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电子厂女工xp 2024-05-14 08:52

Measuring the angles and pyramidal error of high-precision prisms

Measuring the angles and pyramidal error of high-precision prisms {nU=%w"\  
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High-precision prisms, having maximum angle tolerances ^k<o T'89  
of 1 to 3 arcsec, find increasing application in optical metrology. h<~7"ONhV  
Reported interferometric techniques for measuring O9:U8$*  
the wedge angles of such prisms achieve a precision of up 0Ia($.1mY  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques {\[5}nV  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric k%^lF?_0I  
methods have made use of goniometers,2 dK>7fy;mv  
spectrometers,3 master prisms,4,5 and collimators.6 However, &>H!}"Yk  
in the literature there are few reported methods for )Wb0u0)_  
measuring the pyramidal error, and the majority rely on QNDHOo>v  
visual observation,2,7,8 by which it is only possible to measure _ 84ut  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. U4G`ZK v(!  
In the new arrangement presented here, one can measure TwgrRtj'  
the prism angle and the pyramidal error separately or in fA89|NTSUh  
combination. This is possible because the measurements U!Ek'  
are made simultaneously but with different techniques.
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