Abstract C3-l(N1O{
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1.
U, )Ng nd
-------------------------------------------------------------------------------- 6,M>' s,N
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) VpMpZ9oM<
Correspondence Name and Address: SUGHRUE MION, PLLC * JGm
2100 PENNSYLVANIA AVENUE, N.W. b_ Sh#d&
SUITE 800 >JS\H6
WASHINGTON n"Ec %n
DC ba|x?kz
20037 K,tmh1
US %*OKhrM
4?M= ?K0
Assignee Name and Adress: CARL ZEISS SMT AG mU:C{<Z
\*6%o0c
Serial No.: 931051 N'Va&"&73>
Series Code: 10 rgILOtk[
Filed: September 1, 2004 q hVDC
]g3&gw
U.S. Current Class: 359/649 oju/%ieh
U.S. Class at Publication: 359/649 <oV
_EZ
Intern'l Class: G02B 003/00; G02B 009/00 U6FM`w<
hbR;zV|US
-------------------------------------------------------------------------------- }aXc,;Ps
ttLC hL
Foreign Application Data TJ7on.;
Svn|vH
-------------------------------------------------------------------------------- ?yddr`?W
Date Code Application Number .r SeJZzuj
Sep 12, 2003 WO 03/075049 A2 B$g!4C
`g
Feb 6, 2003 WO PCT/EP03/01147 *r p@`W5
Sep 12, 2003 WO 03/075096 A2 bj(U?$
>!A&@1[M
-------------------------------------------------------------------------------- Q`g0g)3w
m\U@L+L
Claims Ive tQ+
&GwBxJ
-------------------------------------------------------------------------------- 2|tZ xlt-
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. _]1dm)%
ywmx6q4MFL
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. G hLgV
n k1(/~`
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
