kmischina |
2010-03-05 16:38 |
断层面计测系统
Layer Profiling System XLQt>y) The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. sKDsps^$ Features -|_#6-9 Super depty measurement /<zBjvr%% A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. JO3"$s|t Vevy weak interference fringe patterns can be capured <KB V Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. at<N?r 100 magnification interference is achieved :]]#X
~J A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. `hpX 97v NSIMAGIK compatible system L F<{/c9, NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. Hst]}g' . Specifications of stage f%ThS42 Item RSY-150 RSY-300 Y8l
8B> Compressed Air ≧0.5Mpa A?)nLp&Y Tube: Internal diameter 4mm, External diameter 6mm vU(uu:U9 Power Saurce Single-phase 100V 4KVA nLvF^%P8 Clean Room Response Response to Class 1000 4zo^ b0v Stage Unit Size 600(W)×500(D)×1400(H) 1200(W)×800(D)×1500(H) IZ2(F,{o Stage Unit Weight About 200kg About 300kg kz30! L Control Rack Unit Size 570(W)×750(D)×1850(H) 5700(W)×750(D)×1850(H) ;-]' OiS; Control Rack Unit Weight About 180kg >G#SfE$0 X-Y Stage 9szUN;:ZZ X Valid Stroke ±75mm ±150mm ;zF3e&e( Y Valid Stroke ±75mm ±150mm NQ&\t[R[ Maximum Speed 10mm/sec *h([ai"1- Actuator Ball screw, Open-loop control mc
FSWmq Stage Resolution 1μm/step ^mp#7OL Repeatability ±1μm r%=} e++^% Z axis IJ[r!&PY Valid Stroke ±50mm *Rx& | |