Abstract E2hy%y9Tp
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. "#ctT-g`6
-------------------------------------------------------------------------------- /=y _ # l
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) u*W6fg/"
Correspondence Name and Address: SUGHRUE MION, PLLC pgp@Zw)r)k
2100 PENNSYLVANIA AVENUE, N.W. O6
: GE'S
SUITE 800 ^0x0 r Y
WASHINGTON JI)@h 4b
DC W{)RJ 1
20037 DK6^\k][V
US Es7+bFvsE8
E((U=P}+g
Assignee Name and Adress: CARL ZEISS SMT AG {jK:hQX
gG?sLgL:
Serial No.: 931051 tAi
~ i;?
Series Code: 10 ?QbxC,& i
Filed: September 1, 2004 w6Owfq'v
fV>12ici
U.S. Current Class: 359/649 [9-&Lq_ g
U.S. Class at Publication: 359/649 O 7})1|>1
Intern'l Class: G02B 003/00; G02B 009/00 2#y-3y<G
neLQ>WT
L
-------------------------------------------------------------------------------- ^yl)c
\`
8lNkY`P7s
Foreign Application Data Hv3<gyD
1xf
Pe#
-------------------------------------------------------------------------------- _Mm Si4]yd
Date Code Application Number )iU @P7W=
Sep 12, 2003 WO 03/075049 A2 Z <Rhn
Feb 6, 2003 WO PCT/EP03/01147 Ra!Br6
Sep 12, 2003 WO 03/075096 A2 >QA;02
GW;\ 3@o
-------------------------------------------------------------------------------- bE6:pGr
Y|3n^%I
Claims Q
1:7 9
mS]&
-------------------------------------------------------------------------------- Szb# :C
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. uXm_ pQpF
A0A]#= S
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. CGp7 Tx #
I@M3u/7
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
