Measuring the angles and pyramidal error of high-precision prisms 5-X(K 'Q
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High-precision prisms, having maximum angle tolerances E?P: !V=_
of 1 to 3 arcsec, find increasing application in optical metrology. 0_-NE4SM/
Reported interferometric techniques for measuring nHi6$ }
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the wedge angles of such prisms achieve a precision of up 3P2L phW
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques wpPCkfPyL
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric c1Ta!p{%
methods have made use of goniometers,2 t12 xPtN1
spectrometers,3 master prisms,4,5 and collimators.6 However, *6%r2l 'kZ
in the literature there are few reported methods for f)K1j{TZ
measuring the pyramidal error, and the majority rely on 'gwh:8Xc
visual observation,2,7,8 by which it is only possible to measure <swY o<?J#
pyramidal errors to the order of 1 arcmin ~Ref. 8!. 5 %Q [X
In the new arrangement presented here, one can measure /WKp\r( Hp
the prism angle and the pyramidal error separately or in !NFP=m1
combination. This is possible because the measurements u9%)_Q!14
are made simultaneously but with different techniques.
