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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 /U@Y2$TOF  
    --------------------------------------------------- 6_O3/   
    真空术语 5U<;6s  
    wU/BRz8I  
    1.标准环境条件 standard ambient condition: l&uBEYx   
    2.气体的标准状态 standard reference conditions forgases: i" >kF@]c8  
    3.压力(压强)p pressure: ZG Qz@H5  
    4.帕斯卡Pa pascal: H]Vo XJ\*  
    5.托Torr torr: U t.#h="  
    6.标准大气压atm standard atmosphere: `*--vSi  
    7.毫巴mbar millibar: obSLy Ed  
    8.分压力 partial pressure: YH'j"|{  
    9.全压力 total pressure: @;h$!w<  
    10.真空 vacuum: '*n2<y  
    11.真空度 degree of vacuum: \Qei}5P,  
    12.真空区域 ranges of vacuum: a_o99lP  
    13.气体 gas:  El |Y]f  
    14.非可凝气体 non-condensable gas: -)p| i~j^A  
    15.蒸汽vapor: lH%-#2]  
    16.饱和蒸汽压saturation vapor pressure: |TCg`ZS`cZ  
    17.饱和度degree of saturation: GbJVw\5Z*  
    18.饱和蒸汽saturated vapor: )UAkg  
    19.未饱和蒸汽unsaturated vapor: nsyeid*  
    20.分子数密度n,m-3 number density of molecules: S~Yu;  
    21.平均自由程ι、λ,m mean free path: &T\,kq >)  
    22.碰撞率ψ collision rate: :x36Z4:  
    23.体积碰撞率χ volume collision rate: C}(9SASs%  
    24.气体量G quantity of gas: R6-Z]H u  
    25.气体的扩散 diffusion of gas: Q7XlFjzcm  
    26.扩散系数D diffusion coefficient; diffusivity: ]$i~;f 8I  
    27.粘滞流 viscous flow: i[m-&   
    28.粘滞系数η viscous factor: >IE`, fe  
    29.泊肖叶流 poiseuille flow: 8&UwnEk<  
    30.中间流 intermediate flow: s!WI:E7  
    31.分子流 molecular flow: wUcp_)aE|  
    32克努曾数 number of knudsen: ~=Q Tv8  
    33.分子泻流 molecular effusion; effusive flow: H:.l:PJ  
    34.流逸 transpiration: .0iHI3i^  
    35.热流逸 thermal transpiration: zoHFTD4 g  
    36.分子流率qN molecular flow rate; molecular flux: ?qR11A};tG  
    37.分子流率密度 molecular flow rate density; density of molecular flux: l[M?"<Ot;  
    38.质量流率qm mass flow rare: s[#ww =T\  
    39.流量qG throughput of gas: IHvrx:7  
    40.体积流率qV volume flow rate: ^ 9FRI9?  
    41.摩尔流率qυ molar flow rate: tW} At  
    42.麦克斯韦速度分布 maxwellian velocity distribution: 6;#Rd|  
    43.传输几率Pc transmission probability: B dKD%CJ[  
    44.分子流导CN,UN molecular conductance: pDM95.6   
    45.流导C,U conductance: rxQ&N[r2  
    46.固有流导Ci,Ui intrinsic conductance: >!%F$$  
    47.流阻W resistance: <^fvTb&*  
    48.吸附 sorption: f'%Pkk  
    49.表面吸附 adsorption: ^>m"j6`h,  
    50.物理吸附physisorption: K5EU?J&  
    51.化学吸附 chemisorption: ":V,&o9n  
    52.吸收absorption: HAc1w]{(  
    53.适应系数α accommodation factor: J0,;F9<C#X  
    54.入射率υ impingement rate: .lyK ,p  
    55.凝结率condensation rate: =Bw2{]w  
    56.粘着率 sticking rate: *PF=dx<8  
    57.粘着几率Ps sticking probability: vw[i.af  
    58.滞留时间τ residence time: POt 8G  
    59.迁移 migration: ]Ofs, U^  
    60.解吸 desorption: Qs7*_=+h  
    61.去气 degassing: B8.uzX'p  
    62.放气 outgassing: #7|73&u(  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: feG#*m2g  
    64.蒸发率 evaporation rate: )k6kK}  
    65.渗透 permeation: ^]ig*oS\`  
    66.渗透率φ permeability: pT'jX^BU  
    67.渗透系数P permeability coefficient -mY,nMDb  
    2.   1.真空泵 vacuum pumps @tg4rl  
    1-1.容积真空泵 positive displacement pump: ] 8dzTEjk  
    ⑴.气镇真空泵 gas ballast vacuum pump: Y[Eq;a132  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: c[X:vDUX  
    ⑶.干封真空泵 dry-sealed vacuum pump: 6gTc)rhRT  
    ⑷.往复真空泵 piston vacuum pump: 0UOjk.~b  
    ⑸.液环真空泵 liquid ring vacuum pump: _q=ua;I&  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: <Xl/U^B  
    ⑺.定片真空泵 rotary piston vacuum pump: N Nw0 G&  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: l" +q&3Zx  
    ⑼.余摆线真空泵 trochoidal vacuum pump: `PS>"-AY2  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: /nB|Fo_&Q  
    ⑾.罗茨真空泵 roots vacuum pump: ?z0N- A2C2  
    1-2.动量传输泵 kinetic vacuum pump: lL"ANlX-P  
    ⑴.牵引分子泵molecular drag pump: oUx%ra{  
    ⑵.涡轮分子泵turbo molecular pump: SkyX\&  
    ⑶.喷射真空泵ejector vacuum pump: G- eSHv  
    ⑷.液体喷射真空泵liquid jet vacuum pump: ciGJtD&P  
    ⑸.气体喷射真空泵gas jet vacuum pump: Js/QL=,  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : { pk]p~  
    ⑺.扩散泵diffusion pump : e"&QQ-q  
    ⑻.自净化扩散泵self purifying diffusion pump: E_T!|Q.  
    ⑼.分馏扩散泵 fractionating diffusion pump : IA680^  
    ⑽.扩散喷射泵diffusion ejector pump : i6)HC  
    ⑾.离子传输泵ion transfer pump: _(F8}s  
    1-3.捕集真空泵 entrapment vacuum pump:  4}F~h  
    ⑴吸附泵adsorption pump: =Hx]K8N)  
    ⑵.吸气剂泵 getter pump: P$5K[Y4f  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : xq<X:\O  
    ⑷.吸气剂离子泵getter ion pump: 4Be\5Byr  
    ⑸.蒸发离子泵 evaporation ion pump: ~}RfepM  
    ⑹.溅射离子泵sputter ion pump: ~DP_1V?  
    ⑺.低温泵cryopump: /X%+z5  
    _)[UartKx  
    2.真空泵零部件 "NtY[sT{V  
    2-1.泵壳 pump case: ,-[z?dvO  
    2-2.入口 inlet: 0t7vg#v|  
    2-3.出口outlet: t^~Qv  
    2-4.旋片(滑片、滑阀)vane; blade : V G|FjD  
    2-5.排气阀discharge valve: q![`3m-d.  
    2-6.气镇阀gas ballast valve: L :Ldk  
    2-7.膨胀室expansion chamber: W_lXY Z<  
    2-8.压缩室compression chamber: zD;k|"e  
    2-9.真空泵油 vacuum pump oil: Uj)Wbe[)p0  
    2-10.泵液 pump fluid: ZQ{-6VCjl  
    2-11.喷嘴 nozzle: v?0F  
    2-13.喷嘴扩张率nozzle expansion rate: nt8& Mf  
    2-14.喷嘴间隙面积 nozzle clearance area : u=t.1eS5  
    2-15.喷嘴间隙nozzle clearance: g cb6*@u!  
    2-16.射流jet: 0+F--E4  
    2-17.扩散器diffuser: U=PTn(2  
    2-18.扩散器喉部diffuser thoat: yt<h!k$ _P  
    2-19.蒸汽导管vapor tube(pipe;chimney): !RSJb  
    2-20.喷嘴组件nozzle assembly: G`RQl@W>)(  
    2-21.下裙skirt: bE?X?[K  
    f$ 7C 5  
    3.附件 7 j6<  
    3-1阱trap: <QD[hO^/  
    ⑴.冷阱 cold trap: :l&Yq!5  
    ⑵.吸附阱sorption trap: Q89fXi0Ivb  
    ⑶.离子阱ion trap: ?AK`M #M  
    ⑷.冷冻升华阱 cryosublimation trap: jl5&T{z  
    3-2.挡板baffle: +t3o5&  
    3-3.油分离器oil separator: ["[v  
    3-4.油净化器oil purifier: L~AU4Q0o  
    3-5.冷凝器condenser: 3OFI> x,h  
    l=ZD&uK  
    4.泵按工作分类 |}b~YHTs  
    4-1.主泵main pump: %j.n^7i]^:  
    4-2.粗抽泵roughing vacuum pump: T^vhhfCUr  
    4-3.前级真空泵backing vacuum pump: >wb Uxl%{5  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: 3g3f87[  
    4-5.维持真空泵holding vacuum pump: Bj<s!}i{[  
    4-6.高真空泵high vacuum pump: cQ |Q-S  
    4-7.超高真空泵ultra-high vacuum pump:  1D_&n@  
    4-8.增压真空泵booster vacuum pump: Cz &3=),G  
    E^A S65%bL  
    5.真空泵特性 [:uHe#L  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: Ec@cW6g(%  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 .N( X. C  
    5-3.起动压力starting pressure: a~ dgf:e`  
    5-4.前级压力 backing pressure : L9-Jwy2(>  
    5-5.临界前级压力 critical backing pressure: Ft?eqDS1  
    5-6.最大前级压力maximum backing pressure: )Xa_ry7  
    5-7.最大工作压力maximum working pressure: x"!`JDsS  
    5-8.真空泵的极限压力ultimate pressure of a pump: ]|tR8`DGZ%  
    5-9.压缩比compression ratio: U$Z<lx2P  
    5-10.何氏系数Ho coefficient: u /]P  
    5-11.抽速系数speed factor: ` FOCX;  
    5-12.气体的反扩散back-diffusion of gas: `mA;1S  
    5-13.泵液返流back-streaming of pump fluid: i&?\Pp;5-j  
    5-14.返流率back-streaming rate )K$YL='kX  
    5-15.返迁移back-migration: Lq;T\m_de  
    5-16.爆腾bumping: lX.-qCV"B  
    5-17.水蒸气允许量qm water vapor tolerable load: \Y>b#*m(4  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: n}t 9Nf_  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: ,H%[R+)  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump b b.UtoPz  
    3.   1.一般术语 RMiDV^.u`  
    1-1.压力计pressure gauge: 4.^T~n G  
    1-2.真空计vacuum gauge: E- [Eg  
    ⑴.规头(规管)gauge head: yjsj+K pL  
    ⑵.裸规nude gauge : tGU~G&  
    ⑶.真空计控制单元gauge control unit : J e,o(:  
    ⑷.真空计指示单元gauge indicating unit : ptrwZ8'  
    a"X h  
    2.真空计一般分类 x;<0Gg~jB  
    2-1.压差式真空计differential vacuum gauge: = pn;b1=  
    2-2.绝对真空计 absolute vacuum gauge: `+rwx  
    2-3.全压真空计total pressure vacuum gauge: Z,O* p,Gzn  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: E*`PD<:)H  
    2-5.相对真空计relative vacuum gauge : rZ|p{ym  
    oyr b.lu/  
    3.真空计特性 L9N }lH  
    3-1.真空计测量范围pressure range of vacuum gauge: i1XRB C9  
    3-2.灵敏度系数sensitivity coefficient: tH4 q*\U  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): w^Yo)"6  
    3-5.规管光电流photon current of vacuum gauge head: A]TEs)#*7)  
    3-6.等效氮压力equivalent nitrogen pressure : wN58uV '  
    3-7.X射线极限值 X-ray limit: _cE_\Ay  
    3-8.逆X射线效应anti X-ray effect: (' 7$K  
    3-9.布利尔斯效应blears effect: yQMwt|C4  
    ;N?(R\* 8  
    4.全压真空计 &l3(+4Sh  
    4-1.液位压力计liquid level manometer: fLqjBG]<  
    4-2.弹性元件真空计elastic element vacuum gauge: !^&VZh  
    4-3.压缩式真空计compression gauge: FR[I~unqD  
    4-4.压力天平pressure balance: ^8_yJ=~V  
    4-5.粘滞性真空计viscosity gauge : 2|=hF9  
    4-6.热传导真空计thermal conductivity vacuum gauge : jLM([t  
    4-7.热分子真空计thermo-molecular gauge: =\|,hg)c  
    4-8.电离真空计ionization vacuum gauge: u*): D~A  
    4-9.放射性电离真空计radioactive ionization gauge: ZnRT$ l O  
    4-10.冷阴极电离真空计cold cathode ionization gauge: "+T`{$Z=C  
    4-11.潘宁真空计penning gauge: |T@SlNi]  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: JRw,${W  
    4-13.放电管指示器discharge tube indicator: {0w2K82  
    4-14.热阴极电离真空计hot cathode ionization gauge: :;.^r,QAI  
    4-15.三极管式真空计triode gauge: )~)l^0X  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: w2UEU5%  
    4-17.B-A型电离真空计Bayard-Alpert gauge:  $8rnf  
    4-18.调制型电离真空计modulator gauge: \fUX_0k9,  
    4-19.抑制型电离真空计suppressor gauge: h?p_jI  
    4-20.分离型电离真空计extractor gauge: @;`'s  
    4-21.弯注型电离真空计bent beam gauge: &>C+5`bg  
    4-22.弹道型电离真空计 orbitron gauge : .Y{x!Q"  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: P%lD9<jED  
    'fl< ac,.  
    5.分压真空计(分压分析器) "A"YgD#t  
    5-1.射频质谱仪radio frequency mass spectrometer: \? )S {  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: n|)((W  
    5-3.单极质谱仪momopole mass spectrometer: T>'O[=UWh  
    5-4.双聚焦质谱仪double focusing mass spectrometer: .FHk1~\%z^  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: &`@YdZtd"  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: XQ9W y  
    5-7.回旋质谱仪omegatron mass spectrometer: D$ K'Qk  
    5-8.飞行时间质谱仪time of flight mass spectrometer: #WSqh +  
    OyVP_Yx,V  
    6.真空计校准 #jW-&a  
    6-1.标准真空计reference gauges: i7-~"g  
    6-2.校准系统system of calibration: OU/}cu  
    6-3.校准系数K calibration coefficient: } LS8q  
    6-4.压缩计法meleod gauge method: fMg9h9U  
    6-5.膨胀法expansion method: pQBn8H|Y  
    6-6.流导法flow method: UjQz   
    4.   1.真空系统vacuum system \/YRhQ  
    1-1.真空机组pump system: n H?6o#]N  
    1-2.有油真空机组pump system used oil : 0|Fx Sc  
    1-3.无油真空机组oil free pump system Rtz~:v%  
    1-4.连续处理真空设备continuous treatment vacuum plant: dhob]8b  
    1-5.闸门式真空系统vacuum system with an air-lock: wDh]vH[  
    1-6.压差真空系统differentially pumped vacuum system: %rG4X  
    1-7.进气系统gas admittance system: rL1yq|]I  
    Sp5:R75vI  
    2.真空系统特性参量 N'VTdf?  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : 6wh PW .  
    2-2.抽气装置的抽气量throughput of a pumping unit : 1*u]v{JJ(  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 'wk,t^)  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: K<*6E@+i  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: }x`Cnn  
    2-6.极限压力ultimate pressure: MGm*({%  
    2-7.残余压力residual pressure: I{cH$jt<  
    2-8.残余气体谱residual gas spectrum: rgzra"u)  
    2-9.基础压力base pressure: W+#Q>^Q>  
    2-10.工作压力working pressure: \L(cFjLIl  
    2-11.粗抽时间roughing time: l;_IH|A  
    2-12.抽气时间pump-down time: /S"jO [n9b  
    2-13.真空系统时间常数time constant of a vacuum system: ?d-w#<AiV  
    2-14.真空系统进气时间venting time: GLtd<M"  
    )~wKRyQff  
    3.真空容器 1OM Xg=Y  
    3-1.真空容器;真空室vacuum chamber: =WT$\KYGv  
    3-2.封离真空装置sealed vacuum device: =|z:wlOs  
    3-3.真空钟罩vacuum bell jar: T<pG$4_  
    3-4.真空容器底板vacuum base plate: Sc[#]2 }  
    3-5.真空岐管vacuum manifold: # -luE  
    3-6.前级真空容器(贮气罐)backing reservoir: Dhn7N8(LF!  
    3-7.真空保护层outer chamber: J;>epM ;*  
    3-8.真空闸室vacuum air lock: "iK= 8  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: HXa[0VOx  
    dR]-R/1|  
    4.真空封接和真空引入线 E)$>t}$  
    4-1.永久性真空封接permanent seal : gUru=p  
    4.2.玻璃分级过渡封接graded seal : D8wf`RUt  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: pNb2t/8%%  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: 6/8K2_UeoW  
    4-5.陶瓷金属封接ceramic-to-metal seal: xc#t8`  
    4-6.半永久性真空封接semi-permanent seal : x8rg/y  
    4-7.可拆卸的真空封接demountable joint: 5U~KYy^v  
    4-8.液体真空封接liquid seal {h+8^   
    4-9.熔融金属真空封接molten metal seal: G(a5@9F  
    4-10.研磨面搭接封接ground and lapped seal: MT&aH~YB  
    4-11.真空法兰连接vacuum flange connection: =8T!ldVxES  
    4-12.真空密封垫vacuum-tight gasket: v]V N'Hs?  
    4-13.真空密封圈ring gasket: skcyLIb  
    4-14.真空平密封垫flat gasket: 2xLtJR4L  
    4-15.真空引入线feedthrough leadthrough: 9i5?J]o^  
    4-16.真空轴密封shaft seal: +-<G(^  
    4-17.真空窗vacuum window: _U^[h!  
    4-18.观察窗viewing window: [nO3%7t@  
    v@Uk% O/  
    5.真空阀门 1<BKTMBq?{  
    5-1.真空阀门的特性characteristic of vacuum valves: w[-)c6JyE  
    ⑴.真空阀门的流导conductance of vacuum valves: <t"T'\3  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: LIcc0w3  
    5-2.真空调节阀regulating valve: 5I2,za&e  
    5-3.微调阀 micro-adjustable valve: Qfm$q~`D^W  
    5-4.充气阀charge valve: A7X a  
    5-5.进气阀gas admittance valve: g3$'G hf  
    5-6.真空截止阀break valve: Czjb.c:a.Y  
    5-7.前级真空阀backing valve: %VO+\L8Fs  
    5-8.旁通阀 by-pass valve: 4{uQ}ea  
    5-9.主真空阀main vacuum valve: @Ul3J )=m  
    5-10.低真空阀low vacuum valve: :VT%d{Vp_  
    5-11.高真空阀high vacuum valve: 44ty,M3  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: 72s qt5C]  
    5-13.手动阀manually operated valve: Nu"v .]Y2  
    5-14.气动阀pneumatically operated valve: {6ZSf[Y6B  
    5-15.电磁阀electromagnetically operated valve: ;l*%IMB  
    5-16.电动阀valve with electrically motorized operation: /qIQE&V-  
    5-17.挡板阀baffle valve: "] V\Y!  
    5-18.翻板阀flap valve: f]/2uUsg %  
    5-19.插板阀gate valve: q%4X1 W  
    5-20.蝶阀butterfly valve: S.!,qv z  
    Y#9W]78He  
    6.真空管路 "'z}oS  
    6-1.粗抽管路roughing line: F\D iT|?}  
    6-2.前级真空管路backing line: :01d9|#  
    6-3.旁通管路;By-Pass管路 by-pass line: yI: ;+K  
    6-4.抽气封口接头pumping stem: r/sSkF F  
    6-5.真空限流件limiting conductance:       `}?;Ow&2CY  
    6-6.过滤器filter: O6G\0o  
    5.   1.一般术语 m%[e_eS  
    1-1真空镀膜vacuum coating: w.x&3aG  
    1-2基片substrate: Q-oDmjU  
    1-3试验基片testing substrate: %/Wk+r9uu  
    1-4镀膜材料coating material: (fF8)4l  
    1-5蒸发材料evaporation material: UOZ+ &DL,L  
    1-6溅射材料sputtering material: ]:gW+6w"C  
    1-7膜层材料(膜层材质)film material: sQ}|Lu9hZ  
    1-8蒸发速率evaporation rate: * 1;4&/93o  
    1-9溅射速率sputtering rate: x &R9m,  
    1-10沉积速率deposition rate: i{6&/TBnr  
    1-11镀膜角度coating angle: [on_=N{W[  
    ,H{9`a#+:  
    2.工艺 ,4Q4{Tx  
    2-1真空蒸膜vacuum evaporation coating: N#ggT9>X  
    (1).同时蒸发simultaneous evaporation: %nZ:)J>kz  
    (2).蒸发场蒸发evaporation field evaporation: # sw4)*v  
    (3).反应性真空蒸发reactive vacuum evaporation: <<0sv9qw1  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: "TA0--6  
    (5).直接加热的蒸发direct heating evaporation: d=vuy   
    (6).感应加热蒸发induced heating evaporation: 712nD ?>  
    (7).电子束蒸发electron beam evaporation: V?M (exN  
    (8).激光束蒸发laser beam evaporation: D}?p>e|<D  
    (9).间接加热的蒸发indirect heating evaporation: G(7%*@SX  
    (10).闪蒸flash evaportion: Cy[G7A%  
    2-2真空溅射vacuum sputtering: EHC7b^|3}  
    (1).反应性真空溅射 reactive vacuum sputtering: Tgz=I4g  
    (2).偏压溅射bias sputtering: ^m#tWb)f  
    (3).直流二级溅射direct current diode sputtering: q!c=f!U?\l  
    (4).非对称性交流溅射asymmtric alternate current sputtering: Jc#D4e1#  
    (5).高频二极溅射high frequency diode sputtering: G!6b )4L-  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: 6nL^"3@S!  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: CGi;M=xr  
    (8).离子束溅射ion beam sputtering: !i"zM}  
    (9).辉光放电清洗glow discharge cleaning: M.Yp'Av  
    2-3物理气相沉积PVD physical vapor deposition: !h.hJt  
    2-4化学气相沉积CVD chemical vapor deposition: U823q-x  
    2-5磁控溅射magnetron sputtering: w-n}&f  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: [#Qf#T%5h  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: \\R}3 >Wc  
    2-8电弧离子镀arc discharge deposition: (xb2H~WrN  
    1d< b\P0  
    3.专用部件 wOf8\s1  
    3-1镀膜室coating chamber: fmixWL7.Zg  
    3-2蒸发器装置evaporator device: D&):2F^9.  
    3-3蒸发器evaporator: N0p6xg~  
    3-4直接加热式蒸发器evaporator by direct heat: p}QDX*/sSu  
    3-5间接加热式蒸发器evaporator by indirect heat: r-y;"h'  
    3-7溅射装置sputtering device: ]VjvG};  
    3-8靶target: 5mZ2CDV  
    3-10时控挡板timing shutter: o-=|}u]mz  
    3-11掩膜mask: /0/ouA>+  
    3-12基片支架substrate holder: bo|THS  
    3-13夹紧装置clamp: O(/~cQ  
    3-14换向装置reversing device: Tdcc<T  
    3-15基片加热装置substrate heating device: 5?^#v  
    3-16基片冷却装置substrate colding device: vxZ'-&;t  
    E<jajYj  
    4.真空镀膜设备 p-i Fe\+  
    4-1真空镀膜设备vacuum coating plant: 67(s\  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: NF&Sv  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: \ivxi<SR  
    4-2连续镀膜设备continuous coating plant: ;M.Q=#;E  
    4-3半连续镀膜设备semi- continuous coating plant v Z9OJrF  
    6.   1.漏孔 zcP=+Y)YA  
    1-1漏孔leaks: \#,2#BmO"E  
    1-2通道漏孔channel leak: ?z.?(xZ 6  
    1-3薄膜漏孔membrane leak: #KiJ{w'  
    1-4分子漏孔molecular leak: Z{B  e  
    1-5粘滞漏孔vixcous leak: ?"Ez  
    1-6校准漏孔calibrated leak: $BdwKk !k  
    1-7标准漏孔reference leak : 1%v6d !  
    1-8虚漏virtual leak: ." xP {  
    1-9漏率leak rate: oMEW5.VX  
    1-10标准空气漏率standard air leak rate: Tow=B  
    1-11等值标准空气漏率equivalent standard air leak rate: Pdf-2 Tx  
    1-12探索(示漏)气体: 66& uK|  
    2jyWkAP'  
    2.本底 &<;T$Y  
    2-1本底background: vQ}ZfP  
    2-2探索气体本底search gas background :  @*eY~  
    2-3漂移drift: 8H4NNj Oy  
    2-4噪声noise: :Dt y([  
    &za }TH m  
    3.检漏仪 )7& -DI1  
    3-1检漏仪leak detector: |N`0G.#  
    3-2高频火花检漏仪H.F. spark leak detector: +g g_C'"  
    3-3卤素检漏仪halide leak detector: 4z(~)#'^  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: b WNa6x  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: K[icVT2v~  
    G*4I;'6  
    4.检漏 W\~ie}D{  
    4-1气泡检漏leak detection by bubbles: Wo "s;Z  
    4-2氨检漏leak detection by ammonia: fM ID}S  
    4-3升压检漏leak detection of rise pressure: ms0V1`  
    4-4放射性同位素检漏radioactive isotope leak detection: P4#i]7%  
    4-5荧光检漏fluorescence leak detection 7y=O!?*  
    7.   1.一般术语 ESB^"|9  
    1-1真空干燥vacuum drying: WOn<;'}M&  
    1-2冷冻干燥freeze drying : R>0[w$  
    1-3物料material: uLzE'Z mV  
    1-4待干燥物料material to be dried: DP),~8  
    1-5干燥物料dried material : %e]G]B%  
    1-6湿气moisture;humidity: 7K.75%}  
    1-7自由湿气free moisture: ^W$R{`  
    1-8结合湿气bound moisture: z0rYzn?MR  
    1-9分湿气partial moisture: b,+Sa\j)(  
    1-10含湿量moisture content: _O}m0c   
    1-11初始含湿量initial moisture content: K@7%i|H  
    1-12最终含湿量final residual moisture: %nkP" Z#  
    1-13湿度degree of moisture ,degree of humidity :  oYN"L  
    1-14干燥物质dry matter : 8n5~K.;<  
    1-15干燥物质含量content of dry matter: :6(\:  
    le \f:  
    2.干燥工艺 Kzn1ct{65!  
    2-1干燥阶段stages of drying : "Vq= Ph  
    (1).预干燥preliminary dry: <OEIG 0  
    (2).一次干燥(广义)primary drying(in general): Bug.>ln1  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): ')v,<{  
    (4).二次干燥secondary drying: ]t)N3n6Bc  
    2-2.(1).接触干燥contact drying: <<01@Q <  
    (2).辐射干燥 drying by radiation : Ypzmc$Xfu  
    (3).微波干燥microwave drying: oH w!~ c7  
    (4).气相干燥vapor phase drying: >h8m)Q  
    (5).静态干燥static drying: !-`L1D_hy  
    (6).动态干燥dynamic drying: &j:e<{@  
    2-3干燥时间drying time: MZ}0.KmaZ  
    2-4停留时间length of stay(in the drying chamber): //c6vG  
    2-5循环时间cycle time: ntH`\ )xi  
    2-6干燥率 dessication ratio :  lPZ>#  
    2-7去湿速率mass flow rate of humidity: ;\w3IAa|V  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: \H .Cmm^I  
    2-9干燥速度 drying speed : `"65 _?B i  
    2-10干燥过程drying process: T!]rdN!  
    2-11加热温度heating temperature: =J1V?x=l@  
    2-12干燥温度temperature of the material being dried : = z mxki  
    2-13干燥损失loss of material during the drying process : '/<\X{l8  
    2-14飞尘lift off (particles): ^>E>\uz0v  
    2-15堆层厚度thickness of the material: v'?Smd1v /  
    8?82 p  
    3.冷冻干燥 B]tj0FB`-*  
    3-1冷冻freezing: E "=4(   
    (1).静态冷冻static freezing: i@+m<YS:2>  
    (2).动态冷冻dynamic freezing: OvT[JpV  
    (3).离心冷冻centrifugal freezing: we _CF*zj  
    (4).滚动冷冻shell freezing: .T7CMkYt  
    (5).旋转冷冻spin-freezing: hk=[v7  
    (6).真空旋转冷冻vacuum spin-freezing: ;)h?P.]  
    (7).喷雾冷冻spray freezing: )K?7(H/j  
    (8).气流冷冻air blast freezing: LN+x!#:e  
    3-2冷冻速率rate of freezing: ]D;*2Lw4&  
    3-3冷冻物料frozen material: ?Ojv<L-f.:  
    3-4冰核ice core: bhpaC8|  
    3-5干燥物料外壳envelope of dried matter: /x@aAJ|  
    3-6升华表面sublimation front: d_we?DZ|  
    3-7融化位置freezer burn: SLEOc OAmD  
    ,iYhD-"'  
    4.真空干燥设备;真空冷冻干燥设备 *eHa4I  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: eW 4[2Q  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: 9^DAlY,x.  
    4-3加热表面heating surface: FNUs .d"  
    4-4物品装载面shelf : |9XoRGgXU  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): atpHv**D<i  
    4-6单位面积干燥器处理能力throughput per shelf area: Q   
    4-7冰冷凝器ice condenser: Ze>R@rK  
    4-8冰冷凝器的负载load of the ice condenser: <O=0^V  
    4-9冰冷凝器的额定负载rated load of the ice condenser Yr{hJGw[  
    8.   1.一般术语 tRI<K  
    1-1试样sample : q`mxN!1[  
    (1).表面层surface layer: &iWTf K7  
    (2).真实表面true surface: ,EHLW4v  
    (3).有效表面积effective surface area: H_@6!R2  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: odca?  
    (5).表面粒子密度surface particle density: tW~kn9glZ  
    (6).单分子层monolayer: M-].l3  
    (7).表面单分子层粒子密度monolayer density: $,:mq>]![{  
    (8).覆盖系数coverage ratio: } O+xs3Uv  
    1-2激发excitation: U;iCH  
    (1).一次粒子primary particle: hpXW t Q  
    (2).一次粒子通量primary particle flux: m lc8q s  
    (3).一次粒子通量密度density of primary particle flux: \},H\kK+^  
    (4).一次粒子负荷primary particle load: s:l H4B  
    (5).一次粒子积分负荷integral load of primary particle: ^U,iDK_  
    (6).一次粒子的入射能量energy of the incident primary particle: @+t|Aa^g  
    (7).激发体积excited volume: fsPsP`|  
    (8).激发面积excited area: 517"x@6Q  
    (9).激发深度excited death: 'qEw]l  
    (10).二次粒子secondary particles: gdD|'h  
    (11).二次粒子通量secondary particle flux: FVkl# Qy~  
    (12).二次粒子发射能energy of the emitted secondary particles: -zYa@PW  
    (13).发射体积emitting volume: ZRYlm$C  
    (14).发射面积emitting area: a$?d_BX  
    (15).发射深度emitting depth: V+D5<nICr  
    (16).信息深度information depth: .!<yTh  
    (17).平均信息深度mean information depth: VDOC>  
    1-3入射角angle of incidence: f_PH?  
    1-4发射角angle of emission: 68GH$ji  
    1-5观测角observation: JAKs [@:  
    1-6分析表面积analyzed surface area: =Pn"nkpML  
    1-7产额 yield : 9mk@\Gqqm  
    1-8表面层微小损伤分析minimum damage surface analysis: ;39a`  
    1-9表面层无损伤分析non-destructive surface analysis: jA{B G_  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : 2He R1m<  
    1-11可观测面积observable area: e.L&A|  
    1-12可观测立体角observable solid angle : ;]xc}4@=mg  
    1-13接受立体角;观测立体角angle of acceptance: ]:@{tX 7c  
    1-14角分辨能力angular resolving power: HaL'/V~  
    1-15发光度luminosity: SVwxK/Fci  
    1-16二次粒子探测比detection ratio of secondary particles: ZzBaYoNy[0  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: 6bs-&Vf  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: Z] r9lC  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: $X;OK  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: >QJDO ]~V  
    1-21本底压力base pressure: k(tB+k!vH\  
    1-22工作压力working pressure: \C~6 '  
    &+02Sn3A  
    2.分析方法 ,F->*=  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: hj"JmF$m  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : @i'D)6sC  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: 0sSBwG  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: vv)w@A:Vn)  
    2-3离子散射表面分析ion scattering spectroscopy: >pZ _  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: 9$U>St  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: yqK_|7I+  
    2-6离子散射谱仪ion scattering spectrometer: > .}G[C  
    2-7俄歇效应Auger process: ^m D$#  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: Cp!9 "J:  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: h`! 4`eI  
    2-10光电子谱术photoelectron spectroscopy : xcl;~"c *  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: }8l+Jd3"  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: 2\.23  
    2-11光电子谱仪photoelectron spectrometer: 7>@0nHec  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED:  8zRw\]?  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: c)Ef]E\  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): nTsV>lQY,  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊