电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms ikB Yd
}5 ~tFqb<n High-precision prisms, having maximum angle tolerances '|>9C^E9X of 1 to 3 arcsec, find increasing application in optical metrology. M6r^L6$N Reported interferometric techniques for measuring `fXyWrz-k the wedge angles of such prisms achieve a precision of up rX7QbAB to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques Q:C$&-$ have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric S/ywA9~3Q methods have made use of goniometers,2 qB]i6* spectrometers,3 master prisms,4,5 and collimators.6 However, 3VnQnd E in the literature there are few reported methods for nwt C:*} measuring the pyramidal error, and the majority rely on RPnRVJ&"Z visual observation,2,7,8 by which it is only possible to measure ;^Sr"v6r>u pyramidal errors to the order of 1 arcmin ~Ref. 8!. VQI(Vp| In the new arrangement presented here, one can measure {%v-( the prism angle and the pyramidal error separately or in k^ F@X combination. This is possible because the measurements \'CN are made simultaneously but with different techniques.
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