Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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}{[mrG <F=9*.@D Design and Fabrication of Highly Efficient Fan-Out Elements
A,gEM4 H. P. Herzig, D. Prongué and R. Dändliker
0N:XIGFa Wu1{[a| Institute of Microtechnology, University of Neuchâtel
I?Aj.{{$G% (Received March 26, 1990; accepted for publication May 19, 1990)
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