Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
s^cHR1^ |Full Text PDF (586K)| |Buy This Article|
^Oo%`(D? zQ6otDZx Design and Fabrication of Highly Efficient Fan-Out Elements
=vR>KE H. P. Herzig, D. Prongué and R. Dändliker
MD +Q_ ;*8$BuD Institute of Microtechnology, University of Neuchâtel
j*GYYEY (Received March 26, 1990; accepted for publication May 19, 1990)
#soWX_> +S$x}b'5q 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307