Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
sE<V5`Z= |Full Text PDF (586K)| |Buy This Article|
p`dU2gV Et_bH%0 Design and Fabrication of Highly Efficient Fan-Out Elements
Y] _ruDIW H. P. Herzig, D. Prongué and R. Dändliker
_"yh.N& -7[@R;FS Institute of Microtechnology, University of Neuchâtel
2zA4vZkbcw (Received March 26, 1990; accepted for publication May 19, 1990)
?! :ha;n \:'/'^=#| 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307
