资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 8NY$Iw
Contents M9mC\Iz[
Preface .................................................................................................... {a>a?fVU
Chapter 1 Introducing Optical Lithography R7'a/
Chapter 2 Exposure Systems f"^G\
Chapter 3 Image Formation R <kh3T
Chapter 4 The Metrics of Lithography Z<7FF}i
Chapter 5 Components in Optical Lithography $i#
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Chapter 6 Processing and Optimization jVh I`F{n
Chapter 7 Immersion Lithography AGwFD
Chapter 8 Outlook and Successors to Optical Lithography