[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms gPzp/I  
$3D#U^7i  
High-precision prisms, having maximum angle tolerances <Z^qBM  
of 1 to 3 arcsec, find increasing application in optical metrology. fw+ VR.#2H  
Reported interferometric techniques for measuring 9G"-~C"e3  
the wedge angles of such prisms achieve a precision of up (043G[H'.  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques 19#A7  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric 2#g4R  
methods have made use of goniometers,2 (D <o=Q  
spectrometers,3 master prisms,4,5 and collimators.6 However, 7UA|G2Zr  
in the literature there are few reported methods for gt{$G|bi  
measuring the pyramidal error, and the majority rely on #7yy7Y5  
visual observation,2,7,8 by which it is only possible to measure hD!9[Gb  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. \jGvom.  
In the new arrangement presented here, one can measure 
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the prism angle and the pyramidal error separately or in 8bP4  
combination. This is possible because the measurements 2i_X{!0}  
are made simultaneously but with different techniques.