[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms i LBvGZ<9  
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High-precision prisms, having maximum angle tolerances lLq<xf  
of 1 to 3 arcsec, find increasing application in optical metrology. ->z54 T  
Reported interferometric techniques for measuring PupM/?57  
the wedge angles of such prisms achieve a precision of up +'@+x'/{^  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques N(6|yZ<J3M  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric |LG4=j.l  
methods have made use of goniometers,2 !{et8F@d|  
spectrometers,3 master prisms,4,5 and collimators.6 However, :nHKl  
in the literature there are few reported methods for Kr'f-{  
measuring the pyramidal error, and the majority rely on <F7kh[L_x  
visual observation,2,7,8 by which it is only possible to measure TQX)?^Ft  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. 5[l8y,  
In the new arrangement presented here, one can measure
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the prism angle and the pyramidal error separately or in 0|xIBg)  
combination. This is possible because the measurements '#NcZy  
are made simultaneously but with different techniques.