| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System L6 IIk
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. V)Sw\tS6g
Features fda)t1u\8
Super depty measurement 3]li3B'
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. q x1+ '
Vevy weak interference fringe patterns can be capured Eyq4w
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified.
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100 magnification interference is achieved }Y!v"DO#Q*
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. z)ndj
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NSIMAGIK compatible system BIXbdo5F
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. _ -|+k
Specifications of stage 0WSOA[R%[b
Item RSY-150 RSY-300 v |R#[vtFd
Compressed Air ≧0.5Mpa qH4+i STnV
Tube: Internal diameter 4mm, External diameter 6mm Pm"nwm
Power Saurce Single-phase 100V 4KVA +Kp8X 53
Clean Room Response Response to Class 1000 b#( X+I
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) 3vHkhhYQ
Stage Unit Weight About 200kg About 300kg > zfFvx_q
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) ! n<SpW;
Control Rack Unit Weight About 180kg cI'su?
X-Y Stage 5fy{!
X Valid Stroke ±75mm ±150mm a Z8f>t1Q
Y Valid Stroke ±75mm ±150mm x^Zm:Jrw~
Maximum Speed 10mm/sec {s0!hp
Actuator Ball screw, Open-loop control <m,bP
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Stage Resolution 1μm/step 3X#Cep20a
Repeatability ±1μm @<yY Mo7
Z axis uNca@xl'
Valid Stroke ±50mm LbuhKL}VN
Actuator Grand screw, Open-loop control ; o(:}d
Z Axis Resolution ±1μm/step (Half-step) X/ Ii}X/p
Jog-Dial 100μm/Revolution oA8A
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Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps >D Ai-`e
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日本神津精机中国总代理： 1.5R`vKn]
广州市嘉铭工业器材有限公司 jW{bP_,"
地 址：广州市广州大道中明月一路20号明月阁2403室 L)
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联系人：MR.Huang MSN:htj@kmischina.com lQv (5hIm
电 话：+86 020-87392866-211 传真：87361189 mnx`e>0
E-mail:htj@kmischina.com cUO$IR)yL
http:www.kmischina.com
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