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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 f"MID6  
    --------------------------------------------------- oTw!#Re)  
    真空术语 3lP;=* m.  
    ~ ld.I4  
    1.标准环境条件 standard ambient condition: f}:C~L!  
    2.气体的标准状态 standard reference conditions forgases: 1NZ"\9=U  
    3.压力(压强)p pressure: AxEyXT(h5  
    4.帕斯卡Pa pascal: 1 .3#PdMR,  
    5.托Torr torr: QS#@xhH  
    6.标准大气压atm standard atmosphere: (,|,j(=]  
    7.毫巴mbar millibar: +3v)@18B1  
    8.分压力 partial pressure: u$nzpw0=H  
    9.全压力 total pressure: _7c3=f83  
    10.真空 vacuum: h@,ja  
    11.真空度 degree of vacuum: @C;1e7  
    12.真空区域 ranges of vacuum: JF=R$!5  
    13.气体 gas: "zEl2Xn28_  
    14.非可凝气体 non-condensable gas: '/\  
    15.蒸汽vapor: IiYL2JS;t|  
    16.饱和蒸汽压saturation vapor pressure: L}Z.FqJ  
    17.饱和度degree of saturation: cO?*(e1m=  
    18.饱和蒸汽saturated vapor: @Z5q2Q  
    19.未饱和蒸汽unsaturated vapor: +H-=`+,  
    20.分子数密度n,m-3 number density of molecules: \:vF FK4a  
    21.平均自由程ι、λ,m mean free path: [txOh!sxD  
    22.碰撞率ψ collision rate: BA;r%?MRL  
    23.体积碰撞率χ volume collision rate: ;n&95t1$  
    24.气体量G quantity of gas: xT*'p&ap  
    25.气体的扩散 diffusion of gas: J Enjc/  
    26.扩散系数D diffusion coefficient; diffusivity: QoD_`d  
    27.粘滞流 viscous flow: Y>x{ [er  
    28.粘滞系数η viscous factor: qt8Y3:=8l  
    29.泊肖叶流 poiseuille flow: >AJ/!{jD*  
    30.中间流 intermediate flow: R7::f\I   
    31.分子流 molecular flow: DB vM.'b$  
    32克努曾数 number of knudsen: bWFa{W5!  
    33.分子泻流 molecular effusion; effusive flow: Ob0sB@  
    34.流逸 transpiration: Cfi{%,em  
    35.热流逸 thermal transpiration: 2yN!yIPR  
    36.分子流率qN molecular flow rate; molecular flux: fc#9e9R  
    37.分子流率密度 molecular flow rate density; density of molecular flux: oW^b,{~V  
    38.质量流率qm mass flow rare: {*xE+ |  
    39.流量qG throughput of gas: o}N@Q-i gq  
    40.体积流率qV volume flow rate: *D]:{#C*  
    41.摩尔流率qυ molar flow rate: L8 P0bNi  
    42.麦克斯韦速度分布 maxwellian velocity distribution: EP>u%]#  
    43.传输几率Pc transmission probability: !I7$e&Uz@  
    44.分子流导CN,UN molecular conductance: k!c7eP"%8^  
    45.流导C,U conductance:  _){|/Zd  
    46.固有流导Ci,Ui intrinsic conductance: y0%@^^-Ru  
    47.流阻W resistance: !BQt+4G7  
    48.吸附 sorption: VG5+u,U6>  
    49.表面吸附 adsorption: TmgC {_  
    50.物理吸附physisorption: e!u]l  
    51.化学吸附 chemisorption: o"z()w~  
    52.吸收absorption: T?3Q<[SmI  
    53.适应系数α accommodation factor: `YOYC  
    54.入射率υ impingement rate: @?B+|*cm  
    55.凝结率condensation rate: }?[];FB  
    56.粘着率 sticking rate: V,r~%p  
    57.粘着几率Ps sticking probability: H,> }t S  
    58.滞留时间τ residence time: rto?*^N?  
    59.迁移 migration: wNa5qp 0  
    60.解吸 desorption: !j!w $  
    61.去气 degassing: k+J3Kl09hM  
    62.放气 outgassing: f) sy-o!  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: {"o9pIh{~  
    64.蒸发率 evaporation rate: _zj^k$ j  
    65.渗透 permeation: r8:r}Qj2w[  
    66.渗透率φ permeability: yP"2.9\erH  
    67.渗透系数P permeability coefficient 6wlLE5  
    2.   1.真空泵 vacuum pumps  AG(6.  
    1-1.容积真空泵 positive displacement pump: jg$qp%7i%  
    ⑴.气镇真空泵 gas ballast vacuum pump: EjP;P}_iK  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: )fJ"Hq  
    ⑶.干封真空泵 dry-sealed vacuum pump: ^O}a,  
    ⑷.往复真空泵 piston vacuum pump: XYU5.  
    ⑸.液环真空泵 liquid ring vacuum pump: .n\JY;"  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: D]~K-[V?l  
    ⑺.定片真空泵 rotary piston vacuum pump: 0["93n}r  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: 7Ae`>5B#  
    ⑼.余摆线真空泵 trochoidal vacuum pump: Sca"LaW1  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: Nd0tR3gi7  
    ⑾.罗茨真空泵 roots vacuum pump: Tm" H9  
    1-2.动量传输泵 kinetic vacuum pump: J|W E&5'  
    ⑴.牵引分子泵molecular drag pump: Q<sqlh!h  
    ⑵.涡轮分子泵turbo molecular pump: V%-hP~nyBx  
    ⑶.喷射真空泵ejector vacuum pump: fe\lSGmf  
    ⑷.液体喷射真空泵liquid jet vacuum pump: Us`=^\  
    ⑸.气体喷射真空泵gas jet vacuum pump: 0)&!$@HW  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : 93*csO?Db  
    ⑺.扩散泵diffusion pump : J3yK^@&&  
    ⑻.自净化扩散泵self purifying diffusion pump: Y"FV#<9@7E  
    ⑼.分馏扩散泵 fractionating diffusion pump : ::Zo` vP  
    ⑽.扩散喷射泵diffusion ejector pump : >axeUd+@i  
    ⑾.离子传输泵ion transfer pump: P@N+jS`Vf  
    1-3.捕集真空泵 entrapment vacuum pump: [CQR  
    ⑴吸附泵adsorption pump: ` GF w?G  
    ⑵.吸气剂泵 getter pump: 6]7csOE  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : ' ]k<' `b|  
    ⑷.吸气剂离子泵getter ion pump: Lu#qo^  
    ⑸.蒸发离子泵 evaporation ion pump: uw mN !!TS  
    ⑹.溅射离子泵sputter ion pump: VR (R.  
    ⑺.低温泵cryopump: }nrjA0WN  
    xmg3,bO  
    2.真空泵零部件 Ph3;;,v '  
    2-1.泵壳 pump case: 3d}v?q78  
    2-2.入口 inlet: $zP5Hzx  
    2-3.出口outlet: MblRdj6  
    2-4.旋片(滑片、滑阀)vane; blade : =MNp;  
    2-5.排气阀discharge valve: kj6:P$tH  
    2-6.气镇阀gas ballast valve: HA'~1$#z  
    2-7.膨胀室expansion chamber: /8GdCac  
    2-8.压缩室compression chamber: c~<;}ve^z  
    2-9.真空泵油 vacuum pump oil: wOAR NrPx2  
    2-10.泵液 pump fluid: kcfT|@:MK"  
    2-11.喷嘴 nozzle: @!`__>K  
    2-13.喷嘴扩张率nozzle expansion rate: ?.e,NHf  
    2-14.喷嘴间隙面积 nozzle clearance area : 4!dc/K  
    2-15.喷嘴间隙nozzle clearance: 01r%K@ xX\  
    2-16.射流jet: <YvXyIs  
    2-17.扩散器diffuser: ^ oi']O  
    2-18.扩散器喉部diffuser thoat: 9q'&tU'a=c  
    2-19.蒸汽导管vapor tube(pipe;chimney): ;e?M;-  
    2-20.喷嘴组件nozzle assembly: +d3|Up8=  
    2-21.下裙skirt: / l$enexSt  
    C hF~  
    3.附件 k%6CkC w  
    3-1阱trap: 2+9VDf2  
    ⑴.冷阱 cold trap: wv9HiHz8gD  
    ⑵.吸附阱sorption trap: E@GYl85fI  
    ⑶.离子阱ion trap: !Gmnck&+  
    ⑷.冷冻升华阱 cryosublimation trap: >V6t L;+  
    3-2.挡板baffle: Yc[umn^K  
    3-3.油分离器oil separator: vhBW1/w&F  
    3-4.油净化器oil purifier: yCxYFi  
    3-5.冷凝器condenser: JI>Y?1i0O  
    [lzd'  
    4.泵按工作分类 g<Z :`00|  
    4-1.主泵main pump: $7q3[skH  
    4-2.粗抽泵roughing vacuum pump: OHndZ$'fI  
    4-3.前级真空泵backing vacuum pump: 4Fg2/O_3  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: t\,Y<9{w  
    4-5.维持真空泵holding vacuum pump: {w2] Is2F  
    4-6.高真空泵high vacuum pump: *D|a`R!Y  
    4-7.超高真空泵ultra-high vacuum pump: 7${<u0((!  
    4-8.增压真空泵booster vacuum pump: i.E2a)  
    W\l&wR  
    5.真空泵特性 <D a-rv8  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: 6*Z7JiQ 0  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 'WW:'[Syn'  
    5-3.起动压力starting pressure: d6MWgg  
    5-4.前级压力 backing pressure : k!Yc_ZB:*l  
    5-5.临界前级压力 critical backing pressure: CV0id&Nv  
    5-6.最大前级压力maximum backing pressure: 72, m c  
    5-7.最大工作压力maximum working pressure: M/ 64`lcb  
    5-8.真空泵的极限压力ultimate pressure of a pump: X /c8XLe"  
    5-9.压缩比compression ratio: PMAz[w,R~  
    5-10.何氏系数Ho coefficient: E+\?ptw  
    5-11.抽速系数speed factor: `0Udg,KOs  
    5-12.气体的反扩散back-diffusion of gas: %Xh}{o$G  
    5-13.泵液返流back-streaming of pump fluid: 72;'8  
    5-14.返流率back-streaming rate f\ P0%  
    5-15.返迁移back-migration: =F@ +~)_  
    5-16.爆腾bumping: %M96 m   
    5-17.水蒸气允许量qm water vapor tolerable load: s*PKr6X+  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: `PARZ|  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: T 6D+@i  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump aBC5?V*e%  
    3.   1.一般术语 iYr)Ao5X  
    1-1.压力计pressure gauge: 5M>h[Q"R  
    1-2.真空计vacuum gauge:  DXf  
    ⑴.规头(规管)gauge head: K$Bv4_|x  
    ⑵.裸规nude gauge : _%CM<z e  
    ⑶.真空计控制单元gauge control unit : {8.Zb NEJ  
    ⑷.真空计指示单元gauge indicating unit : EGl<oxL*R2  
    "lt<$.  
    2.真空计一般分类 {dF@Vg_n  
    2-1.压差式真空计differential vacuum gauge: qxI $F  
    2-2.绝对真空计 absolute vacuum gauge: "w?0f["  
    2-3.全压真空计total pressure vacuum gauge: %V=%ARP|  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: X(tx8~z  
    2-5.相对真空计relative vacuum gauge : c+ZOC8R  
    eay|>xa2  
    3.真空计特性 +mrLMbBiD  
    3-1.真空计测量范围pressure range of vacuum gauge: ;n't:yQW  
    3-2.灵敏度系数sensitivity coefficient: {<{VJGY7T  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): p<r^{y  
    3-5.规管光电流photon current of vacuum gauge head: o<5`uV!f  
    3-6.等效氮压力equivalent nitrogen pressure : .'`aX 7{\  
    3-7.X射线极限值 X-ray limit: 2q[pOT'k  
    3-8.逆X射线效应anti X-ray effect: _WNbuk0  
    3-9.布利尔斯效应blears effect: 2B4.o*Q\  
    syr0|K[  
    4.全压真空计 5$ik|e^:y  
    4-1.液位压力计liquid level manometer: G y[5'J`  
    4-2.弹性元件真空计elastic element vacuum gauge: WD%(RC"Q  
    4-3.压缩式真空计compression gauge: vN(~}gOd\  
    4-4.压力天平pressure balance: >T;!Z5L1  
    4-5.粘滞性真空计viscosity gauge : ^$'{:i  
    4-6.热传导真空计thermal conductivity vacuum gauge : Milp"L?B%  
    4-7.热分子真空计thermo-molecular gauge: K#k/t"r  
    4-8.电离真空计ionization vacuum gauge: f:M^q ;  
    4-9.放射性电离真空计radioactive ionization gauge: mP*$wE9b,:  
    4-10.冷阴极电离真空计cold cathode ionization gauge: \HB fM&  
    4-11.潘宁真空计penning gauge: :Fhk$?/r  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: ^1){ @(  
    4-13.放电管指示器discharge tube indicator: +Kgl/Wg%  
    4-14.热阴极电离真空计hot cathode ionization gauge: Y%/RGYKh  
    4-15.三极管式真空计triode gauge: Un8' P8C  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: r]Hrz'C`  
    4-17.B-A型电离真空计Bayard-Alpert gauge: _=0Ja S>M.  
    4-18.调制型电离真空计modulator gauge: !BVCuuM>w  
    4-19.抑制型电离真空计suppressor gauge: >8/Otg+h  
    4-20.分离型电离真空计extractor gauge: - G>J  
    4-21.弯注型电离真空计bent beam gauge: fDDpR=  
    4-22.弹道型电离真空计 orbitron gauge : %1TKgNf  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: mo<*h&;&  
    !y$##PZ  
    5.分压真空计(分压分析器) ~ox}e(x y  
    5-1.射频质谱仪radio frequency mass spectrometer: &/[MWQ  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: (8 7wWhH  
    5-3.单极质谱仪momopole mass spectrometer: I'IFBVhaYn  
    5-4.双聚焦质谱仪double focusing mass spectrometer: O^\:J 2I(  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: 4Yvz-aSyO  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: 9U;  
    5-7.回旋质谱仪omegatron mass spectrometer: EPW4 h/I  
    5-8.飞行时间质谱仪time of flight mass spectrometer: 2@bOy~$A  
    \j!/l f)  
    6.真空计校准 GI{EP&C  
    6-1.标准真空计reference gauges: #8XmOJ"W3k  
    6-2.校准系统system of calibration: I+Fy)=DO9  
    6-3.校准系数K calibration coefficient: 274j7Y'  
    6-4.压缩计法meleod gauge method: a)W|gx6Y  
    6-5.膨胀法expansion method: ,]\cf  
    6-6.流导法flow method: r3x;lICx-  
    4.   1.真空系统vacuum system "tl{HM5u  
    1-1.真空机组pump system: ue3 ].:  
    1-2.有油真空机组pump system used oil : T x Mh_  
    1-3.无油真空机组oil free pump system r]LP=K1  
    1-4.连续处理真空设备continuous treatment vacuum plant: V(kK2az  
    1-5.闸门式真空系统vacuum system with an air-lock: :V6 [_VaF  
    1-6.压差真空系统differentially pumped vacuum system: hAUP#y@:H:  
    1-7.进气系统gas admittance system: Btznms'  
    qy?$t:*pp  
    2.真空系统特性参量 \V'fB5  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : `\:Ede  
    2-2.抽气装置的抽气量throughput of a pumping unit : `~\SQ EY$  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: Wj3i*x$  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: a9&[Qv5-/  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: 8r>\scS  
    2-6.极限压力ultimate pressure: b,:^\HKC  
    2-7.残余压力residual pressure: v8)wu=u  
    2-8.残余气体谱residual gas spectrum: KiG19R$  
    2-9.基础压力base pressure: \x$`/  
    2-10.工作压力working pressure: ?`OF n F,K  
    2-11.粗抽时间roughing time: 7_36xpw  
    2-12.抽气时间pump-down time: i'CK/l.H  
    2-13.真空系统时间常数time constant of a vacuum system: r=.@APZB  
    2-14.真空系统进气时间venting time: >4bw4 Z1  
    B!<B7Q  
    3.真空容器 6t!=k6`1  
    3-1.真空容器;真空室vacuum chamber: ^%%Rf  
    3-2.封离真空装置sealed vacuum device: M&=SvM.f  
    3-3.真空钟罩vacuum bell jar: ,y"vf^BE.  
    3-4.真空容器底板vacuum base plate: #5y+gdN  
    3-5.真空岐管vacuum manifold: V1P]pP  
    3-6.前级真空容器(贮气罐)backing reservoir: &b~ X&{3,  
    3-7.真空保护层outer chamber: f.` 8vaV  
    3-8.真空闸室vacuum air lock: Otr=+i ZI  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: ]~$@x=p2e  
    B}NJs,'FJ  
    4.真空封接和真空引入线 Uth+4Aq  
    4-1.永久性真空封接permanent seal : e`a4Gr  
    4.2.玻璃分级过渡封接graded seal : Q2oo\  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: PC"=B[OlJ  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: !m=Js"  
    4-5.陶瓷金属封接ceramic-to-metal seal: 8 |= c3Z  
    4-6.半永久性真空封接semi-permanent seal : RpU i'  
    4-7.可拆卸的真空封接demountable joint: C3.]dsv:  
    4-8.液体真空封接liquid seal XRM/d5  
    4-9.熔融金属真空封接molten metal seal: nQ'NS  
    4-10.研磨面搭接封接ground and lapped seal: '%_K"rb  
    4-11.真空法兰连接vacuum flange connection: .mwW`D  
    4-12.真空密封垫vacuum-tight gasket: Qu/f>tJN;  
    4-13.真空密封圈ring gasket: 7H6Ge-u  
    4-14.真空平密封垫flat gasket: Ht43G_.j  
    4-15.真空引入线feedthrough leadthrough: !iHC++D  
    4-16.真空轴密封shaft seal: w&}<b%l  
    4-17.真空窗vacuum window: t?^!OJ:L  
    4-18.观察窗viewing window: 5m@'( ] j  
    ,d!@5d&Zi  
    5.真空阀门 D0 q42+5  
    5-1.真空阀门的特性characteristic of vacuum valves: +p _?ekV\  
    ⑴.真空阀门的流导conductance of vacuum valves: ORqqzy +  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: sJQ~ :p0e  
    5-2.真空调节阀regulating valve: IrRe6nf@K  
    5-3.微调阀 micro-adjustable valve: :Eh}]_  
    5-4.充气阀charge valve: ;9#W#/B  
    5-5.进气阀gas admittance valve: +F,])p4,]i  
    5-6.真空截止阀break valve: lV3k4iRH  
    5-7.前级真空阀backing valve: 67H?xsk@n  
    5-8.旁通阀 by-pass valve: 9;n*u9<  
    5-9.主真空阀main vacuum valve: Uv?^qe0=  
    5-10.低真空阀low vacuum valve: n}9<7e~/  
    5-11.高真空阀high vacuum valve: sm?b,T/  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: 55`p~:&VQ  
    5-13.手动阀manually operated valve: : maBec)  
    5-14.气动阀pneumatically operated valve: zZY1E@~  
    5-15.电磁阀electromagnetically operated valve: PGZe'r1E9  
    5-16.电动阀valve with electrically motorized operation: s9Tn|Pm+!\  
    5-17.挡板阀baffle valve: "Ar|i8^G3  
    5-18.翻板阀flap valve: 2u0B=0x  
    5-19.插板阀gate valve: [SKDsJRPP  
    5-20.蝶阀butterfly valve: y% !.:7Y  
    ET H ($$M  
    6.真空管路 XdzC/ {G  
    6-1.粗抽管路roughing line: iBWEZw)  
    6-2.前级真空管路backing line: <AJRU l  
    6-3.旁通管路;By-Pass管路 by-pass line: iz[IK%K  
    6-4.抽气封口接头pumping stem: SY.koW  
    6-5.真空限流件limiting conductance:       b{<$OVc  
    6-6.过滤器filter: J_XkQR[Y  
    5.   1.一般术语 ?|`n&HrP  
    1-1真空镀膜vacuum coating: Mc8_D,7  
    1-2基片substrate: p.MLKp-'  
    1-3试验基片testing substrate: #PC*l\ )  
    1-4镀膜材料coating material: '%+LQ"Bp  
    1-5蒸发材料evaporation material: #;1RStb:zj  
    1-6溅射材料sputtering material: .4w"3>  
    1-7膜层材料(膜层材质)film material: BTO l`U  
    1-8蒸发速率evaporation rate: b9wC:NgQx  
    1-9溅射速率sputtering rate: _TJk Yz$  
    1-10沉积速率deposition rate: uHZjpMoM  
    1-11镀膜角度coating angle: "-5FUKI-  
    <Vh5`-J  
    2.工艺 Qi qRx  
    2-1真空蒸膜vacuum evaporation coating: P uQ  
    (1).同时蒸发simultaneous evaporation: {65Y Tt%  
    (2).蒸发场蒸发evaporation field evaporation: S,'ekWVD  
    (3).反应性真空蒸发reactive vacuum evaporation: " :[;}f;  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: A;^{%S  
    (5).直接加热的蒸发direct heating evaporation: o5+7Lt]  
    (6).感应加热蒸发induced heating evaporation: %Zfh6Bl\X  
    (7).电子束蒸发electron beam evaporation: b; vVlIG  
    (8).激光束蒸发laser beam evaporation: u ^2/:L  
    (9).间接加热的蒸发indirect heating evaporation: q{[y4c1bG{  
    (10).闪蒸flash evaportion: U(~Nmo'  
    2-2真空溅射vacuum sputtering: m<;MOS  
    (1).反应性真空溅射 reactive vacuum sputtering: J!Rqm!)q  
    (2).偏压溅射bias sputtering: ^"uD:f)  
    (3).直流二级溅射direct current diode sputtering: C.}ho.} r  
    (4).非对称性交流溅射asymmtric alternate current sputtering: x6\^dVR}  
    (5).高频二极溅射high frequency diode sputtering: zQGj,EAM}  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: ZXbq5p_  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: '7@Dw;   
    (8).离子束溅射ion beam sputtering: 6@d/k.3p  
    (9).辉光放电清洗glow discharge cleaning: hA`9[58/  
    2-3物理气相沉积PVD physical vapor deposition: &u) qw }  
    2-4化学气相沉积CVD chemical vapor deposition: jC-`u-_'j  
    2-5磁控溅射magnetron sputtering: SM<qb0  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: nAsc^ Yh  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: f?@M"p@T  
    2-8电弧离子镀arc discharge deposition: -O@/S9]S)  
    '81Rwp  
    3.专用部件 d%!yFix;<  
    3-1镀膜室coating chamber: f8f|'v|  
    3-2蒸发器装置evaporator device: e&m TaCLG  
    3-3蒸发器evaporator: # ?u bvSdU  
    3-4直接加热式蒸发器evaporator by direct heat: kc@ \AZb  
    3-5间接加热式蒸发器evaporator by indirect heat: +\vN#xDz  
    3-7溅射装置sputtering device: ((BdT:T\_  
    3-8靶target: u)D!RhV&  
    3-10时控挡板timing shutter:  |>Pv2  
    3-11掩膜mask: dVJ9cJ9^  
    3-12基片支架substrate holder: !_&;#j](  
    3-13夹紧装置clamp: V%^d~^m,H  
    3-14换向装置reversing device: h}+Gz={Q^  
    3-15基片加热装置substrate heating device: Wx8 cK=  
    3-16基片冷却装置substrate colding device: Ax4;[K\Q  
    "nNT9 K|  
    4.真空镀膜设备 S! .N3ezn  
    4-1真空镀膜设备vacuum coating plant: E_xk8X~  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: fKs3H?|  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: G<~P||Lu^  
    4-2连续镀膜设备continuous coating plant: 2T"[$iH!7  
    4-3半连续镀膜设备semi- continuous coating plant 25;`yB$  
    6.   1.漏孔 ?CpM.{{s  
    1-1漏孔leaks: ]/mRMm9"3h  
    1-2通道漏孔channel leak: 7P52r  
    1-3薄膜漏孔membrane leak: 6U] "i  
    1-4分子漏孔molecular leak: u/`x@u  
    1-5粘滞漏孔vixcous leak: L\t!)X-4  
    1-6校准漏孔calibrated leak: 52*KRq o  
    1-7标准漏孔reference leak : =mxj2>,&  
    1-8虚漏virtual leak: oIKuo~  
    1-9漏率leak rate: (j}edRUnB  
    1-10标准空气漏率standard air leak rate: d^|r#"o[  
    1-11等值标准空气漏率equivalent standard air leak rate: H|cxy?iJ  
    1-12探索(示漏)气体: uF T5Z  
    &([Gc+"5E.  
    2.本底 ( "J_< p  
    2-1本底background: %S%0/  
    2-2探索气体本底search gas background : y$?O0S%F  
    2-3漂移drift: *jy"g64j  
    2-4噪声noise: MV?sr[V-oP  
    N)YoWA>#bF  
    3.检漏仪 4 ..V  
    3-1检漏仪leak detector: \&s$?r  
    3-2高频火花检漏仪H.F. spark leak detector: S`[r]msw  
    3-3卤素检漏仪halide leak detector: Wp= &nh  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: i]zTY\gw8M  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: ,j[1!*Z_[  
    ,Q8h#0z r  
    4.检漏 9Cw !<  
    4-1气泡检漏leak detection by bubbles: *18J$  
    4-2氨检漏leak detection by ammonia: S%w67sGl4n  
    4-3升压检漏leak detection of rise pressure: @<p9 O0  
    4-4放射性同位素检漏radioactive isotope leak detection: J2$ =H1-  
    4-5荧光检漏fluorescence leak detection IpsV4nmnz-  
    7.   1.一般术语 d#HN '(2t  
    1-1真空干燥vacuum drying: bY=Yb  
    1-2冷冻干燥freeze drying : ~*G}+Ur$2  
    1-3物料material: x>[ gShAV!  
    1-4待干燥物料material to be dried: ?*U:=|  
    1-5干燥物料dried material : ?h ym~,  
    1-6湿气moisture;humidity: G)7J$4R  
    1-7自由湿气free moisture: M_F4I$V4  
    1-8结合湿气bound moisture: 9h^TOZK)  
    1-9分湿气partial moisture: f.U.(  
    1-10含湿量moisture content: l65Qk2<YC  
    1-11初始含湿量initial moisture content: c *Pt;m  
    1-12最终含湿量final residual moisture: 4yRX{Bl|  
    1-13湿度degree of moisture ,degree of humidity : iSj.lW  
    1-14干燥物质dry matter : E&|EokSyN  
    1-15干燥物质含量content of dry matter: ; HjT  
    _v=zFpR  
    2.干燥工艺 <+; cgF!+  
    2-1干燥阶段stages of drying : &}lRij&`  
    (1).预干燥preliminary dry: 3_c4+u"6  
    (2).一次干燥(广义)primary drying(in general): {Gr"oO`&"  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): *|/kKvN  
    (4).二次干燥secondary drying: v!rOT/I  
    2-2.(1).接触干燥contact drying: yI*h"?7T  
    (2).辐射干燥 drying by radiation : ;?!pcvUi  
    (3).微波干燥microwave drying: z%WOv ~8~  
    (4).气相干燥vapor phase drying: F}_Zh9/$(  
    (5).静态干燥static drying: A-qpuI;f  
    (6).动态干燥dynamic drying: I$Fr8R$  
    2-3干燥时间drying time: I6F $@  
    2-4停留时间length of stay(in the drying chamber): 3a6  
    2-5循环时间cycle time: bn"z&g   
    2-6干燥率 dessication ratio : * uZ'MS  
    2-7去湿速率mass flow rate of humidity: M9sB2Ips<  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: $*dY f  
    2-9干燥速度 drying speed : F5f1j]c  
    2-10干燥过程drying process: }zV#?;}  
    2-11加热温度heating temperature: Dlu]4n[LB  
    2-12干燥温度temperature of the material being dried : =`BPGfC b  
    2-13干燥损失loss of material during the drying process : Xw9"wAj  
    2-14飞尘lift off (particles): .1?7)k v  
    2-15堆层厚度thickness of the material: -;o`(3wZq  
    1"HSM =p  
    3.冷冻干燥 3ocRq %%K  
    3-1冷冻freezing: aOo;~u2-=  
    (1).静态冷冻static freezing: kn7Qvk[+  
    (2).动态冷冻dynamic freezing: STQ~mFs"  
    (3).离心冷冻centrifugal freezing: >{kPa|  
    (4).滚动冷冻shell freezing: `_H^k !^  
    (5).旋转冷冻spin-freezing: Y@M l}43  
    (6).真空旋转冷冻vacuum spin-freezing: i"C?6R  
    (7).喷雾冷冻spray freezing: O\qY? )  
    (8).气流冷冻air blast freezing: 9]TvL h3  
    3-2冷冻速率rate of freezing: FUU/=)^P$  
    3-3冷冻物料frozen material: 9k>=y n  
    3-4冰核ice core: -)ag9{*  
    3-5干燥物料外壳envelope of dried matter: $5m_)]w4a  
    3-6升华表面sublimation front: #pw=HHq*(  
    3-7融化位置freezer burn: T~'9p`IW  
    W&(98}oT  
    4.真空干燥设备;真空冷冻干燥设备 K=C).5=U  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: -,#LTW<.  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: $C !Mk  
    4-3加热表面heating surface: Sk,9<@  
    4-4物品装载面shelf : #5.L%F  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): = g)G!  
    4-6单位面积干燥器处理能力throughput per shelf area: P&@[ j0  
    4-7冰冷凝器ice condenser: 0Ku%9wh-  
    4-8冰冷凝器的负载load of the ice condenser: (" >gLr  
    4-9冰冷凝器的额定负载rated load of the ice condenser ZM%z"hO9R  
    8.   1.一般术语 -'!%\E;5  
    1-1试样sample : uua1_# a  
    (1).表面层surface layer: c;e2= A  
    (2).真实表面true surface: sZhl.[&zo  
    (3).有效表面积effective surface area: r'ydjy  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: <\cH9D`dE  
    (5).表面粒子密度surface particle density: +vtI1LC;_  
    (6).单分子层monolayer: Wd_cNR\  
    (7).表面单分子层粒子密度monolayer density: r?=7#/]  
    (8).覆盖系数coverage ratio: y 3O Nn~k  
    1-2激发excitation: ;Q =EI%_tv  
    (1).一次粒子primary particle: H-,RzL/  
    (2).一次粒子通量primary particle flux: cAE.I$T(  
    (3).一次粒子通量密度density of primary particle flux: ;|LS$O1c  
    (4).一次粒子负荷primary particle load: h7S&tW GU  
    (5).一次粒子积分负荷integral load of primary particle: r. :H`  
    (6).一次粒子的入射能量energy of the incident primary particle: pMX#!wb  
    (7).激发体积excited volume: :K6(`J3Y"^  
    (8).激发面积excited area: k&1~yW  
    (9).激发深度excited death: *?+maK{5+  
    (10).二次粒子secondary particles: emV@kN.  
    (11).二次粒子通量secondary particle flux: I!;#Nk>  
    (12).二次粒子发射能energy of the emitted secondary particles: e1RtoNF^  
    (13).发射体积emitting volume: $v6dB {%Qu  
    (14).发射面积emitting area: Z<#beT6  
    (15).发射深度emitting depth: q#RVi8('  
    (16).信息深度information depth: {-]/r  
    (17).平均信息深度mean information depth: o?J>mpC  
    1-3入射角angle of incidence: hsQrHs'k  
    1-4发射角angle of emission: f#p.=F$  
    1-5观测角observation: {Z_Pry$6  
    1-6分析表面积analyzed surface area: ~qiSkG  
    1-7产额 yield : P~0d'Oi  
    1-8表面层微小损伤分析minimum damage surface analysis: 8F<Qc*'  
    1-9表面层无损伤分析non-destructive surface analysis: X~Li`  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : %Iv0<oU  
    1-11可观测面积observable area: -< 7KW0CA  
    1-12可观测立体角observable solid angle : t p.qh]2c  
    1-13接受立体角;观测立体角angle of acceptance: ,diV;d  
    1-14角分辨能力angular resolving power: ud`.}H~aB  
    1-15发光度luminosity: LTY@}o]\U  
    1-16二次粒子探测比detection ratio of secondary particles: h(I~HZ[K&T  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: e3wFi,/@  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: 2 f]9I1{  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: ujcNSX*  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: i)0*J?l=  
    1-21本底压力base pressure: %xR;8IO  
    1-22工作压力working pressure: 3Nh;^  
    flLC\   
    2.分析方法 Ox&g#,@h  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: HFx8v!^5N  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : UJ)\E ^Hp  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: VbtFM=Dg  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus:  -[a0\H  
    2-3离子散射表面分析ion scattering spectroscopy: 8jjJ/Mz`  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: #4''Cs  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: _SC>EP8:Z  
    2-6离子散射谱仪ion scattering spectrometer: j~"X`:=  
    2-7俄歇效应Auger process: (G"b)"Qum  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: Ckvm3r\i2  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: HqU"i Y>b  
    2-10光电子谱术photoelectron spectroscopy : awXL}m[_!  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: 5Lt&P 5BY  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: 3u7E?*{sH  
    2-11光电子谱仪photoelectron spectrometer: D;<Q m,[  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: @-;-DB]j  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: $+ZO{ (  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): \nx ^=4*yk  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    共1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊