“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 <KJ/<0l
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真空术语 LHyB3V
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1.标准环境条件 standard ambient condition: O24m;oHM
2.气体的标准状态 standard reference conditions forgases: q?Cnav`DY
3.压力(压强)p pressure: %7QV&[4!
4.帕斯卡Pa pascal: imVo<Je7z(
5.托Torr torr: @tF\p
6.标准大气压atm standard atmosphere: <NHH^M\N
7.毫巴mbar millibar: Tg7an&#
8.分压力 partial pressure: k}S :RK
9.全压力 total pressure: Vo4,@scG
10.真空 vacuum: u/UrAqw
11.真空度 degree of vacuum: Juo^ ,
12.真空区域 ranges of vacuum: [Hx0`Nc K
13.气体 gas: xv46r=>
14.非可凝气体 non-condensable gas: bAdn &
15.蒸汽vapor: .7O*pJ2(H
16.饱和蒸汽压saturation vapor pressure: f<-Jg
17.饱和度degree of saturation: LmRy1T,act
18.饱和蒸汽saturated vapor: pk>^?MO
19.未饱和蒸汽unsaturated vapor: PG2: ~$L0
20.分子数密度n,m-3 number density of molecules:
mR!1DQ.\<
21.平均自由程ι、λ,m mean free path: Plc-4y1
22.碰撞率ψ collision rate: )tG\vk=@
23.体积碰撞率χ volume collision rate: +|*IZ:w)
24.气体量G quantity of gas: 8aZ=?_gvT
25.气体的扩散 diffusion of gas: 9/9j+5}+
26.扩散系数D diffusion coefficient; diffusivity: pD(j'[
27.粘滞流 viscous flow: $5>e
28.粘滞系数η viscous factor: n*o-Lo+Fe.
29.泊肖叶流 poiseuille flow: -Mip,EO
30.中间流 intermediate flow: 4d"r^y'
31.分子流 molecular flow: /pm]BC
32克努曾数 number of knudsen: \TIT:1
33.分子泻流 molecular effusion; effusive flow: }#3V+X
34.流逸 transpiration: 5CuuG<0
35.热流逸 thermal transpiration: /Jta^Bj
36.分子流率qN molecular flow rate; molecular flux: uMUBh 80,L
37.分子流率密度 molecular flow rate density; density of molecular flux: lVd^
^T*fh
38.质量流率qm mass flow rare: rUTcpGH
39.流量qG throughput of gas: mD/9J5:
40.体积流率qV volume flow rate: 'Jiw@t<o3`
41.摩尔流率qυ molar flow rate: =pr`'
42.麦克斯韦速度分布 maxwellian velocity distribution: q$p%ZefZ
43.传输几率Pc transmission probability: Qd)q([
44.分子流导CN,UN molecular conductance: oVnvO iAc
45.流导C,U conductance: (DJ"WG
46.固有流导Ci,Ui intrinsic conductance: \$R_YKGf1G
47.流阻W resistance: bw(a6qKK
48.吸附 sorption: +00b)TF
49.表面吸附 adsorption: :v0U|\j8/V
50.物理吸附physisorption: ,ZaRy$?
51.化学吸附 chemisorption: s:?SF.
52.吸收absorption: H-WJp<_
53.适应系数α accommodation factor: `-.%^eIp
54.入射率υ impingement rate: ?U%QG5/>
55.凝结率condensation rate: ^/)^7\@
56.粘着率 sticking rate: ~Io7]
57.粘着几率Ps sticking probability: Ki4r<>\l{H
58.滞留时间τ residence time: ()2I#
59.迁移 migration: ^"2i
60.解吸 desorption: v5/~-uRL%
61.去气 degassing: ,%6P0#-
62.放气 outgassing: ;m0~L=w
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: -O1>|y2rU
64.蒸发率 evaporation rate: ng[Ar`
65.渗透 permeation: vhe>)h*B
66.渗透率φ permeability: Az9?Ra;U
67.渗透系数P permeability coefficient mGtdO/C#B
2. 1.真空泵 vacuum pumps I*o()
1-1.容积真空泵 positive displacement pump: \jh'9\
⑴.气镇真空泵 gas ballast vacuum pump: &[_g6OL
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: Hek*R?M|
⑶.干封真空泵 dry-sealed vacuum pump: !-ok"k0,u
⑷.往复真空泵 piston vacuum pump: eS{!)j_^
⑸.液环真空泵 liquid ring vacuum pump: @u.58H& }R
⑹.旋片真空泵 sliding vane rotary vacuum pump: b v G/|U
⑺.定片真空泵 rotary piston vacuum pump: O80<Z#%j`
⑻.滑阀真空泵 rotary plunger vacuum pump: ^b/ Z)3
⑼.余摆线真空泵 trochoidal vacuum pump: YO#M/%^j
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: G(Lzf(
⑾.罗茨真空泵 roots vacuum pump: ?*2CpM&l
1-2.动量传输泵 kinetic vacuum pump: 2I%MAb&1@
⑴.牵引分子泵molecular drag pump: J{'>uD.@
⑵.涡轮分子泵turbo molecular pump: ht7l- AK
⑶.喷射真空泵ejector vacuum pump: a<@1-j<
⑷.液体喷射真空泵liquid jet vacuum pump: ;ZH3{
⑸.气体喷射真空泵gas jet vacuum pump: wE[]6\_x1
⑹.蒸汽喷射真空泵vapor jet vacuum pump : lAi6sPG)0
⑺.扩散泵diffusion pump : gaQdG=G8$
⑻.自净化扩散泵self purifying diffusion pump: Fa?~0H/DL
⑼.分馏扩散泵 fractionating diffusion pump : o%v0h~tn
⑽.扩散喷射泵diffusion ejector pump : j`oy`78O
⑾.离子传输泵ion transfer pump: T3~k>"W
1-3.捕集真空泵 entrapment vacuum pump: ~kQA7;`j$
⑴吸附泵adsorption pump: !5.8]v
⑵.吸气剂泵 getter pump: >go,K{cK6
⑶.升华(蒸发)泵 sublimation (evaporation)pump : 4y)P>c
⑷.吸气剂离子泵getter ion pump: --PtZ]Z
⑸.蒸发离子泵 evaporation ion pump: prYs
$j
⑹.溅射离子泵sputter ion pump: !HrKXy0{
⑺.低温泵cryopump: [OM7g'?S0
I2TaT(e\
2.真空泵零部件 +Fuqchjq
2-1.泵壳 pump case: JM=JH
51`
2-2.入口 inlet: 8s"%u )
2-3.出口outlet: m4aB*6<lq
2-4.旋片(滑片、滑阀)vane; blade : QFw +cy
2-5.排气阀discharge valve: O/,aJCe
2-6.气镇阀gas ballast valve: q
]M+/sl
2-7.膨胀室expansion chamber: QOjqQfmM;
2-8.压缩室compression chamber: L0*nm.1X
2-9.真空泵油 vacuum pump oil: |s"nM<ZNZ
2-10.泵液 pump fluid: plUZ"Tr
2-11.喷嘴 nozzle: b6}H$Sx~
2-13.喷嘴扩张率nozzle expansion rate: ?kWC}k{
2-14.喷嘴间隙面积 nozzle clearance area : HGXt
2-15.喷嘴间隙nozzle clearance: f%Ns[S~ r
2-16.射流jet: d
p2 F
2-17.扩散器diffuser: )0ea+ib
2-18.扩散器喉部diffuser thoat: NPCs('cd>?
2-19.蒸汽导管vapor tube(pipe;chimney): TcIcS]w%
2-20.喷嘴组件nozzle assembly: ]DOX?qI
i
2-21.下裙skirt: M:-.o
bu
|a0h7e
3.附件 CsTF
3-1阱trap: Qy.w=80kf
⑴.冷阱 cold trap: &{>cZh}\
⑵.吸附阱sorption trap: 'SCidN(n
⑶.离子阱ion trap:
Jd%H2`
⑷.冷冻升华阱 cryosublimation trap: X}tVmO?
3-2.挡板baffle: "]z-: \ V
3-3.油分离器oil separator: MOsl_^c
3-4.油净化器oil purifier: @\0Eu212
3-5.冷凝器condenser: ?0)&U
? i( %
4.泵按工作分类 -M[$Z y^
4-1.主泵main pump: 29!q!g |
4-2.粗抽泵roughing vacuum pump: _{r=.W+w
4-3.前级真空泵backing vacuum pump: &z>e5_.
4-4.粗(低)真空泵 roughing(low)vacuum pump: Fe]B&n
4-5.维持真空泵holding vacuum pump: ,17hGKM
4-6.高真空泵high vacuum pump: 0Uz\H0T1
4-7.超高真空泵ultra-high vacuum pump: p /#$io
4-8.增压真空泵booster vacuum pump: #tZ4N7
&m|wH4\
5.真空泵特性 Sg6"WV{<
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: c8L~S/t
5-2.真空泵的抽气量Q throughput of vacuum pump:。 O>^C4c!
5-3.起动压力starting pressure: TYJ:!
5-4.前级压力 backing pressure : W6"v)Jc>_
5-5.临界前级压力 critical backing pressure: zY|t0H
5-6.最大前级压力maximum backing pressure: mH Ic f{RG
5-7.最大工作压力maximum working pressure: SILQ
5-8.真空泵的极限压力ultimate pressure of a pump: UVw~8o9s
5-9.压缩比compression ratio: BO~PT,QrF
5-10.何氏系数Ho coefficient: `FYv3w2
5-11.抽速系数speed factor: L5#P[cHzz
5-12.气体的反扩散back-diffusion of gas: wQwQXNG
5-13.泵液返流back-streaming of pump fluid: qQ"Fv|]~>
5-14.返流率back-streaming rate ^go7_y
5-15.返迁移back-migration:
"Qja1TQ
5-16.爆腾bumping: 6ek;8dL
5-17.水蒸气允许量qm water vapor tolerable load: wvbPnf^y
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: 4eikLRD,
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: 7b<je=G6PA
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump g>dA$h%
3. 1.一般术语 ow_djv:,
1-1.压力计pressure gauge: q o\?o
1-2.真空计vacuum gauge: -C<zF`jO
⑴.规头(规管)gauge head: QNARkYY~|
⑵.裸规nude gauge : hRty [
⑶.真空计控制单元gauge control unit : P@,nA41,j
⑷.真空计指示单元gauge indicating unit : >2,Gy-&"0
'bo~%WA]n
2.真空计一般分类 T}"6wywM
2-1.压差式真空计differential vacuum gauge: ^}:#
2-2.绝对真空计 absolute vacuum gauge: q|8{@EMT
2-3.全压真空计total pressure vacuum gauge: 91$]Qg,lB
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: <