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电子厂女工xp 2024-05-14 08:52

Measuring the angles and pyramidal error of high-precision prisms

Measuring the angles and pyramidal error of high-precision prisms puz~Rfn#*  
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High-precision prisms, having maximum angle tolerances e;<=aa)}?  
of 1 to 3 arcsec, find increasing application in optical metrology. .~6p/fHX  
Reported interferometric techniques for measuring kGMI ?  
the wedge angles of such prisms achieve a precision of up eVDI7W:(Sn  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques (;'?56  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric ALiXT8q  
methods have made use of goniometers,2 ?j8F5(HF?  
spectrometers,3 master prisms,4,5 and collimators.6 However, vd9><W  
in the literature there are few reported methods for n-{G19?  
measuring the pyramidal error, and the majority rely on g Xvuv^  
visual observation,2,7,8 by which it is only possible to measure ND7 gxt-B  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. _}7N,Cx   
In the new arrangement presented here, one can measure R1FBH:Iu  
the prism angle and the pyramidal error separately or in 969*mcq'  
combination. This is possible because the measurements T'l >$6  
are made simultaneously but with different techniques.
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