| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms F>6|3bOR
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High-precision prisms, having maximum angle tolerances 6|%?te x
of 1 to 3 arcsec, find increasing application in optical metrology. m@F`!qY~Y\
Reported interferometric techniques for measuring bMu+TgAT,
the wedge angles of such prisms achieve a precision of up 5iw<>9X*
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques #PW9:_BE
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric c(E{6g?
methods have made use of goniometers,2 Jk11fn;\>
spectrometers,3 master prisms,4,5 and collimators.6 However, q[ZT Hd.-
in the literature there are few reported methods for ")5":V~fN
measuring the pyramidal error, and the majority rely on r: '.nhe
visual observation,2,7,8 by which it is only possible to measure w"|L:8
pyramidal errors to the order of 1 arcmin ~Ref. 8!.
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In the new arrangement presented here, one can measure KV aiugQ
the prism angle and the pyramidal error separately or in r~8 $1"
combination. This is possible because the measurements ?V.cOR`6
are made simultaneously but with different techniques.
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