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电子厂女工xp 2024-05-14 08:52

Measuring the angles and pyramidal error of high-precision prisms

Measuring the angles and pyramidal error of high-precision prisms uYTyR;a  
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High-precision prisms, having maximum angle tolerances <mLU-'c@  
of 1 to 3 arcsec, find increasing application in optical metrology. "QfF]/:  
Reported interferometric techniques for measuring bjUe+ #BL  
the wedge angles of such prisms achieve a precision of up 1|*%  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques Xj?LU7  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric L_Z`UhD3{  
methods have made use of goniometers,2 TbMlYf]It  
spectrometers,3 master prisms,4,5 and collimators.6 However, Q-_;.xy#4  
in the literature there are few reported methods for 4xx?x/q  
measuring the pyramidal error, and the majority rely on E#w2'(t  
visual observation,2,7,8 by which it is only possible to measure %Y`)ZKh  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. *[nS*D\:  
In the new arrangement presented here, one can measure cL %eP.  
the prism angle and the pyramidal error separately or in -}qay@cDt  
combination. This is possible because the measurements  Z1H  
are made simultaneously but with different techniques.
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