美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications giJyMd}x  
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目录： Z+7S,M  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations zy;w07-)  
                for Nanostructure Fabrication Using Scanning v}D!  
                Probe Microscopy 1 J< M;vB)  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo #Qd3
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Chapter 2 Atomic Force Microscope Lithography 33 0n=E.qZ9c  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park "FS.&&1(  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, {NDP}UATw  
                Sensing, and Modification 65 _"V0vV  
                C. Santschi, J. Polesel-Maris, J. Brugger, >YhqL62!a  
                and H. Heinzelmann Pc1N~?}.  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered *JXJ 
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                Nano-Scale Structures and Devices 127 8ipLq`)  
               R. Mehta, J. Lund, and B. A. Parviz hBu=40K  
Chapter 5 Nanofabrication Based on Self-Assembled !6C d.fpWL  
               Alumina Templates 159 i-b7  
               S. Sen and N. A. Kouklin I),8EEf\  
Chapter 6 Nanowire Assembly and Integration 187 ZeZwzH)BD  
                Z. Gu and D. H. Gracias 8{u01\0}  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 -AQX-[
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                 L. Tong and E. Mazur A[bxxQSP\H  
Chapter 8 Extreme Ultraviolet Lithography 235 gId+hxFa:r  
                 H. Kinoshita V 
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Chapter 9 Electron Projection Lithography 285 _I!&w!3oM  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata *Rd&4XG  
Chapter 10 Electron Beam Direct Writing 341 6 -}gqkR  
                   K. Yamazaki DM95Il[/  
Chapter 11 Electron Beam Induced Deposition 377 nj$K4_  
                   K. Mitsuishi -C+vmY*@  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 qT4s*kqr  
                   P. A. Crozier and C. W. Hagen Y)`+u#` R  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 ?Dm&A$r  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi yNL71>w4  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces <9~qAq7^  
                  by Unconventional Lithographic Methods 471 b'YbHUyu  
                  R. C. Salvarezza and O. Azzaroni L?fv5 S3  
Chapter 15 Alternative Nanofabrication Approaches s-B\8&^C  
f                 or Non-CMOS Applications 499 Xk$lQMwZ  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei 9@06]EI_  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems G
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                  (NEMS): Emerging Techniques 543 A-FwNo2"%  
                  K. L. Ekinci and J. Brugger UsTPNQj  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享