Abstract ">NBP anJ
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. dc"Vc 3)
-------------------------------------------------------------------------------- 0G;RMR ':5
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) $
5
Correspondence Name and Address: SUGHRUE MION, PLLC o"K{^ L~u
2100 PENNSYLVANIA AVENUE, N.W. Kq{9 :G
SUITE 800 cYW F)WAog
WASHINGTON C'kd>LAGu
DC aZ#c_Q#gZ
20037 0p:n'P
US 2= u5N[*
hNS V}~h
Assignee Name and Adress: CARL ZEISS SMT AG mLKwk6I
qky{]qNW
Serial No.: 931051 9
bGN5.5
Series Code: 10 D6c4tA^EO
Filed: September 1, 2004 Ch^Al 2)=
T3Qa[>+\
U.S. Current Class: 359/649 > lN{FJ
U.S. Class at Publication: 359/649 RwN*/Li
Intern'l Class: G02B 003/00; G02B 009/00 6d` 6=D:
)=ZWn,ZB
-------------------------------------------------------------------------------- Z6
(;~"Em
m3K8hL/
Foreign Application Data .,UpI|b
hZ5h(CQ?"#
-------------------------------------------------------------------------------- &\`=} hB
Date Code Application Number &Pgb Fy
Sep 12, 2003 WO 03/075049 A2 3x.|g
Feb 6, 2003 WO PCT/EP03/01147 zd"o #(sv
Sep 12, 2003 WO 03/075096 A2 .u)Po;e`
.Mdxbs6.C
-------------------------------------------------------------------------------- FG1$_zN |
jats )!:
Claims Mryi6X T
{BDp`uZ
-------------------------------------------------------------------------------- { ~FYiX
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. dy#dug6j
xsV(xk 4
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. I 4gyGg$H
a/{T;=_GY
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。
