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kmischina 2010-03-05 16:38

断层面计测系统

Layer Profiling System #ib^Kg  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. qjAh6Q/E`  
Features A=X-;N#  
Super depty measurement #9:2s$O[x  
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. [7.agI@=  
Vevy weak interference fringe patterns can be capured Ly>OLI0x_  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. |dk[cX>  
100 magnification interference is achieved qfr Ni1\9-  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. X;VQEDMPU  
NSIMAGIK compatible system =9$mbn r  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. cDeZMsV  
Specifications of stage  iSiDSeW8  
Item    RSY-150    RSY-300 "!KpXBc,>  
Compressed Air    ≧0.5Mpa R ]P;sk5  
    Tube: Internal diameter 4mm, External diameter 6mm ARWZ; GX  
Power Saurce    Single-phase 100V 4KVA 55m<XC  
Clean Room Response    Response to Class 1000 RJ}#)cT  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) h1f8ktF  
Stage Unit Weight    About 200kg    About 300kg ]JMl|e  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H) _a5(s2wq+  
Control Rack Unit Weight    About 180kg 6(KmA-!b(O  
X-Y Stage     Mu2`ODe]  
X Valid Stroke    ±75mm    ±150mm Q9slfQ  
Y Valid Stroke    ±75mm    ±150mm P^i.La,  
Maximum Speed    10mm/sec C-w5KW  
Actuator    Ball screw, Open-loop control Gx'TkU=  
Stage Resolution    1μm/step l r~gG3   
Repeatability    ±1μm *||d\peQ  
Z axis     Cv^`&\[SW+  
Valid Stroke    ±50mm O+"ac /r  
Actuator    Grand screw, Open-loop control }ZzLs/v%X  
Z Axis Resolution    ±1μm/step (Half-step) x_!ZycEa  
Jog-Dial    100μm/Revolution o8ppMM8_R[  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps 8omC%a}9m  
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日本神津精机中国总代理: Qf@iU%G  
广州市嘉铭工业器材有限公司     |/T43ADW  
地  址:广州市广州大道中明月一路20号明月阁2403室 fdv`7u+}a  
联系人:MR.Huang   MSN:htj@kmischina.com LM"y\q ]  
电  话:+86 020-87392866-211  传真:87361189 $$1qF"GF  
E-mail:htj@kmischina.com NXU`wnVJ  
http:www.kmischina.com
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