SYNOPSYS光学设计软件中的光线控制语法如下: @/z\p7e
AANT :os8"
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf I/O3OD
END `6Bx8CZ'I
J:Cr.K`
\SWTP1
name: 1Bj.MQ^
YA YC YP XA XC XP ZA OPD OPP ZZ HH 5,"c1[`-
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG RM;a]g*
DSLOPE UNI FLUX PL VOEV[?>ss
HFREQ HEFFIC HSFREQ ERROR xfYKUOp/
OPL ... jsss jsps 1'~Xn
4
f
*~#I5s\s!
例如: 2u3Kyn
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 Cj-s
>q eDb0
'`>%RZ]
Aa
~W,