美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications Y[f,ia  
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目录： qAUaF;{  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations .>k=A|3G  
                for Nanostructure Fabrication Using Scanning N1YgYL  
                Probe Microscopy 1 ,"@w>WL<9  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo V)2"l"Kt  
Chapter 2 Atomic Force Microscope Lithography 33 zTkFX67)  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 6eD(dZ  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, ?$<SCN=  
                Sensing, and Modification 65 hbVE; 9  
                C. Santschi, J. Polesel-Maris, J. Brugger, (d54C(")  
                and H. Heinzelmann <Cu'!h_nL  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered :0B |<~lX  
                Nano-Scale Structures and Devices 127 >-VWm A  
               R. Mehta, J. Lund, and B. A. Parviz Mx^y>\X)v  
Chapter 5 Nanofabrication Based on Self-Assembled 2y^U
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               Alumina Templates 159 63.( j P1;  
               S. Sen and N. A. Kouklin .JNcY]V#  
Chapter 6 Nanowire Assembly and Integration 187 'n>K^rA  
                Z. Gu and D. H. Gracias vB Sm=M  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 ~q{\;  
                 L. Tong and E. Mazur %'$f ?y  
Chapter 8 Extreme Ultraviolet Lithography 235 \^yXc*C  
                 H. Kinoshita o(:{InpV%A  
Chapter 9 Electron Projection Lithography 285
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                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata T:c7@^=  
Chapter 10 Electron Beam Direct Writing 341 ,
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                   K. Yamazaki '-`O. 4u  
Chapter 11 Electron Beam Induced Deposition 377 /d[Mss  
                   K. Mitsuishi "Lb fF  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 |B 9t-  
                   P. A. Crozier and C. W. Hagen K-Re"zsz  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 NK8<= n%"  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi 7kdeYr~<1  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces ,cLH
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                  by Unconventional Lithographic Methods 471 7@JjjV  
                  R. C. Salvarezza and O. Azzaroni bdCykG-  
Chapter 15 Alternative Nanofabrication Approaches 0%/,>IR>r  
f                 or Non-CMOS Applications 499 B@d1xjp)']  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei E\ tL
 
Chapter 16 Nanofabrication of Nanoelectromechanical Systems %yeu"  
                  (NEMS): Emerging Techniques 543 \e_IFISC  
                  K. L. Ekinci and J. Brugger @]*[c})/  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享