资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 IV)W|/.
Contents L{0OMyUA
Preface .................................................................................................... :*Ggz|
Chapter 1 Introducing Optical Lithography Lr\ B
Chapter 2 Exposure Systems MW[ 4^
Chapter 3 Image Formation 4b(irDT3F
Chapter 4 The Metrics of Lithography So 6cm|{
Chapter 5 Components in Optical Lithography Jx9%8Ek
Chapter 6 Processing and Optimization =]xk-MY"|R
Chapter 7 Immersion Lithography @"0N @gU
Chapter 8 Outlook and Successors to Optical Lithography