资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 0`=>/Wr39
Contents f!H~BMA+a
Preface .................................................................................................... J>o%6D
Chapter 1 Introducing Optical Lithography _"4u?C#
Chapter 2 Exposure Systems F]fBFDk
Chapter 3 Image Formation 0Z11V9Jk
Chapter 4 The Metrics of Lithography *_qLLJg
Chapter 5 Components in Optical Lithography Z?@oe-mz
Chapter 6 Processing and Optimization M15jwR!:M
Chapter 7 Immersion Lithography i(hL6DLD
Chapter 8 Outlook and Successors to Optical Lithography