| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System Z2='o_c
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. 3]UUG
Features y_IM@)1H~
Super depty measurement lM{
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A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. /fT+^&
Vevy weak interference fringe patterns can be capured ;u(<h?%e
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. &n?^$L TPY
100 magnification interference is achieved ;Q[mL(1:
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. Z1Z1@2 T
NSIMAGIK compatible system TGe ;HZ
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. &c%g
Specifications of stage *B{j.{
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Item RSY-150 RSY-300 rZ^v?4Z\
Compressed Air ≧0.5Mpa ^__Dd)(
Tube: Internal diameter 4mm, External diameter 6mm ICkp$u^
Power Saurce Single-phase 100V 4KVA a@* S+3
Clean Room Response Response to Class 1000 2 e9e s
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) )5U[o0td
Stage Unit Weight About 200kg About 300kg 78OIUNm`
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) _DNHc*
Control Rack Unit Weight About 180kg G\ r ?f&
X-Y Stage `Ru3L#@
X Valid Stroke ±75mm ±150mm FE! lok
Y Valid Stroke ±75mm ±150mm LLXVNO@e+
Maximum Speed 10mm/sec ehG/zVgn
Actuator Ball screw, Open-loop control 1u(.T0j7f
Stage Resolution 1μm/step Ej>g.vp8I
Repeatability ±1μm m"jV}@ag X
Z axis z` FCs,?K
Valid Stroke ±50mm Gz[fG
Actuator Grand screw, Open-loop control J8)#PY[i4
Z Axis Resolution ±1μm/step (Half-step) ' n$ %Ls}S
Jog-Dial 100μm/Revolution F a_VKAq
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps jR#~I@q^
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日本神津精机中国总代理： K/= _b<
广州市嘉铭工业器材有限公司 Z(_ZAB%+D
地 址：广州市广州大道中明月一路20号明月阁2403室 `8>Py~
联系人：MR.Huang MSN:htj@kmischina.com d[^~'V
电 话：+86 020-87392866-211 传真：87361189 C h%m
E-mail:htj@kmischina.com w{90`
http:www.kmischina.com
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