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    [分享]Refractive projection objective(折射投影物镜)--版主继续革命!! [复制链接]

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    离线yazhuge
     
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    只看楼主 倒序阅读 楼主  发表于: 2005-10-21
    Abstract 7;}3{z  
    Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. k?/vy9  
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    Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) ?)[zLnxc&  
    Correspondence Name and Address:     SUGHRUE MION, PLLC IO!1|JMr6  
      2100 PENNSYLVANIA AVENUE, N.W. *Iwk47J ;a  
      SUITE 800 Dyk[u g5  
      WASHINGTON $#7J\=GZ+  
      DC }\939Y  
      20037 hHc^ZA  
      US 2WPF{y%/  
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    Assignee Name and Adress: CARL ZEISS SMT AG 45)ogg2  
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    Serial No.: 931051 @nx}6?p\,  
    Series Code: 10 l!;_lH8W$  
    Filed: September 1, 2004 K Z!N{.Jk  
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    U.S. Current Class: 359/649 (~7m"?  
    U.S. Class at Publication: 359/649 (9KDtr*(2i  
    Intern'l Class: G02B 003/00; G02B 009/00 RO%tuU,-  
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    Foreign Application Data Gf H*,1x  
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    Date Code Application Number \,l.p_<  
    Sep 12, 2003 WO 03/075049 A2 [+%d3+27  
    Feb 6, 2003 WO PCT/EP03/01147 UH 47e  
    Sep 12, 2003 WO 03/075096 A2 AB2mt:^  
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    Claims :dY.D|j*  
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    1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. Ha)3i{OM  
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    2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. U] V3DDN  
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    3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
    附件: Refractive projection objective.txt (100 K) 下载次数:60
     
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    离线一条龙
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    只看该作者 1楼 发表于: 2005-10-21
    再谢啦斑竹!
    离线xiaoniu
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    只看该作者 2楼 发表于: 2005-10-22
    呵呵,谢谢楼主分享!!!!
    离线y00102
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    只看该作者 3楼 发表于: 2005-10-23
    look look   what `s it ?
    离线focus
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    只看该作者 4楼 发表于: 2005-10-24
    look look   what `s it ?
    离线skyfeather
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    只看该作者 5楼 发表于: 2005-10-24
    Re:【2005-10-21】Refractive projection objectiv
    非常感谢斑竹哦!
    离线shark
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    只看该作者 6楼 发表于: 2005-10-24
    have a look
    离线ASAP
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    只看该作者 7楼 发表于: 2005-10-24
    呵呵,谢谢楼主分享!!!!
    离线flwing
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    只看该作者 8楼 发表于: 2005-10-25
    看看,谢谢楼主!!!
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    只看该作者 9楼 发表于: 2005-10-25
    厉害!!!!顶!!!!