| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms \TC& /'7}
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High-precision prisms, having maximum angle tolerances } 9<aX
Y,
of 1 to 3 arcsec, find increasing application in optical metrology. a%*W^R9Ls
Reported interferometric techniques for measuring 0f;L!.eP
the wedge angles of such prisms achieve a precision of up T!(I\wz;Bo
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques >OZ+k(saL
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric 9SC#N 5V
methods have made use of goniometers,2 T1\Xz-1
spectrometers,3 master prisms,4,5 and collimators.6 However, $ax a I$bE
in the literature there are few reported methods for
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measuring the pyramidal error, and the majority rely on "g>uNtt~
visual observation,2,7,8 by which it is only possible to measure :v1'(A1t
pyramidal errors to the order of 1 arcmin ~Ref. 8!. nU)}!` E
In the new arrangement presented here, one can measure `lN1 u'(:
the prism angle and the pyramidal error separately or in qSkt
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combination. This is possible because the measurements iDp]l u
are made simultaneously but with different techniques.
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