Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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NC*h7 WCbv5)uTUs Design and Fabrication of Highly Efficient Fan-Out Elements
3zO'=gwJ H. P. Herzig, D. Prongué and R. Dändliker
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{2CX FZM9aA Institute of Microtechnology, University of Neuchâtel
{I!sXj (Received March 26, 1990; accepted for publication May 19, 1990)
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