断层面计测系统

Layer Profiling System h8jB=e, H  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. {OCJ(^8i  
Features 0cFn{q'u  
Super depty measurement 1[s0Lz  
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. E MQ4yK  
Vevy weak interference fringe patterns can be capured AWT"Y4Ie  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. pv&^D,H,  
100 magnification interference is achieved U-g9C.  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. `
|EH[W&y  
NSIMAGIK compatible system \(fq8AL?  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. ZdH1nX(Yh3  
Specifications of stage .,M;hu
Rg  
Item    RSY-150    RSY-300 iP#=:HZu;  
Compressed Air    ≧0.5Mpa $P nLG]X  
    Tube: Internal diameter 4mm, External diameter 6mm )xt4Wk/  
Power Saurce    Single-phase 100V 4KVA =EpJZt  
Clean Room Response    Response to Class 1000 YB5dnS"n  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) ^A!$i$NON  
Stage Unit Weight    About 200kg    About 300kg 9Ejyg*  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H) [l*;E f,  
Control Rack Unit Weight    About 180kg lhO2'#]i  
X-Y Stage     ~O03Sit-  
X Valid Stroke    ±75mm    ±150mm 4pPI'd&/7  
Y Valid Stroke    ±75mm    ±150mm 3?`"  
Maximum Speed    10mm/sec 1bSD,;$sQ  
Actuator    Ball screw, Open-loop control cAEokP  
Stage Resolution    1μm/step K9|7dvzC:  
Repeatability    ±1μm j
g_n7  
Z axis     $Q/Ya@o  
Valid Stroke    ±50mm hO( RZ'{  
Actuator    Grand screw, Open-loop control KOSQQf o  
Z Axis Resolution    ±1μm/step (Half-step) Fo}7hab  
Jog-Dial    100μm/Revolution q3S+Y9L  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps !#}7{  
Nfn(Xn*J-  
日本神津精机中国总代理： ?KP}#>Ba@  
广州市嘉铭工业器材有限公司     W^3;F1
  
地  址：广州市广州大道中明月一路20号明月阁2403室 F]_cbM{8/  
联系人：MR.Huang   MSN:htj@kmischina.com i9m*g*"2  
电  话：+86 020-87392866-211  传真：87361189 Tlodn7%",  
E-mail:htj@kmischina.com yI)~]K r  
http:www.kmischina.com