Abstract SJ}PV:x
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. ba tXj]:
-------------------------------------------------------------------------------- # uy^A C$
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) ~\*wt( o
Correspondence Name and Address: SUGHRUE MION, PLLC 6<% b}q9Mo
2100 PENNSYLVANIA AVENUE, N.W. )EK\3q
SUITE 800 e= XC$Jv
WASHINGTON ai<K 6)
DC [F!h&M0z
20037 %+((F +[
US hWiHKR]
>uo=0=9=
Assignee Name and Adress: CARL ZEISS SMT AG -k
}L W4
l1.eAs5U
Serial No.: 931051 Z6zLL
Series Code: 10 bZ#KfR
Filed: September 1, 2004 | .b&\
610u! _-
U.S. Current Class: 359/649 2uT@jfj:r
U.S. Class at Publication: 359/649 | 2G rOM&S
Intern'l Class: G02B 003/00; G02B 009/00 pxI[/vS
N
M96Nt&P`
-------------------------------------------------------------------------------- 24po}nrO
5s%FHa
Foreign Application Data ac,<+y7A
o4 ^#W;%w
-------------------------------------------------------------------------------- .zy2_3:
Date Code Application Number 7H4\ AG\>
Sep 12, 2003 WO 03/075049 A2 N3V4Mpf
Feb 6, 2003 WO PCT/EP03/01147 ? <w[ZWytm
Sep 12, 2003 WO 03/075096 A2 >CqZ75>
/I G3>|R
-------------------------------------------------------------------------------- a# Uk:O!
LWxP}? =
Claims ^U^K\rq 1u
XM 3~]
-------------------------------------------------------------------------------- @7t*X-P.;-
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. 9%dO"t$-q
bo??9 1B^7
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. Bnz}:te}
S] 4RGWn
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
