| 电子厂女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms b}"/K$` Fd
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High-precision prisms, having maximum angle tolerances s?Q `#qD
of 1 to 3 arcsec, find increasing application in optical metrology. 7DYD+N+T
Reported interferometric techniques for measuring V$v;lvt^Uq
the wedge angles of such prisms achieve a precision of up ! ;\-V} V
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques * fd` .}
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric 5 h{Hf]A
methods have made use of goniometers,2 Y6N+,FAk+J
spectrometers,3 master prisms,4,5 and collimators.6 However, <K\F/`c
in the literature there are few reported methods for #kb(2Td
measuring the pyramidal error, and the majority rely on :&:>sd(QD
visual observation,2,7,8 by which it is only possible to measure G,"$Erx
pyramidal errors to the order of 1 arcmin ~Ref. 8!. W'
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In the new arrangement presented here, one can measure O_iX 1@SW
the prism angle and the pyramidal error separately or in ;% k%AXw
combination. This is possible because the measurements 4x C0Aw
are made simultaneously but with different techniques.
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