| wildcat |
2009-11-17 18:28 |
美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics
美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications 4XX21<yn
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations 3bE^[V8/
for Nanostructure Fabrication Using Scanning "uZ'oN
Probe Microscopy 1 I&1Mh4yu
A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo %pTbJaM\U
Chapter 2 Atomic Force Microscope Lithography 33 nM
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N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park ]Ms~;MXlx5
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, e^Jy -?E
Sensing, and Modification 65 /SN.M6~
C. Santschi, J. Polesel-Maris, J. Brugger, 3@6f%Dyj
and H. Heinzelmann 2Ybz`O!
Chapter 4 Using Biomolecules for Self-Assembly of Engineered #;?z<
Nano-Scale Structures and Devices 127 0{A VH/S
R. Mehta, J. Lund, and B. A. Parviz zZ;tSKL
Chapter 5 Nanofabrication Based on Self-Assembled ?+`Zef.g
Alumina Templates 159 {y spNyOx
S. Sen and N. A. Kouklin 3=;i C6
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Chapter 6 Nanowire Assembly and Integration 187 CHBCi) '6h
Z. Gu and D. H. Gracias *pI3"_
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 o^DiIo or
L. Tong and E. Mazur mYa0_P%^
Chapter 8 Extreme Ultraviolet Lithography 235 /xf %Rp4}
H. Kinoshita v,p/r )E
Chapter 9 Electron Projection Lithography 285 (sr_& 7A
T. Miura, K. Suzuki, H. Arimoto, and S. Kawata m[Zz(tL
Chapter 10 Electron Beam Direct Writing 341 $7|0{Dw
K. Yamazaki H6'xXS
Chapter 11 Electron Beam Induced Deposition 377 8a -[Q
K. Mitsuishi O- r"G
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 '%K,A-7W
P. A. Crozier and C. W. Hagen rBgLj,/`U/
Chapter 13 Focused Ion Beams and Interaction with Solids 431 Fnll&TF
T. Ishitani, T. Ohnishi, and T. Yaguchi B;7 L:
Chapter 14 Nano/Microstructuring of Ceramic Surfaces tQ=U22&7
by Unconventional Lithographic Methods 471 6Y}#v Z
R. C. Salvarezza and O. Azzaroni >@T ZYdl
Chapter 15 Alternative Nanofabrication Approaches B.&q]CA v-
f or Non-CMOS Applications 499 ^dqyX(
C. V. Cojocaru, F. Cicoira, and F. Rosei lza 'l
Chapter 16 Nanofabrication of Nanoelectromechanical Systems 6S`eN\s
(NEMS): Emerging Techniques 543 :/Sx\Nz78
K. L. Ekinci and J. Brugger -V4@BKI8
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