Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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L_zB/(h (iO/@iw Design and Fabrication of Highly Efficient Fan-Out Elements
gHvkr?Cg H. P. Herzig, D. Prongué and R. Dändliker
{4R;C~ E8 2F ,?}jJ.K Institute of Microtechnology, University of Neuchâtel
G@dw5EfF9 (Received March 26, 1990; accepted for publication May 19, 1990)
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http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307
