| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System N:"M&E UM
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. EKV+?jj$
Features 1kbT@
Super depty measurement 5@GD} oAn6
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. &Bj,.dD/a
Vevy weak interference fringe patterns can be capured w++B-_
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. CM+F7#T?n
100 magnification interference is achieved !hwzKm=%N
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. GMVC&^
NSIMAGIK compatible system G5y]^P
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. =$&7IQ?
Specifications of stage fho=<|-
Item RSY-150 RSY-300 V[BY/<z)A
Compressed Air ≧0.5Mpa !C9ps]6
Tube: Internal diameter 4mm, External diameter 6mm hr )+Pk
Power Saurce Single-phase 100V 4KVA wrZ7Sr!/V
Clean Room Response Response to Class 1000 CwTS / G
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) ,6S_&<{
Stage Unit Weight About 200kg About 300kg i}v}K'`
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) u|]mcZ,ZW
Control Rack Unit Weight About 180kg +#de8/x
X-Y Stage oi33{#%t
X Valid Stroke ±75mm ±150mm )*psDjZ7*
Y Valid Stroke ±75mm ±150mm 3I(dC|d
Maximum Speed 10mm/sec l044c,AW(
Actuator Ball screw, Open-loop control RT8 _@8
Stage Resolution 1μm/step z 'vd C
Repeatability ±1μm Ba"^K d`
Z axis `'A(`. CL
Valid Stroke ±50mm sw 3:HNG=
Actuator Grand screw, Open-loop control /8P4%[\
Z Axis Resolution ±1μm/step (Half-step) gQ[ ]
Jog-Dial 100μm/Revolution P3,Z5|)
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps 35]j;8N:
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日本神津精机中国总代理： CrRQPgl+u
广州市嘉铭工业器材有限公司 al3BWRq'f
地 址：广州市广州大道中明月一路20号明月阁2403室 -Fp!w "=T
联系人：MR.Huang MSN:htj@kmischina.com zR3 lX}g
电 话：+86 020-87392866-211 传真：87361189 rzYobOKd#
E-mail:htj@kmischina.com !:g >CDA
http:www.kmischina.com
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