“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 h5&l#>8&
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真空术语 \cdNyVY
)eNR4nF
1.标准环境条件 standard ambient condition: y88FT#hR|5
2.气体的标准状态 standard reference conditions forgases: ^o]ZDc
3.压力(压强)p pressure: T^8t<S@`
4.帕斯卡Pa pascal: {T
Z7>k
5.托Torr torr: wAxXK94#3
6.标准大气压atm standard atmosphere: f0fN1
7.毫巴mbar millibar: z!5^UD8"W
8.分压力 partial pressure: vBUx)l
9.全压力 total pressure: 1@C0c%
10.真空 vacuum: g]R }w@nJ
11.真空度 degree of vacuum: >[=q9k
12.真空区域 ranges of vacuum: G}CzeLw
13.气体 gas: ow*) 1eo
14.非可凝气体 non-condensable gas: , gk49z9
15.蒸汽vapor: Y25S:XHk9
16.饱和蒸汽压saturation vapor pressure: [K;J#0V+&L
17.饱和度degree of saturation: gk\IivPb
18.饱和蒸汽saturated vapor: 5YaTE<G
19.未饱和蒸汽unsaturated vapor: DPJ#Y -0
20.分子数密度n,m-3 number density of molecules: ~AxA ,
21.平均自由程ι、λ,m mean free path: "W;GvI
22.碰撞率ψ collision rate: &IM;Yl
23.体积碰撞率χ volume collision rate:
z%;b-PpS
24.气体量G quantity of gas: 7wsn8_n9
25.气体的扩散 diffusion of gas: y~An'+yBa
26.扩散系数D diffusion coefficient; diffusivity: j^T.7Zv
27.粘滞流 viscous flow: y]aV7
`]
28.粘滞系数η viscous factor: ;sCf2TD,_
29.泊肖叶流 poiseuille flow: W~+
] 7<
30.中间流 intermediate flow: Ln0rm9FV-
31.分子流 molecular flow: zlZ$t{[,
32克努曾数 number of knudsen: Rz1&(_Ps
33.分子泻流 molecular effusion; effusive flow: wQ qI@
34.流逸 transpiration: yf+M
35.热流逸 thermal transpiration: *SQ hXTn
36.分子流率qN molecular flow rate; molecular flux: )f9f_^;
37.分子流率密度 molecular flow rate density; density of molecular flux: VS<E?JnbFV
38.质量流率qm mass flow rare: Zf}]sW$H
39.流量qG throughput of gas: ,qV8(`y_
40.体积流率qV volume flow rate: k/YEUC5
41.摩尔流率qυ molar flow rate: :l8n)O3
42.麦克斯韦速度分布 maxwellian velocity distribution: 4bqi&h3
43.传输几率Pc transmission probability:
XeDiiI
44.分子流导CN,UN molecular conductance: NS@j`6/U
45.流导C,U conductance: PI(;t9]b
46.固有流导Ci,Ui intrinsic conductance: =4uL1[0'
47.流阻W resistance: BpZE
48.吸附 sorption: +0\BI<aG
49.表面吸附 adsorption: R)d1]k8
50.物理吸附physisorption: x2/\%!mt
51.化学吸附 chemisorption: An!1>`8r
52.吸收absorption: YU.aZdA&V3
53.适应系数α accommodation factor: %KK6}d#
54.入射率υ impingement rate: m8;;
O
55.凝结率condensation rate: v{
Md4p
56.粘着率 sticking rate: ^{nf0 )56c
57.粘着几率Ps sticking probability: AJt*48H*G
58.滞留时间τ residence time: B}8xA}<
59.迁移 migration: %719h>$
60.解吸 desorption: |u8IQR'B
61.去气 degassing: @9g$+_"ZT
62.放气 outgassing: J3gJSRT@P
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: M eo(|U
64.蒸发率 evaporation rate: ;75K:_
65.渗透 permeation: Aq%TZ_m
66.渗透率φ permeability: rk:^^r>5Qi
67.渗透系数P permeability coefficient Z
.VIb|
2. 1.真空泵 vacuum pumps Gs;wx_k^
1-1.容积真空泵 positive displacement pump: >%5Ld`c:SD
⑴.气镇真空泵 gas ballast vacuum pump: Tt#4dm-
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: ;QkUW<(
⑶.干封真空泵 dry-sealed vacuum pump: , f{<
⑷.往复真空泵 piston vacuum pump: fVx<f.xuW
⑸.液环真空泵 liquid ring vacuum pump: ;rZR9fR
⑹.旋片真空泵 sliding vane rotary vacuum pump: Aon3G
⑺.定片真空泵 rotary piston vacuum pump: p;cNmMm
⑻.滑阀真空泵 rotary plunger vacuum pump: O4J <u-E$
⑼.余摆线真空泵 trochoidal vacuum pump: (CFm6p'RZ
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: z ^t6VF M
⑾.罗茨真空泵 roots vacuum pump: U8Z(=*Z3
1-2.动量传输泵 kinetic vacuum pump: N|-M|1w96
⑴.牵引分子泵molecular drag pump: =i[ _C>U
⑵.涡轮分子泵turbo molecular pump: _|reo6
⑶.喷射真空泵ejector vacuum pump: wm~35cF(
⑷.液体喷射真空泵liquid jet vacuum pump: jWk1FQte
⑸.气体喷射真空泵gas jet vacuum pump: 5e=9~].7
⑹.蒸汽喷射真空泵vapor jet vacuum pump : *Z'*^Y1le
⑺.扩散泵diffusion pump : nR'!Ui
⑻.自净化扩散泵self purifying diffusion pump: Q`-JRY-
⑼.分馏扩散泵 fractionating diffusion pump : }-Q FMPXhG
⑽.扩散喷射泵diffusion ejector pump : {7swE(N
⑾.离子传输泵ion transfer pump: 6D3hX>K4
1-3.捕集真空泵 entrapment vacuum pump: ChzKwYDY
⑴吸附泵adsorption pump: D*.U?
⑵.吸气剂泵 getter pump: __N<
B5E
⑶.升华(蒸发)泵 sublimation (evaporation)pump : 3NU{7,F
⑷.吸气剂离子泵getter ion pump: shlMJa?
⑸.蒸发离子泵 evaporation ion pump: LkYcAY$w
⑹.溅射离子泵sputter ion pump: Nki08qZ[
⑺.低温泵cryopump: B!{vSBq
L~9Q7 6w
2.真空泵零部件 2$ m#)*\
2-1.泵壳 pump case: VwJ A
2-2.入口 inlet: %L(;}sJ.
2-3.出口outlet: `o|Y5wQ@
2-4.旋片(滑片、滑阀)vane; blade : SQ&nQzL
2-5.排气阀discharge valve: $>^DkrOd
2-6.气镇阀gas ballast valve: q,S[[{("
2-7.膨胀室expansion chamber: Xc8r[dX
2-8.压缩室compression chamber: LF6PKS
2-9.真空泵油 vacuum pump oil: ^#-d^ )f;
2-10.泵液 pump fluid: y2Eq-Ie
2-11.喷嘴 nozzle: Xa o*h(Q@L
2-13.喷嘴扩张率nozzle expansion rate: b,C2(?hg
2-14.喷嘴间隙面积 nozzle clearance area : V+`gkWe/
2-15.喷嘴间隙nozzle clearance: ZAATV+Z
2-16.射流jet: -DAkVFsN
2-17.扩散器diffuser: 0F48T<i
2-18.扩散器喉部diffuser thoat: =Q+i(UGHi
2-19.蒸汽导管vapor tube(pipe;chimney): ctg U
2-20.喷嘴组件nozzle assembly: ]k+XL*]' A
2-21.下裙skirt: &.W,Hh
l-^2>K[
3.附件 lL8pIcQW
3-1阱trap: H(|n,c
⑴.冷阱 cold trap: /%&Kbd
⑵.吸附阱sorption trap: =n@"lY u[
⑶.离子阱ion trap: v@,n]"
⑷.冷冻升华阱 cryosublimation trap: 2Xw=kw u
3-2.挡板baffle: Q)]C~Q
3-3.油分离器oil separator: (U_`Q1Jo
3-4.油净化器oil purifier: y5@#leM
3-5.冷凝器condenser: tL#~U2K
-d-vzri
4.泵按工作分类 M[eq)a$
4-1.主泵main pump: l<3X:)
4-2.粗抽泵roughing vacuum pump: /H (55^EMZ
4-3.前级真空泵backing vacuum pump: L
i g7Ac,
4-4.粗(低)真空泵 roughing(low)vacuum pump: 5r2A^<)
4-5.维持真空泵holding vacuum pump: y
J|/^qs
4-6.高真空泵high vacuum pump: L<D<3g|4
4-7.超高真空泵ultra-high vacuum pump: 1`sLbPW
4-8.增压真空泵booster vacuum pump: 90"&KDh
}>93X0%r
5.真空泵特性 bm>N~DC
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: KUD.hK.
5-2.真空泵的抽气量Q throughput of vacuum pump:。 (r6'q0[
5-3.起动压力starting pressure: ^uiQZ%;
5-4.前级压力 backing pressure : Yamu"#
5-5.临界前级压力 critical backing pressure: % _.kd"
5-6.最大前级压力maximum backing pressure: s78MXS?py
5-7.最大工作压力maximum working pressure: k3PFCl~e
5-8.真空泵的极限压力ultimate pressure of a pump: -s3q(SH
5-9.压缩比compression ratio: APgjT';P^
5-10.何氏系数Ho coefficient: H^3f!\MC;o
5-11.抽速系数speed factor: #zf,%IYF
5-12.气体的反扩散back-diffusion of gas: Q6 oM$qiM
5-13.泵液返流back-streaming of pump fluid: Tv[h2_+E
5-14.返流率back-streaming rate aRV.;S
5-15.返迁移back-migration: G-6k[-@-v
5-16.爆腾bumping: }AW"2<@
5-17.水蒸气允许量qm water vapor tolerable load: s'4O]k`
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: $./&GOus
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: ikd1KF+I
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump eIDrN%3
3. 1.一般术语 4j1$1C{
1-1.压力计pressure gauge: mOC<a7#
1-2.真空计vacuum gauge: @?2ES@G+Ji
⑴.规头(规管)gauge head: u<['9U
⑵.裸规nude gauge : _|Uv7>}J^
⑶.真空计控制单元gauge control unit : tE8aL{<R
⑷.真空计指示单元gauge indicating unit : A.9ZFFz
~dBx<
2.真空计一般分类 eF"k"Ckt'
2-1.压差式真空计differential vacuum gauge: | LXVf
2-2.绝对真空计 absolute vacuum gauge: ('~}$%C
2-3.全压真空计total pressure vacuum gauge: rD;R9b"J
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: 1 2VSzIm
2-5.相对真空计relative vacuum gauge : =OeLF
( 5 BZZ
3.真空计特性 ,<(0T$o E[
3-1.真空计测量范围pressure range of vacuum gauge: ^~1Z"kAnT
3-2.灵敏度系数sensitivity coefficient: F{G.dXZZ<
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): JKz]fgOd$
3-5.规管光电流photon current of vacuum gauge head: w{WEYS
3-6.等效氮压力equivalent nitrogen pressure : b%QcB[k[WB
3-7.X射线极限值 X-ray limit: |{ @BH
3-8.逆X射线效应anti X-ray effect: Z8ds`KZM
3-9.布利尔斯效应blears effect: *.6m,QqJ(
+-!2nk`"a
4.全压真空计 `F$lO2 #k
4-1.液位压力计liquid level manometer: ]]NTvr
4-2.弹性元件真空计elastic element vacuum gauge: l4>c
4-3.压缩式真空计compression gauge: m%cwhH_B
4-4.压力天平pressure balance: S}P rgw/
4-5.粘滞性真空计viscosity gauge : hb<cynY
4-6.热传导真空计thermal conductivity vacuum gauge : iN9G`qF3!Q
4-7.热分子真空计thermo-molecular gauge: 3wMnTT"At
4-8.电离真空计ionization vacuum gauge: c2u*<x
4-9.放射性电离真空计radioactive ionization gauge: feJl[3@tO
4-10.冷阴极电离真空计cold cathode ionization gauge: CB0p2WS_
4-11.潘宁真空计penning gauge: sDB,+1"Y$
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: K: |-s4=
4-13.放电管指示器discharge tube indicator: \30rF]F`l
4-14.热阴极电离真空计hot cathode ionization gauge: FR']Rj
4-15.三极管式真空计triode gauge: 6HZVBZhM
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: z?@N+||,.
4-17.B-A型电离真空计Bayard-Alpert gauge: A">R-1R
4-18.调制型电离真空计modulator gauge: L6"V=^Bq
4-19.抑制型电离真空计suppressor gauge: "&/lF[q
4-20.分离型电离真空计extractor gauge: -wr_x<7
4-21.弯注型电离真空计bent beam gauge: Q*hXFayx
4-22.弹道型电离真空计 orbitron gauge : ,h9?o
4-23.热阴极磁控管真空计hot cathode magnetron gauge: DP-0,Gt&Xj
7h.fT`
5.分压真空计(分压分析器) +{#L,0t
5-1.射频质谱仪radio frequency mass spectrometer: 7GvMKtuSK
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: p<<dj%
5-3.单极质谱仪momopole mass spectrometer: ]v]tBVO$
5-4.双聚焦质谱仪double focusing mass spectrometer: c#f@v45
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: cua ( w
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: lPD&Doa
5-7.回旋质谱仪omegatron mass spectrometer: a 2[rY
5-8.飞行时间质谱仪time of flight mass spectrometer: B3<sSe8L0
e$Mvl=NYp\
6.真空计校准 Iw^Q>MrT
6-1.标准真空计reference gauges: xE{slDl
6-2.校准系统system of calibration: -Iis/Xw:
6-3.校准系数K calibration coefficient: F'-XAI
<3
6-4.压缩计法meleod gauge method: TPs
]n7]:
6-5.膨胀法expansion method: iuA_Jr
6-6.流导法flow method: gquvVj1oT
4. 1.真空系统vacuum system s\< @v7A
1-1.真空机组pump system: Q/q>mN"#1
1-2.有油真空机组pump system used oil : '
&3,qT
1-3.无油真空机组oil free pump system I1#MS4;$^
1-4.连续处理真空设备continuous treatment vacuum plant: R9(Yi<CC
1-5.闸门式真空系统vacuum system with an air-lock: qi
">AQpp
1-6.压差真空系统differentially pumped vacuum system: ~(#iGc]7
1-7.进气系统gas admittance system: I9dX\w}
S503b*pM
2.真空系统特性参量 8 C9ny}
2-1.抽气装置的抽速volume flow rate of a pumping unit :
?\kuP ?\
2-2.抽气装置的抽气量throughput of a pumping unit : K { FZ/
2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: NwxDxIIH/)
2-4.真空系统的漏气速率leak throughput of a vacuum system: F+ 7*SImv6
2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: JL>frS3M
2-6.极限压力ultimate pressure: 2m"cK^
2-7.残余压力residual pressure: !
,0
2-8.残余气体谱residual gas spectrum: -$X4RS
2-9.基础压力base pressure: G8 q<)
2-10.工作压力working pressure: e0#t
2-11.粗抽时间roughing time: 80`$F{xcX
2-12.抽气时间pump-down time: N}1yDN
2-13.真空系统时间常数time constant of a vacuum system: /2
hk 9XM
2-14.真空系统进气时间venting time: 5fMlOP_
]1pB7XL
3.真空容器 O"/Sv'|H#
3-1.真空容器;真空室vacuum chamber: )\j
dF-s
3-2.封离真空装置sealed vacuum device: k]^ya?O]p
3-3.真空钟罩vacuum bell jar: .wmqaLd%
3-4.真空容器底板vacuum base plate: `/?'^A%Ik
3-5.真空岐管vacuum manifold: C,A/29R,s
3-6.前级真空容器(贮气罐)backing reservoir: B,&QI&k`~
3-7.真空保护层outer chamber: 7>f"4r_r6<
3-8.真空闸室vacuum air lock: }dHdy{$
3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: hu1ZckIw?
x7Gf):,LK
4.真空封接和真空引入线 `23][V
4-1.永久性真空封接permanent seal : ^ g|VZN
4.2.玻璃分级过渡封接graded seal : z{FFTb^B
4-3.压缩玻璃金属封接compression glass-to-metal seal: >x3lA0m
4-4.匹配式玻璃金属封接matched glass-to-metal seal: $PI9vyS
4-5.陶瓷金属封接ceramic-to-metal seal: 2gZ nrU
4-6.半永久性真空封接semi-permanent seal : gWoUE7.3`
4-7.可拆卸的真空封接demountable joint: OScqf]H
4-8.液体真空封接liquid seal .ANR|G
4-9.熔融金属真空封接molten metal seal: !%D';wQ,/
4-10.研磨面搭接封接ground and lapped seal: 7(oA(l1V
4-11.真空法兰连接vacuum flange connection: X:I2wJDs\
4-12.真空密封垫vacuum-tight gasket: FUlhEH
4-13.真空密封圈ring gasket: {ya.
4-14.真空平密封垫flat gasket: l GBg8/[
4-15.真空引入线feedthrough leadthrough: E4>}O;m0
4-16.真空轴密封shaft seal: &oq0XV.M^
4-17.真空窗vacuum window: .)_2AoT7[
4-18.观察窗viewing window: lixM0
vy 7/
5.真空阀门 1DhC,)+D}q
5-1.真空阀门的特性characteristic of vacuum valves: c{_JPy
⑴.真空阀门的流导conductance of vacuum valves: gua7<z6=eh
⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: zTjie
5-2.真空调节阀regulating valve: $A-X3d;'\/
5-3.微调阀 micro-adjustable valve: @4D{lb"{
5-4.充气阀charge valve: Z/:F)c,x
5-5.进气阀gas admittance valve: 9Li*L&B)
5-6.真空截止阀break valve: \wk;Bo
5-7.前级真空阀backing valve: o5
fV,BJZO
5-8.旁通阀 by-pass valve: vq^';<Wh.
5-9.主真空阀main vacuum valve: ux)*B}/xh
5-10.低真空阀low vacuum valve: } `r.fD
5-11.高真空阀high vacuum valve: jx}'M$TA
5-12.超高真空阀;UHV阀 ultra-high vacuum valve: &