SYNOPSYS光学设计软件中的光线控制语法如下: ocwE_dR{
AANT Z^*NnL.'
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf Z["BgEJ
END yc[(lq.^n
@UO}W_0ZD
mL$f[
name: ;gUXvx~~r
YA YC YP XA XC XP ZA OPD OPP ZZ HH 'l|R5
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG =-Nsc1&
DSLOPE UNI FLUX PL ei|cD[
NY
HFREQ HEFFIC HSFREQ ERROR r1;e 0\?`
OPL ... jsss jsps +;dXDZ2
};r|}v !~_
例如: 'B`#:tX^N
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 (i]Z|@|)
@o&Ytd;i
dMV=jJ%Y
AWT"Y4Ie