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真空术语 3lP;=*m.
~ ld.I4
1.标准环境条件 standard ambient condition: f}:C~L!
2.气体的标准状态 standard reference conditions forgases: 1NZ"\9=U
3.压力(压强)p pressure: AxEyXT( h5
4.帕斯卡Pa pascal: 1.3#PdMR,
5.托Torr torr: QS#@xhH
6.标准大气压atm standard atmosphere: (,|,j(=]
7.毫巴mbar millibar: +3v)@18B1
8.分压力 partial pressure: u$nzpw0=H
9.全压力 total pressure: _7c3=f83
10.真空 vacuum: h@,ja
11.真空度 degree of vacuum: @C;1e7
12.真空区域 ranges of vacuum: JF=R$! 5
13.气体 gas: "zEl2Xn28_
14.非可凝气体 non-condensable gas: '/\
15.蒸汽vapor: IiYL2JS;t|
16.饱和蒸汽压saturation vapor pressure: L}Z.FqJ
17.饱和度degree of saturation: cO?*(e1m=
18.饱和蒸汽saturated vapor: @Z5q2Q
19.未饱和蒸汽unsaturated vapor: +H-=`+,
20.分子数密度n,m-3 number density of molecules: \:vF FK4a
21.平均自由程ι、λ,m mean free path: [txOh!sxD
22.碰撞率ψ collision rate: BA;r%?MRL
23.体积碰撞率χ volume collision rate: ;n&95t1$
24.气体量G quantity of gas: xT*'p&ap
25.气体的扩散 diffusion of gas: J
En jc/
26.扩散系数D diffusion coefficient; diffusivity: QoD_`d
27.粘滞流 viscous flow: Y>x{ [er
28.粘滞系数η viscous factor: qt8Y3:=8l
29.泊肖叶流 poiseuille flow: >AJ/!{jD*
30.中间流 intermediate flow: R7::f\I
31.分子流 molecular flow: DB vM.'b$
32克努曾数 number of knudsen: bWFa{W5!
33.分子泻流 molecular effusion; effusive flow: Ob0sB@
34.流逸 transpiration: Cfi{%,em
35.热流逸 thermal transpiration: 2yN!yIPR
36.分子流率qN molecular flow rate; molecular flux: fc#9e9R
37.分子流率密度 molecular flow rate density; density of molecular flux: oW^b,{~V
38.质量流率qm mass flow rare: {*xE+ |
39.流量qG throughput of gas: o}N@Q-i gq
40.体积流率qV volume flow rate: *D]:{#C*
41.摩尔流率qυ molar flow rate: L8 P0bNi
42.麦克斯韦速度分布 maxwellian velocity distribution: EP>u% ]#
43.传输几率Pc transmission probability: !I7$e&Uz@
44.分子流导CN,UN molecular conductance: k!c7eP"%8^
45.流导C,U conductance: _){|/Zd
46.固有流导Ci,Ui intrinsic conductance: y0%@^^-Ru
47.流阻W resistance: !BQt+4G7
48.吸附 sorption: VG5+u,U6>
49.表面吸附 adsorption: Tmg C {_
50.物理吸附physisorption: e!u]l
51.化学吸附 chemisorption: o "z()w~
52.吸收absorption: T?3Q<[SmI
53.适应系数α accommodation factor: `YOYC
54.入射率υ impingement rate: @?B+|*cm
55.凝结率condensation rate: }?[];FB
56.粘着率 sticking rate: V,r~%p
57.粘着几率Ps sticking probability: H,>
}t
S
58.滞留时间τ residence time: rto?*^N?
59.迁移 migration: wNa5qp
0
60.解吸 desorption: !j!w$
61.去气 degassing: k+J3Kl09hM
62.放气 outgassing: f)sy-o!
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: {"o9pIh{~
64.蒸发率 evaporation rate: _zj^k$ j
65.渗透 permeation: r8:r}Qj2w[
66.渗透率φ permeability: yP"2.9\erH
67.渗透系数P permeability coefficient 6wlLE5
2. 1.真空泵 vacuum pumps AG(6.
1-1.容积真空泵 positive displacement pump: jg$qp%7i%
⑴.气镇真空泵 gas ballast vacuum pump: EjP;P}_iK
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: )fJ"Hq
⑶.干封真空泵 dry-sealed vacuum pump: ^O}a,
⑷.往复真空泵 piston vacuum pump: XYU5.
⑸.液环真空泵 liquid ring vacuum pump: .n\JY;"
⑹.旋片真空泵 sliding vane rotary vacuum pump: D]~K-[V?l
⑺.定片真空泵 rotary piston vacuum pump: 0["93n}r
⑻.滑阀真空泵 rotary plunger vacuum pump: 7Ae`>5B#
⑼.余摆线真空泵 trochoidal vacuum pump: Sca"LaW1
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: Nd0tR3gi7
⑾.罗茨真空泵 roots vacuum pump: Tm"H9
1-2.动量传输泵 kinetic vacuum pump: J|WE&5'
⑴.牵引分子泵molecular drag pump: Q<sqlh!h
⑵.涡轮分子泵turbo molecular pump: V%-hP~nyBx
⑶.喷射真空泵ejector vacuum pump: fe\lSGmf
⑷.液体喷射真空泵liquid jet vacuum pump: Us`=^\
⑸.气体喷射真空泵gas jet vacuum pump: 0)&!$@HW
⑹.蒸汽喷射真空泵vapor jet vacuum pump : 93*csO?Db
⑺.扩散泵diffusion pump : J3yK^@&&
⑻.自净化扩散泵self purifying diffusion pump: Y"FV#<9@7E
⑼.分馏扩散泵 fractionating diffusion pump : ::Zo` vP
⑽.扩散喷射泵diffusion ejector pump : >axeUd+@i
⑾.离子传输泵ion transfer pump: P@N+jS`Vf
1-3.捕集真空泵 entrapment vacuum pump: [CQR
⑴吸附泵adsorption pump: ` GF w?G
⑵.吸气剂泵 getter pump: 6]7csOE
⑶.升华(蒸发)泵 sublimation (evaporation)pump : ']k<'`b|
⑷.吸气剂离子泵getter ion pump: Lu#q o^
⑸.蒸发离子泵 evaporation ion pump: uw mN!!TS
⑹.溅射离子泵sputter ion pump: VR(R.
⑺.低温泵cryopump: }nrjA0WN
xmg3,bO
2.真空泵零部件 Ph3;;,v '
2-1.泵壳 pump case: 3d}v?q78
2-2.入口 inlet: $zP5Hzx
2-3.出口outlet: MblRdj6
2-4.旋片(滑片、滑阀)vane; blade : =MNp;
2-5.排气阀discharge valve: kj6:P$tH
2-6.气镇阀gas ballast valve: HA'~1$#z
2-7.膨胀室expansion chamber: /8GdCac
2-8.压缩室compression chamber: c~<;}ve^z
2-9.真空泵油 vacuum pump oil: wOAR NrPx2
2-10.泵液 pump fluid: kcfT|@:MK"
2-11.喷嘴 nozzle: @!`__>K
2-13.喷嘴扩张率nozzle expansion rate: ?.e,NHf
2-14.喷嘴间隙面积 nozzle clearance area : 4!dc/K
2-15.喷嘴间隙nozzle clearance: 01r%K@ xX\
2-16.射流jet: <YvXyIs
2-17.扩散器diffuser: ^oi']O
2-18.扩散器喉部diffuser thoat: 9q'&tU'a=c
2-19.蒸汽导管vapor tube(pipe;chimney): ;e?M;-
2-20.喷嘴组件nozzle assembly: +d3|Up8=
2-21.下裙skirt: /l$enexSt
C hF~
3.附件 k%6CkCw
3-1阱trap: 2+9VDf2
⑴.冷阱 cold trap: wv9HiHz8gD
⑵.吸附阱sorption trap: E@GYl85fI
⑶.离子阱ion trap: !Gmnck&+
⑷.冷冻升华阱 cryosublimation trap: >V6t
L;+
3-2.挡板baffle: Yc[umn^K
3-3.油分离器oil separator: vhBW1/w&F
3-4.油净化器oil purifier: yCxYFi
3-5.冷凝器condenser: JI>Y?1i0O
[lzd'
4.泵按工作分类 g<Z :`00|
4-1.主泵main pump: $7q3[skH
4-2.粗抽泵roughing vacuum pump: OHndZ$'fI
4-3.前级真空泵backing vacuum pump: 4Fg2/O_3
4-4.粗(低)真空泵 roughing(low)vacuum pump: t\,Y<9{w
4-5.维持真空泵holding vacuum pump: {w2]
Is2F
4-6.高真空泵high vacuum pump: *D|a`R!Y
4-7.超高真空泵ultra-high vacuum pump: 7${<u 0((!
4-8.增压真空泵booster vacuum pump: i.E2a)
W\l&wR
5.真空泵特性 <D a-rv8
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: 6*Z7JiQ0
5-2.真空泵的抽气量Q throughput of vacuum pump:。 'WW:'[Syn'
5-3.起动压力starting pressure: d6MWgg
5-4.前级压力 backing pressure : k!Yc_ZB:*l
5-5.临界前级压力 critical backing pressure: CV0id&Nv
5-6.最大前级压力maximum backing pressure: 72, m c
5-7.最大工作压力maximum working pressure: M/ 64`lcb
5-8.真空泵的极限压力ultimate pressure of a pump: X /c8XLe"
5-9.压缩比compression ratio: PMAz[w,R~
5-10.何氏系数Ho coefficient: E+\?ptw
5-11.抽速系数speed factor: `0Udg,KOs
5-12.气体的反扩散back-diffusion of gas: %Xh}{ o$G
5-13.泵液返流back-streaming of pump fluid: 72;'8
5-14.返流率back-streaming rate f\
P0%
5-15.返迁移back-migration: =F@
+~)_
5-16.爆腾bumping: %M96m
5-17.水蒸气允许量qm water vapor tolerable load: s*PKr6X+
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: `PARZ|
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: T
6D+@i
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump aBC5?V*e%
3. 1.一般术语 iYr)Ao5X
1-1.压力计pressure gauge: 5M>h[Q"R
1-2.真空计vacuum gauge: DXf
⑴.规头(规管)gauge head: K$Bv4_|x
⑵.裸规nude gauge : _%CM<z
e
⑶.真空计控制单元gauge control unit : {8.Zb NEJ
⑷.真空计指示单元gauge indicating unit : EGl<oxL*R2
"lt <$.
2.真空计一般分类 {dF@Vg_n
2-1.压差式真空计differential vacuum gauge: qxI$F
2-2.绝对真空计 absolute vacuum gauge: "w?0f["
2-3.全压真空计total pressure vacuum gauge: %V=%ARP|
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: X(tx8~z
2-5.相对真空计relative vacuum gauge : c+ZOC8R
eay|>xa2
3.真空计特性 +mrLMbBiD
3-1.真空计测量范围pressure range of vacuum gauge: ;n't:yQW
3-2.灵敏度系数sensitivity coefficient: {<{VJGY7T
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): p<r^{y
3-5.规管光电流photon current of vacuum gauge head: o<5`uV!f
3-6.等效氮压力equivalent nitrogen pressure : .'`aX
7{\
3-7.X射线极限值 X-ray limit: 2q[pOT'k
3-8.逆X射线效应anti X-ray effect: _WNbuk0
3-9.布利尔斯效应blears effect: 2B4.o*Q\
syr0|K[
4.全压真空计 5$ik|e^:y
4-1.液位压力计liquid level manometer: G
y[5'J`
4-2.弹性元件真空计elastic element vacuum gauge: WD%(RC"Q
4-3.压缩式真空计compression gauge: vN(~}gOd\
4-4.压力天平pressure balance: >T;!Z 5L1
4-5.粘滞性真空计viscosity gauge : ^$'{:i
4-6.热传导真空计thermal conductivity vacuum gauge : Milp"L?B%
4-7.热分子真空计thermo-molecular gauge: K#k/t"r
4-8.电离真空计ionization vacuum gauge: f:M^q ;
4-9.放射性电离真空计radioactive ionization gauge: mP*$wE9b,:
4-10.冷阴极电离真空计cold cathode ionization gauge: \HB
fM&
4-11.潘宁真空计penning gauge: :Fhk$?/r
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: ^1 ){
@(
4-13.放电管指示器discharge tube indicator: +Kgl/Wg%
4-14.热阴极电离真空计hot cathode ionization gauge: Y%/RGYKh
4-15.三极管式真空计triode gauge: Un8' P8C
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: r]Hrz'C`
4-17.B-A型电离真空计Bayard-Alpert gauge: _=0Ja
S>M.
4-18.调制型电离真空计modulator gauge: !BVCuuM>w
4-19.抑制型电离真空计suppressor gauge: >8/Otg+h
4-20.分离型电离真空计extractor gauge: -G>J
4-21.弯注型电离真空计bent beam gauge: fDDpR=
4-22.弹道型电离真空计 orbitron gauge : %1TKgNf
4-23.热阴极磁控管真空计hot cathode magnetron gauge: mo<*h&;&
!y$##PZ
5.分压真空计(分压分析器) ~ox}e(xy
5-1.射频质谱仪radio frequency mass spectrometer: &/[MWQ
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: (87wWhH
5-3.单极质谱仪momopole mass spectrometer: I'IFBVhaYn
5-4.双聚焦质谱仪double focusing mass spectrometer: O^\:J2I(
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: 4Yvz-aSyO
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: 9U;
5-7.回旋质谱仪omegatron mass spectrometer: EPW4
h/I
5-8.飞行时间质谱仪time of flight mass spectrometer: 2@bOy~$A
\j!/l
f)
6.真空计校准 GI{EP&