Abstract \2$|Ei7
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. 2ilQXy
-------------------------------------------------------------------------------- tWRC$
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) x;d6vBTUb
Correspondence Name and Address: SUGHRUE MION, PLLC h]gp ^?=
2100 PENNSYLVANIA AVENUE, N.W. >bW#Zs,6
SUITE 800 0e4{{zQx
WASHINGTON T5h
H
DC
t{96p77)=
20037 Yq
KCeg
US 5;EvNu
_D tV
Assignee Name and Adress: CARL ZEISS SMT AG wHy!CP%
m_]Y{3C
Serial No.: 931051 }7Q% 6&IR
Series Code: 10 '=pU^Oz<}
Filed: September 1, 2004 L,!?Nt\
L8B!u9%
U.S. Current Class: 359/649 1+s;FJ2}
U.S. Class at Publication: 359/649 &u
!,Hp
Intern'l Class: G02B 003/00; G02B 009/00 [W&T(%(W-
O0.*Pmt
-------------------------------------------------------------------------------- KWHY4
ZECfR>`x
Foreign Application Data hVY$;s
})%{AfDRF
-------------------------------------------------------------------------------- upmx $H>
Date Code Application Number guR/\z$D@C
Sep 12, 2003 WO 03/075049 A2 a7opCmL
Feb 6, 2003 WO PCT/EP03/01147 C U0YIL
Sep 12, 2003 WO 03/075096 A2 XCQs2CHt
E1
2uZ$X
-------------------------------------------------------------------------------- jP.dDYc
"tK=+f`NM
Claims %|oym.-I6
f o3}W^0
-------------------------------------------------------------------------------- gSj,E8-g
1. A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of: a first lens group immediately following an object plane of the projection objective and having negative refractive power; a second lens group immediately following the first lens group and having positive refractive power; a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective; a fourth lens group immediately following the third lens group and having positive refractive power; and a fifth lens group immediately following the fourth lens group and having positive refractive power; the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. P%n>Tg80M
$`8wJf9@w
2. A refractive projection objective according to claim 1, wherein the following relationship of the maximum diameters holds: 0.9<D.sub.1/D.sub.2<1.0. 8oGRLYU N
307I$*%W
3. A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, of a second lens group with positive refractive power, and of a third lens group with negative refractive power, for the provision of a constriction of the light beam, and of a following fourth lens group with positive refractive power, and of a system diaphragm with a following fifth lens group, which has positive refractive power, wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged. 。。。。。。