| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms }!Pty25j
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High-precision prisms, having maximum angle tolerances ue+{djz[4
of 1 to 3 arcsec, find increasing application in optical metrology. H
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Reported interferometric techniques for measuring 6yAZvX
the wedge angles of such prisms achieve a precision of up LxWd_B
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques [MbbL
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric Np$&8v+en
methods have made use of goniometers,2 b]xoXC6@ t
spectrometers,3 master prisms,4,5 and collimators.6 However, 1 \aTA,
in the literature there are few reported methods for #+U1QOsz
measuring the pyramidal error, and the majority rely on ;P;c!}:\b
visual observation,2,7,8 by which it is only possible to measure 7mXXMm
pyramidal errors to the order of 1 arcmin ~Ref. 8!. IqepR
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In the new arrangement presented here, one can measure 7hPw a3D^
the prism angle and the pyramidal error separately or in *pnaj\
combination. This is possible because the measurements W4k$m 2
are made simultaneously but with different techniques.
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