Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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Pd_U7&w,5 L 0TFo_ Design and Fabrication of Highly Efficient Fan-Out Elements
ivJ@=pd)B H. P. Herzig, D. Prongué and R. Dändliker
8;JWK3Gv n{argI8wF Institute of Microtechnology, University of Neuchâtel
k_rt&}e+Gi (Received March 26, 1990; accepted for publication May 19, 1990)
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