资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 %&e5i
Contents )`;?%N\
Preface .................................................................................................... 80:na7$)#
Chapter 1 Introducing Optical Lithography QE-t v00
Chapter 2 Exposure Systems SznNvd <
Chapter 3 Image Formation I9tdr<
Chapter 4 The Metrics of Lithography a)`h*P5@
Chapter 5 Components in Optical Lithography I#$u(2.H
Chapter 6 Processing and Optimization NIV&)`w
Chapter 7 Immersion Lithography #pOW2 Uj8\
Chapter 8 Outlook and Successors to Optical Lithography