SYNOPSYS光学设计软件中的光线控制语法如下: liG~y|
AANT Mcb<[~m
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf '%Dg{ zL
END $K=z
^'Zh;WjI7
ro]L}oE+
name: m/N(%oMWB=
YA YC YP XA XC XP ZA OPD OPP ZZ HH Na;t#,
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG ^V,@=QL3U
DSLOPE UNI FLUX PL Kz^ hQd
HFREQ HEFFIC HSFREQ ERROR D4\(:kF\Hg
OPL ... jsss jsps "GB UQ}
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例如: 8 )`5P\
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 F\P!NSFZV
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B)d@RAk
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