[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms Zj},VB*T  
pymT-  
High-precision prisms, having maximum angle tolerances Yd,*LYd2EL  
of 1 to 3 arcsec, find increasing application in optical metrology. MLR3A s  
Reported interferometric techniques for measuring nc31X  
the wedge angles of such prisms achieve a precision of up ,mRN;|N  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques n,0}K+}  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric y/PEm)=Tt  
methods have made use of goniometers,2 "ex? #qD&  
spectrometers,3 master prisms,4,5 and collimators.6 However, UyJ5}fBJ  
in the literature there are few reported methods for J>+Dv?Ni$  
measuring the pyramidal error, and the majority rely on P#yS]F/  
visual observation,2,7,8 by which it is only possible to measure TX*P*-'  
pyramidal errors to the order of 1 arcmin ~Ref. 8!.
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In the new arrangement presented here, one can measure 6IvLr+I  
the prism angle and the pyramidal error separately or in P_qxw-s  
combination. This is possible because the measurements jeJGxfii  
are made simultaneously but with different techniques.