| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms ;ND)h pD+
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High-precision prisms, having maximum angle tolerances ^1}Y=! &
of 1 to 3 arcsec, find increasing application in optical metrology. _Pe,84 Ro
Reported interferometric techniques for measuring QPZ|C{Ce
the wedge angles of such prisms achieve a precision of up G&DL)ePu]m
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques No(p:Snbo
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric j~#nJI5]
methods have made use of goniometers,2 +<TnE+>j
spectrometers,3 master prisms,4,5 and collimators.6 However, 15)y]N={^
in the literature there are few reported methods for Wf>P[6
measuring the pyramidal error, and the majority rely on oBpoZ @[Z
visual observation,2,7,8 by which it is only possible to measure ^? Y x{r~9
pyramidal errors to the order of 1 arcmin ~Ref. 8!. C%LXGM t
In the new arrangement presented here, one can measure m .':5
the prism angle and the pyramidal error separately or in I}!Er V
combination. This is possible because the measurements qVe& nXo
are made simultaneously but with different techniques.
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