美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications AAdD\%JZ  
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目录： <Q\H
  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations s?~8O|Mu'  
                for Nanostructure Fabrication Using Scanning @>gD1Q7v b  
                Probe Microscopy 1 widI s[ )  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo T:dX4=z  
Chapter 2 Atomic Force Microscope Lithography 33 0K`ZX&K?W  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park Y]M^n&f
 
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, i)GeX:  
                Sensing, and Modification 65 p5D5%B/  
                C. Santschi, J. Polesel-Maris, J. Brugger, rS
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                and H. Heinzelmann CF,8f$:2  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered s&Z35IM8|  
                Nano-Scale Structures and Devices 127 P7cge  
               R. Mehta, J. Lund, and B. A. Parviz K:Mujx:  
Chapter 5 Nanofabrication Based on Self-Assembled d"LoK,p#  
               Alumina Templates 159 p"g1V7B  
               S. Sen and N. A. Kouklin b-,]A2.  
Chapter 6 Nanowire Assembly and Integration 187 [}jj<!9A_;  
                Z. Gu and D. H. Gracias y4 dp1<t%  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 wK2yt?  
                 L. Tong and E. Mazur V^9$t/c&  
Chapter 8 Extreme Ultraviolet Lithography 235 -MQZiq7H4  
                 H. Kinoshita xcAF  
Chapter 9 Electron Projection Lithography 285 D
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                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata 0>I]=M]@  
Chapter 10 Electron Beam Direct Writing 341 Wk0>1 rlu  
                   K. Yamazaki 9"[!EKW  
Chapter 11 Electron Beam Induced Deposition 377 v&k>0lV,^  
                   K. Mitsuishi o(?VX`2"  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 >cBGw'S  
                   P. A. Crozier and C. W. Hagen m]{<Ux  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 97['VOh0  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi 9k714bnMLX  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces E_ o{c5N  
                  by Unconventional Lithographic Methods 471 i#CaKS  
                  R. C. Salvarezza and O. Azzaroni j` [#Ij  
Chapter 15 Alternative Nanofabrication Approaches L"Qh_+  
f                 or Non-CMOS Applications 499 E1$Hu
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                   C. V. Cojocaru, F. Cicoira, and F. Rosei ;,Of\Efc|  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems ~ >&I^4  
                  (NEMS): Emerging Techniques 543 # q0Ub-  
                  K. L. Ekinci and J. Brugger MLkL.1eGSb  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享