Abstract )8E[xBaO
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. /$d #9Uv
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) 4(? Z1S
Correspondence Name and Address: SUGHRUE MION, PLLC /H*[~b
2100 PENNSYLVANIA AVENUE, N.W. kq*IC&y
SUITE 800 soO fk!b
WASHINGTON .U#o N_D
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20037 *|OUd7P:hU
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Assignee Name and Adress: CARL ZEISS SMT AG ,f~)CXNT?
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Serial No.: 931051 W 'PW;.,
Series Code: 10 [:/mjO K
Filed: September 1, 2004
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U.S. Current Class: 359/649 +^q- v-
U.S. Class at Publication: 359/649 *QT7\ht 3
Intern'l Class: G02B 003/00; G02B 009/00 8iPA^b|sz{
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Foreign Application Data )_k U,RvZ
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Date Code Application Number WM0-F@_
Sep 12, 2003 WO 03/075049 A2 lQL /I[}
Feb 6, 2003 WO PCT/EP03/01147 H on,-<
Sep 12, 2003 WO 03/075096 A2 7yal T.
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Claims ),@m
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. }- @h H(
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. WS+uK b^<
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
