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cswmsc 2007-02-28 23:18

真空术语全集

“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 Vq/hk  
--------------------------------------------------- N)a5~<fBG  
真空术语 [Jjo H1E@  
QFN9j  
1.标准环境条件 standard ambient condition: ~|"uuA1/#O  
2.气体的标准状态 standard reference conditions forgases: qsN_EMgbdn  
3.压力(压强)p pressure: g;OR{  
4.帕斯卡Pa pascal: ! ,{N>{I  
5.托Torr torr: ux*G*QZ  
6.标准大气压atm standard atmosphere: !6sR|c"~j  
7.毫巴mbar millibar: Snn4RB<(  
8.分压力 partial pressure: 1{RA\CF  
9.全压力 total pressure: *-.`Q  
10.真空 vacuum: W5()A,R  
11.真空度 degree of vacuum: j9w{=( MV  
12.真空区域 ranges of vacuum: t$p%UyVE  
13.气体 gas: 0F6@aQ\y3  
14.非可凝气体 non-condensable gas: ~BgYD)ov  
15.蒸汽vapor: ;9-J=@KY4  
16.饱和蒸汽压saturation vapor pressure: C OL"/3r  
17.饱和度degree of saturation: DY/%|w*L  
18.饱和蒸汽saturated vapor: 0"N4WH O  
19.未饱和蒸汽unsaturated vapor: 1W-kZ(e  
20.分子数密度n,m-3 number density of molecules: D8xE"6T>  
21.平均自由程ι、λ,m mean free path: M0e&GR8<z>  
22.碰撞率ψ collision rate: s<:) ;-tL  
23.体积碰撞率χ volume collision rate: (KfQ'B+  
24.气体量G quantity of gas: x%T^:R  
25.气体的扩散 diffusion of gas: 0R0_UvsXU  
26.扩散系数D diffusion coefficient; diffusivity: D vN0h(?  
27.粘滞流 viscous flow: Y t_t>  
28.粘滞系数η viscous factor: .b!HEi<F  
29.泊肖叶流 poiseuille flow: E@l@f  
30.中间流 intermediate flow: Zs;c0T ">  
31.分子流 molecular flow: c=a;<,Rzb  
32克努曾数 number of knudsen: !c0x^,iE  
33.分子泻流 molecular effusion; effusive flow: \<y|[  
34.流逸 transpiration: >}C:EnECy  
35.热流逸 thermal transpiration: muBl~6_mb2  
36.分子流率qN molecular flow rate; molecular flux: f'7/Wj  
37.分子流率密度 molecular flow rate density; density of molecular flux: ^)$T`  
38.质量流率qm mass flow rare: 7C_U:x  
39.流量qG throughput of gas: .lI.I  
40.体积流率qV volume flow rate: 31M'71s  
41.摩尔流率qυ molar flow rate: :9q|<[Y^  
42.麦克斯韦速度分布 maxwellian velocity distribution: p_fsEY  
43.传输几率Pc transmission probability: jxq89x  
44.分子流导CN,UN molecular conductance: !wKNYe  
45.流导C,U conductance: OMab!  
46.固有流导Ci,Ui intrinsic conductance: V=PK)FJ  
47.流阻W resistance: v0;dk(  
48.吸附 sorption: RaymSh  
49.表面吸附 adsorption: Pp4Q)2X  
50.物理吸附physisorption: =BV_ ?  
51.化学吸附 chemisorption: CHL5@gg@>y  
52.吸收absorption: O -p^S  
53.适应系数α accommodation factor: .\)ek[?  
54.入射率υ impingement rate: cA]PZ*]{BN  
55.凝结率condensation rate: nn">   
56.粘着率 sticking rate: U D5hk  
57.粘着几率Ps sticking probability: U9%^gC  
58.滞留时间τ residence time: hsQ*ozv[)  
59.迁移 migration: a +9_sUq  
60.解吸 desorption: 8)b*q\ O'  
61.去气 degassing: k^s7s{  
62.放气 outgassing: uhwCC  
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: ZKB27D_vg>  
64.蒸发率 evaporation rate: nA=E|$1  
65.渗透 permeation: bZ+H u~  
66.渗透率φ permeability: em ]0^otM  
67.渗透系数P permeability coefficient uw`J5TND  
2.   1.真空泵 vacuum pumps  %Rm`YH?  
1-1.容积真空泵 positive displacement pump: :&RpB^]  
⑴.气镇真空泵 gas ballast vacuum pump: wqX!7rD/g)  
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: =jU#0FAO  
⑶.干封真空泵 dry-sealed vacuum pump: "9y 0]~  
⑷.往复真空泵 piston vacuum pump: -9s&OKo`({  
⑸.液环真空泵 liquid ring vacuum pump: u 1Wixjd|  
⑹.旋片真空泵 sliding vane rotary vacuum pump: T\7t#Z k  
⑺.定片真空泵 rotary piston vacuum pump: M=EV^Tw-=  
⑻.滑阀真空泵 rotary plunger vacuum pump: )Oj{x0{\Q  
⑼.余摆线真空泵 trochoidal vacuum pump: 'm/`= QX  
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: #g1,U7vv8  
⑾.罗茨真空泵 roots vacuum pump: RTL@WI  
1-2.动量传输泵 kinetic vacuum pump: /BM{tH  
⑴.牵引分子泵molecular drag pump: XNl!?*l5?l  
⑵.涡轮分子泵turbo molecular pump: `2HNQiK'@  
⑶.喷射真空泵ejector vacuum pump: 8ROZ]Xh,x  
⑷.液体喷射真空泵liquid jet vacuum pump: >kDkvg1"  
⑸.气体喷射真空泵gas jet vacuum pump: .bRDz:?j  
⑹.蒸汽喷射真空泵vapor jet vacuum pump : I5rAL\y-G  
⑺.扩散泵diffusion pump : r+h$]OJ  
⑻.自净化扩散泵self purifying diffusion pump: 5&134!hC  
⑼.分馏扩散泵 fractionating diffusion pump : 1f2*S$[*L  
⑽.扩散喷射泵diffusion ejector pump : QG XR<Y  
⑾.离子传输泵ion transfer pump: ] ; B`'Ia  
1-3.捕集真空泵 entrapment vacuum pump: #[~f 6s9D  
⑴吸附泵adsorption pump: j[fY.>yt&  
⑵.吸气剂泵 getter pump: AUr~b3< 6  
⑶.升华(蒸发)泵 sublimation (evaporation)pump : 3rx 8"  
⑷.吸气剂离子泵getter ion pump: ?T'a{ ~]R  
⑸.蒸发离子泵 evaporation ion pump: 4Jw_gOY&D  
⑹.溅射离子泵sputter ion pump: >WY\P4)k  
⑺.低温泵cryopump: __-V_(/b,x  
LJ*W&y(2>Q  
2.真空泵零部件 (:7Z-V2(  
2-1.泵壳 pump case: HQ/ Q"  
2-2.入口 inlet: YH0utc  
2-3.出口outlet: ygqWy1C  
2-4.旋片(滑片、滑阀)vane; blade : iE"+-z\U  
2-5.排气阀discharge valve: :g)`V4%  
2-6.气镇阀gas ballast valve: n%ZOR1u)k#  
2-7.膨胀室expansion chamber: mX@!O[f%9e  
2-8.压缩室compression chamber: -JXCO <~k  
2-9.真空泵油 vacuum pump oil: IoHYY:[-  
2-10.泵液 pump fluid: 5R*55@)  
2-11.喷嘴 nozzle: _Xfn  
2-13.喷嘴扩张率nozzle expansion rate: #]s&[O43  
2-14.喷嘴间隙面积 nozzle clearance area : T<u QhPMw  
2-15.喷嘴间隙nozzle clearance: ,4S6F HK  
2-16.射流jet: 'o ZdMl&  
2-17.扩散器diffuser: p}yp!(l  
2-18.扩散器喉部diffuser thoat: 1&utf0TX6q  
2-19.蒸汽导管vapor tube(pipe;chimney): o[ 4e_ @E  
2-20.喷嘴组件nozzle assembly: o/I`L  
2-21.下裙skirt: $`|\aXd[C*  
`it  
3.附件 - D^v:aC  
3-1阱trap: sN@=Ri?\  
⑴.冷阱 cold trap: 3TNj*jo  
⑵.吸附阱sorption trap: h`V#)Q  
⑶.离子阱ion trap: `:fh$V5J>  
⑷.冷冻升华阱 cryosublimation trap: m+pFU?<|  
3-2.挡板baffle: Y| F~w~Cb  
3-3.油分离器oil separator: HD8*>p.  
3-4.油净化器oil purifier: ,h* 'Cs04h  
3-5.冷凝器condenser: L9,O,f  
ifcC [.im  
4.泵按工作分类 &z;1Z  
4-1.主泵main pump: U3M;6j9`  
4-2.粗抽泵roughing vacuum pump: #;s5=aH  
4-3.前级真空泵backing vacuum pump: I{uwT5QT-  
4-4.粗(低)真空泵 roughing(low)vacuum pump: })5I/   
4-5.维持真空泵holding vacuum pump: I_iXu;UX  
4-6.高真空泵high vacuum pump: Og9:MFI  
4-7.超高真空泵ultra-high vacuum pump: *T0!q#R  
4-8.增压真空泵booster vacuum pump: 'E kuCL  
\@GKVssw  
5.真空泵特性 >vfbXnN  
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: K&TO8   
5-2.真空泵的抽气量Q throughput of vacuum pump:。 _|s'0F/t  
5-3.起动压力starting pressure: eBg:[4 4V  
5-4.前级压力 backing pressure : *n2le7  
5-5.临界前级压力 critical backing pressure: rFG_CC2  
5-6.最大前级压力maximum backing pressure: }"6 PM)s  
5-7.最大工作压力maximum working pressure: h7o?z!  
5-8.真空泵的极限压力ultimate pressure of a pump: nlR7V.  
5-9.压缩比compression ratio: ,2Q5'!o  
5-10.何氏系数Ho coefficient: d\j[O9W>  
5-11.抽速系数speed factor: 1'BC R  
5-12.气体的反扩散back-diffusion of gas: )LjW=;(b  
5-13.泵液返流back-streaming of pump fluid: iJ!p9E*(  
5-14.返流率back-streaming rate [IPXU9& Q  
5-15.返迁移back-migration: =~ [RG  
5-16.爆腾bumping: ^?-wov$  
5-17.水蒸气允许量qm water vapor tolerable load: >4]y)df5  
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: +$\/HO  
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: 9]PMti  
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump Q;0 g  
3.   1.一般术语 fW3NH7aUG  
1-1.压力计pressure gauge: @Avve8S  
1-2.真空计vacuum gauge: +$ 0wBU  
⑴.规头(规管)gauge head: \??20iz  
⑵.裸规nude gauge : J6RzN'j  
⑶.真空计控制单元gauge control unit : )6:1`&6  
⑷.真空计指示单元gauge indicating unit : 8 ;"HM5+  
}^zsN`  
2.真空计一般分类 X@H/"B%u2  
2-1.压差式真空计differential vacuum gauge: R 9b0D>Lxt  
2-2.绝对真空计 absolute vacuum gauge: *8I &|)x  
2-3.全压真空计total pressure vacuum gauge: 2dJP|T9H  
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: (u-eL#@  
2-5.相对真空计relative vacuum gauge : agp7zw=N  
.1A/hAdU  
3.真空计特性 V&Q_i E  
3-1.真空计测量范围pressure range of vacuum gauge: JbLHW26pl  
3-2.灵敏度系数sensitivity coefficient: 'QC'*Hl  
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): ms`U,  
3-5.规管光电流photon current of vacuum gauge head: 9oTtH7%  
3-6.等效氮压力equivalent nitrogen pressure : )h`8</#m{  
3-7.X射线极限值 X-ray limit: QHgkfo  
3-8.逆X射线效应anti X-ray effect: JXF0}T)C  
3-9.布利尔斯效应blears effect: L^x h5{  
.0?A0D?sP  
4.全压真空计 -xL^UcG0  
4-1.液位压力计liquid level manometer: s%i \z }/  
4-2.弹性元件真空计elastic element vacuum gauge: fRomP-S  
4-3.压缩式真空计compression gauge: -SUK [<=X  
4-4.压力天平pressure balance: Y4 {/P1F  
4-5.粘滞性真空计viscosity gauge : $tB `dDj  
4-6.热传导真空计thermal conductivity vacuum gauge : @cu#rWiG  
4-7.热分子真空计thermo-molecular gauge: A&D<}y/%  
4-8.电离真空计ionization vacuum gauge: W}'l8z]   
4-9.放射性电离真空计radioactive ionization gauge: ^"] ]rZ)  
4-10.冷阴极电离真空计cold cathode ionization gauge: BD?u|Fd,i:  
4-11.潘宁真空计penning gauge: ob]j1gYb  
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: vC!B}~RG  
4-13.放电管指示器discharge tube indicator: V-k x=M"k  
4-14.热阴极电离真空计hot cathode ionization gauge: ?ZP@H _w6}  
4-15.三极管式真空计triode gauge: "X \Yp_g  
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: 9NeHN@D)  
4-17.B-A型电离真空计Bayard-Alpert gauge: <HH\VG\H6  
4-18.调制型电离真空计modulator gauge: >9<YQ(  
4-19.抑制型电离真空计suppressor gauge: r-$VPW  
4-20.分离型电离真空计extractor gauge: ;*njS1@  
4-21.弯注型电离真空计bent beam gauge: 8,-U`.  
4-22.弹道型电离真空计 orbitron gauge : l4*vM  
4-23.热阴极磁控管真空计hot cathode magnetron gauge: |o<c`:;kt  
dF$&fo%  
5.分压真空计(分压分析器) {JQCfs  
5-1.射频质谱仪radio frequency mass spectrometer: 6o&ZS @  
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: }h1y^fuGi  
5-3.单极质谱仪momopole mass spectrometer: vOo-jUKs  
5-4.双聚焦质谱仪double focusing mass spectrometer: mv>-XJ+  
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: @]7s`?  
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: 6k`O  
5-7.回旋质谱仪omegatron mass spectrometer: ^j7>Ul,  
5-8.飞行时间质谱仪time of flight mass spectrometer: 0( q:K6zI}  
yb!/DaCd  
6.真空计校准 ;e6L@)dp9  
6-1.标准真空计reference gauges: Tly*i"[&  
6-2.校准系统system of calibration: 6'Q*SO;1gh  
6-3.校准系数K calibration coefficient: Vp&"[rC_z  
6-4.压缩计法meleod gauge method: _6-N+FI  
6-5.膨胀法expansion method: m>djoe  
6-6.流导法flow method: Zmm6&OZ%  
4.   1.真空系统vacuum system S/dj])g  
1-1.真空机组pump system: p %hvDC  
1-2.有油真空机组pump system used oil : ||Vx:(d7D&  
1-3.无油真空机组oil free pump system BAojP1}+,  
1-4.连续处理真空设备continuous treatment vacuum plant: BvP++,a&Sa  
1-5.闸门式真空系统vacuum system with an air-lock: |f1RhB  
1-6.压差真空系统differentially pumped vacuum system: Yf_/c*t\5  
1-7.进气系统gas admittance system: u Au'2M,_  
eW;c 3<  
2.真空系统特性参量 B]I*ymc#  
2-1.抽气装置的抽速volume flow rate of a pumping unit : |? rO  
2-2.抽气装置的抽气量throughput of a pumping unit : \%_sL#?  
2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: hISYtNWjd"  
2-4.真空系统的漏气速率leak throughput of a vacuum system: /0b7"Kr  
2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: Q w)U  
2-6.极限压力ultimate pressure: ? (M$r\\  
2-7.残余压力residual pressure: Y>x3`f]  
2-8.残余气体谱residual gas spectrum: ;@qQ^!g2  
2-9.基础压力base pressure: IZuP{7p$  
2-10.工作压力working pressure: q);oO\<  
2-11.粗抽时间roughing time: +wfZFJ:1l  
2-12.抽气时间pump-down time: [9yd29pQ]  
2-13.真空系统时间常数time constant of a vacuum system: hPuF:iiQ4  
2-14.真空系统进气时间venting time: .Hg{$SAC(w  
`4wy *!]  
3.真空容器 b^A7R{G7  
3-1.真空容器;真空室vacuum chamber: eoJ*?v  
3-2.封离真空装置sealed vacuum device: xVTl  
3-3.真空钟罩vacuum bell jar: &FG0v<f5Pv  
3-4.真空容器底板vacuum base plate: ,(f({l[J}  
3-5.真空岐管vacuum manifold: 3zv0Nwb,  
3-6.前级真空容器(贮气罐)backing reservoir: mR~S$6cc  
3-7.真空保护层outer chamber: $3xDjiBb  
3-8.真空闸室vacuum air lock: uK0L>  
3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: 9'p*7o  
P!gY&>EU  
4.真空封接和真空引入线 h6?o)Q>N  
4-1.永久性真空封接permanent seal : jOZ>^5}  
4.2.玻璃分级过渡封接graded seal : ,{_56j^d,  
4-3.压缩玻璃金属封接compression glass-to-metal seal: EqOhzII^  
4-4.匹配式玻璃金属封接matched glass-to-metal seal: rNICK2Ah  
4-5.陶瓷金属封接ceramic-to-metal seal: # )s +I2  
4-6.半永久性真空封接semi-permanent seal : 3Xy~ap>Y  
4-7.可拆卸的真空封接demountable joint: 5sSAH  
4-8.液体真空封接liquid seal ZCA= n  
4-9.熔融金属真空封接molten metal seal: =i6k[rg  
4-10.研磨面搭接封接ground and lapped seal: 8 mt#S  
4-11.真空法兰连接vacuum flange connection: `|mV~F|  
4-12.真空密封垫vacuum-tight gasket: NTSIClm}U  
4-13.真空密封圈ring gasket: S5r.so  
4-14.真空平密封垫flat gasket: &'Xgf!x  
4-15.真空引入线feedthrough leadthrough: l;@bs  
4-16.真空轴密封shaft seal: /#SH`ZK  
4-17.真空窗vacuum window: ?5F;4 oR2g  
4-18.观察窗viewing window: i-. AD4  
:w)9 (5  
5.真空阀门 x4,[5N"}YK  
5-1.真空阀门的特性characteristic of vacuum valves: 7jGfQ  
⑴.真空阀门的流导conductance of vacuum valves: _Ud!tK*H  
⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: ]W5p\(1g  
5-2.真空调节阀regulating valve: S;oRE' kk  
5-3.微调阀 micro-adjustable valve: (EH}lh }%  
5-4.充气阀charge valve: 3QF[@8EH{  
5-5.进气阀gas admittance valve: bdEI vf7  
5-6.真空截止阀break valve: uMRzUK`QK  
5-7.前级真空阀backing valve: q s:TR  
5-8.旁通阀 by-pass valve:  x$FcF8  
5-9.主真空阀main vacuum valve: 7~;)N$d\  
5-10.低真空阀low vacuum valve: y1[@4TY]  
5-11.高真空阀high vacuum valve: L-zU%`1{M  
5-12.超高真空阀;UHV阀 ultra-high vacuum valve: `i+2YCk  
5-13.手动阀manually operated valve: [.6bxK  
5-14.气动阀pneumatically operated valve: i 1Kq (7  
5-15.电磁阀electromagnetically operated valve: /lhk} y^  
5-16.电动阀valve with electrically motorized operation: 74&{GCL  
5-17.挡板阀baffle valve: 4~8-^^  
5-18.翻板阀flap valve: tY:,9eh7B  
5-19.插板阀gate valve:  Sr_hD5!  
5-20.蝶阀butterfly valve: [+="I &  
fPstS ez   
6.真空管路 ^ > ?C  
6-1.粗抽管路roughing line: \rE] V,,2  
6-2.前级真空管路backing line: s3'kzwX  
6-3.旁通管路;By-Pass管路 by-pass line: JIqg[Mao  
6-4.抽气封口接头pumping stem: SR_ -wD  
6-5.真空限流件limiting conductance:       {,?Gj@$  
6-6.过滤器filter: nB]mj _)R^  
5.   1.一般术语 l}k'ZX4  
1-1真空镀膜vacuum coating: LI^D\  
1-2基片substrate: o/[Ks;l  
1-3试验基片testing substrate: ej1WkaR8  
1-4镀膜材料coating material: S~&9DQNj  
1-5蒸发材料evaporation material: ` k(Q:  
1-6溅射材料sputtering material: =W>a~e]/  
1-7膜层材料(膜层材质)film material: 2|U6dLZ!  
1-8蒸发速率evaporation rate: l3/Cj^o4  
1-9溅射速率sputtering rate: =@q,/FR-  
1-10沉积速率deposition rate: V#R; -C  
1-11镀膜角度coating angle: 4vND ~9d  
"KSdC8MS  
2.工艺 lHHx D  
2-1真空蒸膜vacuum evaporation coating: Sz]1`%_H/  
(1).同时蒸发simultaneous evaporation: TtQd#mSI\  
(2).蒸发场蒸发evaporation field evaporation: XqwP<5Z  
(3).反应性真空蒸发reactive vacuum evaporation:  *I}_g4  
(4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: 1^ go)(Mx  
(5).直接加热的蒸发direct heating evaporation: 4ElS_u^cP7  
(6).感应加热蒸发induced heating evaporation: @ScC32X  
(7).电子束蒸发electron beam evaporation: G*~CB\K_  
(8).激光束蒸发laser beam evaporation: b! teSf  
(9).间接加热的蒸发indirect heating evaporation: L$@+'Qn@:  
(10).闪蒸flash evaportion: ZwiXeD+4  
2-2真空溅射vacuum sputtering: 8dJ+Ei~M  
(1).反应性真空溅射 reactive vacuum sputtering: ?_ v_*+b_  
(2).偏压溅射bias sputtering: jj]|}G  
(3).直流二级溅射direct current diode sputtering: D9hq$?  
(4).非对称性交流溅射asymmtric alternate current sputtering: IWI$@dng6  
(5).高频二极溅射high frequency diode sputtering: z46Sh&+  
(6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: WM4,\$  
(7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: Xg\unUHa  
(8).离子束溅射ion beam sputtering: %?F$3YN,  
(9).辉光放电清洗glow discharge cleaning: 6&L;Sw#Dg  
2-3物理气相沉积PVD physical vapor deposition: $vn)(zn+  
2-4化学气相沉积CVD chemical vapor deposition: NL2D,  
2-5磁控溅射magnetron sputtering: 6E(..fo:"  
2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: nT(AO-Ue^  
2-7空心阴极离子镀HCD hollow cathode discharge deposition: @W~aoq6  
2-8电弧离子镀arc discharge deposition: 2 MW7nIEs  
i [Wxu M  
3.专用部件 @x;(yqOb  
3-1镀膜室coating chamber: _'^_9u G  
3-2蒸发器装置evaporator device: C)UU/4a;  
3-3蒸发器evaporator: -.L )\  
3-4直接加热式蒸发器evaporator by direct heat: 6\ .LG4@LO  
3-5间接加热式蒸发器evaporator by indirect heat: A"R(?rQi=  
3-7溅射装置sputtering device: ULs'oT)K;  
3-8靶target: fKtlfQG  
3-10时控挡板timing shutter: L|;sB=$'{  
3-11掩膜mask: !DHfw-1K  
3-12基片支架substrate holder: .' h^  
3-13夹紧装置clamp: 1Tev&J  
3-14换向装置reversing device: E]S:F3  
3-15基片加热装置substrate heating device: x|()f 3{.  
3-16基片冷却装置substrate colding device: r`RLDN!`  
{.DY\;Q  
4.真空镀膜设备 <Q`3;ca^  
4-1真空镀膜设备vacuum coating plant: NW*#./WdF8  
(1).真空蒸发镀膜设备vacuum evaporation coating plant: Q ;5A~n  
(2).真空溅射镀膜设备vacuum sputtering coating plant: uyWw3>  
4-2连续镀膜设备continuous coating plant: -"^xg"  
4-3半连续镀膜设备semi- continuous coating plant 2uV5hSHYe  
6.   1.漏孔 ;vbM C74J#  
1-1漏孔leaks: T21?~jS  
1-2通道漏孔channel leak: \+0l#t$  
1-3薄膜漏孔membrane leak: <Z\{ijfvD  
1-4分子漏孔molecular leak: )_?h;wh 84  
1-5粘滞漏孔vixcous leak: SUW=-M  
1-6校准漏孔calibrated leak: v!$?;"d+  
1-7标准漏孔reference leak : !\O!Du  
1-8虚漏virtual leak: N[v=;&  
1-9漏率leak rate: 7r.~L  
1-10标准空气漏率standard air leak rate: m}S}fH(  
1-11等值标准空气漏率equivalent standard air leak rate: mZuLwd$0  
1-12探索(示漏)气体: <=w!:   
.])X.7@x  
2.本底 _N>#/v)Yi  
2-1本底background: "CREls,  
2-2探索气体本底search gas background : VUz+ _)  
2-3漂移drift: ,|,kU0xXz  
2-4噪声noise: 1?.NJ<)F  
Ww#!-,*]o  
3.检漏仪 B7'yc`)H  
3-1检漏仪leak detector:  obPG]*3  
3-2高频火花检漏仪H.F. spark leak detector: ]!a?Lr  
3-3卤素检漏仪halide leak detector: SZ7; } r8  
3-4氦质谱检漏仪helium mass spectrometer leak detector: (A=Z,ed  
3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: s<aG  
.j=mT[N,I  
4.检漏 PAxR?2m{  
4-1气泡检漏leak detection by bubbles: U3UA  
4-2氨检漏leak detection by ammonia: :Gx5vo  
4-3升压检漏leak detection of rise pressure: uY/C iTWr  
4-4放射性同位素检漏radioactive isotope leak detection: XD_!5+\H1  
4-5荧光检漏fluorescence leak detection !@ y/{~Gu  
7.   1.一般术语 3TS:H1n  
1-1真空干燥vacuum drying:  acQHqR  
1-2冷冻干燥freeze drying : 2~B5?(g  
1-3物料material: %=\*OIhl  
1-4待干燥物料material to be dried: ?du*ITim  
1-5干燥物料dried material : |zd5P  
1-6湿气moisture;humidity: 4mpcI  
1-7自由湿气free moisture: r}:U'zlC{  
1-8结合湿气bound moisture: UdA,.C0  
1-9分湿气partial moisture: gFfKK`)}D'  
1-10含湿量moisture content: p<w C{D  
1-11初始含湿量initial moisture content: ,q{~lf -  
1-12最终含湿量final residual moisture: cR*~JwC:  
1-13湿度degree of moisture ,degree of humidity : | qelvK*  
1-14干燥物质dry matter : BqA_C W  
1-15干燥物质含量content of dry matter: nNnfcA&W  
.C ,dV7  
2.干燥工艺 9- 24c  
2-1干燥阶段stages of drying : _5$L`&  
(1).预干燥preliminary dry: i*A_Po  
(2).一次干燥(广义)primary drying(in general): raU_Z[  
(3).一次干燥(冷冻干燥)primary drying(freeze-drying): |+>U91!  
(4).二次干燥secondary drying: l m(mY$B*_  
2-2.(1).接触干燥contact drying: \b$Y_  
(2).辐射干燥 drying by radiation : l0g+OMt  
(3).微波干燥microwave drying: t -fmA?\  
(4).气相干燥vapor phase drying: && PZ;  
(5).静态干燥static drying: yT='V1  
(6).动态干燥dynamic drying: :C,}DyZy  
2-3干燥时间drying time: wqJl[~O$  
2-4停留时间length of stay(in the drying chamber): [~`p~@\+  
2-5循环时间cycle time: 5Nbq9YY  
2-6干燥率 dessication ratio : hb)C"q=  
2-7去湿速率mass flow rate of humidity: W{j(=<|<  
2-8单位面积去湿速率mass flow rate of humidity per surface area: ,^eOwWV  
2-9干燥速度 drying speed : s|TO9N)pO  
2-10干燥过程drying process: $'<$:;4b3  
2-11加热温度heating temperature: 8qxZ7|Y@  
2-12干燥温度temperature of the material being dried : :QXKG8^  
2-13干燥损失loss of material during the drying process : ;ZP!:,  
2-14飞尘lift off (particles): dNov= w  
2-15堆层厚度thickness of the material: Z$6B}cz<  
6KD-nr{S  
3.冷冻干燥 OIjG`~Rx  
3-1冷冻freezing: hFhC&2HN  
(1).静态冷冻static freezing: CLJn+Y2  
(2).动态冷冻dynamic freezing: fRkx ^u P  
(3).离心冷冻centrifugal freezing: 7-\wr^ll3  
(4).滚动冷冻shell freezing: 78?cCj{e  
(5).旋转冷冻spin-freezing: Wc;N;K52   
(6).真空旋转冷冻vacuum spin-freezing: @3FQMs4  
(7).喷雾冷冻spray freezing: 1|:;~9n<t  
(8).气流冷冻air blast freezing: u^WZsW  
3-2冷冻速率rate of freezing: ,6"[vb#*3  
3-3冷冻物料frozen material: SxcE@WM  
3-4冰核ice core: ;sz_W%-;@  
3-5干燥物料外壳envelope of dried matter: [MKt\(  
3-6升华表面sublimation front: 4E1j0ARQQ  
3-7融化位置freezer burn: -SzCeq(p%5  
G9K& }_,  
4.真空干燥设备;真空冷冻干燥设备 "1%k"+&  
4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: mS0;2x U  
4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: /BhP`a%2Q  
4-3加热表面heating surface: :/RvtmW  
4-4物品装载面shelf : AgUjC  
4-5干燥器的处理能力throughput (of the vacuum drying chamber): #c'}_s2F[  
4-6单位面积干燥器处理能力throughput per shelf area: w=0zVh_`(  
4-7冰冷凝器ice condenser: P*hYh5a  
4-8冰冷凝器的负载load of the ice condenser: h53G$Ol.  
4-9冰冷凝器的额定负载rated load of the ice condenser <dz_7hR"  
8.   1.一般术语 {>TAnb?n  
1-1试样sample : {Hv kn{{'  
(1).表面层surface layer: !vHCftKel  
(2).真实表面true surface: 7;?7q  
(3).有效表面积effective surface area: 2^U?Ztth6  
(4).宏观表面;几何表面macroscopic surface area; geometric surface area: (/t{z =  
(5).表面粒子密度surface particle density: LJt5?zQKrW  
(6).单分子层monolayer: f}?p Y"yvO  
(7).表面单分子层粒子密度monolayer density: V|{~9^  
(8).覆盖系数coverage ratio: qP=a:R-  
1-2激发excitation: 2|`Mb~E;  
(1).一次粒子primary particle:  BrZ17  
(2).一次粒子通量primary particle flux: l}#d^S/  
(3).一次粒子通量密度density of primary particle flux: ?}u][akM  
(4).一次粒子负荷primary particle load: Z 8GIZ  
(5).一次粒子积分负荷integral load of primary particle: ^?0?*  
(6).一次粒子的入射能量energy of the incident primary particle: RL/5 o"  
(7).激发体积excited volume: F#qc#s  
(8).激发面积excited area: FEBRUk6.h  
(9).激发深度excited death: oB '5':  
(10).二次粒子secondary particles: !!Yf>0u#  
(11).二次粒子通量secondary particle flux: ~i>'3j0@k  
(12).二次粒子发射能energy of the emitted secondary particles: ^nQJo"g\  
(13).发射体积emitting volume: )]m4FC:  
(14).发射面积emitting area: #ZHKq7  
(15).发射深度emitting depth: m}6>F0Kv  
(16).信息深度information depth: ZOx;]D"s  
(17).平均信息深度mean information depth: Z1 (!syg  
1-3入射角angle of incidence: 1WY$Vs  
1-4发射角angle of emission: X [?E{[@Z  
1-5观测角observation: \Z~ <jv  
1-6分析表面积analyzed surface area: LVL#qNIu  
1-7产额 yield : u(ETc* D]  
1-8表面层微小损伤分析minimum damage surface analysis: 9R&.$5[W(s  
1-9表面层无损伤分析non-destructive surface analysis: +hlR  
1-10断面深度分析 profile analysis in depth; depth profile analysis : VHL[Y  
1-11可观测面积observable area: A!$sO p  
1-12可观测立体角observable solid angle : gDX\ p>7  
1-13接受立体角;观测立体角angle of acceptance: /u"Iq8QA  
1-14角分辨能力angular resolving power: DnF|wS  
1-15发光度luminosity: ^{E_fQJX  
1-16二次粒子探测比detection ratio of secondary particles: V@1,((,l  
1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: ?b]f$ 2  
1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: cn9=wm\\  
1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: :`4LV  
1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: NpGz y`&b  
1-21本底压力base pressure: +>% AG&Pc  
1-22工作压力working pressure: T+!0`~`  
Ow-;WO_HQ  
2.分析方法 \,I{*!hw  
2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: mxwG~a'_  
(1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : oL9ELtb ]s  
(2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: 1O90 ]c0  
2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: qJXf c||Zg  
2-3离子散射表面分析ion scattering spectroscopy: iciRlx.$c  
2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: Z/;8eb*B7  
2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: ;*20b@  
2-6离子散射谱仪ion scattering spectrometer: %XXjQ5p  
2-7俄歇效应Auger process: q+lCA#Sx  
2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: Ti#x62X{  
2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus:  Y@b|/+  
2-10光电子谱术photoelectron spectroscopy : ~UsE"5  
(1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: QCfR2Nn}  
(2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: Jd33QL}Hj  
2-11光电子谱仪photoelectron spectrometer: 6(q8y(.`  
2-12低能电子衍射;LEED low energy electron diffraction ;LEED: W9A F}  
2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: }</"~Kw!  
2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): %V-Hy;V  
2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
zuiyuan 2007-03-13 15:13
太好了啊,多谢了啊
zhy980730 2007-03-14 11:39
多谢,了解点.
flyinlove79 2007-03-15 17:43
不错,多谢楼主分享资料 [s:4]
飞花无心 2007-03-26 09:33
很好,谢谢楼主啊
wottlin100 2007-04-02 09:19
呵呵,楼主辛苦啦!如果有定义解释更好!
xingmeng1227 2011-10-29 12:40
呵呵,楼主辛苦啦!
zh9607109 2011-11-03 05:41
呵呵,楼主辛苦啦!
wym87 2011-11-13 23:18
谢谢楼主的分享!Thanks!
douyongming 2012-06-17 17:03
太好了啊,多谢了啊
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