cswmsc |
2007-02-28 23:18 |
真空术语全集
“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 t1n'Ecm( --------------------------------------------------- x1|5q/I 真空术语 N{q5E,} $QNfy.6Tn 1.标准环境条件 standard ambient condition: x|F6^d
2.气体的标准状态 standard reference conditions forgases: ZZ] /9oiF% 3.压力(压强)p pressure: !r.X. C 4.帕斯卡Pa pascal: TJ?}5h5 5.托Torr torr: B5=L</Aj 6.标准大气压atm standard atmosphere: |jEKUTv,G 7.毫巴mbar millibar: `5O<U~'d 8.分压力 partial pressure: z]gxkol\ 9.全压力 total pressure:
{pd%I 10.真空 vacuum: wZE[we^Q" 11.真空度 degree of vacuum: 96}/;e]@ 12.真空区域 ranges of vacuum: Nr:%oD_G* 13.气体 gas: *yiJw\DRN 14.非可凝气体 non-condensable gas: m&Ms[X 15.蒸汽vapor: [<1i[\^ 16.饱和蒸汽压saturation vapor pressure: p%xo@v( 17.饱和度degree of saturation: dK|MQ < 18.饱和蒸汽saturated vapor: !`=r('l 19.未饱和蒸汽unsaturated vapor: \^|ncu:T 20.分子数密度n,m-3 number density of molecules: .NQoqXR 21.平均自由程ι、λ,m mean free path: !+U#^2Gz 22.碰撞率ψ collision rate: %nFZA)B[ 23.体积碰撞率χ volume collision rate: Q\m"n^XN 24.气体量G quantity of gas: ` *$^rQS 25.气体的扩散 diffusion of gas: &{Uaa 26.扩散系数D diffusion coefficient; diffusivity: vkc(-n 27.粘滞流 viscous flow: l"CHI* 28.粘滞系数η viscous factor: 0}Kl47}aD 29.泊肖叶流 poiseuille flow: MCz+l0 30.中间流 intermediate flow: va~:oA 31.分子流 molecular flow: _^#PV} 32克努曾数 number of knudsen: M}(4>W 33.分子泻流 molecular effusion; effusive flow: h*_r='
E 34.流逸 transpiration: }{=%j~V;& 35.热流逸 thermal transpiration: &fiDmUxj 36.分子流率qN molecular flow rate; molecular flux: Wq&TbWR 37.分子流率密度 molecular flow rate density; density of molecular flux: UrN$nhH 38.质量流率qm mass flow rare: |Ro\2uSr 39.流量qG throughput of gas: kki]6_/n 40.体积流率qV volume flow rate: q'C'S#qqn 41.摩尔流率qυ molar flow rate: nUd(@@%m 42.麦克斯韦速度分布 maxwellian velocity distribution: :3Ty%W&& 43.传输几率Pc transmission probability: S9U9;>g 44.分子流导CN,UN molecular conductance: r/:9j(yxr 45.流导C,U conductance: iT
4H@ 46.固有流导Ci,Ui intrinsic conductance: XfViLBY(
> 47.流阻W resistance: 2>ce(4Gky 48.吸附 sorption: 'ZL)-kbI 49.表面吸附 adsorption: "O9uz$ 50.物理吸附physisorption: :L*CL 8m 51.化学吸附 chemisorption: ^R>&^"oI 52.吸收absorption: H{p+gj^J 53.适应系数α accommodation factor: zh*NRN 54.入射率υ impingement rate: i]8zZRe 55.凝结率condensation rate: (a&.Ad0{ 56.粘着率 sticking rate: tnRq? 57.粘着几率Ps sticking probability: dRWp/3 } 58.滞留时间τ residence time: wQPjo!FEX 59.迁移 migration: F'pD_d9]e 60.解吸 desorption: +qzsC/y 61.去气 degassing: N@tzYD|hA 62.放气 outgassing: u^!-Z)W 63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: He">kJx 64.蒸发率 evaporation rate: <:RU, 65.渗透 permeation: FjkE^o>
66.渗透率φ permeability: Vwm\a]s 67.渗透系数P permeability coefficient rb`C:#j{J 2. 1.真空泵 vacuum pumps pBK[j([ 1-1.容积真空泵 positive displacement pump: ME0ivr*=: ⑴.气镇真空泵 gas ballast vacuum pump: Ms{v;fT ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: #G)ZhgB^ ⑶.干封真空泵 dry-sealed vacuum pump: %S$P+B? ⑷.往复真空泵 piston vacuum pump: IF5+&O ⑸.液环真空泵 liquid ring vacuum pump: *(D_g!a ⑹.旋片真空泵 sliding vane rotary vacuum pump: JGGss5 ⑺.定片真空泵 rotary piston vacuum pump: 0DS<( ⑻.滑阀真空泵 rotary plunger vacuum pump: ;9B:E"K?@1 ⑼.余摆线真空泵 trochoidal vacuum pump: L.+5`& ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: T3'dfe U ⑾.罗茨真空泵 roots vacuum pump: A6TNtXk 1-2.动量传输泵 kinetic vacuum pump: uysGOyi<u ⑴.牵引分子泵molecular drag pump: olK%TM[Y ⑵.涡轮分子泵turbo molecular pump: ~[ve?51 ⑶.喷射真空泵ejector vacuum pump: Tvf]OJ9N ⑷.液体喷射真空泵liquid jet vacuum pump: '=%vf ⑸.气体喷射真空泵gas jet vacuum pump: G^)|c<'M ⑹.蒸汽喷射真空泵vapor jet vacuum pump : D{a{$Pr ⑺.扩散泵diffusion pump : ==UH)o`?8 ⑻.自净化扩散泵self purifying diffusion pump: O3Ks|%1 ⑼.分馏扩散泵 fractionating diffusion pump : lFI"U^xC ⑽.扩散喷射泵diffusion ejector pump : {#>@h7 ⑾.离子传输泵ion transfer pump: l ^\5Jr03 1-3.捕集真空泵 entrapment vacuum pump: +de.!oY ⑴吸附泵adsorption pump: 4i/ TEHQ ⑵.吸气剂泵 getter pump: ^[^uDE
< ⑶.升华(蒸发)泵 sublimation (evaporation)pump : Bv3?WW ⑷.吸气剂离子泵getter ion pump: s&8QRI. ⑸.蒸发离子泵 evaporation ion pump: *K-,<hJ#L ⑹.溅射离子泵sputter ion pump: 4v E,nx= ⑺.低温泵cryopump: s{<rc> 4s0>QD$J 2.真空泵零部件 Q0ev*MS9Z 2-1.泵壳 pump case: {PYN3\N, 2-2.入口 inlet: X$PT-~!a 2-3.出口outlet: `,\WhJ?9 2-4.旋片(滑片、滑阀)vane; blade : {9'"!fH 2-5.排气阀discharge valve: ]yCmGt+b 2-6.气镇阀gas ballast valve: )h>Cp,|{ 2-7.膨胀室expansion chamber: -pa.-@ 2-8.压缩室compression chamber: ) ,*&rd! 2-9.真空泵油 vacuum pump oil: Gh42qar` 2-10.泵液 pump fluid: :q^g+Bu= 2-11.喷嘴 nozzle: a/`fJY6rR 2-13.喷嘴扩张率nozzle expansion rate: 36&7J{MU 2-14.喷嘴间隙面积 nozzle clearance area : hMi!H.EX. 2-15.喷嘴间隙nozzle clearance: n'%*vdHKm 2-16.射流jet: .+{nfmc,c 2-17.扩散器diffuser: K6!`b(
v# 2-18.扩散器喉部diffuser thoat: ,ulTZV 2-19.蒸汽导管vapor tube(pipe;chimney): f,`FbT 2-20.喷嘴组件nozzle assembly: h/eKVRGs" 2-21.下裙skirt: X+bLLW>& OuS{ve 3.附件 \p [!@d^ 3-1阱trap: v8-F;>H ⑴.冷阱 cold trap: 7d'4"c;*; ⑵.吸附阱sorption trap: B'atwgI0 ⑶.离子阱ion trap: 49HtI9@ ⑷.冷冻升华阱 cryosublimation trap: ?#slg8[ 3-2.挡板baffle: v%86JUlK. 3-3.油分离器oil separator: od?Q&'A 3-4.油净化器oil purifier: o.}^6.h" 3-5.冷凝器condenser: BjOrQAO IO]Oo3 4.泵按工作分类 ] p'+F 4-1.主泵main pump: 5
BcuLRId: 4-2.粗抽泵roughing vacuum pump: YN"102CK 4-3.前级真空泵backing vacuum pump: Jg;Hg[ 4-4.粗(低)真空泵 roughing(low)vacuum pump: k=nfo-h 4-5.维持真空泵holding vacuum pump: dpE\eXoa, 4-6.高真空泵high vacuum pump: }wj*^>* 4-7.超高真空泵ultra-high vacuum pump: >i@gR 4-8.增压真空泵booster vacuum pump: XD%?'uUQ_ wyAqrf 5.真空泵特性 Me5umA 5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: 5g/^wKhKG 5-2.真空泵的抽气量Q throughput of vacuum pump:。 $@8\9Y
{ 5-3.起动压力starting pressure: ]p+t>'s 5-4.前级压力 backing pressure : "eh"'Z 5-5.临界前级压力 critical backing pressure: J,m.LpY 5-6.最大前级压力maximum backing pressure: bs%]xf
~D; 5-7.最大工作压力maximum working pressure: (IJf2 5-8.真空泵的极限压力ultimate pressure of a pump: ~3f#cEP>d} 5-9.压缩比compression ratio: },[S 9I`p 5-10.何氏系数Ho coefficient: \mWXr*; 5-11.抽速系数speed factor: ]2b" oHg 5-12.气体的反扩散back-diffusion of gas: .7E- 5-13.泵液返流back-streaming of pump fluid: !j YV,:' 5-14.返流率back-streaming rate hTVN`9h7 5-15.返迁移back-migration: ub4(mS 5-16.爆腾bumping: >+,1@R 5-17.水蒸气允许量qm water vapor tolerable load: s/P\w"/fN 5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: K"-N:OV 5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: ,u~\$Az6 5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump 9n8;eE08 3. 1.一般术语 >KGQ#hnH 1-1.压力计pressure gauge: NS b<
7_L 1-2.真空计vacuum gauge: S$muV9z2= ⑴.规头(规管)gauge head: o L6[i'H| ⑵.裸规nude gauge : DgOoEHy[ ⑶.真空计控制单元gauge control unit : F<IqKgGzH ⑷.真空计指示单元gauge indicating unit : {"{J*QH WxO*{`T! 2.真空计一般分类 nW|[poQK 2-1.压差式真空计differential vacuum gauge: 9h*$P:S;1v 2-2.绝对真空计 absolute vacuum gauge: |U7{!yy%MF 2-3.全压真空计total pressure vacuum gauge: 3]}W 2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: >|z=-hqPK 2-5.相对真空计relative vacuum gauge : BKvF,f/g /hI#6k8o_ 3.真空计特性 OQ!mL3f 3-1.真空计测量范围pressure range of vacuum gauge: _}JygOew 3-2.灵敏度系数sensitivity coefficient: O8dDoP\F2 3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): b[RBp0]x 3-5.规管光电流photon current of vacuum gauge head: @X\nY</E#M 3-6.等效氮压力equivalent nitrogen pressure : |C-B=XE;3 3-7.X射线极限值 X-ray limit: k"Sw,"e>+ 3-8.逆X射线效应anti X-ray effect: YT&_{nL#\ 3-9.布利尔斯效应blears effect: 5-]%D(y cs@5K$v 4.全压真空计 g3x192f 4-1.液位压力计liquid level manometer: hk,Q=}; 4-2.弹性元件真空计elastic element vacuum gauge: K= 06I 4-3.压缩式真空计compression gauge: !4oYQB 4-4.压力天平pressure balance: #3/l4`/j 4-5.粘滞性真空计viscosity gauge : n,Ux>L 4-6.热传导真空计thermal conductivity vacuum gauge : &V$'{ 4-7.热分子真空计thermo-molecular gauge: \vm'D'9 4-8.电离真空计ionization vacuum gauge: s|{K?s 4-9.放射性电离真空计radioactive ionization gauge: $L`7(0U- 4-10.冷阴极电离真空计cold cathode ionization gauge: f#X`e'1 4-11.潘宁真空计penning gauge: R^8Opf_UN 4-12.冷阴极磁控管真空计cold cathode magnetron gauge: Bpk%,*$*) 4-13.放电管指示器discharge tube indicator: [N7[%iQ% 4-14.热阴极电离真空计hot cathode ionization gauge: n\cP17dr 4-15.三极管式真空计triode gauge: 1 !\pwd@{ 4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: !' sDqBZ&7 4-17.B-A型电离真空计Bayard-Alpert gauge: eJy@N 4-18.调制型电离真空计modulator gauge: fylaH(LER 4-19.抑制型电离真空计suppressor gauge: YnI 4-20.分离型电离真空计extractor gauge: K5w22L^=+ 4-21.弯注型电离真空计bent beam gauge: ^i:%;oeG 4-22.弹道型电离真空计 orbitron gauge : Hs-NP#I 4-23.热阴极磁控管真空计hot cathode magnetron gauge: d3n TJ X {z.}u5N 5.分压真空计(分压分析器) 8Q6il- 5-1.射频质谱仪radio frequency mass spectrometer: ;W+.]_$6)T 5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: ;#Mq=Fr-SG 5-3.单极质谱仪momopole mass spectrometer: 8n&" ,)U 5-4.双聚焦质谱仪double focusing mass spectrometer: +Z{4OJK 5-5.磁偏转质谱仪magnetic deflection mass spectrometer: C %EQ9Iq6r 5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: }.T$bj1B;V 5-7.回旋质谱仪omegatron mass spectrometer: hc[GpZcw, 5-8.飞行时间质谱仪time of flight mass spectrometer: 1W/=
=+%I 1eb1Lvn 6.真空计校准 S2<(n," 6-1.标准真空计reference gauges: N!Y'W)i16 6-2.校准系统system of calibration: |f zo$Bq 6-3.校准系数K calibration coefficient: ;
9'*w=V 6-4.压缩计法meleod gauge method: Zn9w1ev 6-5.膨胀法expansion method: Y<0f1N 6-6.流导法flow method: jN*A"m 4. 1.真空系统vacuum system Tzk8y7$[ 1-1.真空机组pump system: n*O/X 1-2.有油真空机组pump system used oil : 2%@j<yS 1-3.无油真空机组oil free pump system !P:hf/l[B 1-4.连续处理真空设备continuous treatment vacuum plant: F^Q 1-5.闸门式真空系统vacuum system with an air-lock: 2r*
o 1-6.压差真空系统differentially pumped vacuum system: pH"LZ7)DI0 1-7.进气系统gas admittance system: q2hZ1o D#k>.)g 2.真空系统特性参量 U9N}6a= 2-1.抽气装置的抽速volume flow rate of a pumping unit : 'Y&yt"cs 2-2.抽气装置的抽气量throughput of a pumping unit : FlkAo] 2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: o oS4F1ta 2-4.真空系统的漏气速率leak throughput of a vacuum system: L g%cVSz/C 2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: $[|8bE 2-6.极限压力ultimate pressure: 3cfkJ|fuwe 2-7.残余压力residual pressure: Stp?? 2-8.残余气体谱residual gas spectrum: atN`w=6A` 2-9.基础压力base pressure: >w*"LZjTTK 2-10.工作压力working pressure: <`N\FM^vo 2-11.粗抽时间roughing time: s*!2oj 2-12.抽气时间pump-down time: #
=322bnO 2-13.真空系统时间常数time constant of a vacuum system: ^SjGNg^ 7D 2-14.真空系统进气时间venting time: &Owt:R)9~ s!+?)bB 3.真空容器 YTGup]d 3-1.真空容器;真空室vacuum chamber: 6l> G>) 3-2.封离真空装置sealed vacuum device: MK"Yt<e(o 3-3.真空钟罩vacuum bell jar: p@Qzg
/X 3-4.真空容器底板vacuum base plate: o0<T|zgF5, 3-5.真空岐管vacuum manifold: dj]sr!q+ 3-6.前级真空容器(贮气罐)backing reservoir: ?]7ITF 3-7.真空保护层outer chamber: 0dgR;Dl(
3-8.真空闸室vacuum air lock: gbInSp`4 3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: f|q6<n_nM cJhf{{_oR 4.真空封接和真空引入线 10 p+e_@ 4-1.永久性真空封接permanent seal : O Ov"h\, 4.2.玻璃分级过渡封接graded seal : {`3;Pd` 4-3.压缩玻璃金属封接compression glass-to-metal seal: T}\U:@b 4-4.匹配式玻璃金属封接matched glass-to-metal seal: G;^iwxzhO 4-5.陶瓷金属封接ceramic-to-metal seal: r^
"mPgY 4-6.半永久性真空封接semi-permanent seal : WUHx0I 4-7.可拆卸的真空封接demountable joint: P, Vq/Tt 4-8.液体真空封接liquid seal @E==~ b 4-9.熔融金属真空封接molten metal seal: opIcSm& 4-10.研磨面搭接封接ground and lapped seal: 6}|vfw 4-11.真空法兰连接vacuum flange connection: ~pF'Qw"z| 4-12.真空密封垫vacuum-tight gasket: w6E?TI 4-13.真空密封圈ring gasket: *PMql $ 4-14.真空平密封垫flat gasket: h`vM+,I 4-15.真空引入线feedthrough leadthrough: n@%'Nbc>b 4-16.真空轴密封shaft seal: cw^FOV*
4-17.真空窗vacuum window: HML6<U-eS 4-18.观察窗viewing window: N..u<06j/ n;q7?KW8 5.真空阀门 ) Z^(+ 5-1.真空阀门的特性characteristic of vacuum valves: /g8yc'{p ⑴.真空阀门的流导conductance of vacuum valves: fx}R7GN2 ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: [UI
bO@e 5-2.真空调节阀regulating valve: {bNnhW*qOu 5-3.微调阀 micro-adjustable valve: Y] n^(V 5-4.充气阀charge valve: w?5b: W, 5-5.进气阀gas admittance valve: MDB}G
' 5-6.真空截止阀break valve: UGN. ]#"# 5-7.前级真空阀backing valve: iD]!PaFD` 5-8.旁通阀 by-pass valve: 2HTZ,W 5-9.主真空阀main vacuum valve: " 7aFVf 5-10.低真空阀low vacuum valve: M9N|Ql 5-11.高真空阀high vacuum valve: L8$7^muad 5-12.超高真空阀;UHV阀 ultra-high vacuum valve: X;0EgIqh3 5-13.手动阀manually operated valve: ML'R[~| 5-14.气动阀pneumatically operated valve: iFHVr'Og' 5-15.电磁阀electromagnetically operated valve: K crF=cA 5-16.电动阀valve with electrically motorized operation: SKS[Lf 5-17.挡板阀baffle valve: "TxXrt%>A 5-18.翻板阀flap valve: *i\7dJ Dj 5-19.插板阀gate valve: eIEcj<f 5-20.蝶阀butterfly valve: zMG4oRPP 9S<W~# zz 6.真空管路 \Js9U|lY 6-1.粗抽管路roughing line: hrW.TwK 6-2.前级真空管路backing line: Zkz:h7GUG- 6-3.旁通管路;By-Pass管路 by-pass line: HD`%Ma
Yhc 6-4.抽气封口接头pumping stem: :*8@MjZ4 6-5.真空限流件limiting conductance: <8y8^m`P9 6-6.过滤器filter: NH?s 5. 1.一般术语 LCdc7 1-1真空镀膜vacuum coating: wY=ky629 1-2基片substrate: )Q\;N C=4 1-3试验基片testing substrate: ,~3 sba 1-4镀膜材料coating material: +&t{IP(? 1-5蒸发材料evaporation material: r&H>JCRZ<= 1-6溅射材料sputtering material: ;m&f Vp 1-7膜层材料(膜层材质)film material: HL)1{[|` 1-8蒸发速率evaporation rate: "w A8J%: 1-9溅射速率sputtering rate: @4Y>)wn&; 1-10沉积速率deposition rate: :l7\7IT 1-11镀膜角度coating angle: q)%C| ``NjNd 2.工艺 xE9s=} 2-1真空蒸膜vacuum evaporation coating: 2z-&Ya Qu (1).同时蒸发simultaneous evaporation: 16]O^R;r (2).蒸发场蒸发evaporation field evaporation: <oeHZD_OR (3).反应性真空蒸发reactive vacuum evaporation: xqG`
_S
l (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: w
S;(u[W (5).直接加热的蒸发direct heating evaporation: 5]F9o9]T (6).感应加热蒸发induced heating evaporation: Cf+O7Y`^ (7).电子束蒸发electron beam evaporation: `t8e2?GH (8).激光束蒸发laser beam evaporation: [Y:HVr, (9).间接加热的蒸发indirect heating evaporation: ~#-`Qh (10).闪蒸flash evaportion: Ig6s'^ 2-2真空溅射vacuum sputtering: (_W[~df4 (1).反应性真空溅射 reactive vacuum sputtering: ~L1N1Z)Kk (2).偏压溅射bias sputtering: g_}@/5?y (3).直流二级溅射direct current diode sputtering: :q= XE$%H (4).非对称性交流溅射asymmtric alternate current sputtering: :b
;5O3:B (5).高频二极溅射high frequency diode sputtering: WTd})
s (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: @emZwN"m (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: @hv9=v+ (8).离子束溅射ion beam sputtering: wbpxJtJB (9).辉光放电清洗glow discharge cleaning: |l~ADEg 2-3物理气相沉积PVD physical vapor deposition: AHLDURv 2-4化学气相沉积CVD chemical vapor deposition: ;3-ssF}k* 2-5磁控溅射magnetron sputtering: 1n5&PNu 2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: Z-~^)l o 2-7空心阴极离子镀HCD hollow cathode discharge deposition: qaQ 2-8电弧离子镀arc discharge deposition: kBT cND| 9V;m;sz 3.专用部件 QO%LSRw 3-1镀膜室coating chamber: d#W[<, 3-2蒸发器装置evaporator device: BE U[M 3-3蒸发器evaporator: fY `A 3-4直接加热式蒸发器evaporator by direct heat: Fb*;5VNU. 3-5间接加热式蒸发器evaporator by indirect heat: ' ZB%McS 3-7溅射装置sputtering device: D +oo5 3-8靶target: RXP"v- 3-10时控挡板timing shutter: gf!j|O ; 3-11掩膜mask: `?>OY&( 3-12基片支架substrate holder: kfHLjr. 3-13夹紧装置clamp: d,>l;l 3-14换向装置reversing device: ~:0h o 3-15基片加热装置substrate heating device: c]O4l2nCL 3-16基片冷却装置substrate colding device: 9*x9sfCv9 ,5/gNg 4.真空镀膜设备 leiza?[ 4-1真空镀膜设备vacuum coating plant: @tP,l$O& (1).真空蒸发镀膜设备vacuum evaporation coating plant: 5yQgGd) (2).真空溅射镀膜设备vacuum sputtering coating plant: ik]UzB 4-2连续镀膜设备continuous coating plant:
#8(@a
Y 4-3半连续镀膜设备semi- continuous coating plant -}>Q0d ) 6. 1.漏孔 8<o(z'&y 1-1漏孔leaks: "kL5HD]TC 1-2通道漏孔channel leak: ](O!6_'d 1-3薄膜漏孔membrane leak: .$r(":A#) 1-4分子漏孔molecular leak: 6Y=$7%z 1-5粘滞漏孔vixcous leak: /!LfEO 1-6校准漏孔calibrated leak: E0*81PS 1-7标准漏孔reference leak : 2yN~[,L 1-8虚漏virtual leak: zi5;>Iv0} 1-9漏率leak rate: Aw5yvQ>]e 1-10标准空气漏率standard air leak rate: FPu,sz8 1-11等值标准空气漏率equivalent standard air leak rate: >Rr]e`3wG 1-12探索(示漏)气体: ^v`|0z\ _[.`QW~ 2.本底 t[X'OK0W%3 2-1本底background: _|#)tWy} 2-2探索气体本底search gas background : m7d? SU 2-3漂移drift: -m-~ 2-4噪声noise: Q!@"Y/ Iz ,C!c 3.检漏仪 9iGJYMWf 3-1检漏仪leak detector: fghJj@ES 3-2高频火花检漏仪H.F. spark leak detector: yYW>) 3-3卤素检漏仪halide leak detector: k<AnTboa 3-4氦质谱检漏仪helium mass spectrometer leak detector: jirxzj 3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: |{Oe&j3| uRp-yu[nt% 4.检漏 9]|cs 4-1气泡检漏leak detection by bubbles: oo/#]a 4-2氨检漏leak detection by ammonia: _RAPXU~ 6- 4-3升压检漏leak detection of rise pressure: )WD<Q x& | |