[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms h&4f9HhS=  
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High-precision prisms, having maximum angle tolerances s s*% 3<  
of 1 to 3 arcsec, find increasing application in optical metrology. g, %xGQ4+  
Reported interferometric techniques for measuring VY9|8g/  
the wedge angles of such prisms achieve a precision of up pwvcH3l/r  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques URFp3qE  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric Wqu][Wa[Z
 
methods have made use of goniometers,2 NHCdf*  
spectrometers,3 master prisms,4,5 and collimators.6 However, -^sbf.  
in the literature there are few reported methods for =tv,B3Mo  
measuring the pyramidal error, and the majority rely on AShnCL8uR  
visual observation,2,7,8 by which it is only possible to measure Vp'Zm:
 
pyramidal errors to the order of 1 arcmin ~Ref. 8!. 8C{mV^cn~  
In the new arrangement presented here, one can measure DGwN*>X  
the prism angle and the pyramidal error separately or in z$>_c"D  
combination. This is possible because the measurements x{X(Y]*1S  
are made simultaneously but with different techniques.