| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms {nU=%w"\
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High-precision prisms, having maximum angle tolerances ^k<o T'89
of 1 to 3 arcsec, find increasing application in optical metrology. h<~7"ONhV
Reported interferometric techniques for measuring O9:U8$*
the wedge angles of such prisms achieve a precision of up 0Ia( $.1mY
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques {\[5}nV
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric k%^lF?_0I
methods have made use of goniometers,2 dK>7fy;mv
spectrometers,3 master prisms,4,5 and collimators.6 However, &>H!}"Yk
in the literature there are few reported methods for )Wb0u0)_
measuring the pyramidal error, and the majority rely on QNDHOo>v
visual observation,2,7,8 by which it is only possible to measure _ 84ut
pyramidal errors to the order of 1 arcmin ~Ref. 8!. U4G`ZK v(!
In the new arrangement presented here, one can measure T wgrR tj'
the prism angle and the pyramidal error separately or in fA89|NTSUh
combination. This is possible because the measurements U!Ek'
are made simultaneously but with different techniques.
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