SYNOPSYS光学设计软件中的光线控制语法如下: [LwmzmV+F
AANT x Z3b)j2D
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf *x^W`i
END `@8QQB
";jj`
;QT.|.t6
name: -}l iG
YA YC YP XA XC XP ZA OPD OPP ZZ HH
5jj<sj!S
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG 80X #V
DSLOPE UNI FLUX PL !n<vN@V*3d
HFREQ HEFFIC HSFREQ ERROR V~V_+
OPL ... jsss jsps P4{8pO]B
_z:7Dj#
例如: d"
T">Og)
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 3JB?G>\!
[25[c><:w"
/8S g<
g]^@bxdg