| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms r"h;JC/&<T
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High-precision prisms, having maximum angle tolerances TJ|Jv8j<s
of 1 to 3 arcsec, find increasing application in optical metrology. p? @ %/!S
Reported interferometric techniques for measuring N ##`
the wedge angles of such prisms achieve a precision of up qUe
_B
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques f:T?oR>2
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric c 0!.ei
methods have made use of goniometers,2 ? 1e{\XW
spectrometers,3 master prisms,4,5 and collimators.6 However, QLA.;`HIE
in the literature there are few reported methods for EY} : aur
measuring the pyramidal error, and the majority rely on eI
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visual observation,2,7,8 by which it is only possible to measure =YO ]m<
pyramidal errors to the order of 1 arcmin ~Ref. 8!. W
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In the new arrangement presented here, one can measure C0rf
the prism angle and the pyramidal error separately or in 3a /n/_D
combination. This is possible because the measurements r~w.J+W
are made simultaneously but with different techniques.
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