Abstract ~t9Mh^gij
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. F aWl,} ]
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) WEVl9]b'e+
Correspondence Name and Address: SUGHRUE MION, PLLC X')S;KW
2100 PENNSYLVANIA AVENUE, N.W. 8_iHVc;<
SUITE 800 S OI)/u
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Assignee Name and Adress: CARL ZEISS SMT AG #HDesen
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Serial No.: 931051 0Bu*g LY
Series Code: 10 )G4rJ~#@
Filed: September 1, 2004 bm6hZA |
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U.S. Current Class: 359/649 (j=DD6 fC
U.S. Class at Publication: 359/649 .Qk{5=l6P
Intern'l Class: G02B 003/00; G02B 009/00 O0zi@2m?B
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Foreign Application Data ?'f^X$aS
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Date Code Application Number .~22^k
Sep 12, 2003 WO 03/075049 A2 ^yD"d =z
Feb 6, 2003 WO PCT/EP03/01147 r\bq[9dX>
Sep 12, 2003 WO 03/075096 A2 S[.5n]
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Claims IrUi
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. s+N ^PX3
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. @92gb$xT
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
