SYNOPSYS光学设计软件中的光线控制语法如下： PJLSDIeN
AANT ]Sg4 >tp
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf pTPWToKh
END XqMJe'%r
y`!~JL*
rkh+$*t@i7
name: q"4{GCavN
YA YC YP XA XC XP ZA OPD OPP ZZ HH 4%
)I[-sH
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG h-<2N)>!
DSLOPE UNI FLUX PL ;HRIB)wF
HFREQ HEFFIC HSFREQ ERROR 'Y{ fah
OPL ... jsss jsps HM ;9%rtO
).e_iE[&
例如: 'H- : >'k
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 :r* skV|
+c!v%uX
5SKj% %B2,
)e`$' y@L$
