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电子厂女工xp 2024-05-14 08:52

Measuring the angles and pyramidal error of high-precision prisms

Measuring the angles and pyramidal error of high-precision prisms YC*`n3D|'  
V@1,((,l  
High-precision prisms, having maximum angle tolerances wvr`~e  
of 1 to 3 arcsec, find increasing application in optical metrology. >R\@W(-g`  
Reported interferometric techniques for measuring bF +d_t  
the wedge angles of such prisms achieve a precision of up KT<N ;[;  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques T%YN(f  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric V:AA{<  
methods have made use of goniometers,2 eYv+tjIF  
spectrometers,3 master prisms,4,5 and collimators.6 However, %r:4'$E7|  
in the literature there are few reported methods for \PmM856=ms  
measuring the pyramidal error, and the majority rely on UK[+I]I p  
visual observation,2,7,8 by which it is only possible to measure +]Z *_?j9{  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. 8yuTT^  
In the new arrangement presented here, one can measure CY!H)6k  
the prism angle and the pyramidal error separately or in Jf@Xz7{z  
combination. This is possible because the measurements !~-@sq  
are made simultaneously but with different techniques.
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