Measuring the angles and pyramidal error of high-precision prisms yH.Z%*=xQa
r1.OLn?C
High-precision prisms, having maximum angle tolerances d>x(Bj6
of 1 to 3 arcsec, find increasing application in optical metrology. EP8R[Q0 _"
Reported interferometric techniques for measuring ='fN
xabB
the wedge angles of such prisms achieve a precision of up NzbHg p
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques +$B#] ,
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric ~uEI} z
methods have made use of goniometers,2 +aRHMH
spectrometers,3 master prisms,4,5 and collimators.6 However, r[AqA
in the literature there are few reported methods for i{k v$ir!
measuring the pyramidal error, and the majority rely on QE`u~
visual observation,2,7,8 by which it is only possible to measure %?!TqJT?{
pyramidal errors to the order of 1 arcmin ~Ref. 8!. +=(@=PJ6
In the new arrangement presented here, one can measure {-L}YX"Bh
the prism angle and the pyramidal error separately or in %(g!,!l)
combination. This is possible because the measurements MMf_
are made simultaneously but with different techniques.
