SYNOPSYS光学设计软件中的光线控制语法如下: j,Eo/f+j5
AANT %V%*0S|U
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf /EZF5_`bT
END G&I\Za;
K@)Hm\*
_?x*F?5=
name: f R$E*Jd
YA YC YP XA XC XP ZA OPD OPP ZZ HH .J6Oiv.E
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG 6}qp;mR
E]
DSLOPE UNI FLUX PL S zR7:U
HFREQ HEFFIC HSFREQ ERROR D1}Bn2BM$
OPL ... jsss jsps f"\G"2C
jQxv`H
例如: $!h21
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 O8%+5l`T!
l}:&}
2MS1<VKZ@
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