资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 T$1(6<:+.
Contents ;^cMP1SH
Preface .................................................................................................... j<A<\K
Chapter 1 Introducing Optical Lithography SXx4^X
Chapter 2 Exposure Systems k_`YVsEYP
Chapter 3 Image Formation bK k7w#y
Chapter 4 The Metrics of Lithography {hVc,\A
Chapter 5 Components in Optical Lithography X3HJ3F;==
Chapter 6 Processing and Optimization &(h@]F!
Chapter 7 Immersion Lithography emI F{oP
Chapter 8 Outlook and Successors to Optical Lithography