| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System ;n|%W,b-
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. 5'V-Ly)*%
Features 4 pelIoj
Super depty measurement Jt<J#M<}7
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. u~JR]T
Vevy weak interference fringe patterns can be capured IDpx_
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. gq4X(rsyD
100 magnification interference is achieved \D]9:BNJ
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. hM>.xr
NSIMAGIK compatible system Br{ (sL0e
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. =FiO{Aw `N
Specifications of stage jffNA^e
Item RSY-150 RSY-300 wuk\__ f4
Compressed Air ≧0.5Mpa s5Wb iOF
Tube: Internal diameter 4mm, External diameter 6mm l]Ym)QP
Power Saurce Single-phase 100V 4KVA _2}~Vqb+
Clean Room Response Response to Class 1000 a"t~ K
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) } * C
Stage Unit Weight About 200kg About 300kg fU$ _5v4
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) >p;&AaXkoG
Control Rack Unit Weight About 180kg pp7
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X-Y Stage R9"}-A
X Valid Stroke ±75mm ±150mm % -+7=x
Y Valid Stroke ±75mm ±150mm wf\7sz
Maximum Speed 10mm/sec 8K8jz9.s
Actuator Ball screw, Open-loop control T{-gbo`Yji
Stage Resolution 1μm/step FgrVXb_q
Repeatability ±1μm )~ &gBX
Z axis @de0)AJG6
Valid Stroke ±50mm fBz|-I:k
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Actuator Grand screw, Open-loop control :q j;f];|
Z Axis Resolution ±1μm/step (Half-step) ?_p!teb
Jog-Dial 100μm/Revolution dD~H ft
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps p joyMHWK
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日本神津精机中国总代理： \i}-Y[Dg
广州市嘉铭工业器材有限公司 kCoE;)y$
地 址：广州市广州大道中明月一路20号明月阁2403室 ;4GGXT++L
联系人：MR.Huang MSN:htj@kmischina.com }QQ 7jE
电 话：+86 020-87392866-211 传真：87361189 x(4"!#
E-mail:htj@kmischina.com F;kK n:X L
http:www.kmischina.com
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