Optical Lithography - Here is Why - B J Lin 2010 [复制链接]

资源里面，介绍光刻的比较少， 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 ;&-k#PE]/H  
Contents i5?q,_
 
Preface .................................................................................................... 'K{Z{[s{  
Chapter 1 Introducing Optical Lithography 6-B|Y3)B  
Chapter 2 Exposure Systems :\7X}n
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Chapter 3 Image Formation vJOw]cwq  
Chapter 4 The Metrics of Lithography b-Q>({=i  
Chapter 5 Components in Optical Lithography p hzKm9  
Chapter 6 Processing and Optimization p\aaJ  
Chapter 7 Immersion Lithography Ob`d  
Chapter 8 Outlook and Successors to Optical Lithography

继续〉〉〉

继续。。。。。

,tired >>>

>>>>>>.......

最后一个，发完睡觉le，

好东西啊。 [NIlbjYH  
辛苦了

謝謝你讓大家長見識

光刻是个好东西啊，有挑战，不过像天文望远镜一样，很难啊

光刻是个好东西啊，有挑战