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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 hPG@iX|V  
    --------------------------------------------------- +eH`mI0f  
    真空术语 q&?hwX Z7  
    G;wh).jG5  
    1.标准环境条件 standard ambient condition: ) ] Ro  
    2.气体的标准状态 standard reference conditions forgases: s.;'-oA  
    3.压力(压强)p pressure: _!,2"dS  
    4.帕斯卡Pa pascal: 9SA%'  
    5.托Torr torr: N\.g+ W  
    6.标准大气压atm standard atmosphere: XA>uCJf  
    7.毫巴mbar millibar: KTmwkZcfYD  
    8.分压力 partial pressure: SD%3B!cpX  
    9.全压力 total pressure: . bUmT!  
    10.真空 vacuum: lg )xQV  
    11.真空度 degree of vacuum: ~(tt.l#  
    12.真空区域 ranges of vacuum: 2g5 4<G*e  
    13.气体 gas: ARnq~E@1  
    14.非可凝气体 non-condensable gas: ,+h<qBsV@  
    15.蒸汽vapor: I H#CaD  
    16.饱和蒸汽压saturation vapor pressure: v)|a}5={  
    17.饱和度degree of saturation: reYIF*  
    18.饱和蒸汽saturated vapor: <Pe'&u  
    19.未饱和蒸汽unsaturated vapor: 6?.S-.Mr  
    20.分子数密度n,m-3 number density of molecules: ?G!p4u?C  
    21.平均自由程ι、λ,m mean free path: dG~U3\!  
    22.碰撞率ψ collision rate: VFnxj52<  
    23.体积碰撞率χ volume collision rate: N`H`\+  
    24.气体量G quantity of gas: eS4t0`kP  
    25.气体的扩散 diffusion of gas: (yuOY/~k/  
    26.扩散系数D diffusion coefficient; diffusivity: L">jSZW[[  
    27.粘滞流 viscous flow: z.)*/HGJm  
    28.粘滞系数η viscous factor: ! ,H6.IH;S  
    29.泊肖叶流 poiseuille flow: * &#M`,#  
    30.中间流 intermediate flow: r+#g  
    31.分子流 molecular flow: IS[q'Cv*  
    32克努曾数 number of knudsen: G#NbLj`h  
    33.分子泻流 molecular effusion; effusive flow: ';.y`{/  
    34.流逸 transpiration: lF46W  
    35.热流逸 thermal transpiration: &"A:_5AU  
    36.分子流率qN molecular flow rate; molecular flux: "9hD4R  
    37.分子流率密度 molecular flow rate density; density of molecular flux: y!S:d  
    38.质量流率qm mass flow rare: L:@COy  
    39.流量qG throughput of gas: k'e1ZAn  
    40.体积流率qV volume flow rate: H0lW gJmi|  
    41.摩尔流率qυ molar flow rate: YB)I%5d;{  
    42.麦克斯韦速度分布 maxwellian velocity distribution: kDRxu!/  
    43.传输几率Pc transmission probability: l$HBYA\Qh  
    44.分子流导CN,UN molecular conductance: q`z1ht nf  
    45.流导C,U conductance: #ifjQ7(:  
    46.固有流导Ci,Ui intrinsic conductance: >XuPg(Ow  
    47.流阻W resistance: gth_Sz5!#  
    48.吸附 sorption: `)w=@9B)"  
    49.表面吸附 adsorption: ' < >Q20  
    50.物理吸附physisorption: @'hkU$N)  
    51.化学吸附 chemisorption: 9-1'jNV  
    52.吸收absorption: E"/k"1@  
    53.适应系数α accommodation factor: 3FO-9H  
    54.入射率υ impingement rate: /yUKUXi  
    55.凝结率condensation rate: YReI|{O$c  
    56.粘着率 sticking rate: |?f~T"|>  
    57.粘着几率Ps sticking probability: r t)[}+ox  
    58.滞留时间τ residence time: ?wIEXKI  
    59.迁移 migration: <+%y  
    60.解吸 desorption: C\{hN  
    61.去气 degassing: n1R{[\ >1  
    62.放气 outgassing: :y{@=E=XSC  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: 0R]'HA>  
    64.蒸发率 evaporation rate: y6G6wk;  
    65.渗透 permeation: c5Kc iTD^  
    66.渗透率φ permeability: ,]9p&xu  
    67.渗透系数P permeability coefficient ^foCcO  
    2.   1.真空泵 vacuum pumps $|!3ks  
    1-1.容积真空泵 positive displacement pump: 6 Rg>h  
    ⑴.气镇真空泵 gas ballast vacuum pump: .K#' Fec  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: "18cD5-#  
    ⑶.干封真空泵 dry-sealed vacuum pump: 6*|EB|%n  
    ⑷.往复真空泵 piston vacuum pump: mv$gL  
    ⑸.液环真空泵 liquid ring vacuum pump: /6 x[C  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: {=3'H?$  
    ⑺.定片真空泵 rotary piston vacuum pump: Ne1W!0YLK  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: r=RiuxxTq  
    ⑼.余摆线真空泵 trochoidal vacuum pump: #&K}w 0}k  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: Fs=E8' b  
    ⑾.罗茨真空泵 roots vacuum pump: l u{6  
    1-2.动量传输泵 kinetic vacuum pump: ?4W6TSW-'  
    ⑴.牵引分子泵molecular drag pump: CzDg?wb  
    ⑵.涡轮分子泵turbo molecular pump: n5fc_N/8O=  
    ⑶.喷射真空泵ejector vacuum pump: 7s0y.i~  
    ⑷.液体喷射真空泵liquid jet vacuum pump: ^8?px&B y:  
    ⑸.气体喷射真空泵gas jet vacuum pump: NVf_#p"h  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : $c+:dO|Fb  
    ⑺.扩散泵diffusion pump : '8@4FXK  
    ⑻.自净化扩散泵self purifying diffusion pump: Mt~2&$>  
    ⑼.分馏扩散泵 fractionating diffusion pump : )g U#[}6H  
    ⑽.扩散喷射泵diffusion ejector pump : mD?={*7%  
    ⑾.离子传输泵ion transfer pump: >pq=5Ha&  
    1-3.捕集真空泵 entrapment vacuum pump: qyY/:&E,Z  
    ⑴吸附泵adsorption pump: IFF1wfC  
    ⑵.吸气剂泵 getter pump: cj#.Oaeq*  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : [ 4PiQyr  
    ⑷.吸气剂离子泵getter ion pump: m'ZxmsFo  
    ⑸.蒸发离子泵 evaporation ion pump: zItGoJu  
    ⑹.溅射离子泵sputter ion pump: [ zCKJR  
    ⑺.低温泵cryopump: G*zhy!P  
    UH5A;SrTqR  
    2.真空泵零部件 rPifiLl A>  
    2-1.泵壳 pump case: ]qk`Yi  
    2-2.入口 inlet: JY D\VaW  
    2-3.出口outlet:  bWZzb&  
    2-4.旋片(滑片、滑阀)vane; blade : uxW<Eh4H*  
    2-5.排气阀discharge valve: i$!K{H1{9  
    2-6.气镇阀gas ballast valve: 6D*x5L-1o  
    2-7.膨胀室expansion chamber: Fj&8wZ)v)  
    2-8.压缩室compression chamber: h{ EnS5~  
    2-9.真空泵油 vacuum pump oil: 3X`N~_+  
    2-10.泵液 pump fluid: +\cG{n*  
    2-11.喷嘴 nozzle: q-+_Y `_\  
    2-13.喷嘴扩张率nozzle expansion rate: 5N2`e3:I  
    2-14.喷嘴间隙面积 nozzle clearance area : {^R" V ,)  
    2-15.喷嘴间隙nozzle clearance: PiNf;b^9  
    2-16.射流jet: ?y[i6yN9  
    2-17.扩散器diffuser: ng[LSB*57Y  
    2-18.扩散器喉部diffuser thoat: o4B%TW  
    2-19.蒸汽导管vapor tube(pipe;chimney): ipRH.1=  
    2-20.喷嘴组件nozzle assembly: *Oh]I|?  
    2-21.下裙skirt: z&.F YGq}  
    lBG"COu  
    3.附件 ,@8*c0Y~<!  
    3-1阱trap: &&sm7F%  
    ⑴.冷阱 cold trap: X;dUlSi  
    ⑵.吸附阱sorption trap: )u=a+T  
    ⑶.离子阱ion trap: (^)(#CxO  
    ⑷.冷冻升华阱 cryosublimation trap: msZ 3%L  
    3-2.挡板baffle: Z4T{CwD`D  
    3-3.油分离器oil separator: A] f^9F@  
    3-4.油净化器oil purifier: 6k ]+DbT  
    3-5.冷凝器condenser: .DhB4v&  
    -JdNA2P  
    4.泵按工作分类 M{XBmDfN  
    4-1.主泵main pump: {"*gX&;~  
    4-2.粗抽泵roughing vacuum pump: @u-CR8^  
    4-3.前级真空泵backing vacuum pump: w.-J2%J   
    4-4.粗(低)真空泵 roughing(low)vacuum pump: TJ0;xn6o  
    4-5.维持真空泵holding vacuum pump: U ~8, N[  
    4-6.高真空泵high vacuum pump: R'B-$:u  
    4-7.超高真空泵ultra-high vacuum pump: ~HUO$*U4<  
    4-8.增压真空泵booster vacuum pump: zi+NQOhR  
    G,@ Jo[e  
    5.真空泵特性 xGw|@d  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: SJ&+"S&  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 AaDMX,  
    5-3.起动压力starting pressure: (U|WP%IM'  
    5-4.前级压力 backing pressure : AZbFj-^4  
    5-5.临界前级压力 critical backing pressure: G;^,T/q47  
    5-6.最大前级压力maximum backing pressure: xL!@$;J  
    5-7.最大工作压力maximum working pressure: @F!oRm5  
    5-8.真空泵的极限压力ultimate pressure of a pump: 6LzN#g  
    5-9.压缩比compression ratio: i[ n3ILn  
    5-10.何氏系数Ho coefficient: WWVQJ{,}  
    5-11.抽速系数speed factor: yOm#c>X  
    5-12.气体的反扩散back-diffusion of gas: N/8B@}@n  
    5-13.泵液返流back-streaming of pump fluid: G~zP&9N|  
    5-14.返流率back-streaming rate "0?" E\  
    5-15.返迁移back-migration: T $o;PJc  
    5-16.爆腾bumping: n,b6|Y0  
    5-17.水蒸气允许量qm water vapor tolerable load:  75T+6 u  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: f/^T:F6  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: i [2bz+Z?  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump d{c06(#_  
    3.   1.一般术语 TA!6|)BUW  
    1-1.压力计pressure gauge: 7_5-gtD  
    1-2.真空计vacuum gauge: 'LLpP#(  
    ⑴.规头(规管)gauge head: `_<O _  
    ⑵.裸规nude gauge : m/aA q8  
    ⑶.真空计控制单元gauge control unit : n6#z{,W<3  
    ⑷.真空计指示单元gauge indicating unit : E-HK=D&W/  
    G8Zl[8  
    2.真空计一般分类 E.^F:$2  
    2-1.压差式真空计differential vacuum gauge: U{8x.CJ]  
    2-2.绝对真空计 absolute vacuum gauge: +qM2&M  
    2-3.全压真空计total pressure vacuum gauge: $`"$ZI6[  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: O|0,= 5  
    2-5.相对真空计relative vacuum gauge : 6G>loNM^  
    YZ/2 :[b  
    3.真空计特性 Ihx[S!:  
    3-1.真空计测量范围pressure range of vacuum gauge: Gs(;&fw  
    3-2.灵敏度系数sensitivity coefficient: Y?JB%%WWI  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): zB#.EW  
    3-5.规管光电流photon current of vacuum gauge head: 'OsRQ)E  
    3-6.等效氮压力equivalent nitrogen pressure : s#)0- Zj  
    3-7.X射线极限值 X-ray limit: &*o{-kw  
    3-8.逆X射线效应anti X-ray effect: p1 mY!&e(  
    3-9.布利尔斯效应blears effect: p)*x7~3e  
    L?b;TjLe  
    4.全压真空计 j%fi*2uX  
    4-1.液位压力计liquid level manometer: G$6mtw6[M  
    4-2.弹性元件真空计elastic element vacuum gauge: x{$/|_  
    4-3.压缩式真空计compression gauge: \!Ap<  
    4-4.压力天平pressure balance: ;Bne=vjQp  
    4-5.粘滞性真空计viscosity gauge : #++D|oE  
    4-6.热传导真空计thermal conductivity vacuum gauge : kQO5sX$;  
    4-7.热分子真空计thermo-molecular gauge: Poxoc-s  
    4-8.电离真空计ionization vacuum gauge: (kSb74*g  
    4-9.放射性电离真空计radioactive ionization gauge: (T =u_oe  
    4-10.冷阴极电离真空计cold cathode ionization gauge: w9CX5Fg  
    4-11.潘宁真空计penning gauge: Gn 1  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: c) _u^Dh  
    4-13.放电管指示器discharge tube indicator: ;! #IRR  
    4-14.热阴极电离真空计hot cathode ionization gauge: !.w|+-JKO  
    4-15.三极管式真空计triode gauge: uUh6/=y  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: G-Zn-I  
    4-17.B-A型电离真空计Bayard-Alpert gauge: agnEYdM_  
    4-18.调制型电离真空计modulator gauge: ^AR kjYt  
    4-19.抑制型电离真空计suppressor gauge: _ IlRZ}f  
    4-20.分离型电离真空计extractor gauge: zTfl#%  
    4-21.弯注型电离真空计bent beam gauge: 6Q}>=R^h  
    4-22.弹道型电离真空计 orbitron gauge : ->J5|c#  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: IgKrcpK#}?  
    K,Hxe;-  
    5.分压真空计(分压分析器) +D M,+{}  
    5-1.射频质谱仪radio frequency mass spectrometer: #[y2nK3zF  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: L.% zs  
    5-3.单极质谱仪momopole mass spectrometer: {5JYu  
    5-4.双聚焦质谱仪double focusing mass spectrometer: 8FgF6ip  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: =Kt!+^\")  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: )wk9(|[o  
    5-7.回旋质谱仪omegatron mass spectrometer: s"X0Jx}  
    5-8.飞行时间质谱仪time of flight mass spectrometer: SHqz &2u  
    o> yo9n%t  
    6.真空计校准 Fhs/<w-  
    6-1.标准真空计reference gauges: BJnysQ  
    6-2.校准系统system of calibration: - *xn`DH  
    6-3.校准系数K calibration coefficient: 8FQNeQr  
    6-4.压缩计法meleod gauge method: oX?~  
    6-5.膨胀法expansion method: `6{4?v  
    6-6.流导法flow method: *N%)+-   
    4.   1.真空系统vacuum system 1c:/c|shQ_  
    1-1.真空机组pump system: fILD~  
    1-2.有油真空机组pump system used oil : %TzdpQp"  
    1-3.无油真空机组oil free pump system L+0O=zJF  
    1-4.连续处理真空设备continuous treatment vacuum plant: bl4I4RB  
    1-5.闸门式真空系统vacuum system with an air-lock: &8hW~G>(m  
    1-6.压差真空系统differentially pumped vacuum system: +(oExp(!  
    1-7.进气系统gas admittance system: @EUvx  
    &[ $t%:`  
    2.真空系统特性参量 |6~ Kin  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : .wkW<F7  
    2-2.抽气装置的抽气量throughput of a pumping unit : z O6Sl[)  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: %`]fZr A]#  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: h]k1vp)Q y  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: +e&Q<q!,q  
    2-6.极限压力ultimate pressure: 6#kK  
    2-7.残余压力residual pressure: __ G=xf  
    2-8.残余气体谱residual gas spectrum: ] {=qdgJ  
    2-9.基础压力base pressure: #6nuiSF  
    2-10.工作压力working pressure: TGI`}#  
    2-11.粗抽时间roughing time: sb</-']a  
    2-12.抽气时间pump-down time: |7b@w;q,D  
    2-13.真空系统时间常数time constant of a vacuum system: C.+:FY.H  
    2-14.真空系统进气时间venting time: l!%V&HJV  
    =_`cY^ib+  
    3.真空容器 -@/!u9l  
    3-1.真空容器;真空室vacuum chamber: b%e7rY2  
    3-2.封离真空装置sealed vacuum device: 8 %^W<.Y  
    3-3.真空钟罩vacuum bell jar: Lg+cHaA  
    3-4.真空容器底板vacuum base plate: qino:_g  
    3-5.真空岐管vacuum manifold: fs*OR2YG7  
    3-6.前级真空容器(贮气罐)backing reservoir: 3y*dBw  
    3-7.真空保护层outer chamber: A "~Oi  
    3-8.真空闸室vacuum air lock: G_ 6!w//  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: (2r808^2  
    -_BjzA|  
    4.真空封接和真空引入线 w/Wd^+I In  
    4-1.永久性真空封接permanent seal : 6?= ^8  
    4.2.玻璃分级过渡封接graded seal : BzI(  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: T0K*!j}O  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: VPOp#;"%  
    4-5.陶瓷金属封接ceramic-to-metal seal: @;>Xy!G  
    4-6.半永久性真空封接semi-permanent seal : 9D51@b6k  
    4-7.可拆卸的真空封接demountable joint: iayxN5,  
    4-8.液体真空封接liquid seal \"$jj<gc  
    4-9.熔融金属真空封接molten metal seal: I.)9:7   
    4-10.研磨面搭接封接ground and lapped seal: GD#W=O  
    4-11.真空法兰连接vacuum flange connection: CV *  
    4-12.真空密封垫vacuum-tight gasket: Ir3|PehB  
    4-13.真空密封圈ring gasket: ux>LciNq  
    4-14.真空平密封垫flat gasket: | @p  
    4-15.真空引入线feedthrough leadthrough: Px?0)^"2  
    4-16.真空轴密封shaft seal: 2G }@s.iE  
    4-17.真空窗vacuum window: . "`f~s\G  
    4-18.观察窗viewing window: wO"ezQ  
    AI3\eH+  
    5.真空阀门 c.h_&~0qf  
    5-1.真空阀门的特性characteristic of vacuum valves: !&Us^Q^  
    ⑴.真空阀门的流导conductance of vacuum valves: +!"7=?}  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: (t"rzH  
    5-2.真空调节阀regulating valve: WmZ,c_  
    5-3.微调阀 micro-adjustable valve: }xytV5a^  
    5-4.充气阀charge valve: "oT]_WHqo  
    5-5.进气阀gas admittance valve:  Rlx  
    5-6.真空截止阀break valve: s:Z1 ZAxv  
    5-7.前级真空阀backing valve: 8YkCTJfBGu  
    5-8.旁通阀 by-pass valve: n|!O .+\b  
    5-9.主真空阀main vacuum valve: ^%Fn|U\u  
    5-10.低真空阀low vacuum valve: $EPDa?$*  
    5-11.高真空阀high vacuum valve: >2;KPV0H  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: R!7a;J}  
    5-13.手动阀manually operated valve: t 2&}  
    5-14.气动阀pneumatically operated valve: 6G>bZ+  
    5-15.电磁阀electromagnetically operated valve: " {Nw K  
    5-16.电动阀valve with electrically motorized operation: zK&J2P`  
    5-17.挡板阀baffle valve: 1xMD )V:  
    5-18.翻板阀flap valve: mW @Z1Plxs  
    5-19.插板阀gate valve: {aWfD XB1  
    5-20.蝶阀butterfly valve: sys;Rz2  
    Axx{G~n![  
    6.真空管路 ,\E5et4  
    6-1.粗抽管路roughing line: a8r+G]Z  
    6-2.前级真空管路backing line: W[.UM  
    6-3.旁通管路;By-Pass管路 by-pass line: RUlJP  
    6-4.抽气封口接头pumping stem: 0/?=FM >  
    6-5.真空限流件limiting conductance:       *wK7qS~VB2  
    6-6.过滤器filter: >s"kL^  
    5.   1.一般术语 ? p^':@=  
    1-1真空镀膜vacuum coating: Y'M}lv$sa  
    1-2基片substrate: / lN09j  
    1-3试验基片testing substrate: =!PUKa3f<  
    1-4镀膜材料coating material: /BfCh(B  
    1-5蒸发材料evaporation material: w0$l3^}z  
    1-6溅射材料sputtering material: Lcy>!3q3~  
    1-7膜层材料(膜层材质)film material: e+P|PW  
    1-8蒸发速率evaporation rate: *(]@T@yN  
    1-9溅射速率sputtering rate: RaY=~g  
    1-10沉积速率deposition rate: C**kJ  
    1-11镀膜角度coating angle: S[o R q  
    R3} Z"  
    2.工艺 ' $X}'u  
    2-1真空蒸膜vacuum evaporation coating: J`{HMv  
    (1).同时蒸发simultaneous evaporation: 0Kenyn4?  
    (2).蒸发场蒸发evaporation field evaporation: p4I6oS`/.  
    (3).反应性真空蒸发reactive vacuum evaporation: iC\t@BVS  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: Xu&4|$wB+  
    (5).直接加热的蒸发direct heating evaporation: qf6}\0   
    (6).感应加热蒸发induced heating evaporation: cy4V*zwp  
    (7).电子束蒸发electron beam evaporation: }-ysP$  
    (8).激光束蒸发laser beam evaporation: 3?oj46gP  
    (9).间接加热的蒸发indirect heating evaporation: 0P6< 4  
    (10).闪蒸flash evaportion: O{`r.H1',  
    2-2真空溅射vacuum sputtering: $)Pmr1==  
    (1).反应性真空溅射 reactive vacuum sputtering: ^LJ?GJ$g  
    (2).偏压溅射bias sputtering: .6#Y- iJqc  
    (3).直流二级溅射direct current diode sputtering: "M5&&\uT  
    (4).非对称性交流溅射asymmtric alternate current sputtering: s7TV@Y)  
    (5).高频二极溅射high frequency diode sputtering: EL-1o0 2-  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: cE0Kvqe`  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: @ 6{U*vs  
    (8).离子束溅射ion beam sputtering: D^W?~7e ^r  
    (9).辉光放电清洗glow discharge cleaning: ;R.l?Bg  
    2-3物理气相沉积PVD physical vapor deposition: aj*%$!SU+  
    2-4化学气相沉积CVD chemical vapor deposition: )x*pkE**c  
    2-5磁控溅射magnetron sputtering: YKs^aQm#  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: rC!~4xj-  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: SgocHpyg  
    2-8电弧离子镀arc discharge deposition: Oy/+uw^  
    0q ^dpM  
    3.专用部件 <sq@[\l}a  
    3-1镀膜室coating chamber: 9K F`9Y  
    3-2蒸发器装置evaporator device: 1p9+c~4l:  
    3-3蒸发器evaporator: #.n%$r  
    3-4直接加热式蒸发器evaporator by direct heat: l+1GA0'JP  
    3-5间接加热式蒸发器evaporator by indirect heat: N/fH%AtM  
    3-7溅射装置sputtering device: Pkw ` o #  
    3-8靶target: @7aSq-(_l*  
    3-10时控挡板timing shutter: ,:QDl  
    3-11掩膜mask: +e%U6&l{  
    3-12基片支架substrate holder: s8<)lO<SV.  
    3-13夹紧装置clamp: 0jN?5j  
    3-14换向装置reversing device: Z[{: `  
    3-15基片加热装置substrate heating device: 8L7ZWw d  
    3-16基片冷却装置substrate colding device: qSWnv`hL  
    =a .avOZ  
    4.真空镀膜设备 I5J9,j  
    4-1真空镀膜设备vacuum coating plant: R_2JP C  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: s$ 2@|;  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: Qm X(s  
    4-2连续镀膜设备continuous coating plant: ~y(- j[  
    4-3半连续镀膜设备semi- continuous coating plant 3yfq*\_uXw  
    6.   1.漏孔 G:2m)0bW  
    1-1漏孔leaks: ,??%["R  
    1-2通道漏孔channel leak: 4F+n`{~  
    1-3薄膜漏孔membrane leak: {~"6/L  
    1-4分子漏孔molecular leak: ?Q)z5i'g#  
    1-5粘滞漏孔vixcous leak: ^3L6mOoA  
    1-6校准漏孔calibrated leak: Bld$<uU  
    1-7标准漏孔reference leak : ?X.MKNbp  
    1-8虚漏virtual leak: 3:h9cO/9  
    1-9漏率leak rate: hd2 X/"  
    1-10标准空气漏率standard air leak rate: ]' F{uDm[  
    1-11等值标准空气漏率equivalent standard air leak rate: JL4\%  
    1-12探索(示漏)气体: ui:  
    dik+BBu5z  
    2.本底 ='0f#>0Q  
    2-1本底background: -/.Xf<y58  
    2-2探索气体本底search gas background : VBIY[2zf  
    2-3漂移drift: YolO-5  
    2-4噪声noise: _ s]=g  
    *8uSy/l  
    3.检漏仪 XACbDKyS  
    3-1检漏仪leak detector: xPY/J#X$  
    3-2高频火花检漏仪H.F. spark leak detector: _Z|s!~wdz  
    3-3卤素检漏仪halide leak detector: JxP=[>I  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: K`nI$l7hg  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: ?5#Ng,8iT  
    pH%cbBm  
    4.检漏 >a;^=5E  
    4-1气泡检漏leak detection by bubbles: *JX)q  
    4-2氨检漏leak detection by ammonia: {P_~_5o_  
    4-3升压检漏leak detection of rise pressure: nL+*-R!R  
    4-4放射性同位素检漏radioactive isotope leak detection: tj ,*-).4%  
    4-5荧光检漏fluorescence leak detection '|b {  
    7.   1.一般术语 a<%WFix  
    1-1真空干燥vacuum drying: fa#]G^f  
    1-2冷冻干燥freeze drying : ^IxT.g  
    1-3物料material: _be*B+?2t  
    1-4待干燥物料material to be dried: *=1;HN3  
    1-5干燥物料dried material : zv]-(<B  
    1-6湿气moisture;humidity: zn T85#]\@  
    1-7自由湿气free moisture: %:n1S]Vr  
    1-8结合湿气bound moisture: &X +Qi  
    1-9分湿气partial moisture: l[O!_bH  
    1-10含湿量moisture content: {R7>-Y[4)2  
    1-11初始含湿量initial moisture content: .#uRJo%8  
    1-12最终含湿量final residual moisture: ~ySmN}3~'  
    1-13湿度degree of moisture ,degree of humidity : {_1^ GIIS  
    1-14干燥物质dry matter : /LM*nN$%  
    1-15干燥物质含量content of dry matter: ~y}M GUEC  
    8u$Kr q  
    2.干燥工艺 `)F lb|da  
    2-1干燥阶段stages of drying : ObIi$uJX  
    (1).预干燥preliminary dry:  U&PAs e  
    (2).一次干燥(广义)primary drying(in general): _7YAF,@vT  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): }(AUe5aw`G  
    (4).二次干燥secondary drying: aW7{T6.,  
    2-2.(1).接触干燥contact drying: ;^ :9huN  
    (2).辐射干燥 drying by radiation : p3:x\P<|  
    (3).微波干燥microwave drying: Hw5\~!FX  
    (4).气相干燥vapor phase drying: Y;je::"  
    (5).静态干燥static drying: ?#xNz=V  
    (6).动态干燥dynamic drying: PNXZ3:W  
    2-3干燥时间drying time: zh'TR$+\hO  
    2-4停留时间length of stay(in the drying chamber): e| (jv<~r  
    2-5循环时间cycle time: !Y-MUZ$f  
    2-6干燥率 dessication ratio : +15j^ Az  
    2-7去湿速率mass flow rate of humidity: j?1\E9&4-Q  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: Tk9*@kqv  
    2-9干燥速度 drying speed : PGMu6$  
    2-10干燥过程drying process: [UquI "  
    2-11加热温度heating temperature: -Q;5A;sr2  
    2-12干燥温度temperature of the material being dried : FpE83}@".w  
    2-13干燥损失loss of material during the drying process : 9Ps:]Kp!vN  
    2-14飞尘lift off (particles): ,JT|E~P?8  
    2-15堆层厚度thickness of the material: :Tw3Oo_~S  
    epm  t  
    3.冷冻干燥 2GcQh]ohc  
    3-1冷冻freezing: /`0*!sN*5  
    (1).静态冷冻static freezing: RMDs~  
    (2).动态冷冻dynamic freezing: ;u,%an<(  
    (3).离心冷冻centrifugal freezing: Z;XR%n8  
    (4).滚动冷冻shell freezing: =2bW"gs I  
    (5).旋转冷冻spin-freezing: ^LTLyt)/  
    (6).真空旋转冷冻vacuum spin-freezing: ]c+qD,wqt>  
    (7).喷雾冷冻spray freezing: 4QK([q  
    (8).气流冷冻air blast freezing: o(>!T=f  
    3-2冷冻速率rate of freezing: '/SMqmi  
    3-3冷冻物料frozen material: #O^H? 3Q3  
    3-4冰核ice core: $}l0Nh'Eu  
    3-5干燥物料外壳envelope of dried matter: 3j0/&ON  
    3-6升华表面sublimation front: .t xgb  
    3-7融化位置freezer burn: wCeSs=[  
    *D F5sY  
    4.真空干燥设备;真空冷冻干燥设备 @.T'  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: 4XQv  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: 9M~EH?>+[  
    4-3加热表面heating surface: `8\pihww  
    4-4物品装载面shelf : jfl7L"2  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): Kom$i<O?48  
    4-6单位面积干燥器处理能力throughput per shelf area: gPe*M =iF  
    4-7冰冷凝器ice condenser: zUXqTcj  
    4-8冰冷凝器的负载load of the ice condenser: 6<NaME  
    4-9冰冷凝器的额定负载rated load of the ice condenser I'BoP  
    8.   1.一般术语 BkA>':bUr  
    1-1试样sample : B[C2uVEX:  
    (1).表面层surface layer: !li Q;R&  
    (2).真实表面true surface: dI-=0v-|  
    (3).有效表面积effective surface area: CBs0>M/  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: &pK1S>t  
    (5).表面粒子密度surface particle density: A2uSH@4  
    (6).单分子层monolayer: :cG_aO kid  
    (7).表面单分子层粒子密度monolayer density: Hm`9M.5b  
    (8).覆盖系数coverage ratio: f&H):.  
    1-2激发excitation: >AV-i$4eQ@  
    (1).一次粒子primary particle: >t'/(y  
    (2).一次粒子通量primary particle flux: `f*?|)  
    (3).一次粒子通量密度density of primary particle flux: B!! xu  
    (4).一次粒子负荷primary particle load: W )q^@6[d  
    (5).一次粒子积分负荷integral load of primary particle: Ne@Iv)g?  
    (6).一次粒子的入射能量energy of the incident primary particle: +kH*BhSj  
    (7).激发体积excited volume: "2 ma]Ps  
    (8).激发面积excited area: 0+;.T1?  
    (9).激发深度excited death: <'-}6f3  
    (10).二次粒子secondary particles: U[c,cdA  
    (11).二次粒子通量secondary particle flux: fa/ '4  
    (12).二次粒子发射能energy of the emitted secondary particles: E0>4Q\n{  
    (13).发射体积emitting volume: h;^h[q1'  
    (14).发射面积emitting area: K`j#'`/KC  
    (15).发射深度emitting depth: XkCbdb  
    (16).信息深度information depth: M=x/PrY"R  
    (17).平均信息深度mean information depth: QSAz:Yvf|  
    1-3入射角angle of incidence: 8 ]dhNA5  
    1-4发射角angle of emission: *@dRL3c^=  
    1-5观测角observation: 3kdTteyy+  
    1-6分析表面积analyzed surface area: | 3!a=  
    1-7产额 yield : JnmJN1@I  
    1-8表面层微小损伤分析minimum damage surface analysis: +0.$w  
    1-9表面层无损伤分析non-destructive surface analysis: b3H~a2"d  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : ! 0fpD'f!n  
    1-11可观测面积observable area: q3VE\&*^F  
    1-12可观测立体角observable solid angle : N/8qd_:8  
    1-13接受立体角;观测立体角angle of acceptance: jkFS=eonK  
    1-14角分辨能力angular resolving power: Mm :6+  
    1-15发光度luminosity: ' ,a'r.HJH  
    1-16二次粒子探测比detection ratio of secondary particles: d&w g\"E  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: [O&2!x  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: aa.EtKl  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: 2l{g$44  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: VDx=Tsu-  
    1-21本底压力base pressure: Q68&CO(rE  
    1-22工作压力working pressure: R8c1~'  
    +su>0'a  
    2.分析方法 z\oq b) a  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: )|XmF4R  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : sn+i[  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: jLI(Z  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: lHV bn7  
    2-3离子散射表面分析ion scattering spectroscopy: 7cK#fh"hvg  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: YCj"^RC^  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: Z$k4T$,[-  
    2-6离子散射谱仪ion scattering spectrometer: gJ+MoAM"  
    2-7俄歇效应Auger process: (WVN*OR?  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: =IkQ;L&  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: rG:IS=  
    2-10光电子谱术photoelectron spectroscopy : G':mc{{  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: !?D PI)  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: <dV|N$WV  
    2-11光电子谱仪photoelectron spectrometer: _.' j'j%  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: qy`@\)S/5  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: o*_[3{FU  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): J|W~\(W6i  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊