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    [论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2024-05-14
    Measuring the angles and pyramidal error of high-precision prisms ?i.]|#{Z  
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    High-precision prisms, having maximum angle tolerances z0;+.E!  
    of 1 to 3 arcsec, find increasing application in optical metrology. MZt~ Abt  
    Reported interferometric techniques for measuring a@&^t(1  
    the wedge angles of such prisms achieve a precision of up rYnjQr2a  
    to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques K-$gTV  
    have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric OzFA>FK0f;  
    methods have made use of goniometers,2 ~E2xIhV  
    spectrometers,3 master prisms,4,5 and collimators.6 However, )V!dmVQq{g  
    in the literature there are few reported methods for ( }DCy23  
    measuring the pyramidal error, and the majority rely on O -a`A.  
    visual observation,2,7,8 by which it is only possible to measure S[o_$@|  
    pyramidal errors to the order of 1 arcmin ~Ref. 8!. P:z5/??2S  
    In the new arrangement presented here, one can measure EUv xil  
    the prism angle and the pyramidal error separately or in b|i94y(  
    combination. This is possible because the measurements * \@u,[,  
    are made simultaneously but with different techniques.
    描述:Measuring the angles and pyramidal error of high-precision prisms
    附件: Measuring the angles and pyramidal error of high-precision prisms.pdf.zip (140 K) 下载次数:11
     
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