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| cswmsc | 2007-02-28 23:18 |  
| 真空术语全集
“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 {&,p<5o --------------------------------------------------- 1`K-f
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 真空术语 #QoWneZ
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 1.标准环境条件 standard ambient condition:  94+^K=lAX
 2.气体的标准状态 standard reference conditions forgases:  ;[}OZt
 3.压力(压强)p pressure:  &T,|?0>~=J
 4.帕斯卡Pa pascal:  F<,pAxl~@
 5.托Torr torr: Nn[*ox#i
 6.标准大气压atm standard atmosphere: bg i_QB#k\
 7.毫巴mbar millibar: 	
K<e
#y!
 8.分压力 partial pressure: v1,#7sAW'
 9.全压力 total pressure: ]&%KU)i?
 10.真空 vacuum:  -lhIL}mGf
 11.真空度 degree of vacuum:  '#f<wfn
 12.真空区域 ranges of vacuum: 9	8|sWI3B
 13.气体 gas:  X[o+Y@bc
 14.非可凝气体 non-condensable gas:  <R]m(
 15.蒸汽vapor:  5v)^4(
)
 16.饱和蒸汽压saturation vapor pressure:  fEZuv?@
 17.饱和度degree of saturation:  L;RE5YrH%6
 18.饱和蒸汽saturated vapor: ~#sD2b`0
 19.未饱和蒸汽unsaturated vapor: HDHG~<s
 20.分子数密度n,m-3 number density of molecules:  [=>=5'-
 21.平均自由程ι、λ,m mean free path:  l<+[l$0#
 22.碰撞率ψ collision rate:  teJt.VA7)
 23.体积碰撞率χ volume collision rate:  }gkLO
TJ/,
 24.气体量G quantity of gas:  ]o<]A[<
 25.气体的扩散 diffusion of gas:  ipwlP|UjQ5
 26.扩散系数D diffusion coefficient; diffusivity:  CT[9=wV)m%
 27.粘滞流 viscous flow:  F0<)8{s
 28.粘滞系数η viscous factor:  ?XHQdN3e
 29.泊肖叶流 poiseuille flow:  [<#jK}g
 30.中间流 intermediate flow:  lnyb4d/
 31.分子流 molecular flow:  ^v;)6a2
 32克努曾数 number of knudsen:  i//H5D3
 33.分子泻流 molecular effusion; effusive flow: ]bY|>q
 34.流逸 transpiration:  #hxYB
 35.热流逸 thermal transpiration:   g{Hgs
 36.分子流率qN molecular flow rate; molecular flux:  iwK.*07+
 37.分子流率密度 molecular flow rate density; density of molecular flux:  ,u
`xneOs
 38.质量流率qm mass flow rare:  7[1Lh'u
 39.流量qG throughput of gas:  #dZs[R7h
 40.体积流率qV volume flow rate:  .^wpfS
 41.摩尔流率qυ molar flow rate:  u"HGT=Nl
 42.麦克斯韦速度分布 maxwellian velocity distribution:  CVfV
 43.传输几率Pc transmission probability:  hTtn
/j
 44.分子流导CN,UN molecular conductance:  ai_ve[A
 45.流导C,U conductance:  zKd@Ab
 46.固有流导Ci,Ui intrinsic conductance:  f;{Q	 ~
 47.流阻W resistance:  axnlI*!
 48.吸附 sorption:  /pj[c;aO
 49.表面吸附 adsorption:  v&d1ACctJ
 50.物理吸附physisorption:  \V>5)Rn
 51.化学吸附 chemisorption:  =	QBvU)Ki
 52.吸收absorption:  OXEEpoU?V
 53.适应系数α accommodation factor: ^p3GT6
 54.入射率υ impingement rate: E8!`d}\#
 55.凝结率condensation rate:  UGO#o`.G}
 56.粘着率 sticking rate:  8FuxN2
 57.粘着几率Ps sticking probability:  d6J/)nl
 58.滞留时间τ residence time:  4CM'I~
 59.迁移 migration:  Ixa0;nxj
 60.解吸 desorption:  ;QBS0x\f@
 61.去气 degassing:  4qid+	[B
 62.放气 outgassing:  8%9	C<+.R
 63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate:  296}LW
 64.蒸发率 evaporation rate:  o!tC{"g
 65.渗透 permeation:  JXc.?{LL
 66.渗透率φ permeability:  u9!
 ?
 67.渗透系数P permeability coefficient ok\-IU?
 2.    1.真空泵 vacuum pumps $XF$ n#ua
 1-1.容积真空泵 positive displacement pump:  	(7R?T}
 ⑴.气镇真空泵 gas ballast vacuum pump:  -Uo11'{
 ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump:  iXMJ1\!q\|
 ⑶.干封真空泵 dry-sealed vacuum pump: lbHgxZ
 ⑷.往复真空泵 piston vacuum pump:  yNvAT>H
 ⑸.液环真空泵 liquid ring vacuum pump:  ,Wlt[T(.;
 ⑹.旋片真空泵 sliding vane rotary vacuum pump:  )]P(!hW.
 ⑺.定片真空泵 rotary piston vacuum pump:  1&MCS%UTL
 ⑻.滑阀真空泵 rotary plunger vacuum pump:  a}UmD
HS-
 ⑼.余摆线真空泵 trochoidal vacuum pump:  \|,| )
 ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: ,\M77V
 ⑾.罗茨真空泵 roots vacuum pump:  PJ5}c!o[
 1-2.动量传输泵 kinetic vacuum pump:  
(Q8!5s
 ⑴.牵引分子泵molecular drag pump:  p\&O;48=
 ⑵.涡轮分子泵turbo molecular pump:  2^o7 ^S
 ⑶.喷射真空泵ejector vacuum pump:  =%W:N|k
 ⑷.液体喷射真空泵liquid jet vacuum pump:  p{w-
 ⑸.气体喷射真空泵gas jet vacuum pump:  >5FTBe[D
 ⑹.蒸汽喷射真空泵vapor jet vacuum pump : k'o[iKlu
 ⑺.扩散泵diffusion pump :  V%8(zt
 ⑻.自净化扩散泵self purifying diffusion pump:  #gC[L=01
 ⑼.分馏扩散泵 fractionating diffusion pump :  J
p?XV<3Z
 ⑽.扩散喷射泵diffusion ejector pump :   !6(3Y
 ⑾.离子传输泵ion transfer pump:  ,6>3aD1w~q
 1-3.捕集真空泵 entrapment vacuum pump:  gC1LQ!:;Oi
 ⑴吸附泵adsorption pump:  -pC'C%Q
 ⑵.吸气剂泵 getter pump:  ZO<,V
 ⑶.升华(蒸发)泵 sublimation (evaporation)pump :  OFtaOjsyUa
 ⑷.吸气剂离子泵getter ion pump:  &ksuk9M
 ⑸.蒸发离子泵 evaporation ion pump:  >PA*L(Dh%
 ⑹.溅射离子泵sputter ion pump:  ,U\s89
 ⑺.低温泵cryopump:  a}yb~:TC
 `>sOOA
 2.真空泵零部件 =dGp&9K,fw
 2-1.泵壳 pump case:  5MnP6(3$
 2-2.入口 inlet:  UePkSz9EU
 2-3.出口outlet:  .y
s_'F-]0
 2-4.旋片(滑片、滑阀)vane; blade :  E
f\|3D_
 2-5.排气阀discharge valve:  +YvF+E
 2-6.气镇阀gas ballast valve:  E;a,].
 2-7.膨胀室expansion chamber:  CP7Fe{P
 2-8.压缩室compression chamber:  =o9s?vOJ
 2-9.真空泵油 vacuum pump oil:  >?@5>wF
 2-10.泵液 pump fluid:  !8G)`'
 2-11.喷嘴 nozzle:  uyYV_Q0~;
 2-13.喷嘴扩张率nozzle expansion rate:  JR]2Ray
 2-14.喷嘴间隙面积 nozzle clearance area :  =>
(g_\
 2-15.喷嘴间隙nozzle clearance:  e4z~
 2-16.射流jet:   FSM M
 2-17.扩散器diffuser:  H\>{<`sD;f
 2-18.扩散器喉部diffuser thoat:  <odi>!ViH
 2-19.蒸汽导管vapor tube(pipe;chimney):  FOG{dio
 2-20.喷嘴组件nozzle assembly:  T1d@=&0"
 2-21.下裙skirt:  )V1xL_hx/
 d'';0[W)
 3.附件 LA Crg
 3-1阱trap:   pbx*Y`v
 ⑴.冷阱 cold trap:  :`N&BV
 ⑵.吸附阱sorption trap:   0Q{lyu
 ⑶.离子阱ion trap:  (7g"ppf
 ⑷.冷冻升华阱 cryosublimation trap:  0
P YYG
 3-2.挡板baffle:  '7'/+G'~&
 3-3.油分离器oil separator:  {]dxFhe)
 3-4.油净化器oil purifier:  4;YP\{u
 3-5.冷凝器condenser:  5sJ>+Rg
 ZH
Q?{"
 4.泵按工作分类 *HD(\;i-$
 4-1.主泵main pump:  ??/bI~Sd
 4-2.粗抽泵roughing vacuum pump:  *ak0(yLn)
 4-3.前级真空泵backing vacuum pump:  ZD&F ,2v
 4-4.粗(低)真空泵 roughing(low)vacuum pump:  "pO
 4-5.维持真空泵holding vacuum pump:  \Eh5g/,[
 4-6.高真空泵high vacuum pump:  p(RF
 4-7.超高真空泵ultra-high vacuum pump:  g4^-B
 4-8.增压真空泵booster vacuum pump:  V48_aL
 c[-N A
 5.真空泵特性 .s<0}<Aq>
 5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump:  jemb/:E
 5-2.真空泵的抽气量Q throughput of vacuum pump:。 QP'sS*saJ
 5-3.起动压力starting pressure:  ]0R*F30]
 5-4.前级压力 backing pressure :  AW	r2Bv
 5-5.临界前级压力 critical backing pressure:  #2^0z`-\_z
 5-6.最大前级压力maximum backing pressure:  p7YYAh@x\
 5-7.最大工作压力maximum working pressure:  }n&nuaj
 5-8.真空泵的极限压力ultimate pressure of a pump:  (1CP]5W
 5-9.压缩比compression ratio:  bD,21,*z
 5-10.何氏系数Ho coefficient:  +'m9b7+v
 5-11.抽速系数speed factor:  M]o]D;N~l
 5-12.气体的反扩散back-diffusion of gas:  HAH\#WE
 5-13.泵液返流back-streaming of pump fluid:   5X^\AW
 5-14.返流率back-streaming rate PY.HZ/#d
 5-15.返迁移back-migration:  Y7S1^'E
3
 5-16.爆腾bumping:  YW7w>}aW
 5-17.水蒸气允许量qm water vapor tolerable load:  #K^hKx9
 5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure:  5mAb9F8@
 5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump:  Q9cSrU[$
 5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump 3N	> V
sl
 3.    1.一般术语 $'\kK,=
 1-1.压力计pressure gauge:  ?eTZ>o.p/
 1-2.真空计vacuum gauge:  @]Vcl"t
 ⑴.规头(规管)gauge head:  ]pm/5|
 ⑵.裸规nude gauge :  #f(a,,Uu'
 ⑶.真空计控制单元gauge control unit :  2(d
 ⑷.真空计指示单元gauge indicating unit :  8~T}BC
 |r+	x/,2-
 2.真空计一般分类 R_j.k3r4d
 2-1.压差式真空计differential vacuum gauge:  wbWC	&X.
 2-2.绝对真空计 absolute vacuum gauge:  J;>;K6pW
 2-3.全压真空计total pressure vacuum gauge:  UI=v|<'-
 2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser:  V~PGmn[V
 2-5.相对真空计relative vacuum gauge :  f8-`bb
 YAXd
 3.真空计特性 {eU>E/SQ
 3-1.真空计测量范围pressure range of vacuum gauge:  #eYYu2ND
 3-2.灵敏度系数sensitivity coefficient:  pq0Z<b;2
 3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units):  >C,0}lj
 3-5.规管光电流photon current of vacuum gauge head:  Gw)y<h
 3-6.等效氮压力equivalent nitrogen pressure :  i?B<&'G
 3-7.X射线极限值 X-ray limit:  -$!r+4|q
 3-8.逆X射线效应anti X-ray effect:  l8E))oz1T
 3-9.布利尔斯效应blears effect:  QV."ZhL5 =
 &</)k|.A6\
 4.全压真空计  1a9'	*[
 4-1.液位压力计liquid level manometer:  pOK=o$1V8
 4-2.弹性元件真空计elastic element vacuum gauge:  3q4VH q
 4-3.压缩式真空计compression gauge:  $l)RMP}
 4-4.压力天平pressure balance:  PoZ$3V$(Lz
 4-5.粘滞性真空计viscosity gauge :  kQU4s)J
 4-6.热传导真空计thermal conductivity vacuum gauge :  "`K_5"F
 4-7.热分子真空计thermo-molecular gauge:  'sAkrl8kt
 4-8.电离真空计ionization vacuum gauge:  #N3*SE
 4-9.放射性电离真空计radioactive ionization gauge: ]+G\1SN~
 4-10.冷阴极电离真空计cold cathode ionization gauge:  #>_t[9;
 4-11.潘宁真空计penning gauge:  	!l dE9	.
 4-12.冷阴极磁控管真空计cold cathode magnetron gauge:  H.?`90IQ
 4-13.放电管指示器discharge tube indicator:  Hd4	~v0eS
 4-14.热阴极电离真空计hot cathode ionization gauge:  ~7aD#`amU
 4-15.三极管式真空计triode gauge:  #HL$`&m
 4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge:  &=t~_ Dc
 4-17.B-A型电离真空计Bayard-Alpert gauge:  mmwc'-jU:
 4-18.调制型电离真空计modulator gauge:  ;|T|*0vY[
 4-19.抑制型电离真空计suppressor gauge:  	Kez0Bka
 4-20.分离型电离真空计extractor gauge:  R)d_0Ng
 4-21.弯注型电离真空计bent beam gauge:  \>su97
 4-22.弹道型电离真空计 orbitron gauge :  #l>r9Z71
 4-23.热阴极磁控管真空计hot cathode magnetron gauge:  `Zp*?
 \Uh/(q7
 5.分压真空计(分压分析器) s
j-oaWt
 5-1.射频质谱仪radio frequency mass spectrometer:  L7- JK3/E
 5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer:  YeJTB}
 5-3.单极质谱仪momopole mass spectrometer: y< gRl/e
 5-4.双聚焦质谱仪double focusing mass spectrometer:  1grcCL
q
 5-5.磁偏转质谱仪magnetic deflection mass spectrometer:  a%y*e+oM
 5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer:  D7R;IA-w
 5-7.回旋质谱仪omegatron mass spectrometer:  Bph(\=
W
 5-8.飞行时间质谱仪time of flight mass spectrometer:  ?`vGpi~
 j}lne^	h
 6.真空计校准 tZ) ,Z<
 6-1.标准真空计reference gauges:  J%Y-3{TQK
 6-2.校准系统system of calibration:  hJFxT8B/
 6-3.校准系数K calibration coefficient:  TH>uL;?=
 6-4.压缩计法meleod gauge method:  &%3}'&EBv
 6-5.膨胀法expansion method:  J}Z\I  Y,
 6-6.流导法flow method: Z>`frL
 4.    1.真空系统vacuum system  |@rf#,hTDp
 1-1.真空机组pump system:  3#fg
2
 1-2.有油真空机组pump system used oil :  l [ m_<1L
 1-3.无油真空机组oil free pump system E0i!|H
 1-4.连续处理真空设备continuous treatment vacuum plant:  Qt"jU+Zoy
 1-5.闸门式真空系统vacuum system with an air-lock:  ~A/vP-
 1-6.压差真空系统differentially pumped vacuum system:  	/5KY6XxR
 1-7.进气系统gas admittance system:  n%2c<@p#
 H(?+-72KX
 2.真空系统特性参量 ty;a!yjC
 2-1.抽气装置的抽速volume flow rate of a pumping unit :  `j2|aX
%Z*
 2-2.抽气装置的抽气量throughput of a pumping unit :  CC6]AM(i
 2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system:  iMYJVB=
 2-4.真空系统的漏气速率leak throughput of a vacuum system:  )fuAdG
 2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber:  z\k6."e_&
 2-6.极限压力ultimate pressure:  3DjX0Dx/l
 2-7.残余压力residual pressure:  &mJm'Ks
 2-8.残余气体谱residual gas spectrum:   (=%0x"'
 2-9.基础压力base pressure:  &4t=Y`]SL
 2-10.工作压力working pressure:  ) WkN34Q
 2-11.粗抽时间roughing time:  !y1qd
 2-12.抽气时间pump-down time: TD ;u"
 2-13.真空系统时间常数time constant of a vacuum system:  aE]RVyG@L
 2-14.真空系统进气时间venting time:  [*vR&
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