cswmsc |
2007-02-28 23:18 |
真空术语全集
“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 :sM|~gT --------------------------------------------------- 28Q`O$=v 真空术语 HHtp.;L/ v }P~g 1.标准环境条件 standard ambient condition: qY#*zx 2.气体的标准状态 standard reference conditions forgases: WDgp(Av! 3.压力(压强)p pressure: ChGwG.-%L 4.帕斯卡Pa pascal: 'KyT]OObS 5.托Torr torr: 1NJ*EzJ~? 6.标准大气压atm standard atmosphere: 1&wZJP= 7.毫巴mbar millibar: 2NE/ZqREg 8.分压力 partial pressure: _H:SoJ' 9.全压力 total pressure: 5nf|CQH6? 10.真空 vacuum: F)v+.5T1 11.真空度 degree of vacuum: }R}tIC-: 12.真空区域 ranges of vacuum: 7+=j]+O 13.气体 gas: Fd|:7NRA< 14.非可凝气体 non-condensable gas: w)DO"Z7 15.蒸汽vapor: `1pri0! 16.饱和蒸汽压saturation vapor pressure: .[K{;^> 17.饱和度degree of saturation: vP&*(WfO) 18.饱和蒸汽saturated vapor: zIRa%%.i< 19.未饱和蒸汽unsaturated vapor: MY1
tYO 20.分子数密度n,m-3 number density of molecules: ?Vt$ 21.平均自由程ι、λ,m mean free path: "@`M>)*o 22.碰撞率ψ collision rate: w&f29#i;b 23.体积碰撞率χ volume collision rate: MV=.(Zs 24.气体量G quantity of gas: [-Q"A
6!Zd 25.气体的扩散 diffusion of gas: r@s, cCK9? 26.扩散系数D diffusion coefficient; diffusivity: S2j7(T;~YB 27.粘滞流 viscous flow: X,T^(p 28.粘滞系数η viscous factor: uiHlaMf 29.泊肖叶流 poiseuille flow: Z AZQFr'* 30.中间流 intermediate flow: Nnv&~D> 31.分子流 molecular flow: S7N54X2JwL 32克努曾数 number of knudsen: )
e;F@o3 33.分子泻流 molecular effusion; effusive flow: nJ2l$J< 34.流逸 transpiration: !j7b7<wR 35.热流逸 thermal transpiration: G)b ]uX 36.分子流率qN molecular flow rate; molecular flux: S5bk<8aPP 37.分子流率密度 molecular flow rate density; density of molecular flux: R<JI 38.质量流率qm mass flow rare: aY3kww` 39.流量qG throughput of gas: ~{+J~5!;<H 40.体积流率qV volume flow rate: 73N%_8DH 41.摩尔流率qυ molar flow rate: 7d'@Z2%J0 42.麦克斯韦速度分布 maxwellian velocity distribution: |k?,4
Pk 43.传输几率Pc transmission probability: <NS=<'U 44.分子流导CN,UN molecular conductance: w8{deSdfP 45.流导C,U conductance: !kmo%+ 46.固有流导Ci,Ui intrinsic conductance: N} Q, 47.流阻W resistance: 17};I7 48.吸附 sorption: A3 j>R477A 49.表面吸附 adsorption: UDp"+nS 50.物理吸附physisorption: 'OF)`5sj 51.化学吸附 chemisorption: _$Z46wHmB 52.吸收absorption: [nG/>Z]W 53.适应系数α accommodation factor: 14zo0ANM 54.入射率υ impingement rate: c}rRNS$F 55.凝结率condensation rate: M~
*E! 56.粘着率 sticking rate: sH+]lTSX6{ 57.粘着几率Ps sticking probability: QuF%m^aE 58.滞留时间τ residence time: TXrC5AJx 59.迁移 migration: !pDS*{)E 60.解吸 desorption: `=CF
|I 61.去气 degassing: 4I,@aj46 62.放气 outgassing: gvwR16N 63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: E}"&?oY 64.蒸发率 evaporation rate: ?]paAP;4 65.渗透 permeation: 1X#`NUJ?2 66.渗透率φ permeability: lkw[Z}\ 67.渗透系数P permeability coefficient F}.Af=<Q 2. 1.真空泵 vacuum pumps " I _T 1-1.容积真空泵 positive displacement pump: 7a@V2cr@ ⑴.气镇真空泵 gas ballast vacuum pump: =]7 \-- ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: h ]MSjC.X ⑶.干封真空泵 dry-sealed vacuum pump: ?$r+#'asd( ⑷.往复真空泵 piston vacuum pump: R@"N{ [9 ⑸.液环真空泵 liquid ring vacuum pump: ;#f%vs>Y7i ⑹.旋片真空泵 sliding vane rotary vacuum pump: egP3q5~ ⑺.定片真空泵 rotary piston vacuum pump: jp[QA\ ⑻.滑阀真空泵 rotary plunger vacuum pump: O`@$YXuD ⑼.余摆线真空泵 trochoidal vacuum pump: XP{ nf9& ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: nq6]?ZJ ⑾.罗茨真空泵 roots vacuum pump: "rAm6b-` 1-2.动量传输泵 kinetic vacuum pump: XWB>'
UDQ# ⑴.牵引分子泵molecular drag pump: /~AwX8X ⑵.涡轮分子泵turbo molecular pump: \&e+f#!u ⑶.喷射真空泵ejector vacuum pump: e3(0L I ⑷.液体喷射真空泵liquid jet vacuum pump: QjQJ " ⑸.气体喷射真空泵gas jet vacuum pump: B]]M?pS ⑹.蒸汽喷射真空泵vapor jet vacuum pump : Dvx"4EA{7{ ⑺.扩散泵diffusion pump : 4J I;NN ⑻.自净化扩散泵self purifying diffusion pump: `w~ 9/sty ⑼.分馏扩散泵 fractionating diffusion pump : 0Fi7| ⑽.扩散喷射泵diffusion ejector pump : t^h>~o'\ ⑾.离子传输泵ion transfer pump: ?V7[,I1? 1-3.捕集真空泵 entrapment vacuum pump: ;M'R/JlUN ⑴吸附泵adsorption pump: kWoy%?|RRa ⑵.吸气剂泵 getter pump: '{7A1yJnY% ⑶.升华(蒸发)泵 sublimation (evaporation)pump : xRaYm ⑷.吸气剂离子泵getter ion pump: uO":\<1# ⑸.蒸发离子泵 evaporation ion pump: ]v9<^! ⑹.溅射离子泵sputter ion pump: 71)HxC[6vA ⑺.低温泵cryopump: "bw4{pa+ kSI,Q!e\ 2.真空泵零部件 q<;9!2py
2-1.泵壳 pump case: @${!C\([1 2-2.入口 inlet: hcN$p2- 2-3.出口outlet: TmQ2;3% 2-4.旋片(滑片、滑阀)vane; blade : Q
|l93Rb` 2-5.排气阀discharge valve: xQmk2S`
y 2-6.气镇阀gas ballast valve: :X;8$.z 2-7.膨胀室expansion chamber: Ebq5P$ 2-8.压缩室compression chamber: }4bwLO 2-9.真空泵油 vacuum pump oil: _ROe!w 1 2-10.泵液 pump fluid: Z#oo8 2-11.喷嘴 nozzle: M8g=t[\ 2-13.喷嘴扩张率nozzle expansion rate: <'gCI Ia2 2-14.喷嘴间隙面积 nozzle clearance area : O %)+ w 2-15.喷嘴间隙nozzle clearance: H=wmN0s{< 2-16.射流jet: G=b`w;oL: 2-17.扩散器diffuser: <:%Iq13D 2-18.扩散器喉部diffuser thoat: %K%8
~B 2-19.蒸汽导管vapor tube(pipe;chimney): &Nec(q< 2-20.喷嘴组件nozzle assembly: 2+Fq'! 2-21.下裙skirt: mFo6f\DHr`
o>W}1_ 3.附件 Fa>Y]Y0r 3-1阱trap: sN;U,{ ⑴.冷阱 cold trap: 'x!q*|zF2 ⑵.吸附阱sorption trap: 6aj)Fe'2 ⑶.离子阱ion trap: =e ;\I/ ⑷.冷冻升华阱 cryosublimation trap: }>p)|YT"/ 3-2.挡板baffle: \x|(`;{ 3-3.油分离器oil separator: FoEZ1O< 3-4.油净化器oil purifier: f[dwu39k 3-5.冷凝器condenser: 0TVO'$Gvi s2d;601*b 4.泵按工作分类 YjsaTdZ!& 4-1.主泵main pump: `T~M:\^D 4-2.粗抽泵roughing vacuum pump: .JH3,L"S^ 4-3.前级真空泵backing vacuum pump: a?D\H5TF- 4-4.粗(低)真空泵 roughing(low)vacuum pump: Z9! goI 4-5.维持真空泵holding vacuum pump: 0"<gg5 4-6.高真空泵high vacuum pump: *emUQ/uvf 4-7.超高真空泵ultra-high vacuum pump: S'?XI@t[ 4-8.增压真空泵booster vacuum pump: Fmsg*s7w fTH?t_e 5.真空泵特性 WM>9sJf 5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: r3iNfY b 5-2.真空泵的抽气量Q throughput of vacuum pump:。
Pp26UWW 5-3.起动压力starting pressure: >~ne(n4qy 5-4.前级压力 backing pressure : 1{u;-pg 5-5.临界前级压力 critical backing pressure: 6o{anHBB 5-6.最大前级压力maximum backing pressure: ,@ [Q:fY 5-7.最大工作压力maximum working pressure: -EITz 5-8.真空泵的极限压力ultimate pressure of a pump: qk:F6kL\` 5-9.压缩比compression ratio: O>'o; 0 5-10.何氏系数Ho coefficient: Q_@
Z.{ 5-11.抽速系数speed factor: Rfgc^ 3:j 5-12.气体的反扩散back-diffusion of gas: !7}5"j
;A 5-13.泵液返流back-streaming of pump fluid: Z\@vN[[ 5-14.返流率back-streaming rate &5zUk++ 5-15.返迁移back-migration: ;E##bdSCA 5-16.爆腾bumping: w8@Ok_fj 5-17.水蒸气允许量qm water vapor tolerable load: KiCZEA
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: eo,m ^& 5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: \8<bb<` 5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump LkNfcBa_ 3. 1.一般术语 Y`c\{&M6 1-1.压力计pressure gauge: %P yU3 1-2.真空计vacuum gauge: C~6aX/: ⑴.规头(规管)gauge head: )B8[w ⑵.裸规nude gauge : # Dy;x\a ⑶.真空计控制单元gauge control unit : {_Ke'"
k ⑷.真空计指示单元gauge indicating unit : a{]1H4+bQ |w\D6d]o 2.真空计一般分类 'kYV}rq;l 2-1.压差式真空计differential vacuum gauge: ?VReKv1\ 2-2.绝对真空计 absolute vacuum gauge: |!&,etu 2-3.全压真空计total pressure vacuum gauge: /i$&89yod 2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: A0&~U0*(~ 2-5.相对真空计relative vacuum gauge : (VC_vz- {!E<hQ2<$9 3.真空计特性 :Z`4ea"w 3-1.真空计测量范围pressure range of vacuum gauge: NUm3E4 3-2.灵敏度系数sensitivity coefficient: rWa7"<`p 3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): a1om8! C 3-5.规管光电流photon current of vacuum gauge head: %OW[rbE. 3-6.等效氮压力equivalent nitrogen pressure : Tk+\Biq
3-7.X射线极限值 X-ray limit: m>UJ; F 3-8.逆X射线效应anti X-ray effect: b_][Jye&P 3-9.布利尔斯效应blears effect: l*%?C* +5^*c^C 4.全压真空计 [[TB.'k 4-1.液位压力计liquid level manometer: Sgr<z d'b 4-2.弹性元件真空计elastic element vacuum gauge: #<se0CJB 4-3.压缩式真空计compression gauge: 7b
Gzun& 4-4.压力天平pressure balance: 2]Y (<PC 4-5.粘滞性真空计viscosity gauge : t F`>.= 4-6.热传导真空计thermal conductivity vacuum gauge : (-"A5(X:/ 4-7.热分子真空计thermo-molecular gauge: /\Q{i#v 4-8.电离真空计ionization vacuum gauge: Gb~q:&IUr 4-9.放射性电离真空计radioactive ionization gauge: 62Jn8DwAT 4-10.冷阴极电离真空计cold cathode ionization gauge: IO,kP`Wcx 4-11.潘宁真空计penning gauge: to,=Q8)0 4-12.冷阴极磁控管真空计cold cathode magnetron gauge: mflI> J=g 4-13.放电管指示器discharge tube indicator: o@;w!' 4-14.热阴极电离真空计hot cathode ionization gauge: hW/*]7AM^ 4-15.三极管式真空计triode gauge: E1VCm[j2 4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: l;?.YtMg 4-17.B-A型电离真空计Bayard-Alpert gauge: +Cau/sPXL 4-18.调制型电离真空计modulator gauge: J-u,6c 4-19.抑制型电离真空计suppressor gauge: z*x6V0'yt 4-20.分离型电离真空计extractor gauge: y@hdN=- 4-21.弯注型电离真空计bent beam gauge: r$0=b
- 4-22.弹道型电离真空计 orbitron gauge : }KZ/>Z;^ 4-23.热阴极磁控管真空计hot cathode magnetron gauge: %zX'u.}8# PQf FpmG 5.分压真空计(分压分析器) EiT
raWV"O 5-1.射频质谱仪radio frequency mass spectrometer: 2|Tt3/Rn 5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: : l]>nF4 5-3.单极质谱仪momopole mass spectrometer: ;z%& 3u/ 5-4.双聚焦质谱仪double focusing mass spectrometer: 0BE%~W 5-5.磁偏转质谱仪magnetic deflection mass spectrometer: WqTW@-}I D 5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: 9:BGA/? 5-7.回旋质谱仪omegatron mass spectrometer: XFBk:~}sI 5-8.飞行时间质谱仪time of flight mass spectrometer: nP0}vX)< c&R . 6.真空计校准 dQ^k- 6-1.标准真空计reference gauges: J-X5n 3I& 6-2.校准系统system of calibration: A.<X78!^ 6-3.校准系数K calibration coefficient: ',O@0L]L 6-4.压缩计法meleod gauge method: Mzb_o2^( 6-5.膨胀法expansion method: S
- 7JDE> 6-6.流导法flow method: #XmN&83_ 4. 1.真空系统vacuum system 8YYY *> 1-1.真空机组pump system: AM Rj N; 1-2.有油真空机组pump system used oil : d$Mj5wN:q 1-3.无油真空机组oil free pump system Y,)9{T 1-4.连续处理真空设备continuous treatment vacuum plant: 6tnAE': 1-5.闸门式真空系统vacuum system with an air-lock: mexI} 1-6.压差真空系统differentially pumped vacuum system: iPkG=*Ip(% 1-7.进气系统gas admittance system: Pu*st=KGB TyK;
q{ 2.真空系统特性参量 ~I'Z=Wo 2-1.抽气装置的抽速volume flow rate of a pumping unit : 06=eA0JI 2-2.抽气装置的抽气量throughput of a pumping unit : R6M@pO 2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 0+S:2i/G 2-4.真空系统的漏气速率leak throughput of a vacuum system: `|PxEif+J 2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: K1eoZ8=! 2-6.极限压力ultimate pressure: 7& | |