| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System <e ^/hR4O
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. SRTp E,
Features 7&3URglsL"
Super depty measurement *o[%?$8T
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. Tpukz_F
Vevy weak interference fringe patterns can be capured J qUVGEg
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. ie(7m| .
100 magnification interference is achieved !{Y#<tG]
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. ]#$kA9
NSIMAGIK compatible system c-.>C)
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. (M+<^3c
Specifications of stage g5Dx 9d {
Item RSY-150 RSY-300 Tv$7aVi!
Compressed Air ≧0.5Mpa 5u46Vl{
Tube: Internal diameter 4mm, External diameter 6mm ;}~=W!yz
Power Saurce Single-phase 100V 4KVA tD]&et
Clean Room Response Response to Class 1000
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Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) AD\<}/3U
Stage Unit Weight About 200kg About 300kg swlWe}1
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) J31M:<
Control Rack Unit Weight About 180kg ]M(mq`K
X-Y Stage <L ~xR5
X Valid Stroke ±75mm ±150mm H g`{9v
Y Valid Stroke ±75mm ±150mm `#rfp
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Maximum Speed 10mm/sec NVeRn
Actuator Ball screw, Open-loop control ;J(,F:N
Stage Resolution 1μm/step `yAo3A9vk
Repeatability ±1μm QYgN39 gp
Z axis XO#)i6}G
Valid Stroke ±50mm $NT9LtT@K
Actuator Grand screw, Open-loop control i gro g
Z Axis Resolution ±1μm/step (Half-step) |{)xC=
Jog-Dial 100μm/Revolution io{H$ x(
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps X`n0b<
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日本神津精机中国总代理： Qc;[mxQe
广州市嘉铭工业器材有限公司 .4<U*Xkt
地 址：广州市广州大道中明月一路20号明月阁2403室 *Qx|5L!_
联系人：MR.Huang MSN:htj@kmischina.com r ` &|)Hx
电 话：+86 020-87392866-211 传真：87361189 n2 mw@Ay!
E-mail:htj@kmischina.com
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http:www.kmischina.com
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