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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 C+`V?rp=s  
    --------------------------------------------------- 6;!)^b  
    真空术语 ?-9uf\2_  
    7\nXJ381  
    1.标准环境条件 standard ambient condition: 'YbE%i}  
    2.气体的标准状态 standard reference conditions forgases: # SJJ@SM  
    3.压力(压强)p pressure: 8*B+@`  
    4.帕斯卡Pa pascal: $txF|Fj]^A  
    5.托Torr torr: 7D 3-/_v  
    6.标准大气压atm standard atmosphere: rADzJ#CU \  
    7.毫巴mbar millibar: p__N6a  
    8.分压力 partial pressure: <*u^8lCA  
    9.全压力 total pressure: Kf$(7FT'`  
    10.真空 vacuum: (LXYx<  
    11.真空度 degree of vacuum: !SnLvW89Z  
    12.真空区域 ranges of vacuum: #D{Eq8dp  
    13.气体 gas: s0x/2z  
    14.非可凝气体 non-condensable gas: ${wp}<u_  
    15.蒸汽vapor: ~mK +Q%G5  
    16.饱和蒸汽压saturation vapor pressure: >YF=6zq.`  
    17.饱和度degree of saturation: fWri7|"0h  
    18.饱和蒸汽saturated vapor: GGhk`z  
    19.未饱和蒸汽unsaturated vapor: q j9q   
    20.分子数密度n,m-3 number density of molecules: BE~-0g$W  
    21.平均自由程ι、λ,m mean free path: @}{uibLD\  
    22.碰撞率ψ collision rate: 9^Web~yi#  
    23.体积碰撞率χ volume collision rate: 9pS:#hg  
    24.气体量G quantity of gas: bt.3#aj  
    25.气体的扩散 diffusion of gas: Hmx.BBz  
    26.扩散系数D diffusion coefficient; diffusivity: T VSCjI  
    27.粘滞流 viscous flow: vMJ(Ll7/  
    28.粘滞系数η viscous factor: 4Xt`L"f  
    29.泊肖叶流 poiseuille flow: alNn(0MG  
    30.中间流 intermediate flow: U:c 0s  
    31.分子流 molecular flow: ^si[L52BZ  
    32克努曾数 number of knudsen: 1:@ScHS  
    33.分子泻流 molecular effusion; effusive flow: utC^wA5U~  
    34.流逸 transpiration: s6_i>  
    35.热流逸 thermal transpiration: 9!Xp+<  
    36.分子流率qN molecular flow rate; molecular flux: C6@*l~j  
    37.分子流率密度 molecular flow rate density; density of molecular flux: oZl%0Uy?9I  
    38.质量流率qm mass flow rare: =i Dd{$  
    39.流量qG throughput of gas: n^5Q f\o  
    40.体积流率qV volume flow rate: Hfo<EB2Y9N  
    41.摩尔流率qυ molar flow rate: mV4gw'.;7  
    42.麦克斯韦速度分布 maxwellian velocity distribution: &0%B3  
    43.传输几率Pc transmission probability: EQ :>]O  
    44.分子流导CN,UN molecular conductance: S0r+Y0J]<  
    45.流导C,U conductance: -O-?hsV)y  
    46.固有流导Ci,Ui intrinsic conductance: &_hEM~{  
    47.流阻W resistance: E_Y!in 70  
    48.吸附 sorption: Iu >4+6  
    49.表面吸附 adsorption: # kNp);  
    50.物理吸附physisorption: r{S DJa  
    51.化学吸附 chemisorption: nvNF~)mu  
    52.吸收absorption: V*Xr}FE  
    53.适应系数α accommodation factor: &k-NDh3  
    54.入射率υ impingement rate: fM*?i"j;Y  
    55.凝结率condensation rate: hJir_=  
    56.粘着率 sticking rate: RQ^ \|+_  
    57.粘着几率Ps sticking probability: U^U hZ!  
    58.滞留时间τ residence time: V3d$C&<(  
    59.迁移 migration:  ?<8c  
    60.解吸 desorption: eL}X().  
    61.去气 degassing: FCKyKn  
    62.放气 outgassing: KHJ wCv  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: [/ertB  
    64.蒸发率 evaporation rate: ~82 {Y _{/  
    65.渗透 permeation: s| Q1;%T j  
    66.渗透率φ permeability: Sl<1Rme=w  
    67.渗透系数P permeability coefficient Z'}%Mkm`i}  
    2.   1.真空泵 vacuum pumps h.l.da1#  
    1-1.容积真空泵 positive displacement pump: 19!;0fe=  
    ⑴.气镇真空泵 gas ballast vacuum pump: .c__T {<)[  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: ?cKTeGrS  
    ⑶.干封真空泵 dry-sealed vacuum pump: 9$C?)XKXB  
    ⑷.往复真空泵 piston vacuum pump: :)tsz;  
    ⑸.液环真空泵 liquid ring vacuum pump: 3Lq9pdM>2@  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: >lzXyT6x8  
    ⑺.定片真空泵 rotary piston vacuum pump: ?.lo[X<,*  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: U0{)goN.  
    ⑼.余摆线真空泵 trochoidal vacuum pump: dn Sb}J  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: _VmXs&4  
    ⑾.罗茨真空泵 roots vacuum pump: Ry xu#]s  
    1-2.动量传输泵 kinetic vacuum pump: &?Q^i">cZ  
    ⑴.牵引分子泵molecular drag pump: &rPAW V'v  
    ⑵.涡轮分子泵turbo molecular pump: #:/27  
    ⑶.喷射真空泵ejector vacuum pump: #Er"i  
    ⑷.液体喷射真空泵liquid jet vacuum pump: :eJJL,v  
    ⑸.气体喷射真空泵gas jet vacuum pump: A,=> |&*  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : y'>JT/Q5  
    ⑺.扩散泵diffusion pump : !y'>sAf  
    ⑻.自净化扩散泵self purifying diffusion pump: F[!%,-*  
    ⑼.分馏扩散泵 fractionating diffusion pump : tns8B  
    ⑽.扩散喷射泵diffusion ejector pump : *p#@W-:9E  
    ⑾.离子传输泵ion transfer pump: Z2H bAI8  
    1-3.捕集真空泵 entrapment vacuum pump: U?5lqq  
    ⑴吸附泵adsorption pump: v2p0EOS  
    ⑵.吸气剂泵 getter pump: -/0\_zq7  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : M*Ej*#  
    ⑷.吸气剂离子泵getter ion pump: m.! M#x2!  
    ⑸.蒸发离子泵 evaporation ion pump: 1sonDBd0@;  
    ⑹.溅射离子泵sputter ion pump: 84WcaH  
    ⑺.低温泵cryopump: X  u HR  
    (c^ {T)  
    2.真空泵零部件 <p/2hHfiD  
    2-1.泵壳 pump case: "19#{yX4  
    2-2.入口 inlet: {x_cgsn  
    2-3.出口outlet: -qHG*v,  
    2-4.旋片(滑片、滑阀)vane; blade : |0}7/^  
    2-5.排气阀discharge valve: .y3E @0a  
    2-6.气镇阀gas ballast valve: CYwV]lq :s  
    2-7.膨胀室expansion chamber: 3(,m(+J[S  
    2-8.压缩室compression chamber: HpfZgkC+  
    2-9.真空泵油 vacuum pump oil: -;&I S  
    2-10.泵液 pump fluid: 'g'RXC}D>  
    2-11.喷嘴 nozzle: \b8#xT}  
    2-13.喷嘴扩张率nozzle expansion rate: k<+Sj h$  
    2-14.喷嘴间隙面积 nozzle clearance area : m6$&yKQ-=h  
    2-15.喷嘴间隙nozzle clearance: RjPkH$u'Pj  
    2-16.射流jet: Hc8He!X*#  
    2-17.扩散器diffuser: ^H1m8=  
    2-18.扩散器喉部diffuser thoat: u~Po5W/i  
    2-19.蒸汽导管vapor tube(pipe;chimney): <*dcl2xS  
    2-20.喷嘴组件nozzle assembly: Qzo -Yw`=  
    2-21.下裙skirt: ~_N,zw{x  
    f5b|,JJ  
    3.附件 _5~|z$GW  
    3-1阱trap: Fw{@RQf8  
    ⑴.冷阱 cold trap: j%-Ems*H  
    ⑵.吸附阱sorption trap: ecoI-@CAI  
    ⑶.离子阱ion trap: bn8maYUZ  
    ⑷.冷冻升华阱 cryosublimation trap: /#(IV_Eol  
    3-2.挡板baffle: i$@xb_  
    3-3.油分离器oil separator: {k-_+#W"  
    3-4.油净化器oil purifier: F~ \ONO5  
    3-5.冷凝器condenser: fDplYn#  
    S Z/yijf  
    4.泵按工作分类 p5vQ.Ni*\-  
    4-1.主泵main pump: #0uu19+}  
    4-2.粗抽泵roughing vacuum pump: X1a~l|$h  
    4-3.前级真空泵backing vacuum pump: a{^z= =  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: A:GqR;;"x>  
    4-5.维持真空泵holding vacuum pump: CLVT5pj='  
    4-6.高真空泵high vacuum pump: )j~{P  
    4-7.超高真空泵ultra-high vacuum pump: iQ8{N:58DN  
    4-8.增压真空泵booster vacuum pump: %7aJSuQN%  
    knG:6tQ  
    5.真空泵特性 9"+MZ$  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: %N ~c9B  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 @-\=`#C**  
    5-3.起动压力starting pressure: +p Ywc0~  
    5-4.前级压力 backing pressure : F9K`N8wlu  
    5-5.临界前级压力 critical backing pressure: LTo!DUi`  
    5-6.最大前级压力maximum backing pressure: D})/2O p   
    5-7.最大工作压力maximum working pressure: ]wEI *c(  
    5-8.真空泵的极限压力ultimate pressure of a pump: :.XlAQR~b  
    5-9.压缩比compression ratio: &&P9T/Zks  
    5-10.何氏系数Ho coefficient: g_P98_2f.k  
    5-11.抽速系数speed factor: 5 0-7L,  
    5-12.气体的反扩散back-diffusion of gas: #t(/wa4  
    5-13.泵液返流back-streaming of pump fluid: |^UQVNJ  
    5-14.返流率back-streaming rate w`f66*@Q1  
    5-15.返迁移back-migration: lqL5V"2Y  
    5-16.爆腾bumping: {S9gOg  
    5-17.水蒸气允许量qm water vapor tolerable load: 9=]HOUn  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: [#Gu?L_W  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: %po;ih$jr*  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump `Kf@<=  
    3.   1.一般术语 6:B,ir _  
    1-1.压力计pressure gauge: hDW_a y4  
    1-2.真空计vacuum gauge: .$x}~Sw  
    ⑴.规头(规管)gauge head: !]g[u3O  
    ⑵.裸规nude gauge : l:e C+[_;>  
    ⑶.真空计控制单元gauge control unit : *v K~t|z  
    ⑷.真空计指示单元gauge indicating unit : lV^:2I/  
    6c-'CW  
    2.真空计一般分类  XA;PWl5!  
    2-1.压差式真空计differential vacuum gauge: dO1 m  
    2-2.绝对真空计 absolute vacuum gauge: uchQv]VB  
    2-3.全压真空计total pressure vacuum gauge: (n?f016*%d  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: XfVdYmii  
    2-5.相对真空计relative vacuum gauge : .txtt?ZF2  
    U9b[t  
    3.真空计特性 S>(xx"Ia  
    3-1.真空计测量范围pressure range of vacuum gauge: T$2A2gb `  
    3-2.灵敏度系数sensitivity coefficient: DGCvH)Q  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): 5!Y\STn  
    3-5.规管光电流photon current of vacuum gauge head: dazML|1ow  
    3-6.等效氮压力equivalent nitrogen pressure : &(, &mE  
    3-7.X射线极限值 X-ray limit: (EWGX |QA  
    3-8.逆X射线效应anti X-ray effect: |&Mo Qxw@  
    3-9.布利尔斯效应blears effect: R,PN?aj  
    DeF`#a0E  
    4.全压真空计 WeH_1$n5  
    4-1.液位压力计liquid level manometer: pn(i18 x  
    4-2.弹性元件真空计elastic element vacuum gauge: ,#, K_oz  
    4-3.压缩式真空计compression gauge: !\%JOf}  
    4-4.压力天平pressure balance: H'YKj'  
    4-5.粘滞性真空计viscosity gauge : 8w[O%  
    4-6.热传导真空计thermal conductivity vacuum gauge : 1/:vFX  
    4-7.热分子真空计thermo-molecular gauge: *lLCH,  
    4-8.电离真空计ionization vacuum gauge: ]6`K  
    4-9.放射性电离真空计radioactive ionization gauge: -nC&t~sD  
    4-10.冷阴极电离真空计cold cathode ionization gauge: @Nh}^D >j  
    4-11.潘宁真空计penning gauge: Y iuV\al  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: "OI$PLK  
    4-13.放电管指示器discharge tube indicator: 2RNee@!JJP  
    4-14.热阴极电离真空计hot cathode ionization gauge: 2Q@n a @s  
    4-15.三极管式真空计triode gauge: [O_5`X9|  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: 6<S-o|Xw  
    4-17.B-A型电离真空计Bayard-Alpert gauge: 6q>iPK Jt  
    4-18.调制型电离真空计modulator gauge: 420K6[  
    4-19.抑制型电离真空计suppressor gauge: oP56f"BE(  
    4-20.分离型电离真空计extractor gauge: Y_y!$jd(N  
    4-21.弯注型电离真空计bent beam gauge: By7lSbj  
    4-22.弹道型电离真空计 orbitron gauge : (NR( )2  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: *.wj3' wV  
    LNk :PD0m  
    5.分压真空计(分压分析器) DUu:et&c1  
    5-1.射频质谱仪radio frequency mass spectrometer: ]=-=D9ZS3  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: W%^!<bFk}m  
    5-3.单极质谱仪momopole mass spectrometer: o!+'< IQ'  
    5-4.双聚焦质谱仪double focusing mass spectrometer: 3)=ix. wW  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: O_2o/  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: 58#nYt  
    5-7.回旋质谱仪omegatron mass spectrometer: P6>C+T1  
    5-8.飞行时间质谱仪time of flight mass spectrometer: lbovwj  
    UJL'4 t/  
    6.真空计校准 _ti^i\8~  
    6-1.标准真空计reference gauges: }eZ \~2  
    6-2.校准系统system of calibration: 4pXY7+e2'  
    6-3.校准系数K calibration coefficient: s1Wn.OGR4  
    6-4.压缩计法meleod gauge method: 8b 7I\J`  
    6-5.膨胀法expansion method: k3B_M9>!  
    6-6.流导法flow method: 5X];?(VTsb  
    4.   1.真空系统vacuum system NkGtZ.!pk  
    1-1.真空机组pump system: &I'J4gk[  
    1-2.有油真空机组pump system used oil :  Lhg  
    1-3.无油真空机组oil free pump system (Lz|o!>  
    1-4.连续处理真空设备continuous treatment vacuum plant: V[WZ#u-p  
    1-5.闸门式真空系统vacuum system with an air-lock: 5W fZd  
    1-6.压差真空系统differentially pumped vacuum system: w0$+v/  
    1-7.进气系统gas admittance system: ^5~x*=_  
    PEjd  
    2.真空系统特性参量 gk8 v{'0Er  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : k-^^Ao*@  
    2-2.抽气装置的抽气量throughput of a pumping unit :  1 <T|  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 7W4m&+  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: dVLrA`'P*  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: k??CXW  
    2-6.极限压力ultimate pressure: {y@8E>y5$  
    2-7.残余压力residual pressure: N|)e {|k  
    2-8.残余气体谱residual gas spectrum: t6 -fG/Kc  
    2-9.基础压力base pressure: _[&.`jTFn  
    2-10.工作压力working pressure: 9CwtBil<#g  
    2-11.粗抽时间roughing time: /03 Wst  
    2-12.抽气时间pump-down time: wt@TR~a  
    2-13.真空系统时间常数time constant of a vacuum system: QRl+7V  
    2-14.真空系统进气时间venting time: U_aI!`WXd  
    ;QG8@ms|  
    3.真空容器 oIj/V|ByK  
    3-1.真空容器;真空室vacuum chamber: /u]#dX5  
    3-2.封离真空装置sealed vacuum device: Kt]vTn7!9  
    3-3.真空钟罩vacuum bell jar: L?8OWLjRy  
    3-4.真空容器底板vacuum base plate: L* 6<h  
    3-5.真空岐管vacuum manifold: CUC]-]8  
    3-6.前级真空容器(贮气罐)backing reservoir: 9'|k@i:  
    3-7.真空保护层outer chamber: I}y6ke!  
    3-8.真空闸室vacuum air lock: xo ^|d3  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: dW5r]D[Cx  
    7}c[GC)F  
    4.真空封接和真空引入线 86qQ"=v  
    4-1.永久性真空封接permanent seal : Ik5-ooZ&{  
    4.2.玻璃分级过渡封接graded seal : ~tW<]l7  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: ^l ;Bo3^_  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: I-J%yutB  
    4-5.陶瓷金属封接ceramic-to-metal seal: &DtI+ )[|  
    4-6.半永久性真空封接semi-permanent seal : _E-{*,7bZS  
    4-7.可拆卸的真空封接demountable joint: gLo&~|=L-  
    4-8.液体真空封接liquid seal }7fzEo`g  
    4-9.熔融金属真空封接molten metal seal: I~"l9Jc!"  
    4-10.研磨面搭接封接ground and lapped seal: W S9:*YH  
    4-11.真空法兰连接vacuum flange connection: Q>w)b]d~c  
    4-12.真空密封垫vacuum-tight gasket: p ~+sk1[.  
    4-13.真空密封圈ring gasket: Ft:_6T%  
    4-14.真空平密封垫flat gasket: dKchQsgCg  
    4-15.真空引入线feedthrough leadthrough: ~<Wa$~oY  
    4-16.真空轴密封shaft seal: @\-*aS_8>  
    4-17.真空窗vacuum window: Rdd9JJsVd  
    4-18.观察窗viewing window: Bz:Hp{7&  
    _m#TL60m  
    5.真空阀门 *z~J ]  
    5-1.真空阀门的特性characteristic of vacuum valves: <A\g*ld  
    ⑴.真空阀门的流导conductance of vacuum valves: n*|8 (fD  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: 0U.Ld:  
    5-2.真空调节阀regulating valve: [P)](8nR[  
    5-3.微调阀 micro-adjustable valve: eIP k$j{e  
    5-4.充气阀charge valve: |VM=:}s&  
    5-5.进气阀gas admittance valve: C<^S$  
    5-6.真空截止阀break valve: &Dp&  
    5-7.前级真空阀backing valve: [a^<2V!vMn  
    5-8.旁通阀 by-pass valve: D[YdPg@-  
    5-9.主真空阀main vacuum valve: fl_a@QdB#  
    5-10.低真空阀low vacuum valve: F*:H&,  
    5-11.高真空阀high vacuum valve: >u .u#de  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: 6,R<8a;Wn  
    5-13.手动阀manually operated valve: fv>Jn`  
    5-14.气动阀pneumatically operated valve: ^ilgd  
    5-15.电磁阀electromagnetically operated valve: LzB*d  
    5-16.电动阀valve with electrically motorized operation: dW^#}kN7V  
    5-17.挡板阀baffle valve: eo"XHP7ja  
    5-18.翻板阀flap valve: T Q {8 ee{  
    5-19.插板阀gate valve: lrMkp@ f.  
    5-20.蝶阀butterfly valve: GsqO^SV  
    *9r 32]i;  
    6.真空管路 ;:)u rI?  
    6-1.粗抽管路roughing line: N71^I"@HH  
    6-2.前级真空管路backing line: U!nNT==  
    6-3.旁通管路;By-Pass管路 by-pass line: Y$3liDeL=  
    6-4.抽气封口接头pumping stem: o3OJI_ v &  
    6-5.真空限流件limiting conductance:       bG)6p05Oa  
    6-6.过滤器filter: SQw"mO  
    5.   1.一般术语 .d4&s7n0  
    1-1真空镀膜vacuum coating: %NL7XU[~  
    1-2基片substrate: JQ\o[t  
    1-3试验基片testing substrate: ljh,%#95=  
    1-4镀膜材料coating material: 5pE@Ww  
    1-5蒸发材料evaporation material: wqXo]dX  
    1-6溅射材料sputtering material: yv5c0G.D  
    1-7膜层材料(膜层材质)film material: XToYtdt2  
    1-8蒸发速率evaporation rate: _x7>d:C  
    1-9溅射速率sputtering rate: 3SOrM  
    1-10沉积速率deposition rate: [rhK2fr:i  
    1-11镀膜角度coating angle: ??P> HVx  
    hN1{?PQ  
    2.工艺 7q^a@5f BG  
    2-1真空蒸膜vacuum evaporation coating: .-p?skm=a  
    (1).同时蒸发simultaneous evaporation: t\<*Q3rl-  
    (2).蒸发场蒸发evaporation field evaporation: d8f S79  
    (3).反应性真空蒸发reactive vacuum evaporation: Jz_`dLL^ w  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: tpKQ$) ed  
    (5).直接加热的蒸发direct heating evaporation: ?eR^\-e  
    (6).感应加热蒸发induced heating evaporation: @,q<][q  
    (7).电子束蒸发electron beam evaporation: O@KAh5EB  
    (8).激光束蒸发laser beam evaporation: $D#eD.  
    (9).间接加热的蒸发indirect heating evaporation: XZPq4(,9}  
    (10).闪蒸flash evaportion: a^9}ceu?   
    2-2真空溅射vacuum sputtering: RXbZaje$  
    (1).反应性真空溅射 reactive vacuum sputtering: }9&~+Q2  
    (2).偏压溅射bias sputtering: _57 68G`P  
    (3).直流二级溅射direct current diode sputtering: &eX^ll  
    (4).非对称性交流溅射asymmtric alternate current sputtering: l8!n!sC[,  
    (5).高频二极溅射high frequency diode sputtering: HBgt!D0MZ  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: ^(yU)k3pu  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: sX=_|<[  
    (8).离子束溅射ion beam sputtering: >K;C?gHo  
    (9).辉光放电清洗glow discharge cleaning: #c2JWDH1F  
    2-3物理气相沉积PVD physical vapor deposition: as@I0e((  
    2-4化学气相沉积CVD chemical vapor deposition: j&=!F3[  
    2-5磁控溅射magnetron sputtering: k%ckV`y  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: '\Hh  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: |Ns[{/  
    2-8电弧离子镀arc discharge deposition: EWoGdH|  
    &1Idv}@!  
    3.专用部件 r;&rc:?A  
    3-1镀膜室coating chamber: B976{;QvXV  
    3-2蒸发器装置evaporator device: X9n},}bJ"  
    3-3蒸发器evaporator: ^<'=]?xr  
    3-4直接加热式蒸发器evaporator by direct heat: h{M.+I$}C  
    3-5间接加热式蒸发器evaporator by indirect heat: O LxiY r  
    3-7溅射装置sputtering device: Y[ toN9,  
    3-8靶target: /*{s1Zcb  
    3-10时控挡板timing shutter: x AR9* <-  
    3-11掩膜mask: . [\S=K|/  
    3-12基片支架substrate holder: H!dg(d^  
    3-13夹紧装置clamp: skn];%[v\  
    3-14换向装置reversing device: 5J8U] :Y)  
    3-15基片加热装置substrate heating device: @phb5  
    3-16基片冷却装置substrate colding device: cYp]zn+6  
    SdBo sB3v>  
    4.真空镀膜设备 ;3WVrYe  
    4-1真空镀膜设备vacuum coating plant: L+y90 T6?  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: '\.fG\xD  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: =;^#5dpt$  
    4-2连续镀膜设备continuous coating plant: 3]}wZY0  
    4-3半连续镀膜设备semi- continuous coating plant 8DP] C9  
    6.   1.漏孔 Kr'5iFK7  
    1-1漏孔leaks: 7LY4q/  
    1-2通道漏孔channel leak: BliL1"".  
    1-3薄膜漏孔membrane leak: DkGC+Dw  
    1-4分子漏孔molecular leak: n$}Cj}eju  
    1-5粘滞漏孔vixcous leak: 7 xm>+(  
    1-6校准漏孔calibrated leak: xA>O4S D  
    1-7标准漏孔reference leak : 7R`:^}'>  
    1-8虚漏virtual leak: 8n^v,s>  
    1-9漏率leak rate: fB3W} dr  
    1-10标准空气漏率standard air leak rate: qkN{l88  
    1-11等值标准空气漏率equivalent standard air leak rate: oO8V0VE\  
    1-12探索(示漏)气体: L<**J\=7M  
    z tLP {q#  
    2.本底 K7H` Yt  
    2-1本底background: Wp<4F 6C$@  
    2-2探索气体本底search gas background : \-B8`ah  
    2-3漂移drift: Wq1%  
    2-4噪声noise: t)Mi,ljY[  
    h{&}p-X&[  
    3.检漏仪 {@c)!% 2$  
    3-1检漏仪leak detector: \]eB(&nq  
    3-2高频火花检漏仪H.F. spark leak detector: QK3j.Ss  
    3-3卤素检漏仪halide leak detector: n2$(MDdL`  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: S~mpXH@  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: pO.+hy  
    fYuz39#*  
    4.检漏 #PpmR _IX  
    4-1气泡检漏leak detection by bubbles: xu _:  
    4-2氨检漏leak detection by ammonia: prx)Cfv  
    4-3升压检漏leak detection of rise pressure: w{1DwCLKq  
    4-4放射性同位素检漏radioactive isotope leak detection: b]X c5Dp{  
    4-5荧光检漏fluorescence leak detection *uq;O*s  
    7.   1.一般术语 t_PAXj  
    1-1真空干燥vacuum drying: @3hA\3ot^  
    1-2冷冻干燥freeze drying : 6WEYg   
    1-3物料material: HH+$rrTT  
    1-4待干燥物料material to be dried: Q$NT>d6Q  
    1-5干燥物料dried material : hqA6%Y^k  
    1-6湿气moisture;humidity: kCWaji_x%  
    1-7自由湿气free moisture: Ne)H*DT  
    1-8结合湿气bound moisture: u"*@k^}(  
    1-9分湿气partial moisture: ep- ~;?  
    1-10含湿量moisture content: 9b8ZOk'9_  
    1-11初始含湿量initial moisture content: ppjS|l*`  
    1-12最终含湿量final residual moisture: 0Y8Si^T  
    1-13湿度degree of moisture ,degree of humidity : Vnu*+  
    1-14干燥物质dry matter : M7|k"iz v  
    1-15干燥物质含量content of dry matter: DRC2U%[  
    ([y2x.kd  
    2.干燥工艺 $y\\ ?  
    2-1干燥阶段stages of drying : Dl2`b">u  
    (1).预干燥preliminary dry: 9 -\.|5;:  
    (2).一次干燥(广义)primary drying(in general): GS %ACk  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): l cHqg  
    (4).二次干燥secondary drying: >8$]g  
    2-2.(1).接触干燥contact drying: .]_ (>^6  
    (2).辐射干燥 drying by radiation : h7iI=[_V  
    (3).微波干燥microwave drying: "Cz8nG  
    (4).气相干燥vapor phase drying: XN@F6Gj  
    (5).静态干燥static drying: ^{3,ok*Nf  
    (6).动态干燥dynamic drying: DdY89R 6  
    2-3干燥时间drying time: Z Sj[GI  
    2-4停留时间length of stay(in the drying chamber):  Hy _ (  
    2-5循环时间cycle time: U,?[x2LF  
    2-6干燥率 dessication ratio : 7$8YBcZ6  
    2-7去湿速率mass flow rate of humidity: vR X_}`m8#  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: Sz.sX w;  
    2-9干燥速度 drying speed : 95 7Cr  
    2-10干燥过程drying process: 7q2G/_  
    2-11加热温度heating temperature: 8ug\GlZc  
    2-12干燥温度temperature of the material being dried : }pOem}  
    2-13干燥损失loss of material during the drying process : \t6k(5J  
    2-14飞尘lift off (particles): _sEkKh8x  
    2-15堆层厚度thickness of the material: sYQ=nL  
    IUt/V^  
    3.冷冻干燥 ,i>{yrsOh  
    3-1冷冻freezing: PyOj{WX>W  
    (1).静态冷冻static freezing: g%P6f  
    (2).动态冷冻dynamic freezing: ^W&qTSjh  
    (3).离心冷冻centrifugal freezing: O$=[m9V  
    (4).滚动冷冻shell freezing: X,)`< >=O  
    (5).旋转冷冻spin-freezing: ^EK]z8;|  
    (6).真空旋转冷冻vacuum spin-freezing: [8F1rZ&  
    (7).喷雾冷冻spray freezing: {tq.c9+!d  
    (8).气流冷冻air blast freezing: >5rb4  
    3-2冷冻速率rate of freezing: EDMuQu/D8  
    3-3冷冻物料frozen material: WInfn f+'  
    3-4冰核ice core:  /i'dhiG  
    3-5干燥物料外壳envelope of dried matter: FaNr}$Pe  
    3-6升华表面sublimation front: pX5#!)  
    3-7融化位置freezer burn: ^lB=O  
    UcZ20inj0  
    4.真空干燥设备;真空冷冻干燥设备 (#uz_/xXa  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: O;bnyB$  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: E}7@?o7u}  
    4-3加热表面heating surface: 2pKkg>/S  
    4-4物品装载面shelf : cPFs K*w  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): avJ%J"j8z  
    4-6单位面积干燥器处理能力throughput per shelf area: it Byw1/  
    4-7冰冷凝器ice condenser: g4Y1*`}2f  
    4-8冰冷凝器的负载load of the ice condenser: P2U^%_~  
    4-9冰冷凝器的额定负载rated load of the ice condenser ~F gxhK2+  
    8.   1.一般术语 fVb~j;  
    1-1试样sample : 4^3}+cJ7j  
    (1).表面层surface layer: S!'Y:AeD&  
    (2).真实表面true surface: s7"NK"  
    (3).有效表面积effective surface area: Pv- i.  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: /2%646  
    (5).表面粒子密度surface particle density: UDBMf2F]  
    (6).单分子层monolayer: MBeubS  
    (7).表面单分子层粒子密度monolayer density: v- 793pr  
    (8).覆盖系数coverage ratio: q9)]R  
    1-2激发excitation: 8>\tD  
    (1).一次粒子primary particle: SauX C  
    (2).一次粒子通量primary particle flux: 7?U)V03  
    (3).一次粒子通量密度density of primary particle flux: (:g ZZG  
    (4).一次粒子负荷primary particle load: jN[P$} #b`  
    (5).一次粒子积分负荷integral load of primary particle: xaPaK-  
    (6).一次粒子的入射能量energy of the incident primary particle: zJ"`40V*;  
    (7).激发体积excited volume: I34|<3t$  
    (8).激发面积excited area: QPc4bg\J~t  
    (9).激发深度excited death: dH5 Go9`~R  
    (10).二次粒子secondary particles: ,/oqLI\  
    (11).二次粒子通量secondary particle flux: WQJnWe   
    (12).二次粒子发射能energy of the emitted secondary particles: G\X}gqe(OJ  
    (13).发射体积emitting volume: C2X$bX"  
    (14).发射面积emitting area: yH9(ru  
    (15).发射深度emitting depth: 3xhGmD\SKO  
    (16).信息深度information depth: jTeHI|b  
    (17).平均信息深度mean information depth: O`M 6 =\  
    1-3入射角angle of incidence: Lrrc&;  
    1-4发射角angle of emission: n'5LY9"  
    1-5观测角observation: h4 X=d5qd  
    1-6分析表面积analyzed surface area: [C>>j;q%  
    1-7产额 yield : EE{]EW(  
    1-8表面层微小损伤分析minimum damage surface analysis: =._V$:a6o  
    1-9表面层无损伤分析non-destructive surface analysis: ZC99/NWN  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : 3 i*HwEh  
    1-11可观测面积observable area: cF2!By3M  
    1-12可观测立体角observable solid angle : hw @)W  
    1-13接受立体角;观测立体角angle of acceptance: /WxCsQn  
    1-14角分辨能力angular resolving power: :{g;J  
    1-15发光度luminosity: '{ $7Dbo  
    1-16二次粒子探测比detection ratio of secondary particles: b] 5i`  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: ?LwBF;Y  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: Sc.@u3  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: >z"\l  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: 0XSMby?t`  
    1-21本底压力base pressure: oAxRI+&|.  
    1-22工作压力working pressure: qexnsL  
    : Yb_  
    2.分析方法 +{r~-Rn3  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: w$evAPuz^  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : O30eq 7(  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: l^cz&k=+  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: p=d,kY  
    2-3离子散射表面分析ion scattering spectroscopy: 59l9^<{A  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: K_Q-9j  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: y0R9[ ;b07  
    2-6离子散射谱仪ion scattering spectrometer: /S #Z.T~~  
    2-7俄歇效应Auger process: w;wgh`ur  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: nK8IW3fX9)  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: 1C5~GI`  
    2-10光电子谱术photoelectron spectroscopy : <1pRAN0  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: =^5#o)~BB  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: v[b|J7k  
    2-11光电子谱仪photoelectron spectrometer: j9 d^8)O,  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: DUMC4+i  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: wqasI@vyu  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): o]<@E uG  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
    离线douyongming
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊