| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System c!mM H~#
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. Yh{5O3(;
Features '30J J0
Super depty measurement zO0K*s.yK
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. *T:jR
Vevy weak interference fringe patterns can be capured =]1g *~%
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. 6xu%M&ht
100 magnification interference is achieved l0tFj>q"
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. j_S3<wEJ
NSIMAGIK compatible system 3A\Z ]L
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. \p!m/2
Specifications of stage yGH')TsjD
Item RSY-150 RSY-300 E CPSE {
Compressed Air ≧0.5Mpa $_gv(&ZT
Tube: Internal diameter 4mm, External diameter 6mm =`l><
Power Saurce Single-phase 100V 4KVA NWj4 U3x
Clean Room Response Response to Class 1000 SBY0L.
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) y (=0
Stage Unit Weight About 200kg About 300kg ;Hb"SB
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) zbfe=J4 c
Control Rack Unit Weight About 180kg \\35}
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X-Y Stage & d* bQv$
X Valid Stroke ±75mm ±150mm S(0JBGC
Y Valid Stroke ±75mm ±150mm *p|->p6,u
Maximum Speed 10mm/sec m<!CF3g
Actuator Ball screw, Open-loop control Hio+ k^
Stage Resolution 1μm/step Wj, {lJ,
Repeatability ±1μm FA;B :O@:'
Z axis C#RueDa.
Valid Stroke ±50mm ER:K^
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Actuator Grand screw, Open-loop control 1;v wreJ
Z Axis Resolution ±1μm/step (Half-step) tZ:fOM
Jog-Dial 100μm/Revolution s:I 8~Cc
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps GE\({V.W
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日本神津精机中国总代理： 5'_:>0}
广州市嘉铭工业器材有限公司 <ILi38%Y
地 址：广州市广州大道中明月一路20号明月阁2403室 P#"_H}qC*
联系人：MR.Huang MSN:htj@kmischina.com K] &GSro
电 话：+86 020-87392866-211 传真：87361189 <)o xs ]<
E-mail:htj@kmischina.com o_ r{cnu
http:www.kmischina.com
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