资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 Kl{>jr8B3
Contents mmXm\]r>4
Preface .................................................................................................... R6-n IY,
Chapter 1 Introducing Optical Lithography xNK1h-t
Chapter 2 Exposure Systems =&wmWy
Chapter 3 Image Formation {c?JuV4q?
Chapter 4 The Metrics of Lithography Ny- [9S-<
Chapter 5 Components in Optical Lithography !$;a[Te
Chapter 6 Processing and Optimization I04jjr:<
Chapter 7 Immersion Lithography RyJ 1mAC
Chapter 8 Outlook and Successors to Optical Lithography