| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms 0(&Rm R
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High-precision prisms, having maximum angle tolerances A6
of 1 to 3 arcsec, find increasing application in optical metrology. ,\d03wha
Reported interferometric techniques for measuring Y@T$O<*
the wedge angles of such prisms achieve a precision of up F6:LH,~8
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques %dhrXK5
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric |tTcJ\bG
methods have made use of goniometers,2 CoWT
spectrometers,3 master prisms,4,5 and collimators.6 However, ((^v sKT
in the literature there are few reported methods for ^BW8zu@=O
measuring the pyramidal error, and the majority rely on &+ H\ST(/
visual observation,2,7,8 by which it is only possible to measure vu*9(t)EC
pyramidal errors to the order of 1 arcmin ~Ref. 8!. eiRVw5g
In the new arrangement presented here, one can measure \nL@P6X
the prism angle and the pyramidal error separately or in I MpL+W.
combination. This is possible because the measurements QXEZ?gx
are made simultaneously but with different techniques.
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