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kmischina 2010-03-05 16:38

断层面计测系统

Layer Profiling System Mg2+H+C~:  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. fzSkl`K}  
Features :5t4KcQ  
Super depty measurement Ln& pe(c  
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. F5o8@ Ib]:  
Vevy weak interference fringe patterns can be capured 5 D|#l*V  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. R|st<P  
100 magnification interference is achieved 7~h3B<  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. \]ib%,:YU  
NSIMAGIK compatible system *[Hp&6f  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. LE\*33k_  
Specifications of stage Xoe|]@U`  
Item    RSY-150    RSY-300 O<m46mwM  
Compressed Air    ≧0.5Mpa t 7Q$  
    Tube: Internal diameter 4mm, External diameter 6mm 5GsmBf$RUb  
Power Saurce    Single-phase 100V 4KVA 5nG\J g7  
Clean Room Response    Response to Class 1000 F&M d+2  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) d<m;Q}/l&h  
Stage Unit Weight    About 200kg    About 300kg &;BhL%)}  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H) m eF7[>!U  
Control Rack Unit Weight    About 180kg W5|{A])N  
X-Y Stage     t~+M>Fjm?d  
X Valid Stroke    ±75mm    ±150mm 9 [eiN  
Y Valid Stroke    ±75mm    ±150mm D;,p?]mgO~  
Maximum Speed    10mm/sec BZeEZ2"  
Actuator    Ball screw, Open-loop control {*_Ln  
Stage Resolution    1μm/step U2VEFm6  
Repeatability    ±1μm A(y6]E!  
Z axis     W{,fpm  
Valid Stroke    ±50mm pS?D~0Nb  
Actuator    Grand screw, Open-loop control `G\ qGllX  
Z Axis Resolution    ±1μm/step (Half-step) FnGKt\  
Jog-Dial    100μm/Revolution uo:RNokjJ  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps %'2P4(  
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日本神津精机中国总代理: @2Z|\ojJ  
广州市嘉铭工业器材有限公司     ^twyy9VR  
地  址:广州市广州大道中明月一路20号明月阁2403室 9ihg[k  
联系人:MR.Huang   MSN:htj@kmischina.com ql?w6qFs]  
电  话:+86 020-87392866-211  传真:87361189 RoqkT|#$  
E-mail:htj@kmischina.com bmT%?it  
http:www.kmischina.com
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