断层面计测系统

Layer Profiling System ZD$W>'m{F  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. mT]+w
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Features !v/j*'L<M}  
Super depty measurement Qu 7#^%=  
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. Iw07P2  
Vevy weak interference fringe patterns can be capured B#o/3  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. 3K{XT),  
100 magnification interference is achieved 0wFa7PyG?  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. >Q(+H-w  
NSIMAGIK compatible system ?(C(9vO  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. xXa* d  
Specifications of stage B: '}S
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Item    RSY-150    RSY-300 Z`_`^ \"  
Compressed Air    ≧0.5Mpa l7{]jKJue  
    Tube: Internal diameter 4mm, External diameter 6mm w@K4u{|  
Power Saurce    Single-phase 100V 4KVA w)Rtt 9  
Clean Room Response    Response to Class 1000 ,s=jtK  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) It5U=PU  
Stage Unit Weight    About 200kg    About 300kg `zRE$O  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H) D)kh"cK*1  
Control Rack Unit Weight    About 180kg tVAWc$3T  
X-Y Stage     t>f61<27eB  
X Valid Stroke    ±75mm    ±150mm A$6T)  
Y Valid Stroke    ±75mm    ±150mm {"^LUw8fd  
Maximum Speed    10mm/sec ZQL4<fy'E  
Actuator    Ball screw, Open-loop control uq
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Stage Resolution    1μm/step y15 MWZ  
Repeatability    ±1μm K;n2mXYGM  
Z axis     ^Vbx9UN/  
Valid Stroke    ±50mm 7m4gGkX#r  
Actuator    Grand screw, Open-loop control E1|>O  
Z Axis Resolution    ±1μm/step (Half-step) 1q?b?.  
Jog-Dial    100μm/Revolution R04%;p:k#  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps g431+O0K1  
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日本神津精机中国总代理： 2&e2/KEWR  
广州市嘉铭工业器材有限公司     2yB@)?V/  
地  址：广州市广州大道中明月一路20号明月阁2403室 zC@ ziH>{]  
联系人：MR.Huang   MSN:htj@kmischina.com rNi]|)-ET  
电  话：+86 020-87392866-211  传真：87361189 >e g8zN  
E-mail:htj@kmischina.com /J0Y
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http:www.kmischina.com