Abstract * <l9 d
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. <xaB$}R
-------------------------------------------------------------------------------- 'U{6LSaCb
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) G1S:hw%rp
Correspondence Name and Address: SUGHRUE MION, PLLC M^?=!!US^
2100 PENNSYLVANIA AVENUE, N.W. &Tn7
SUITE 800 MtXd}/
WASHINGTON Mb\[` 4z
DC uTIl} N
20037 {3kI~s
US A,f%0
eQR
idGhWV'
Assignee Name and Adress: CARL ZEISS SMT AG H\RuYCn2G
!k0t
(.
Serial No.: 931051 hZDv5]V:0
Series Code: 10 -^<`v{}Dn
Filed: September 1, 2004 w*qmC<D$A
SO}en[( )O
U.S. Current Class: 359/649 bl-t>aO*.V
U.S. Class at Publication: 359/649 xO XCCf/
Intern'l Class: G02B 003/00; G02B 009/00 F<^93a9
fH[:S9@
-------------------------------------------------------------------------------- tX .{ +yyU
Jm {~H%
Foreign Application Data :rX/I LAr
K}YOs.
-------------------------------------------------------------------------------- -E>se8 %"
Date Code Application Number Bg0 aLU)[
Sep 12, 2003 WO 03/075049 A2 $C ?G7Vs
Feb 6, 2003 WO PCT/EP03/01147 ~zA{ =| I2
Sep 12, 2003 WO 03/075096 A2 a FrVP
C@q&0\HN
-------------------------------------------------------------------------------- Co^a $K
&m>t xzo
Claims ;3k6_ub
uH?lj&
-------------------------------------------------------------------------------- DU:
sQS4
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. D:Y `{ {
|
QI-gw
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. !B\[Q$
)#n>))
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
