Measuring the angles and pyramidal error of high-precision prisms [K"&1h<>
R![4|FR
High-precision prisms, having maximum angle tolerances 8 J;\Z
of 1 to 3 arcsec, find increasing application in optical metrology. qt4^e7o
Reported interferometric techniques for measuring K)9+3(?
the wedge angles of such prisms achieve a precision of up 7q'T,'[
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques vJ0Zv>
n-
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric L~e{Vv8UR
methods have made use of goniometers,2 Fps:6~gD
spectrometers,3 master prisms,4,5 and collimators.6 However, FP9FE `x
in the literature there are few reported methods for XcM.<Dn3
measuring the pyramidal error, and the majority rely on ::2(pgH
visual observation,2,7,8 by which it is only possible to measure >PONu]^
pyramidal errors to the order of 1 arcmin ~Ref. 8!. |oV_7%mlu
In the new arrangement presented here, one can measure $gysy!2}.
the prism angle and the pyramidal error separately or in #w&N)
c>
combination. This is possible because the measurements =JfSg'7
are made simultaneously but with different techniques.