Optical Lithography - Here is Why - B J Lin 2010 [复制链接]

资源里面，介绍光刻的比较少， 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 I|>IV  
Contents rvnm*e,  
Preface .................................................................................................... (lit^v,9  
Chapter 1 Introducing Optical Lithography }gX4dv B  
Chapter 2 Exposure Systems ;yZY2)L  
Chapter 3 Image Formation N;m62N  
Chapter 4 The Metrics of Lithography u |$GOSD  
Chapter 5 Components in Optical Lithography J(XK%e[8  
Chapter 6 Processing and Optimization ,0>_(5  
Chapter 7 Immersion Lithography 4HXNu,T'  
Chapter 8 Outlook and Successors to Optical Lithography

继续〉〉〉

继续。。。。。

,tired >>>

>>>>>>.......

最后一个，发完睡觉le，

好东西啊。 >b\{y}[  
辛苦了

謝謝你讓大家長見識

光刻是个好东西啊，有挑战，不过像天文望远镜一样，很难啊

光刻是个好东西啊，有挑战