SYNOPSYS光学设计软件中的光线控制语法如下: 6ng g*kE<
AANT Dy@NgHe
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf # |[@Due
END 'p]qN;`'O$
FWTl:LqFO
/loNOutw
name: %y+j~]^:
YA YC YP XA XC XP ZA OPD OPP ZZ HH %'O(Y{$Y.
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG &2pM3re/f
DSLOPE UNI FLUX PL ovFfTP<3V
HFREQ HEFFIC HSFREQ ERROR S@($c'
OPL ... jsss jsps b"bj|qF~E
>[=`{B
例如: 7z&u92dJI
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 "ZW*O{
O0YGjS|d
iO`f{?b
CZ}tQx5ga