| virtuexu |
2011-04-22 10:33 |
Optical Metrology 原版高清英文书籍
Optical Metrology Third Edition +>:[irf
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Kjell J. G˚asvik tNxKpA |F
Spectra Vision AS, Trondheim, Norway TtgsM}Fm
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Preface to the Third Edition xi
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1Basics 1 K\5/ ||gi
1.1 Introduction 1 9dp1NjOtAc
1.2 Wave Motion. The Electromagnetic Spectrum 1 1z@{ 4)
1.3 The Plane Wave. Light Rays 3 v=-T3
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1.4 Phase Difference 4 @y,>cDg
1.5 Complex Notation. Complex Amplitude 5 3 *oZol/
1.6 Oblique Incidence of A Plane Wave 5 K pmq C$
1.7 The Spherical Wave 7 K%;=i2:
1.8 The Intensity 8 LKst
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1.9 Geometrical Optics 8 aF .fd2k
1.10 The Simple Convex (Positive) Lens 10 !Za yN
1.11 A Plane-Wave Set-Up 11
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2 Gaussian Optics 15 GsIqUM#R
2.1 Introduction 15 O*c<m,
2.2 Refraction at a Spherical Surface 15 U+ V yH4"
2.2.1 Examples 19 ex|h&Vma2V
2.3 The General Image-Forming System 19 ;;Jx1Q
2.4 The Image-Formation Process 21
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2.5 Reflection at a Spherical Surface 23 5PE}3he:
2.6 Aspheric Lenses 25 aX.//T:':?
2.7 Stops and Apertures 26 {Bb:\N 8X
2.8 Lens Aberrations. Computer Lens Design 28 |^gnT`+
2.9 Imaging and The Lens Formula 29 Oki{)Ssy
2.10 Standard Optical Systems 30 1/c+ug!y
2.10.1 Afocal Systems. The Telescope 30 VhU ,("&pm
2.10.2 The Simple Magnifier 32 c4}|a1R\=
2.10.3 The Microscope 34 )%HIC@MM6
3 Interference 37
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3.1 Introduction 37 0_-P~^A
3.2 General Description 37 VBK |*Tl
3.3 Coherence 38 </_.+c [
3.4 Interference between two Plane Waves 41 ;G*)7fi
3.4.1 Laser Doppler Velocimetry (LDV) 45 {X-a6OQj
3.5 Interference between other Waves 46 [NbW"Y7
3.6 Interferometry 49 t_ \&LMD
3.6.1 Wavefront Division 50 c;88Wb<|W
3.6.2 Amplitude Division 51 XjTu`?Na;
3.6.3 The Dual-Frequency Michelson Interferometer 54 }w{E< C(M
3.6.4 Heterodyne (Homodyne) Detection 55 .L.9e#?3
3.7 Spatial and Temporal Coherence 56 lF\2a&YRbn
3.8 Optical Coherence Tomography 61 /b410NP5
4 Diffraction 67 4j<[3~:0
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4.1 Introduction 67 }+K=>.
4.2 Diffraction from a Single Slit 67 ?3<Y/Vg%c
4.3 Diffraction from a Grating 70 7hT@,|(j
4.3.1 The Grating Equation. Amplitude Transmittance 70 ;dTxQ_:
4.3.2 The Spatial Frequency Spectrum 73 mcxD#+H 3
4.4 Fourier Optics 75 gq~"Z[T
4.5 Optical Filtering 76 5i%\m
4.5.1 Practical Filtering Set-Ups 78 \Npvm49
4.6 Physical Optics Description TwKi_nh2m
of Image Formation 81 ,Uy;jk
4.6.1 The Coherent Transfer Function 83 N\Ab0mDOV.
4.6.2 The Incoherent Transfer Function 85 I^G6aw
4.6.3 The Depth of Focus 88 %I@ vM s^
4.7 The Phase-Modulated Sinusoidal Grating 89 ~ iq=J5IN#
5 Light Sources and Detectors 99 #{J+BWP\o
5.1 Introduction 99 K+P a b ?
5.2 Radiometry. Photometry 99 )-25? B
5.2.1 Lambertian Surface 102 q&^H"
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5.2.2 Blackbody Radiator 103 _AH_<Z(
5.2.3 Examples 105 wcGv#J],
5.3 Incoherent Light Sources 108 uFFC. w
5.4 Coherent Light Sources 109 c,#Nd@
5.4.1 Stimulated Emission 109 6s T( t8[
5.4.2 Gas Lasers 112 o Va [
5.4.3 Liquid Lasers 114 IH.EvierJ
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 oslj <
5.4.5 Solid-State Lasers 117 XY<KLO%
5.4.6 Other Lasers 119 8tz L.P^
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