Abstract >f(M5v(D\
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. 9b)'vr*Hy7
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) *kt%.wPJ
Correspondence Name and Address: SUGHRUE MION, PLLC ESni r6HoU
2100 PENNSYLVANIA AVENUE, N.W. p d .5
SUITE 800 aEdc8i ?
WASHINGTON U9"Ij}
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Assignee Name and Adress: CARL ZEISS SMT AG 8$38>cGY^
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Serial No.: 931051 jm,:jkr
Series Code: 10 ww) ow\
Filed: September 1, 2004 UD_8#DO{m1
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U.S. Current Class: 359/649 n\u3$nGL1`
U.S. Class at Publication: 359/649 B*n_
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Intern'l Class: G02B 003/00; G02B 009/00 E+~1GKd
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Foreign Application Data +5H1n (6)
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Date Code Application Number a#m T@l\
Sep 12, 2003 WO 03/075049 A2 ,$"T/yYer
Feb 6, 2003 WO PCT/EP03/01147 Y.E]U!i*
Sep 12, 2003 WO 03/075096 A2 *ch7z|wo.
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Claims 4_ kg/
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1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. L NM#\fb
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2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. a ~F\ 2`Q
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3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
