[未解决]求一篇Japanese Journal of Applied Physics上的文章，谢谢呀！ [复制链接]

Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309  |Next Article|  |Table of Contents|
bGhhh/n  
|Full Text PDF (586K)| |Buy This Article| sYl&Q.\q  
}R4(B2vup  
Design and Fabrication of Highly Efficient Fan-Out Elements vM5k4%D  
H. P. Herzig, D. Prongué and R. Dändliker b?sAEU;  
aeLBaS  
Institute of Microtechnology, University of Neuchâtel 5T7_

[{  
(Received March 26, 1990; accepted for publication May 19, 1990) '\Qf,%%.  
M0Lon/%  
链接:http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307