Basics of OPTICS OF MULTILAYER SYSTEMS i P@ FXJJ
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Contents @pH6FXVGzt
Preface……………………………………………………………………….………..……….4 Zrj#4 E 1
Chapter 1 a8-V`
SPECTRAL CHARACTERISTICS OF MULTILAYER COATINGS: 5>UQ 3hWo
THEORY……………………………………………………………………………………….5 0g HV(L?
1.1 Electromagnetic field in layered media; spectral characteristics of layered media…5 !b&+2y2i[W
1.1.1 Layered medium electromagnetic field equations………………………………...5 apt$e$g
1.1.2 Amplitude transmittance and reflectance of the layered medium……………….12 R_>. O?U4
1.1.3 The Fresnel formulas ……………………………………………………………18 4S4gK
1.1.4 Other ways of determining amplitude transmittance and reflectance of the r^H,H'BohJ
layered medium…………………………………………………………………..19 q8n@ fi6
1.1.5 Transmittance, reflectance and absorptance …………………………………….20 bZ:xH48MY
1.2 Principal recurrent methods for calculating layered media spectral coefficients…22 1hSV/ %v_
1.2.1 Matrix calculating method ………………………………………………………22 T Y5R=jh=
1.2.2 Description of optical coating and presentation of calculation results…………..28 Z1:<i*6>D
1.2.3 Recurrent formulas for the amplitude transmittance and reflectance……………30 n-{ d7haOa
1.2.4 Approximate formulas…………………………………………………………...33 o^Lq8u;i*
1.2.5 Other recurrent methods…………………………………………………………34 Vw.)T/B_D
1.2.6 The admittance phase plane……………………………………………………...38 8@LUL)"
1.3 Some common properties of multilayer coatings…………………………………….46 =vvd)og
1.3.1 The relation between the characteristic matrix and spectral coefficients of a EUVD)+i t
multilayer coating ……………………………………………………………….47 |QMmF" 0
1.3.2 Relations between spectral characteristics for the direct and reverse waves ……51 oI'& &Bt
1.3.3 Transmittance and reflectance of the combination of two multilayer o!U(=:*b
subsystems ……………………………………………………………………....54 g$zGiqzMK
1.4 The multilayer coatings optical properties: impact of variations in the layer l)~ U8
parameters……………………………………………………………………………...58 bfm+!9=9S
1.4.1 Spectral coefficients derivatives with respect to layer parameters …...………… fD3'Ye<R
1.4.2 Impact of the layer parameter errors on the multilayer coatings spectral :U=3*f.{
coefficients: probability assessment method ……………………….…………...63 ru6M9\h*
1.4.3 Multilayer coating spectral properties: influence of separate layer parameter {`e-%<
variations ………………………………………………………………………...66 A?$-Uqb"
1.5 Multilayer periodic systems. Quarter-wave dielectric mirrors……………………..68 Hc[@c)DH
1.5.1 Characteristic matrix of a periodic multilayer system …………………………..69 3 S*KjY'@
1.5.2 Quarter-wave mirror properties at the central wavelength ……………………...72 /8nUecr
1.5.3 Width of the quarter-wave mirror high-reflectance zones ………………………76 4_sJ0 =z-
1.5.4 Principal properties of a quarter-wave dielectric mirror in the proximity to the pLCS\AUTsv
central wavelength ………………………………………………………………80 <m\<yZ2aa
1.5.5 Dielectric mirrors on a metal substrate ………………………………………….84 0rz1b6F5,
1.6 Approximate formulas for dielectric narrow bandpass filters ……………………..88 Km!ACA& s6
1.6.1 Common expressions for spectral coefficients of filter-type systems near central |yz
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wavelength ………………………………………………………………………88 f6Lc" b3s1
1.6.2 Research of narrow bandpass filters with a half-wave central layer ……………92 \13Q >iA u
Chapter 2 N ~fE&@-
SYNTHESIS OF MULTILAYER OPTICAL COATINGS ……………………...97 .MRN)p
2.1 Synthesis methods based on merit function optimization …………………………...98 q5JQx**g
2.1.1 Merit function selection …………………………………………………………98 </@5>hx/
2.1.2 Merit function optimization ……………………………………………………101 ryw%0H18
2.1.3 General pattern of the synthesis and the problem of the starting design choice .108 ^IyQzBO j
2.2 Synthesis method based on the needle-like variations of the refractive index ……114 HFTeG4R
2.2.1 Needle-like variations of the refractive index ………………………………….115 t'0&n3
2.2.2 The principal idea of the method ………………………………………………119 Pk;yn;
2.2.3 Description of the method ……………………………………………………...124 l6 }+,v@#
Bibliography …...………………………………………….……………….………..……130
