[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms bMWL^*I  
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High-precision prisms, having maximum angle tolerances Ut"~I)S{LT  
of 1 to 3 arcsec, find increasing application in optical metrology. CZE!rpl  
Reported interferometric techniques for measuring H(f~B<7q  
the wedge angles of such prisms achieve a precision of up xRum q  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques #H]b Xr  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric 5:[<pY!s#  
methods have made use of goniometers,2 ki/xo^Y2<  
spectrometers,3 master prisms,4,5 and collimators.6 However, V/%tFd1  
in the literature there are few reported methods for 00s&<EM  
measuring the pyramidal error, and the majority rely on 2de[ yz  
visual observation,2,7,8 by which it is only possible to measure #'"zyidu  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. GJlkEWs  
In the new arrangement presented here, one can measure BN!N_r  
the prism angle and the pyramidal error separately or in L0ZgxG3:g  
combination. This is possible because the measurements M#v#3:&5  
are made simultaneously but with different techniques.