XUV光谱仪

发布:谈谈光电子 2014-11-02 18:37 阅读:1221
XUV光谱仪是新型的像差校正平场入射X射线光谱仪,光谱范围可涵盖1-80nm.模块化设计,可以满足不同的实验条件和环境。 r NU,(htS  
    单光栅标准配置)可覆盖5-80nm测量范围 hz Vpv,|G  
技术参数
dulW!&*No  
波长范围
?P<&8eY  
5-20
8PXleAn  
10-60
oVoTnGNM6  
25-80
~#I1!y~`  
光源距离(m)
U(W#H|  
zq4,%$y8|  
0.4-0.6
7*'_&0   
0.5-1.5
3tnYK&  
平场尺寸(mm)
"uGJ\  
25.4
BRoi`.b:  
50
Se"\PxBR  
50
C1p |.L?m  
色散(nm/mm)
p]!,Bo ZL  
0.5-0.7
7X|&:V.s|  
0.7-1.1
,>{4*PM(  
0.9-1.3
^%go\ C ;  
光谱分辨率(nm)
p*Q"<@n  
0.06
.a=M@; p  
0.09
1(q!.lPc  
0.11
2(\>PN-  
0.02(CCD探测器)
4LBjqv,P  
升级波长范围
ywq{9)vq  
可拓展至1-5nm(搭配该范围光栅)
9!2KpuWji  
探测器选择
lG\lu'<C  
X-Ray 相机,MCP探测器,fiber taper系统
UY}lJHp0  
光栅台
VrF]X#\)  
电控
jq.@<<j|$  
工作环境
]d$)G4X 1  
<10-6mbar
YLPiK  
操作性
akd~Z  
极易安装使用,用户自己即可安装使用
v{JCEb&wN  
ocdXzk`  
技术优势介绍: 3XL0Pm  
- Direct imaging of the source / Superior signal strength Aba6/  
In contrast to conventional devices our XUV spectrometer does not "ajZ&{Z  
require a narrow entrance aperture but rather images the harmonic source #\`6ZHW  
directly onto the detector. Thus 80% or more of the incoming beam can be OE4 2{?)  
used for measurement. Please see +"' h?7'C  
http://www.hoerlein-partner.com/#!services/cihc for a sketch drawing. <LBMth  
This configuration typically collects 15 to 25 times more light than '?3Hy|}  
standard versions, resulting in a signal-to-noise figure improved by the 4RTEXoXs  
same ratio. IH>+P]+3"3  
In some experiments, this improved signal strength is the crucial step =@3Qsd  
for realizing a measurement at all. lV]l`$XI  
tQ`tHe  
- Flat-field imaging technology w?Q@"^IL  
Our instruments are based on high quality aberration-corrected SvI  
flat-field gratings. In contrast to conventional gratings these focus ^gb2=gWZ<  
all wavelengths onto a plane rather than a circle. This allows for ;y HA.}  
positioning the entire detector in the focal plane of the grating for 7F+f6(hB  
superior spectral resolution. I9Z8]Q+2"  
`uzRHbJ`  
- Compactness / Modularity R?l>Vr  
The spectrometer is very compact and can be bolted directly to a vacuum G4g },p!  
chamber. It is capable of carrying its own weight, no table required. <#`<Ys3b*!  
There are no externally moving parts. i&_sbQ^  
Through its modular design, our spectrometer can be adapted to a number nH[@EL  
of configurations (source distance, spectral range, detectors, vacuum "B+M5B0Z  
pumping, etc). This makes it highly flexible for varying requirements QF%@MK0zC  
and experiments. i~K~Czmok+  
.' X$SF`  
- Robust against misalignment g{<3*,  
The compact design of the spectrometer makes it inherently insensitive |W#^L`!G  
against mechanical and environmental disturbances (vibrations, oxGOn('  
acoustics, etc). No externally moving parts and closed-loop grating Ma{|+\Q.Z  
actuators with absolute position monitoring add to the robustness and pdtK3Pf  
allow for monitoring of the grating alignment at all times. Q@d X2  
In addition, the concept of a spectrometer without entrance slit also &3u* zV$  
makes the instrument less sensitive to misalignment. Under typical jriliEz;f  
operating conditions a misalignment of the beam in the dispersion #}k^g:l1  
direction on the entrance of the spectrometer by 500um would lead to a *RuUf  
signal reduction by more than 20% in an instrument with entrance slit [k1N`K(M  
while it is less than 10% for our design. m4 4aK qw)  
8(g:i#~  
- Customization n'M}6XUw  
The adaptability of our XUV spectrometer makes it possible to highly snj+-'4T  
custom-fit the device to requirements. Thus we offer to customize every z&-3H/   
spectrometer to exactly match the desired research application. This 0Q>Yoa 11  
includes e.g. interfacing to experimental chambers, adaption of the 0|4XV{\qT$  
source distance, integration of customer-supplied detectors, I}?fy\1A&  
user-defined filter mounts, non-magnetic instruments, special mounting T[<9Ty'^  
situations, etc. u 4)i7  
lW>bX C  
典型客户: o ue;$8  
1) 苏黎世联邦理工学院 ZYL]|/"J9  
2) The Institute of Electronic Structure and Laser of the Foundation for Research and Technology-Hellas (IESL-FORTH) RYvS,hf 6z  
3) MPQ noL<pkks~R  
4) Los Alamos 6.K)uQgjmv  
5) Max Planck Institute *,Y+3yM  
上海达灿光电科技有限公司 q l8CgL  
021-60450828
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