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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 k~Pm.@,3o  
    --------------------------------------------------- Xl6)&   
    真空术语 (nrrzOax  
    R7KQ-+Zb  
    1.标准环境条件 standard ambient condition: N,ik&NIWy  
    2.气体的标准状态 standard reference conditions forgases: vc2xAAQ  
    3.压力(压强)p pressure: p _e-u-  
    4.帕斯卡Pa pascal: dITnPb)i  
    5.托Torr torr: i&,U);T  
    6.标准大气压atm standard atmosphere: fC3IxlG  
    7.毫巴mbar millibar: >V(2Ke Y  
    8.分压力 partial pressure: SEchF"KJQF  
    9.全压力 total pressure: ~+>M,LfK  
    10.真空 vacuum: LbR/it'}  
    11.真空度 degree of vacuum: <J-OwO a-1  
    12.真空区域 ranges of vacuum: ?<frU ,{  
    13.气体 gas: z K8#gif@  
    14.非可凝气体 non-condensable gas: LO61J_J<  
    15.蒸汽vapor: 29ft!R>[  
    16.饱和蒸汽压saturation vapor pressure: sW2LNE  
    17.饱和度degree of saturation: %Y Rg1UKY  
    18.饱和蒸汽saturated vapor: k7{fkl9|#  
    19.未饱和蒸汽unsaturated vapor: 24N,Bo 3  
    20.分子数密度n,m-3 number density of molecules: vB4cdW 2#3  
    21.平均自由程ι、λ,m mean free path: H5RHA^p|  
    22.碰撞率ψ collision rate: ,.`^Wx6F  
    23.体积碰撞率χ volume collision rate: !v;r3*#Nky  
    24.气体量G quantity of gas: _ z4rx  
    25.气体的扩散 diffusion of gas: uWnS<O  
    26.扩散系数D diffusion coefficient; diffusivity: Aq'%a)Y2  
    27.粘滞流 viscous flow: j|G-9E  
    28.粘滞系数η viscous factor: ex!^&7Q(  
    29.泊肖叶流 poiseuille flow: Bhq(bV  
    30.中间流 intermediate flow: <$yer)_J!k  
    31.分子流 molecular flow: hTG d Uw]  
    32克努曾数 number of knudsen: ^Js9E  
    33.分子泻流 molecular effusion; effusive flow: h5F'eur  
    34.流逸 transpiration: <Ab:yD`K!  
    35.热流逸 thermal transpiration: 6$6NVq  
    36.分子流率qN molecular flow rate; molecular flux: :s'%IGy>:  
    37.分子流率密度 molecular flow rate density; density of molecular flux: #8z\i2I  
    38.质量流率qm mass flow rare: wO!hVm,T a  
    39.流量qG throughput of gas: &yA<R::o  
    40.体积流率qV volume flow rate: a+~o: 5  
    41.摩尔流率qυ molar flow rate: ?^ErrlI_  
    42.麦克斯韦速度分布 maxwellian velocity distribution: Zj7XmkL  
    43.传输几率Pc transmission probability: b/K&8C,c  
    44.分子流导CN,UN molecular conductance: %xZ.+Ff%  
    45.流导C,U conductance: {H+?DMh  
    46.固有流导Ci,Ui intrinsic conductance: fcZOsTj  
    47.流阻W resistance: Nz}Q"6L  
    48.吸附 sorption: AX,Db%`l,  
    49.表面吸附 adsorption: Ys_YjlMIbl  
    50.物理吸附physisorption: ;Z`)*TRp4  
    51.化学吸附 chemisorption: |TUpv*pq  
    52.吸收absorption: O(~Vvoq  
    53.适应系数α accommodation factor: }[DAk~  
    54.入射率υ impingement rate: ;&!dD6N  
    55.凝结率condensation rate: =5|5j!i=q  
    56.粘着率 sticking rate: 5?fk;Q9+\  
    57.粘着几率Ps sticking probability: V]O :;(W_  
    58.滞留时间τ residence time: h@DJ/&;u@  
    59.迁移 migration: 2>!ykUw^O  
    60.解吸 desorption: _[ phs06A  
    61.去气 degassing: ;Pa(nUE@  
    62.放气 outgassing: Td  F<  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: \O:xw-eG   
    64.蒸发率 evaporation rate: +-nQ, fOV  
    65.渗透 permeation: >eTlew<5  
    66.渗透率φ permeability: !qpu /  
    67.渗透系数P permeability coefficient #CS>A# Lk  
    2.   1.真空泵 vacuum pumps []]3"n  
    1-1.容积真空泵 positive displacement pump: z )pV$  
    ⑴.气镇真空泵 gas ballast vacuum pump: "XY?v8*c  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: 9>#|~P&FE  
    ⑶.干封真空泵 dry-sealed vacuum pump: |i`@!NrFL  
    ⑷.往复真空泵 piston vacuum pump: _Nn!SE   
    ⑸.液环真空泵 liquid ring vacuum pump: 3PA'Uk"5Z  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: 7asq]Y}<  
    ⑺.定片真空泵 rotary piston vacuum pump: vRq xZN  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: bevT`D  
    ⑼.余摆线真空泵 trochoidal vacuum pump: `-H:j:U{  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: C#~MR+;  
    ⑾.罗茨真空泵 roots vacuum pump:  5q ,  
    1-2.动量传输泵 kinetic vacuum pump: <C$<(Dw5  
    ⑴.牵引分子泵molecular drag pump: >&&xJ5  
    ⑵.涡轮分子泵turbo molecular pump: -"zu"H~t4  
    ⑶.喷射真空泵ejector vacuum pump: }SV3PdE  
    ⑷.液体喷射真空泵liquid jet vacuum pump: _6m3$k_[MJ  
    ⑸.气体喷射真空泵gas jet vacuum pump: F&*M$@u5  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : Flxo%g};  
    ⑺.扩散泵diffusion pump : ja;5:=8A5  
    ⑻.自净化扩散泵self purifying diffusion pump: 2f!oA~|2  
    ⑼.分馏扩散泵 fractionating diffusion pump : @;6}xO2  
    ⑽.扩散喷射泵diffusion ejector pump : %)9]dOdOk  
    ⑾.离子传输泵ion transfer pump: MQ*#oVqv  
    1-3.捕集真空泵 entrapment vacuum pump: m=MT`-:  
    ⑴吸附泵adsorption pump: xiF%\#N  
    ⑵.吸气剂泵 getter pump: >y9o&D  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : 17cW8\  
    ⑷.吸气剂离子泵getter ion pump: ?X'* p<`  
    ⑸.蒸发离子泵 evaporation ion pump: k^pu1g=6I  
    ⑹.溅射离子泵sputter ion pump: A7C+&I!L  
    ⑺.低温泵cryopump: 2 mZ/ 3u  
    6Qb)Uq3}]  
    2.真空泵零部件 [bv@qBL  
    2-1.泵壳 pump case: <~M9 nz(<  
    2-2.入口 inlet: v$G*TR<2  
    2-3.出口outlet: SSLs hY~d  
    2-4.旋片(滑片、滑阀)vane; blade : 5{q/z^]  
    2-5.排气阀discharge valve: ennz/'  
    2-6.气镇阀gas ballast valve:  vkpV,}H  
    2-7.膨胀室expansion chamber: f#kevf9zc  
    2-8.压缩室compression chamber: )6E*Qz  
    2-9.真空泵油 vacuum pump oil: 5vi#ItN}|  
    2-10.泵液 pump fluid: {H; |G0tR  
    2-11.喷嘴 nozzle: `^-Be  
    2-13.喷嘴扩张率nozzle expansion rate: mzxvfXSF  
    2-14.喷嘴间隙面积 nozzle clearance area : [ |n-x3h  
    2-15.喷嘴间隙nozzle clearance: xqWrW)  
    2-16.射流jet: $Q?G*@y  
    2-17.扩散器diffuser: M3@fc,Ch  
    2-18.扩散器喉部diffuser thoat: !otq X-  
    2-19.蒸汽导管vapor tube(pipe;chimney): sK-|xU.  
    2-20.喷嘴组件nozzle assembly: %]0U60  
    2-21.下裙skirt: hS{ *l9v7  
    ""'eTpe  
    3.附件 sLa)~To  
    3-1阱trap: 2Lekckgv  
    ⑴.冷阱 cold trap: tc <M]4-  
    ⑵.吸附阱sorption trap: UUf1T@-  
    ⑶.离子阱ion trap: sQAc"S  
    ⑷.冷冻升华阱 cryosublimation trap: fC GDL6E  
    3-2.挡板baffle: qV8\/7'A0a  
    3-3.油分离器oil separator: NE2sD  
    3-4.油净化器oil purifier: ilp;@O6  
    3-5.冷凝器condenser: m2uML*&O5K  
    L +rySP  
    4.泵按工作分类 #D/ }u./  
    4-1.主泵main pump: OO\biYh o  
    4-2.粗抽泵roughing vacuum pump: e1^{  
    4-3.前级真空泵backing vacuum pump: *DC Nu{6  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: &iiK ZZ`_o  
    4-5.维持真空泵holding vacuum pump: <<On*#80w  
    4-6.高真空泵high vacuum pump: K'5sn|)  
    4-7.超高真空泵ultra-high vacuum pump: O|OSE  
    4-8.增压真空泵booster vacuum pump: |@L &yg,x  
    <fsn2[V:B%  
    5.真空泵特性 8pL>wL &C  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: 5f&{!N  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 $ l sRg:J  
    5-3.起动压力starting pressure: (zJ$oRq  
    5-4.前级压力 backing pressure : ok%a|Zz+]  
    5-5.临界前级压力 critical backing pressure: yCkW2p]s,K  
    5-6.最大前级压力maximum backing pressure: -~O;tJF2  
    5-7.最大工作压力maximum working pressure: J%f=A1Q  
    5-8.真空泵的极限压力ultimate pressure of a pump: <aSLm=  
    5-9.压缩比compression ratio: <x0uO  
    5-10.何氏系数Ho coefficient: h/0-Mrk;e  
    5-11.抽速系数speed factor: qe6C|W~n  
    5-12.气体的反扩散back-diffusion of gas: E0)mI)RW.  
    5-13.泵液返流back-streaming of pump fluid: `k{ff  
    5-14.返流率back-streaming rate gc2|V6(  
    5-15.返迁移back-migration: ?9zoQ[  
    5-16.爆腾bumping: {uwk[f{z  
    5-17.水蒸气允许量qm water vapor tolerable load: fyg~KF}  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: oY2?W  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: "l[ V%f E  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump Pvg  
    3.   1.一般术语 *4hOCQ[  
    1-1.压力计pressure gauge: 8A8xY446)  
    1-2.真空计vacuum gauge: 1f@U :<:  
    ⑴.规头(规管)gauge head: 0(U3~ k6  
    ⑵.裸规nude gauge : $~G0#JL  
    ⑶.真空计控制单元gauge control unit : J!A/r<  
    ⑷.真空计指示单元gauge indicating unit : 7\0|`{|R@  
    !skb=B#  
    2.真空计一般分类 jWv3O&+?X  
    2-1.压差式真空计differential vacuum gauge: =2g[tsY  
    2-2.绝对真空计 absolute vacuum gauge: (J^Lqh_  
    2-3.全压真空计total pressure vacuum gauge: ?`T6CRZhr  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: 71 L\t3fG  
    2-5.相对真空计relative vacuum gauge : rq'##`H  
    ^aD/ .  
    3.真空计特性 J]|6l/i  
    3-1.真空计测量范围pressure range of vacuum gauge: TM/|K|_  
    3-2.灵敏度系数sensitivity coefficient: /HjI=263  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): {? K|(C  
    3-5.规管光电流photon current of vacuum gauge head: 9&XV}I,~?|  
    3-6.等效氮压力equivalent nitrogen pressure : fbHWBb  
    3-7.X射线极限值 X-ray limit: L.T gJv43  
    3-8.逆X射线效应anti X-ray effect: RP`GG+K  
    3-9.布利尔斯效应blears effect: STXqq[+Rf  
    n $O.>  
    4.全压真空计 hk7(2j7B  
    4-1.液位压力计liquid level manometer: +;:aG6q+  
    4-2.弹性元件真空计elastic element vacuum gauge: c >u>Pi;Z  
    4-3.压缩式真空计compression gauge: \sHy.{  
    4-4.压力天平pressure balance: x  tYV"  
    4-5.粘滞性真空计viscosity gauge : yd0=h7s  
    4-6.热传导真空计thermal conductivity vacuum gauge : 75\RG+kQ  
    4-7.热分子真空计thermo-molecular gauge: <@U.   
    4-8.电离真空计ionization vacuum gauge: [$1: &!(!  
    4-9.放射性电离真空计radioactive ionization gauge: e_I; y  
    4-10.冷阴极电离真空计cold cathode ionization gauge: vR%j#v|s  
    4-11.潘宁真空计penning gauge: M!&_qj&N,  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: nCffBc  
    4-13.放电管指示器discharge tube indicator: `Ct'/h{  
    4-14.热阴极电离真空计hot cathode ionization gauge: <4l.s  
    4-15.三极管式真空计triode gauge: W2F +^  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: "q9~ C  
    4-17.B-A型电离真空计Bayard-Alpert gauge: }sTH.%  
    4-18.调制型电离真空计modulator gauge: L)kb (TH  
    4-19.抑制型电离真空计suppressor gauge: Gs_*/E7,  
    4-20.分离型电离真空计extractor gauge: _XY`UZ  
    4-21.弯注型电离真空计bent beam gauge: P<cMP)+K  
    4-22.弹道型电离真空计 orbitron gauge : p@cfY]<7  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: HQ|o%9~  
    iioct_7,g<  
    5.分压真空计(分压分析器) pPiYPfs  
    5-1.射频质谱仪radio frequency mass spectrometer: Tsm)&$JI8  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: .q5J^/kr  
    5-3.单极质谱仪momopole mass spectrometer: B^8ZoF  
    5-4.双聚焦质谱仪double focusing mass spectrometer: gZ`32fB%  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: Eu`2w%qz  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: eD*?q7  
    5-7.回旋质谱仪omegatron mass spectrometer: ot|N;=ZKo  
    5-8.飞行时间质谱仪time of flight mass spectrometer: P3wU#qU  
    Ax5mP8S  
    6.真空计校准 ,h%D4EVx  
    6-1.标准真空计reference gauges: #Acon7R p  
    6-2.校准系统system of calibration: )CC?vV  
    6-3.校准系数K calibration coefficient: jgo e^f  
    6-4.压缩计法meleod gauge method: ^3Z7dIUww  
    6-5.膨胀法expansion method: 7af?E)}v  
    6-6.流导法flow method: eW\?eq+ `A  
    4.   1.真空系统vacuum system JYZ2k=zh  
    1-1.真空机组pump system: 88Fb1!a5Z  
    1-2.有油真空机组pump system used oil : 2gQY8h8  
    1-3.无油真空机组oil free pump system 8Zcol$XS'  
    1-4.连续处理真空设备continuous treatment vacuum plant: #d }0}7ue  
    1-5.闸门式真空系统vacuum system with an air-lock: CTh1+&Pa  
    1-6.压差真空系统differentially pumped vacuum system: uI%N?  
    1-7.进气系统gas admittance system: /#-,R,Q  
    ~pHJ0g:t  
    2.真空系统特性参量 [n!$D(|"!V  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : EpRXjz  
    2-2.抽气装置的抽气量throughput of a pumping unit : /_NkB$&  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 3[MdUj1y[  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: 52>[d3I3  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: #5'c\\?Q  
    2-6.极限压力ultimate pressure: @+}rEe_(  
    2-7.残余压力residual pressure: Si#"Wn?|  
    2-8.残余气体谱residual gas spectrum: ljN zYg~-  
    2-9.基础压力base pressure: @MNl*~'$.[  
    2-10.工作压力working pressure: W0VA'W  
    2-11.粗抽时间roughing time: T{_1c oL  
    2-12.抽气时间pump-down time: J|n(dVen/  
    2-13.真空系统时间常数time constant of a vacuum system: kmZ.U>#  
    2-14.真空系统进气时间venting time: l%^h2 o  
    8!Wfd)4=,F  
    3.真空容器 Iv'RLM  
    3-1.真空容器;真空室vacuum chamber: B1|?RfCe  
    3-2.封离真空装置sealed vacuum device: ?cqicN.+6  
    3-3.真空钟罩vacuum bell jar: AyE%0KmraK  
    3-4.真空容器底板vacuum base plate: yr FZ~r@-  
    3-5.真空岐管vacuum manifold: U8 Z~Y}29  
    3-6.前级真空容器(贮气罐)backing reservoir: 4 hL`=[AB  
    3-7.真空保护层outer chamber: 6P0y-%[Gk  
    3-8.真空闸室vacuum air lock: wY' "ab  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: kxwNbxC  
    @)9REA(U  
    4.真空封接和真空引入线 5gO /-Zj  
    4-1.永久性真空封接permanent seal : Zw2jezP@t  
    4.2.玻璃分级过渡封接graded seal : Bs_S.JP<`  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: t[%x}0FP-F  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: "4 'kb  
    4-5.陶瓷金属封接ceramic-to-metal seal: ' be P  
    4-6.半永久性真空封接semi-permanent seal : x$~3$E  
    4-7.可拆卸的真空封接demountable joint: &J\B\`  
    4-8.液体真空封接liquid seal bBA$}bv  
    4-9.熔融金属真空封接molten metal seal: =Nw2;TkB[  
    4-10.研磨面搭接封接ground and lapped seal: `2>XH:+7F  
    4-11.真空法兰连接vacuum flange connection: uZ@-e|qto  
    4-12.真空密封垫vacuum-tight gasket: aL88E  
    4-13.真空密封圈ring gasket: %,33gZzf  
    4-14.真空平密封垫flat gasket: ]PeLcB  
    4-15.真空引入线feedthrough leadthrough: F;pTXt}?5  
    4-16.真空轴密封shaft seal: 3 t/ R2M  
    4-17.真空窗vacuum window: L_E^}^1!  
    4-18.观察窗viewing window: DP|TIt,Rl  
    ):/,w!1  
    5.真空阀门 :M@Mmp Ph  
    5-1.真空阀门的特性characteristic of vacuum valves: DLU[<! C  
    ⑴.真空阀门的流导conductance of vacuum valves: Kl2}o|b   
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: ~D*b3K 8X  
    5-2.真空调节阀regulating valve: X2i*iW<  
    5-3.微调阀 micro-adjustable valve: |pBMrN+is  
    5-4.充气阀charge valve: &j3` )N  
    5-5.进气阀gas admittance valve: nlaG<L#  
    5-6.真空截止阀break valve: I=U+GY:  
    5-7.前级真空阀backing valve: 8B j4 _!g  
    5-8.旁通阀 by-pass valve: kzMa+(fu  
    5-9.主真空阀main vacuum valve: 4 ^4d9?c  
    5-10.低真空阀low vacuum valve: 7LG+$LEz  
    5-11.高真空阀high vacuum valve: tL1P<1j_  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: ]+mjOks~  
    5-13.手动阀manually operated valve: ooY\t +  
    5-14.气动阀pneumatically operated valve: >o#ERNf  
    5-15.电磁阀electromagnetically operated valve: A1Ka(3"  
    5-16.电动阀valve with electrically motorized operation: J6DnPaw-G  
    5-17.挡板阀baffle valve: Sobtz}A*  
    5-18.翻板阀flap valve: d`85P+Qen|  
    5-19.插板阀gate valve: ^,+nef?=  
    5-20.蝶阀butterfly valve: mqdOu{kQ  
    n"iNKR>nW  
    6.真空管路 UkZ\cc}aC/  
    6-1.粗抽管路roughing line: b"Zq0M0 l  
    6-2.前级真空管路backing line: o_sQQF  
    6-3.旁通管路;By-Pass管路 by-pass line: m#*h{U$  
    6-4.抽气封口接头pumping stem: #VO.%H}i  
    6-5.真空限流件limiting conductance:       6p#g0t  
    6-6.过滤器filter: _r]nJEF5  
    5.   1.一般术语 `%oIRuYG]j  
    1-1真空镀膜vacuum coating: inZi3@h)T  
    1-2基片substrate: Cw%BZ  
    1-3试验基片testing substrate: xHHV=M2l(s  
    1-4镀膜材料coating material: xkM] J)C  
    1-5蒸发材料evaporation material: {8 N=WZ  
    1-6溅射材料sputtering material: <FQFv IKg  
    1-7膜层材料(膜层材质)film material: c8<xFvYG  
    1-8蒸发速率evaporation rate: mW~P!7]  
    1-9溅射速率sputtering rate: vnTq6:f#M  
    1-10沉积速率deposition rate: []"=]f{1};  
    1-11镀膜角度coating angle: #MglHQO+  
    * MEe,4  
    2.工艺 VRtO; F  
    2-1真空蒸膜vacuum evaporation coating: Fom>'g*  
    (1).同时蒸发simultaneous evaporation: I(n }<)eF  
    (2).蒸发场蒸发evaporation field evaporation: 8bt53ta  
    (3).反应性真空蒸发reactive vacuum evaporation: \-c#jo.$8  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: 0yz~W(tsm  
    (5).直接加热的蒸发direct heating evaporation: x/xb1"  
    (6).感应加热蒸发induced heating evaporation: R]Ek}1~?  
    (7).电子束蒸发electron beam evaporation: -TTs.O8P|<  
    (8).激光束蒸发laser beam evaporation: HxZ.OZbR  
    (9).间接加热的蒸发indirect heating evaporation: @;;G88=  
    (10).闪蒸flash evaportion: lVoik *,B  
    2-2真空溅射vacuum sputtering: ] IS;\~  
    (1).反应性真空溅射 reactive vacuum sputtering: 84^[/d;!  
    (2).偏压溅射bias sputtering: v,jhE9_O0  
    (3).直流二级溅射direct current diode sputtering: 6{.J:S9n   
    (4).非对称性交流溅射asymmtric alternate current sputtering: Gm A!Mo  
    (5).高频二极溅射high frequency diode sputtering: Z(; AyTXA  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: 036[96t,F  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: Pw{"_g  
    (8).离子束溅射ion beam sputtering: \(fq8AL?  
    (9).辉光放电清洗glow discharge cleaning: Yb 6q))Y  
    2-3物理气相沉积PVD physical vapor deposition: Ak A!:!l  
    2-4化学气相沉积CVD chemical vapor deposition: 76bc]o#  
    2-5磁控溅射magnetron sputtering: TBnvV 5_  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: c+2sT3).D  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: qjAh6Q/E`  
    2-8电弧离子镀arc discharge deposition: 2+:'0Krc  
    Xa,\EEmQ  
    3.专用部件 bi$VAYn.^  
    3-1镀膜室coating chamber: YE\K<T jH  
    3-2蒸发器装置evaporator device: p411 `]Zf  
    3-3蒸发器evaporator: +s~.A_7)  
    3-4直接加热式蒸发器evaporator by direct heat: X;VQEDMPU  
    3-5间接加热式蒸发器evaporator by indirect heat: M{E{NK  
    3-7溅射装置sputtering device: O%g\B8 ;  
    3-8靶target: uR_F,Mp?%u  
    3-10时控挡板timing shutter: [l*;E f,  
    3-11掩膜mask: YeyGN  
    3-12基片支架substrate holder: Pl78fs"L@  
    3-13夹紧装置clamp: ~O03Sit-  
    3-14换向装置reversing device: -DCa   
    3-15基片加热装置substrate heating device: RJ}#)cT  
    3-16基片冷却装置substrate colding device: d!V$Y}n  
    /oL8;:m  
    4.真空镀膜设备 =~jA oOC@  
    4-1真空镀膜设备vacuum coating plant: `R+,1"5=  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: ,@.EpbB  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: Mu2`ODe]  
    4-2连续镀膜设备continuous coating plant: J@]k%h  
    4-3半连续镀膜设备semi- continuous coating plant eW50s`bKY  
    6.   1.漏孔 re`t ]gzb  
    1-1漏孔leaks: CW`!}yu%  
    1-2通道漏孔channel leak: Z0* %Rq  
    1-3薄膜漏孔membrane leak: N wtg%;  
    1-4分子漏孔molecular leak: Hg+ F^2<y  
    1-5粘滞漏孔vixcous leak: .'d2J>~N  
    1-6校准漏孔calibrated leak: Fm3t'^SqF  
    1-7标准漏孔reference leak : .=<$S#x^Hb  
    1-8虚漏virtual leak: ]db@RbaH  
    1-9漏率leak rate: &=Y e6 f[  
    1-10标准空气漏率standard air leak rate: ^E,1V5  
    1-11等值标准空气漏率equivalent standard air leak rate: 0m)&Y FZ[(  
    1-12探索(示漏)气体: -^SA8y  
    WG5W0T_  
    2.本底 sbS~N*{E  
    2-1本底background: \#6Fm_b] u  
    2-2探索气体本底search gas background : Yc;ec9~  
    2-3漂移drift: NXU`wnVJ  
    2-4噪声noise: | vu>;*K  
    _0(7GE13p  
    3.检漏仪 GwLFL.Ke  
    3-1检漏仪leak detector: =SBBvnPLI  
    3-2高频火花检漏仪H.F. spark leak detector: GEe`ZhG,  
    3-3卤素检漏仪halide leak detector: 6rX_-Mm6w  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: Qh`:<KI  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: PDP[5q r  
    ax|1b`XUr"  
    4.检漏 Y*LaBxt Q  
    4-1气泡检漏leak detection by bubbles: qf8[!5GM  
    4-2氨检漏leak detection by ammonia: YZE.@Rz  
    4-3升压检漏leak detection of rise pressure: H{(]9{  
    4-4放射性同位素检漏radioactive isotope leak detection: 2R.2D'4)`  
    4-5荧光检漏fluorescence leak detection >M;u*Go`QO  
    7.   1.一般术语 lA;a  
    1-1真空干燥vacuum drying: xf,5R9g/  
    1-2冷冻干燥freeze drying : aGoE,5  
    1-3物料material: .p&Yr%~  
    1-4待干燥物料material to be dried: .}`hCt08  
    1-5干燥物料dried material : #T3 h}=  
    1-6湿气moisture;humidity: ziEz.Wn"  
    1-7自由湿气free moisture: sl|_=oXT  
    1-8结合湿气bound moisture: DQXS$uBT  
    1-9分湿气partial moisture: cQUC.TZ_  
    1-10含湿量moisture content: 0q6I;$H  
    1-11初始含湿量initial moisture content: cAuY4RV  
    1-12最终含湿量final residual moisture: x\@*6 0o  
    1-13湿度degree of moisture ,degree of humidity : z#Nl@NO&  
    1-14干燥物质dry matter : G/?~\ }:s  
    1-15干燥物质含量content of dry matter: Lm%GR[tyQ  
    5#2 F1NX  
    2.干燥工艺 6}dR$*=  
    2-1干燥阶段stages of drying : Es'Um,ku  
    (1).预干燥preliminary dry: %NARyz  
    (2).一次干燥(广义)primary drying(in general): C)RBkcb  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): }e]f  
    (4).二次干燥secondary drying: <7sIm^N  
    2-2.(1).接触干燥contact drying: lU2c_4  
    (2).辐射干燥 drying by radiation : 7Z,/g|s}z  
    (3).微波干燥microwave drying: L;6.r3bL  
    (4).气相干燥vapor phase drying: ;LwqTlJ*[L  
    (5).静态干燥static drying: Nt-<W+,  
    (6).动态干燥dynamic drying: BavO\{J#|0  
    2-3干燥时间drying time: \nvAa_,  
    2-4停留时间length of stay(in the drying chamber): O#kq^C}  
    2-5循环时间cycle time: 6Y384  
    2-6干燥率 dessication ratio : e}{U7xQm1  
    2-7去湿速率mass flow rate of humidity: 8E^@yZo{  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: #-# NqX:  
    2-9干燥速度 drying speed : =XY]x  
    2-10干燥过程drying process: d/,E2i{I7  
    2-11加热温度heating temperature: USPTpjt8R  
    2-12干燥温度temperature of the material being dried : ^ 4hO8  
    2-13干燥损失loss of material during the drying process : ,?-\ x6  
    2-14飞尘lift off (particles): |M~ON=  
    2-15堆层厚度thickness of the material: O&Z' r  
    xytr2V ]aV  
    3.冷冻干燥 =y]$0nh  
    3-1冷冻freezing: " Ar*QJ0]  
    (1).静态冷冻static freezing: g!J0L7 i|  
    (2).动态冷冻dynamic freezing: P=8>c'Q  
    (3).离心冷冻centrifugal freezing: 0@=MOGQb  
    (4).滚动冷冻shell freezing: N2,D:m\  
    (5).旋转冷冻spin-freezing: =U-r*sGLN  
    (6).真空旋转冷冻vacuum spin-freezing: eiMH['X5  
    (7).喷雾冷冻spray freezing: {rH9grb  
    (8).气流冷冻air blast freezing: -w 6 "?  
    3-2冷冻速率rate of freezing: Rm>^tu -  
    3-3冷冻物料frozen material: +8P,s[0<R_  
    3-4冰核ice core: A.%CAGU5w  
    3-5干燥物料外壳envelope of dried matter: d^D i*&X  
    3-6升华表面sublimation front: 4sF v?W  
    3-7融化位置freezer burn: 2j&@ p>  
    g"8 .}1)~r  
    4.真空干燥设备;真空冷冻干燥设备 IMLsQit*  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: fnu"*5bE  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: f@V3\Z/6E  
    4-3加热表面heating surface: G*8GGWB^a  
    4-4物品装载面shelf : `S/wJ'c  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): `)>7)={  
    4-6单位面积干燥器处理能力throughput per shelf area: 6vy7l(%  
    4-7冰冷凝器ice condenser: gUax'^w;V;  
    4-8冰冷凝器的负载load of the ice condenser: NeOxpn[  
    4-9冰冷凝器的额定负载rated load of the ice condenser E+xuWdp.*  
    8.   1.一般术语 #Z!b G?="  
    1-1试样sample : t-e5ld~a  
    (1).表面层surface layer: =[tSd)D,y  
    (2).真实表面true surface: ^CT&0  
    (3).有效表面积effective surface area: _7)F ?  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: M#jN-ix  
    (5).表面粒子密度surface particle density: m~l F`?  
    (6).单分子层monolayer: VHUW]8We  
    (7).表面单分子层粒子密度monolayer density: v:_B kHN'  
    (8).覆盖系数coverage ratio: 773/#c  
    1-2激发excitation: /X8 <C=}  
    (1).一次粒子primary particle: :os z  
    (2).一次粒子通量primary particle flux: ]o/|na*  
    (3).一次粒子通量密度density of primary particle flux: quu*xJ;Ci  
    (4).一次粒子负荷primary particle load: c'fSu;1  
    (5).一次粒子积分负荷integral load of primary particle: 90N`CXas  
    (6).一次粒子的入射能量energy of the incident primary particle: %"$@%"8;3  
    (7).激发体积excited volume: M^madx6`  
    (8).激发面积excited area: ]dPZ.r  
    (9).激发深度excited death: 0lk;F  
    (10).二次粒子secondary particles: !b|'Vp^U  
    (11).二次粒子通量secondary particle flux: QDmYSY$  
    (12).二次粒子发射能energy of the emitted secondary particles: T3&`<%,f  
    (13).发射体积emitting volume: keAcKhj  
    (14).发射面积emitting area: =H5\$&xj4.  
    (15).发射深度emitting depth: S[:xqzyDg  
    (16).信息深度information depth: ZXb0Y2AVx  
    (17).平均信息深度mean information depth: hq>Csj==@  
    1-3入射角angle of incidence: GR4?BuY,  
    1-4发射角angle of emission: Z'v-F^  
    1-5观测角observation: mry N}  
    1-6分析表面积analyzed surface area: q!,zq  
    1-7产额 yield : d.<~&.-$  
    1-8表面层微小损伤分析minimum damage surface analysis: CZ{k@z`r  
    1-9表面层无损伤分析non-destructive surface analysis: Q}AE.Ef@<  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : F1azZ (  
    1-11可观测面积observable area: <&!]K?Q9i  
    1-12可观测立体角observable solid angle : }odV_WT  
    1-13接受立体角;观测立体角angle of acceptance: L):U"M>]=  
    1-14角分辨能力angular resolving power: pb;")Q'  
    1-15发光度luminosity: ZFh+x@  
    1-16二次粒子探测比detection ratio of secondary particles: (X[2TT3j!  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: $A\m>*@  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: 8%{q%+  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: < a rZbM  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: QGnxQ{ko  
    1-21本底压力base pressure: Bo_ym36N  
    1-22工作压力working pressure: -f(/B9}  
    g<*jlM1r  
    2.分析方法 %kI} [6J_  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: oUDVy_k  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : ik1tidw  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: /L=(^k=a.;  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: (il0M=M  
    2-3离子散射表面分析ion scattering spectroscopy: <!^ [~`  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: P.WYTst=  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: "&YYO#YO  
    2-6离子散射谱仪ion scattering spectrometer: MLVB^<qkeH  
    2-7俄歇效应Auger process: |KCOfVh?|.  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: ]5CNk+`'  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: JHV)ZOO  
    2-10光电子谱术photoelectron spectroscopy : P<dy3 ;  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: jB$SUO`*  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: <_S@6 ?  
    2-11光电子谱仪photoelectron spectrometer: t@zdm y  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: VAQ)Hc]  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: |  FM }  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): #} ,x @]p  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊