[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms  $%jV%k  
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High-precision prisms, having maximum angle tolerances J/mLB7^
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of 1 to 3 arcsec, find increasing application in optical metrology. }3+(A`9h f  
Reported interferometric techniques for measuring -wO`o<  
the wedge angles of such prisms achieve a precision of up ;zGGT^Dn  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques gKPV*  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric ='mqfGRi>  
methods have made use of goniometers,2 s0\X%U("  
spectrometers,3 master prisms,4,5 and collimators.6 However, zgO
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in the literature there are few reported methods for X4o8  
measuring the pyramidal error, and the majority rely on Xc@4(Nyp  
visual observation,2,7,8 by which it is only possible to measure <}e<Zf!  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. B (BWdrG  
In the new arrangement presented here, one can measure osnDW aN  
the prism angle and the pyramidal error separately or in h;B'#$_  
combination. This is possible because the measurements Q8P;AN_JS  
are made simultaneously but with different techniques.