Abstract 6UAw9
'X8
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. Ie'iAY
-------------------------------------------------------------------------------- ~NZ}@J{00_
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) l ^;=0UR_
Correspondence Name and Address: SUGHRUE MION, PLLC uYMH5Om+i
2100 PENNSYLVANIA AVENUE, N.W. $x;(C[
SUITE 800 F:'>zB]-}
WASHINGTON +{[E Ow
DC Bt(U,nFB
20037 -MuKeCg i
US Azag *M?
mJa8;X!r6
Assignee Name and Adress: CARL ZEISS SMT AG U~_G *0
ggHz-o NY
Serial No.: 931051 3im2
`n
Series Code: 10 " fWm{;
Filed: September 1, 2004 0 uhIJc'2
;`rz ]7,*
U.S. Current Class: 359/649 iuHs.k<z
U.S. Class at Publication: 359/649 2hFOw I
Intern'l Class: G02B 003/00; G02B 009/00 y0\ = F
D~r{(u~Ya
-------------------------------------------------------------------------------- !y7w~UVs
Z8q *XpUH
Foreign Application Data v0,&wdi
Q vm[2mb
-------------------------------------------------------------------------------- H;Cv] -
Date Code Application Number w_9[y
Sep 12, 2003 WO 03/075049 A2 u !9bhL`
Feb 6, 2003 WO PCT/EP03/01147 7!('+x(>
Sep 12, 2003 WO 03/075096 A2 eZ;DNZK av
#}aBRKZ f6
-------------------------------------------------------------------------------- A}z1~Z+
K?X
6@u|h
Claims @2R+?2 j
X DAwE
-------------------------------------------------------------------------------- SS"Z>talw
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. Ufv0Xj
D}L 4uz?
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. ;7bY>zc(w
n_1,-(t
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
