“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 hPG@iX|V
--------------------------------------------------- +eH`mI0f
真空术语 q&?hwX
Z7
G;wh).jG5
1.标准环境条件 standard ambient condition:
)
] Ro
2.气体的标准状态 standard reference conditions forgases: s.;'-oA
3.压力(压强)p pressure: _!,2"dS
4.帕斯卡Pa pascal: 9SA %'
5.托Torr torr: N\. g+ W
6.标准大气压atm standard atmosphere: XA>uCJf
7.毫巴mbar millibar: KTmwkZcfYD
8.分压力 partial pressure: SD%3B!cpX
9.全压力 total pressure: . bUmT !
10.真空 vacuum: lg
)xQV
11.真空度 degree of vacuum: ~(tt.l#
12.真空区域 ranges of vacuum: 2g5 4<G*e
13.气体 gas: ARnq~E@1
14.非可凝气体 non-condensable gas: ,+h<qBsV@
15.蒸汽vapor: I
H#CaD
16.饱和蒸汽压saturation vapor pressure: v)|a}5={
17.饱和度degree of saturation: reYIF*
18.饱和蒸汽saturated vapor: <Pe'&u
19.未饱和蒸汽unsaturated vapor: 6?.S-.Mr
20.分子数密度n,m-3 number density of molecules: ?G!p4u?C
21.平均自由程ι、λ,m mean free path: dG~U3\!
22.碰撞率ψ collision rate: VFnxj52<
23.体积碰撞率χ volume collision rate: N`H`\+
24.气体量G quantity of gas: eS4t0`kP
25.气体的扩散 diffusion of gas: (yuOY/~k/
26.扩散系数D diffusion coefficient; diffusivity: L">jSZW[[
27.粘滞流 viscous flow: z.)*/HGJm
28.粘滞系数η viscous factor: !
,H6.IH;S
29.泊肖叶流 poiseuille flow: *M`,#
30.中间流 intermediate flow: r+#g
31.分子流 molecular flow: IS[q'Cv*
32克努曾数 number of knudsen: G#NbLj`h
33.分子泻流 molecular effusion; effusive flow: ';.y`{/
34.流逸 transpiration: lF46W
35.热流逸 thermal transpiration: &"A:_5AU
36.分子流率qN molecular flow rate; molecular flux: "9hD4R
37.分子流率密度 molecular flow rate density; density of molecular flux: y!S:d
38.质量流率qm mass flow rare: L:@COy
39.流量qG throughput of gas: k'e1ZAn
40.体积流率qV volume flow rate: H0lW gJmi|
41.摩尔流率qυ molar flow rate: YB)I%5d;{
42.麦克斯韦速度分布 maxwellian velocity distribution: kDRxu!/
43.传输几率Pc transmission probability: l$HBYA\Qh
44.分子流导CN,UN molecular conductance: q`z1ht
nf
45.流导C,U conductance: #ifjQ7(:
46.固有流导Ci,Ui intrinsic conductance: >XuPg(Ow
47.流阻W resistance: gth_Sz5!#
48.吸附 sorption: `)w=@9B)"
49.表面吸附 adsorption: '< >Q20
50.物理吸附physisorption: @'hkU$N)
51.化学吸附 chemisorption: 9-1'jNV
52.吸收absorption: E"/k"1@
53.适应系数α accommodation factor: 3FO-9H
54.入射率υ impingement rate: /yUKUXi
55.凝结率condensation rate: YReI|{O$c
56.粘着率 sticking rate: |?f~T"|>
57.粘着几率Ps sticking probability: rt)[}+ox
58.滞留时间τ residence time: ?wIEXKI
59.迁移 migration: <+%y
60.解吸 desorption: C\{hN
61.去气 degassing: n1R{[\ >1
62.放气 outgassing: :y{@=E=XSC
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: 0R]'HA>
64.蒸发率 evaporation rate: y6G6wk;
65.渗透 permeation: c5KciTD^
66.渗透率φ permeability: ,]9p&xu
67.渗透系数P permeability coefficient ^foCcO
2. 1.真空泵 vacuum pumps $|!3ks
1-1.容积真空泵 positive displacement pump: 6Rg>h
⑴.气镇真空泵 gas ballast vacuum pump: .K#'
Fec
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: "18cD5-#
⑶.干封真空泵 dry-sealed vacuum pump: 6*|EB|%n
⑷.往复真空泵 piston vacuum pump: mv$gL
⑸.液环真空泵 liquid ring vacuum pump: /6 x[C
⑹.旋片真空泵 sliding vane rotary vacuum pump: {=3'H?$
⑺.定片真空泵 rotary piston vacuum pump: Ne1W!0YLK
⑻.滑阀真空泵 rotary plunger vacuum pump: r=RiuxxTq
⑼.余摆线真空泵 trochoidal vacuum pump: #&K}w0}k
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: Fs=E8' b
⑾.罗茨真空泵 roots vacuum pump: l
u{6
1-2.动量传输泵 kinetic vacuum pump: ?4W6TSW-'
⑴.牵引分子泵molecular drag pump: CzDg?w b
⑵.涡轮分子泵turbo molecular pump: n5fc_N/8O=
⑶.喷射真空泵ejector vacuum pump: 7s0y.i~
⑷.液体喷射真空泵liquid jet vacuum pump: ^8?px&B y:
⑸.气体喷射真空泵gas jet vacuum pump: NVf_#p"h
⑹.蒸汽喷射真空泵vapor jet vacuum pump : $c+:dO|Fb
⑺.扩散泵diffusion pump : '8@4FXK
⑻.自净化扩散泵self purifying diffusion pump: Mt~2&$>
⑼.分馏扩散泵 fractionating diffusion pump : )g U#[}6H
⑽.扩散喷射泵diffusion ejector pump : mD?={*7%
⑾.离子传输泵ion transfer pump: >pq=5Ha&
1-3.捕集真空泵 entrapment vacuum pump: qyY/:&E, Z
⑴吸附泵adsorption pump: IFF1wfC
⑵.吸气剂泵 getter pump: cj#.Oaeq*
⑶.升华(蒸发)泵 sublimation (evaporation)pump : [4PiQyr
⑷.吸气剂离子泵getter ion pump: m'ZxmsFo
⑸.蒸发离子泵 evaporation ion pump: zItGoJu
⑹.溅射离子泵sputter ion pump: [zCKJR
⑺.低温泵cryopump: G*zhy!P
UH5A;SrTqR
2.真空泵零部件 rPifiLl A>
2-1.泵壳 pump case: ]qk`Yi
2-2.入口 inlet: JY D\VaW
2-3.出口outlet: bWZzb&
2-4.旋片(滑片、滑阀)vane; blade : uxW<Eh4H*
2-5.排气阀discharge valve: i$!K{H1{9
2-6.气镇阀gas ballast valve: 6D*x5L-1o
2-7.膨胀室expansion chamber: Fj&8wZ)v)
2-8.压缩室compression chamber: h{ EnS5~
2-9.真空泵油 vacuum pump oil: 3X`N~_+
2-10.泵液 pump fluid: +\cG{n*
2-11.喷嘴 nozzle: q-+_Y `_\
2-13.喷嘴扩张率nozzle expansion rate: 5N2`e3:I
2-14.喷嘴间隙面积 nozzle clearance area : {^R"V ,)
2-15.喷嘴间隙nozzle clearance: PiNf;b^9
2-16.射流jet: ? y[i6yN9
2-17.扩散器diffuser: ng[LSB*57Y
2-18.扩散器喉部diffuser thoat:
o4B%TW
2-19.蒸汽导管vapor tube(pipe;chimney): ipRH.1=
2-20.喷嘴组件nozzle assembly: *Oh]I|?
2-21.下裙skirt: z&.F YGq}
lBG"COu
3.附件 ,@8*c0Y~<!
3-1阱trap: &&sm7F%
⑴.冷阱 cold trap:
X;dUlSi
⑵.吸附阱sorption trap: )u=a+T
⑶.离子阱ion trap: (^)(#CxO
⑷.冷冻升华阱 cryosublimation trap: msZ3%L
3-2.挡板baffle: Z4T{CwD`D
3-3.油分离器oil separator: A] f^9F@
3-4.油净化器oil purifier: 6k ]+DbT
3-5.冷凝器condenser: .DhB4v&
-JdNA2P
4.泵按工作分类 M{XBmDfN
4-1.主泵main pump: {"*gX&;~
4-2.粗抽泵roughing vacuum pump: @u-CR8^
4-3.前级真空泵backing vacuum pump: w.-J2%J
4-4.粗(低)真空泵 roughing(low)vacuum pump: TJ0;xn6o
4-5.维持真空泵holding vacuum pump: U~8, N[
4-6.高真空泵high vacuum pump: R'B-$:u
4-7.超高真空泵ultra-high vacuum pump: ~HUO$*U4<
4-8.增压真空泵booster vacuum pump: zi+NQOhR
G,@Jo[e
5.真空泵特性 xGw|@d
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: SJ&+"S&
5-2.真空泵的抽气量Q throughput of vacuum pump:。 AaDMX,
5-3.起动压力starting pressure: (U|WP%IM'
5-4.前级压力 backing pressure : AZbFj-^4
5-5.临界前级压力 critical backing pressure: G;^,T/q47
5-6.最大前级压力maximum backing pressure: xL!@$;J
5-7.最大工作压力maximum working pressure: @F!oRm5
5-8.真空泵的极限压力ultimate pressure of a pump: 6LzN#g
5-9.压缩比compression ratio: i[n3ILn
5-10.何氏系数Ho coefficient: WWVQJ{,}
5-11.抽速系数speed factor: yOm#c>X
5-12.气体的反扩散back-diffusion of gas: N/8B@}@n
5-13.泵液返流back-streaming of pump fluid: G~zP&9N|
5-14.返流率back-streaming rate "0?"
E\
5-15.返迁移back-migration: T$o;PJc
5-16.爆腾bumping: n,b6|Y0
5-17.水蒸气允许量qm water vapor tolerable load:
75T+6u
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: f/^T:F6
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: i [2bz+Z?
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump d{c06(#_
3. 1.一般术语 TA!6|)BUW
1-1.压力计pressure gauge: 7_ 5-gtD
1-2.真空计vacuum gauge: 'LLpP#(
⑴.规头(规管)gauge head: `_<O_
⑵.裸规nude gauge : m/aA
q8
⑶.真空计控制单元gauge control unit : n6#z{,W<3
⑷.真空计指示单元gauge indicating unit : E-HK=D&W/
G8Zl[8
2.真空计一般分类 E.^F:$2
2-1.压差式真空计differential vacuum gauge: U{8x.CJ]
2-2.绝对真空计 absolute vacuum gauge: +qM2&M
2-3.全压真空计total pressure vacuum gauge: $`"$ZI6[
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: O|0,=
5
2-5.相对真空计relative vacuum gauge : 6G>loNM^
YZ/2:[b
3.真空计特性 Ihx[S!:
3-1.真空计测量范围pressure range of vacuum gauge: Gs(;&fw
3-2.灵敏度系数sensitivity coefficient: Y?JB%%WWI
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): zB#.EW
3-5.规管光电流photon current of vacuum gauge head: 'OsRQ)E
3-6.等效氮压力equivalent nitrogen pressure : s#)0- Zj
3-7.X射线极限值 X-ray limit: &