资源里面，介绍光刻的比较少， 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 "[GIW+ui
Contents mL6/NSSz
Preface .................................................................................................... G0]q(.sOy
Chapter 1 Introducing Optical Lithography zy$hDy0
Chapter 2 Exposure Systems %$]u6GKabi
Chapter 3 Image Formation sSD(mO<(
Chapter 4 The Metrics of Lithography VIi| :k
Chapter 5 Components in Optical Lithography b55|JWfC`
Chapter 6 Processing and Optimization 7BI0g@$Nn]
Chapter 7 Immersion Lithography C(,s_Ks
Chapter 8 Outlook and Successors to Optical Lithography
