切换到宽版
  • 广告投放
  • 稿件投递
  • 繁體中文
    • 11127阅读
    • 13回复

    [分享]Refractive projection objective(折射投影物镜)--版主继续革命!! [复制链接]

    上一主题 下一主题
    离线yazhuge
     
    发帖
    1442
    光币
    578767635
    光券
    0
    只看楼主 倒序阅读 楼主  发表于: 2005-10-21
    Abstract G!IJ#|D:~  
    Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. kihO~<  
    --------------------------------------------------------------------------------  ~WG#Zci-  
    Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) K-*q3oh G  
    Correspondence Name and Address:     SUGHRUE MION, PLLC !'EE8Tp~F  
      2100 PENNSYLVANIA AVENUE, N.W. tmI2BBv  
      SUITE 800 (Dx]!FFz  
      WASHINGTON G|Y9F|.!  
      DC +EBoFeeIG  
      20037 Px))O&w{  
      US hkL[hD  
     ,M&[c|  
    Assignee Name and Adress: CARL ZEISS SMT AG oLp:Z=  
    ?(CMm%(8  
    Serial No.: 931051 ,HdFE|  
    Series Code: 10 #wZ:E,R  
    Filed: September 1, 2004 ]gQ4qu5  
    ]n:)W.|`R  
    U.S. Current Class: 359/649 DHV#PLbN$  
    U.S. Class at Publication: 359/649 +}@HtjM  
    Intern'l Class: G02B 003/00; G02B 009/00 cHMS[.=;  
    Y@Kp'+t(!  
    -------------------------------------------------------------------------------- z_p/.kQ'5  
    vWwnC)5  
    Foreign Application Data u F T&r|  
    !%?X% @9  
    -------------------------------------------------------------------------------- &@xixbg  
    Date Code Application Number 4yH=dl4=44  
    Sep 12, 2003 WO 03/075049 A2 =,~h]_\_  
    Feb 6, 2003 WO PCT/EP03/01147 _azg 0.)  
    Sep 12, 2003 WO 03/075096 A2 6 /Apdn1[  
    \S@;>A<J  
    -------------------------------------------------------------------------------- ( {H5k''  
    !ldb_*)h  
    Claims 5B? >.4R  
    xh\{ dUPA  
    -------------------------------------------------------------------------------- tw]RH(g+#  
    1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. z1ltc{~Z  
    PQsqi;=)  
    2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. 0=;jGh}|i  
    @U%I 6 t  
    3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
    附件: Refractive projection objective.txt (100 K) 下载次数:60
     
    分享到
    离线一条龙
    发帖
    261
    光币
    4679
    光券
    0
    只看该作者 1楼 发表于: 2005-10-21
    再谢啦斑竹!
    离线xiaoniu
    发帖
    403
    光币
    1387
    光券
    0
    只看该作者 2楼 发表于: 2005-10-22
    呵呵,谢谢楼主分享!!!!
    离线y00102
    发帖
    483
    光币
    9
    光券
    0
    只看该作者 3楼 发表于: 2005-10-23
    look look   what `s it ?
    离线focus
    发帖
    962
    光币
    3
    光券
    0
    只看该作者 4楼 发表于: 2005-10-24
    look look   what `s it ?
    离线skyfeather
    发帖
    59
    光币
    67
    光券
    0
    只看该作者 5楼 发表于: 2005-10-24
    Re:【2005-10-21】Refractive projection objectiv
    非常感谢斑竹哦!
    离线shark
    发帖
    486
    光币
    166
    光券
    0
    只看该作者 6楼 发表于: 2005-10-24
    have a look
    离线ASAP
    发帖
    8
    光币
    60
    光券
    0
    只看该作者 7楼 发表于: 2005-10-24
    呵呵,谢谢楼主分享!!!!
    离线flwing
    发帖
    38
    光币
    77
    光券
    0
    只看该作者 8楼 发表于: 2005-10-25
    看看,谢谢楼主!!!
    发帖
    37
    光币
    38
    光券
    0
    只看该作者 9楼 发表于: 2005-10-25
    厉害!!!!顶!!!!