SYNOPSYS中光栅表面输入格式: QNXoAx%I
SN GRATING {X/Y} L/MM ORDER CWAV HIN VNUM !pC`vZG"
其中,X-衍射发生在X-Z平面;Y-衍射发生在Y-Z平面。L/MM-给出了光栅刻线数;ORDER-衍射级次;CWAV-波长;HIN-基底折射率; xm5?C>vu(
VNUM-相应的阿贝数; {jv+ JL"5
5V~vND*
s
例子: JTObyAoW
RLE Q}cti/
ID GRATING_REAL FLAT l-Ha*>gX[j
WAVL .6000000 .5000000 .4000000 )CHXfO w
APS 1 ^Ku]8/ga
POLARIZATION LINEAR Y S}cR+d1}h
UNITS MM dkY JO!
OBB 0.000000 10.00000 1.00000 0.00000 0.00000 0.00000 1.00000 $xK\$kw\
0 AIR y4r?M8]"r
1 GRA Y 500.0000 -1 0.500000 1.500000 50.000000 HAo=t
2 COATING PERF >?_}NZ,y
2 CV 0.0000000000000 TH 1.00000000E-06 [ LQOP3f
2 N1 1.51628919 N2 1.52140818 N3 1.53084089 ;Qi!~VsP;
2 CTE 0.710000E-05 cucmn*o?
2 GTB S 'BK7 ' ? JTTl;
3 COATING PERF 1GIBqs~-
3 CV 0.0000000000000 TH 100.00000000 AIR ^>>9?
3 AIR F|VKrH.
4 CV 0.0000000000000 TH 0.00000000 AIR )wXE\$
4 AIR NpCQ4K
END +FAxqCkA
h?$J;xn
PER 0 0 0 0 0 J"@X>n
PLOT `'*4B_.
PUPIL 2 1 5 ExN$J
RED bBV03_*
TRACE 1 0 0 5 {'[VL;k
PUPIL 2 1 5 +0j{$MPZ
LIME 4[&&E7]EX
TRACE 2 0 0 5 X
y`2ux+>/
PUPIL 2 1 5 Kv9FqrDj
BLUE &