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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 <KJ/<0l  
    --------------------------------------------------- \J4L:.`qS  
    真空术语 LHyB3V  
    !-g{[19\  
    1.标准环境条件 standard ambient condition: O24m;oHM  
    2.气体的标准状态 standard reference conditions forgases: q?Cnav`DY  
    3.压力(压强)p pressure: %7QV&[4!  
    4.帕斯卡Pa pascal: imVo<Je7z(  
    5.托Torr torr: @tF\p  
    6.标准大气压atm standard atmosphere: <NHH^M\N  
    7.毫巴mbar millibar: Tg7an&#  
    8.分压力 partial pressure: k}S :RK  
    9.全压力 total pressure: Vo4,@scG  
    10.真空 vacuum: u/UrAqw  
    11.真空度 degree of vacuum: Juo^,  
    12.真空区域 ranges of vacuum: [Hx0`Nc K  
    13.气体 gas: xv46r=>  
    14.非可凝气体 non-condensable gas: bAdn &   
    15.蒸汽vapor: .7O*pJ2(H  
    16.饱和蒸汽压saturation vapor pressure: f<-Jg  
    17.饱和度degree of saturation: LmRy1T,act  
    18.饱和蒸汽saturated vapor: pk>^?MO  
    19.未饱和蒸汽unsaturated vapor: PG2:~$L0  
    20.分子数密度n,m-3 number density of molecules: mR!1DQ.\<  
    21.平均自由程ι、λ,m mean free path: Plc-4y1  
    22.碰撞率ψ collision rate: )tG\vk=@  
    23.体积碰撞率χ volume collision rate: +|*IZ:w)  
    24.气体量G quantity of gas: 8aZ=?_gvT  
    25.气体的扩散 diffusion of gas: 9/9j+5}+  
    26.扩散系数D diffusion coefficient; diffusivity: pD(j'[  
    27.粘滞流 viscous flow: $5 >e  
    28.粘滞系数η viscous factor: n*o-Lo+Fe.  
    29.泊肖叶流 poiseuille flow: -Mi p,EO  
    30.中间流 intermediate flow: 4d"r^y'  
    31.分子流 molecular flow: /pm]BC  
    32克努曾数 number of knudsen: \TIT:1  
    33.分子泻流 molecular effusion; effusive flow: }#3V+X  
    34.流逸 transpiration: 5CuuG<0  
    35.热流逸 thermal transpiration: /Jta^Bj  
    36.分子流率qN molecular flow rate; molecular flux: uMUBh 80,L  
    37.分子流率密度 molecular flow rate density; density of molecular flux: lVd^ ^T*fh  
    38.质量流率qm mass flow rare: rUTcpGH  
    39.流量qG throughput of gas: mD/9J5:  
    40.体积流率qV volume flow rate: 'Jiw@t<o3`  
    41.摩尔流率qυ molar flow rate: =pr` '  
    42.麦克斯韦速度分布 maxwellian velocity distribution: q$p%ZefZ  
    43.传输几率Pc transmission probability: Qd)q([  
    44.分子流导CN,UN molecular conductance: oVnvO iAc  
    45.流导C,U conductance: (DJ"WG  
    46.固有流导Ci,Ui intrinsic conductance: \$R_YKGf1G  
    47.流阻W resistance: bw(a6qKK  
    48.吸附 sorption: +00b)TF  
    49.表面吸附 adsorption: :v0U|\j8/V  
    50.物理吸附physisorption: ,Z aRy$?  
    51.化学吸附 chemisorption: s:?SF.  
    52.吸收absorption: H-WJp<_  
    53.适应系数α accommodation factor: `-.%^eIp  
    54.入射率υ impingement rate: ?U%QG5/>  
    55.凝结率condensation rate: ^/)^7\@  
    56.粘着率 sticking rate: ~Io7]  
    57.粘着几率Ps sticking probability: Ki4r<>\l{H  
    58.滞留时间τ residence time: ()2I#  
    59.迁移 migration: ^"2i   
    60.解吸 desorption: v5/~-uRL%  
    61.去气 degassing: ,%6P0#-  
    62.放气 outgassing: ;m0~L=w  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: -O1>|y2rU  
    64.蒸发率 evaporation rate: ng[Ar`  
    65.渗透 permeation: vhe>)h*B  
    66.渗透率φ permeability: Az9?Ra;U  
    67.渗透系数P permeability coefficient mGtdO/C#B  
    2.   1.真空泵 vacuum pumps I*o()  
    1-1.容积真空泵 positive displacement pump: \jh'9\  
    ⑴.气镇真空泵 gas ballast vacuum pump: &[_g6OL  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: Hek*R?M|  
    ⑶.干封真空泵 dry-sealed vacuum pump: !-ok"k0,u  
    ⑷.往复真空泵 piston vacuum pump: eS{!)j_^  
    ⑸.液环真空泵 liquid ring vacuum pump: @u.58H& }R  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: b v G/|U  
    ⑺.定片真空泵 rotary piston vacuum pump: O80<Z#%j`  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: ^b/ Z)3  
    ⑼.余摆线真空泵 trochoidal vacuum pump: YO#M/%^j  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: G(Lzf(  
    ⑾.罗茨真空泵 roots vacuum pump: ?*2CpM&l  
    1-2.动量传输泵 kinetic vacuum pump: 2I%MAb&1@  
    ⑴.牵引分子泵molecular drag pump: J{'>uD.@  
    ⑵.涡轮分子泵turbo molecular pump: ht7l- AK  
    ⑶.喷射真空泵ejector vacuum pump: a<@1 -j<  
    ⑷.液体喷射真空泵liquid jet vacuum pump: ;ZH3{  
    ⑸.气体喷射真空泵gas jet vacuum pump: wE[]6\_x1  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : lAi6sPG)0  
    ⑺.扩散泵diffusion pump : gaQdG=G8$  
    ⑻.自净化扩散泵self purifying diffusion pump: Fa?~0H/DL  
    ⑼.分馏扩散泵 fractionating diffusion pump : o%v0h~tn  
    ⑽.扩散喷射泵diffusion ejector pump : j`oy`78O  
    ⑾.离子传输泵ion transfer pump: T3~k>"W  
    1-3.捕集真空泵 entrapment vacuum pump: ~kQA7;`j$  
    ⑴吸附泵adsorption pump: !5.8]v  
    ⑵.吸气剂泵 getter pump: >go,K{cK6  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : 4y)P>c  
    ⑷.吸气剂离子泵getter ion pump: -- PtZ]Z  
    ⑸.蒸发离子泵 evaporation ion pump: p rYs $j  
    ⑹.溅射离子泵sputter ion pump: !HrKXy 0{  
    ⑺.低温泵cryopump: [ OM7g'?S0  
    I2TaT(e\  
    2.真空泵零部件 +Fuqch jq  
    2-1.泵壳 pump case: JM=JH 51`  
    2-2.入口 inlet: 8s"%u )  
    2-3.出口outlet: m4aB*6<lq  
    2-4.旋片(滑片、滑阀)vane; blade : QFw  +cy  
    2-5.排气阀discharge valve: O/,aJCe  
    2-6.气镇阀gas ballast valve: q ]M+/sl  
    2-7.膨胀室expansion chamber: QOjqQfmM;  
    2-8.压缩室compression chamber: L0* nm.1X  
    2-9.真空泵油 vacuum pump oil: |s"nM<ZNZ  
    2-10.泵液 pump fluid: plUZ"Tr  
    2-11.喷嘴 nozzle: b6}H$Sx~  
    2-13.喷嘴扩张率nozzle expansion rate: ?kWC}k{  
    2-14.喷嘴间隙面积 nozzle clearance area : H GXt  
    2-15.喷嘴间隙nozzle clearance: f%Ns[S~r  
    2-16.射流jet: d p2F  
    2-17.扩散器diffuser: )0ea+ ib  
    2-18.扩散器喉部diffuser thoat: NPCs('cd>?  
    2-19.蒸汽导管vapor tube(pipe;chimney): TcIcS]w%  
    2-20.喷嘴组件nozzle assembly: ]DOX?qI i  
    2-21.下裙skirt: M:-.o  
    bu |a0h7e  
    3.附件 CsTF  
    3-1阱trap: Qy.w=80kf  
    ⑴.冷阱 cold trap: &{>cZh}\  
    ⑵.吸附阱sorption trap: 'SCidN(n  
    ⑶.离子阱ion trap:  Jd%H2`  
    ⑷.冷冻升华阱 cryosublimation trap: X}tVmO?  
    3-2.挡板baffle: "]z-: \ V  
    3-3.油分离器oil separator: MOsl_^c  
    3-4.油净化器oil purifier: @\0Eu212  
    3-5.冷凝器condenser: ?0)&U  
    ? i( %  
    4.泵按工作分类 - M[$Zy^  
    4-1.主泵main pump: 29!q!g|  
    4-2.粗抽泵roughing vacuum pump: _{r=.W+ w  
    4-3.前级真空泵backing vacuum pump: &z>e5_.  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: Fe]B&n  
    4-5.维持真空泵holding vacuum pump: ,17hGKM  
    4-6.高真空泵high vacuum pump: 0Uz\H0T1  
    4-7.超高真空泵ultra-high vacuum pump: p /#$io  
    4-8.增压真空泵booster vacuum pump: #tZ4N7  
    &m|wH4\  
    5.真空泵特性 Sg6"WV{<  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: c8L~S/t  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 O>^C4c!  
    5-3.起动压力starting pressure: TYJ:!  
    5-4.前级压力 backing pressure : W6"v)Jc>_  
    5-5.临界前级压力 critical backing pressure: zY|t0H  
    5-6.最大前级压力maximum backing pressure: mH Ic f{RG  
    5-7.最大工作压力maximum working pressure: SILQ  
    5-8.真空泵的极限压力ultimate pressure of a pump: UVw~8o9s  
    5-9.压缩比compression ratio: BO~PT,QrF  
    5-10.何氏系数Ho coefficient: `FYv3w2  
    5-11.抽速系数speed factor: L5#P[cHzz  
    5-12.气体的反扩散back-diffusion of gas: wQwQXNG  
    5-13.泵液返流back-streaming of pump fluid: qQ"Fv|]~>  
    5-14.返流率back-streaming rate ^go7_y  
    5-15.返迁移back-migration: "Qja1TQ  
    5-16.爆腾bumping: 6ek;8dL  
    5-17.水蒸气允许量qm water vapor tolerable load: wvbPnf^y  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: 4eikLRD,  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: 7b<je=G6PA  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump g>dA$h%  
    3.   1.一般术语 ow_djv:,  
    1-1.压力计pressure gauge: q o\?o    
    1-2.真空计vacuum gauge: -C<zF`jO  
    ⑴.规头(规管)gauge head: QNA RkYY~|  
    ⑵.裸规nude gauge : hRty [  
    ⑶.真空计控制单元gauge control unit : P@,nA41,j  
    ⑷.真空计指示单元gauge indicating unit : >2,Gy-&"0  
    'bo~%WA]n  
    2.真空计一般分类 T}"6wywM  
    2-1.压差式真空计differential vacuum gauge:  ^}:#  
    2-2.绝对真空计 absolute vacuum gauge: q|8{@EMT  
    2-3.全压真空计total pressure vacuum gauge: 91$]Qg,lB  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: <L`"!~Q  
    2-5.相对真空计relative vacuum gauge : i K12 pw  
    :cGt#d6  
    3.真空计特性 cG?cUw).E  
    3-1.真空计测量范围pressure range of vacuum gauge: ,4ei2`wV  
    3-2.灵敏度系数sensitivity coefficient: G.( mp<-  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): k'#(1(xj  
    3-5.规管光电流photon current of vacuum gauge head: QF&W`c  
    3-6.等效氮压力equivalent nitrogen pressure : nS&3?lx9_  
    3-7.X射线极限值 X-ray limit: tkXEHsRT  
    3-8.逆X射线效应anti X-ray effect: )l!3(  
    3-9.布利尔斯效应blears effect: ]R=,5kK3  
    RTv qls  
    4.全压真空计 (iR ide  
    4-1.液位压力计liquid level manometer: oI.G-ChP  
    4-2.弹性元件真空计elastic element vacuum gauge: tUgEeh6  
    4-3.压缩式真空计compression gauge: (y M^  
    4-4.压力天平pressure balance: O9g{+e`  
    4-5.粘滞性真空计viscosity gauge : $ZNu+tn Y  
    4-6.热传导真空计thermal conductivity vacuum gauge : 5!EJxP9  
    4-7.热分子真空计thermo-molecular gauge: F$^Su<w5l  
    4-8.电离真空计ionization vacuum gauge: 9:e YU =  
    4-9.放射性电离真空计radioactive ionization gauge: {; .T7dL  
    4-10.冷阴极电离真空计cold cathode ionization gauge: u-tQ9ioKC  
    4-11.潘宁真空计penning gauge: QK+(g,)_86  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: Zc!@0  
    4-13.放电管指示器discharge tube indicator: ,2j.<g&   
    4-14.热阴极电离真空计hot cathode ionization gauge: ET[k pL  
    4-15.三极管式真空计triode gauge: ei6AV1| p  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: $d,0=Ci  
    4-17.B-A型电离真空计Bayard-Alpert gauge: hs?sGr  
    4-18.调制型电离真空计modulator gauge: kdn'6>\  
    4-19.抑制型电离真空计suppressor gauge: I(9R~q  
    4-20.分离型电离真空计extractor gauge: !>>f(t4  
    4-21.弯注型电离真空计bent beam gauge: Qu7T[ <  
    4-22.弹道型电离真空计 orbitron gauge : ($L Ll;1  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: :OW ;?{ ~j  
    #'q<v"w  
    5.分压真空计(分压分析器) 6<'21  
    5-1.射频质谱仪radio frequency mass spectrometer: }sx_Yj  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: =L C:SFzF  
    5-3.单极质谱仪momopole mass spectrometer: m\ddp_l  
    5-4.双聚焦质谱仪double focusing mass spectrometer: %/>Y/!;  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: U-:ieao@  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: MNg^]tpf  
    5-7.回旋质谱仪omegatron mass spectrometer: qY >{cjo  
    5-8.飞行时间质谱仪time of flight mass spectrometer: 3LfC{ER  
    [xT:]Pw}  
    6.真空计校准 RGK8'i/X  
    6-1.标准真空计reference gauges: @]![o %  
    6-2.校准系统system of calibration: o}<4*qlI  
    6-3.校准系数K calibration coefficient: [Tnsr(Z  
    6-4.压缩计法meleod gauge method: ?X5]i#j[  
    6-5.膨胀法expansion method: 06Gt&_Q  
    6-6.流导法flow method: !o>H1#2l  
    4.   1.真空系统vacuum system >y}M.Mm  
    1-1.真空机组pump system: f}L*uw  
    1-2.有油真空机组pump system used oil : (E,Yo  
    1-3.无油真空机组oil free pump system UK{irU|\  
    1-4.连续处理真空设备continuous treatment vacuum plant: VL[kJi   
    1-5.闸门式真空系统vacuum system with an air-lock:  ru`U'  
    1-6.压差真空系统differentially pumped vacuum system: VOr1  
    1-7.进气系统gas admittance system: 3( ]M{4j  
    de]zT^&C  
    2.真空系统特性参量 #_B-4sm  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : HBY.DCN[Z  
    2-2.抽气装置的抽气量throughput of a pumping unit : <BW[1h1k5_  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: [j"9rO" +  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: 9m-)Xdoy  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: 9<vWcq*4  
    2-6.极限压力ultimate pressure: TI !a)X  
    2-7.残余压力residual pressure: *-12VIG'H  
    2-8.残余气体谱residual gas spectrum: .7 asW(  
    2-9.基础压力base pressure: "7 v-` i  
    2-10.工作压力working pressure: @m?QR(LJ  
    2-11.粗抽时间roughing time: suH&jE$x  
    2-12.抽气时间pump-down time: l?iSxqdT  
    2-13.真空系统时间常数time constant of a vacuum system: ^T.E+2=>z  
    2-14.真空系统进气时间venting time: Q.Aw2  
    0I{gJSK.,  
    3.真空容器 E0/mSm"(T  
    3-1.真空容器;真空室vacuum chamber: )9S>Z ZF  
    3-2.封离真空装置sealed vacuum device: @vMA=v7a  
    3-3.真空钟罩vacuum bell jar: 1.D-FPK  
    3-4.真空容器底板vacuum base plate: Q`#4W3-,  
    3-5.真空岐管vacuum manifold: \j2;4O?`  
    3-6.前级真空容器(贮气罐)backing reservoir: '&99?s`u  
    3-7.真空保护层outer chamber: [I:KpAd/  
    3-8.真空闸室vacuum air lock: 7?v#'Ie s  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: ^ZM0c>ev=l  
    {T'GQz+R"  
    4.真空封接和真空引入线 JxjI]SF02  
    4-1.永久性真空封接permanent seal : dDDGM:]  
    4.2.玻璃分级过渡封接graded seal : {u[V{XIUh  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: W- $a Y2  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: -B$~`2-  
    4-5.陶瓷金属封接ceramic-to-metal seal: @h?shW=^  
    4-6.半永久性真空封接semi-permanent seal : 3M0+"l(X  
    4-7.可拆卸的真空封接demountable joint: ~Z ~v  
    4-8.液体真空封接liquid seal j$da8] !  
    4-9.熔融金属真空封接molten metal seal: 4gSH(*}  
    4-10.研磨面搭接封接ground and lapped seal: l/y]nw  
    4-11.真空法兰连接vacuum flange connection: )s9',4$eK<  
    4-12.真空密封垫vacuum-tight gasket: :y2p@#l#  
    4-13.真空密封圈ring gasket: $ \*` }Y  
    4-14.真空平密封垫flat gasket: XCsiEKZ_i  
    4-15.真空引入线feedthrough leadthrough: d/74{.  
    4-16.真空轴密封shaft seal: J!ntXF  
    4-17.真空窗vacuum window: $3X-r jQtW  
    4-18.观察窗viewing window: L5IbExjV  
    U Q@7n1  
    5.真空阀门 Zc"B0_&?:7  
    5-1.真空阀门的特性characteristic of vacuum valves: /$"[k2 N  
    ⑴.真空阀门的流导conductance of vacuum valves: ._z 'g_c(  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: CnN9!~]"  
    5-2.真空调节阀regulating valve: Z.i{i^/#(  
    5-3.微调阀 micro-adjustable valve: ~Cc.cce5  
    5-4.充气阀charge valve: ?hYqcT[%  
    5-5.进气阀gas admittance valve: (x;g/!:  
    5-6.真空截止阀break valve: 6O2=Ns;J6  
    5-7.前级真空阀backing valve: i v(5&'[p  
    5-8.旁通阀 by-pass valve: 0(8H;T  
    5-9.主真空阀main vacuum valve: XA_FOw!cX  
    5-10.低真空阀low vacuum valve: #kkY@k$4  
    5-11.高真空阀high vacuum valve: 4*Z6}"  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: = \ , qP  
    5-13.手动阀manually operated valve: K:y^OAZfV  
    5-14.气动阀pneumatically operated valve: >yJ-4lgZ  
    5-15.电磁阀electromagnetically operated valve: 5wC* ?>/  
    5-16.电动阀valve with electrically motorized operation: s]27l3)B  
    5-17.挡板阀baffle valve: ,%#   
    5-18.翻板阀flap valve: .wrL3z_  
    5-19.插板阀gate valve: :Zw @yt  
    5-20.蝶阀butterfly valve: \nrP$  
    1+y"i<3)  
    6.真空管路 IO.<q,pP!_  
    6-1.粗抽管路roughing line: 9=dkx^q  
    6-2.前级真空管路backing line: RAs0]K  
    6-3.旁通管路;By-Pass管路 by-pass line: sTHq&(hLUG  
    6-4.抽气封口接头pumping stem: ~:sE:9$z  
    6-5.真空限流件limiting conductance:       '_+9y5  
    6-6.过滤器filter: ts9pM~_~  
    5.   1.一般术语 O';ew)tI  
    1-1真空镀膜vacuum coating: "L& k)J  
    1-2基片substrate: B`#h{)[  
    1-3试验基片testing substrate: dpN@#w  
    1-4镀膜材料coating material: a?cn9i)#  
    1-5蒸发材料evaporation material: Y^ve:Z  
    1-6溅射材料sputtering material: Vs 0 SXj  
    1-7膜层材料(膜层材质)film material: X}4}&  
    1-8蒸发速率evaporation rate: \6j^k Y=  
    1-9溅射速率sputtering rate: ://U^sFL  
    1-10沉积速率deposition rate: iy5R5L 2  
    1-11镀膜角度coating angle: @u4=e4eF`  
    Xwu.AVsr  
    2.工艺 6a}r( yP  
    2-1真空蒸膜vacuum evaporation coating: nX%AeDBAT  
    (1).同时蒸发simultaneous evaporation: }3/~x  
    (2).蒸发场蒸发evaporation field evaporation: MXAEX2xmme  
    (3).反应性真空蒸发reactive vacuum evaporation: Il~01|3+m  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: X.|Ygx  
    (5).直接加热的蒸发direct heating evaporation: EH9Hpo  
    (6).感应加热蒸发induced heating evaporation: )xl6,bq3  
    (7).电子束蒸发electron beam evaporation: nZvU 'k:  
    (8).激光束蒸发laser beam evaporation: f_r0})  
    (9).间接加热的蒸发indirect heating evaporation: T.?k>A k  
    (10).闪蒸flash evaportion: ]= x 1`j  
    2-2真空溅射vacuum sputtering: Aa(<L$e!`  
    (1).反应性真空溅射 reactive vacuum sputtering: |DG@ht  
    (2).偏压溅射bias sputtering: $G?(OWI}l`  
    (3).直流二级溅射direct current diode sputtering: -]"T^w ib  
    (4).非对称性交流溅射asymmtric alternate current sputtering: ' lo.h""  
    (5).高频二极溅射high frequency diode sputtering: <4?*$  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: p%RUHN3G[  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: pz}mF D&[  
    (8).离子束溅射ion beam sputtering: ,a(O`##Bn  
    (9).辉光放电清洗glow discharge cleaning: ?g  }kb  
    2-3物理气相沉积PVD physical vapor deposition: xl!K;Y2<  
    2-4化学气相沉积CVD chemical vapor deposition: X.J  
    2-5磁控溅射magnetron sputtering: Gi$gtLtN h  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: NtZ6$o<Y  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: t3F?>G#y  
    2-8电弧离子镀arc discharge deposition: fNhT;Bux  
    *%- ?54B  
    3.专用部件 |_pl;&;:  
    3-1镀膜室coating chamber: j=3-Qk`"/|  
    3-2蒸发器装置evaporator device: O2#S: ~h  
    3-3蒸发器evaporator: r\mPIr|  
    3-4直接加热式蒸发器evaporator by direct heat: ^e9aD9  
    3-5间接加热式蒸发器evaporator by indirect heat: L{PH0Jf  
    3-7溅射装置sputtering device: i-13~Dk  
    3-8靶target: zHFTCL>"  
    3-10时控挡板timing shutter: V<0$xV1b|=  
    3-11掩膜mask: =P_fv  
    3-12基片支架substrate holder: F3 f@9@b   
    3-13夹紧装置clamp: "a( 1s} ,  
    3-14换向装置reversing device: $N\+,?  
    3-15基片加热装置substrate heating device: dq 8+m(7k  
    3-16基片冷却装置substrate colding device: @InJ_9E  
    (|0b7 |'T  
    4.真空镀膜设备 iSd?N}2,I  
    4-1真空镀膜设备vacuum coating plant: .Vh*Z<9S4  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: KM5 JZZP  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: |!b9b(_j9  
    4-2连续镀膜设备continuous coating plant: u5E/m  
    4-3半连续镀膜设备semi- continuous coating plant h DtK nF  
    6.   1.漏孔 G2@KI-  
    1-1漏孔leaks: zz3 r<?#5  
    1-2通道漏孔channel leak: TzY!D *%z  
    1-3薄膜漏孔membrane leak: Y\8+}g;KR  
    1-4分子漏孔molecular leak:  ^@q#$/z  
    1-5粘滞漏孔vixcous leak: QN #)F  
    1-6校准漏孔calibrated leak: zlMlMyG4  
    1-7标准漏孔reference leak : MgnE-6_c  
    1-8虚漏virtual leak: \\iK'|5YG  
    1-9漏率leak rate: *f*f&l%  
    1-10标准空气漏率standard air leak rate: LhKY}R  
    1-11等值标准空气漏率equivalent standard air leak rate: 00qZw?%K  
    1-12探索(示漏)气体: z[biK|YL  
    pX]21&F  
    2.本底 C 38XQLC  
    2-1本底background: lVT&+r~r  
    2-2探索气体本底search gas background : |KaR n;BM  
    2-3漂移drift: KL~AzLI  
    2-4噪声noise: R\ q):,  
    thQ J(w  
    3.检漏仪 q (1r<2  
    3-1检漏仪leak detector: W^|J/Y48  
    3-2高频火花检漏仪H.F. spark leak detector: ReqE?CeV  
    3-3卤素检漏仪halide leak detector: %(NN *o9"q  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: m9b(3  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: i0i`k^bA  
    O 'Am RJ  
    4.检漏 %xh?!s|G(  
    4-1气泡检漏leak detection by bubbles: cl2ze  
    4-2氨检漏leak detection by ammonia: QB9A-U <J  
    4-3升压检漏leak detection of rise pressure: %O Fj  
    4-4放射性同位素检漏radioactive isotope leak detection: _M&{^d  
    4-5荧光检漏fluorescence leak detection 2@5A&b  
    7.   1.一般术语 -PXoMZx%  
    1-1真空干燥vacuum drying: U[Nosh)hu\  
    1-2冷冻干燥freeze drying : My0!=4Any  
    1-3物料material:  mc~`  
    1-4待干燥物料material to be dried: "$Y(NFb  
    1-5干燥物料dried material : q@w"yz>  
    1-6湿气moisture;humidity: 6*V8k%H  
    1-7自由湿气free moisture: u:eW0Ows"  
    1-8结合湿气bound moisture: [nC4/V+-  
    1-9分湿气partial moisture: *CT.G'bQX  
    1-10含湿量moisture content: )ZeLaaP  
    1-11初始含湿量initial moisture content: $BaK'7=3*  
    1-12最终含湿量final residual moisture: fYs?D+U;PF  
    1-13湿度degree of moisture ,degree of humidity : _4Ii5CNNU  
    1-14干燥物质dry matter : W`5a:"Vg  
    1-15干燥物质含量content of dry matter: <\Vi,,  
    6w@,I;   
    2.干燥工艺 pbFYiu+  
    2-1干燥阶段stages of drying : 8eN%sm  
    (1).预干燥preliminary dry: p^Agh  
    (2).一次干燥(广义)primary drying(in general): xLZMpP5c  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): {Bc#?n  
    (4).二次干燥secondary drying: z=[l.Af_  
    2-2.(1).接触干燥contact drying: %L28$c3p  
    (2).辐射干燥 drying by radiation : dUZ$wbV%h  
    (3).微波干燥microwave drying: K^8@'#S  
    (4).气相干燥vapor phase drying: h2AGEg'g2[  
    (5).静态干燥static drying: :K: f^o]s  
    (6).动态干燥dynamic drying: .dt#2a_5q  
    2-3干燥时间drying time: 22PGWSQ  
    2-4停留时间length of stay(in the drying chamber): OoE9W  
    2-5循环时间cycle time: MHGjvSx  
    2-6干燥率 dessication ratio : s5nB(L*Pjp  
    2-7去湿速率mass flow rate of humidity: 1"M"h_4  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: H a90  
    2-9干燥速度 drying speed : |c=d;+  
    2-10干燥过程drying process: rAL1TU(vm  
    2-11加热温度heating temperature:  &Q<EfB  
    2-12干燥温度temperature of the material being dried : sK#H4y+<  
    2-13干燥损失loss of material during the drying process : zv`zsqDJ  
    2-14飞尘lift off (particles): 9A(n _Rs7?  
    2-15堆层厚度thickness of the material: 2NyUmJ42  
    o}d2N/T  
    3.冷冻干燥 d8D yv#gT  
    3-1冷冻freezing: cgzy0$8dj\  
    (1).静态冷冻static freezing: |e~u!V\m  
    (2).动态冷冻dynamic freezing: uF+);ig  
    (3).离心冷冻centrifugal freezing: >'ie!VW@  
    (4).滚动冷冻shell freezing: !B0v<+;P8  
    (5).旋转冷冻spin-freezing: i'U,S`L6>  
    (6).真空旋转冷冻vacuum spin-freezing: 4$ ..r4@  
    (7).喷雾冷冻spray freezing: >\Z lZ  
    (8).气流冷冻air blast freezing: 8rla0d@  
    3-2冷冻速率rate of freezing: ]~$c~*0g  
    3-3冷冻物料frozen material: md.*  
    3-4冰核ice core: eB)UXOu1  
    3-5干燥物料外壳envelope of dried matter: sV]i/B  
    3-6升华表面sublimation front: :O5Tr03z  
    3-7融化位置freezer burn: [5x+aW%ql  
    Tw?Pp8'  
    4.真空干燥设备;真空冷冻干燥设备 Dr4?Ow  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: @ysJt  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: D7 %^Ly  
    4-3加热表面heating surface: e|S+G6 :O2  
    4-4物品装载面shelf : `MN&(!&C*  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): 5hlJbWJa  
    4-6单位面积干燥器处理能力throughput per shelf area: H't`Q&]a  
    4-7冰冷凝器ice condenser: =c :lS&B  
    4-8冰冷凝器的负载load of the ice condenser: ?psOj%  
    4-9冰冷凝器的额定负载rated load of the ice condenser K!pxDW}  
    8.   1.一般术语 Ej-=y2j{g  
    1-1试样sample : &z7N\n  
    (1).表面层surface layer: @hE7r-}]  
    (2).真实表面true surface: B)_!F`9  
    (3).有效表面积effective surface area: P c/.*kOT  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area:  "Nk`RsW  
    (5).表面粒子密度surface particle density: ?FkQe~FN{  
    (6).单分子层monolayer: Lr!L}y9T+  
    (7).表面单分子层粒子密度monolayer density: WiPM <'  
    (8).覆盖系数coverage ratio: BiVd ka  
    1-2激发excitation: H[>klzh6 !  
    (1).一次粒子primary particle: K * xM[vO  
    (2).一次粒子通量primary particle flux: J"m%q\'  
    (3).一次粒子通量密度density of primary particle flux: DW'0j$;  
    (4).一次粒子负荷primary particle load: uJ2C+$=Ul  
    (5).一次粒子积分负荷integral load of primary particle: >FK)p   
    (6).一次粒子的入射能量energy of the incident primary particle: nPQZI6>  
    (7).激发体积excited volume: Requ.?!fG;  
    (8).激发面积excited area: V\e13cL]  
    (9).激发深度excited death: @vVRF Z  
    (10).二次粒子secondary particles: ?yK%]1O  
    (11).二次粒子通量secondary particle flux: @g@ fL%  
    (12).二次粒子发射能energy of the emitted secondary particles: %[+a[/  
    (13).发射体积emitting volume: "<g?x`iz  
    (14).发射面积emitting area: t-?KKU8  
    (15).发射深度emitting depth: >" PqQO  
    (16).信息深度information depth: S)Ub/`f{s  
    (17).平均信息深度mean information depth: '#pMEVP  
    1-3入射角angle of incidence: =Qjw.6@  
    1-4发射角angle of emission: WrIL]kJw^  
    1-5观测角observation: LOyCx/n  
    1-6分析表面积analyzed surface area: SNopAACf1  
    1-7产额 yield : { ="Su{i}}  
    1-8表面层微小损伤分析minimum damage surface analysis: *Bb|N--jI  
    1-9表面层无损伤分析non-destructive surface analysis: A*-]J=:E {  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : rU2YMghE  
    1-11可观测面积observable area: !#_h2a  
    1-12可观测立体角observable solid angle : 0C"PC:h5  
    1-13接受立体角;观测立体角angle of acceptance: l&e5_]+%  
    1-14角分辨能力angular resolving power: $)kBz*C[  
    1-15发光度luminosity: H L}sqcp  
    1-16二次粒子探测比detection ratio of secondary particles: ?-RoqF  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: 8VAYIxRv  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: D-2v>l_  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: ;?O883@r8  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: %O4}i@Fe  
    1-21本底压力base pressure: E<98ahZ?l  
    1-22工作压力working pressure: @?^LxqAWA  
    d-#u/{jG)  
    2.分析方法 ]Lb?#S  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: Wzf1-0t  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : 9wDBC~.  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: qD=m{O8%_  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: Zh fD`@>&  
    2-3离子散射表面分析ion scattering spectroscopy: b[&,%Sm+6  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: ac+k 5K+  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: cA (e "N  
    2-6离子散射谱仪ion scattering spectrometer: N8MlT \+r  
    2-7俄歇效应Auger process: HIWmh4o/.  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: kS\.  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: SceCucT  
    2-10光电子谱术photoelectron spectroscopy : bVAgul=__  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: =p&'_a^$  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: 6Qzu-  
    2-11光电子谱仪photoelectron spectrometer: vwqN;|F  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: +=B}R  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: mrLx]og,  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): tci%=3,)  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊