断层面计测系统

Layer Profiling System )Fm  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. v"$; aJ  
Features PL8akA#  
Super depty measurement s}?98?tYB  
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. mZM5aTQ3  
Vevy weak interference fringe patterns can be capured 5.\!k8a  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. E-"Jgq\aC  
100 magnification interference is achieved _t;w n7p  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. m CdkYN#  
NSIMAGIK compatible system }%XNB1/`  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. t"BpaA^gO  
Specifications of stage UoKBcarm  
Item    RSY-150    RSY-300 >eRbasshEI  
Compressed Air    ≧0.5Mpa 41C=O@9m  
    Tube: Internal diameter 4mm, External diameter 6mm *i$+i  
Power Saurce    Single-phase 100V 4KVA /?J_7Lg  
Clean Room Response    Response to Class 1000 '*~{1gG `  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) ^d2g"L   
Stage Unit Weight    About 200kg    About 300kg
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Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H) GzR;`,_O/  
Control Rack Unit Weight    About 180kg 9td(MZ%i~N  
X-Y Stage     >2C;5ba  
X Valid Stroke    ±75mm    ±150mm h2BD?y  
Y Valid Stroke    ±75mm    ±150mm BM3)`40[]  
Maximum Speed    10mm/sec i&bttSRNV  
Actuator    Ball screw, Open-loop control z+\>e~U6J}  
Stage Resolution    1μm/step 49kY]z|"w  
Repeatability    ±1μm hnY^Z_v!  
Z axis     Y*AHwc<w`  
Valid Stroke    ±50mm A!^,QRkRN  
Actuator    Grand screw, Open-loop control 5?I]\Tb  
Z Axis Resolution    ±1μm/step (Half-step) 8?)Da&+f  
Jog-Dial    100μm/Revolution -u9{R\S  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps XSD7~X/:  
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日本神津精机中国总代理： '$U"RP^(  
广州市嘉铭工业器材有限公司     4Fz^[L}[  
地  址：广州市广州大道中明月一路20号明月阁2403室 :#|77b0  
联系人：MR.Huang   MSN:htj@kmischina.com |mM
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电  话：+86 020-87392866-211  传真：87361189 t)v#y!Ci"  
E-mail:htj@kmischina.com $qEJO=v  
http:www.kmischina.com