SYNOPSYS光学设计软件中的光线控制语法如下: C*/d%eHD
AANT PLw;9^<
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf (4>k+ H
END 9%$4Ux*q
y%cg
9H" u\t|?
name: #QXB2x<*
YA YC YP XA XC XP ZA OPD OPP ZZ HH g&\A1H
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG -wW%+wH
DSLOPE UNI FLUX PL n>+M4Zb
HFREQ HEFFIC HSFREQ ERROR )<UNiC
OPL ... jsss jsps RoJ{
ou@cs
}Rt?p8p
例如: L/F!Y%=;[
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 ]}w~fjq
Hb#8?{
DdN{=}A
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