Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
j /dE6d |Full Text PDF (586K)| |Buy This Article|
l3?,gd.- NU&^7[!yl Design and Fabrication of Highly Efficient Fan-Out Elements
dFP-(dX# H. P. Herzig, D. Prongué and R. Dändliker
u4,X.3V]A hf+/kc!>i Institute of Microtechnology, University of Neuchâtel
l&??2VO/t (Received March 26, 1990; accepted for publication May 19, 1990)
tZu*Asx7 e(=~K@m 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307