| kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System YY9q'x,w
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. H0S 7k`.
Features E_z@\z MB
Super depty measurement A, os rv
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. =[$*PTe
Vevy weak interference fringe patterns can be capured GZ%R fK yQ
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. *e R$
100 magnification interference is achieved sdY6_ HtE
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. z t1Q_;
NSIMAGIK compatible system w? [)nlNW
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. c:bB4ch}
Specifications of stage N\u-8nE5
Item RSY-150 RSY-300 JBqzQ ^[n
Compressed Air ≧0.5Mpa sTb/l!= o
Tube: Internal diameter 4mm, External diameter 6mm {"<Q?yA2y
Power Saurce Single-phase 100V 4KVA ^ a]:GPc
Clean Room Response Response to Class 1000 &sW/r::,
Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) srC jq
Stage Unit Weight About 200kg About 300kg X !@Gv:TD
Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) }K/[3X=B
Control Rack Unit Weight About 180kg `yhL11 ]~
X-Y Stage P
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X Valid Stroke ±75mm ±150mm V3-LVg M%
Y Valid Stroke ±75mm ±150mm </fnbyGR
Maximum Speed 10mm/sec Yv{AoL~
Actuator Ball screw, Open-loop control f?]cW h%
Stage Resolution 1μm/step FvkKM+ ?F
Repeatability ±1μm b `2~
Z axis ( GeJBw,Q
Valid Stroke ±50mm &^}w| J?
Actuator Grand screw, Open-loop control 5rc<ibGh
Z Axis Resolution ±1μm/step (Half-step) sU8D;ML7
Jog-Dial 100μm/Revolution h1BdASn_
Joy-Stick Hi-speed setting: 80000pps, Low-speed setting: 200pps []@Mk
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日本神津精机中国总代理： 5W'T7asOh
广州市嘉铭工业器材有限公司 qP"m819m
地 址：广州市广州大道中明月一路20号明月阁2403室 B!5gD
联系人：MR.Huang MSN:htj@kmischina.com '
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电 话：+86 020-87392866-211 传真：87361189 8z+ CYeV
E-mail:htj@kmischina.com m\t
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http:www.kmischina.com
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