| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms puz~Rfn#* BS;_l"? High-precision prisms, having maximum angle tolerances e;<=aa)}? of 1 to 3 arcsec, find increasing application in optical metrology. .~6p/fHX Reported interferometric techniques for measuring kGMI
? the wedge angles of such prisms achieve a precision of up eVDI7W:(Sn to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques (;' ?56 have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric ALiXT8q methods have made use of goniometers,2 ?j8F5(HF? spectrometers,3 master prisms,4,5 and collimators.6 However, vd9><W in the literature there are few reported methods for n-{G19? measuring the pyramidal error, and the majority rely on g Xvuv^ visual observation,2,7,8 by which it is only possible to measure ND7
gxt-B pyramidal errors to the order of 1 arcmin ~Ref. 8!. _}7N,Cx In the new arrangement presented here, one can measure R1FBH:Iu the prism angle and the pyramidal error separately or in 969*mcq' combination. This is possible because the measurements T'l >$6 are made simultaneously but with different techniques.
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