Optical Lithography - Here is Why - B J Lin 2010 [复制链接]

资源里面，介绍光刻的比较少， 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 ,Wtgj=1!.  
Contents 4 |bu=
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Preface .................................................................................................... yuC|_nL  
Chapter 1 Introducing Optical Lithography M3Qi]jO98  
Chapter 2 Exposure Systems l$[,V:N  
Chapter 3 Image Formation m%'T90mi  
Chapter 4 The Metrics of Lithography hXvC>ie(i  
Chapter 5 Components in Optical Lithography L1WvX6  
Chapter 6 Processing and Optimization Xvk+1:D  
Chapter 7 Immersion Lithography \r9E6LLX'  
Chapter 8 Outlook and Successors to Optical Lithography

继续〉〉〉

继续。。。。。

,tired >>>

>>>>>>.......

最后一个，发完睡觉le，

好东西啊。 98uMD  
辛苦了

謝謝你讓大家長見識

光刻是个好东西啊，有挑战，不过像天文望远镜一样，很难啊

光刻是个好东西啊，有挑战