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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 h5&l#>8&  
    --------------------------------------------------- 5tg  
    真空术语 \cdNyVY  
    )eNR4nF  
    1.标准环境条件 standard ambient condition: y88FT#hR|5  
    2.气体的标准状态 standard reference conditions forgases: ^o]ZDc  
    3.压力(压强)p pressure: T^8t<S@`  
    4.帕斯卡Pa pascal: {T Z7>k  
    5.托Torr torr: wAxXK94#3  
    6.标准大气压atm standard atmosphere: f0fN1  
    7.毫巴mbar millibar: z!5^UD8"W  
    8.分压力 partial pressure: vBUx )l  
    9.全压力 total pressure: 1@C0c%  
    10.真空 vacuum: g]R }w@nJ  
    11.真空度 degree of vacuum: >[=q9k  
    12.真空区域 ranges of vacuum: G}Cze Lw  
    13.气体 gas: ow*) 1eo  
    14.非可凝气体 non-condensable gas: , gk49z9  
    15.蒸汽vapor: Y25S:XHk9  
    16.饱和蒸汽压saturation vapor pressure: [K;J#0V+&L  
    17.饱和度degree of saturation: gk\IivPb  
    18.饱和蒸汽saturated vapor: 5Ya TE<G  
    19.未饱和蒸汽unsaturated vapor: DPJ#Y -0  
    20.分子数密度n,m-3 number density of molecules: ~AxA ,  
    21.平均自由程ι、λ,m mean free path: "W;Gv I  
    22.碰撞率ψ collision rate: &IM;Yl  
    23.体积碰撞率χ volume collision rate: z%;b-PpS  
    24.气体量G quantity of gas: 7wsn8_n9  
    25.气体的扩散 diffusion of gas: y~An'+yBa  
    26.扩散系数D diffusion coefficient; diffusivity: j^T.7Zv  
    27.粘滞流 viscous flow: y]aV7 `]  
    28.粘滞系数η viscous factor: ;sCf2TD,_  
    29.泊肖叶流 poiseuille flow: W~+ ] 7<  
    30.中间流 intermediate flow: Ln0rm9FV-  
    31.分子流 molecular flow: zlZ$t{[,  
    32克努曾数 number of knudsen: Rz1&(_Ps  
    33.分子泻流 molecular effusion; effusive flow: wQ qI@  
    34.流逸 transpiration: yf+M  
    35.热流逸 thermal transpiration: *SQ hXTn  
    36.分子流率qN molecular flow rate; molecular flux: ) f9f_^;  
    37.分子流率密度 molecular flow rate density; density of molecular flux: VS<E?JnbFV  
    38.质量流率qm mass flow rare: Zf}]sW$H  
    39.流量qG throughput of gas: ,qV8(`y_  
    40.体积流率qV volume flow rate: k/YEUC5  
    41.摩尔流率qυ molar flow rate: :l8n)O3  
    42.麦克斯韦速度分布 maxwellian velocity distribution: 4bqi&h3  
    43.传输几率Pc transmission probability:  XeDiiI  
    44.分子流导CN,UN molecular conductance: NS @j`6/U  
    45.流导C,U conductance: PI(;t9]b  
    46.固有流导Ci,Ui intrinsic conductance: =4uL1[0'  
    47.流阻W resistance: BpZE  
    48.吸附 sorption: +0\BI<aG  
    49.表面吸附 adsorption: R)d1]k8  
    50.物理吸附physisorption: x2 /\%!mt  
    51.化学吸附 chemisorption: An!1>`8r  
    52.吸收absorption: YU.aZdA&V3  
    53.适应系数α accommodation factor: %KK6}d #  
    54.入射率υ impingement rate: m8;; O  
    55.凝结率condensation rate: v{ Md4 p  
    56.粘着率 sticking rate: ^{nf0)56c  
    57.粘着几率Ps sticking probability: AJt *48H*G  
    58.滞留时间τ residence time: B}8xA}<  
    59.迁移 migration: %719h>$  
    60.解吸 desorption: |u8IQR'B  
    61.去气 degassing: @9g$+_"ZT  
    62.放气 outgassing: J3gJSRT@P  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: Meo(|U  
    64.蒸发率 evaporation rate: ;75K:_  
    65.渗透 permeation: Aq%TZ_m  
    66.渗透率φ permeability: rk:^^r>5Qi  
    67.渗透系数P permeability coefficient Z .VIb|  
    2.   1.真空泵 vacuum pumps Gs;wx_k^  
    1-1.容积真空泵 positive displacement pump: >%5Ld`c:SD  
    ⑴.气镇真空泵 gas ballast vacuum pump: Tt #4dm-  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: ;QkUW<(  
    ⑶.干封真空泵 dry-sealed vacuum pump: , f{<  
    ⑷.往复真空泵 piston vacuum pump: fVx<f.xuW  
    ⑸.液环真空泵 liquid ring vacuum pump: ;rZR9fR  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: Aon 3G  
    ⑺.定片真空泵 rotary piston vacuum pump: p;cNmMm  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: O4J <u-E$  
    ⑼.余摆线真空泵 trochoidal vacuum pump: (CFm6p'RZ  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: z ^t6VFM  
    ⑾.罗茨真空泵 roots vacuum pump: U8Z(=*Z3  
    1-2.动量传输泵 kinetic vacuum pump: N|-M|1w96  
    ⑴.牵引分子泵molecular drag pump: =i[_C>U  
    ⑵.涡轮分子泵turbo molecular pump: _|reo6  
    ⑶.喷射真空泵ejector vacuum pump: wm~35cF(  
    ⑷.液体喷射真空泵liquid jet vacuum pump: jWk1FQte  
    ⑸.气体喷射真空泵gas jet vacuum pump: 5e=9~].7  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : *Z'*^Y1le  
    ⑺.扩散泵diffusion pump : nR'!Ui  
    ⑻.自净化扩散泵self purifying diffusion pump: Q`- JRY-  
    ⑼.分馏扩散泵 fractionating diffusion pump : }-QFMPXhG  
    ⑽.扩散喷射泵diffusion ejector pump : {7swE(N  
    ⑾.离子传输泵ion transfer pump: 6D3hX>K4  
    1-3.捕集真空泵 entrapment vacuum pump: ChzKwYDY  
    ⑴吸附泵adsorption pump: D*.U?  
    ⑵.吸气剂泵 getter pump: __N< B5E  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : 3NU{7,F  
    ⑷.吸气剂离子泵getter ion pump: shlMJa?  
    ⑸.蒸发离子泵 evaporation ion pump: L kYcAY$w  
    ⑹.溅射离子泵sputter ion pump: Nki08qZ[  
    ⑺.低温泵cryopump: B!{vSBq  
    L~9Q7 6w  
    2.真空泵零部件 2$ m#)*\  
    2-1.泵壳 pump case: VwJ A  
    2-2.入口 inlet: %L(;}sJ.  
    2-3.出口outlet: `o|Y5wQ@  
    2-4.旋片(滑片、滑阀)vane; blade : SQ&nQzL  
    2-5.排气阀discharge valve: $>^DkrOd  
    2-6.气镇阀gas ballast valve: q,S[[{("  
    2-7.膨胀室expansion chamber: Xc8r[dX  
    2-8.压缩室compression chamber: LF6PKS  
    2-9.真空泵油 vacuum pump oil: ^#-d^ )f;  
    2-10.泵液 pump fluid: y2Eq-Ie  
    2-11.喷嘴 nozzle: Xa o*h(Q@L  
    2-13.喷嘴扩张率nozzle expansion rate: b,C2(?hg  
    2-14.喷嘴间隙面积 nozzle clearance area : V+`gkWe/  
    2-15.喷嘴间隙nozzle clearance: ZAATV+Z  
    2-16.射流jet: -DAkVFsN  
    2-17.扩散器diffuser: 0F48T<i  
    2-18.扩散器喉部diffuser thoat: =Q+i(UGHi  
    2-19.蒸汽导管vapor tube(pipe;chimney): ctg U  
    2-20.喷嘴组件nozzle assembly: ]k+XL*]'A  
    2-21.下裙skirt: &.W,Hh  
    l-^2>K[  
    3.附件 lL8pIcQW  
    3-1阱trap: H(|n,c  
    ⑴.冷阱 cold trap: /%&Kbd  
    ⑵.吸附阱sorption trap: =n@"lY u[  
    ⑶.离子阱ion trap: v@,n]"  
    ⑷.冷冻升华阱 cryosublimation trap: 2Xw=kwu  
    3-2.挡板baffle: Q)]C~Q  
    3-3.油分离器oil separator: (U_`Q1Jo  
    3-4.油净化器oil purifier: y5@#le M  
    3-5.冷凝器condenser: tL#~U2K  
    -d-vzri  
    4.泵按工作分类 M[eq)a$  
    4-1.主泵main pump: l<3X:)  
    4-2.粗抽泵roughing vacuum pump: /H (55^EMZ  
    4-3.前级真空泵backing vacuum pump: L i g7Ac,  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: 5r2A^<)  
    4-5.维持真空泵holding vacuum pump: y  J|/^qs  
    4-6.高真空泵high vacuum pump: L<D<3g|4  
    4-7.超高真空泵ultra-high vacuum pump: 1`sLbPW  
    4-8.增压真空泵booster vacuum pump: 90"&KDh  
    }>93X0%r  
    5.真空泵特性 bm>N~DC  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: K UD.hK.  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 (r6'q0[  
    5-3.起动压力starting pressure: ^uiQZ%;  
    5-4.前级压力 backing pressure : Yamu"#  
    5-5.临界前级压力 critical backing pressure: % _.kd"  
    5-6.最大前级压力maximum backing pressure: s78MXS?py  
    5-7.最大工作压力maximum working pressure: k3PFCl~e  
    5-8.真空泵的极限压力ultimate pressure of a pump: -s3q(SH  
    5-9.压缩比compression ratio: APgjT' ;P^  
    5-10.何氏系数Ho coefficient: H^3f!\MC;o  
    5-11.抽速系数speed factor: #zf,%IYF  
    5-12.气体的反扩散back-diffusion of gas: Q6 oM$qiM  
    5-13.泵液返流back-streaming of pump fluid: Tv[h2_+E  
    5-14.返流率back-streaming rate aRV .;S  
    5-15.返迁移back-migration: G-6k[-@-v  
    5-16.爆腾bumping: }AW"2<@  
    5-17.水蒸气允许量qm water vapor tolerable load: s' 4O] k`  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: $./&GOus  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: ikd1KF+I  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump eIDrN%3  
    3.   1.一般术语 4j1$1C{  
    1-1.压力计pressure gauge: mOC<a7#  
    1-2.真空计vacuum gauge: @?2ES@G+Ji  
    ⑴.规头(规管)gauge head: u<['9U  
    ⑵.裸规nude gauge : _|Uv7>}J^  
    ⑶.真空计控制单元gauge control unit : tE8aL{<R  
    ⑷.真空计指示单元gauge indicating unit : A.9ZFFz  
    ~dBx<  
    2.真空计一般分类 eF"k"Ckt'  
    2-1.压差式真空计differential vacuum gauge: | LX Vf  
    2-2.绝对真空计 absolute vacuum gauge: ('~}$%C  
    2-3.全压真空计total pressure vacuum gauge: rD;R9b"J  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: 12VSzIm  
    2-5.相对真空计relative vacuum gauge : =OeLF  
    ( 5 BZZ  
    3.真空计特性 ,<(0T$o E[  
    3-1.真空计测量范围pressure range of vacuum gauge: ^~1Z"kAnT  
    3-2.灵敏度系数sensitivity coefficient: F{G.dXZZ<  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): JKz]fgOd$  
    3-5.规管光电流photon current of vacuum gauge head: w{WEYS  
    3-6.等效氮压力equivalent nitrogen pressure : b%QcB[k[WB  
    3-7.X射线极限值 X-ray limit: |{ @BH  
    3-8.逆X射线效应anti X-ray effect: Z8ds`KZM  
    3-9.布利尔斯效应blears effect: *.6m,QqJ(  
    +-!2nk`"a  
    4.全压真空计 `F$lO2#k  
    4-1.液位压力计liquid level manometer: ]]NTvr  
    4-2.弹性元件真空计elastic element vacuum gauge: l4> c  
    4-3.压缩式真空计compression gauge: m%cwhH_B  
    4-4.压力天平pressure balance: S}P rgw/  
    4-5.粘滞性真空计viscosity gauge : hb<cynY  
    4-6.热传导真空计thermal conductivity vacuum gauge : iN9G`qF3!Q  
    4-7.热分子真空计thermo-molecular gauge: 3wMnTT"At  
    4-8.电离真空计ionization vacuum gauge: c2u*<x  
    4-9.放射性电离真空计radioactive ionization gauge: feJl[3@tO  
    4-10.冷阴极电离真空计cold cathode ionization gauge: CB0p2WS_  
    4-11.潘宁真空计penning gauge: sDB,+1"Y$  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: K: |-s4=  
    4-13.放电管指示器discharge tube indicator: \30rF]F`l  
    4-14.热阴极电离真空计hot cathode ionization gauge: FR']Rj  
    4-15.三极管式真空计triode gauge: 6HZVBZhM  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: z?@N+||,.  
    4-17.B-A型电离真空计Bayard-Alpert gauge: A">R-1R  
    4-18.调制型电离真空计modulator gauge: L6"V=^Bq  
    4-19.抑制型电离真空计suppressor gauge: "&/lF[q  
    4-20.分离型电离真空计extractor gauge: -wr_x<7  
    4-21.弯注型电离真空计bent beam gauge: Q*hXFayx  
    4-22.弹道型电离真空计 orbitron gauge : ,h9?o  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: DP-0,Gt&Xj  
    7h.fT`  
    5.分压真空计(分压分析器) +{#L,0t  
    5-1.射频质谱仪radio frequency mass spectrometer: 7GvMKtuSK  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: p<<dj%  
    5-3.单极质谱仪momopole mass spectrometer: ]v]tBVO$  
    5-4.双聚焦质谱仪double focusing mass spectrometer: c#f@v45  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: cua( w  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: lPD&Doa  
    5-7.回旋质谱仪omegatron mass spectrometer: a2[rY  
    5-8.飞行时间质谱仪time of flight mass spectrometer: B3<sSe8L0  
    e$Mvl=NYp\  
    6.真空计校准 Iw^Q>MrT  
    6-1.标准真空计reference gauges: xE{slDl  
    6-2.校准系统system of calibration: -Iis/Xw:  
    6-3.校准系数K calibration coefficient: F'-XAI <3  
    6-4.压缩计法meleod gauge method: TPs ]n7]:  
    6-5.膨胀法expansion method: iuA_ Jr  
    6-6.流导法flow method: gquvVj1oT  
    4.   1.真空系统vacuum system s\< @v7A  
    1-1.真空机组pump system: Q/q>mN"#1  
    1-2.有油真空机组pump system used oil : ' &3,qT  
    1-3.无油真空机组oil free pump system I1#MS4;$^  
    1-4.连续处理真空设备continuous treatment vacuum plant: R9(Yi<CC  
    1-5.闸门式真空系统vacuum system with an air-lock: qi ">AQpp  
    1-6.压差真空系统differentially pumped vacuum system: ~(#iGc]7  
    1-7.进气系统gas admittance system: I9dX\w}  
    S503b*pM  
    2.真空系统特性参量 8 C9ny}  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : ?\kuP ?\  
    2-2.抽气装置的抽气量throughput of a pumping unit : K {  FZ/  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: NwxDxIIH/)  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: F+ 7*SImv6  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: JL>frS3M  
    2-6.极限压力ultimate pressure: 2m"cK^  
    2-7.残余压力residual pressure: ! ,0  
    2-8.残余气体谱residual gas spectrum: -$X4RS  
    2-9.基础压力base pressure: G8 q<)  
    2-10.工作压力working pressure: e0#t  
    2-11.粗抽时间roughing time: 80`$F{xcX  
    2-12.抽气时间pump-down time: N}1yDN  
    2-13.真空系统时间常数time constant of a vacuum system: /2 hk9XM  
    2-14.真空系统进气时间venting time: 5f MlOP_  
    ]1pB7XL  
    3.真空容器 O"/Sv'|H#  
    3-1.真空容器;真空室vacuum chamber: )\j dF-s  
    3-2.封离真空装置sealed vacuum device: k]^ya?O]p  
    3-3.真空钟罩vacuum bell jar: .wmqaLd%  
    3-4.真空容器底板vacuum base plate: `/?'^A%Ik  
    3-5.真空岐管vacuum manifold: C,A/29R,s  
    3-6.前级真空容器(贮气罐)backing reservoir: B,&QI&k`~  
    3-7.真空保护层outer chamber: 7>f"4r_r6<  
    3-8.真空闸室vacuum air lock: }dHdy{$  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: hu1ZckIw?  
    x7Gf):,LK  
    4.真空封接和真空引入线 `23][V  
    4-1.永久性真空封接permanent seal : ^ g|VZN  
    4.2.玻璃分级过渡封接graded seal : z{FFTb^B  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: >x3lA0m  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: $PI9vyS  
    4-5.陶瓷金属封接ceramic-to-metal seal: 2gZ nrU  
    4-6.半永久性真空封接semi-permanent seal : gWoUE7.3`  
    4-7.可拆卸的真空封接demountable joint: OScqf]H  
    4-8.液体真空封接liquid seal .ANR|G  
    4-9.熔融金属真空封接molten metal seal: !%D';wQ,/  
    4-10.研磨面搭接封接ground and lapped seal: 7(oA(l1V  
    4-11.真空法兰连接vacuum flange connection: X:I2wJDs\  
    4-12.真空密封垫vacuum-tight gasket: FUlhEH  
    4-13.真空密封圈ring gasket: {y a .  
    4-14.真空平密封垫flat gasket: lG Bg8/[  
    4-15.真空引入线feedthrough leadthrough: E4>}O;m0  
    4-16.真空轴密封shaft seal: &oq 0XV.M^  
    4-17.真空窗vacuum window: .)_2AoT7[  
    4-18.观察窗viewing window: lixM0  
    vy7/  
    5.真空阀门 1DhC,)+D}q  
    5-1.真空阀门的特性characteristic of vacuum valves: c{_JPy  
    ⑴.真空阀门的流导conductance of vacuum valves: gua7<z6=eh  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: zTj ie  
    5-2.真空调节阀regulating valve: $A-X3d;'\/  
    5-3.微调阀 micro-adjustable valve: @4D{lb"{  
    5-4.充气阀charge valve: Z/:F)c,x  
    5-5.进气阀gas admittance valve: 9Li*L&B)  
    5-6.真空截止阀break valve: \wk;Bo  
    5-7.前级真空阀backing valve: o5 fV,BJZO  
    5-8.旁通阀 by-pass valve: vq^';<Wh.  
    5-9.主真空阀main vacuum valve: ux)*B}/xh  
    5-10.低真空阀low vacuum valve: } `r.fD  
    5-11.高真空阀high vacuum valve: jx}'M$TA  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: &Cv  
    5-13.手动阀manually operated valve: N0Y4m_dm*  
    5-14.气动阀pneumatically operated valve: <Q/)SN6_E  
    5-15.电磁阀electromagnetically operated valve: BWy-R6br  
    5-16.电动阀valve with electrically motorized operation: ,LN^Zx*  
    5-17.挡板阀baffle valve: d+,!p8Q  
    5-18.翻板阀flap valve: Vub6wb<G[  
    5-19.插板阀gate valve: 9\<q =p~  
    5-20.蝶阀butterfly valve: }O>1tauI  
    <j>;5!4!}  
    6.真空管路 & ]] l0B  
    6-1.粗抽管路roughing line: P1T {5u!T  
    6-2.前级真空管路backing line: Wm`*IBWA  
    6-3.旁通管路;By-Pass管路 by-pass line: T|wz%P<J  
    6-4.抽气封口接头pumping stem: h=gtuaR4  
    6-5.真空限流件limiting conductance:       *bf 5A9  
    6-6.过滤器filter: GRbbU#/=G  
    5.   1.一般术语 v N\[2r%S  
    1-1真空镀膜vacuum coating: l^nvwm`f#:  
    1-2基片substrate: #gO[di0WhC  
    1-3试验基片testing substrate: k|?[EWIi^  
    1-4镀膜材料coating material: ?%UiW7}j';  
    1-5蒸发材料evaporation material: wCg7JW#  
    1-6溅射材料sputtering material: 3PZ(Kn<  
    1-7膜层材料(膜层材质)film material: k[ zyR  
    1-8蒸发速率evaporation rate: qvB{vU  
    1-9溅射速率sputtering rate: &Wcz~Gx3Q  
    1-10沉积速率deposition rate: su%-b\8K  
    1-11镀膜角度coating angle: 9!Q ZuZY  
    h7q{i|5  
    2.工艺 xS tsw5d  
    2-1真空蒸膜vacuum evaporation coating: n|&=6hiI  
    (1).同时蒸发simultaneous evaporation: K+!e1 '  
    (2).蒸发场蒸发evaporation field evaporation: g"5Kth  
    (3).反应性真空蒸发reactive vacuum evaporation: {+hABusq  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: <I34@;R c  
    (5).直接加热的蒸发direct heating evaporation: ub-e!{  
    (6).感应加热蒸发induced heating evaporation: 452kE@=49  
    (7).电子束蒸发electron beam evaporation: QrK%DN  
    (8).激光束蒸发laser beam evaporation: OxGfLeP.R!  
    (9).间接加热的蒸发indirect heating evaporation: $Y_S`#c@i  
    (10).闪蒸flash evaportion: `x/i1^/_@  
    2-2真空溅射vacuum sputtering: \DS*G7.A+&  
    (1).反应性真空溅射 reactive vacuum sputtering: Od~uYOL/B  
    (2).偏压溅射bias sputtering: V<S6 a  
    (3).直流二级溅射direct current diode sputtering: 4~h 0/H"  
    (4).非对称性交流溅射asymmtric alternate current sputtering: ~S Bb2*ID  
    (5).高频二极溅射high frequency diode sputtering: cYK:Y!|`F  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: g^+p7G  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: #J&3Zds  
    (8).离子束溅射ion beam sputtering: @ewaj!  
    (9).辉光放电清洗glow discharge cleaning: NL$z4m0  
    2-3物理气相沉积PVD physical vapor deposition: EA>.SSs!  
    2-4化学气相沉积CVD chemical vapor deposition: \^" Vqx  
    2-5磁控溅射magnetron sputtering: c.Sd~k:3  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: VfpT5W<  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: c.Hw K\IU  
    2-8电弧离子镀arc discharge deposition: j AOy3c  
    ~k"b"+2  
    3.专用部件 hQ<7k'V  
    3-1镀膜室coating chamber: tUx H 6IS  
    3-2蒸发器装置evaporator device: \z.bORy  
    3-3蒸发器evaporator: w=;>  
    3-4直接加热式蒸发器evaporator by direct heat: uc@4fn  
    3-5间接加热式蒸发器evaporator by indirect heat: s=(q#Z  
    3-7溅射装置sputtering device: [?I<$f"  
    3-8靶target: ; >H1A  
    3-10时控挡板timing shutter: -#9et30  
    3-11掩膜mask: m8{8r>6*  
    3-12基片支架substrate holder: I*.nwV<  
    3-13夹紧装置clamp: TS|Bz2(  
    3-14换向装置reversing device: F ><_gIT  
    3-15基片加热装置substrate heating device: we`BqZV  
    3-16基片冷却装置substrate colding device: LJ~#0Zu?  
    V/2NIh  
    4.真空镀膜设备 D tZ?sG  
    4-1真空镀膜设备vacuum coating plant: 2sIt~ Gn  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: :VP4:J^  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: (@XQ]S}L  
    4-2连续镀膜设备continuous coating plant: @,.D]43  
    4-3半连续镀膜设备semi- continuous coating plant kh.P)h'9  
    6.   1.漏孔 W.[!Q`  
    1-1漏孔leaks: u*2?Gky  
    1-2通道漏孔channel leak: S:j{R^$k  
    1-3薄膜漏孔membrane leak: Vq]ixag2^  
    1-4分子漏孔molecular leak: 2_HIn  
    1-5粘滞漏孔vixcous leak: ; &6 {c  
    1-6校准漏孔calibrated leak: BZQ}c<Nl  
    1-7标准漏孔reference leak : K9Mz4K_  
    1-8虚漏virtual leak: .c}+kHv  
    1-9漏率leak rate: GB Yy^wjU  
    1-10标准空气漏率standard air leak rate: N!~]D[D  
    1-11等值标准空气漏率equivalent standard air leak rate: SgxrU&::  
    1-12探索(示漏)气体: dX/7n=  
    ZtO$kK%q;  
    2.本底 kVWcf-f  
    2-1本底background: tlp,HxlP  
    2-2探索气体本底search gas background : !Ea >tQ|  
    2-3漂移drift:  4t(/F`  
    2-4噪声noise: 46NuT]6/4  
    [yN+(^ i  
    3.检漏仪 H; \C7w|  
    3-1检漏仪leak detector: Mw RLv,&"  
    3-2高频火花检漏仪H.F. spark leak detector: gQ0,KYmI3_  
    3-3卤素检漏仪halide leak detector: rz_W]/G-P  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: wX}p6yyN  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: 1Mp-)-e  
    Sk 7R;A  
    4.检漏 H@@ 4n%MK  
    4-1气泡检漏leak detection by bubbles: 1-E6ACq  
    4-2氨检漏leak detection by ammonia: _:Xmq&<W  
    4-3升压检漏leak detection of rise pressure: b/a\{  
    4-4放射性同位素检漏radioactive isotope leak detection: n?cC]k;P~  
    4-5荧光检漏fluorescence leak detection b)'CP Cu*  
    7.   1.一般术语 .%n_{ab1  
    1-1真空干燥vacuum drying: [pTdeg;QE  
    1-2冷冻干燥freeze drying : Hj r'C?[  
    1-3物料material: R]%"YQ V  
    1-4待干燥物料material to be dried: d*{Cv2A.  
    1-5干燥物料dried material : FhY#3-jH  
    1-6湿气moisture;humidity: &,G2<2_b  
    1-7自由湿气free moisture: qI7KWUR  
    1-8结合湿气bound moisture: {p1`[R&n#  
    1-9分湿气partial moisture: @ywtL8"1~  
    1-10含湿量moisture content: }_KzF~  
    1-11初始含湿量initial moisture content: F hUi{`  
    1-12最终含湿量final residual moisture: /xJD/"Y3&  
    1-13湿度degree of moisture ,degree of humidity : a~ jb%i_  
    1-14干燥物质dry matter : #d$z W4ur2  
    1-15干燥物质含量content of dry matter: G?$o+Y'F  
    L>IP!.J]?  
    2.干燥工艺 (n7xYGfYS  
    2-1干燥阶段stages of drying : N 5Om~D  
    (1).预干燥preliminary dry: EF:ec9 .  
    (2).一次干燥(广义)primary drying(in general): ;]1t| td8  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): <rgK}&q  
    (4).二次干燥secondary drying: 6 agG*x  
    2-2.(1).接触干燥contact drying: *d=}HO/  
    (2).辐射干燥 drying by radiation : z[J=WI  
    (3).微波干燥microwave drying: -&7? !<f  
    (4).气相干燥vapor phase drying: VI4mEq,V  
    (5).静态干燥static drying: i kfJ!f  
    (6).动态干燥dynamic drying: 0=HB!{ @  
    2-3干燥时间drying time: kl:/PM^  
    2-4停留时间length of stay(in the drying chamber): G 0pq'7B  
    2-5循环时间cycle time: ]dGH i \  
    2-6干燥率 dessication ratio : *Lrrl  
    2-7去湿速率mass flow rate of humidity: A@< !'  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: =JE<oVP8  
    2-9干燥速度 drying speed : ZPw4S2yw3.  
    2-10干燥过程drying process: wnd #J `  
    2-11加热温度heating temperature: .B~yI3D`M  
    2-12干燥温度temperature of the material being dried : 1W >/4l  
    2-13干燥损失loss of material during the drying process : K>.}>)0  
    2-14飞尘lift off (particles): QDYuJ&!h  
    2-15堆层厚度thickness of the material: YQ:$m5ai  
    @uyQH c,V  
    3.冷冻干燥 BN]o!Y  
    3-1冷冻freezing: ZVH 9je  
    (1).静态冷冻static freezing: gD)M7`4  
    (2).动态冷冻dynamic freezing: E8kD#tL  
    (3).离心冷冻centrifugal freezing: p]S'pzh  
    (4).滚动冷冻shell freezing: F>{bVPh VA  
    (5).旋转冷冻spin-freezing: Qc*p+N+$  
    (6).真空旋转冷冻vacuum spin-freezing: Te}gmt+#%  
    (7).喷雾冷冻spray freezing: DDmC3  
    (8).气流冷冻air blast freezing: ( ww4(  
    3-2冷冻速率rate of freezing: 2i6=g<   
    3-3冷冻物料frozen material: vT{(7m!Ra  
    3-4冰核ice core: >(H:eRKq  
    3-5干燥物料外壳envelope of dried matter: r&R~a9+)  
    3-6升华表面sublimation front: Cu%BU}(  
    3-7融化位置freezer burn: ]g$ky.;  
    v0) %S  
    4.真空干燥设备;真空冷冻干燥设备 N:3=G`Ws  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: }Jh.+k|_  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: l,Q`;v5|  
    4-3加热表面heating surface: U>!TM##1QD  
    4-4物品装载面shelf : .a2R2~35  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber):  j7_,V?5z  
    4-6单位面积干燥器处理能力throughput per shelf area: JzywSQ  
    4-7冰冷凝器ice condenser: z@IG"D  
    4-8冰冷凝器的负载load of the ice condenser: KF *F  
    4-9冰冷凝器的额定负载rated load of the ice condenser PYi<iSr  
    8.   1.一般术语 >yn?@ve@  
    1-1试样sample : ,Zie2I?q  
    (1).表面层surface layer: )OQm,5F1  
    (2).真实表面true surface: f 1SKOq  
    (3).有效表面积effective surface area: E^n!h06~G  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: 5KB Z-,  
    (5).表面粒子密度surface particle density: %6lGRq{/?  
    (6).单分子层monolayer: 'g<{l&u  
    (7).表面单分子层粒子密度monolayer density: vh2/d.MO  
    (8).覆盖系数coverage ratio: uu]C;wl  
    1-2激发excitation: nl2Lqu1  
    (1).一次粒子primary particle: !Usmm8!K  
    (2).一次粒子通量primary particle flux: (&*Bl\YoX  
    (3).一次粒子通量密度density of primary particle flux: IW n G@!  
    (4).一次粒子负荷primary particle load: tpzWi W/  
    (5).一次粒子积分负荷integral load of primary particle: )2EvZn  
    (6).一次粒子的入射能量energy of the incident primary particle: 4 w*m]D{  
    (7).激发体积excited volume: mgjcA5z  
    (8).激发面积excited area: .DwiIr'  
    (9).激发深度excited death: i88 5T '  
    (10).二次粒子secondary particles: `@\FpV[|P  
    (11).二次粒子通量secondary particle flux: PQ!'<  
    (12).二次粒子发射能energy of the emitted secondary particles: =1>G * ,  
    (13).发射体积emitting volume: u7J:ipyiq2  
    (14).发射面积emitting area: ]D@aMC$#  
    (15).发射深度emitting depth: !|VtI$I>x  
    (16).信息深度information depth: A-vYy1,'  
    (17).平均信息深度mean information depth: \0}bOHqEH  
    1-3入射角angle of incidence: #%GBopv  
    1-4发射角angle of emission: KpG'E  
    1-5观测角observation: e 0$m<5  
    1-6分析表面积analyzed surface area: &9v8  
    1-7产额 yield : K ..Pn 17t  
    1-8表面层微小损伤分析minimum damage surface analysis: \g]rOYW  
    1-9表面层无损伤分析non-destructive surface analysis: ~<IQe-Q 5  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : @CR<&^s5V  
    1-11可观测面积observable area: 9gK1Gx:  
    1-12可观测立体角observable solid angle : zBI2cB8;P  
    1-13接受立体角;观测立体角angle of acceptance: 1A;,"8kBd  
    1-14角分辨能力angular resolving power: 8=f+`e  
    1-15发光度luminosity: Xq"9TYf$  
    1-16二次粒子探测比detection ratio of secondary particles: Y._ACQG3  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: yIpgZ0:h  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: [G+@[9hn%  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: h+q#|N  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: 7]5+%[Dg!  
    1-21本底压力base pressure: kSge4?&  
    1-22工作压力working pressure: OI/]Y7D[Oq  
    4u2_xbT  
    2.分析方法 XkW@"pf&Fh  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: vcy(!r  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : (Ww SisC~  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: o2YHT \P n  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: 01aw+o  
    2-3离子散射表面分析ion scattering spectroscopy: ZS3T1 <z  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: ept:<!4  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: S._h->5f  
    2-6离子散射谱仪ion scattering spectrometer: %0815 5M  
    2-7俄歇效应Auger process: ]=|iO~WN  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: `"~X1;  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: `yhc,5M  
    2-10光电子谱术photoelectron spectroscopy : f~jd N~  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: y </i1qM  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: 2mx }bj8  
    2-11光电子谱仪photoelectron spectrometer: 6QPbmO]z  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: @[/!e`]+  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: O9N%dir  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): Xn!=/<TIVz  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
    离线douyongming
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊