Abstract .|
4P
:r
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. SK }sf9gTv
-------------------------------------------------------------------------------- TTz=*t+D
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) S hI1f
Correspondence Name and Address: SUGHRUE MION, PLLC R| ?Q&F_$
2100 PENNSYLVANIA AVENUE, N.W. $0_K&_5w~
SUITE 800 MJXnAIG?2
WASHINGTON >Ku4Il+36
DC !kov rvM6F
20037 >G6kF!V
US Z<nNk.G
J:@gmo`M;V
Assignee Name and Adress: CARL ZEISS SMT AG ^wIB; !W
3 7 BS J
Serial No.: 931051 .l1x~(
Series Code: 10 oy^-?+
Filed: September 1, 2004 r1L@p[>
sgfqIe1
U.S. Current Class: 359/649 | [?Otv
U.S. Class at Publication: 359/649 5Z>a}s_i
Intern'l Class: G02B 003/00; G02B 009/00 n n7LL+h
zm&[K53
-------------------------------------------------------------------------------- ,1sbY!&ekL
>v+1 v
Foreign Application Data 46>rvy.r
#
e? B
-------------------------------------------------------------------------------- COh#/- `\1
Date Code Application Number tbS hSbj
Sep 12, 2003 WO 03/075049 A2 ?b]zsku8
Feb 6, 2003 WO PCT/EP03/01147 J&A1]T4d
Sep 12, 2003 WO 03/075096 A2 {`!6w>w0
@z1QoZ^w
-------------------------------------------------------------------------------- A6z ,6v 6
#X-C~*|>j
Claims I3Vu/&8f|
! Cr3>t A
-------------------------------------------------------------------------------- :uCwWv
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. ^~~Rto)Y
+e{ui +
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. UI AazDyC
X:i?gRy"
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
