Abstract
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Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. ?mU
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) DN3#W w2[r
Correspondence Name and Address: SUGHRUE MION, PLLC RY3ANEu+
2100 PENNSYLVANIA AVENUE, N.W. uLX5khQ
SUITE 800 SAMP,un7
WASHINGTON \x P$m| Y3
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Assignee Name and Adress: CARL ZEISS SMT AG 1RpTI7
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Serial No.: 931051 (C>FM 8$J
Series Code: 10 Y /$`vgqs
Filed: September 1, 2004 <Z GE mQ
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U.S. Current Class: 359/649 J/X{
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U.S. Class at Publication: 359/649 W/q-^Zkt,9
Intern'l Class: G02B 003/00; G02B 009/00 pESlBQ7{ I
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Foreign Application Data })RT2zw}
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Date Code Application Number t>.1,'zb
Sep 12, 2003 WO 03/075049 A2 +EK(r@eV
Feb 6, 2003 WO PCT/EP03/01147 z(V?pHv+
Sep 12, 2003 WO 03/075096 A2 & 9X`t CnL
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Claims j}$dYbf$
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. KzD5>Xf]4$
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. B^g+ _;
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
