Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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gw3K+P PI:4m%[ Design and Fabrication of Highly Efficient Fan-Out Elements
O1U= X:Zl H. P. Herzig, D. Prongué and R. Dändliker
Kp~VS<3 )@l% Institute of Microtechnology, University of Neuchâtel
+yH7v5W (Received March 26, 1990; accepted for publication May 19, 1990)
TA`1U;c{n BxWPC#5
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