[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms tKXIk9e  
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High-precision prisms, having maximum angle tolerances p4Z(^+Aa  
of 1 to 3 arcsec, find increasing application in optical metrology. cw <l{A  
Reported interferometric techniques for measuring qJ-/7-$ ^  
the wedge angles of such prisms achieve a precision of up c-sfg>0^  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques |2A:eI8 ^  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric do'GlU oMC  
methods have made use of goniometers,2 rYk0 ak  
spectrometers,3 master prisms,4,5 and collimators.6 However, q!@4~plz  
in the literature there are few reported methods for _lq`a\7e  
measuring the pyramidal error, and the majority rely on 6_B]MN!(  
visual observation,2,7,8 by which it is only possible to measure MF'JeM;H  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. o)/ 0a  
In the new arrangement presented here, one can measure <1TAw.  
the prism angle and the pyramidal error separately or in ))Za&S*<  
combination. This is possible because the measurements uPvEwq* C  
are made simultaneously but with different techniques.