Abstract \hI?XnL#
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. oI`Mn3N
-------------------------------------------------------------------------------- 3 ;F
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) 9?hF<}1XH}
Correspondence Name and Address: SUGHRUE MION, PLLC ; xw9#.d#D
2100 PENNSYLVANIA AVENUE, N.W. mT@Gf >}/A
SUITE 800 19(x$=:
WASHINGTON E Lq1
DC iJ *Wsp
20037 3k>#z%//
US $ e L-fg
KK >j V
Assignee Name and Adress: CARL ZEISS SMT AG &@{` {
wTR ?8$
Serial No.: 931051 PCgr`($U
Series Code: 10 (> u1O V
Filed: September 1, 2004 D2D+S
6A5.n?B{
U.S. Current Class: 359/649 :+QNN<
U.S. Class at Publication: 359/649 |zfFB7}v
Intern'l Class: G02B 003/00; G02B 009/00 mMZrBz7r
<W3p!
-------------------------------------------------------------------------------- Wwn Be"7M
$4ZV(j]
Foreign Application Data sVP\EF 8PY
Ufi#y<dP
-------------------------------------------------------------------------------- O,^s)>c
Date Code Application Number Oz_CEMcy
Sep 12, 2003 WO 03/075049 A2 S{2;Pa K
Feb 6, 2003 WO PCT/EP03/01147 yVn%Bz'
[
Sep 12, 2003 WO 03/075096 A2 @##}zku
+RpCh!KP
-------------------------------------------------------------------------------- U)-aecB!
<=%[.. (S
Claims B[8 RBTsA
G='`*_$
-------------------------------------------------------------------------------- 1z2v[S&pk
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. G] tT=X[
DtGkhq;
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. |SMigSu r`
ZT/f
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
