美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications m8j#{[NE  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations @%5F^Vbd  
                for Nanostructure Fabrication Using Scanning Qg8eq_m(  
                Probe Microscopy 1 ~jrU#<'G9  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo k?@W/}Iv9  
Chapter 2 Atomic Force Microscope Lithography 33 v2dSC(hRZ  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park L5
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Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, dsft=t8s  
                Sensing, and Modification 65 ^,\se9=(  
                C. Santschi, J. Polesel-Maris, J. Brugger, &<;nl^  
                and H. Heinzelmann 7C6BZ$(  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered 4 9+}OIX  
                Nano-Scale Structures and Devices 127 uma9yIk  
               R. Mehta, J. Lund, and B. A. Parviz G#=b6DB  
Chapter 5 Nanofabrication Based on Self-Assembled :d/:Ga5v!  
               Alumina Templates 159 ^
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               S. Sen and N. A. Kouklin ,'@ISCK^  
Chapter 6 Nanowire Assembly and Integration 187 u>-uRz<)t  
                Z. Gu and D. H. Gracias ?\ i,JJO  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 ;:K?7wfXn  
                 L. Tong and E. Mazur )-7(Hv
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Chapter 8 Extreme Ultraviolet Lithography 235 Ub-k<]yZ  
                 H. Kinoshita m$e@<~To  
Chapter 9 Electron Projection Lithography 285 TTjjyZ@  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata N6 Cc%,  
Chapter 10 Electron Beam Direct Writing 341 =?QQb>  
                   K. Yamazaki ~o\]K  
Chapter 11 Electron Beam Induced Deposition 377 r'}k`A5>  
                   K. Mitsuishi #p^pvdvh3  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 6-E4)0\  
                   P. A. Crozier and C. W. Hagen u=?P*Y/|W  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 JZ*?1S>  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi )I1V2k$n  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces vskM;  
                  by Unconventional Lithographic Methods 471 Zi'8~iEH  
                  R. C. Salvarezza and O. Azzaroni 75cr!+  
Chapter 15 Alternative Nanofabrication Approaches enO=-#  
f                 or Non-CMOS Applications 499 7B>cmi  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei I5 7<0  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems [;\< 2=H  
                  (NEMS): Emerging Techniques 543 S}oF7;'Ga  
                  K. L. Ekinci and J. Brugger W!Os ci  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享