UH'U\M  
                   K. Mitsuishi DEt!/a{X  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 .N@+Ms3  
                   P. A. Crozier and C. W. Hagen 9%"`9j~H>  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 .\&k]}0qA?  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi bN03}&I  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces Bq1}"092  
                  by Unconventional Lithographic Methods 471 <RZq
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                  R. C. Salvarezza and O. Azzaroni xUCq%r_  
Chapter 15 Alternative Nanofabrication Approaches ^8J`*R8CL  
f                 or Non-CMOS Applications 499 '$EyVu
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                   C. V. Cojocaru, F. Cicoira, and F. Rosei /&_q"y9  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems zSU,le  
                  (NEMS): Emerging Techniques 543 R/*"N'nH-%  
                  K. L. Ekinci and J. Brugger ';My"/ Z-  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享