| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms 9`n P(~
UiGUaB mF*
High-precision prisms, having maximum angle tolerances TE*> a5C|
of 1 to 3 arcsec, find increasing application in optical metrology. 9*G L@_c
Reported interferometric techniques for measuring pl1EJ <
the wedge angles of such prisms achieve a precision of up Li?{e+ g
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques % xH>0
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric )w }*PL
methods have made use of goniometers,2 puf;"c6e'
spectrometers,3 master prisms,4,5 and collimators.6 However, = y,yQO
in the literature there are few reported methods for sT;=7 L<TA
measuring the pyramidal error, and the majority rely on ^)eessZ
visual observation,2,7,8 by which it is only possible to measure &?`d8\z
pyramidal errors to the order of 1 arcmin ~Ref. 8!. _umO)]Si
In the new arrangement presented here, one can measure K'{ wncumQ
the prism angle and the pyramidal error separately or in oKMg7 3*
combination. This is possible because the measurements W #JVU GYD
are made simultaneously but with different techniques.
|
|