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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 TfDx> F$  
    --------------------------------------------------- %f#3;tpC8  
    真空术语 Q: [d   
    b`PAOQ  
    1.标准环境条件 standard ambient condition: G5Y 8]N  
    2.气体的标准状态 standard reference conditions forgases: x0?8AG%  
    3.压力(压强)p pressure: \@8$tQCZ  
    4.帕斯卡Pa pascal: cx&jnF#$  
    5.托Torr torr: LwZBM#_g  
    6.标准大气压atm standard atmosphere: ,Si\ky7L  
    7.毫巴mbar millibar: ` Cdk b5  
    8.分压力 partial pressure: kb Fr  
    9.全压力 total pressure: w6'o<=  
    10.真空 vacuum: -z-58FLlO  
    11.真空度 degree of vacuum: k 9R_27F  
    12.真空区域 ranges of vacuum: !r,ZyJU  
    13.气体 gas: ;m,lS_[c  
    14.非可凝气体 non-condensable gas: hT>h  
    15.蒸汽vapor: `f}}z5  
    16.饱和蒸汽压saturation vapor pressure: O{,Uge2n,  
    17.饱和度degree of saturation: uB>NwCL;  
    18.饱和蒸汽saturated vapor: Ny /bNQS  
    19.未饱和蒸汽unsaturated vapor: MRZ Wfc  
    20.分子数密度n,m-3 number density of molecules: /x"gpKwsB  
    21.平均自由程ι、λ,m mean free path: tYC`?HT  
    22.碰撞率ψ collision rate: ZsirX~W<  
    23.体积碰撞率χ volume collision rate: |qE"60&"}  
    24.气体量G quantity of gas: KM*sLC#  
    25.气体的扩散 diffusion of gas: U#gHc:$  
    26.扩散系数D diffusion coefficient; diffusivity: 8*;G\$+  
    27.粘滞流 viscous flow: 6+_)(+ c  
    28.粘滞系数η viscous factor: p{"p<XFyO  
    29.泊肖叶流 poiseuille flow: c BQ|m A  
    30.中间流 intermediate flow: S)p{4`p%  
    31.分子流 molecular flow: hY7Q$B<  
    32克努曾数 number of knudsen: 4d)w2t?H%  
    33.分子泻流 molecular effusion; effusive flow: Ro*$7j0!Hf  
    34.流逸 transpiration: yK+76\} I  
    35.热流逸 thermal transpiration: L%ND?'@  
    36.分子流率qN molecular flow rate; molecular flux: C0[Rf.*  
    37.分子流率密度 molecular flow rate density; density of molecular flux: 5r.\maW  
    38.质量流率qm mass flow rare: g^26Gb.  
    39.流量qG throughput of gas: w;vp X>  
    40.体积流率qV volume flow rate: 0|nvi=4~e|  
    41.摩尔流率qυ molar flow rate: g2l|NI#c^  
    42.麦克斯韦速度分布 maxwellian velocity distribution: N#Bg`:!  
    43.传输几率Pc transmission probability: w1F7gd  
    44.分子流导CN,UN molecular conductance: m0t 5oO  
    45.流导C,U conductance: #m1e_[   
    46.固有流导Ci,Ui intrinsic conductance: BA' ($D>  
    47.流阻W resistance: b#FN3AsR  
    48.吸附 sorption: wh l)^D  
    49.表面吸附 adsorption: #\"8sY,j  
    50.物理吸附physisorption: 5m&{ f>]T  
    51.化学吸附 chemisorption: U5jY/e_  
    52.吸收absorption: 12])``9  
    53.适应系数α accommodation factor: sTU]ntoQqR  
    54.入射率υ impingement rate: [&k[k)  
    55.凝结率condensation rate: c5>&~^~>Tx  
    56.粘着率 sticking rate: A0# K@  
    57.粘着几率Ps sticking probability: :!;BOCTYI  
    58.滞留时间τ residence time: %4Ylq|d  
    59.迁移 migration: 1wmS?  
    60.解吸 desorption: z kYl IUD  
    61.去气 degassing: <~!7?ak  
    62.放气 outgassing: KYD,eVQ  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: m1a0uEA G  
    64.蒸发率 evaporation rate: EMU~gwPR  
    65.渗透 permeation: m{`O.6#O  
    66.渗透率φ permeability: 3M8P%  
    67.渗透系数P permeability coefficient x-:vpv%6y  
    2.   1.真空泵 vacuum pumps 3Zs|arde2  
    1-1.容积真空泵 positive displacement pump: + 1\1Z@\M  
    ⑴.气镇真空泵 gas ballast vacuum pump: n=MdbY/k(  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: B3@   
    ⑶.干封真空泵 dry-sealed vacuum pump: :T" !6;  
    ⑷.往复真空泵 piston vacuum pump: S;M'qwN  
    ⑸.液环真空泵 liquid ring vacuum pump: .qi$X!0  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: &<R8'  
    ⑺.定片真空泵 rotary piston vacuum pump: V:9|9$G  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: 1el?f>  
    ⑼.余摆线真空泵 trochoidal vacuum pump: LTG#nM0  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: GeWB"(t  
    ⑾.罗茨真空泵 roots vacuum pump: >~_y\  
    1-2.动量传输泵 kinetic vacuum pump: 9E)*X  
    ⑴.牵引分子泵molecular drag pump: +2O('}t  
    ⑵.涡轮分子泵turbo molecular pump: }>b4s!k,  
    ⑶.喷射真空泵ejector vacuum pump: d%Jl9!u  
    ⑷.液体喷射真空泵liquid jet vacuum pump: ^LaI{UDw%h  
    ⑸.气体喷射真空泵gas jet vacuum pump: 'Sppm;?  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : I: U/%cr,  
    ⑺.扩散泵diffusion pump : H[@uE*W  
    ⑻.自净化扩散泵self purifying diffusion pump: F#7ZR*ZB1  
    ⑼.分馏扩散泵 fractionating diffusion pump : fs&J%ku\  
    ⑽.扩散喷射泵diffusion ejector pump : Gg|'T}0X  
    ⑾.离子传输泵ion transfer pump: J0a]Wz%  
    1-3.捕集真空泵 entrapment vacuum pump: cR}}NF  
    ⑴吸附泵adsorption pump: p18-yt; 1  
    ⑵.吸气剂泵 getter pump: LG'JQGl5  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : R[LVx-e7'  
    ⑷.吸气剂离子泵getter ion pump: ~:b bV6YO  
    ⑸.蒸发离子泵 evaporation ion pump: sqi~j(&\1  
    ⑹.溅射离子泵sputter ion pump: y A?>v'K  
    ⑺.低温泵cryopump: YN?@ S  
    \NhCu$'  
    2.真空泵零部件 [&|Le;h  
    2-1.泵壳 pump case: BF<7.<,  
    2-2.入口 inlet: v]F q}I"  
    2-3.出口outlet: .3?'+KZ,  
    2-4.旋片(滑片、滑阀)vane; blade : >F8&wh'BjY  
    2-5.排气阀discharge valve: k(C?6Gfj  
    2-6.气镇阀gas ballast valve: *=ftg&  
    2-7.膨胀室expansion chamber: 4q/E7n  
    2-8.压缩室compression chamber: >hoIJZP,  
    2-9.真空泵油 vacuum pump oil: ;38W41d{  
    2-10.泵液 pump fluid: %1gJOV  
    2-11.喷嘴 nozzle: 2FD[D `n]f  
    2-13.喷嘴扩张率nozzle expansion rate: Q-F'-@`(C  
    2-14.喷嘴间隙面积 nozzle clearance area : 9Re605x Q6  
    2-15.喷嘴间隙nozzle clearance: kQC>8"  
    2-16.射流jet: r(yJE1Wz  
    2-17.扩散器diffuser: )b m|],'  
    2-18.扩散器喉部diffuser thoat: auAST;"Z8  
    2-19.蒸汽导管vapor tube(pipe;chimney): WGN[`D"  
    2-20.喷嘴组件nozzle assembly: b<_*~af  
    2-21.下裙skirt: ?Pw# !t  
    1,`-n5@J%n  
    3.附件 |2CW!is  
    3-1阱trap: Y:&1;`FBZ  
    ⑴.冷阱 cold trap: aQCbRS6  
    ⑵.吸附阱sorption trap: &UP@Sr0D7  
    ⑶.离子阱ion trap: <]/`#Xgh  
    ⑷.冷冻升华阱 cryosublimation trap: ioi0^aM  
    3-2.挡板baffle: ?4Lb*{R  
    3-3.油分离器oil separator: E87/B%R  
    3-4.油净化器oil purifier: fpM 4q  
    3-5.冷凝器condenser: =}\]i*  
    w4'(Y,(`  
    4.泵按工作分类 '97)c7E  
    4-1.主泵main pump: V:6#IL  
    4-2.粗抽泵roughing vacuum pump: >r{3t{  
    4-3.前级真空泵backing vacuum pump: mvVVPf9  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: 9r+`j  
    4-5.维持真空泵holding vacuum pump: \-GV8A2:k  
    4-6.高真空泵high vacuum pump: .2Q`. o)  
    4-7.超高真空泵ultra-high vacuum pump: ,Ot3N\%yn  
    4-8.增压真空泵booster vacuum pump: o%h\55S  
    eG|e1tK+  
    5.真空泵特性 LoOyqJ,  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: 6Kh: m-E9  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 K).X=2gjY  
    5-3.起动压力starting pressure: R" 5/  
    5-4.前级压力 backing pressure : 0vS%m/Zi-  
    5-5.临界前级压力 critical backing pressure: 2c5>0f  
    5-6.最大前级压力maximum backing pressure: ]SBv3Q0D7  
    5-7.最大工作压力maximum working pressure: WaWT 5|A  
    5-8.真空泵的极限压力ultimate pressure of a pump: (loUO;S=  
    5-9.压缩比compression ratio: 4dMwJ"V  
    5-10.何氏系数Ho coefficient: BRQ9kK20  
    5-11.抽速系数speed factor: 3, ,Z  
    5-12.气体的反扩散back-diffusion of gas: '0H +2  
    5-13.泵液返流back-streaming of pump fluid: >gFF>L>  
    5-14.返流率back-streaming rate &BG^:4b  
    5-15.返迁移back-migration: :J(a;/~ip  
    5-16.爆腾bumping: (oq(-Wv  
    5-17.水蒸气允许量qm water vapor tolerable load: > m}.}g8  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: )K@ 20Q+0K  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: QlJCdCSy  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump dAEz hR[=  
    3.   1.一般术语 BRoi`.b:  
    1-1.压力计pressure gauge: Cd7 j G  
    1-2.真空计vacuum gauge: KPW: r#d  
    ⑴.规头(规管)gauge head: rcxV ,<[B  
    ⑵.裸规nude gauge : *Ei~2O}  
    ⑶.真空计控制单元gauge control unit : Q;m .m2  
    ⑷.真空计指示单元gauge indicating unit : p]!,Bo ZL  
    WHbvb3'  
    2.真空计一般分类 SnQ$  
    2-1.压差式真空计differential vacuum gauge: '(2G qX!  
    2-2.绝对真空计 absolute vacuum gauge: b ";#qVv C  
    2-3.全压真空计total pressure vacuum gauge: y>~=o9J_u  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: wjS3ItB  
    2-5.相对真空计relative vacuum gauge : KT?vs5jg$&  
    L4Nk+R;  
    3.真空计特性 ;a{ Dr  
    3-1.真空计测量范围pressure range of vacuum gauge: `~@BU  
    3-2.灵敏度系数sensitivity coefficient: oVl:./(IB  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): bGK&W;Myk  
    3-5.规管光电流photon current of vacuum gauge head: &\0LR?Nh  
    3-6.等效氮压力equivalent nitrogen pressure : y::KjB 0  
    3-7.X射线极限值 X-ray limit: 5uDQ*nJ|  
    3-8.逆X射线效应anti X-ray effect: S_?}H  
    3-9.布利尔斯效应blears effect: He#+zE ;  
    zXcSE"   
    4.全压真空计 ((.PPOdJV  
    4-1.液位压力计liquid level manometer: LYWQqxB  
    4-2.弹性元件真空计elastic element vacuum gauge: s4~c>voQB  
    4-3.压缩式真空计compression gauge: 14oD^`-t  
    4-4.压力天平pressure balance: aMv  
    4-5.粘滞性真空计viscosity gauge : -.^Mt.)  
    4-6.热传导真空计thermal conductivity vacuum gauge : R#1m_6I  
    4-7.热分子真空计thermo-molecular gauge: DKK200j  
    4-8.电离真空计ionization vacuum gauge: ,{'~J @  
    4-9.放射性电离真空计radioactive ionization gauge: s<<vHzm  
    4-10.冷阴极电离真空计cold cathode ionization gauge: Ij=hmTl{P  
    4-11.潘宁真空计penning gauge: HkEp}R  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: %A82{  
    4-13.放电管指示器discharge tube indicator: q".l:T%|C}  
    4-14.热阴极电离真空计hot cathode ionization gauge: " Jv&=zJ  
    4-15.三极管式真空计triode gauge: 'J!P:.=a>  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: v`wPdb  
    4-17.B-A型电离真空计Bayard-Alpert gauge: IDLA-Vxo  
    4-18.调制型电离真空计modulator gauge: /x$jd )C  
    4-19.抑制型电离真空计suppressor gauge: 3c9v~5og4  
    4-20.分离型电离真空计extractor gauge: s?0r\cc|:  
    4-21.弯注型电离真空计bent beam gauge: %eD&2$q*  
    4-22.弹道型电离真空计 orbitron gauge : ge[\%  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: kx'6FkZPIr  
    $Q47>/CUc^  
    5.分压真空计(分压分析器) bzUc;&WDz  
    5-1.射频质谱仪radio frequency mass spectrometer: PicO3m  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: q/4PX  
    5-3.单极质谱仪momopole mass spectrometer: r43dnwX  
    5-4.双聚焦质谱仪double focusing mass spectrometer: -$e\m] }Z  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: hfEGkaV._3  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: :Ur%.0  
    5-7.回旋质谱仪omegatron mass spectrometer: P_b00",S  
    5-8.飞行时间质谱仪time of flight mass spectrometer: {`J7>K  
    bz}T}nj  
    6.真空计校准 T \0e8"iZ  
    6-1.标准真空计reference gauges: 4<lZ;M"  
    6-2.校准系统system of calibration: =3 -G  
    6-3.校准系数K calibration coefficient: U6M4}q(N]  
    6-4.压缩计法meleod gauge method: t$Qav>D  
    6-5.膨胀法expansion method: kP [ Y  
    6-6.流导法flow method: ?dxhe7m  
    4.   1.真空系统vacuum system D}3E1`)W  
    1-1.真空机组pump system: Cs*u{O  
    1-2.有油真空机组pump system used oil : ]^ j)4us  
    1-3.无油真空机组oil free pump system 0 'L+9T5  
    1-4.连续处理真空设备continuous treatment vacuum plant: *B3` #t  
    1-5.闸门式真空系统vacuum system with an air-lock: E; RI.6y  
    1-6.压差真空系统differentially pumped vacuum system: 7&T1RB'>  
    1-7.进气系统gas admittance system: b,SY(Ce~g  
    s \kkD *  
    2.真空系统特性参量 B&.XGo)  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : cT.1oaAM0  
    2-2.抽气装置的抽气量throughput of a pumping unit : -.z~u/uL  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: yq;gBIiZ  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: ZYL]|/"J9  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: RYvS,hf 6z  
    2-6.极限压力ultimate pressure: noL<pkks~R  
    2-7.残余压力residual pressure: kA#>Xu/  
    2-8.残余气体谱residual gas spectrum: \&W~nYXq"  
    2-9.基础压力base pressure: q l8CgL  
    2-10.工作压力working pressure: 4'X^YBm  
    2-11.粗抽时间roughing time: BJ{mX>I(  
    2-12.抽气时间pump-down time: -y$|EOi?  
    2-13.真空系统时间常数time constant of a vacuum system: zeR!Y yt!  
    2-14.真空系统进气时间venting time: (c[|k  
    nwV\ [E  
    3.真空容器 (<3'LhFII  
    3-1.真空容器;真空室vacuum chamber: L4Kkbt<x  
    3-2.封离真空装置sealed vacuum device: E5 Y92vu  
    3-3.真空钟罩vacuum bell jar: AZtZa'hbkQ  
    3-4.真空容器底板vacuum base plate: ~Jq<FVK  
    3-5.真空岐管vacuum manifold: pT[C[h:  
    3-6.前级真空容器(贮气罐)backing reservoir: gv<9XYByt  
    3-7.真空保护层outer chamber: *+Q,b^N  
    3-8.真空闸室vacuum air lock: vsES`  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: <L5[#V_  
    .!=g  
    4.真空封接和真空引入线 5$zC,g*#  
    4-1.永久性真空封接permanent seal : B23R9.FK  
    4.2.玻璃分级过渡封接graded seal : nc l-VN  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: #x "pG  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: yNI} =Z  
    4-5.陶瓷金属封接ceramic-to-metal seal: !&19%C4  
    4-6.半永久性真空封接semi-permanent seal : yQCfn1a)  
    4-7.可拆卸的真空封接demountable joint: h4.ZR={E  
    4-8.液体真空封接liquid seal N5oao'7|A  
    4-9.熔融金属真空封接molten metal seal: u^V`Ucd"R  
    4-10.研磨面搭接封接ground and lapped seal: Y+WOU._46I  
    4-11.真空法兰连接vacuum flange connection: Vh'H5v^  
    4-12.真空密封垫vacuum-tight gasket: zf2]|]*xz  
    4-13.真空密封圈ring gasket: xt40hZ$  
    4-14.真空平密封垫flat gasket: ,=z8aiUu  
    4-15.真空引入线feedthrough leadthrough: i}M&1E  
    4-16.真空轴密封shaft seal: 3QGg;  
    4-17.真空窗vacuum window: 3pq&TYQU  
    4-18.观察窗viewing window: n;!t?jnf.  
    P3@[x  
    5.真空阀门 QbS w<V  
    5-1.真空阀门的特性characteristic of vacuum valves: 5H?`a7q N  
    ⑴.真空阀门的流导conductance of vacuum valves: "1`c^  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: %'t~+_  
    5-2.真空调节阀regulating valve: l<^#@SH  
    5-3.微调阀 micro-adjustable valve: f'R^MX2  
    5-4.充气阀charge valve: }U+gJkY2  
    5-5.进气阀gas admittance valve: QbpRSdxy`$  
    5-6.真空截止阀break valve: $Ne#F+M9x  
    5-7.前级真空阀backing valve: d<: VoQM6M  
    5-8.旁通阀 by-pass valve: 0$* z   
    5-9.主真空阀main vacuum valve: %n!s{5:F  
    5-10.低真空阀low vacuum valve: }%_x T  
    5-11.高真空阀high vacuum valve: O^oFH OpFh  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: #!9aTp).AL  
    5-13.手动阀manually operated valve: 'du:Bxl`d4  
    5-14.气动阀pneumatically operated valve: }GQ8|fg`U  
    5-15.电磁阀electromagnetically operated valve: YceiP,!4?v  
    5-16.电动阀valve with electrically motorized operation: Z\O ,9  
    5-17.挡板阀baffle valve: R}Z"Y xx  
    5-18.翻板阀flap valve: aI+:rk^  
    5-19.插板阀gate valve: )Q(tryiSi  
    5-20.蝶阀butterfly valve: ~eqX<0hf@  
    =s1"<hH}O)  
    6.真空管路 MT;<\T  
    6-1.粗抽管路roughing line: S 8h/AW6l  
    6-2.前级真空管路backing line: /3rt]h"  
    6-3.旁通管路;By-Pass管路 by-pass line: ':F{st>&H  
    6-4.抽气封口接头pumping stem: )"|g&=  
    6-5.真空限流件limiting conductance:       ?$F:S%eH  
    6-6.过滤器filter: S1%{/w  
    5.   1.一般术语 "YHe]R>3s  
    1-1真空镀膜vacuum coating: -4Y}Y5 9\  
    1-2基片substrate: ma?569Z8~0  
    1-3试验基片testing substrate: OFCkQEG=y>  
    1-4镀膜材料coating material: mNm 8I8  
    1-5蒸发材料evaporation material: r 'pFHX  
    1-6溅射材料sputtering material: L{'qZ#N[  
    1-7膜层材料(膜层材质)film material: &=t$ AIu  
    1-8蒸发速率evaporation rate: GEIMCg(TRj  
    1-9溅射速率sputtering rate: '-gk))u>)  
    1-10沉积速率deposition rate: ?nj _gL  
    1-11镀膜角度coating angle: y|iZuHS}  
    %|oY8;0|A>  
    2.工艺 #C4  
    2-1真空蒸膜vacuum evaporation coating: LDr!d1A  
    (1).同时蒸发simultaneous evaporation: JL2IVENWc  
    (2).蒸发场蒸发evaporation field evaporation: $9Y2\'w<h6  
    (3).反应性真空蒸发reactive vacuum evaporation: m7^a4  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: Lm:O vVVB  
    (5).直接加热的蒸发direct heating evaporation: 44RZk|U1J{  
    (6).感应加热蒸发induced heating evaporation: U-X  
    (7).电子束蒸发electron beam evaporation: m'oVqA&  
    (8).激光束蒸发laser beam evaporation: lb`P9mbr+  
    (9).间接加热的蒸发indirect heating evaporation: 9j$ OU@N 8  
    (10).闪蒸flash evaportion: (!DH'2I[  
    2-2真空溅射vacuum sputtering:  CG$S?  
    (1).反应性真空溅射 reactive vacuum sputtering: v?n`kw  
    (2).偏压溅射bias sputtering: |PDuvv!.f  
    (3).直流二级溅射direct current diode sputtering: :a#]"z0  
    (4).非对称性交流溅射asymmtric alternate current sputtering: fZxZ):7i  
    (5).高频二极溅射high frequency diode sputtering: *Rr,ii  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: %v : a  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: }+i ZY\t  
    (8).离子束溅射ion beam sputtering: aSXoYG0\  
    (9).辉光放电清洗glow discharge cleaning: q;tsA"l  
    2-3物理气相沉积PVD physical vapor deposition: /2Y Nu*v  
    2-4化学气相沉积CVD chemical vapor deposition: 1}KNzMHk9  
    2-5磁控溅射magnetron sputtering: PFUb\AY  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: z`>a,X  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: r"Pj ,}$A  
    2-8电弧离子镀arc discharge deposition: 2~Gcoda  
    XV). cW|.a  
    3.专用部件 c<DsCzX  
    3-1镀膜室coating chamber: C<6u}czA  
    3-2蒸发器装置evaporator device: bN<c5  
    3-3蒸发器evaporator: eV1O#FLbi  
    3-4直接加热式蒸发器evaporator by direct heat: 2frJSV?  
    3-5间接加热式蒸发器evaporator by indirect heat: i+Ob1B@w  
    3-7溅射装置sputtering device: ZRD* ^9)  
    3-8靶target: h_* =_2|}  
    3-10时控挡板timing shutter: m5{Y  
    3-11掩膜mask: T1\Xz-1  
    3-12基片支架substrate holder: Y@M=6G  
    3-13夹紧装置clamp: [UR+G8X21m  
    3-14换向装置reversing device: 5#$E4k:YV  
    3-15基片加热装置substrate heating device: ~9h6"0K!  
    3-16基片冷却装置substrate colding device: +=$]fjE?  
    gC<\1AIu  
    4.真空镀膜设备 D:8-f3  
    4-1真空镀膜设备vacuum coating plant: :4]&R9J>o  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: pc:K5 -Os  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: H6bomp"  
    4-2连续镀膜设备continuous coating plant: <u u1e@P  
    4-3半连续镀膜设备semi- continuous coating plant mZ ONxR6q$  
    6.   1.漏孔 nH NMoA  
    1-1漏孔leaks: P]]9Sqo7  
    1-2通道漏孔channel leak: NAx( Qi3  
    1-3薄膜漏孔membrane leak: 2Z7smDJ  
    1-4分子漏孔molecular leak: u?Iop/b  
    1-5粘滞漏孔vixcous leak: 08yTTt76t  
    1-6校准漏孔calibrated leak: C.%iQx`   
    1-7标准漏孔reference leak : "EWU:9\0  
    1-8虚漏virtual leak: [WY NA-O  
    1-9漏率leak rate: V<:kS  
    1-10标准空气漏率standard air leak rate: { tim{nV  
    1-11等值标准空气漏率equivalent standard air leak rate: g] X4)e]  
    1-12探索(示漏)气体: H8P il H  
    Fl(+c0|kT  
    2.本底 wb"Jj  
    2-1本底background: &AUL]:<s  
    2-2探索气体本底search gas background : 84e)huAs  
    2-3漂移drift: F{bET  
    2-4噪声noise: :*1|ERGoay  
    PrDvRWM  
    3.检漏仪 Y\dK- M{$  
    3-1检漏仪leak detector: F! c%&Z  
    3-2高频火花检漏仪H.F. spark leak detector: i.0}qS?  
    3-3卤素检漏仪halide leak detector: kx]f`b  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: oopTo51,a  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: Fm*n>^P@Y  
    XH1so1h  
    4.检漏 PKwHq<vAsB  
    4-1气泡检漏leak detection by bubbles: frc>0\  
    4-2氨检漏leak detection by ammonia: csH1X/3ha\  
    4-3升压检漏leak detection of rise pressure: 2ZNTg@o  
    4-4放射性同位素检漏radioactive isotope leak detection: Ga N4In[d  
    4-5荧光检漏fluorescence leak detection NZi5rX N  
    7.   1.一般术语 Ju)2J?Xs5  
    1-1真空干燥vacuum drying: ,5t.0XqS  
    1-2冷冻干燥freeze drying : S%mN6b~{  
    1-3物料material: uAK-%Uu?  
    1-4待干燥物料material to be dried: YOP=gvZq  
    1-5干燥物料dried material : &q``CCOF&  
    1-6湿气moisture;humidity: `"A\8)6-  
    1-7自由湿气free moisture: '#u |RsZ  
    1-8结合湿气bound moisture: ~Jmn?9 3  
    1-9分湿气partial moisture: qJ5Y}/r  
    1-10含湿量moisture content: vRRi"bo  
    1-11初始含湿量initial moisture content:  6>Lr  
    1-12最终含湿量final residual moisture: xJ^Gtq Um  
    1-13湿度degree of moisture ,degree of humidity : &P[eA u  
    1-14干燥物质dry matter : -;Cl0O%  
    1-15干燥物质含量content of dry matter: kp xd+w  
    E-.M+[   
    2.干燥工艺 m`4Sp#m  
    2-1干燥阶段stages of drying : ~?[%uGI0h  
    (1).预干燥preliminary dry: tA}O'x  
    (2).一次干燥(广义)primary drying(in general): WH/r$.&  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): @"'1"$  
    (4).二次干燥secondary drying: C Ij3D"  
    2-2.(1).接触干燥contact drying: k2 k/v[60  
    (2).辐射干燥 drying by radiation : i,<TaW*I  
    (3).微波干燥microwave drying: 2[qO;js  
    (4).气相干燥vapor phase drying: nCGLuZn  
    (5).静态干燥static drying: BU<A+Pe>  
    (6).动态干燥dynamic drying: ;u!>( QQ  
    2-3干燥时间drying time: i7cMe8  
    2-4停留时间length of stay(in the drying chamber): ;w}ZI<ou  
    2-5循环时间cycle time: ,%v  
    2-6干燥率 dessication ratio : >[O @u4  
    2-7去湿速率mass flow rate of humidity: 0&2TeqsLh)  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: nd'zO#"m?  
    2-9干燥速度 drying speed : {p yo  
    2-10干燥过程drying process: Ol{)U;, `  
    2-11加热温度heating temperature: pRPz1J$58  
    2-12干燥温度temperature of the material being dried : nFX8:fZ$>  
    2-13干燥损失loss of material during the drying process : &AZr (>  
    2-14飞尘lift off (particles): aoI{<,(  
    2-15堆层厚度thickness of the material: `fY~Lv{4d_  
    ?`,Xb.NA$K  
    3.冷冻干燥 fC&Egy  
    3-1冷冻freezing: qZ6P(5X  
    (1).静态冷冻static freezing: B~jl1g|  
    (2).动态冷冻dynamic freezing: 4F)z-<-b  
    (3).离心冷冻centrifugal freezing: cqRIi~`  
    (4).滚动冷冻shell freezing: j:O=9  
    (5).旋转冷冻spin-freezing: 2\CFt;fk  
    (6).真空旋转冷冻vacuum spin-freezing: ;]KGRT  
    (7).喷雾冷冻spray freezing: C8-4 m68"  
    (8).气流冷冻air blast freezing: t?QR27cs$  
    3-2冷冻速率rate of freezing: [-{L@  
    3-3冷冻物料frozen material: mI@E>VCV[  
    3-4冰核ice core: kbM4v G  
    3-5干燥物料外壳envelope of dried matter: #gUM%$  
    3-6升华表面sublimation front: `:}GE@]  
    3-7融化位置freezer burn: Ip4CC'  
    `k a!`nfo  
    4.真空干燥设备;真空冷冻干燥设备 H}dsd=yO  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: /V$ [M  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: FxTOc@<  
    4-3加热表面heating surface: *&% kkbA  
    4-4物品装载面shelf : N6Vn/7I5%  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): ~+q$TV  
    4-6单位面积干燥器处理能力throughput per shelf area: TsfOod   
    4-7冰冷凝器ice condenser: o'D{ql  
    4-8冰冷凝器的负载load of the ice condenser: IgG@v9'  
    4-9冰冷凝器的额定负载rated load of the ice condenser )o SFHf  
    8.   1.一般术语 >]&LbUW+  
    1-1试样sample : e7{3:y|]d3  
    (1).表面层surface layer: )DI/y1  
    (2).真实表面true surface: #T99p+O  
    (3).有效表面积effective surface area: [8^j wnAYS  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: V`l.F"<L  
    (5).表面粒子密度surface particle density: RI')iz?  
    (6).单分子层monolayer: '<^%> R2  
    (7).表面单分子层粒子密度monolayer density: #hH"g  
    (8).覆盖系数coverage ratio: kbI:}b7H  
    1-2激发excitation: 1WfN_JKB5  
    (1).一次粒子primary particle: %$~?DDNM  
    (2).一次粒子通量primary particle flux: "F7g8vu  
    (3).一次粒子通量密度density of primary particle flux: q\x*@KQgM  
    (4).一次粒子负荷primary particle load: DHaSBk  
    (5).一次粒子积分负荷integral load of primary particle: n,wLk./`  
    (6).一次粒子的入射能量energy of the incident primary particle: dScit!T"  
    (7).激发体积excited volume: .o]vjNrd/  
    (8).激发面积excited area: `-hFk88  
    (9).激发深度excited death: #?@k=e\  
    (10).二次粒子secondary particles: zEl@jK,{$  
    (11).二次粒子通量secondary particle flux: L @_IGH  
    (12).二次粒子发射能energy of the emitted secondary particles: ']Nw{}eS`  
    (13).发射体积emitting volume: ";J1$a  
    (14).发射面积emitting area: Y@c! \0e$  
    (15).发射深度emitting depth: S@k4k^Vg  
    (16).信息深度information depth: JY"<b6C^  
    (17).平均信息深度mean information depth: 2w$o;zz1  
    1-3入射角angle of incidence: =4RnXZ[P0  
    1-4发射角angle of emission: ;4z6="<Y  
    1-5观测角observation: l-Xxur5M'  
    1-6分析表面积analyzed surface area: W=M]1hy  
    1-7产额 yield : pfe9 n[  
    1-8表面层微小损伤分析minimum damage surface analysis: JY(_}AAu  
    1-9表面层无损伤分析non-destructive surface analysis: P B.@G,)  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : xm6=l".%z  
    1-11可观测面积observable area: G[)Ll=  
    1-12可观测立体角observable solid angle : +`r;3kH ..  
    1-13接受立体角;观测立体角angle of acceptance: 'ZgrN14  
    1-14角分辨能力angular resolving power: 7i`@`0   
    1-15发光度luminosity: l`:M/z6"  
    1-16二次粒子探测比detection ratio of secondary particles: &y[Od{=  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: u%Bk"noCa  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: ~gNa<tg"1  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: HpiP"Sl  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: m*6C *M  
    1-21本底压力base pressure: 7H:1c=U  
    1-22工作压力working pressure: |bk.gh  
    nbj&3z,  
    2.分析方法 c`yLn %Of%  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: < S:SIaf0  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : QeuIAs*_  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: ^w5`YI4<  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: *)gbKXb  
    2-3离子散射表面分析ion scattering spectroscopy: (|(#~o]40t  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: I dgha9K  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: r?{tu82#i  
    2-6离子散射谱仪ion scattering spectrometer: +/'3=!oyd  
    2-7俄歇效应Auger process: f wWI2"}  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: Wf^6:  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: ~e~iCyW;S  
    2-10光电子谱术photoelectron spectroscopy : (]n^_G#-$  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: GS_'&Yj  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: aF7" 4^P  
    2-11光电子谱仪photoelectron spectrometer: 9XImgeAs  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: k_ 9gMO  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: l`G .lM(  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): I,OEor6%R(  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊