资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 L6Wt3U`l
Contents R9rj/Co
Preface .................................................................................................... ?ULo&P[
Chapter 1 Introducing Optical Lithography YXurYwV
Chapter 2 Exposure Systems Mb1t:Xf^g
Chapter 3 Image Formation ORXm&z)
Chapter 4 The Metrics of Lithography c#IYFTz
Chapter 5 Components in Optical Lithography so$(_W3E,
Chapter 6 Processing and Optimization 0Uk@\[1ox
Chapter 7 Immersion Lithography SUKxkc(
Chapter 8 Outlook and Successors to Optical Lithography