SYNOPSYS光学设计软件中的光线控制语法如下: z* ^_)Z
AANT SIBtmm1W
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf J\+0[~~
END dBYmiF!+
/rK}?U
'GNK "XA^
name: [%q@]\U$s
YA YC YP XA XC XP ZA OPD OPP ZZ HH +O8%Hm
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG .YhA@8nc~l
DSLOPE UNI FLUX PL |]jb& M
HFREQ HEFFIC HSFREQ ERROR $Q &lSVQ
OPL ... jsss jsps \hTm)-FP
VJeu8ZJ.
例如: ) pzy
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 ;D3C>7y
XW[j!`nlk
GzhYY"iif#
Px4)>/ z,