[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms rr^?9M*{V  
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High-precision prisms, having maximum angle tolerances *nx$r[Mqj  
of 1 to 3 arcsec, find increasing application in optical metrology. %Xe 74C"  
Reported interferometric techniques for measuring W4p4[&c|  
the wedge angles of such prisms achieve a precision of up V: n\skM  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques i5#4@ 4aC  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric QX$3"AZ~  
methods have made use of goniometers,2 [9d4
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spectrometers,3 master prisms,4,5 and collimators.6 However, ?)O!(=6%'  
in the literature there are few reported methods for *X\J[$!  
measuring the pyramidal error, and the majority rely on $!7$0WbC  
visual observation,2,7,8 by which it is only possible to measure LhC
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pyramidal errors to the order of 1 arcmin ~Ref. 8!. ]XjL""EbC  
In the new arrangement presented here, one can measure 8 -YC#&  
the prism angle and the pyramidal error separately or in 9?tG?b0  
combination. This is possible because the measurements 9GtVcucN  
are made simultaneously but with different techniques.