| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms yrMakT =
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High-precision prisms, having maximum angle tolerances <~5$<L4
of 1 to 3 arcsec, find increasing application in optical metrology. :; 3y^!
Reported interferometric techniques for measuring o[G,~f\-
the wedge angles of such prisms achieve a precision of up Zg ;Ht
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques 7:)$ oH
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric {M0pq3SL*t
methods have made use of goniometers,2 wGpw+O
spectrometers,3 master prisms,4,5 and collimators.6 However, H? pWyc<,
in the literature there are few reported methods for mhnK{M @56
measuring the pyramidal error, and the majority rely on 0 KWi< G1
visual observation,2,7,8 by which it is only possible to measure (@*#Pn|A
pyramidal errors to the order of 1 arcmin ~Ref. 8!. ])T_& %
In the new arrangement presented here, one can measure u $T'#p1
the prism angle and the pyramidal error separately or in 9TE-'R@
combination. This is possible because the measurements 7[7Sm^Tw
are made simultaneously but with different techniques.
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