资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 BfcpB)N&.K
Contents =Z($n:m=*
Preface .................................................................................................... Fk(+S:{yQ
Chapter 1 Introducing Optical Lithography sI7<rI.t){
Chapter 2 Exposure Systems lhyWlO
Chapter 3 Image Formation RkrZncBgV<
Chapter 4 The Metrics of Lithography {NS6y \,
Chapter 5 Components in Optical Lithography 4^KeA".
Chapter 6 Processing and Optimization iEtnwSt
Chapter 7 Immersion Lithography ?3x7_=4t@
Chapter 8 Outlook and Successors to Optical Lithography