资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 jZeY^T)f"
Contents $E3-</ f
Preface .................................................................................................... zvV<0 Z
Chapter 1 Introducing Optical Lithography fyPpzA0
Chapter 2 Exposure Systems =gS?atbX
Chapter 3 Image Formation Ig75bZz
Chapter 4 The Metrics of Lithography u- PAi5&n
Chapter 5 Components in Optical Lithography R06L4,/b
Chapter 6 Processing and Optimization J$
Chapter 7 Immersion Lithography z+I'N4*^
Chapter 8 Outlook and Successors to Optical Lithography