| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System [EQTrr(
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The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. lcfs
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Features qmNG|U&
Super depty measurement R#rfnP >
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. <" 0b 8 Z
Vevy weak interference fringe patterns can be capured j|[ >f
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. "wxyY^"
100 magnification interference is achieved _! ?a9
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. T]\'D&P~D
NSIMAGIK compatible system xF
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NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. o}52Qi o
Specifications of stage Odw9]`,T
Item RSY-150 RSY-300 1>umf~%Wa
Compressed Air ≧0.5Mpa L;6{0b58 $
Tube: Internal diameter 4mm, External diameter 6mm $9W ,1wg
Power Saurce Single-phase 100V 4KVA )d{fDwrx1
Clean Room Response Response to Class 1000 mKUm*m#< R
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) X"jtPYCpV{
Stage Unit Weight About 200kg About 300kg e=_Ng
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Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) /U0,%
Control Rack Unit Weight About 180kg u! t<2`:h
X-Y Stage L9!\\U
X Valid Stroke ±75mm ±150mm
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Y Valid Stroke ±75mm ±150mm #f_.
Maximum Speed 10mm/sec 3A.lS+P1
Actuator Ball screw, Open-loop control \9}DAM_
Stage Resolution 1μm/step Bt(nm> Ng
Repeatability ±1μm uu/2C \n}
Z axis o76{;Bl\ O
Valid Stroke ±50mm : xY9eq=
Actuator Grand screw, Open-loop control ghTue*A
Z Axis Resolution ±1μm/step (Half-step) K :>O X
Jog-Dial 100μm/Revolution '{)Jhl47
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps M5N #xgR
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日本神津精机中国总代理：
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广州市嘉铭工业器材有限公司 7s Gf_`Z
地 址：广州市广州大道中明月一路20号明月阁2403室 N_l_^yD
联系人：MR.Huang MSN:htj@kmischina.com !bCaDTz
电 话：+86 020-87392866-211 传真：87361189 C>QW V[F
E-mail:htj@kmischina.com k =O
http:www.kmischina.com
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