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cswmsc 2007-02-28 23:18

真空术语全集

“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 :sM|~gT  
--------------------------------------------------- 28Q`O$=v  
真空术语 HHtp.; L/  
v }P~g  
1.标准环境条件 standard ambient condition: qY#*zx  
2.气体的标准状态 standard reference conditions forgases: WDgp(Av!  
3.压力(压强)p pressure: ChGwG.-%L  
4.帕斯卡Pa pascal: 'KyT]OObS  
5.托Torr torr: 1NJ*EzJ~?  
6.标准大气压atm standard atmosphere: 1&wZJP=  
7.毫巴mbar millibar: 2NE/ZqREg  
8.分压力 partial pressure: _H:SoJ'  
9.全压力 total pressure: 5nf|CQH6?  
10.真空 vacuum: F)v+.5T1  
11.真空度 degree of vacuum: }R}tIC-:  
12.真空区域 ranges of vacuum: 7+=j]+O  
13.气体 gas: Fd|:7NRA<  
14.非可凝气体 non-condensable gas: w )DO"Z7  
15.蒸汽vapor: `1pri0!  
16.饱和蒸汽压saturation vapor pressure: .[K{;^>  
17.饱和度degree of saturation: vP&*(WfO)  
18.饱和蒸汽saturated vapor: zIRa%%.i<  
19.未饱和蒸汽unsaturated vapor: MY1 tYO  
20.分子数密度n,m-3 number density of molecules: ?Vt$  
21.平均自由程ι、λ,m mean free path: "@`M>)*o  
22.碰撞率ψ collision rate: w&f29#i;b  
23.体积碰撞率χ volume collision rate: MV=.(Zs  
24.气体量G quantity of gas: [-Q"A 6!Zd  
25.气体的扩散 diffusion of gas: r@s, cCK9?  
26.扩散系数D diffusion coefficient; diffusivity: S2j7(T;~YB  
27.粘滞流 viscous flow: X ,T^(p  
28.粘滞系数η viscous factor: uiHlaMf  
29.泊肖叶流 poiseuille flow: Z AZQFr'*  
30.中间流 intermediate flow: Nnv&~ D>  
31.分子流 molecular flow: S7N54X2JwL  
32克努曾数 number of knudsen: ) e;F@o3  
33.分子泻流 molecular effusion; effusive flow: nJ2l$J<  
34.流逸 transpiration: !j7b7<wR  
35.热流逸 thermal transpiration: G)b]uX  
36.分子流率qN molecular flow rate; molecular flux: S5bk<8aPP  
37.分子流率密度 molecular flow rate density; density of molecular flux: R<JI  
38.质量流率qm mass flow rare: aY3kww`  
39.流量qG throughput of gas: ~{+J~5!;<H  
40.体积流率qV volume flow rate: 73N%_8DH  
41.摩尔流率qυ molar flow rate: 7d'@Z2%J0  
42.麦克斯韦速度分布 maxwellian velocity distribution: |k?,4 Pk  
43.传输几率Pc transmission probability: <NS= <'U  
44.分子流导CN,UN molecular conductance: w8{deSdfP  
45.流导C,U conductance: !kmo% +  
46.固有流导Ci,Ui intrinsic conductance: N}Q,  
47.流阻W resistance: 17};I7  
48.吸附 sorption: A3 j>R477A  
49.表面吸附 adsorption: UDp"+nS  
50.物理吸附physisorption: 'OF)`5sj  
51.化学吸附 chemisorption: _$Z46wHmB  
52.吸收absorption: [nG/>Z]W  
53.适应系数α accommodation factor: 14zo0ANM  
54.入射率υ impingement rate: c}rRNS$F  
55.凝结率condensation rate: M~ *E!  
56.粘着率 sticking rate: sH+]lTSX6{  
57.粘着几率Ps sticking probability: QuF%m^aE  
58.滞留时间τ residence time: TXrC5AJx  
59.迁移 migration: !pDS*{)E  
60.解吸 desorption: `=CF | I  
61.去气 degassing: 4I,@aj46  
62.放气 outgassing: gvwR16N  
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: E}" &? oY  
64.蒸发率 evaporation rate: ?]paAP;4  
65.渗透 permeation: 1X#`NUJ?2  
66.渗透率φ permeability: lkw[Z}\  
67.渗透系数P permeability coefficient F}.Af=<Q  
2.   1.真空泵 vacuum pumps " I_T  
1-1.容积真空泵 positive displacement pump: 7a@V2cr@  
⑴.气镇真空泵 gas ballast vacuum pump: =]7 \--  
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: h]MSjC.X  
⑶.干封真空泵 dry-sealed vacuum pump: ?$r+#'asd(  
⑷.往复真空泵 piston vacuum pump: R@"N{ [9  
⑸.液环真空泵 liquid ring vacuum pump: ;#f%vs>Y7i  
⑹.旋片真空泵 sliding vane rotary vacuum pump: egP3q5~  
⑺.定片真空泵 rotary piston vacuum pump: jp[QA\  
⑻.滑阀真空泵 rotary plunger vacuum pump: O`@$YXuD  
⑼.余摆线真空泵 trochoidal vacuum pump: XP{ nf9&  
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: nq6]?ZJ  
⑾.罗茨真空泵 roots vacuum pump: "rAm6b-`  
1-2.动量传输泵 kinetic vacuum pump: XWB>' UDQ#  
⑴.牵引分子泵molecular drag pump: /~AwX8X  
⑵.涡轮分子泵turbo molecular pump: \&e+f#!u  
⑶.喷射真空泵ejector vacuum pump: e3(0L I  
⑷.液体喷射真空泵liquid jet vacuum pump: Q jQJ "  
⑸.气体喷射真空泵gas jet vacuum pump: B]]M?pS  
⑹.蒸汽喷射真空泵vapor jet vacuum pump : Dvx"4EA{7{  
⑺.扩散泵diffusion pump : 4J I;NN  
⑻.自净化扩散泵self purifying diffusion pump: `w~ 9/sty  
⑼.分馏扩散泵 fractionating diffusion pump : 0Fi7|  
⑽.扩散喷射泵diffusion ejector pump : t^h>~o' \  
⑾.离子传输泵ion transfer pump: ?V7[,I1?  
1-3.捕集真空泵 entrapment vacuum pump: ;M'R/JlUN  
⑴吸附泵adsorption pump: kWoy%?|RRa  
⑵.吸气剂泵 getter pump: '{7A1yJnY%  
⑶.升华(蒸发)泵 sublimation (evaporation)pump : xRaYm  
⑷.吸气剂离子泵getter ion pump: uO":\<1#  
⑸.蒸发离子泵 evaporation ion pump: ]v9<^!  
⑹.溅射离子泵sputter ion pump: 71)HxC[6vA  
⑺.低温泵cryopump: "bw4 {pa+  
kSI,Q!e\  
2.真空泵零部件 q<;9!2py  
2-1.泵壳 pump case: @${!C\([1  
2-2.入口 inlet: hcN$p2-  
2-3.出口outlet: TmQ2;3%  
2-4.旋片(滑片、滑阀)vane; blade : Q |l93Rb`  
2-5.排气阀discharge valve: xQmk2S` y  
2-6.气镇阀gas ballast valve: :X ;8$.z  
2-7.膨胀室expansion chamber: Ebq5P$  
2-8.压缩室compression chamber: }4bwLO  
2-9.真空泵油 vacuum pump oil: _ROe!w  1  
2-10.泵液 pump fluid: Z#o o8  
2-11.喷嘴 nozzle: M8g=t[\  
2-13.喷嘴扩张率nozzle expansion rate: <'gCIIa2  
2-14.喷嘴间隙面积 nozzle clearance area : O %)+ w  
2-15.喷嘴间隙nozzle clearance: H=wmN0s{<  
2-16.射流jet: G=b`w;oL:  
2-17.扩散器diffuser: <:%Iq13D  
2-18.扩散器喉部diffuser thoat: %K%8 ~B  
2-19.蒸汽导管vapor tube(pipe;chimney): &Nec(q<  
2-20.喷嘴组件nozzle assembly: 2+Fq'!  
2-21.下裙skirt: mFo6f\DHr`  
o >W}1_  
3.附件 Fa>Y]Y0r  
3-1阱trap: sN;U,{  
⑴.冷阱 cold trap: 'x!q*|zF2  
⑵.吸附阱sorption trap: 6aj)Fe'2  
⑶.离子阱ion trap: =e ;\I/  
⑷.冷冻升华阱 cryosublimation trap: }>p)|Y T"/  
3-2.挡板baffle: \x|(`;{  
3-3.油分离器oil separator: F oEZ1O<  
3-4.油净化器oil purifier: f[dwu39k  
3-5.冷凝器condenser: 0TVO'$Gvi  
s2d;601*b  
4.泵按工作分类 YjsaTdZ!&  
4-1.主泵main pump: `T~M:\^D  
4-2.粗抽泵roughing vacuum pump: .JH3,L"S^  
4-3.前级真空泵backing vacuum pump: a?D\H5TF-  
4-4.粗(低)真空泵 roughing(low)vacuum pump: Z9!goI  
4-5.维持真空泵holding vacuum pump: 0"<g g5  
4-6.高真空泵high vacuum pump: *emUQ/uvf  
4-7.超高真空泵ultra-high vacuum pump: S'?XI@t[  
4-8.增压真空泵booster vacuum pump: Fmsg*s7w  
fTH?t_e  
5.真空泵特性 WM>9sJf  
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: r3iNfY b  
5-2.真空泵的抽气量Q throughput of vacuum pump:。 Pp26UWW  
5-3.起动压力starting pressure: >~ne(n4qy  
5-4.前级压力 backing pressure : 1{u;-pg  
5-5.临界前级压力 critical backing pressure: 6o{anHBB  
5-6.最大前级压力maximum backing pressure: ,@[Q:fY  
5-7.最大工作压力maximum working pressure:  -EITz  
5-8.真空泵的极限压力ultimate pressure of a pump: qk:F6kL\`  
5-9.压缩比compression ratio: O >'o;0  
5-10.何氏系数Ho coefficient: Q_@ Z.{  
5-11.抽速系数speed factor: Rfgc^3:j  
5-12.气体的反扩散back-diffusion of gas: !7}5"j ;A  
5-13.泵液返流back-streaming of pump fluid: Z\@vN[[  
5-14.返流率back-streaming rate &5zUk++  
5-15.返迁移back-migration: ;E##bdSCA  
5-16.爆腾bumping: w8@ Ok_fj  
5-17.水蒸气允许量qm water vapor tolerable load: KiCZEA  
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: eo,m ^&  
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: \8<bb<`  
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump LkNfcBa_  
3.   1.一般术语 Y`c\{&M6  
1-1.压力计pressure gauge: %PyU3  
1-2.真空计vacuum gauge: C~6aX/:  
⑴.规头(规管)gauge head: )B8[w  
⑵.裸规nude gauge : #Dy;x\a  
⑶.真空计控制单元gauge control unit : {_Ke'" k  
⑷.真空计指示单元gauge indicating unit : a{]1H4+bQ  
|w\D6d]o  
2.真空计一般分类 'kYV}rq;l  
2-1.压差式真空计differential vacuum gauge: ?VReKv1\  
2-2.绝对真空计 absolute vacuum gauge: |!&,etu  
2-3.全压真空计total pressure vacuum gauge: /i$&89yod  
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: A0&~U0*(~  
2-5.相对真空计relative vacuum gauge : (VC_vz-  
{!E<hQ2<$9  
3.真空计特性 :Z`4ea"w  
3-1.真空计测量范围pressure range of vacuum gauge: NUm3E4  
3-2.灵敏度系数sensitivity coefficient: rWa7"<`p  
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): a1om8!C  
3-5.规管光电流photon current of vacuum gauge head: %OW[rbE.  
3-6.等效氮压力equivalent nitrogen pressure : Tk+\Biq   
3-7.X射线极限值 X-ray limit: m>UJ; F  
3-8.逆X射线效应anti X-ray effect: b_][Jye&P  
3-9.布利尔斯效应blears effect: l*%?C*  
+5^*c^C  
4.全压真空计 [[TB.'k  
4-1.液位压力计liquid level manometer: Sgr<z d'b  
4-2.弹性元件真空计elastic element vacuum gauge: #<se0CJB  
4-3.压缩式真空计compression gauge: 7b Gzun&  
4-4.压力天平pressure balance: 2]Y (<PC  
4-5.粘滞性真空计viscosity gauge : tF`>.=  
4-6.热传导真空计thermal conductivity vacuum gauge : (-"A5(X:/  
4-7.热分子真空计thermo-molecular gauge: /\Q{i#v  
4-8.电离真空计ionization vacuum gauge: Gb~q:&IUr  
4-9.放射性电离真空计radioactive ionization gauge: 62Jn8DwAT  
4-10.冷阴极电离真空计cold cathode ionization gauge: IO,kP`Wcx  
4-11.潘宁真空计penning gauge: to,=Q8 )0  
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: mflI>J=g  
4-13.放电管指示器discharge tube indicator: o@ ;w!'  
4-14.热阴极电离真空计hot cathode ionization gauge: hW/*]7AM^  
4-15.三极管式真空计triode gauge: E1VCm[j2  
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: l;?.YtMg  
4-17.B-A型电离真空计Bayard-Alpert gauge: +Cau/sPXL  
4-18.调制型电离真空计modulator gauge: J-u,6c  
4-19.抑制型电离真空计suppressor gauge: z*x6V0'yt  
4-20.分离型电离真空计extractor gauge: y@hdN=-  
4-21.弯注型电离真空计bent beam gauge: r$0=b -  
4-22.弹道型电离真空计 orbitron gauge : }KZ/>Z;^  
4-23.热阴极磁控管真空计hot cathode magnetron gauge: %zX'u.}8#  
PQf FpmG  
5.分压真空计(分压分析器) EiT raWV"O  
5-1.射频质谱仪radio frequency mass spectrometer: 2|Tt3/Rn  
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: :  l]>nF4  
5-3.单极质谱仪momopole mass spectrometer: ;z%& 3u/  
5-4.双聚焦质谱仪double focusing mass spectrometer: 0BE%~W  
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: WqTW@-}ID  
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: 9:BGA/?  
5-7.回旋质谱仪omegatron mass spectrometer: XFBk:~}sI  
5-8.飞行时间质谱仪time of flight mass spectrometer: nP0} vX)<  
c&R .  
6.真空计校准 dQ^k-  
6-1.标准真空计reference gauges: J-X5n 3I&  
6-2.校准系统system of calibration: A.<X78!^  
6-3.校准系数K calibration coefficient: ',O@0L]L  
6-4.压缩计法meleod gauge method: Mzb_o2^(  
6-5.膨胀法expansion method: S - 7JDE>  
6-6.流导法flow method: #XmN&83_  
4.   1.真空系统vacuum system 8YYY *>  
1-1.真空机组pump system: AM Rj N;  
1-2.有油真空机组pump system used oil : d$Mj5wN:q  
1-3.无油真空机组oil free pump system Y,)9{T  
1-4.连续处理真空设备continuous treatment vacuum plant: 6tnAE':  
1-5.闸门式真空系统vacuum system with an air-lock: mexI }  
1-6.压差真空系统differentially pumped vacuum system: iPkG=*Ip(%  
1-7.进气系统gas admittance system: Pu*st=KGB  
TyK; q{  
2.真空系统特性参量 ~I'Z=Wo  
2-1.抽气装置的抽速volume flow rate of a pumping unit : 06=eA0JI  
2-2.抽气装置的抽气量throughput of a pumping unit : R 6M@pO  
2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 0+S:2i/G  
2-4.真空系统的漏气速率leak throughput of a vacuum system: `|PxEif+J  
2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: K1eoZ8=!  
2-6.极限压力ultimate pressure: 7&sCEYEb  
2-7.残余压力residual pressure: se)I2T{J  
2-8.残余气体谱residual gas spectrum: |\}f)Xp-  
2-9.基础压力base pressure: cBm3|@7  
2-10.工作压力working pressure: +ckj]yA;  
2-11.粗抽时间roughing time: -''vxt?7H&  
2-12.抽气时间pump-down time: ,2?C^gxt  
2-13.真空系统时间常数time constant of a vacuum system: 7l:H~"9r  
2-14.真空系统进气时间venting time: ow`\7qr  
:z"Uw*  
3.真空容器 o/&:w z  
3-1.真空容器;真空室vacuum chamber: bxyU[`  
3-2.封离真空装置sealed vacuum device: ^Xb!dnT.*a  
3-3.真空钟罩vacuum bell jar: [PQG]"  
3-4.真空容器底板vacuum base plate: '.^JN@  
3-5.真空岐管vacuum manifold: | _S9U|  
3-6.前级真空容器(贮气罐)backing reservoir: HX <;=m  
3-7.真空保护层outer chamber: 16aaIK  
3-8.真空闸室vacuum air lock: *}2o \h6Q  
3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: /\\C&Px  
vhUuf+P*  
4.真空封接和真空引入线 B! -W765Y  
4-1.永久性真空封接permanent seal : Sa<R8X' J  
4.2.玻璃分级过渡封接graded seal : LLU>c]a  
4-3.压缩玻璃金属封接compression glass-to-metal seal: LpF6e9V\Wp  
4-4.匹配式玻璃金属封接matched glass-to-metal seal: p]aIMF_  
4-5.陶瓷金属封接ceramic-to-metal seal: ''WX  
4-6.半永久性真空封接semi-permanent seal : ?j OpW1  
4-7.可拆卸的真空封接demountable joint: Y#N'bvE|%  
4-8.液体真空封接liquid seal `[ne<F?e  
4-9.熔融金属真空封接molten metal seal: X0C\87xfG  
4-10.研磨面搭接封接ground and lapped seal: ~MQN&  
4-11.真空法兰连接vacuum flange connection: }M9'N%PU  
4-12.真空密封垫vacuum-tight gasket: c76^x   
4-13.真空密封圈ring gasket: 82w< q(  
4-14.真空平密封垫flat gasket: ll5Kd=3  
4-15.真空引入线feedthrough leadthrough: ^.<IT"  
4-16.真空轴密封shaft seal: SE/@li  
4-17.真空窗vacuum window: $[1 M2>[  
4-18.观察窗viewing window: T&0tW"r?  
@{$SjR8Q $  
5.真空阀门 JE?XZp@V  
5-1.真空阀门的特性characteristic of vacuum valves: %ZZ}TUI W  
⑴.真空阀门的流导conductance of vacuum valves: .}0Cg2W  
⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: h7Ma`w\-  
5-2.真空调节阀regulating valve: #p[=iP  
5-3.微调阀 micro-adjustable valve: w}2yi#E[  
5-4.充气阀charge valve: * dNMnZ@Y  
5-5.进气阀gas admittance valve: Sa@Xh,y Z  
5-6.真空截止阀break valve: {fS/ZG"5<t  
5-7.前级真空阀backing valve: 2s(K4~ee  
5-8.旁通阀 by-pass valve: |Rab'9U^  
5-9.主真空阀main vacuum valve: y[$e]N  
5-10.低真空阀low vacuum valve: =!{dKz-&  
5-11.高真空阀high vacuum valve: !}vz_6)  
5-12.超高真空阀;UHV阀 ultra-high vacuum valve: i\ PN  
5-13.手动阀manually operated valve: jwE<}y I  
5-14.气动阀pneumatically operated valve: u{_T,k<!  
5-15.电磁阀electromagnetically operated valve: KT|$vw2b  
5-16.电动阀valve with electrically motorized operation: WIhf*LF"  
5-17.挡板阀baffle valve: 8p!PR^OM@  
5-18.翻板阀flap valve: 8m6L\Z&  
5-19.插板阀gate valve: #6YNgJNk  
5-20.蝶阀butterfly valve: BE m%x 0y  
z24-h C  
6.真空管路 &XZ>}^lD^  
6-1.粗抽管路roughing line: EoY570PN  
6-2.前级真空管路backing line: HAU8H'h  
6-3.旁通管路;By-Pass管路 by-pass line: [}VEDx  
6-4.抽气封口接头pumping stem: Oi{jzP  
6-5.真空限流件limiting conductance:       9> (8r+  
6-6.过滤器filter: gmM79^CEF  
5.   1.一般术语 T[7- 3[w<)  
1-1真空镀膜vacuum coating: %iX +"  
1-2基片substrate: Yt{Y)=_t  
1-3试验基片testing substrate: vUCU%>F  
1-4镀膜材料coating material: PVvG  
1-5蒸发材料evaporation material:  k&rl%P  
1-6溅射材料sputtering material: &KD m5p  
1-7膜层材料(膜层材质)film material: 5 &VLq  
1-8蒸发速率evaporation rate: ,0 ])]  
1-9溅射速率sputtering rate: E.BMm/WH  
1-10沉积速率deposition rate: _H;ObTiB  
1-11镀膜角度coating angle: AAs&wYp8Yh  
<CH7jbK  
2.工艺 0/*z]2  
2-1真空蒸膜vacuum evaporation coating: 0phGn+"R  
(1).同时蒸发simultaneous evaporation: . Bv;Zv  
(2).蒸发场蒸发evaporation field evaporation: a{{([uZ  
(3).反应性真空蒸发reactive vacuum evaporation: *W0`+#Dcv  
(4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: D!y Cnq=8  
(5).直接加热的蒸发direct heating evaporation: kdv>QZ  
(6).感应加热蒸发induced heating evaporation: } $OQw'L[  
(7).电子束蒸发electron beam evaporation: \75%[;.  
(8).激光束蒸发laser beam evaporation: ANWa%%\T  
(9).间接加热的蒸发indirect heating evaporation: gjwp' GN  
(10).闪蒸flash evaportion: `4$" mO>+  
2-2真空溅射vacuum sputtering: 6 .*=1P*?  
(1).反应性真空溅射 reactive vacuum sputtering: x0 j$]$  
(2).偏压溅射bias sputtering: V%3K")  
(3).直流二级溅射direct current diode sputtering: K.1#cf ^'  
(4).非对称性交流溅射asymmtric alternate current sputtering: 6>KDK<5NQ  
(5).高频二极溅射high frequency diode sputtering: |KkVt]ZQe9  
(6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: Iunt!L  
(7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: N L~}  
(8).离子束溅射ion beam sputtering: ./[t'dgC  
(9).辉光放电清洗glow discharge cleaning: 2avSsN{^  
2-3物理气相沉积PVD physical vapor deposition: #2n>J'}  
2-4化学气相沉积CVD chemical vapor deposition: 7gv kd+-*  
2-5磁控溅射magnetron sputtering: fUE jl  
2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: k%.IIVRx  
2-7空心阴极离子镀HCD hollow cathode discharge deposition: whD%Oz*f  
2-8电弧离子镀arc discharge deposition: tcmG>^YM  
p6>3 p  
3.专用部件 P=eL24j  
3-1镀膜室coating chamber: VFRUiz/C  
3-2蒸发器装置evaporator device: ) |*HkdF`  
3-3蒸发器evaporator: l0]zZcpt  
3-4直接加热式蒸发器evaporator by direct heat: (?$}Vp  
3-5间接加热式蒸发器evaporator by indirect heat: rrmr#a  
3-7溅射装置sputtering device: ``0knr <  
3-8靶target: s%I) +|  
3-10时控挡板timing shutter: Vo%@bj~>  
3-11掩膜mask: F2lTDuk>C  
3-12基片支架substrate holder: R5|c4v{B  
3-13夹紧装置clamp: pOx0f;'G+  
3-14换向装置reversing device: poQY X5  
3-15基片加热装置substrate heating device: XlR.Y~  
3-16基片冷却装置substrate colding device: \z0"  
`@-H ;  
4.真空镀膜设备 3>c<E1   
4-1真空镀膜设备vacuum coating plant: Fvl_5l  
(1).真空蒸发镀膜设备vacuum evaporation coating plant: > u~ l_?  
(2).真空溅射镀膜设备vacuum sputtering coating plant: Y}ITA=L7  
4-2连续镀膜设备continuous coating plant: l2._Z Py  
4-3半连续镀膜设备semi- continuous coating plant yX<Sk q  
6.   1.漏孔 c]#F^(-A`  
1-1漏孔leaks: ^jqQG+`?  
1-2通道漏孔channel leak: F0])g  
1-3薄膜漏孔membrane leak: <`n T+c  
1-4分子漏孔molecular leak: ^vfp;  
1-5粘滞漏孔vixcous leak: 0c /xE<h  
1-6校准漏孔calibrated leak: P^T]Ubv"  
1-7标准漏孔reference leak : 6|~N5E~SX  
1-8虚漏virtual leak: l/#;GYB]  
1-9漏率leak rate: gT?:zd=;  
1-10标准空气漏率standard air leak rate: AEp|#H' >  
1-11等值标准空气漏率equivalent standard air leak rate: 6XKiVP;h%  
1-12探索(示漏)气体: _e7 Y R+  
E.zY(#S  
2.本底 Fzt{^%\`  
2-1本底background: +VCG/J  
2-2探索气体本底search gas background : =0 mf  
2-3漂移drift: 1 cvoI  
2-4噪声noise: 0 z.oPV@  
p gW BW9\  
3.检漏仪 0X !A'  
3-1检漏仪leak detector: <y7nGXzLK  
3-2高频火花检漏仪H.F. spark leak detector: )E;B'^RVR  
3-3卤素检漏仪halide leak detector: L9W'TvTwo  
3-4氦质谱检漏仪helium mass spectrometer leak detector: M&wf4)*%0+  
3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: Gx,<|v  
$~W =)f9  
4.检漏 xU6)~ae`JW  
4-1气泡检漏leak detection by bubbles:  At3>  
4-2氨检漏leak detection by ammonia: @FO= 0_;y  
4-3升压检漏leak detection of rise pressure: ga%gu9  
4-4放射性同位素检漏radioactive isotope leak detection: I!Z=3 $,  
4-5荧光检漏fluorescence leak detection =ss(~[  
7.   1.一般术语 z10J8Ms'  
1-1真空干燥vacuum drying: ps[HvV"  
1-2冷冻干燥freeze drying : Z8I  Y!d  
1-3物料material: # 3UrGom  
1-4待干燥物料material to be dried: Dc-v`jZ@)  
1-5干燥物料dried material :  0@7%  
1-6湿气moisture;humidity: QM wrt  
1-7自由湿气free moisture: (#KSwWo{ed  
1-8结合湿气bound moisture: EX@wenR  
1-9分湿气partial moisture: X\sOeb:]  
1-10含湿量moisture content: =#L\fe)q)  
1-11初始含湿量initial moisture content: ktF\f[  
1-12最终含湿量final residual moisture: w=JO$7  
1-13湿度degree of moisture ,degree of humidity : ,yf2kU  
1-14干燥物质dry matter : K@U[x,Sx  
1-15干燥物质含量content of dry matter: V7DMn@Ckw  
,58XLu  
2.干燥工艺 ?gYQE&M !  
2-1干燥阶段stages of drying : Z{XF!pS%H  
(1).预干燥preliminary dry: Wz{,N07Q#{  
(2).一次干燥(广义)primary drying(in general): \D6 7J239E  
(3).一次干燥(冷冻干燥)primary drying(freeze-drying): 5y^I~"_ i  
(4).二次干燥secondary drying: Z#uxa  
2-2.(1).接触干燥contact drying: )IBvm1  
(2).辐射干燥 drying by radiation : <<WqL?8W  
(3).微波干燥microwave drying: V) xwlvX  
(4).气相干燥vapor phase drying: Y(mnGaVn  
(5).静态干燥static drying: l/xpAx  
(6).动态干燥dynamic drying: Y[sBVz'j5  
2-3干燥时间drying time: vd{ban9  
2-4停留时间length of stay(in the drying chamber): n Nu~)X  
2-5循环时间cycle time: 10}< n_I  
2-6干燥率 dessication ratio : Dm{9;Abs%  
2-7去湿速率mass flow rate of humidity: yjE $o?A  
2-8单位面积去湿速率mass flow rate of humidity per surface area: Y' FB {  
2-9干燥速度 drying speed : a=_:`S]}  
2-10干燥过程drying process: FHbyL\Q  
2-11加热温度heating temperature: 2^w8J w9  
2-12干燥温度temperature of the material being dried : 3kz O VZ  
2-13干燥损失loss of material during the drying process : I_k/lwBD  
2-14飞尘lift off (particles): 9z#z9|hj)3  
2-15堆层厚度thickness of the material: @oKW$\  
GHWt3K:*w  
3.冷冻干燥 >Py :9~g,  
3-1冷冻freezing: nixIKOnjC  
(1).静态冷冻static freezing: vC^Ul  
(2).动态冷冻dynamic freezing: n:"0mWnL$y  
(3).离心冷冻centrifugal freezing: Se}&2 R  
(4).滚动冷冻shell freezing: 7TW&=(  
(5).旋转冷冻spin-freezing: _s18^7  
(6).真空旋转冷冻vacuum spin-freezing: h~pQ  
(7).喷雾冷冻spray freezing: FFtB#  
(8).气流冷冻air blast freezing: DFMf" _p  
3-2冷冻速率rate of freezing: ;:  xE'-  
3-3冷冻物料frozen material: V7<w9MM  
3-4冰核ice core: A$3ll|%j  
3-5干燥物料外壳envelope of dried matter: O $ARk+  
3-6升华表面sublimation front: oM^VtH=>  
3-7融化位置freezer burn: S'(IG m4  
U! $/'Xi9  
4.真空干燥设备;真空冷冻干燥设备 PR3i}y>  
4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: mrQT:B\8  
4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: r XT6u  
4-3加热表面heating surface: NOSL b];  
4-4物品装载面shelf : oH(a*i  
4-5干燥器的处理能力throughput (of the vacuum drying chamber): oD3]2o/  
4-6单位面积干燥器处理能力throughput per shelf area: yZ-Ql1 1  
4-7冰冷凝器ice condenser: 8;d./!|'&g  
4-8冰冷凝器的负载load of the ice condenser: /$d #9Uv  
4-9冰冷凝器的额定负载rated load of the ice condenser ':|E$@$W  
8.   1.一般术语 V'FKgzd  
1-1试样sample : #AH gY.  
(1).表面层surface layer: 1* ?XI  
(2).真实表面true surface: {)I&&fSz  
(3).有效表面积effective surface area: .U#oN_D  
(4).宏观表面;几何表面macroscopic surface area; geometric surface area: Tmk'rOg5  
(5).表面粒子密度surface particle density: 1RauI0d*  
(6).单分子层monolayer: ]E|E4K6g  
(7).表面单分子层粒子密度monolayer density: $\#wsI(  
(8).覆盖系数coverage ratio: XMF#l]P  
1-2激发excitation: !{F\ \D/  
(1).一次粒子primary particle: XnKf<|j6k  
(2).一次粒子通量primary particle flux: " 1h~P,  
(3).一次粒子通量密度density of primary particle flux: )}J}d)  
(4).一次粒子负荷primary particle load: iU|X/>k?  
(5).一次粒子积分负荷integral load of primary particle: p^C$(}Yh  
(6).一次粒子的入射能量energy of the incident primary particle: <u  ImZC  
(7).激发体积excited volume: p'kB1)~|  
(8).激发面积excited area: bo#?,80L}`  
(9).激发深度excited death: J u"/#@  
(10).二次粒子secondary particles: E~S~Ld%  
(11).二次粒子通量secondary particle flux: mUfANlQ:  
(12).二次粒子发射能energy of the emitted secondary particles: nTE\EZ+=2  
(13).发射体积emitting volume: 3F9dr@I.7  
(14).发射面积emitting area: WeIi{<u8R  
(15).发射深度emitting depth: sWq@E6,I  
(16).信息深度information depth: 7g4IAsoD  
(17).平均信息深度mean information depth: S" PJ@E}^E  
1-3入射角angle of incidence: ]4Q~x  
1-4发射角angle of emission: Ny$N5/b!!  
1-5观测角observation: +.a->SZ5"  
1-6分析表面积analyzed surface area: gWl49'S>+  
1-7产额 yield : w x,gth*p  
1-8表面层微小损伤分析minimum damage surface analysis: ynn>d  
1-9表面层无损伤分析non-destructive surface analysis: t; @T~%  
1-10断面深度分析 profile analysis in depth; depth profile analysis : ' Uo|@tK  
1-11可观测面积observable area: ,IPryI   
1-12可观测立体角observable solid angle : {tuGkRY2 ~  
1-13接受立体角;观测立体角angle of acceptance: 7-}/{o*,5  
1-14角分辨能力angular resolving power: ,Qt2?  
1-15发光度luminosity: }0 Fu  
1-16二次粒子探测比detection ratio of secondary particles: X CHN'l'  
1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: nc?Oj B  
1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: #Wt1Ph_;  
1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: k^%F4d3z@C  
1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: >L^ 2Z*  
1-21本底压力base pressure: 17lc5#^L  
1-22工作压力working pressure: U3pMv|b  
DuRC1@e  
2.分析方法 RCMO?CBe  
2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: t x1(6V&l;  
(1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : Vah.tOU  
(2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: `<?((l%;R  
2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: mSp;(oQ  
2-3离子散射表面分析ion scattering spectroscopy: ?dvcmXR  
2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: 30QQnMH3  
2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: > M4QEv  
2-6离子散射谱仪ion scattering spectrometer: ~t^'4"K*  
2-7俄歇效应Auger process: rk `]]  
2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: 9U!#Y%*T  
2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: `3vt.b  
2-10光电子谱术photoelectron spectroscopy : mk +BeK  
(1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: B0!W=T\  
(2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: -l$-\(,M`#  
2-11光电子谱仪photoelectron spectrometer: t8B==%  
2-12低能电子衍射;LEED low energy electron diffraction ;LEED: gX]'RBTb  
2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: l_ycB%2e^  
2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): 'In qa;TQz  
2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
zuiyuan 2007-03-13 15:13
太好了啊,多谢了啊
zhy980730 2007-03-14 11:39
多谢,了解点.
flyinlove79 2007-03-15 17:43
不错,多谢楼主分享资料 [s:4]
飞花无心 2007-03-26 09:33
很好,谢谢楼主啊
wottlin100 2007-04-02 09:19
呵呵,楼主辛苦啦!如果有定义解释更好!
xingmeng1227 2011-10-29 12:40
呵呵,楼主辛苦啦!
zh9607109 2011-11-03 05:41
呵呵,楼主辛苦啦!
wym87 2011-11-13 23:18
谢谢楼主的分享!Thanks!
douyongming 2012-06-17 17:03
太好了啊,多谢了啊
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