| cswmsc |
2007-02-28 23:18 |
真空术语全集
“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 qh9Z50E9 --------------------------------------------------- ZrPbl"`7 真空术语 S2HcG
1J
R3x3]]D 1.标准环境条件 standard ambient condition: `uOT+B%R 2.气体的标准状态 standard reference conditions forgases: K2TcOFQ 3.压力(压强)p pressure: B2>H_dmQ 4.帕斯卡Pa pascal: #|L8tuWW 5.托Torr torr: 0?s|i : 6.标准大气压atm standard atmosphere: $"+djI?E9 7.毫巴mbar millibar: [@VP?74 8.分压力 partial pressure: OI|[roMK 9.全压力 total pressure: Zq+v6fk_Mn 10.真空 vacuum: [tlI!~Z 11.真空度 degree of vacuum: \pPY37l 12.真空区域 ranges of vacuum: '@o;-'b 13.气体 gas: |2O]R s 14.非可凝气体 non-condensable gas: zr-*$1eu 15.蒸汽vapor: - Ajo9H 16.饱和蒸汽压saturation vapor pressure: 8IlunJ 17.饱和度degree of saturation: s'!Cp=xQF" 18.饱和蒸汽saturated vapor: l3Xfc2~ 2 19.未饱和蒸汽unsaturated vapor: W0dSsjNio 20.分子数密度n,m-3 number density of molecules: |Luqoa 21.平均自由程ι、λ,m mean free path: zd2)M@ 22.碰撞率ψ collision rate: SF7\<'4\N 23.体积碰撞率χ volume collision rate: 6a[}'/ 24.气体量G quantity of gas: 6HT;#Znn 25.气体的扩散 diffusion of gas: \y97W&AN 26.扩散系数D diffusion coefficient; diffusivity: 5eLtCsHz 27.粘滞流 viscous flow: h;p>o75O 28.粘滞系数η viscous factor: )#?"Gjf~ 29.泊肖叶流 poiseuille flow: `7c~mypx 30.中间流 intermediate flow: &v56#lG 31.分子流 molecular flow: '*K :
lx 32克努曾数 number of knudsen: CyJEY- 33.分子泻流 molecular effusion; effusive flow: Oxm>c[R 34.流逸 transpiration: sd*p/Q|4 35.热流逸 thermal transpiration: h}[-'>{ 36.分子流率qN molecular flow rate; molecular flux: %'bM){ 37.分子流率密度 molecular flow rate density; density of molecular flux: {#ZlM 38.质量流率qm mass flow rare: joFm]3$; 39.流量qG throughput of gas: V3&RJ k=b 40.体积流率qV volume flow rate: [)H&'5 +F 41.摩尔流率qυ molar flow rate: y&6FybIz 42.麦克斯韦速度分布 maxwellian velocity distribution: WffQ :L? 43.传输几率Pc transmission probability: <fZyAa3} 44.分子流导CN,UN molecular conductance: 2<i!{;u$qL 45.流导C,U conductance: 3k\#CiB{ 46.固有流导Ci,Ui intrinsic conductance: t_o['F 47.流阻W resistance: SEo'(-5 48.吸附 sorption: Xnt~]k\" 49.表面吸附 adsorption: +[M6X}
TQ 50.物理吸附physisorption: W<bGDh 51.化学吸附 chemisorption: MV5 _L3M 52.吸收absorption: '.on)Zd. 53.适应系数α accommodation factor: `tBgH_$M 54.入射率υ impingement rate: ZT'`hK_up 55.凝结率condensation rate: }u\])I3 56.粘着率 sticking rate: )Q=_0;#;k 57.粘着几率Ps sticking probability: 0]'7_vDs| 58.滞留时间τ residence time: /$i.0$L
59.迁移 migration: v_BcTzQ0S 60.解吸 desorption: 7r7YNn/? 61.去气 degassing: aT{_0m$G10 62.放气 outgassing: PY_u/<u 63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: )P%ZA)l%_o 64.蒸发率 evaporation rate: ?iw!OoZ` 65.渗透 permeation: !<j'Ea 66.渗透率φ permeability: 02f~En}>6 67.渗透系数P permeability coefficient C;;Sih5 2. 1.真空泵 vacuum pumps /$ w%Q-p 1-1.容积真空泵 positive displacement pump: ,`|3KE9 ⑴.气镇真空泵 gas ballast vacuum pump: &:;:"{t}Do ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: hB"fhX ⑶.干封真空泵 dry-sealed vacuum pump: Sxnpq Vbk ⑷.往复真空泵 piston vacuum pump: &b.=M>\9Q ⑸.液环真空泵 liquid ring vacuum pump: cA2V2S) ⑹.旋片真空泵 sliding vane rotary vacuum pump: jfP*"uUK ⑺.定片真空泵 rotary piston vacuum pump: zpzK>DH( ⑻.滑阀真空泵 rotary plunger vacuum pump: ],>@";9u" ⑼.余摆线真空泵 trochoidal vacuum pump: R]vV* ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: KT_!d * ⑾.罗茨真空泵 roots vacuum pump: QCD.YFM 1-2.动量传输泵 kinetic vacuum pump: iNWw;_|1 ⑴.牵引分子泵molecular drag pump: c'^?/$H| ⑵.涡轮分子泵turbo molecular pump: l>2E (Y| ⑶.喷射真空泵ejector vacuum pump: ({
8-* ⑷.液体喷射真空泵liquid jet vacuum pump: xmNB29# ⑸.气体喷射真空泵gas jet vacuum pump: }QN1|mP2 ⑹.蒸汽喷射真空泵vapor jet vacuum pump : bZ?v-fn\D, ⑺.扩散泵diffusion pump : @GPCwE1 ⑻.自净化扩散泵self purifying diffusion pump: Y#]+Tm(+ ⑼.分馏扩散泵 fractionating diffusion pump : 9`T)@Uj2n ⑽.扩散喷射泵diffusion ejector pump : XR8,Vt)= ⑾.离子传输泵ion transfer pump: b[sx_b 1-3.捕集真空泵 entrapment vacuum pump: o~U$GBg ⑴吸附泵adsorption pump: ,MdV;j~"' ⑵.吸气剂泵 getter pump: i)o2klIkB ⑶.升华(蒸发)泵 sublimation (evaporation)pump : c%^7!FSg ⑷.吸气剂离子泵getter ion pump: O)C\vF# ⑸.蒸发离子泵 evaporation ion pump: bh s5x ⑹.溅射离子泵sputter ion pump: 10G}{ ⑺.低温泵cryopump: xj<Rp|7& 4{}FL 2.真空泵零部件 o906/5M 2-1.泵壳 pump case: aKV$pC<[o 2-2.入口 inlet: )mI 05 2-3.出口outlet: q YC;cKv 2-4.旋片(滑片、滑阀)vane; blade : Qn^' 2-5.排气阀discharge valve: Km%]1X7T6 2-6.气镇阀gas ballast valve: $CxKuB( 2-7.膨胀室expansion chamber: teOe#* 2-8.压缩室compression chamber: d)"3K6s|5 2-9.真空泵油 vacuum pump oil: -<c=US 2-10.泵液 pump fluid: F;>V>" edl 2-11.喷嘴 nozzle: 8&;UO{ 2-13.喷嘴扩张率nozzle expansion rate: Eou~P h*t 2-14.喷嘴间隙面积 nozzle clearance area : Bt[/0>i 2-15.喷嘴间隙nozzle clearance: Hj'x Atx5 2-16.射流jet: o=u3&liBi 2-17.扩散器diffuser: >lmi@UN|k 2-18.扩散器喉部diffuser thoat: ~Xw"}S5 2-19.蒸汽导管vapor tube(pipe;chimney): OGBHos 2-20.喷嘴组件nozzle assembly: 4]rnY~ 2-21.下裙skirt: ];} Wfl PvR6
z0 3.附件 7wWFr 3-1阱trap: yTyj'-4 ⑴.冷阱 cold trap: &*sP/z ⑵.吸附阱sorption trap: [M?}uK ^ ⑶.离子阱ion trap: G=)i{oC ⑷.冷冻升华阱 cryosublimation trap: {.n"Z 3-2.挡板baffle: OBgkpx*Q 3-3.油分离器oil separator: Q.bXM?V) 3-4.油净化器oil purifier: a! (4Ch 3-5.冷凝器condenser: sJ\BF ]~844Jp 4.泵按工作分类 +_7*iJtD5 4-1.主泵main pump: "lQ*1.i 4-2.粗抽泵roughing vacuum pump: |o,YCzy|5 4-3.前级真空泵backing vacuum pump: tWo{7) Eb 4-4.粗(低)真空泵 roughing(low)vacuum pump: @)IjNplYkw 4-5.维持真空泵holding vacuum pump: -T!f,g3vW 4-6.高真空泵high vacuum pump: 6~OoFm5 4-7.超高真空泵ultra-high vacuum pump: o-;E>N7t 4-8.增压真空泵booster vacuum pump: 6L:x^bM ml2_
]3j! 5.真空泵特性 xE1 eT, 5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: ai}mOyJs 5-2.真空泵的抽气量Q throughput of vacuum pump:。 1h(0IjG8 5-3.起动压力starting pressure: ?=>+LqP 5-4.前级压力 backing pressure : }{M#EP8q+ 5-5.临界前级压力 critical backing pressure: fz;iOjr>
5-6.最大前级压力maximum backing pressure: :#2Bw]z&z 5-7.最大工作压力maximum working pressure: :s=NUw_^ 5-8.真空泵的极限压力ultimate pressure of a pump: CF&NFSti^ 5-9.压缩比compression ratio: YTAmgkF\4 5-10.何氏系数Ho coefficient: X(!Cfb8+5 5-11.抽速系数speed factor: xrlmKSPa 5-12.气体的反扩散back-diffusion of gas: =5aDM\L$& 5-13.泵液返流back-streaming of pump fluid: >O1[:%Z1 5-14.返流率back-streaming rate Gb"r|(! 5-15.返迁移back-migration: Kfm5i Q 5-16.爆腾bumping: ot@|!V 5-17.水蒸气允许量qm water vapor tolerable load: Q*~LCtrI 5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: h
a|C&G 5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: INUG*JC6 5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump Fd#?\r. 3. 1.一般术语 KN$}tCU 1-1.压力计pressure gauge: ygOd69 1-2.真空计vacuum gauge: qd+h$ "p ⑴.规头(规管)gauge head: sLh==V;9 ⑵.裸规nude gauge : UU'|Xz9~ ⑶.真空计控制单元gauge control unit : jATI&oX ⑷.真空计指示单元gauge indicating unit : BeCWa>54i 9F6F~::l} 2.真空计一般分类 p/(~IC"!J 2-1.压差式真空计differential vacuum gauge: XXbqQhf 2-2.绝对真空计 absolute vacuum gauge: ilK-?@u+ 2-3.全压真空计total pressure vacuum gauge: I[b}4M6E 2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser:
(]_ 1 2-5.相对真空计relative vacuum gauge : whonDG4WP .tkT<o-u<J 3.真空计特性 lW<PoT 3-1.真空计测量范围pressure range of vacuum gauge: m7&O9?X 3-2.灵敏度系数sensitivity coefficient: U ?'vXa 3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): A3vUPWdDk 3-5.规管光电流photon current of vacuum gauge head: Jm|+-F@I 3-6.等效氮压力equivalent nitrogen pressure : d\ %WgH 3-7.X射线极限值 X-ray limit: &GNxo$CG 3-8.逆X射线效应anti X-ray effect: s?zAP O8Sz 3-9.布利尔斯效应blears effect: 6Z#\CixG :k7uGD 4.全压真空计 (* 1v\Q 4-1.液位压力计liquid level manometer: ng:kA%!
Q 4-2.弹性元件真空计elastic element vacuum gauge: 6Ztq 4-3.压缩式真空计compression gauge: :q
ti 4-4.压力天平pressure balance: u583_k% 4-5.粘滞性真空计viscosity gauge : 'sLiu8G 4-6.热传导真空计thermal conductivity vacuum gauge : wx\v:A 4-7.热分子真空计thermo-molecular gauge: ~)qtply 4-8.电离真空计ionization vacuum gauge: e`d%-9 4-9.放射性电离真空计radioactive ionization gauge: [v$0[IuY, 4-10.冷阴极电离真空计cold cathode ionization gauge: "oWwc
zzO 4-11.潘宁真空计penning gauge: !E,A7s 4-12.冷阴极磁控管真空计cold cathode magnetron gauge: !h(|\"
} 4-13.放电管指示器discharge tube indicator: V~S0hqW[ 4-14.热阴极电离真空计hot cathode ionization gauge: kgy:Q' 4-15.三极管式真空计triode gauge: ]E_h 4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: S5KEXnjm 4-17.B-A型电离真空计Bayard-Alpert gauge: HODz*pI 4-18.调制型电离真空计modulator gauge: qzI&<4 4-19.抑制型电离真空计suppressor gauge: >RPd$('T 4-20.分离型电离真空计extractor gauge: \
W?R 4-21.弯注型电离真空计bent beam gauge: e?`5>& Up 4-22.弹道型电离真空计 orbitron gauge : Ob}?zl@ 4-23.热阴极磁控管真空计hot cathode magnetron gauge: 9Rn?
:B~W: N;Dni#tQ` 5.分压真空计(分压分析器) 0`)iIz 5-1.射频质谱仪radio frequency mass spectrometer: so)"4
SEu 5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: b3S.-W{p. 5-3.单极质谱仪momopole mass spectrometer: WX}xmtLs 5-4.双聚焦质谱仪double focusing mass spectrometer: {g2@6ct 5-5.磁偏转质谱仪magnetic deflection mass spectrometer: fBgEnz/ 5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: nt;haeJ 5-7.回旋质谱仪omegatron mass spectrometer: _$wmI/_JM 5-8.飞行时间质谱仪time of flight mass spectrometer: <EPj$:: &ZghMq~ 6.真空计校准 "VkTY|a 6-1.标准真空计reference gauges: CNQC^d\ h 6-2.校准系统system of calibration: pWPIJ>2G: 6-3.校准系数K calibration coefficient: &LF`
W 6-4.压缩计法meleod gauge method: s7g(3<( 6-5.膨胀法expansion method: 6el;Erp 6-6.流导法flow method: [cTe54n 4. 1.真空系统vacuum system ?+g`HTY u 1-1.真空机组pump system: vo\fUT@k 1-2.有油真空机组pump system used oil : *<E]E? 1-3.无油真空机组oil free pump system 6'kS_Zu{< 1-4.连续处理真空设备continuous treatment vacuum plant: {GKy'/[ 1-5.闸门式真空系统vacuum system with an air-lock: gzjR6uz 1-6.压差真空系统differentially pumped vacuum system: 6(]tYcC
1-7.进气系统gas admittance system: 5k6mmiaKk +Vo}F 2.真空系统特性参量 : p{+G 2-1.抽气装置的抽速volume flow rate of a pumping unit : '" X_B0k 2-2.抽气装置的抽气量throughput of a pumping unit : ndjx|s)E 2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 0{[m%eSK' 2-4.真空系统的漏气速率leak throughput of a vacuum system: JYrY[',u 2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: nSF``pp+ 2-6.极限压力ultimate pressure: p8kr/uMP ; 2-7.残余压力residual pressure: 5DXR8mLoaJ 2-8.残余气体谱residual gas spectrum: VtzI9CD 2-9.基础压力base pressure: pM{nh00[ 2-10.工作压力working pressure: "6R
5+ 2-11.粗抽时间roughing time: ,g7.rEA 2-12.抽气时间pump-down time: "V>R9dO{"! 2-13.真空系统时间常数time constant of a vacuum system: r'dr9"-{ 2-14.真空系统进气时间venting time: 2RqbrY n qw7@(R'" 3.真空容器 JCPUM*g8 3-1.真空容器;真空室vacuum chamber: %&->%U|' 3-2.封离真空装置sealed vacuum device: !@x+q)2 3-3.真空钟罩vacuum bell jar: -29gL_dk. 3-4.真空容器底板vacuum base plate: &K43x&mFF 3-5.真空岐管vacuum manifold: :9R=]#uD 3-6.前级真空容器(贮气罐)backing reservoir: V7Z4T6j4 3-7.真空保护层outer chamber: S@}1t4Ls: 3-8.真空闸室vacuum air lock: Iq# ZhAk 3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: KjFK/Og. P7 ]z 4.真空封接和真空引入线 rwniOQe 4-1.永久性真空封接permanent seal : &-czStQ 4.2.玻璃分级过渡封接graded seal : LAP6U.m'd 4-3.压缩玻璃金属封接compression glass-to-metal seal: tV_t6x_. 4-4.匹配式玻璃金属封接matched glass-to-metal seal: yf?h#G%24 4-5.陶瓷金属封接ceramic-to-metal seal: Ul_M3"Z 4-6.半永久性真空封接semi-permanent seal : ?9HhG?_x 4-7.可拆卸的真空封接demountable joint: Qd_Y\PzS 4-8.液体真空封接liquid seal R g?1-|Tj 4-9.熔融金属真空封接molten metal seal: %*o8L6Hn 4-10.研磨面搭接封接ground and lapped seal: zW}[+el} 4-11.真空法兰连接vacuum flange connection: 'DCFezdf3 4-12.真空密封垫vacuum-tight gasket: FYb34LY 4-13.真空密封圈ring gasket: TDg@Tg0 4-14.真空平密封垫flat gasket: ?\U!huu 4-15.真空引入线feedthrough leadthrough: v}sY|p" 4-16.真空轴密封shaft seal: jYVE8Y)my 4-17.真空窗vacuum window: j7MO'RX`& 4-18.观察窗viewing window: t ?h kL [3W*9j 5.真空阀门 < AI;6/ 5-1.真空阀门的特性characteristic of vacuum valves: V $|< ⑴.真空阀门的流导conductance of vacuum valves: 'JdkUhq1V ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: x lsqj`= 5-2.真空调节阀regulating valve: T#
lP!c 5-3.微调阀 micro-adjustable valve: FZ|CqD"# 5-4.充气阀charge valve: dl5=q\1= 5-5.进气阀gas admittance valve: nx:KoB"ny 5-6.真空截止阀break valve: ckjrk 5-7.前级真空阀backing valve: 2oZ9laJO 5-8.旁通阀 by-pass valve: e8h,,:l3j 5-9.主真空阀main vacuum valve: YB)3X[R+0 5-10.低真空阀low vacuum valve: w-b' LP 5-11.高真空阀high vacuum valve: g7CXlT0Q6 5-12.超高真空阀;UHV阀 ultra-high vacuum valve: n;8 '`s 5-13.手动阀manually operated valve: x1gx$P 5-14.气动阀pneumatically operated valve: #5&jt@NS 5-15.电磁阀electromagnetically operated valve: /ahNnCtu?1 5-16.电动阀valve with electrically motorized operation: 1|ZhPsD.}g 5-17.挡板阀baffle valve: v8/6wy? 5-18.翻板阀flap valve: Q}*y$se! 5-19.插板阀gate valve: {ub/3Uh 5-20.蝶阀butterfly valve: EPX8Wwf 0rokR&Y-d 6.真空管路 ?/M_~e.P 6-1.粗抽管路roughing line: h(B,d,q" 6-2.前级真空管路backing line: >p])it[q&$ 6-3.旁通管路;By-Pass管路 by-pass line: ?$z.K>S5 6-4.抽气封口接头pumping stem: Nt:8ogk/ 6-5.真空限流件limiting conductance: .mL#6P!d3^ 6-6.过滤器filter: K"<*a"1I 5. 1.一般术语 sT1&e5`W 1-1真空镀膜vacuum coating: s?3i)Ymr 1-2基片substrate: 64j|}wJ$ 1-3试验基片testing substrate: .5> 20\b2 1-4镀膜材料coating material: }:z5t,u6 1-5蒸发材料evaporation material: 6<Hu8$G| 1-6溅射材料sputtering material: k_GP>b\"k 1-7膜层材料(膜层材质)film material: oc{EuW{Ag 1-8蒸发速率evaporation rate: DF1<JdO+ 1-9溅射速率sputtering rate: Zt@Z=r:& 1-10沉积速率deposition rate: 0nW F 1-11镀膜角度coating angle: M R'o{?{e` XD-^w_ 2.工艺 9l+{OA 2-1真空蒸膜vacuum evaporation coating: 7ODaX.t-> (1).同时蒸发simultaneous evaporation: uH\kQ9f (2).蒸发场蒸发evaporation field evaporation: *s)}Bj (3).反应性真空蒸发reactive vacuum evaporation: kGN||h (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: >_X/[< (5).直接加热的蒸发direct heating evaporation: r;iV$Rq! (6).感应加热蒸发induced heating evaporation: /&Jv,[2kV (7).电子束蒸发electron beam evaporation: {.k)2{ (8).激光束蒸发laser beam evaporation: :DkAQ-<~ (9).间接加热的蒸发indirect heating evaporation: qJ8-9^E,L (10).闪蒸flash evaportion: .dq
"k 2-2真空溅射vacuum sputtering: q]<xMg#nu (1).反应性真空溅射 reactive vacuum sputtering: xi'<y (2).偏压溅射bias sputtering: 6ri#Lw (3).直流二级溅射direct current diode sputtering: h3Fo-]0 (4).非对称性交流溅射asymmtric alternate current sputtering: FN
)d1q(~ (5).高频二极溅射high frequency diode sputtering: I__ 4I{nI (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: We`'>'W0 (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: 8SnS~._9 (8).离子束溅射ion beam sputtering: Fa3gJ[ZAqf (9).辉光放电清洗glow discharge cleaning: QLbMPS 2-3物理气相沉积PVD physical vapor deposition: lr('k`KOQ 2-4化学气相沉积CVD chemical vapor deposition: V`fL%du,3 2-5磁控溅射magnetron sputtering: }uX|5&=~f 2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: h(xP_Svj> 2-7空心阴极离子镀HCD hollow cathode discharge deposition: hSqMaX%G 2-8电弧离子镀arc discharge deposition: P#G.lft"O MV+i{] 3.专用部件 "dN< i 3-1镀膜室coating chamber: w;yx<1f 3-2蒸发器装置evaporator device: +lp{#1q0 3-3蒸发器evaporator: sm s1%%~ 3-4直接加热式蒸发器evaporator by direct heat: V,QwN& 3-5间接加热式蒸发器evaporator by indirect heat: \~"#ld(x7 3-7溅射装置sputtering device: U6WG?$x 3-8靶target: ]b[,LwB\`~ 3-10时控挡板timing shutter: Qp:6=o0: 3-11掩膜mask: +cfziQ$' 3-12基片支架substrate holder: 3-Y=EH_0 3-13夹紧装置clamp: dl[ob,aCK 3-14换向装置reversing device: w@N{@tG 3-15基片加热装置substrate heating device: Ao`_",E 3-16基片冷却装置substrate colding device: sQk|I x ySruAkw% 4.真空镀膜设备 LZ&uj{ < 4-1真空镀膜设备vacuum coating plant: ."JzDs (1).真空蒸发镀膜设备vacuum evaporation coating plant: !Q[}s#g (2).真空溅射镀膜设备vacuum sputtering coating plant: Oje|bxQ 4-2连续镀膜设备continuous coating plant: ,OBQv.D3>a 4-3半连续镀膜设备semi- continuous coating plant )|T`17- 6. 1.漏孔 1=TSJ2{9 1-1漏孔leaks: +G!v!(Ob+ 1-2通道漏孔channel leak: :Kay$r0+ 1-3薄膜漏孔membrane leak: Ff/Ig]Lb 1-4分子漏孔molecular leak: q0|ZoP 1-5粘滞漏孔vixcous leak: <kc]L x 1-6校准漏孔calibrated leak: oYq,u@oM 1-7标准漏孔reference leak : ^_w*XV 1-8虚漏virtual leak: 'jbMTI 1-9漏率leak rate: y''0PSfb# 1-10标准空气漏率standard air leak rate: Rrz'(KSDw 1-11等值标准空气漏率equivalent standard air leak rate: 0}-#b7eR 1-12探索(示漏)气体: U(A4v0T q}Rlo/R 2.本底 _SF!T6A 2-1本底background: DB Xm 2-2探索气体本底search gas background : ||gEs/6- 2-3漂移drift: 1,u{&%yL"w 2-4噪声noise: LY1KQu Y =|#w.(3y 3.检漏仪 W8uVd zQ 3-1检漏仪leak detector: (+$ol'i 3-2高频火花检漏仪H.F. spark leak detector: s;>VeD)*) 3-3卤素检漏仪halide leak detector: ^^Bm$9 3-4氦质谱检漏仪helium mass spectrometer leak detector: p[;8 3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: P7Z<0Dt\} Z]e4pR6! 4.检漏 Uk"Y/Ddm 4-1气泡检漏leak detection by bubbles: 5^o3y.J?P 4-2氨检漏leak detection by ammonia: iiehrK&T! 4-3升压检漏leak detection of rise pressure: T"A^[r* 4-4放射性同位素检漏radioactive isotope leak detection: Z_jn27AC 4-5荧光检漏fluorescence leak detection
!Pe1o-O 7. 1.一般术语 CMKhS,,o 1-1真空干燥vacuum drying: L+(C5L93} 1-2冷冻干燥freeze drying : {SHqW5VX 1-3物料material: hC|KH}aCR) 1-4待干燥物料material to be dried: @C<d2f|8 1-5干燥物料dried material : d"p2Kx'*3 1-6湿气moisture;humidity: q'fPNQg 1-7自由湿气free moisture: H&u4v2
1-8结合湿气bound moisture: S]. Ft/+H 1-9分湿气partial moisture: F42TKPN^uu 1-10含湿量moisture content: XzlIW&"uC 1-11初始含湿量initial moisture content: 6BR\iZ 1-12最终含湿量final residual moisture: &:C{/QnA 1-13湿度degree of moisture ,degree of humidity :
B[Ix?V4yy 1-14干燥物质dry matter : M@5KoMsB9 1-15干燥物质含量content of dry matter: xan/ay> j&
<tdORT 2.干燥工艺 wFn@\3%l` 2-1干燥阶段stages of drying : o9~h%& (1).预干燥preliminary dry: &s | |