断层面计测系统

Layer Profiling System f}"eN/T  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. T[)!7@4r  
Features 8toOdh  
Super depty measurement &3Yj2
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A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. l cHf\~  
Vevy weak interference fringe patterns can be capured C\;l)h_{  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. 2.I|8d[  
100 magnification interference is achieved }oA>0Nw$K  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. >h)kbsSU0z  
NSIMAGIK compatible system gT0yI;g]  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. eG1V:%3  
Specifications of stage g(9*!g  
Item    RSY-150    RSY-300 )ds]fvMW]N  
Compressed Air    ≧0.5Mpa z?.9)T9_  
    Tube: Internal diameter 4mm, External diameter 6mm '(FC  
Power Saurce    Single-phase 100V 4KVA z4Zm%  
Clean Room Response    Response to Class 1000 Yi?bY  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) r'jUB^E  
Stage Unit Weight    About 200kg    About 300kg 8T9s:/%  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H) 4NW!{Vw ,  
Control Rack Unit Weight    About 180kg 9Y'pT.Gyb  
X-Y Stage     P*BRebL:  
X Valid Stroke    ±75mm    ±150mm 6ICW>#fI`  
Y Valid Stroke    ±75mm    ±150mm QMz=e  
Maximum Speed    10mm/sec l[c '%M|N  
Actuator    Ball screw, Open-loop control JR#4{P@A  
Stage Resolution    1μm/step J)Y`G4l2@  
Repeatability    ±1μm m9A%Z bQ^  
Z axis     Rlk3AWl2u  
Valid Stroke    ±50mm D$K'Qk  
Actuator    Grand screw, Open-loop control #WSqh +  
Z Axis Resolution    ±1μm/step (Half-step) OyVP_Yx,V  
Jog-Dial    100μm/Revolution #jW-&a  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps i7-~"g  
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日本神津精机中国总代理： }LS8q  
广州市嘉铭工业器材有限公司     fMg9h9U  
地  址：广州市广州大道中明月一路20号明月阁2403室 pQBn8H|Y  
联系人：MR.Huang   MSN:htj@kmischina.com (Fon!_$:  
电  话：+86 020-87392866-211  传真：87361189 /]3[|  
E-mail:htj@kmischina.com gAWi&  
http:www.kmischina.com