Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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rA1r#ksQ ^ Wfgwmh Design and Fabrication of Highly Efficient Fan-Out Elements
[W$Z60?RR H. P. Herzig, D. Prongué and R. Dändliker
ggI=I<7M RP,:[}mPl Institute of Microtechnology, University of Neuchâtel
5!F\ h'E (Received March 26, 1990; accepted for publication May 19, 1990)
j- YJ." ~ sIGI?5f 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307
