用于光波导耦合的倾斜光栅的分析
摘要 <p)Z/
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因为倾斜光栅在特定衍射级中具有高效率，故通常被用于将光耦合到光学光波导中。 如今，它们经常应用于增强和混合现实应用中。 本案将展示如何使用VirtualLab Fusion对文献中的某些倾斜光栅的几何形状，具体参数如倾斜角度，填充因子和调制深度进行分析。 此外，本案例还研究了不同入射角对衍射效率的影响。 4
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[attachment=91444] 衍射效率与相对深度 bHJoEYY^
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在VirtualLab Fusion中通过傅里叶模态法（FMM）（也称为RCWA）进行仿真。 W[GQ[h
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参考文献：J. Michael Miller, Nicole de Beaucoudrey, Pierre Chavel, Jari Turunen, and Edmond a! ?.F_T9A
Cambril, "Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection," Appl. Opt. 36, 5717-5727 (1997) WT?b Bf
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衍射效率与倾斜角度 EFwL.'Fh
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参考文献：J. Michael Miller, Nicole de Beaucoudrey, Pierre Chavel, Jari Turunen, and Edmond Cambril, "Design and fabrication of binary slanted surface-relief gratings for a planar optical interconnection," Appl. Opt. 36, 5717-5727 (1997) Gj5>Y!9
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[attachment=91450] 在VirtualLab Fusion中通过傅里叶模态法（FMM）（也称为RCWA）进行仿真。 ^ A- sS~w
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参考文献：J. Michael Miller, Nicole de Beaucoudrey, Pierre Chavel, Jari Turunen, and Edmond /<6ywLD
Cambril, "Design and fabrication of binaryslanted surface-relief gratings for a planar optical interconnection," Appl. Opt. 36, 5717-5727 (1997). zdqnL^wb
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衍射效率与变化的入射角 &7fY_~ )B
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[attachment=91452] 光栅衍射效率通常受入射角影响较大。 T ^N L:78
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走进VirtualLab Fusion ,7t3>9 -M"
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[attachment=91453] VirtualLab Fusion中的工作流程 D9,e3.?p
•光波导耦合光栅结构的配置 qP qy4V. ;
- 倾斜光栅的高级配置 O 1|B3M[P
Advanced Configuration of Slanted Grating ;v%Q8
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- 使用特殊介质配置光栅结构 wInY7u Bd!
Configuration of Grating Structures by Using Special Media Zo'/^S
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- 使用接口配置光栅结构 lD9%xCo9(
Configuration of Grating Structures by Using Interfaces g&q]@m
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•分析耦合光栅衍射效率 -g9^0V`G
- 用于光导耦合光栅评估的自定义探测器 ss/h[4h4h
Customized Detector for Lightguide Coupling Grating Evaluation lfXH7jL2~
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•通过扫描特定参数来检查效率
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VirtualLab Fusion 技术 >'eB2
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更多阅览 - Customized Detector for Lightguide Coupling Grating Evaluation 3fm;r5
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（来源：讯技光电）
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