美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications /f@VRME  
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目录： 2>Bx/QF@<  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations &=oW=g2  
                for Nanostructure Fabrication Using Scanning ;cgc\xm>  
                Probe Microscopy 1 ![YLY&}s  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo 8.3888  
Chapter 2 Atomic Force Microscope Lithography 33 gDU~hv  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 'yuM=Pb  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, L s6P<"V  
                Sensing, and Modification 65 5}@6euT5$  
                C. Santschi, J. Polesel-Maris, J. Brugger, >DeG//rv
 
                and H. Heinzelmann `OO=^.-u  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered {1,]8!HBJ  
                Nano-Scale Structures and Devices 127 FT
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               R. Mehta, J. Lund, and B. A. Parviz |-GmWSK_  
Chapter 5 Nanofabrication Based on Self-Assembled :SjTkfU  
               Alumina Templates 159 P#H|at  
               S. Sen and N. A. Kouklin I?nj_ as  
Chapter 6 Nanowire Assembly and Integration 187 i>#[*.|P  
                Z. Gu and D. H. Gracias
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Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 m22M[L(q  
                 L. Tong and E. Mazur , v,mBYaU  
Chapter 8 Extreme Ultraviolet Lithography 235 O)NEt  
                 H. Kinoshita (,<&H;,8  
Chapter 9 Electron Projection Lithography 285 !4cO]wh5  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata *F|j%]k~  
Chapter 10 Electron Beam Direct Writing 341 lX$6U|!  
                   K. Yamazaki ICwhqH&  
Chapter 11 Electron Beam Induced Deposition 377 m2{3j[  
                   K. Mitsuishi hyqsMkW|  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 U9GmkXRix  
                   P. A. Crozier and C. W. Hagen  yG -1g0  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 __<u!;f  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi SEsc"l8  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces *ILx-D5qr  
                  by Unconventional Lithographic Methods 471 wN1%;~?7  
                  R. C. Salvarezza and O. Azzaroni p""#Gbwj  
Chapter 15 Alternative Nanofabrication Approaches JbN@AX:%  
f                 or Non-CMOS Applications 499 ^c",!Lp}{  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei AW3\>WC  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems e
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                  (NEMS): Emerging Techniques 543 Qwl=/<p1  
                  K. L. Ekinci and J. Brugger Ba
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享